Vacuum container and electron beam device

Abstract

The application discloses a vacuum container and an electron beam device. The vacuum container comprises a container body and a partition plate. The container body is provided with an inner cavity. The partition plate is arranged in the inner cavity and close to a side wall of the container body, so as to divide the inner cavity into a first cavity and a second cavity. The first cavity and the second cavity are arranged in communication. The partition plate is used for mounting a moving mechanism. The application aims to avoid the deviation of the vacuum container caused by the deformation of the wall of the vacuum container, so as to improve the production quality.

Description

Technical Field

[0001] This invention relates to the field of vacuum equipment technology, and in particular to a vacuum container and an electron beam device using the vacuum container. Background Technology

[0002] Existing electron beam equipment includes a vacuum container and a motion mechanism. The vacuum container is usually square, with a vacuum chamber inside. The motion mechanism is located on the inner wall of the vacuum container and is connected to an electron gun. The motion mechanism drives the electron gun to process or produce products.

[0003] When a vacuum container is evacuated, the walls of the container are subjected to significant atmospheric pressure, which causes deformation. The moving mechanism installed on the inner wall of the vacuum container shifts as the wall deforms, resulting in deformation, damage, reduced precision, or changes in its relative position to the workstation. This affects the quality of the final product and, in severe cases, may even prevent it from functioning properly. Summary of the Invention

[0004] The main objective of this invention is to provide a vacuum container that avoids displacement of the moving mechanism due to the deformation of the vacuum container wall during vacuuming, thereby improving production quality.

[0005] To achieve the above objectives, the vacuum container proposed in this invention comprises:

[0006] A container body, wherein the container body has an inner cavity;

[0007] A partition is disposed in the inner cavity and is located near one side wall of the container body to divide the inner cavity into a first cavity and a second cavity, the first cavity and the second cavity being connected.

[0008] The partition is used to install the motion mechanism.

[0009] In one embodiment of the present invention, the container body includes two oppositely arranged side plates, and the number of partitions is two. The two partitions are respectively arranged close to the two side plates, and a second cavity is formed between each partition and a side plate, and a first cavity is formed between the two partitions.

[0010] In one embodiment of the present invention, the container body further includes a cylindrical structure, the two side plates are respectively located at both ends of the cylindrical structure, the cylindrical structure surrounds the two side plates to form the inner cavity, and the partition is installed on the inner wall surface of the cylindrical structure.

[0011] In one embodiment of the present invention, the outer side wall of the side plate is further provided with a plurality of reinforcing ribs.

[0012] In one embodiment of the present invention, the partition plate has a through hole, and the first cavity and the second cavity are connected through the through hole.

[0013] In one embodiment of the present invention, the vacuum container further includes an adjustment mechanism disposed at the through hole for adjusting the flow area of ​​the through hole.

[0014] In one embodiment of the present invention, the adjusting mechanism includes:

[0015] A fixing block, which protrudes from the side wall of the through hole;

[0016] A rotating component, comprising a long end, a short end, and a rotating shaft, wherein the rotating shaft is rotatably connected to the fixed block, and both the long end and the short end protrude from the side wall of the rotating shaft, wherein the length of the long end is greater than the length of the short end, and the long end and the short end are arranged at an angle.

[0017] When the first cavity is evacuated, the rotating member rotates so that the short end is vertically positioned to increase the flow area of ​​the through hole. When the first cavity is filled with air, the rotating member rotates in the opposite direction so that the long end is vertically positioned to decrease the flow area of ​​the through hole.

[0018] In one embodiment of the present invention, the top surface of the fixing block is provided with a groove and an arc-shaped groove. The groove is used to accommodate the long end or the short end. When the short end is vertically arranged, the long end is accommodated on one side of the groove. When the long end is vertically arranged, the short end is accommodated on the other side of the groove.

[0019] The arc-shaped groove is recessed in the groove, and the arc-shaped groove is in contact with the side wall of the rotating shaft.

[0020] In one embodiment of the present invention, two adjustment mechanisms are provided at the through hole, and the two adjustment mechanisms are arranged opposite to each other.

[0021] The present invention also provides an electron beam device, which includes the vacuum container described above.

[0022] The vacuum container proposed in this invention includes a container body with an inner cavity and a partition. The partition is located in the inner cavity and divides the inner cavity into a first chamber and a second chamber. A motion mechanism is mounted on the partition. When the vacuum container is evacuated, the wall surfaces in contact with the outside air are subjected to atmospheric pressure, while the partition located in the inner cavity is not subjected to atmospheric pressure. Therefore, the partition does not deform, and the motion mechanism mounted on the partition will not shift. The relative position of the motion mechanism and the workstation does not change, ultimately improving production quality. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of a structure according to an embodiment of the present invention;

[0025] Figure 2 This is a sectional view;

[0026] Figure 3 This is a magnified view of point A;

[0027] Figure 4 A schematic diagram of the structure when the long end of the adjustment mechanism is set vertically;

[0028] Figure 5 A schematic diagram of the structure when the short end of the adjustment mechanism is set vertically;

[0029] Figure 6 This is a schematic diagram showing the separation of the adjustment mechanism.

[0030] Explanation of icon numbers:

[0031] 1000 Vacuum container 21 Through hole 100 Container body 22 Regulation mechanism 11 inner cavity 221 Fixed block 111 First cavity 2211 groove 112 Second cavity 2212 arc groove 12 Air extraction port 222 Rotating component 13 Side panel 2221 Long end 14 cylindrical structure 2222 short end 15 Reinforcing ribs 223 Rotating shaft 200 partition

[0032] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0034] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0035] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0036] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the word "and / or" throughout the text means including three parallel solutions; taking "A and / or B" as an example, it includes solution A, solution B, or a solution that simultaneously satisfies A and B. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0037] Reference Figure 1 and Figure 2 The present invention proposes a vacuum container 1000, including a container body 100 and a partition 200. The container body 100 has an inner cavity 11. The partition 200 is disposed in the inner cavity 11 and is located near one side wall of the container body 100 to divide the inner cavity 11 into a first cavity 111 and a second cavity 112. The first cavity 111 and the second cavity 112 are connected. The partition 200 is used to install a motion mechanism.

[0038] The vacuum container 1000 proposed in this invention includes a container body 100 with an inner cavity 11 and a partition 200. The partition 200 is disposed in the inner cavity 11, dividing the inner cavity 11 into a first cavity 111 and a second cavity 112. A motion mechanism is mounted on the partition 200. When the vacuum container 1000 is evacuated, the various wall surfaces in contact with the outside air will bear atmospheric pressure, while the partition 200 located in the inner cavity 11 will not bear atmospheric pressure. Therefore, the partition 200 will not deform, and the motion mechanism mounted on the partition 200 will not shift. The relative position of the motion mechanism and the workstation will not change, ensuring the motion accuracy of the motion mechanism and ultimately improving production quality.

[0039] In one embodiment of the present invention, the minimum distance between the partition 200 and the side wall of the container body 100 is 50-100mm. For a vacuum container 1000 that is 5m wide, 8m long and 5m high, the deformation of the side wall during vacuuming is approximately 0.5-2mm. Therefore, the distance between the partition 200 and the side wall of the container body 100 is small, which facilitates processing and saves materials and costs.

[0040] Reference Figure 1 and Figure 2 In one embodiment of the present invention, the container body 100 includes two opposing side plates 13 and two partitions 200. The two partitions 200 are respectively disposed close to the two side plates 13. A second cavity 112 is formed between each partition 200 and a side plate 13, and a first cavity 111 is formed between the two partitions 200. The provision of two second cavities 112 and two partitions 200 increases the mounting points of the motion mechanism, making it easier to install.

[0041] Understandably, the number of partitions 200 can be set on the six walls of the container body 100 as needed, and can be 1 to 6. The number and location of the partitions 200 are related to the number and location of the moving mechanisms that need to be installed inside the vacuum container 1000. Those skilled in the art can control the number of partitions 200 according to actual needs. When there are many structures to be installed, more partitions 200 are set to meet the installation requirements. When there are few structures to be installed, setting a minimum of one partition 200 is sufficient to meet the installation requirements and can reduce the volume of the vacuum container 1000.

[0042] Reference Figure 1 and Figure 2 In one embodiment of the present invention, the container body 100 further includes a cylindrical structure 14, with two side plates 13 located at both ends of the cylindrical structure 14. The cylindrical structure 14 surrounds the two side plates 13 to form an inner cavity 11, and a partition 200 is installed on the inner wall surface of the cylindrical structure 14.

[0043] In one embodiment of the present invention, the cylindrical structure 14 can be a cylindrical structure or a square cylindrical structure (composed of an upper plate, a lower plate, a rear plate and a front door plate). When the vacuum container 1000 occupies the same area, the square cylindrical structure 14 has the largest volume, which is convenient for meeting the production requirements of electron beam equipment.

[0044] Reference Figure 1 and Figure 2 In one embodiment of the present invention, the outer side wall of the side plate 13 is further provided with a plurality of reinforcing ribs 15. The reinforcing ribs 15 can ensure that the deformation of the vacuum container 1000 is reduced when the thickness is small. The reinforcing ribs 15 are arranged laterally or longitudinally relative to the side wall, or they can be arranged obliquely.

[0045] In one embodiment of the present invention, the number of reinforcing ribs 15 is three to ten. The number of reinforcing ribs 15 can be set according to the material, thickness and other properties of the vacuum container 1000. Under the condition of meeting the wall strength of the vacuum container 1000, those skilled in the art can add or reduce the number of reinforcing ribs 15. The reinforcing ribs 15 can be integrated with the side plate 13, or the reinforcing ribs 15 can be connected to the side plate 13 by welding.

[0046] Reference Figures 1 to 3 In one embodiment of the present invention, the partition 200 has a through hole 21, and the first cavity 111 and the second cavity 112 are connected through the through hole 21.

[0047] During the vacuuming process, when the flow area of ​​the through-hole 21 is large, there will be no difference in the vacuum level between the first cavity 111 and the second cavity 112. When the flow area of ​​the through-hole 21 is small, there may be a certain difference in the vacuum level between the first cavity 111 and the second cavity 112, and the partition 200 will also bear a certain pressure. However, the vacuum level of the inner cavity 11 generally needs to reach 10. -2 Even if the vacuum difference between the two sides reaches two orders of magnitude, the force acting on the partition 200 is very small and far from enough to deform the partition 200 (see the following text for a detailed explanation of the flow rate of the through hole 21).

[0048] In one embodiment of the present invention, the number of through holes 21 can be one or two. When the number of through holes 21 is one, the stability of the partition 200 structure is ensured. When the number of through holes 21 is two, the vacuum extraction speed is improved.

[0049] Reference Figures 3 to 6 In one embodiment of the present invention, the vacuum container 1000 further includes an adjustment mechanism 22, which is disposed at the through hole 21 and is used to adjust the flow area of ​​the through hole 21.

[0050] In one embodiment of the present invention, the adjustment mechanism 22 includes a driving member and an adjusting member. The driving member drives the adjusting member to move toward or away from the through hole 21 to reduce or expand the flow area of ​​the through hole 21.

[0051] Reference Figures 3 to 6In one embodiment of the present invention, the adjusting mechanism 22 includes a fixed block 221 and a rotating member 222. The fixed block 221 protrudes from the side wall of the through hole 21. The rotating member 222 includes a long end 2221, a short end 2222, and a rotating shaft 223. The rotating shaft 223 is rotatably connected to the fixed block 221. Both the long end 2221 and the short end 2222 protrude from the side wall of the rotating shaft 223. The length of the long end 2221 is greater than the length of the short end 2222, and the long end 2221 and the short end 2222 form an included angle. When the first cavity 111 is evacuated, the rotating component 222 rotates so that the short end 2222 is vertically positioned to expand the flow area of ​​the through hole 21 and ensure that the atmospheric pressure on both sides of the partition 200 is consistent. When the first cavity 111 is filled with air, the rotating component 222 rotates in the opposite direction so that the long end 2221 is vertically positioned to reduce the flow area of ​​the through hole 21, ensuring that the speed is slowed down during the process of filling with air, reducing the rapid deformation of the side wall material of the vacuum container 1000 and preventing excessive fatigue, thereby improving the service life.

[0052] The vacuum container 1000's suction port 12 is connected to the first chamber 111. When the first chamber 111 is evacuated, air flows from the second chamber 112 to the first chamber 111. Since the long end 2221 is vertically positioned at this time, the airflow pushes the long end 2221 to rotate 90 degrees toward the first chamber 111, so that the short end 2222 rotates from its original horizontal position to a vertical position. At this time, the flow area of ​​the through hole 21 increases, thereby increasing the suction speed and ensuring that the atmospheric pressure in the first chamber 111 and the second chamber 112 remains consistent. This avoids the partition 200 from bearing pressure and extends the service life of the partition 200. When air is introduced into the first cavity 111, the air flows from the first cavity 111 to the second cavity 112. Since the short end 2222 is vertically positioned at this time, the airflow pushes the short end 2222 to rotate 90 degrees toward the second cavity 112, so that the long end 2221 is rotated from its original horizontal position to a vertical position. At this time, the flow area of ​​the through hole 21 becomes smaller, thereby reducing the speed at which air enters the second cavity 112, reducing the rapid deformation of the side wall material of the vacuum container 1000 and preventing excessive fatigue, thus improving its service life.

[0053] In one embodiment of the present invention, for a vacuum container 1000 that is 5 meters wide, 8 meters long, and 5 meters high, when the short end 2222 of the rotating member 222 is vertically arranged, the cross-sectional area of ​​the through hole 21 is 0.01㎡ to 0.05㎡, and when the long end 2221 of the rotating member 222 is vertically arranged, the cross-sectional area of ​​the through hole 21 is 0.005㎡ to 0.01㎡.

[0054] Reference Figures 3 to 6In one embodiment of the present invention, the top surface of the fixing block 221 is recessed with a groove 2211 and an arc-shaped groove 2212. The groove 2211 is used to accommodate the long end 2221 or the short end 2222. When the short end 2222 is vertically arranged, the long end 2221 is accommodated on one side of the groove 2211, and when the long end 2221 is vertically arranged, the short end 2222 is accommodated on the other side of the groove 2211. The arc-shaped groove 2212 is recessed in the groove 2211 and fits against the side wall of the rotating shaft 223. By setting the groove 2211, the sealing performance of the adjusting mechanism 22 is improved, ensuring that during the vacuuming or amplification process, air will only pass through the through hole 21, further ensuring the accuracy of the flow area of ​​the through hole 21.

[0055] Reference Figures 3 to 6 In one embodiment of the present invention, two adjustment mechanisms 22 are provided at the through hole 21, and the two adjustment mechanisms 22 are arranged opposite to each other. Since the width of the long end 2221 or the short end 2222 of one adjustment mechanism 22 is not consistent with the length of the through hole 21, two adjustment mechanisms 22 are provided to avoid the flow channel formed between one adjustment mechanism 22 and the side wall of the through hole 21 being unsmooth, thus ensuring precise control of the airflow.

[0056] The present invention also proposes an electron beam device, which includes any of the above-described vacuum container 1000. The specific structure of the vacuum container 1000 is as described in the above embodiments. Since the electron beam device of this invention adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, and will not be described in detail here.

[0057] The above description is merely a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A vacuum container, characterized in that, The vacuum container includes: A container body, wherein the container body has an inner cavity; A partition is disposed in the inner cavity and is located near one side wall of the container body to divide the inner cavity into a first cavity and a second cavity. The first cavity and the second cavity are connected. The partition is used to install a motion mechanism. The partition plate has a through hole, through which the first cavity and the second cavity are connected; The vacuum container also includes an adjustment mechanism located at the through hole for adjusting the flow area of ​​the through hole; The adjustment mechanism includes: A fixing block, which protrudes from the side wall of the through hole; A rotating component, comprising a long end, a short end, and a rotating shaft, wherein the rotating shaft is rotatably connected to the fixed block, and both the long end and the short end protrude from the side wall of the rotating shaft, wherein the length of the long end is greater than the length of the short end, and the long end and the short end are arranged at an angle. When the first cavity is evacuated, the rotating member rotates so that the short end is vertically positioned to increase the flow area of ​​the through hole. When the first cavity is filled with air, the rotating member rotates in the opposite direction so that the long end is vertically positioned to decrease the flow area of ​​the through hole.

2. The vacuum container as described in claim 1, characterized in that, The container body includes two opposing side plates, and there are two partitions. The two partitions are respectively disposed close to the two side plates. A second cavity is formed between each partition and a side plate, and a first cavity is formed between the two partitions.

3. The vacuum container as described in claim 2, characterized in that, The container body also includes a cylindrical structure, with the two side plates located at both ends of the cylindrical structure. The cylindrical structure surrounds the two side plates to form the inner cavity, and the partition is installed on the inner wall of the cylindrical structure.

4. The vacuum container as described in claim 2, characterized in that, The outer wall of the side plate is also provided with multiple reinforcing ribs.

5. The vacuum container as described in claim 1, characterized in that, The top surface of the fixing block is recessed with a groove and an arc-shaped groove. The groove is used to accommodate the long end or the short end. When the short end is vertically set, the long end is accommodated on one side of the groove. When the long end is vertically set, the short end is accommodated on the other side of the groove. The arc-shaped groove is recessed in the groove, and the arc-shaped groove is in contact with the side wall of the rotating shaft.

6. The vacuum container as described in claim 1, characterized in that, Two adjustment mechanisms are provided at the through hole, and the two adjustment mechanisms are arranged opposite to each other.

7. An electron beam device, characterized in that, The electron beam device includes the vacuum container as described in any one of claims 1 to 6.

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