A lateral excitation bulk acoustic wave resonator

Abstract

The present application relates to a kind of transverse excitation body acoustic wave resonator, it includes substrate and the first piezoelectric layer being arranged on the substrate, the first piezoelectric layer is connected with multiple metal electrodes, second piezoelectric layer is arranged between adjacent metal electrode, multiple recesses are arranged on the first piezoelectric layer, the second piezoelectric layer is located in the recess, the surface of the second piezoelectric layer is flush with the surface of the first piezoelectric layer, the dielectric constant of the second piezoelectric layer is less than the dielectric constant of the first piezoelectric layer.The present application changes the dielectric constant of piezoelectric layer, expands the range of resonator electromechanical coupling coefficient, to improve device performance, meet the demand of current ultra-wideband filter.

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