Method and device for cleaning a transport vehicle and article transport apparatus comprising the same

Abstract

Provided are a method and apparatus for cleaning a transport vehicle, and an article transport apparatus including the same. The transport vehicle cleaning apparatus includes a housing configured to surround a travel track and a movement path of the transport vehicle, and to provide a cleaning space in which cleaning of the transport vehicle is performed; a fan unit provided at an upper portion of the housing and configured to form a descending airflow in the cleaning space; a gas injection unit provided at a ceiling inside the housing and configured to inject gas toward the transport vehicle; an exhaust unit provided at a lower portion of the housing and configured to suction and remove the gas supplied from the cleaning space and foreign matter removed from the transport vehicle, and to exhaust the cleaning space; and a frame cover configured to surround a frame inside the housing and configured to prevent particles flying from an upper portion of the transport vehicle from adhering to a lower portion of the transport vehicle. The transport vehicle cleaning apparatus forms a descending airflow inside the housing, and applies a double cover structure to prevent particles flying from above the transport vehicle from re-adhering to below the transport vehicle.

Description

Technical Field

[0001] This invention relates to a method and apparatus for cleaning transport vehicles that transport goods, and to goods transport equipment including the same. Background Technology

[0002] In the manufacturing processes of semiconductor devices or display devices, materials such as semiconductor wafers, semiconductor ribbons, glass substrates, and display panels can be transported using unmanned transport systems such as OHT (Overhead Hoist Transport) devices, RGV (Rail Guided Vehicle) devices, and AGV (Automatic Guided Vehicle) devices. In particular, the aforementioned transport devices may include transport vehicles configured to move along tracks set in the ceiling or floor of a cleanroom.

[0003] For example, in a cleanroom used for manufacturing semiconductor devices, a travel track for conveying materials can be installed on the ceiling, and multiple transport vehicles capable of moving along the travel track can be configured. The transport vehicles may include a travel module (e.g., an overhead crane) configured to move along the travel track and a lifting module connected below the travel module for conveying materials. The lifting module may include a handheld unit and a lifting unit for vertically moving the handheld unit, the handheld unit having a frame providing internal space and clamps for holding the materials. The handheld unit and the lifting unit may be configured within the internal space.

[0004] The transport vehicle may generate foreign objects such as particles during operation due to the drive wheels, which may adhere to the surface of the transport vehicle. In particular, the foreign objects may adhere to the inside or outside of the frame. When the transport vehicle is traveling with foreign objects adhering to its surface, the foreign objects may be scattered and contaminate the manufacturing line during operation. Summary of the Invention

[0005] Therefore, the present invention provides a method and apparatus for cleaning a transport vehicle that can prevent foreign objects flying from above the transport vehicle from re-attaching to the bottom, as well as an article transport device including the same.

[0006] The issues to be addressed are not limited to these; technicians can usually understand other unmentioned issues from the following notes.

[0007] According to one embodiment of the present invention, a conveyor vehicle cleaning device can be provided for cleaning a conveyor vehicle configured to move along a travel track for conveying articles and including a travel module and a frame connected below the travel module and having a receiving space for the articles. The conveyor vehicle cleaning device may include: a housing configured to surround the travel track and the movement path of the conveyor vehicle and provide a cleaning space for performing cleaning of the conveyor vehicle; a fan unit provided in the upper part of the housing and for forming a downward airflow in the cleaning space; a gas injection unit provided in the ceiling inside the housing and for injecting gas toward the conveyor vehicle; an exhaust unit provided in the lower part of the housing and for sucking and removing gas supplied from the cleaning space and foreign matter removed from the conveyor vehicle, and for venting the cleaning space; and a frame cover configured inside the housing to surround the frame and for preventing particles flying from the upper part of the conveyor vehicle from adhering to the lower part of the conveyor vehicle.

[0008] In one embodiment, the frame cover is configured as an open surface surrounding the frame and is manufactured to block the interior space of the frame from the cleaning space.

[0009] In one embodiment, the transport vehicle may stop at a predetermined position after entering the frame cover.

[0010] In one embodiment, the housing may include an entrance door for the transport vehicle to enter and an exit door for the transport vehicle to leave.

[0011] In one embodiment, a first sensor for sensing the entry of the transport vehicle may be provided in the entrance gate, and a second sensor for sensing the departure of the transport vehicle may be provided in the exit gate.

[0012] In one embodiment, the gas injection unit may include a plurality of nozzles.

[0013] In one embodiment, each of the nozzles may spray gas toward the surface of the driving module after the transport vehicle has stopped inside the housing.

[0014] In one embodiment, the gas may include an inert gas or dry, clean air.

[0015] According to an embodiment of the present invention, a method for cleaning a transport vehicle is provided for cleaning a transport vehicle configured to move along a travel track for transporting articles. The method may include: providing a downward airflow into a transport vehicle cleaning device for cleaning the transport vehicle; allowing the transport vehicle to enter the transport vehicle cleaning device; cleaning the transport vehicle; and allowing the transport vehicle to leave the transport vehicle cleaning device, the cleaning step including a process for protecting a frame included below the transport vehicle from particles.

[0016] In one embodiment, the transport vehicle cleaning method may further include: a step of sensing the transport vehicle approaching the transport vehicle cleaning device; and a step of sensing the transport vehicle leaving the transport vehicle cleaning device.

[0017] In one embodiment, the descending airflow supply step may be performed continuously throughout the entire process of the transport vehicle cleaning method.

[0018] In one embodiment, the vehicle cleaning step may include: an exhaust step of venting the interior of the vehicle cleaning device; a step of positioning the vehicle inside the frame cover; and a gas injection step of injecting gas into the vehicle located inside the frame cover.

[0019] In one embodiment, the venting step may be performed after the transport vehicle enters the transport vehicle cleaning device and continues until the transport vehicle leaves the transport vehicle cleaning device.

[0020] According to one embodiment of the present invention, an item conveying device may be provided, the item conveying device comprising: a travel track disposed on the roof side and providing a conveying path for conveying items; at least one item conveying vehicle comprising: a travel module and a lifting module, the travel module traveling along the travel track, the lifting module being coupled below the travel module and providing a frame for accommodating the items; and a conveying vehicle cleaning device configured adjacent to the travel track for performing cleaning of the item conveying vehicle and capable of preventing particles scattered from the travel module from re-attaching to the lifting module.

[0021] In one embodiment, the vehicle cleaning device may include: a housing configured to surround the travel track and the movement path of the vehicle and provide a cleaning space for performing cleaning of the vehicle; a fan unit disposed on the upper part of the housing and used to form a downward airflow in the cleaning space; a gas injection unit disposed on the roof of the housing and used to inject gas toward the vehicle; an exhaust unit disposed on the lower part of the housing and used to draw in and remove gas supplied from the cleaning space and foreign matter removed from the vehicle, and to exhaust the cleaning space; and a frame cover configured to surround an open surface of the frame inside the housing and capable of blocking the internal space of the frame from the cleaning space.

[0022] In one embodiment, the transport vehicle may stop at a predetermined position after entering the frame cover.

[0023] In one embodiment, the housing may include an entrance door for the transport vehicle to enter and an exit door for the transport vehicle to leave.

[0024] In one embodiment, a first sensor for sensing the entry of the transport vehicle is provided in the entrance gate, and a second sensor for sensing the departure of the transport vehicle is provided in the exit gate.

[0025] In one embodiment, the gas injection unit includes a plurality of nozzles.

[0026] Alternatively, each of the nozzles may spray gas toward the surface of the driving module after the transport vehicle stops.

[0027] In one embodiment, the fan unit may include a plurality of fans that supply airflow downwards to the cleaning space, the plurality of fans operating continuously.

[0028] According to an embodiment of the present invention, the transport vehicle cleaning device includes a frame cover surrounding the frame of the transport vehicle within a housing that provides a cleaning space. The frame cover blocks the frame surface and the internal space from the cleaning space, thereby preventing foreign matter such as particles scattered from the driving module above the transport vehicle from re-adhering to the frame below the transport vehicle and causing re-contamination.

[0029] In addition, by creating a downward airflow inside the cleaning space and exhausting the cleaning space through the exhaust unit below the cleaning space, foreign objects such as particles flying from the surface of the transport vehicle can be removed from the cleaning space more efficiently.

[0030] The effects of this invention are not limited thereto; other effects not mentioned can be clearly understood by a person skilled in the art from this specification and the accompanying drawings. Attached Figure Description

[0031] Figure 1 This is a schematic diagram showing the overall structure of an article conveying device according to an embodiment of the present invention.

[0032] Figure 2 as well as Figure 3 It is shown Figure 1 The front view and left view of the structure of the goods transport vehicle shown.

[0033] Figure 4 as well as Figure 5 It is shown Figure 1 The diagram shows the front view and left view of the structure of the vehicle washing device.

[0034] Figure 6 as well as Figure 7 It is shown Figure 4 as well as Figure 5 Left view and perspective view of a modified example of the conveyor vehicle cleaning device shown.

[0035] Figure 8 as well as Figure 9 This is a flowchart illustrating a cleaning method for a goods transport vehicle according to an embodiment of the present invention.

[0036] (Explanation of reference numerals in the attached diagram)

[0037] 10: Travel Track

[0038] 20: Conveyor vehicle

[0039] 100: Driving Module

[0040] 200: Lifting Module

[0041] 210: Framework

[0042] 40: Conveyor vehicle cleaning device

[0043] 41: Outer shell

[0044] 42: Fan unit

[0045] 43: Gas injection unit

[0046] 44: Exhaust unit

[0047] 45: Frame cover Detailed Implementation

[0048] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art to which this invention pertains can readily implement it. However, the present invention can be implemented in various different forms and is not limited to the embodiments described herein.

[0049] In the description of embodiments of the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the spirit of the present invention, such detailed description is omitted, and parts that perform similar functions and effects are referred to by the same symbols throughout the drawings.

[0050] At least some of the terminology used in this specification is defined in consideration of the function in this invention, and may therefore vary depending on the user's, operator's, or customary practices. Therefore, the terminology should be interpreted in light of the entire specification. Furthermore, in this specification, when a description includes a constituent element, it means that other constituent elements may be included rather than excluded, unless specifically stated otherwise. And, when a description states that a part is connected (or combined) with other parts, it includes not only direct connection (or combination) but also indirect connection (or combination) between other parts.

[0051] On the other hand, for ease of understanding, the size or shape of the constituent elements, the thickness of the lines, etc., may be exaggerated to some extent in the accompanying drawings.

[0052] This invention can be primarily used in factories manufacturing semiconductors or flat panel displays (FPDs) to transport items from any location to a destination. For example, this invention can transport items between semiconductor (or flat panel display) manufacturing equipment. In this case, the items may include substrates (wafers, etc.). As an example, the items may be containers holding the substrates. Furthermore, the container may be a hermetically sealed container capable of protecting the contained substrates from external influences. And, the hermetically sealed container may be a front-opening unified pod (FOUP).

[0053] This invention can be used for transporting items in various technical fields, but embodiments of this invention are described primarily in the case of transporting front-opening wafer transfer boxes (hereinafter also referred to as FOUPs) containing wafers within their internal space between semiconductor manufacturing equipment in a semiconductor manufacturing plant.

[0054] A semiconductor manufacturing plant may consist of at least one clean room, and semiconductor manufacturing equipment that performs semiconductor manufacturing processes may be located within the clean room. Semiconductors are produced by repeatedly performing semiconductor manufacturing processes on wafers. Wafers that have completed their process execution in a specific semiconductor manufacturing facility can be transferred to another semiconductor manufacturing facility for the next process. In this case, the wafers can be transported in a FOUP (Front-Up Unit) configuration using a transport system including an OHT (Outlet Handling) device.

[0055] Figure 1The schematic diagram illustrates the overall structure, etc., of an article conveying device according to an embodiment of the present invention. Figure 1 In the accompanying drawings, reference numeral 1 shows multiple semiconductor manufacturing equipment arranged in a semiconductor manufacturing plant, reference numeral 10 shows a travel track providing a transport path 11 for conveying items, i.e., FOUPs, to semiconductor manufacturing equipment 1. Additionally, reference numeral 20 shows multiple item transport vehicles that move along the transport path 11 while simultaneously transporting items, and reference numeral 30 shows one or more buffers providing temporary storage space for the items. The travel track 10 is configured on the roof side of the semiconductor manufacturing plant. Item transport vehicles 20 can either directly transport items from specific equipment in semiconductor manufacturing equipment 1 to other equipment, or temporarily store items after buffer 30 before transporting them to other equipment. Buffer 30 can be a track-side buffer located beside the transport path 11 or a track-bottom buffer located below the transport path 11.

[0056] The article conveying device according to an embodiment of the present invention includes an OHT (Operating Header), which includes a travel track 10 and a plurality of article conveying vehicles 20. This article conveying device according to an embodiment of the present invention can be configured such that the article conveying vehicles 20 operate by receiving drive power from a power supply device via a power supply unit and a power receiving unit, and also includes an integrated control device for automatically operating the article conveying vehicles 20. Although not shown, the article conveying device may also include maintenance lifts, travel module lifts, test benches, and other equipment for maintaining and repairing the article conveying vehicles 20.

[0057] Reference Figure 1 The transport path 11 may include at least one straight section 12 of a straight shape, at least one curved section 13 of a curved shape, and at least one connecting section 14 for branching and / or merging of the path.

[0058] Figure 2 as well as Figure 3 This is a simplified diagram used to illustrate the structure of OHT.

[0059] Reference Figure 2 The travel track 10 includes a pair of track components spaced apart from each other in the left-right direction and mounted on the roof side of the semiconductor manufacturing plant via rail supports 15. Alternatively, the lower end of each rail support 15 may support the pair of track components, while the upper end is fixed to the roof of the semiconductor manufacturing plant. The pair of track components may be configured to provide a travel surface on the upper side.

[0060] Reference Figure 2 as well as Figure 3Each of the goods transport vehicles 20 includes a travel module 100 that travels along a travel track 10 and a lifting module 200 that supports the goods, i.e., FOUPs, below the travel module 100. The lifting module 200 moves together with the travel module 100 and supports the goods.

[0061] The driving module 100 includes a vehicle body 110 and wheels 120. An axle extending in the left-right direction is mounted on the vehicle body 110. Multiple axles can be provided and spaced apart from each other in the front-rear direction. The wheels 120 are driving wheels that give mobility to the vehicle body 110, enabling the vehicle body 110 to travel along the guide rails 10. The wheels 120 can be respectively mounted on both ends of the axles and respectively contact the driving surfaces of a pair of rails 11 to perform rolling motion. The driving module 100 also includes a wheel drive unit 130 that provides power for rotating the wheels 120. As an example, the wheel drive unit 130 can be configured to rotate the axles.

[0062] The lifting module 200 includes a frame 210. The frame 210 is connected to the travel module 100 from below the travel track 10. The upper part of the frame 210 can be connected to the lower part of the vehicle body 110 via one or more connectors. The frame 210 forms the appearance of the lifting module 200 and provides a receiving space 212 for accommodating items. The frame 210 is configured to be fully open on the left, right, and lower sides, allowing items to move laterally and vertically within the receiving space 212.

[0063] In addition, the lifting module 200 also includes a handheld unit 220 for gripping or not gripping an item, and a handheld movement unit for moving the handheld unit 220 between a first position and a second position. The first position is the position where the item gripped by the handheld unit 220 is accommodated in the accommodating space 212 of the frame 210, and the second position is the exterior of the frame 210 corresponding to the position where it disengages from this first position. The lifting module 200 includes a vertical drive unit 230, a rotation drive unit 240, and a horizontal drive unit 250, which serve as the handheld movement unit.

[0064] The handheld unit 220 may include a hand for gripping and not gripping an article, and a hand support for supporting the hand. A vertical drive unit 230 moves the handheld unit 220 vertically. The vertical drive unit 230 can move the handheld unit 220 vertically by winding or unwinding at least one belt relative to the drum. A rotation drive unit 240 rotates the handheld unit 220 about a vertical axis, and a horizontal drive unit 250 moves the handheld unit 220 horizontally. As an example, by moving the handheld unit 220 vertically by the vertical drive unit 230, rotating the vertical drive unit 230 about a vertical axis by the rotation drive unit 240, and moving the rotation drive unit 240 horizontally by the horizontal drive unit 250, it is possible to move a gripped article vertically, rotate it about a vertical axis, or move it horizontally by the handheld unit 220.

[0065] Figure 4 as well as Figure 5 These are schematic diagrams and enlarged schematic diagrams illustrating a conveyor vehicle cleaning apparatus 40 according to an embodiment of the present invention. For ease of explanation, some of the constituent elements of the conveyor vehicle 20 are shown in schematic form.

[0066] Reference Figure 4 as well as Figure 5 According to an embodiment of the present invention, the transport vehicle cleaning device 40 can be configured adjacent to the travel track 10 and used to clean the transport vehicle 20 described above.

[0067] The vehicle cleaning device 40 may include a housing 41, a fan unit 42, a gas injection unit 43, a conveying exhaust unit 44, and a frame cover 45.

[0068] The housing 41 provides a cleaning space for performing cleaning of the transport vehicle 20. The housing 41 can be fixed to the ceiling of the cleanroom and configured to surround the travel path 10 and the transport vehicle 20. That is, for cleaning purposes, the transport vehicle 20, moving along the travel path 10, can be configured to enter and exit. The housing 41 includes an entrance for the transport vehicle 20 to enter and an exit for the transport vehicle 20 to exit, and is provided with an entrance door 411 for opening the entrance and an exit door 412 for opening the exit.

[0069] After the entrance door 411 opens, the conveyor vehicle 20, moving along the travel track 10, enters the interior of the outer casing 41. Once the entry of the conveyor vehicle 20 is complete, the entrance door 411 closes. If the conveyor vehicle 20 stops at a preset position within the cleaning space, the cleaning process for the conveyor vehicle is executed. Once the cleaning process for the conveyor vehicle 20 is complete, the conveyor vehicle 20 travels again towards the exterior of the outer casing 41 after the exit door 412 opens. Once the departure of the conveyor vehicle 20 is complete, the exit door 412 closes.

[0070] Alternatively, a first sensor 413 for sensing the entry of the transport vehicle 20 can be provided in the entrance door 411, and a second sensor 414 for sensing the departure of the transport vehicle 20 can be provided in the exit door 412. The first sensor 413 can sense that the transport vehicle 20 is approaching the transport vehicle cleaning device 40. The second sensor 414 can sense that the transport vehicle 20 has finished leaving the transport vehicle cleaning device 40. Alternatively, the entrance door 411 can open by receiving a sensing signal from the first sensor 413 regarding the transport vehicle 20, and the exit door 412 can close by receiving a sensing signal from the second sensor 414 regarding the transport vehicle 20. Although not shown in detail, separate drive units for opening and closing the entrance door 411 and the exit door 412 can be provided.

[0071] On the other hand, the opening times of the entrance door 411 and the exit door 412 can be preset. The opening time of the doors can be set based on the conveying speed of the conveyor vehicle 20. In addition, the exit door 412 can be set to open after a certain period of time after the entrance door 411 is closed. Here, a certain period of time can be set by the device user as the required time for the cleaning process to be performed immediately after the entrance door 411 is closed. At this time, the starting point that serves as the reference for the required time can still be set by the device user. For example, the starting point of the required time can also be after the entrance door 411 opens. Alternatively, the starting point of the required time can also be the moment when the first sensor 413 senses the conveyor vehicle 20.

[0072] To create a downward airflow within the cleaning space, a fan unit 42 may be provided on the upper part of the housing 41. The fan unit 42 may include multiple fans supplying downward airflow to the cleaning space. Airflow into the housing 41 can be drawn into the fan unit 42 by the operation of the fans. The multiple fans may include impellers that generate airflow and sleeves for guiding the flow of air flowing from the impellers. The impeller may be a cylinder having multiple blades arranged at equal intervals on a rotating cylinder. The fan unit 42 may also include filters for removing contaminants that may flow in with the air. As an example, the filter may include a High Efficiency Particulate Air (HEPA) filter or an Ultra-Low Penetration Air (ULPA) filter. The filter may be provided above or below each fan. Alternatively, it may be provided both above and below each fan. The fan unit 42 can maintain downward airflow within the cleaning space by continuous operation.

[0073] A gas injection unit 43 can be provided in the roof of the housing 41 and injects gas toward the transport vehicle 20. The gas injection unit 43 may include multiple nozzles. Alternatively, it may be in the form of an air knife. The gas injection time and gas injection volume of the gas injection unit 43 can be preset and adjusted. The gas injection unit 43 can be located in the area where the transport vehicle 20 is parked and enters the housing 41.

[0074] As an example, the gas injection unit 43 can be provided in the ceiling inside the housing 41 with multiple gas flow paths arranged in columns along the direction of the travel track 10, and multiple nozzles arranged at certain intervals in each gas flow path. In this case, the multiple nozzles can be configured to face the area above the transport vehicle 20, i.e., the travel module 100, and arranged to spray gas onto the entire surface of the travel module 100 to the maximum extent. For example, the multiple nozzles can be arranged in a zigzag pattern.

[0075] As an example, the gas injection unit 43 can be provided with multiple air knives that are elongated along the arrangement direction of the travel track 10 in the roof of the housing 41. In this case, the gas injection direction of each air knife can be configured to face the area above the transport vehicle 20, i.e., the travel module 100.

[0076] The gas injected through the gas injection unit 43 can be dry gas (Clean Dry Air, CDA).

[0077] On the other hand, although not shown in detail, in order to improve cleaning efficiency, the gas jet unit 43 can be configured to be raised and lowered from the roof of the housing 41.

[0078] An exhaust unit 44 can be provided at the lower part of the housing 41 to exhaust the cleaning space. Although not shown in detail, the exhaust unit 44 includes an exhaust port and an exhaust pipe and is connected to a vacuum pump. The exhaust unit 44 can be disposed on the bottom surface of the housing 41, and the exhaust unit 44 draws in and removes the downdraft formed inside the housing 41, the gas supplied from the gas injection unit 43, and foreign matter removed from the transport vehicle 20. The exhaust unit 44 can operate from the time when the transport vehicle 20 completes its entry into the transport vehicle cleaning device 40 until the time when it completes its exit from the transport vehicle cleaning device 40. If a strong downdraft is formed by the simultaneous operation of the continuously operating fan unit 42 and the exhaust unit 44, foreign matter such as particles removed from the transport vehicle 20 can be directly removed by the exhaust unit 44, thereby preventing the scattering of foreign matter such as particles.

[0079] The frame cover 45 is disposed inside the housing 41 and prevents particles scattered from the driving module 100 from adhering to the frame 210 of the lifting module 200. The frame cover 45 can be configured to surround the open surface of the frame 210. The frame cover 45 can seal the open surface of the frame 210, thereby blocking the internal space of the frame 210 from the internal space of the housing 41. That is, the internal space of the frame 210 can be separated from the cleaning space. The size of the frame cover 45 can be formed to be slightly larger than the size of the frame 210. Specifically, when the transport vehicle 20 is fully inside the frame cover 45, the size of the frame cover 45 can be set to the minimum size in which the frame 210 does not contact the inner wall of the frame cover 45.

[0080] The transport vehicle 20, which enters the housing 41, can stop at a predetermined position within the housing 41, where the frame cover 45 can completely seal the open surface of the frame 210. That is, the transport vehicle 20 can stop at the predetermined position after it has fully entered the frame cover 45.

[0081] According to the frame cover 45, the gas injection unit 43 can prevent foreign objects such as particles separated from the driving module 100 from re-attaching to the lifting module 200.

[0082] In this invention, the frame cover 45 is illustrated only around the open area of ​​the frame 210, but the frame cover 45 may also be manufactured to surround the entire frame 210.

[0083] Figure 6 as well as Figure 7 It shows Figure 4 as well as Figure 5 The illustrated modification of the vehicle cleaning device. Figure 6 A side view of a conveyor vehicle cleaning apparatus according to a modified example is shown. Figure 7 The summary shows Figure 6A perspective view of a conveyor vehicle cleaning device. For ease of explanation, some components have been omitted or distorted.

[0084] Figure 6 as well as Figure 7 The conveyor vehicle cleaning device 40' shown is... Figure 4 as well as Figure 5 The difference between the conveyor vehicle cleaning device 40 shown is the number of conveyor vehicles 20 it can accommodate. That is, the conveyor vehicle cleaning device 40' can be configured to clean multiple conveyor vehicles 20 simultaneously. For example, the conveyor vehicle cleaning device 40' can be configured to clean two conveyor vehicles 20 simultaneously. Other components are the same as those of the conveyor vehicle cleaning device 40, so descriptions are omitted.

[0085] The conveyor vehicle cleaning device 40' can be identical in design to connect two previously described conveyor vehicle cleaning devices 40. The conveyor vehicle cleaning device 40' may include a first frame cover 451 and a second frame cover 452. The conveyor vehicle cleaning device 40' can clean two conveyor vehicles 20 simultaneously, thereby improving process efficiency.

[0086] On the other hand, Figure 6 as well as Figure 7 While the example provided shows that the exhaust unit of the vehicle cleaning device 40' has two exhaust ports, it could also be provided in the form of a single exhaust port.

[0087] The number of transport vehicles that the vehicle cleaning device can accommodate can be adjusted and manufactured.

[0088] Figure 8 as well as Figure 9 This is a flowchart illustrating a method for cleaning a transport vehicle according to an embodiment of the present invention. The method for cleaning a transport vehicle according to an embodiment of the present invention can be performed using the transport vehicle cleaning apparatus described above.

[0089] Reference Figure 8 According to an embodiment of the present invention, a method for cleaning a transport vehicle may include the steps of supplying a downward airflow into the transport vehicle cleaning device (S10), causing the transport vehicle to enter the transport vehicle cleaning device (S20), cleaning the transport vehicle (S30), and causing the transport vehicle to leave the transport vehicle cleaning device (S40).

[0090] The step of supplying downward airflow into the transport vehicle cleaning device (S10) can be performed by providing a fan unit 42 on the upper part of the transport vehicle cleaning device 40. Step S10 is a step maintained throughout the overall process of the transport vehicle cleaning method according to an embodiment of the present invention. That is, step S10 is continuously (frequently) performed throughout the overall process of the transport vehicle cleaning method.

[0091] The step (S20) of allowing the transport vehicle to enter the transport vehicle cleaning device may include a vehicle entry sensing step (S21), an entry door opening step (S22), a vehicle entry step (S23), and an entry door closing step (S24).

[0092] The vehicle entry sensing step (S21) is the step of sensing the approach of the transport vehicle 20 to the transport vehicle cleaning device 40 in order to enter the transport vehicle cleaning device 40.

[0093] The step of opening the entrance door (S22) is the step of opening the entrance door of the conveyor vehicle cleaning device 40.

[0094] The vehicle entry step (S23) is the step in which the transport vehicle 20 enters the cleaning space of the transport vehicle cleaning device 40.

[0095] The step of closing the entrance door (S24) is the step of closing the entrance door of the conveyor vehicle cleaning device 40 if the conveyor vehicle 20 has fully entered the cleaning space.

[0096] The duration of the entrance gate's open position can be adjusted based on the conveying speed of the conveyor vehicle 20.

[0097] The cleaning and conveying vehicle step (S30) can start the moment the conveying vehicle 20 closes the entrance door and includes the exhaust unit start step (S31), the vehicle positioning and parking step (S32), the gas injection unit start step (S33), the gas injection unit stop step (S34), the vehicle standby step (S35), the vehicle driving again step (S36), and the exhaust unit stop step (S37).

[0098] The exhaust unit activation step (S31) is the step of activating the exhaust unit 44 to begin exhausting the cleaning space. According to the exhaust unit activation step (S31), the exhaust unit 44 and the fan unit 42 can operate simultaneously from the moment the transport vehicle 20 completes its entry into the cleaning space, thereby forming a downward airflow inside the cleaning space.

[0099] The vehicle positioning and parking step (S32) is a step that stops the conveyor vehicle 20 in a preset position. The vehicle positioning and parking step (S32) can place the conveyor vehicle 20 inside the frame cover, thereby blocking the interior of the frame from the cleaning space. This protects the lower area of ​​the conveyor vehicle 20, i.e., the lifting module 200, from foreign objects such as particles flying from the travel module 100.

[0100] The gas injection unit start-up step (S33) is a step of activating the gas injection unit to perform gas injection toward the transport vehicle 20. The gas injection unit injects gas toward the surface of the travel module 100 of the transport vehicle 20 to remove foreign matter such as particles adhering to the travel module 100.

[0101] A gas injection unit stop step (S34) can be performed to interrupt the operation of the gas injection unit after a certain period of gas injection.

[0102] The vehicle standby step (S35) is a step in which foreign objects are completely removed from the cleaning space of the vehicle through the exhaust unit 44 after the operation of the gas injection unit is interrupted.

[0103] The vehicle restart step (S36) is a step performed if the foreign matter inside the cleaning space is completely removed, and it is a step to restart the parked transport vehicle.

[0104] The exhaust unit stop step (S37) is a step that stops the exhaust unit 44, which continues to operate during the vehicle cleaning step (S30).

[0105] The step (S40) of causing the transport vehicle to leave the outside of the transport vehicle cleaning device is a step for causing the transport vehicle that has completed the cleaning process to leave the outside of the transport vehicle cleaning device. The step (S40) of causing the transport vehicle to leave the outside of the transport vehicle cleaning device may include an opening exit door step (S41), a vehicle leaving step (S42), a sensing vehicle leaving step (S43), and a closing exit door step (S44).

[0106] The step of opening the exit door (S41) is to open the exit door of the transport vehicle cleaning device 40 so that the transport vehicle 20, which has completed the cleaning process, can leave the outside of the transport vehicle cleaning device.

[0107] The vehicle departure step (S42) is the step in which the transport vehicle 20 leaves the transport vehicle cleaning device 40 through the open exit door.

[0108] The vehicle departure sensing step (S43) is the step of sensing the completion of the departure process of the transport vehicle 20. It is possible to sense that the transport vehicle 20 has completely left the transport vehicle cleaning device 40.

[0109] The step of closing the exit door (S44) is to close the open exit door of the conveyor vehicle cleaning device. The time for which the exit door is kept open can be adjusted based on the conveying speed of the conveyor vehicle 20.

[0110] According to one embodiment of the present invention, the cleaning of the transport vehicle 20 can be performed periodically, and the cleaning cycle can be set. In addition, the detailed operation of the transport vehicle cleaning device 40 used for cleaning the transport vehicle 20 (cleaning time, door opening time, working time of each component, and time, etc.) can be set or adjusted by the user.

[0111] Furthermore, according to the embodiments of the present invention described above, since the cleaning of the transport vehicle 20 can be performed by a transport vehicle cleaning device 40 arranged adjacent to the travel track 10, the cleaning time required can be greatly reduced compared to the prior art using a separate lift. In particular, the cleaning of the transport vehicle 20 can be performed within a housing 41 that provides a cleaning space. Inside the housing 41, a frame cover 45 for protecting the lifting module 200 is provided, thereby preventing foreign objects such as particles scattered from the upper travel module 100 from re-attaching to the lower lifting module 200. In addition, the scattering of foreign objects such as particles is suppressed by forming a downward airflow inside the cleaning space by a fan unit 42 and an exhaust unit 44 provided at the upper part of the housing 41.

[0112] The above description is merely illustrative of the technical concept of the present invention. Those skilled in the art can make various modifications and variations without departing from the essential characteristics of the invention. Therefore, the embodiments described herein are for illustrating the scope of the technical concept and not for limiting it; the technical concept of the invention is not limited by such embodiments. The scope of protection of the present invention should be interpreted according to the appended claims, and all technical concepts within the same scope are included within the scope of the claims.

Claims

1. A conveyor vehicle cleaning device for cleaning a conveyor vehicle, the conveyor vehicle being configured to move along a travel track for conveying goods and including a travel module and a frame connected below the travel module and having a receiving space for the goods, wherein, The vehicle cleaning device includes: The outer shell is configured to surround the travel track and the movement path of the transport vehicle, and provides a cleaning space for performing cleaning of the transport vehicle; A fan unit is provided at the upper part of the housing and is used to form a downward airflow in the cleaning space; A gas injection unit is provided inside the housing, on the roof, and is used to inject gas toward the driving module; An exhaust unit, provided at the lower part of the housing, draws in and removes gas supplied from the cleaning space and foreign matter removed from the driving module, and exhausts gas from the cleaning space; and A frame cover, configured to surround the frame inside the outer shell, serves to prevent particles flying from the upper part of the transport vehicle from adhering to the lower part of the transport vehicle. With the transport vehicle parked on the travel track and the frame cover completely sealing the open surface of the frame, the gas injection unit injects gas toward the surface of the travel module. The outer shell is configured to accommodate multiple transport vehicles simultaneously, thereby enabling the simultaneous cleaning of multiple transport vehicles housed in the cleaning space.

2. The vehicle cleaning device according to claim 1, wherein, The frame cover is configured as an open surface surrounding the frame and is manufactured to isolate the interior space of the frame from the cleaning space.

3. The vehicle cleaning device according to claim 1, wherein, The housing includes an entrance door for the transport vehicle to enter and an exit door for the transport vehicle to leave.

4. The vehicle cleaning device according to claim 3, wherein, A first sensor is installed in the entrance gate to sense the entry of the transport vehicle, and a second sensor is installed in the exit gate to sense the exit of the transport vehicle.

5. The vehicle cleaning device according to claim 1, wherein, The gas injection unit includes multiple nozzles.

6. The vehicle cleaning device according to claim 5, wherein, Each of the nozzles sprays gas toward the surface of the driving module after the transport vehicle stops inside the housing.

7. The vehicle cleaning device according to claim 1, wherein, The gas includes inert gas or dry, clean air.

8. A method for cleaning a transport vehicle, the transport vehicle being configured to move along a travel track for transporting items and comprising a travel module and a frame connected below the travel module and having a receiving space for the items, wherein... The method for cleaning the transport vehicle includes: The step of providing a downward airflow into the interior of a vehicle cleaning device used for cleaning transport vehicles; The step of causing the transport vehicle to enter the interior of the transport vehicle cleaning device; The steps of cleaning the transport vehicle; and The step of moving the transport vehicle away from the outside of the transport vehicle cleaning device. The cleaning steps for the transport vehicles include: The exhaust step of venting the internal parts of the vehicle cleaning device; The steps of stopping the transport vehicle on the travel track and at a position where the frame cover completely seals the open side of the frame; and The gas injection step involves spraying gas toward the surface of the traveling module while the transport vehicle is parked on the travel track and the frame cover completely seals the open surface of the frame. The internal structure of the vehicle cleaning device is configured to accommodate multiple vehicles simultaneously, thereby enabling the simultaneous cleaning of multiple vehicles housed within the device.

9. The method for cleaning a transport vehicle according to claim 8, wherein, The method for cleaning the transport vehicle also includes: The step of sensing the approach of the transport vehicle to the transport vehicle cleaning device; and The step of sensing the delivery vehicle leaving the delivery vehicle cleaning device.

10. The method for cleaning a transport vehicle according to claim 8, wherein, The step of providing the downward airflow is continuously performed throughout the entire process of the conveyor vehicle cleaning method.

11. The method for cleaning a transport vehicle according to claim 8, wherein, The venting step is performed after the transport vehicle enters the transport vehicle cleaning device and continues until the transport vehicle leaves the transport vehicle cleaning device.

12. A goods conveying device, comprising: The travel track is set on the side of the canopy and provides a transport path for transporting items; Multiple transport vehicles, including a driving module and a lifting module, the driving module traveling along the driving track, and the lifting module combined below the driving module and providing a frame for accommodating the items; as well as The vehicle cleaning device is configured adjacent to the travel track to perform cleaning of the vehicle and is capable of preventing particles scattered from the travel module from re-adhering to the lifting module. The vehicle cleaning device includes: The outer shell is configured to surround the travel track and the movement path of the transport vehicle, and provides a cleaning space for performing cleaning of the transport vehicle; A fan unit is disposed on the upper part of the housing and is used to form a downward airflow in the cleaning space; A gas injection unit is disposed on the roof of the housing and is used to inject gas toward the driving module; An exhaust unit, disposed at the lower part of the housing, draws in and removes gas supplied from the cleaning space and foreign matter removed from the driving module, and exhausts gas from the cleaning space; and The frame cover is configured as an open surface surrounding the frame inside the outer shell, and is capable of separating the interior space of the frame from the cleaning space. With the transport vehicle parked on the travel track and the frame cover completely sealing the open surface of the frame, the gas injection unit injects gas toward the surface of the travel module. The outer shell is configured to accommodate multiple transport vehicles simultaneously, thereby enabling the simultaneous cleaning of multiple transport vehicles housed in the cleaning space.

13. The article conveying device according to claim 12, wherein, The housing includes an entrance door for the transport vehicle to enter and an exit door for the transport vehicle to leave.

14. The article conveying device according to claim 13, wherein, A first sensor is installed in the entrance gate to sense the entry of the transport vehicle, and a second sensor is installed in the exit gate to sense the exit of the transport vehicle.

15. The article conveying device according to claim 12, wherein, The gas injection unit includes multiple nozzles. Each of the nozzles sprays gas toward the surface of the driving module after the transport vehicle stops.

16. The article conveying device according to claim 12, wherein, The fan unit includes multiple fans that supply airflow downwards to the cleaning space, and the multiple fans operate continuously.

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