用于终点检测系统的可调式无色差准直器组件

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By using chromatic lenses and wide-band collimator components, the problem that optical systems in the prior art cannot effectively monitor the etching and deposition endpoints is solved, enabling precise optical characterization and quality control of substrate processing.

CN116171375BActive Publication Date: 2026-07-17APPLIED MATERIALS INC

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Patent Information

Authority / Receiving Office: CN · China
Patent Type: Patents(China)
Current Assignee / Owner: APPLIED MATERIALS INC
Filing Date: 2021-08-10
Publication Date: 2026-07-17

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Abstract

本文所公开的实现方式描述了一种准直器组件，所述准直器组件具有准直器壳，所述准直器壳包括接口，所述接口被配置为光学耦接至具有靶表面的处理腔室；以及端口，所述端口接收光纤以将属于第一(第二)波长范围的光的第一(第二)多个光谱分量传送到由准直器壳形成的壳体，以及至少部分位于由准直器壳形成的壳体内的无色差透镜，所述无色差透镜将光的第一(第二)多个光谱分量引导至靶表面上，以照射靶表面上的第一(第二)区域，其中第二区域大体上与第一区域相同。

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