A display device, a manufacturing method thereof, a display panel, and a display apparatus
By embedding the source and drain electrodes into the grooves on the upper surface of the first planarization layer of the OLED display device, the color shift problem caused by the microcavity resonance effect is solved, improving the visual user experience of the display device and reducing manufacturing costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BOE TECHNOLOGY GROUP CO LTD
- Filing Date
- 2023-02-01
- Publication Date
- 2026-06-19
AI Technical Summary
Color shift issues caused by microcavity resonance in OLED displays affect the user's visual experience.
The source and drain electrodes are embedded in the groove on the upper surface of the first planarization layer to avoid bulging, improve the flatness of the first electrode, keep the cavity length of the microcavity within a stable range, and improve the color shift phenomenon.
It improves the color shift phenomenon of the display screen, enhances the user's visual experience, and reduces manufacturing costs by reducing the amount of materials used, which helps to make the display device thinner and lighter.
Smart Images

Figure CN116171065B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of display device technology, and in particular to a display device, a method for manufacturing a display device, a display panel, and a display apparatus. Background Technology
[0002] Organic Light Emitting Diode (OLED) displays offer advantages such as self-illumination, high brightness, and low blue light emission. The light-emitting mechanism of OLEDs involves injecting holes into the anode and electrons into the cathode; these electrons then meet in the organic layer via the transport layer to generate light. The space between the anode and cathode is typically called a microcavity. When the light reflected from the anode and the emitted light have the same reflection angle and phase within the microcavity, interference occurs, increasing light intensity. When light of different wavelengths interferes, the resulting light color changes, leading to color shift. Due to the microcavity resonance effect, the wavelength of the emitted light is related to the width of the microcavity. When the width of the microcavity fluctuates, the color of the interference-generated light also changes, resulting in color shift on the screen. Limited color shift is acceptable for OLED products, but severe color shift will be noticeable to the human eye, significantly reducing the user's visual experience. Summary of the Invention
[0003] This application provides a display device, a method for manufacturing the display device, a display panel, and a display apparatus, aiming to improve the color deviation problem of the display device.
[0004] In one aspect, embodiments of this application provide a display device, including: a first planarization layer with a groove on its upper surface, a source / drain electrode embedded in the groove, and a first electrode located on the first planarization layer;
[0005] Wherein, the orthographic projection of the first electrode on the first planarization layer overlaps with the source and drain electrodes, and the first electrode is electrically connected to the source and drain electrodes.
[0006] Optionally, the upper surfaces of the source and drain electrodes are flush with the upper surface of the first planarization layer.
[0007] Optionally, the thickness of the source and drain electrodes is less than the depth of the groove.
[0008] Optionally, the first planarization layer has a first via, and the channel of the first via extends along the normal direction of the first planarization layer;
[0009] The first via is connected to the groove on the upper side of the first planarization layer, so that the source and drain electrodes extend into the first via.
[0010] Optionally, it further includes: a second planarization layer above the first planarization layer; wherein the first electrode is located above the second planarization layer.
[0011] Optionally, the second planarization layer has a second via, the channel of the second via extending along the normal direction of the second planarization layer;
[0012] The second via communicates with the groove on the lower side of the second planarization layer, so that the first electrode extends to the communication point between the second via and the groove and is electrically connected to the source and drain electrodes.
[0013] Optionally, the orthographic projection of the second via on the first planarization layer overlaps with the first via;
[0014] The connection between the groove and the first through hole on the upper side of the first flat layer is directly opposite the connection between the second through hole and the groove on the lower side of the second flat layer.
[0015] Optionally, it further includes: an insulating layer located below the first planarization layer; the insulating layer has a third via, the channel of the third via extending along the normal direction of the insulating layer;
[0016] The third via is connected to the first via, allowing the source and drain electrodes to extend into the third via through the first via.
[0017] Optionally, the groove includes: a first groove and a second groove;
[0018] The source and drain electrodes include: a first source and drain electrode embedded in the first groove and a second source and drain electrode embedded in the second groove;
[0019] The first source / drain and the second source / drain are used to transmit different signals.
[0020] Optionally, the first source-drain terminal is used to transmit the VDD signal, and the second source-drain terminal is used to transmit the VDATA signal.
[0021] Optionally, the ratio between the depth of the groove and the thickness of the first flat layer is any value between 40% and 45%.
[0022] Compared with the prior art, the display device provided in this application has the following advantages:
[0023] (1) In this embodiment, the source and drain electrodes 15 are embedded in the groove on the upper surface of the first planarization layer 12 to avoid the upper surface of the first planarization layer 12 from bulging due to the source and drain electrodes 15, thereby improving the flatness of the first electrode 16 above the first planarization layer 12. This allows the cavity length of the microcavity above the first electrode 16 to be kept within a stable range, and the wavelength of the light emitted by the microcavity resonance effect can also be within a stable range, improving the color shift phenomenon of the display screen and enhancing the user's visual experience of the display device.
[0024] (2) In this embodiment, the source and drain electrode 15 is embedded in the groove on the upper surface of the first planarization layer. Due to the structural limitation of the sidewall of the groove, it is beneficial to the preparation of the source and drain electrode and to ensure that the line width of the source and drain electrode traces is more uniform, which is beneficial to ensuring the stability of the function of the display device.
[0025] (3) In this embodiment, the source and drain electrodes 15 are embedded in the groove on the upper surface of the first planarization layer. It is not necessary to rely solely on the extensibility of the planarization layer during the manufacturing process to cover the structural thickness of the source and drain electrodes. This effectively reduces the thickness of the first planarization layer and / or the second planarization layer, thereby reducing the overall manufacturing cost of the display device by reducing the use of materials and helping to achieve a thinner and lighter design of the display device.
[0026] Compared with the prior art, the method for fabricating the display device provided in this application has the following advantages:
[0027] (1) The display device obtained by this preparation method has all the advantages of the display device in any of the above embodiments.
[0028] (2) The preparation method utilizes the groove on the upper surface of the first planarization layer to obtain the source and drain electrodes. By embedding the source and drain electrodes into the groove on the upper surface of the first planarization layer, the upper surface of the first planarization layer is prevented from bulging due to the source and drain electrodes, thereby improving the flatness of the first electrode above the first planarization layer, improving the color shift phenomenon of the display screen, and enhancing the user's visual experience of the display device.
[0029] In another aspect, embodiments of this application also provide a display panel, including the display device described in any of the foregoing embodiments or a display device prepared using the methods of any of the foregoing embodiments.
[0030] The display panel provided in this application embodiment includes the display device in the above embodiment and also has all the advantages of the above display device.
[0031] In another aspect, embodiments of this application also provide a display device, including: a display panel, the display panel including the display device described in any of the above embodiments or a display device prepared using the method of any of the above embodiments.
[0032] The display device provided in this application includes the display device in the above embodiments and also has all the advantages of the above display device. Attached Figure Description
[0033] The accompanying drawings are for reference and illustration only and are not intended to limit the scope of protection of this application. The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.
[0034] Figure 1 This diagram illustrates a structural schematic of a source / drain electrode and an anode surface provided by related technologies;
[0035] Figure 2 A schematic diagram illustrating the principle of a microcavity resonance effect provided by related technologies is shown.
[0036] Figure 3 A cross-sectional structural schematic diagram of a display device according to one embodiment of the present application is shown;
[0037] Figure 4 A flowchart illustrating the steps of a method for fabricating a display device according to one embodiment of this application is shown;
[0038] Figure 5 This illustration shows a cross-sectional structural diagram of the fabrication process of a display device according to one embodiment of the present application;
[0039] Figure 6 This illustration shows a cross-sectional structural diagram of the fabrication process of another display device according to one embodiment of the present application;
[0040] Figure 7 This illustration shows a cross-sectional structural diagram of the fabrication process of another display device according to one embodiment of the present application;
[0041] Figure 8 A cross-sectional structural schematic diagram of another display device according to one embodiment of the present application is shown.
[0042] Explanation of reference numerals in the attached figures:
[0043] 11. Insulating layer; 12. First planarization layer; 13. Second planarization layer; 14. Pixel definition layer; 15. Source / drain electrode; 16. First electrode; 17. Substrate assembly; 21. Initial source / drain layer. Detailed Implementation
[0044] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.
[0045] Reference Figure 1 , Figure 1 A schematic diagram of a source / drain electrode and anode surface provided by related technologies is shown. (Refer to...) Figure 2 , Figure 2 A schematic diagram illustrating the principle of a microcavity resonance effect provided by related technologies is shown. For example... Figure 1 and Figure 2 As shown, in OLED display devices, holes are injected through the anode and electrons are injected through the cathode. These two electrons meet in the organic layer via the transport layer, causing the organic material in the microcavity to emit light upon electrical stimulation. To drive the OLED transistors, various electrodes, including anodes and source / drain electrodes, are required. Due to space limitations, the anode can only be located above the source / drain electrodes. Therefore, the display device provides source / drain electrodes below the microcavity and electrodes on the top and bottom sides of the light-emitting material within the microcavity to support the electrical functions. Although a planarization layer can be placed between the source / drain electrodes and the anode, this layer cannot completely smooth out the presence of the source / drain electrodes. The anode above the source / drain electrodes will always have some bulge, preventing the upper surface of the anode above the source / drain electrodes from being flush with the upper surfaces of the surrounding anodes.
[0046] like Figure 2 As shown, the anode in the microcavity is a total internal reflection electrode, and the cathode is a semi-transparent, semi-emitting electrode. The cathode can include materials such as gold, magnesium, and silver. When the anode and cathode are energized, the organic light-emitting material in the microcavity between them is excited to emit light. Photons are reflected by the anode, and the light reflected from the anode and the light emitted from the organic light-emitting material exhibit a microcavity resonance effect. When they have the same reflection angle and phase, interference occurs, increasing the light intensity. The inventors discovered that the wavelength of the emitted light in the microcavity resonance effect has the following relationship with the cavity length:
[0047] L=K(λK / 2) (1)
[0048] Where L is the cavity length of the microcavity, λK is the wavelength of the emitted light, and K = 1, 2, 3...
[0049] Based on the above relationships, and referring to... Figure 2As can be seen, the cavity length is one of the factors affecting the wavelength λ of light. Different microcavity lengths will cause interference of light of different wavelengths, and when light of different wavelengths interferes, the color of the resulting light will change. Therefore, when the flatness of the anode surface is low, the cavity length of the microcavity cannot be kept within a stable range, thus forming interference of light of different wavelengths, causing color shift in the OLED display screen, and affecting the user's visual experience.
[0050] The inventors also discovered that even when the anode is fabricated on a planarization layer, various factors can still lead to low anode flatness, resulting in inconsistent cavity heights and thus color shift on the screen. One important reason is that the source and drain electrodes beneath the anode cause bulges in the planarization layer. Even when the planarization layer covers the source and drain electrodes, it cannot completely smooth out these bulges, resulting in low anode flatness and uneven cavity lengths, which exacerbates the color shift phenomenon.
[0051] In view of this, to improve color shift, this application proposes a display device, a method for fabricating a display device, a display panel, and a display apparatus. The source and drain electrodes are embedded in grooves on the upper surface of a first planarization layer to prevent bulging of the upper surface of the first planarization layer due to the source and drain electrodes. This improves the flatness of the first electrode above the first planarization layer, thereby allowing the cavity length of the microcavity above the first electrode to remain within a stable range. Consequently, the wavelength of the light emitted by the microcavity resonance effect also remains within a stable range, improving color shift on the display screen and enhancing the user's visual experience of the display device.
[0052] The embodiments of this application will now be described with reference to the accompanying drawings.
[0053] Reference Figure 3 , Figure 3 A cross-sectional structural schematic diagram of a display device according to one embodiment of this application is shown. For example... Figure 3 As shown, in order to improve the color shift of the OLED display device caused by the low flatness of the first electrode 16, this application embodiment provides a display device, including:
[0054] The first planarization layer 12 has a groove on its upper surface, the source and drain electrodes 15 are embedded in the groove, and the first electrode 16 is located on the first planarization layer 12.
[0055] The groove is located on the plane of the first flat layer and can be set to a corresponding pattern shape according to the routing shape of the source and drain electrodes 15.
[0056] On the one hand, it is necessary to ensure the functionality of the source and drain electrodes, and on the other hand, it is necessary to make the source and drain electrode routing as efficient as possible. To this end, in some optional embodiments, on the plane where the first planarization layer is located, the distance between two adjacent grooves can be any value between 2.5 micrometers and 3.5 micrometers, which can prevent the source and drain electrodes from sticking together and improve the routing efficiency of the source and drain electrodes.
[0057] The width of the groove can be the same as the width of the source and drain electrodes.
[0058] For example, the width of the source and drain electrodes can be any value from 3.5 micrometers to 4.5 micrometers.
[0059] Specifically, the display device in this application embodiment can be applied to the field of AMOLED flexible display.
[0060] The first electrode 16 can be an anode electrode, which is positioned opposite to the cathode electrode. The anode electrode and the cathode electrode are located on both sides of the organic light-emitting material, and can be used to realize the electrical excitation of the organic light-emitting material.
[0061] Specifically, the first flattening layer 12 can be the first pixel flattening layer PLN1, which is obtained through a half tone process, and therefore can be simply referred to as HPLN1.
[0062] In some alternative embodiments, the thickness of the first planarization layer can be any value between 1.45 micrometers and 1.75 micrometers.
[0063] In this embodiment, the source and drain 15 (SD) can be one of two source and drain layers. Relative to the first source and drain layer, the source and drain 15 in this embodiment can be an integrated electrode of the source and drain electrodes implemented in the second layer, and therefore can be simply referred to as SD2.
[0064] In some alternative embodiments, the sidewalls of the groove may be perpendicular to the plane containing the first flat layer.
[0065] Considering the limitations of current processing equipment and processes, and in order to facilitate the fabrication of the source / drain electrodes 15 and to achieve the electrical functions of the display device through stable and continuous source / drain electrode wires, in some alternative embodiments, the bottom of the groove may be narrower than the opening of the groove, thereby forming a trapezoidal pattern in the cross-sectional junction with the upper base longer than the lower base.
[0066] The above embodiments, by embedding the source / drain electrodes 15 into the grooves on the upper surface of the first planarization layer 12, can at least partially reduce the bulges of the first planarization layer and partially solve the flatness problem of the first electrode 16. To further improve the flatness of the upper surface of the first electrode 16 by completely eliminating bulges in the plane where the first electrode 16 is located, the upper surface of the first planarization layer 12 needs to maintain maximum flatness when combined with the source / drain electrodes 15. Therefore, in an optional embodiment, the upper surface of the source / drain electrodes 15 is flush with the upper surface of the first planarization layer 12. The thickness of the groove can be the same as the thickness of the source / drain electrodes.
[0067] For example, the depth of the groove or the thickness of the source and drain electrodes can be any value from 0.4 micrometers to 0.8 micrometers.
[0068] If the source and drain electrodes do not completely fill the groove, a pit will be formed on the upper surface of the first planarization layer. A second planarization layer can be used to cover the pit on the upper surface of the first planarization layer, thus ensuring the flatness of the upper surface of the first electrode. Therefore, in another optional embodiment, the thickness of the source and drain electrodes is less than the depth of the groove.
[0069] Furthermore, in some optional embodiments, the ratio of the source / drain thickness to the groove depth can be any value between 70% and 90%. For example, the ratio of the source / drain thickness to the groove depth can be 80%.
[0070] The first electrode 16 has its orthographic projection on the first planarization layer 12 overlapping with the source and drain electrode 15, and the first electrode 16 is electrically connected to the source and drain electrode 15.
[0071] Specifically, the first electrode 16 and the source / drain electrode 15 can be electrically connected by physical contact at a preset target location. This preset target location can be a node location in the top cross-sectional structure of the display device where the transistor electrode traces of the display device are used to achieve circuit connection.
[0072] Specifically, a second electrode may be included above the first electrode 16, and a microcavity may be formed between the first electrode 16 and the second electrode. The microcavity may also include an organic light-emitting layer, and the light emitted by the organic light-emitting layer can be reflected by the first electrode 16 below the microcavity.
[0073] The first electrode 16 can be a total reflection electrode, and the second electrode can be a semi-transparent and semi-emitting electrode.
[0074] Through the above embodiments, this application has the following advantages over the prior art:
[0075] (1) In this embodiment, the source and drain electrodes 15 are embedded in the groove on the upper surface of the first planarization layer 12 to avoid the upper surface of the first planarization layer 12 from bulging due to the source and drain electrodes 15, thereby improving the flatness of the first electrode 16 above the first planarization layer 12. This allows the cavity length of the microcavity above the first electrode 16 to be kept within a stable range, and the wavelength of the light emitted by the microcavity resonance effect can also be within a stable range, improving the color shift phenomenon of the display screen and enhancing the user's visual experience of the display device.
[0076] (2) In this embodiment, the source and drain electrode 15 is embedded in the groove on the upper surface of the first planarization layer. Due to the structural limitation of the sidewall of the groove, it is beneficial to the preparation of the source and drain electrode and to ensure that the line width of the source and drain electrode traces is more uniform, which is beneficial to ensuring the stability of the function of the display device.
[0077] (3) In this embodiment, the source and drain electrodes 15 are embedded in the groove on the upper surface of the first planarization layer. It is not necessary to rely solely on the extensibility of the planarization layer during the manufacturing process to cover the structural thickness of the source and drain electrodes. This effectively reduces the thickness of the first planarization layer and / or the second planarization layer, thereby reducing the overall manufacturing cost of the display device by reducing the use of materials and helping to achieve a thinner and lighter design of the display device.
[0078] Through the above embodiments, there are no obvious protrusions on the upper surface of the first planarization layer 12, thereby directly improving the flatness of the upper surface of the first electrode 16 above the source and drain electrodes 15.
[0079] Reference Figure 8 , Figure 8 A cross-sectional structural schematic diagram of another display device according to one embodiment of this application is shown. For example... Figure 8 As shown, in order to facilitate the connection of the source and drain 15 to complete the functional circuit, in an optional embodiment, this application also provides a display device, wherein a first via is provided on the first planarization layer 12, and the channel of the first via extends along the normal direction of the first planarization layer 12.
[0080] The first via is connected to the groove on the upper side of the first planarization layer 12, so that the source and drain electrodes 15 extend into the first via.
[0081] In one alternative embodiment, in order to facilitate the fabrication of the source / drain electrode 15 in the first via, achieve smooth extension of the source / drain electrode 15, and realize the electrical connection between the first electrode 16 and the source / drain electrode 15, the aperture of the first via can be gradually reduced from top to bottom.
[0082] Specifically, the first via can penetrate the first planarization layer 12. The first via can be a hole exposed and developed in the same Half Tone process flow as the groove, used for connection with the underlying circuitry. The Half Tone process can be a mask process that is not fully transparent.
[0083] To facilitate the circuit routing of the first electrode 16 and the source / drain electrode 15, in an optional embodiment, this application also provides a display device, which further includes: a second planarization layer 13 above the first planarization layer 12; wherein the first electrode 16 is located above the second planarization layer 13.
[0084] The second planarization layer 13 can be insulating, enabling the circuit routing of the first electrode 16 and the source / drain electrode 15. Furthermore, the second planarization layer 13 can further improve the flatness of the first electrode 16 thereon.
[0085] Specifically, the second flattening layer 13 can be the second pixel flattening layer PLN2, which is obtained through a half tone process and can therefore be simply referred to as HPLN2.
[0086] In embodiments of this application, the thickness of the second planarization layer may be the same as or similar to the thickness of the first planarization layer. In some optional embodiments, the thickness of the second planarization layer may also be any value between 1.45 micrometers and 1.75 micrometers.
[0087] Since the source and drain electrodes are embedded in the grooves on the upper surface of the first planarization layer in this embodiment, it is not necessary to rely solely on the ductility of the planarization layer during the manufacturing process to cover the structural thickness of the source and drain electrodes, thus effectively reducing the thickness of the planarization layer.
[0088] Therefore, in some alternative embodiments, the thickness of the first planarization layer can be any value between 0.8 micrometers and 1.1 micrometers.
[0089] Accordingly, the thickness of the second planarization layer can be any value between 0.8 micrometers and 1.1 micrometers.
[0090] The above embodiments can effectively reduce the thickness of the first planarization layer and / or the second planarization layer, thereby reducing the overall manufacturing cost of the display device by reducing the use of materials and helping to achieve a thinner and lighter design of the display device.
[0091] To improve the structural stability of the display device and reduce voids, in one alternative embodiment, the second planarization layer 13 may also extend into the first via to fill the unfilled voids in the source and drain electrodes 15.
[0092] Furthermore, the first electrode 16 and the source / drain electrode 15 can be electrically connected through a second via on the second planarization layer 13. Therefore, in an optional embodiment, this application also provides a display device wherein the second planarization layer 13 has a second via, the channel of which extends along the normal direction of the second planarization layer 13.
[0093] The second via communicates with the groove on the lower side of the second planarization layer 13, allowing the first electrode 16 to extend to the connection point between the second via and the groove, and to be electrically connected to the source and drain electrodes 15.
[0094] The second via can penetrate the second planarization layer 13. The second via can be a hole exposed and developed during the Half Tone process of the second planarization layer 13 for bonding with the first electrode 16.
[0095] The first via and the second via are connected at the same location, which facilitates the connection of other functional circuits. Therefore, in an optional embodiment, this application also provides a display device in which the orthographic projection of the second via on the first planarization layer 12 overlaps with the first via.
[0096] The groove and the first through hole are connected at the upper side of the first planarization layer 12, which is directly opposite the second through hole and the groove at the lower side of the second planarization layer 13.
[0097] In one alternative embodiment, in order to facilitate the fabrication of the first electrode 16 in the second via, achieve the smooth extension of the first electrode 16 and realize the electrical connection between the first electrode 16 and the source / drain electrode 15, the aperture of the second via can be gradually reduced from top to bottom.
[0098] The diameter of the third via can be smaller than that of the first via. Furthermore, the diameter of the first via can gradually decrease from top to bottom, and the diameter of the third via can gradually decrease from top to bottom, thereby achieving the connection and communication between the first and third vias, and thus achieving a smooth connection between the source and drain electrodes 15.
[0099] The display device can also achieve insulation protection through the insulating layer 11 (PVX). In an optional embodiment, this application also provides a display device, which further includes: an insulating layer 11 located below the first planarization layer 12; the insulating layer 11 has a third via, the channel of the third via extending along the normal direction of the insulating layer 11.
[0100] The third via is connected to the first via, allowing the source and drain electrodes 15 to extend into the third via through the first via.
[0101] Specifically, the display device can achieve electrical connections to other functional circuits through the third via.
[0102] The third via can penetrate the insulating layer 11. The third via can be a hole exposed and developed during the Half Tone process of the insulating layer 11 for connection with external circuitry.
[0103] To facilitate the extension of the source and drain 15, the diameter of the third via can be smaller than that of the first via. Furthermore, the diameter of the first via can gradually decrease from top to bottom, and the diameter of the third via can gradually decrease from top to bottom, thereby achieving the connection and communication between the first and third vias, and thus achieving a smooth connection between the source and drain 15 therein.
[0104] To achieve the light-emitting function of the display device, in one optional embodiment, the display device may further include: a light-emitting material above the first electrode 16, a second electrode above the light-emitting material, and a pixel define layer 14 (PDL) surrounding the light-emitting material. The first electrode 16 may be arranged in an array, and therefore the light-emitting material is also arranged in a corresponding array, thereby achieving array-arranged display light emission.
[0105] Specifically, the pixel definition layer 14 can be obtained through a half tone process, and therefore can also be simply referred to as HPDL.
[0106] The second electrode can be a cathode electrode.
[0107] A microcavity can be formed between the first electrode 16 and the second electrode. By applying current to the light-emitting material between the first electrode 16 and the second electrode, a microcavity resonance effect can be achieved in the microcavity.
[0108] The second electrode can be obtained by vapor deposition or encapsulation.
[0109] Specifically, luminescent materials can include a variety of different colors; for example, they can include red, blue, and green. White can also be included.
[0110] The orthographic projection of the pixel definition layer 14 onto the first flat layer 12 can overlap with the orthographic projection of the first electrode 16 onto the first flat layer 12.
[0111] In an alternative embodiment, the display device may further include a plate stage (PS) located on the second planarization layer 13.
[0112] The orthographic projection of the substrate machine 17 on the first planarization layer 12 can overlap with the orthographic projection of the first electrode 16 on the first planarization layer 12.
[0113] This application also considers providing two source-drain electrodes for different signal transmissions to achieve a display device with richer functionality. Therefore, in an optional embodiment, this application also provides a display device wherein the recess includes: a first recess and a second recess.
[0114] The thickness or width of the first groove and the second groove can be the same or similar.
[0115] Specifically, the thickness of the first groove can be any value from 0.9 times to 1.1 times the thickness of the second groove, and the width of the first groove can be any value from 0.9 times to 1.1 times the width of the second groove.
[0116] Accordingly, the source and drain electrodes include: a first source and drain electrode embedded in the first groove and a second source and drain electrode embedded in the second groove.
[0117] The first and second source-drain electrodes can be routed independently through the separation of the first and second grooves. The first and second source-drain electrodes are used to transmit different signals.
[0118] In some alternative embodiments, the first source-drain is used to transmit the VDD signal, and the second source-drain is used to transmit the VDATA signal.
[0119] A relatively large groove depth can effectively fill the source and drain electrodes and ensure the continuity of the source and drain electrodes within the groove, thereby guaranteeing the electrical functionality of the display device. Therefore, in some optional embodiments, this application also provides a display device wherein the ratio between the depth of the groove and the thickness of the first planarization layer is any value between 40% and 45%.
[0120] Furthermore, the ratio between the depth of the groove and the thickness of the first planarization layer can be 45%. For example, the thickness of the first planarization layer can be 1 micrometer, and the depth of the groove can be 0.45 micrometers.
[0121] Reference Figure 4 , Figure 4 A flowchart illustrating the steps of a method for fabricating a display device according to one embodiment of this application is shown. Figure 4 As shown, based on the same inventive concept, this application also provides a method for fabricating a display device, comprising:
[0122] Step S601: Obtain the first flat layer 12 with grooves on the upper surface.
[0123] Reference Figure 5 , Figure 5 This illustration shows a cross-sectional structural diagram of the fabrication process of a display device according to one embodiment of this application. Figure 5 As shown, a first planarization layer 12 can be prepared on the insulating layer 11.
[0124] The grooves on the upper surface of the first planarization layer 12 can be obtained by etching.
[0125] In an alternative implementation, the first planarization layer 12 can be obtained by providing an HPLN1 process, and the source-drain electrode 15 wiring positions can be exposed and developed in advance using a Half Tone process in the HPLN1 process to form a groove with a shape corresponding to the source-drain electrode 15 wiring pattern.
[0126] In one alternative implementation, while obtaining the groove, a first via can also be obtained at a preset position by exposure and development. The first via can penetrate the first planarization layer 12.
[0127] Step S602: Obtain the source and drain electrodes 15 embedded in the groove.
[0128] Among them, the source and drain electrodes 15 can be obtained by successively coating, applying adhesive, exposure and development and etching.
[0129] In step S603, a first electrode 16 is obtained on the first planarization layer 12.
[0130] The first electrode 16 has its orthographic projection on the first planarization layer 12 overlapping with the source and drain electrode 15, and the first electrode 16 is electrically connected to the source and drain electrode 15.
[0131] Through the above embodiments, in the HPLN1 process for obtaining the first planarization layer 12, the routing positions of the source / drain electrode 15 can be exposed and developed in advance using the Half Tone process, forming a groove and a first via connecting to the lower circuit. Then, the SD2 coating, resist coating, exposure and development, and etching are performed directly according to conventional processes. In this way, the routing of the source / drain electrode 15 will be directly embedded into the film layer of the first planarization layer 12. Through the embodiments of this application, it is possible to embed the source / drain electrode 15 into the first planarization layer 12 without changing the existing process conditions, including without significantly changing the process flow or introducing new process equipment. Only the mask pattern design and transmittance of the upper surface of the first planarization layer 12 need to be changed, thereby improving the flatness of the first electrode 16 and thus achieving the purpose of improving color shift.
[0132] In an optional implementation, this application also provides a method for obtaining the source / drain 15, comprising:
[0133] In step S701, an initial source / drain layer 21 is obtained above the first flattening layer 12 and within the groove.
[0134] Reference Figure 6 , Figure 6This illustration shows a cross-sectional structural diagram of the fabrication process of another display device according to one embodiment of this application. (See diagram below.) Figure 6 As shown, the initial source / drain layer 21 can also be embedded in the first via and the third via.
[0135] Step S702: Remove the initial source / drain layer 21 above the opening plane of the groove to obtain the source / drain electrode 15 embedded in the groove.
[0136] Reference Figure 7 , Figure 7 This illustration shows a cross-sectional structural diagram of the fabrication process of another display device according to one embodiment of this application. (See diagram below.) Figure 7 As shown, the source and drain electrodes 15 can also be embedded in the first via and the third via.
[0137] In another aspect, embodiments of this application also provide a display panel, including the display device described in any of the foregoing embodiments or a display device prepared using the methods of any of the foregoing embodiments.
[0138] In another aspect, embodiments of this application also provide a display device, including: a display panel, the display panel including the display device described in any of the above embodiments or a display device prepared using the method of any of the above embodiments.
[0139] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.
[0140] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.
[0141] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0142] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0143] In this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes that element.
[0144] Finally, it should be noted that specific examples have been used in this document to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the technical solutions and core ideas of this application. Although preferred embodiments of this application have been described, those skilled in the art, once they understand the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of this application.
Claims
1. A display device, characterized in that, include: A first planar layer with a groove on its upper surface, a source / drain electrode embedded in the groove, and a first electrode located on the first planar layer; Wherein, the orthographic projection of the first electrode on the first planarization layer overlaps with the source and drain electrodes, and the first electrode is electrically connected to the source and drain electrodes; the first planarization layer is a first pixel planarization layer, obtained by halftone process; the first planarization layer has a first via, and the aperture of the first via gradually decreases from top to bottom; The bottom of the groove is narrower than the top of the groove; the thickness of the source / drain electrode is less than the depth of the groove, and the ratio of the thickness of the source / drain electrode to the depth of the groove is any value between 70% and 90%; the ratio between the depth of the groove and the thickness of the first planarization layer is any value between 40% and 45%.
2. A display device according to claim 1, characterised in that The first planarization layer has a first via, and the channel of the first via extends along the normal direction of the first planarization layer; The first via is connected to the groove on the upper side of the first planarization layer, so that the source and drain electrodes extend into the first via.
3. A display device according to claim 2, characterised in that Also includes: A second planarization layer above the first planarization layer; wherein the first electrode is located above the second planarization layer.
4. A display device according to claim 3, characterised in that The second planarization layer has a second via, and the channel of the second via extends along the normal direction of the second planarization layer; The second via communicates with the groove on the lower side of the second planarization layer, so that the first electrode extends to the communication point between the second via and the groove and is electrically connected to the source and drain electrodes.
5. A display device according to claim 4, characterised in that, The orthographic projection of the second via on the first planarization layer overlaps with the first via; The connection between the groove and the first through hole on the upper side of the first flat layer is directly opposite the connection between the second through hole and the groove on the lower side of the second flat layer.
6. A display device according to claim 2, characterised in that, Also includes: An insulating layer located beneath the first planarization layer; The insulating layer has a third via, and the channel of the third via extends along the normal direction of the insulating layer; The third via is connected to the first via, allowing the source and drain electrodes to extend into the third via through the first via.
7. The display device of claim 1, wherein, The groove includes: a first groove and a second groove; The source and drain electrodes include: a first source and drain electrode embedded in the first groove and a second source and drain electrode embedded in the second groove; The first source / drain and the second source / drain are used to transmit different signals.
8. A display device according to claim 7, characterised in that, The first source-drain is used to transmit the VDD signal, and the second source-drain is used to transmit the VDATA signal.
9. A method for producing a display device, characterized by include: A first flat layer with a groove on its upper surface is obtained. The first flat layer is a first pixel flat layer, which is obtained by a half-tone process. The first flat layer has a first via, and the diameter of the first via gradually decreases from top to bottom. The bottom of the groove is narrower than the top of the groove. A source / drain electrode is embedded in the groove, wherein the thickness of the source / drain electrode is less than the depth of the groove, and the ratio of the thickness of the source / drain electrode to the depth of the groove is any value between 70% and 90%; the ratio between the depth of the groove and the thickness of the first planarization layer is any value between 40% and 45%. A first electrode is obtained on the first planarization layer; Wherein, the orthographic projection of the first electrode on the first planarization layer overlaps with the source and drain electrodes, and the first electrode is electrically connected to the source and drain electrodes.
10. The method of producing a display device according to claim 9, wherein The step of obtaining the source and drain electrodes embedded in the groove includes: An initial source / drain layer is obtained above the first flat layer and within the groove; Remove the initial source / drain layer above the opening plane of the groove to obtain the source / drain electrode embedded in the groove.
11. A display panel, characterized in that, This includes the display device as described in any one of claims 1 to 8, or the display device prepared using the method as described in claim 9 or 10.
12. A display device comprising: include: The display panel includes a display device as described in any one of claims 1 to 8 or a display device prepared using the method as described in claim 9 or 10.