A sample sharing positioning platform suitable for micro-area analysis

Abstract

The application provides a sample sharing positioning platform suitable for micro area analysis, and relates to the field of sample analysis. The sample sharing positioning platform suitable for micro area analysis comprises a workbench and a scanning electron microscope, the top of the workbench is provided with a coordinate reference shaft, and a limiting ring frame, a sample table, a lead screw, a forward and reverse motor, a guide rod and a hydraulic cylinder are arranged between the coordinate reference shaft and the scanning electron microscope. The sample sharing positioning platform suitable for micro area analysis controls the movement of the sample table to make the detection coordinate point coincide with the observation coordinate point, so that the visual field during the previous detection can be moved to the detection light path of the transmission electron microscope, the FIB, the optical microscope, the microscopic infrared and other equipment on the second workbench. The sample sharing positioning platform is composed of parts such as the limiting ring frame, the sample table, the lead screw, the forward and reverse motor, the hydraulic cylinder and the touch control screen, so that the detected visual field of the internal sample of the sample table can be detected at the same position for multiple times, and the scientificity and rigor of sample detection are improved.

Description

Technical Field

[0001] This invention relates to a positioning platform, specifically a sample sharing positioning platform suitable for micro-area analysis, belonging to the field of sample analysis technology. Background Technology

[0002] With the rapid advancement of science and technology and the advancement of various microbeam techniques, microscopic research has gradually become an indispensable part of scientific research. Micro-area analysis refers to the direct (in-situ) analysis of the chemical composition of selected micro-areas under an optical microscope using various microbeam or probe techniques. Many micro-area analysis methods can simultaneously perform morphological observation and structural determination, and the spatial resolution of micro-area analysis is at the micrometer level.

[0003] In micro-area analysis, researchers typically use transmission electron microscopes (TEM), fibrillation microscopy (FIB), scanning electron microscopes (SEM), and optical microscopes (such as organic petrographic platforms, micro-infrared microscopes, and micro-laser Raman microscopes). Different instruments have different sample stages, and their stage designs vary, which means that sample stages cannot be shared. When researchers need to perform multiple types of micro-area analysis, they need to transfer samples from one instrument to another for testing, and they need to find the target field of view again. Moreover, it is often difficult to find the field of view that has been used before, which affects the scientific rigor, objectivity, and accuracy of the sample study. Summary of the Invention

[0004] (a) Technical problems to be solved The purpose of this invention is to provide a sample sharing and positioning platform suitable for micro-area analysis in order to solve the above-mentioned problems. This addresses the issue that in the prior art, different devices have different sample stages, and the design of these stages varies, which prevents them from being shared. When researchers need to perform multiple types of micro-area analysis, they need to transfer samples from one device to another for testing, requiring them to find the target field of view again. Moreover, it is often difficult to find the field of view that has been used before, which affects the scientific rigor, objectivity, and accuracy of sample research.

[0005] (II) Technical Solution To achieve the above objectives, the present invention provides the following technical solution: a sample sharing and positioning platform suitable for micro-area analysis, comprising a worktable and a scanning electron microscope (SEM). A coordinate reference axis is provided on the top of the worktable. A limit ring, sample stage, lead screw, forward and reverse motors, guide rod, and hydraulic cylinder are provided between the coordinate reference axis and the SEM. Controlling the movement of the sample stage ensures that the detection coordinate point coincides with the observation coordinate point, allowing the field of view from the previous detection to be moved into the detection optical path of equipment such as a transmission electron microscope, FIB, optical microscope, and micro-infrared microscope on the second worktable. This ensures that the field of view of the sample inside the sample stage remains in the same position when multiple detections are required. A three-dimensional scanning camera and a touch control screen are respectively provided on both sides of the limit ring, allowing for multiple detections of the sample inside the sample stage. The field of view being inspected is in the same position, improving the scientific rigor and precision of sample inspection. The 3D scanning camera scans the 3D data information between the coordinate reference axis, the sample stage, and the inspection head. The touch control screen controls the forward and reverse motors and hydraulic cylinders to work together, causing the forward and reverse motors and hydraulic cylinders to move the sample stage. The limiting ring frame has a cable box inside, and multiple support plates are set between the bottom of the limiting ring frame and the worktable. The touch control screen has a processor, a comparison unit, a storage device, and an instruction unit inside. The positioning function key controls the 3D scanning camera to scan the 3D data information between the coordinate reference axis, the sample stage, and the inspection head. The processor inside the touch control screen sets the point at the bottom of the sample stage, located between the coordinate reference axis and the inspection head, as the positioning coordinate point.

[0006] Preferably, the top of the sample stage has a sample slot, and the bottom of the sample stage is fixedly connected to multiple limiting base plates. These limiting base plates limit the sample stage to prevent it from being restricted. The limiting base plates are L-shaped. The movement of the sample stage is only for fine-tuning the sample position, so the maximum radius that the sample stage needs to move is small, and the limiting base plates will not collide with the coordinate reference axis. The sample stage is located at the top of the coordinate reference axis. The instruction unit is equipped with a detection function key, a reset function key, and a positioning function key. Clicking the detection function key controls the movement of the sample stage so that the detection coordinate point coincides with the observation coordinate point, thereby moving the field of view from the previous detection to the detection optical path of the transmission electron microscope, FIB, optical microscope, micro-infrared microscope, etc. on the second worktable.

[0007] Preferably, the scanning electron microscope (SEM) includes a display screen, which is mounted on one end of the SEM. A mounting plate is fixedly connected between the other end of the SEM and the work stage, allowing the touch control screen to control the forward and reverse motors and hydraulic cylinders to move the sample stage. The display screen is located on top of the touch control screen. The forward and reverse motors and hydraulic cylinders move the sample stage, causing the slide to make fine adjustments left, right, forward, and backward movements at the bottom of the SEM's detection head. The SEM's detection head then detects the appropriate position of the sample and obtains detection data.

[0008] Preferably, one end of the 3D scanning camera passes through the limiting ring frame and is fixedly connected to the limiting ring frame. The sample stage is sleeved on the outside of the lead screw through a ball nut pair. The working positive and negative motors drive the lead screw to rotate clockwise or counterclockwise. The rotating lead screw drives the sample stage with a threaded position to reciprocate. The lead screw is fixedly connected to the output end of the positive and negative motors.

[0009] Preferably, the forward and reverse motors have a limiting groove, and the guide rod passes through the limiting groove. The guide rod passes through the limiting groove of the forward and reverse motors to limit the movement of the forward and reverse motors, so that the forward and reverse motors can only reciprocate outside the guide rod. Both ends of the guide rod are fixedly connected to the limiting ring frame.

[0010] Preferably, the hydraulic cylinder is fixedly connected to the limiting ring frame, and a transmission plate is fixedly connected to one end of the hydraulic cylinder. A transmission plate and a transmission bent plate are fixedly connected between the hydraulic cylinder and the forward and reverse motors. The L-shaped arrangement of the transmission bent plate avoids the transmission between the hydraulic cylinder and the forward and reverse motors from affecting the movement of the sample stage. The transmission plate is fixedly connected to the forward and reverse motors.

[0011] Preferably, a control cable is fixedly connected between the cable box and the forward and reverse motors. The cable box is electrically connected to the 3D scanning camera and the hydraulic cylinder. A power cable is fixedly connected to one side of the cable box. A control cable is electrically connected between the forward and reverse motors and the cables inside the cable box. The curved control cable ensures that the forward and reverse motors have sufficient movement space. Through the cooperation of the power cable, the cables inside the cable box, and the control cable, power and control commands are provided to the hydraulic cylinder and the forward and reverse motors. The power cable passes through the limit ring frame and is fixedly connected to the limit ring frame.

[0012] Preferably, a socket is fixedly connected between one side of the wiring box and the limiting ring frame, and a mounting bend plate is fixedly connected to the top of the limiting ring frame. The touch control screen can be quickly disassembled as needed. The sample sharing positioning platform composed of the limiting ring frame, sample stage, lead screw, forward and reverse motor, hydraulic cylinder, touch control screen and other parts can be quickly disassembled. A fixing bolt is threadedly connected between the mounting bend plate and the touch control screen. Moving the fixing bolt away from the mounting bend plate and the touch control screen will cause the touch control screen to lose its fixation.

[0013] Preferably, each of the multiple support plates has a fixedly connected insert rod at its bottom. The top of the workbench has multiple mounting slots, and the insert rods are respectively positioned within these slots. The limiting ring frame is installed onto the top of the workbench using the insert rods and mounting slots, ensuring that the center lines of the limiting ring frame and the coordinate reference axis are aligned on the same horizontal line, thus completing the initial positioning of the limiting ring frame and the sample stage. Handles are fixedly connected to both sides of the limiting ring frame. Two rubber sleeves are fixedly connected to the top of one of the handles. A portion of the power cord is pressed into the two rubber sleeves, and the elastic rubber sleeves rub against the power cord, limiting its movement. This confines the power cord to one side of the limiting ring frame, ensuring its safety during the handling of the limiting ring frame while gripping the handle.

[0014] Preferably, an operating bolt is connected to one side of the worktable, and an L-shaped groove is formed on the top of the worktable. The coordinate reference axis is set inside the L-shaped groove. The moving operating bolt pulls the coordinate reference axis through a pull line, causing the coordinate reference axis to move into the L-shaped groove, making the protrusion on the top of the worktable disappear. A spring is fixedly connected between the bottom of the coordinate reference axis and the worktable, and a pull line is fixedly connected between the coordinate reference axis and the operating bolt. After the pull line is released from pulling the coordinate reference axis, the rebounding spring pushes the coordinate reference axis, causing the top of the coordinate reference axis to move to the top of the worktable.

[0015] This invention provides a sample sharing and positioning platform suitable for micro-area analysis, which has the following beneficial effects: 1. This sample-sharing positioning platform, suitable for micro-area analysis, controls the movement of the sample stage to align the detection coordinates with the observation coordinates. This allows the field of view from the previous test to be moved to the detection optical path of instruments such as transmission electron microscopes, FIB, optical microscopes, and micro-infrared microscopes on a second worktable. It ensures that the field of view for multiple tests on samples within the sample stage remains in the same position, improving the scientific rigor and precision of sample analysis. The sample-sharing positioning platform, composed of components such as a limiting ring frame, sample stage, lead screw, forward and reverse motors, hydraulic cylinders, and a touch control screen, improves the uniformity of sample testing using scanning electron microscopes, transmission electron microscopes, FIB, optical microscopes, and micro-infrared microscopes, thereby enhancing the accuracy of sample data analysis.

[0016] 2. This sample sharing positioning platform, suitable for micro-area analysis, pushes the sample stage so that the detection coordinate point moves and coincides with the positioning coordinate point. At this time, the center lines of the limiting ring frame, sample stage, and coordinate reference axis are set on the same horizontal line. The center point line of the sample stage then moves between the device's detection head and the coordinate reference axis, establishing new detection, observation, and positioning coordinate points. Only the positioning coordinate reference axis and the bottom center point of the sample stage need to be established, reducing the workload of the 3D scanning camera in establishing detection, observation, and positioning coordinate points, and reducing the cost of using the 3D scanning camera.

[0017] 3. This sample sharing positioning platform, suitable for micro-area analysis, uses a limiting ring frame that is fixed to a support plate and has inserts rods into the mounting slots to install the limiting ring frame onto the top of the worktable. The mounting slots are distributed on the top of the worktable with the coordinate reference axis as the central axis, while the inserts are distributed in a ring around the central axes of the limiting ring frame and the sample stage. Therefore, by positioning the limiting ring frame onto the top of the worktable using the inserts and mounting slots, the center lines of the limiting ring frame and the coordinate reference axis are aligned on the same horizontal line, completing the initial positioning of the limiting ring frame and the sample stage.

[0018] 4. This sample sharing positioning platform, suitable for micro-area analysis, presses a portion of the power cord into the inside of two rubber sleeves. The rubber sleeves, made with a certain degree of elasticity, rub against the power cord, limiting its movement. The power cord is confined to one side of the limiting ring frame, ensuring its safety during handling and movement. The touch control screen can be quickly disassembled as needed. The sample sharing positioning platform, composed of the limiting ring frame, sample stage, lead screw, forward and reverse motors, hydraulic cylinder, and touch control screen, can be quickly disassembled. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the structure of the workbench of the present invention; Figure 3 This is a schematic diagram of the transmission bending plate of the present invention; Figure 4 This is a schematic diagram of the guide rod of the present invention; Figure 5 This is a schematic diagram of the support plate of the present invention; Figure 6 This is a schematic diagram of the limiting ring frame of the present invention; Figure 7 This is a schematic diagram of the sample stage of the present invention; Figure 8 For the present invention Figure 7 A schematic diagram of the structure of part A; Figure 9 This is a schematic diagram of the structure of the limiting base plate of the present invention; Figure 10 This is a schematic diagram of the grip structure of the present invention; Figure 11 This is a schematic diagram of the structure for installing the bending plate of the present invention; Figure 12 This is a schematic diagram of the coordinate axis structure of the present invention; Figure 13 This is a schematic diagram of the structure of the draw wire of the present invention; Figure 14This is a schematic diagram of the system structure of the touch control screen of the present invention; Figure 15 This is a schematic diagram of the connection structure of the instruction unit of the present invention.

[0020] In the diagram: 1. Workbench; 2. Mounting plate; 3. Limiting ring frame; 4. Sample stage; 5. Sample slot; 6. Limiting base plate; 7. Lead screw; 8. Forward and reverse motors; 9. 3D scanning camera; 10. Cable box; 11. Power cord; 12. Transmission plate; 13. Transmission bending plate; 14. Hydraulic cylinder; 15. Touch control screen; 16. Limiting slot; 17. Mounting bending plate; 18. Handle; 19. Rubber sleeve; 20. Support plate; 21. Insert rod; 22. Mounting slot; 23. Coordinate reference axis; 24. Control cable; 25. Scanning electron microscope; 26. Display screen; 27. Processor; 28. Comparison unit; 29. ​​Storage device; 30. Command unit; 31. Detection function key; 32. Reset function key; 33. Positioning function key; 34. Operating bolt; 35. Pull wire; 36. Spring; 37. Fixing bolt; 38. Socket; 39. Guide rod. Detailed Implementation

[0021] This invention provides a sample sharing and positioning platform suitable for micro-area analysis.

[0022] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 , Figure 12 , Figure 13 , Figure 14 and Figure 15The system includes a worktable 1 and a scanning electron microscope 25. The scanning electron microscope 25 includes a display screen 26, which is mounted at one end of the microscope. A mounting plate 2 is fixedly connected between the other end of the microscope and the worktable 1. A 3D scanning camera 9 scans the 3D data information between the coordinate reference axis 23, the sample stage 4, and the detection head. The processor 27 inside the touch control screen 15 sets the point at the bottom of the sample stage 4, located between the coordinate reference axis 23 and the detection head, as the positioning coordinate point. The worktable 1 has a coordinate reference axis 23 on its top. A limit ring 3, a sample stage 4, a lead screw 7, a forward and reverse motor 8, a guide rod 39, and a hydraulic cylinder 14 are provided between the coordinate reference axis 23 and the scanning electron microscope 25. The sample stage 4 has a sample slot 5 on its top, which moves the field of view from the previous detection to the detection optical path of transmission electron microscope, FIB, optical microscope, micro-infrared microscope, etc., on the second worktable 1. When a sample needs to be tested multiple times, the field of view is in the same position, which improves the scientificity and rigor of the sample testing. Multiple limiting base plates 6 are fixedly connected to the bottom of the sample stage 4. The limiting base plates 6 are set in an L-shape. The sample stage 4 is set at the top of the coordinate reference axis 23. The instruction unit 30 is equipped with a detection function key 31, a reset function key 32, and a positioning function key 33. A three-dimensional scanning camera 9 and a touch control screen 15 are respectively set on both sides of the limiting ring frame 3. The display screen 26 is set at the top of the touch control screen 15. A cable box 10 is set inside the limiting ring frame 3. Multiple support plates 20 are set between the bottom of the limiting ring frame 3 and the worktable 1. The touch control screen 15 is equipped with a processor 27, a comparison unit 28, a storage device 29, and an instruction unit 30. Clicking the reset function key 32 makes the touch control screen 15 control the forward and reverse motors 8 and the hydraulic cylinder 14 to work, pushing the sample stage 4 so that the detection coordinate point moves to coincide with the positioning coordinate point.

[0023] Specifically, after installing the limiting ring frame 3 onto the top of the worktable 1, the center point of the coordinate reference axis 23, the sample stage 4, and the detection head of the scanning electron microscope 25 will be on the same horizontal line. The glass slide carrying the sample is then placed into the sample slot 5 opened in the sample stage 4, completing the initial positioning. At this time, the touch control screen 15 and the 3D scanning camera 9 are turned on. Then, the positioning function key 33 on the touch control screen 15 is pressed. The positioning function key 33 controls the working 3D scanning camera 9 to scan the 3D data information between the coordinate reference axis 23, the sample stage 4, and the detection head. The processor 27 inside the touch control screen 15 sets the point at the bottom of the sample stage 4, located between the coordinate reference axis 23 and the detection head, as the positioning coordinate point and sends the coordinate point to the storage device 29 for storage. At this time, the center lines of the limiting ring frame 3 and the sample stage 4 are on the same horizontal line.

[0024] Subsequently, the staff uses the touch control screen 15 to control the forward and reverse motors 8 and hydraulic cylinders 14 to work together, causing the motors 8 and cylinders 14 to move the sample stage 4, allowing the slide to be finely adjusted left, right, forward, and backward at the bottom of the scanning electron microscope 25's detection head. The detection head of the scanning electron microscope 25 then detects the appropriate position of the sample and obtains the detection data. At this time, clicking the positioning function key 33 activates the 3D scanning camera 9 to scan the coordinate reference axis 23, the sample stage 4, and the detection head, setting the point on the bottom of the sample stage 4 between the control cable 24 and the detection head as the detection coordinate point. The detection coordinate point is then transferred to the storage device 29 for storage.

[0025] After the sample testing is completed, the staff controls the movement of the limiting ring frame 3 and installs it on the second worktable 1, which is equipped with transmission electron microscope, FIB, optical microscope, and micro-infrared microscope, so that the limiting ring frame 3, the coordinate reference axis 23 installed on the second worktable 1, and the center point of the equipment detection head are set on the same horizontal line.

[0026] Then, clicking the positioning function key 33 controls the 3D scanning camera 9 and processor 27 to work together, using the point between the coordinate reference axis 23 located at the bottom of the sample stage 4 on the second worktable 1 and the equipment detection head as the observation coordinate point. This observation coordinate point is located above the detection optical path of equipment such as transmission electron microscope, FIB, optical microscope, and micro-infrared microscope on the second worktable 1. Because the relative position between the limiting ring frame 3 and the sample stage 4 remains unchanged, after the 3D scanning camera 9 scans the internal spatial coordinates of the limiting ring frame 3, it can simultaneously display the detection coordinate point, observation coordinate point, and positioning coordinate point inside the limiting ring frame 3.

[0027] At this point, clicking the detection function key 31 activates the touch control screen 15, which controls the forward and reverse motors 8 and hydraulic cylinder 14 to move the sample stage 4. This movement ensures the detection coordinate point coincides with the observation coordinate point, allowing the field of view from the previous detection to be moved onto the second worktable 1 and placed within the detection optical path of instruments such as transmission electron microscopes, FIB microscopes, optical microscopes, and micro-infrared microscopes. This ensures that the field of view for multiple tests of samples within the sample stage 4 remains in the same position, improving the scientific rigor and precision of sample testing. The sample sharing and positioning platform, composed of components such as the limiting ring frame 3, sample stage 4, lead screw 7, forward and reverse motors 8, hydraulic cylinder 14, and touch control screen 15, enhances the uniformity of sample testing using scanning electron microscopes 25, transmission electron microscopes, FIB microscopes, optical microscopes, and micro-infrared microscopes, thereby improving the accuracy of sample data detection and analysis.

[0028] Clicking the reset function key 32 enables the touch control screen 15 to control the forward and reverse motors 8 and hydraulic cylinder 14, pushing the sample stage 4 so that the detection coordinate point moves and coincides with the positioning coordinate point. At this time, the center lines of the limit ring frame 3, sample stage 4, and coordinate reference axis 23 are set on the same horizontal line. The center point line of the sample stage 4 then moves between the equipment detection head and the coordinate reference axis 23, establishing new detection, observation, and positioning coordinate points. Only the positioning coordinate reference axis 23 and the bottom center point of the sample stage 4 need to be established, reducing the workload of the 3D scanning camera 9 in establishing detection, observation, and positioning coordinate points, and reducing the cost of using the 3D scanning camera 9.

[0029] Please refer to it again. Figure 3 , Figure 4 , Figure 7 , Figure 8 and Figure 9 One end of the 3D scanning camera 9 passes through the limiting ring frame 3 and is fixedly connected to the limiting ring frame 3. The sample stage 4 is sleeved on the outside of the lead screw 7 through a ball nut pair. The lead screw 7 is fixedly connected to the output end of the forward and reverse motor 8. The forward and reverse motor 8 has a limiting groove 16. The guide rod 39 passes through the limiting groove 16. Both ends of the guide rod 39 are fixedly connected to the limiting ring frame 3. The guide rod 39 passes through the limiting groove 16 of the forward and reverse motor 8 to limit the movement of the forward and reverse motor 8, so that the forward and reverse motor 8 can only reciprocate outside the guide rod 39. The hydraulic cylinder 14 is fixedly connected to the limiting ring frame 3. One end of the hydraulic cylinder 14 is fixedly connected to the transmission plate 12. The forward and reverse motor 8 is pushed through the transmission plate 12 and the transmission bent plate 13, so that the forward and reverse motor 8 reciprocates inside the limiting ring frame 3 under the limitation of the guide rod 39, thereby controlling the position of the sample stage 4. The transmission bent plate 13 is fixedly connected between the transmission plate 12 and the forward and reverse motor 8.

[0030] Specifically, the guide rod 39 fixed inside the limiting ring frame 3 passes through the limiting slot 16 opened in the forward and reverse motor 8, limiting the movement of the forward and reverse motor 8 so that the forward and reverse motor 8 can only reciprocate outside the guide rod 39. Furthermore, a transmission plate 12 and a transmission bending plate 13 are fixedly connected between the forward and reverse motor 8 and the hydraulic cylinder 14. Therefore, when the hydraulic cylinder 14 is working, it can push the forward and reverse motor 8 through the transmission plate 12 and the transmission bending plate 13, causing the forward and reverse motor 8 to reciprocate inside the limiting ring frame 3 under the limitation of the guide rod 39, thus controlling the position of the sample stage 4.

[0031] Furthermore, the lead screw 7 fixed to the forward and reverse motor 8 is threadedly connected to the sample stage 4. Therefore, when the forward and reverse motor 8 is working, it drives the lead screw 7 to rotate clockwise or counterclockwise, and the rotating lead screw 7 drives the sample stage 4, which is threaded at its position, to reciprocate. Multiple limiting plates 6 are fixedly connected to the bottom of the sample stage 4 to limit its movement and prevent it from being restricted. The limiting plates 6 are L-shaped, and the movement of the sample stage 4 is only for fine-tuning the sample position. Therefore, the maximum radius that the sample stage 4 needs to move is small, and the limiting plates 6 will not collide with the coordinate reference axis 23.

[0032] A transmission plate 12 and a transmission bending plate 13 are fixedly connected between the hydraulic cylinder 14 and the forward and reverse motor 8. The L-shaped arrangement of the transmission bending plate 13 prevents the transmission between the hydraulic cylinder 14 and the forward and reverse motor 8 from affecting the movement of the sample stage 4.

[0033] Please refer to it again. Figure 3 , Figure 6 , Figure 7 and Figure 11 A control cable 24 is fixedly connected between the cable box 10 and the forward / reverse motor 8. The cable box 10 is electrically connected to the 3D scanning camera 9 and the hydraulic cylinder 14. A power cable 11 is fixedly connected to one side of the cable box 10. The power cable 11 passes through the limiting ring frame 3 and is fixedly connected to the limiting ring frame 3. Through the cooperation of the power cable 11, the internal cables of the cable box 10, and the control cable 24, power and control commands are provided to the hydraulic cylinder 14 and the forward / reverse motor 8. The curved control cable 24 ensures that the forward / reverse motor 8 has sufficient movement space. A socket 38 is fixedly connected between one side of the cable box 10 and the limiting ring frame 3. A mounting bend 17 is fixedly connected to the top of the limiting ring frame 3. A fixing bolt 37 is threadedly connected between the mounting bend 17 and the touch control screen 15.

[0034] Specifically, the limiting ring frame 3 is designed as a hollow pipe, reducing the weight of the sample sharing positioning platform composed of the limiting ring frame 3, sample stage 4, lead screw 7, forward and reverse motors 8, hydraulic cylinder 14, and touch control screen 15, thus facilitating movement. A cable tray 10 is installed inside the limiting ring frame 3, and the 3D scanning camera 9 and hydraulic cylinder 14 are electrically connected to the cables inside the cable tray 10. A control cable 24 is electrically connected between the forward and reverse motors 8 and the cables inside the cable tray 10. Through the cooperation of the power cord 11, the cables inside the cable tray 10, and the control cable 24, power and control commands are provided to the hydraulic cylinder 14 and the forward and reverse motors 8. Furthermore, the curved control cable 24 ensures that the forward and reverse motors 8 have sufficient movement space.

[0035] Please refer to it again. Figure 1 , Figure 2 , Figure 3 , Figure 9 and Figure 13Multiple support plates 20 are fixedly connected to the bottom of each with a rod 21. Multiple mounting slots 22 are provided on the top of the workbench 1, and the rods 21 are respectively positioned inside each mounting slot 22. The limiting ring frame 3 is inserted into the mounting slot 22 via the rods 21 fixed to the support plates 20. The limiting ring frame 3 is then installed on the top of the workbench 1 using the rods 21 and the mounting slots 22 for positioning. This aligns the centerline of the limiting ring frame 3 and the coordinate reference axis 23 on the same horizontal line, completing the initial positioning of the limiting ring frame 3 and the sample table 4. The limiting ring frame 3 is then installed on the top of the workbench 1. Handles 18 are fixedly connected to both sides of the limiting ring frame 3, one of which... Two rubber sleeves 19 are fixedly connected to the top of the worktable 18. The rubber sleeves 19 are made of rubber and have a certain elasticity. They rub against the power cord 11 to limit the power cord 11. An operating bolt 34 is connected to one side of the worktable 1. An L-shaped groove is opened on the top of the worktable 1. The coordinate reference axis 23 is set inside the L-shaped groove. A spring 36 is fixedly connected between the bottom of the coordinate reference axis 23 and the worktable 1, so that the coordinate reference axis 23 moves into the L-shaped groove, so that the protrusion on the top of the worktable 1 disappears and a glass slide can be placed on the top of the worktable 1 for sample detection. A pull wire 35 is fixedly connected between the coordinate reference axis 23 and the operating bolt 34.

[0036] Specifically, multiple mounting slots 22 are provided on the top of the worktable 1. After the end of the control limiting ring frame 3 that fixes the 3D scanning camera 9 is close to the mounting plate 2, the limiting ring frame 3 is inserted into the mounting slot 22 through the insertion rod 21 fixed by the support plate 20, thus installing the limiting ring frame 3 onto the top of the worktable 1. The mounting slots 22 are distributed on the top of the worktable 1 with the coordinate reference axis 23 as the central axis, while the insertion rods 21 are distributed in a ring around the central axis of the limiting ring frame 3 and the sample stage 4. Therefore, by positioning the limiting ring frame 3 onto the top of the worktable 1 using the insertion rods 21 and the mounting slots 22, the center lines of the limiting ring frame 3 and the coordinate reference axis 23 are set on the same horizontal line, completing the initial positioning of the limiting ring frame 3 and the sample stage 4.

[0037] Handles 18 are fixedly connected to both sides of the limiting ring frame 3, and two rubber sleeves 19 are fixedly connected to each handle 18. A portion of the outer side of the power cord 11 can be pressed into the two rubber sleeves 19. The rubber sleeves 19, which are made of rubber with a certain degree of elasticity, rub against the power cord 11, thus limiting the power cord 11. The power cord 11 is limited to one side of the limiting ring frame 3, ensuring the safety of the power cord 11 when the handle 18 is held and the limiting ring frame 3 is moved.

[0038] Rotate the fixing bolt 37 to move it away from the mounting bend plate 17 and the touch control screen 15, thus freeing the touch control screen 15 from its fixation. Then pull the touch control screen 15 to remove its plug from the socket 38, thus completing the disassembly of the touch control screen 15. The touch control screen 15 can be quickly disassembled as needed. The sample sharing positioning platform, composed of components such as the limit ring frame 3, sample stage 4, lead screw 7, forward and reverse motor 8, hydraulic cylinder 14, and touch control screen 15, can be quickly disassembled.

[0039] Then, rotate the operating bolt 34 to move it. The moving operating bolt 34 pulls the coordinate reference axis 23 through the pull line 35, so that the coordinate reference axis 23 moves into the L-shaped groove, making the protrusion on the top of the worktable 1 disappear. The glass slide can then be placed on the top of the worktable 1 for sample testing.

[0040] When the rotating operating bolt 34 releases the pull wire 35 from the coordinate reference axis 23, the rebounding spring 36 pushes the coordinate reference axis 23, causing the top of the coordinate reference axis 23 to move to the top of the worktable 1. At this time, the coordinate reference axis 23 cooperates with the 3D scanning camera 9 to establish coordinate points.

Claims

1. A sample sharing and positioning platform suitable for micro-area analysis, comprising a worktable (1) and a scanning electron microscope (25), characterized in that: The workbench (1) is provided with a coordinate reference axis (23) at the top. Between the coordinate reference axis (23) and the scanning electron microscope (25), a limit ring frame (3), a sample stage (4), a lead screw (7), a forward and reverse motor (8), a guide rod (39), and a hydraulic cylinder (14) are provided. A three-dimensional scanning camera (9) and a touch control screen (15) are respectively provided on both sides of the limit ring frame (3). A cable box (10) is provided inside the limit ring frame (3). Multiple support plates (20) are provided between the bottom of the limit ring frame (3) and the workbench (1). A processor (27), a comparison unit (28), a storage device (29), and an instruction unit (30) are provided inside the touch control screen (15). A control cable (24) is fixedly connected between the cable box (10) and the forward and reverse motor (8). The cable box (10) is electrically connected to the three-dimensional scanning camera (9) and the hydraulic cylinder (14). A power line (11) is fixedly connected to one side of the cable box (10). The power line (11) passes through the limiting ring frame (3) and is fixedly connected to the limiting ring frame (3). A socket (38) is fixedly connected between one side of the cable box (10) and the limiting ring frame (3), and a mounting elbow (17) is fixedly connected to the top of the limiting ring frame (3). A fixing bolt (37) is threadedly connected between the mounting elbow (17) and the touch control screen (15). Each of the support plates (20) has a fixed rod (21) at its bottom. The workbench (1) has multiple mounting slots (22) at its top. Each of the rods (21) is placed inside the mounting slots (22). Each of the limiting ring frame (3) has a handle (18) fixedly connected to both sides. One of the handles (18) has two rubber sleeves (19) fixedly connected to its top. The forward and reverse motor (8) has a limiting groove (16), the guide rod (39) passes through the limiting groove (16), and both ends of the guide rod (39) are fixedly connected to the limiting ring frame (3); The hydraulic cylinder (14) is fixedly connected to the limiting ring frame (3), and a transmission plate (12) is fixedly connected to one end of the hydraulic cylinder (14). A transmission bending plate (13) is fixedly connected between the transmission plate (12) and the forward and reverse motor (8). An operating bolt (34) is connected to one side of the workbench (1). An L-shaped groove is opened on the top of the workbench (1). The coordinate reference axis (23) is set inside the L-shaped groove. A spring (36) is fixedly connected between the bottom of the coordinate reference axis (23) and the workbench (1). A pull wire (35) is fixedly connected between the coordinate reference axis (23) and the operating bolt (34). One end of the three-dimensional scanning camera (9) passes through the limiting ring frame (3) and is fixedly connected to the limiting ring frame (3). The sample stage (4) is sleeved on the outside of the lead screw (7) through a ball nut pair. The lead screw (7) is fixedly connected to the output end of the forward and reverse motor (8). The forward and reverse motors (8) are driven by the transmission plate (12) and the transmission bending plate (13), so that the forward and reverse motors (8) reciprocate inside the limiting ring frame (3) under the limit of the guide rod (39), thereby controlling the position of the sample stage (4).

2. The sample sharing and positioning platform suitable for micro-area analysis according to claim 1, characterized in that: The sample stage (4) has a sample slot (5) on the top and multiple limiting base plates (6) are fixedly connected to the bottom of the sample stage (4). The limiting base plates (6) are set in an L shape. The sample stage (4) is set on the top of the coordinate reference axis (23). The instruction unit (30) is equipped with a detection function key (31), a reset function key (32) and a positioning function key (33).

3. A sample sharing and positioning platform suitable for micro-area analysis according to claim 1, characterized in that: The scanning electron microscope (25) includes a display screen (26), which is installed at one end of the scanning electron microscope (25). The other end of the scanning electron microscope (25) is fixedly connected to the worktable (1) with a mounting plate (2). The display screen (26) is located on the top of the touch control screen (15).

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