CF flange sealing ring positioning structure

Abstract

This invention discloses a CF flange sealing ring positioning structure, which includes multiple positioners evenly distributed along the circumference of the CF flange. Each positioner includes a positioning plate and an adjusting mechanism. One end of the positioning plate is fitted onto the adjusting mechanism, and the other end is perpendicularly pressed against the outer wall of the sealing ring along the radial direction of the CF flange. The adjusting mechanism includes a cantilever beam and a support pile arranged in parallel in the same direction. The adjusting mechanism connects the CF flange and the positioning plate, and adjusts the movement of the support pile relative to the cantilever beam via bolts, thereby driving the positioning plate to translate radially along the CF flange. This CF flange sealing ring positioning structure is used for positioning the sealing ring during CF flange connection of vacuum pipelines. It can avoid misalignment and one-sided compression of the sealing ring during CF flange connection, achieving accurate positioning of the sealing ring. Furthermore, the positioning structure is simple to use and easy to disassemble. In application, it does not damage the high-vacuum pipeline or the CF flange, significantly reducing repeated disassembly and assembly after pipeline connection and improving work efficiency.

Description

Technical Field

[0001] This invention belongs to the field of vacuum pipeline connection and installation technology, and specifically relates to a CF flange sealing ring positioning structure. Background Technology

[0002] The CF flange sealing connection for high-vacuum pipelines primarily achieves a high-vacuum seal by using the knife edge within the CF flange sealing groove to coaxially and symmetrically compress the metal flat gasket (sealing ring) on ​​both sides. This symmetrical and uniform deformation of the metal flat gasket after compression results in a high-vacuum seal. This CF flange sealing connection method has become the primary method for high-vacuum pipeline connections due to its superior vacuum connection characteristics, including high connection strength, low leakage rate at the connection point, and resistance to high and low temperature vacuum baking.

[0003] However, in the installation of CF flange connections (especially horizontal pipe connections), due to the shallow sealing groove of the CF flange and the need to reserve installation tolerances for the sealing ring in the design of the sealing groove diameter, it is difficult to accurately position the sealing ring in the sealing groove of the CF flange, which leads to: (1) the sealing ring being separated from the sealing groove on both sides (or one side). After the CF flange connection, a part of the circumferential direction of the sealing ring is not squeezed or the squeezing deformation is insufficient, resulting in unilateral squeezing of the sealing ring; (2) the sealing ring is not completely coincident with the central axis of the CF flange on both sides in the sealing groove, and the squeezing deformation on both sides of the sealing ring is asymmetrical, resulting in misaligned squeezing of the sealing ring. Whether it is unilateral squeezing or misaligned squeezing of the sealing ring, the sealing ring cannot be completely sealed, which leads to the failure of the CF flange sealing connection. Summary of the Invention

[0004] In view of this, the present invention proposes a CF flange sealing ring positioning structure, which is used for positioning the sealing ring during CF flange connection. It can avoid misalignment and unilateral compression of the sealing ring in high vacuum pipeline CF flange connection, and achieve accurate positioning of the sealing ring.

[0005] To achieve this objective, the present invention proposes the following technical solution: a CF flange sealing ring positioning structure, the positioning structure comprising a plurality of positioners evenly distributed in the circumferential direction of the CF flange; the positioner comprising: a positioning plate and an adjustment mechanism;

[0006] One end of the positioning plate is fitted onto the adjustment mechanism, and the other end is parallel to the sealing surface of the CF flange and abuts against the outer wall of the sealing ring along the radial direction of the CF flange.

[0007] The adjustment mechanism includes a cantilever beam and a support pile arranged in the same direction and parallel to each other, and bolts connecting the cantilever beam and the support pile. The adjustment mechanism is connected to the CF flange through the cantilever beam and to the positioning plate through the support pile. The bolts are used to adjust the movement of the support pile relative to the cantilever beam, thereby driving the positioning plate to translate radially along the CF flange.

[0008] Preferably, the positioning plate includes an integrally formed top plate and a collar located at the lower end of the top plate and perpendicularly connected to the top plate. The top plate is parallel to the sealing surface of the CF flange and abuts against the outer wall of the sealing ring along the radial direction of the CF flange. The collar is loosely mounted on the adjustment mechanism.

[0009] Preferably, the top plate has symmetrical outward-facing top teeth at its upper end, and the tips of the top teeth have a circular arc structure; the collar is a cylindrical structure.

[0010] Preferably, the cantilever beam includes an integrally formed cantilever and a cantilever seat connected to one end of the cantilever;

[0011] The cantilever is inserted into the connection hole of the CF flange from the rear of the CF flange and hangs on the inner wall of the connection hole.

[0012] The cantilever base is provided with a tailstock, a guide post, and an adjustment hole arranged in order from farthest to near the cantilever; the guide post and the adjustment hole are parallel to each other and perpendicular to the cantilever; the tailstock is provided with a threaded hole, and the screw passes through the threaded hole and rests against the outer wall of the pipe at the rear of the CF flange; the guide post is inserted into the corresponding hole of the support pile; the bolt passes through the corresponding hole and the adjustment hole on the support pile to connect the cantilever beam and the support pile.

[0013] Preferably, the support pile includes an integrally formed strut and a support base connected to one end of the strut;

[0014] The other end of the support rod is connected to the collar of the positioning plate;

[0015] The support base is provided with a guide hole and a stepped through hole in parallel. The guide hole is used to insert the guide column of the cantilever beam, and the stepped through hole is used to connect with the adjustment hole of the cantilever beam by bolt.

[0016] Preferably, the cantilever beam includes an integrally formed cantilever and a cantilever seat connected to one end of the cantilever;

[0017] The cantilever is inserted into the connection hole of the CF flange from the rear of the CF flange and hangs against the inner wall of the connection hole.

[0018] The cantilever seat is provided with a tailstock, a guide post, and an adjustment hole; the tailstock is provided with a threaded hole, and a screw passes through the threaded hole and abuts against the outer wall of the pipe at the rear of the CF flange, pressing the cantilever tightly against the inner wall of the connection hole; the guide post is located at the center of the surface of the cantilever seat relative to the support base of the support pile and is perpendicular to the cantilever, and the adjustment hole is coaxial with the guide post.

[0019] Preferably, the support pile includes an integrally formed strut and a support base connected to one end of the strut;

[0020] The other end of the support rod is connected to the collar of the positioning plate;

[0021] A stepped through hole is provided at the center of the support base, and the stepped through hole cooperates with the guide column of the cantilever beam; the bolt is inserted from the stepped through hole and connected to the adjustment hole of the cantilever beam.

[0022] Preferably, the cross-section of the guide post is non-circular.

[0023] Preferably, an annular groove with a rectangular cross-section and coaxial with the support rod is provided at the position of the collar of the positioning plate connecting the support rod, and the collar of the positioning plate is loosely fitted in the annular groove.

[0024] Preferably, the bolt is provided with a spring, and part of the spring is located in the stepped step of the stepped through hole of the support.

[0025] The beneficial effects of this invention are as follows: The CF flange sealing ring positioning structure proposed in this invention is used for positioning the sealing ring during CF flange connection. It can avoid misalignment and unilateral compression of the sealing ring in the CF flange connection of high vacuum pipeline, and achieve accurate positioning of the sealing ring. Moreover, the positioning structure is simple to use and easy to disassemble. It does not damage the high vacuum pipeline and CF flange in application. It has significant practical significance for reducing repeated disassembly and assembly after pipeline connection and improving work efficiency. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the application of the CF flange sealing ring positioning structure on the CF flange in an embodiment of the present invention;

[0027] Figure 2 for Figure 1 A partial view of section AA in the middle;

[0028] Figure 3 This is a cross-sectional view of the CF flange sealing ring positioning structure in an embodiment of the present invention;

[0029] Figure 4 This is a cross-sectional view of the positioning plate in an embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the positioning plate in an embodiment of the present invention;

[0031] Figure 6 This is a structural cross-sectional view of the cantilever beam in an embodiment of the present invention;

[0032] Figure 7 This is a top view of the cantilever beam structure in an embodiment of the present invention;

[0033] Figure 8 This is a partial sectional view of the supporting pile structure in an embodiment of the present invention;

[0034] Figure 9This is a top view of the supporting pile in an embodiment of the present invention;

[0035] Figure 10 This is a cross-sectional view of the CF flange sealing ring positioning structure in another embodiment of the present invention;

[0036] Figure 11 for Figure 10 Sectional view of section BB;

[0037] In the diagram: 1. Positioning plate; 11. Top plate; 12. Collar; 111. Top tooth; 2. Cantilever beam; 21. Cantilever; 22. Cantilever seat; 221. Tailstock; 222. Guide column; 223. Adjustment hole; 2210. Threaded hole; 3. Support pile; 31. Support rod; 32. Support seat; 311. Annular groove; 322. Guide hole; 323. Stepped through hole; 4. Bolt; 5. Spring; 6. Screw; 9. Sealing ring; 99. CF flange; 990. Sealing groove; 91. Knife edge; 992. Connecting hole; 993. Pipe; 100. Positioner. Detailed Implementation

[0038] Those skilled in the art will recognize that the embodiments described herein are intended to help the reader understand the principles of the invention, and should be understood that the scope of protection of the invention is not limited to such specific statements and embodiments. Those skilled in the art can make various other specific modifications and combinations based on the technical teachings disclosed in this invention without departing from the spirit of the invention, and these modifications and combinations are still within the scope of protection of this invention.

[0039] In high-vacuum pipeline sealing connections, the CF flange 99 connection is the most commonly used high-vacuum pipeline sealing connection structure. However, during the first helium mass spectrometry leak detection after pipeline connection, it was found that the probability of leakage at the CF flange sealing connection position was much higher than that caused by other faults such as weld leakage or pipeline material crack leakage. Observing the state of the sealing ring 9 where the seal failed, it was found that in addition to the quality problem of the sealing ring 9 itself, the following issues were frequently observed: a. The indentations formed by the knife edge 991 inside the CF flange 99 on both sides of the sealing ring 9 were asymmetrical, resulting in misaligned extrusion of the sealing ring; b. Part of the circumferential part of the sealing ring 9 had planar extrusion indentations, while the other part had no indentations or very shallow indentations, resulting in unilateral extrusion of the sealing ring. The reason for these two states lies in the inaccurate positioning of the sealing ring during installation (especially in horizontal pipe connections). The central axis of the sealing ring does not coincide with the central axis of one or both CF flanges. When the sealing ring is located in the sealing groove 990, its central axis deviates from the CF flange central axis (the maximum deviation is determined by the installation tolerances of the sealing groove diameter and the sealing ring outer diameter). After the flanges on both sides are connected, the CF flange central axes deviate from each other, and the positions of the extrusion cutters 991 on both sides of the sealing ring 9 also deviate from each other (the maximum deviation is twice the sealing ring installation tolerance), resulting in misaligned extrusion. When the sealing ring 9 is removed from the sealing groove 990, its central axis deviates significantly from the CF flange central axis. The part outside the sealing groove is over-extruded, while the part inside the sealing groove is not extruded or the extrusion deformation is insufficient, resulting in unilateral extrusion. Both unilateral and misaligned extrusion of the sealing ring will lead to the failure of the CF flange sealing connection, seriously affecting the efficiency of reliable connection in vacuum pipelines.

[0040] Therefore, in order to achieve accurate installation and positioning of the sealing ring 9 in the connection of CF flange 99 in high vacuum pipeline, reduce repeated disassembly and assembly after pipeline connection, and improve work efficiency, this application designs a CF flange sealing ring positioning structure by utilizing the connection hole 992 of CF flange 99 and the relative connection gap, including several positioners 100 evenly distributed in the circumferential direction of CF flange 99.

[0041] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0042] Example 1

[0043] Reference Appendix Figures 1-9 The CF flange sealing ring positioning structure includes a plurality of positioners 100 evenly distributed in the circumferential direction of the CF flange, and each positioner 100 includes a positioning plate 1 and an adjustment mechanism.

[0044] The positioning plate 1 includes a top plate 11 and a collar 12 at the bottom of the top plate. The top plate 11 is parallel to the sealing surface of the CF flange 99 and abuts against the outer wall of the sealing ring 9 along the radial direction of the CF flange. The collar 12 is connected to the adjustment mechanism.

[0045] The adjustment mechanism consists of a cantilever beam 2 and a support pile 3 arranged in the same direction and parallel, and bolts 4 connecting the cantilever beam 2 and the support pile 3. The adjustment mechanism connects the positioning plate 1 and the CF flange 99, and adjusts and controls the positioning plate 1 to move radially along the CF flange.

[0046] As an example, the cantilever beam 2 is provided with a cantilever 21 and a cantilever seat 22. The cantilever 21 is inserted into the connection hole 992 of the CF flange 99 from the rear and hangs against the inner wall of the connection hole 992. The cantilever seat 22 is provided with a tail seat 221, a guide post 222 and an adjustment hole 223 in sequence. The tail seat 221 is pressed against the pipe 993 at the rear of the CF flange 99 by screws to achieve the purpose of fixing the cantilever beam 2 and the CF flange 99.

[0047] As an example, the support pile 3 is provided with a strut 31 and a support seat 32. The strut 31 is connected to the collar 12 at the lower part of the positioning plate 1. The support seat 32 is provided with a guide hole 322 and a stepped through hole 323 in parallel. The guide column 222 and bolt 4 on the cantilever beam 2 pass through the guide hole 322 and the stepped through hole 323 respectively to connect the support seat 32 and the cantilever seat 22, controlling the directional movement of the support pile 3 towards the cantilever beam 2, and driving the positioning plate 1 to translate radially along the CF flange 99. Several positioners 100 adjust the positioning plate 1 against the sealing ring 9 by the directional movement of the support pile 3, so that the central axis of the sealing ring 9 coincides with the central axis of the CF flange 99, thereby achieving the purpose of positioning the sealing ring 9.

[0048] Example 2

[0049] See Figures 10-11 This embodiment is basically the same as the CF flange sealing ring positioning structure in Embodiment 1. The difference is that the guide post 222 on the cantilever seat 22 is set as a non-circular column such as a square or triangle, and is located at the center of the surface of the cantilever seat 22 relative to the support seat 32; the adjustment hole 223 of the connecting bolt 4 is set at the center of the guide post and is coaxial with the guide post; the stepped through hole 323 on the support seat 32 is set as a countersunk hole with a section of a non-circular section such as a square or triangle corresponding to the structure of the guide post 222. The structure proposed in this embodiment can reduce the volume of the support seat and the cantilever seat, and adapt to the sealing ring positioning of some CF flanges with small back space.

[0050] In Embodiments 1 and 2, the positioning plate 1 is used to abut against the outer wall of the sealing ring 9 and to position the sealing ring 9. As a key component of the positioner 100, considering the specific situation in the relative sealing connection of the CF flange 99 with a very small connection gap, a shallow sealing groove 990, and an inner diameter of the sealing groove 990 that is usually larger than the outer diameter of the sealing ring 9, the top plate 11 of the positioning plate 1 is designed as a thin plate with parallel and smooth end faces. Its thickness is determined by the connection gap of the CF flange 99, and is generally slightly smaller than the connection gap of the CF flange, usually between 0.5mm and 1.5mm. At the same time, in order to stably abut against the sealing ring 9 without damaging it, the top plate 11 is designed to be made of hard metal material, and the upper end of the top plate 11 is symmetrically outward. A top tooth 111 is provided, with the tip of the top tooth having an arc-shaped structure. The positioning plate 1 abuts against the outer wall of the sealing ring 9 through the top tooth 111 at the upper end of the top plate 11. To increase the stability of the adjustment mechanism in the process of adjusting the positioning plate 1, a collar 12 provided at the lower part of the top plate 11 is a straight cylindrical structure with coaxial inner and outer sides. The lower end of the top plate 11 is axially and vertically connected to the outer wall of the collar 12 as a whole. The front end of the support rod 31 of the support pile 3 that supports the positioning plate 1 is provided with an annular groove 311 with a rectangular cross section on the outer wall. The collar 12 at the lower part of the positioning plate 1 is loosely connected in the annular groove 311 at the front end of the support rod 31, thereby restricting the positioning plate 1 from rotating (and only can) perpendicular to the axis of the support rod 31, so as to realize the stable adjustment of the positioning plate by the support pile.

[0051] In Examples 1 and 2, to connect the positioner 100 to the CF flange 99, the cantilever 21 is inserted into the connection hole 992 from behind the CF flange 99 and rests against the inner wall of the connection hole. The tailstock 221 is fixed to the cantilever beam and the CF flange by passing through the threaded hole 2210 with screws 6 and pressing against the outer wall of the pipe behind the CF flange. That is, the positioner 100 is connected to the CF flange 99 through the cantilever beam 2. To achieve a stable connection, the cantilever 21 is a cylinder adapted to the structure of the connection hole of the CF flange, and the length of the cantilever 21 is not greater than the length of the connection hole. By pressing the screws 6 against the outer wall of the pipe behind the CF flange 99, the pressure of the cantilever 21 against the inner wall of the connection hole of the CF flange is increased, which can fix the positioner and the CF flange. Therefore, from the structure of the cantilever beam, it can be seen that the connection between the positioner and the CF flange includes two types: hanging connection and fixed connection. The hanging connection is used for the connection and installation of horizontal vacuum pipelines. This method achieves the connection between the positioner and the CF flange by directly hanging the cantilever on the inner wall of the connection hole. It is convenient, fast and simple to use. The fixed connection is based on the hanging connection. A tail seat is set at the rear of the cantilever seat, and the cantilever beam and the CF flange are fixed by screws against the outer wall of the pipeline at the rear of the CF flange. This can meet the positioning of the sealing ring by the positioner in the connection and installation of vacuum pipelines at any tilt angle.

[0052] In Examples 1 and 2, the adjustment mechanism adopts a vertical parallel structure design to stabilize and support the positioning plate 1, ensuring that the top plate 11 of the positioning plate is close to and parallel to the front end face of the CF flange 99. Simultaneously, to further stabilize the directional movement of the support pile towards the cantilever beam, a spring 5 is installed on the bolt 4 connecting the cantilever seat and the support seat. The stepped through hole 323 on the support seat 32 is a downward-facing stepped hole, and part of the spring 5 is placed within the stepped portion of the port of the stepped through hole 323. The bolt 4 passes through the stepped through hole 323 and the spring 5 to connect the cantilever seat 22 and the support seat 32. During the installation and use of the positioner, without changing the connection state of the CF flange, the adjustment mechanism, through the adjusting bolt 4, drives the positioning plate 1 to radially press against the sealing ring 9 along the sealing surface of the CF flange 99, causing the central axis of the sealing ring 9 to align with the central axis of the CF flange and position the sealing ring.

[0053] In Embodiments 1 and 2, bolt 4 is a semi-threaded bolt, screw 6 is a fully threaded bolt, and the heads of bolt 4 and screw 6 are knurled; guide hole 322 and stepped through hole 323 are through holes; adjusting hole 223 and threaded hole 2210 are both threaded through holes.

[0054] The above-described positioning device 100 has completed the precise positioning and installation of the sealing ring 9. As an auxiliary tool in the vacuum pipeline connection, after positioning the sealing ring and connecting to the vacuum pipeline CF flange, the positioning device needs to be safely removed from the CF flange. Therefore, the top plate 11 of the positioning plate 1 is designed as a thin plate with parallel and smooth surfaces on both the front and back, and its thickness is less than the connection gap of the CF flange. The lower collar 12 of the positioning device is a straight cylindrical structure with coaxial inner and outer sections. A rectangular annular groove 311 is provided at the position where the front end of the support rod 31 of the support pile 3 connects to the collar of the positioning plate. The lower part of the positioning plate 1... The collar 12 of the part is connected in the annular groove 311 at the front end of the strut 31, and the positioning plate 1 can rotate perpendicular to the axis of the strut 31; the cantilever beam 2 is connected to the CF flange by inserting the cantilever into the connection hole from the rear of the CF flange and abutting against the inner wall of the connection hole; the guide post 222 and the bolt 4 pass through the support seat 32 to connect the cantilever beam 2 and the support pile 3, and the bolt 4 connecting the cantilever seat 22 and the support seat 32 is provided with a spring 5; the tail seat 221 is fixedly connected to the cantilever beam 2 and the CF flange 99 by screws 6 passing through the threaded hole and abutting against the pipe 993 at the rear of the CF flange 99. The design of these structural features allows the positioner 100 to be safely removed from the CF flange 99 by simply loosening the bolts 4 (and the screws 6) and rotating the positioning plate 1 away from the connection gap of the CF flange 99.

[0055] Through the above-mentioned structural design and practical application of the positioner, it can be seen that the CF flange sealing ring positioning structure of the present invention can avoid misalignment and unilateral compression of the sealing ring in the CF flange connection of high vacuum pipeline, and achieve accurate positioning of the sealing ring. Moreover, the positioner is simple to use and easy to disassemble. It does not damage the high vacuum pipeline and CF flange in application, and has significant practical significance in reducing repeated disassembly and assembly after pipeline connection and improving work efficiency.

Claims

1. A CF flange sealing ring positioning structure, characterized in that, The positioning structure includes a plurality of positioners (100) evenly distributed in the circumferential direction of the CF flange (99); the positioner includes: a positioning plate (1) and an adjustment mechanism; One end of the positioning plate (1) is fitted onto the adjustment mechanism, and the other end is parallel to the sealing surface of the CF flange (99), and abuts against the outer wall of the sealing ring (9) along the radial direction of the CF flange. The adjustment mechanism includes: a cantilever beam (2) and a support pile (3) arranged in parallel in the same direction, and a bolt (4) connecting the cantilever beam (2) and the support pile (3). The adjustment mechanism is connected to the CF flange (99) through the cantilever beam (2), and to the positioning plate (1) through the support pile (3). The bolt (4) adjusts the movement of the support pile (3) relative to the cantilever beam (2), thereby driving the positioning plate (1) to translate radially along the CF flange (99). The positioning plate (1) includes an integrally formed top plate (11) and a collar (12) located at the lower end of the top plate (11) and perpendicularly connected to the top plate (11). The top plate (11) is parallel to the sealing surface of the CF flange (99) and abuts against the outer wall of the sealing ring (9) along the radial direction of the CF flange (99). The collar (12) is loosely mounted on the adjustment mechanism. Top teeth (111) are symmetrically arranged outward at the upper end of the top plate (11). The collar (12) arranged at the lower part of the top plate (11) is a straight cylindrical structure with coaxial inner and outer sides. The lower end of the top plate (11) is axially and vertically connected to the outer wall of the collar (12) as a whole. The cantilever beam (2) is provided with a cantilever (21) and a cantilever seat (22) connected to one end of the cantilever (21); the support pile (3) is provided with a strut (31) and a support seat (32) connected to one end of the strut (31); a spring (5) is provided on the bolt (4) connecting the cantilever beam (2) and the support seat (32); the stepped through hole (323) on the support seat (32) is a stepped hole from top to bottom; a part of the spring (5) is placed in the stepped hole (323) at the port of the stepped through hole (323).

2. The CF flange sealing ring positioning structure according to claim 1, characterized in that, The cantilever (21) is inserted into the connection hole (992) of the CF flange (99) from behind and hangs on the inner wall of the connection hole (992); The cantilever seat (22) is provided with a tailstock (221), a guide post (222) and an adjustment hole (223) in order from far to near the cantilever (21); the guide post (222) and the adjustment hole (223) are parallel to each other and perpendicular to the cantilever (21); the tailstock (221) is provided with a threaded hole (2210), and the screw (6) passes through the threaded hole (2210) and abuts against the outer wall of the pipe (993) at the rear of the CF flange (99); the guide post (222) is inserted into the corresponding hole of the support pile (3); the bolt (4) passes through the corresponding hole and the adjustment hole (223) on the support pile (3) to connect the cantilever beam (2) and the support pile (3).

3. The CF flange sealing ring positioning structure according to claim 2, characterized in that, The other end of the support rod (31) is connected to the collar (12) of the positioning plate (1). The support base (32) is provided with a guide hole (322) and a stepped through hole (323) in parallel. The guide post (222) of the cantilever beam (2) is inserted into the guide hole (322). The stepped through hole (323) is used to connect with the adjustment hole (223) of the cantilever beam (2) by bolts (4).

4. The CF flange sealing ring positioning structure according to claim 1, characterized in that, The cantilever beam (2) includes an integrally formed cantilever (21) and a cantilever seat (22) connected to one end of the cantilever. The cantilever (21) is inserted into the connection hole (992) of the CF flange (99) from the rear and abuts against the inner wall of the connection hole (992); The cantilever seat (22) is provided with a tailstock (221), a guide post (222) and an adjustment hole (223); the tailstock (221) is provided with a threaded hole (2210), and the screw (6) passes through the threaded hole and abuts against the outer wall of the pipe (993) at the rear of the CF flange (99), pressing the cantilever (21) against the inner wall of the connecting hole (992); the guide post (222) is located at the center of the surface of the cantilever seat (22) relative to the support seat (32) of the support pile (3) and is perpendicular to the cantilever (21); the adjustment hole (223) is coaxially arranged with the guide post (222).

5. The CF flange sealing ring positioning structure according to claim 4, characterized in that, The support pile (3) includes an integrally formed strut (31) and a support seat (32) connected to one end of the strut (31). The other end of the support rod (31) is connected to the collar (12) of the positioning plate (1). The support base (32) is provided with a stepped through hole (323) at the center position. The stepped through hole (323) is engaged with the guide post (222) of the cantilever beam (2). The bolt (4) is inserted from the stepped through hole (323) and connected to the adjustment hole (223) of the cantilever beam (2).

6. The CF flange sealing ring positioning structure according to claim 4, characterized in that, The cross-section of the guide post (222) is non-circular.

7. The CF flange sealing ring positioning structure according to claim 3 or 5, characterized in that, The support rod (31) is provided with an annular groove (311) that is coaxial with the support rod (31) and has a rectangular cross section at the position of the collar (12) of the positioning plate (1). The collar (12) of the positioning plate (1) is loosely installed in the annular groove (311).

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