A claw crucible mounting device

Abstract

The application discloses a claw type crucible mounting device, which comprises a lifting piece, a claw component and a cover. The cover is detachably mounted at the upper end opening position of the crucible to form a sealed cavity in the crucible. The edge position of the cover is provided with a hanging part. The claw component is provided with a claw, and the claw is connected to the hanging part in a hanging mode to lift the crucible and the cover through the claw. The lifting piece is connected to the claw component to lift the claw component through the lifting piece. Compared with the prior art, the claw type crucible mounting device can weaken the temperature mutation of the central area of the upper end and the lower end of the crucible, ensure the smooth temperature gradient of the crystal growth interface in the crucible, and provide conditions for ensuring the stable growth driving force at the crystal growth interface.

Description

Technical Field

[0001] This invention relates to the field of silicon carbide technology, and in particular to a claw-type crucible mounting device. Background Technology

[0002] Silicon carbide crystal growth is primarily carried out using the PVT (physical vapor transport) method at temperatures exceeding 2000℃. During crystal growth, the radial temperature gradient within the crucible is particularly important for the quality of the grown crystal; a uniform temperature gradient is more conducive to improving crystal quality.

[0003] Currently, there are two common methods for fixing crucibles in silicon carbide single crystal furnaces. One method involves setting a support shaft at the center of the crucible's bottom, with a tray mounted on the upper end of the shaft, and the crucible placed directly on the tray. The other method involves setting a lifting shaft above the crucible, with a circular connecting flange at the lower end of the lifting shaft, which is then connected and fixed to the top of the crucible using screws.

[0004] The above-mentioned fixing method has the following disadvantages: relative to the diameter of the crucible, the support shaft at the bottom of the crucible and the lifting shaft at the top of the crucible are very thin, and the contact surface with the crucible is very small. Moreover, the contact surface is located in the central area of ​​the crucible. This will cause local low temperature zones to appear in the central area of ​​the top or bottom of the crucible, affecting the radial temperature gradient inside the crucible, changing the growth driving force at the crystal growth interface, causing distortion of the crystal growth interface, and resulting in defects in the grown crystal. Summary of the Invention

[0005] The purpose of this invention is to provide a claw-type crucible mounting device that reduces temperature abrupt changes in the central regions of the upper and lower ends of the crucible, ensures a smooth temperature gradient at the crystal growth interface within the crucible, and provides conditions for ensuring a stable growth driving force at the crystal growth interface.

[0006] To achieve the above objectives, the present invention provides the following solution:

[0007] This invention discloses a claw-type crucible mounting device, including a lifting member, a hook component, and a cover; the cover is detachably mounted at the upper opening of the crucible to form a sealed cavity inside the crucible; a hooking portion is provided at the edge of the cover; the hook component has a hook, which is hooked and connected to the hooking portion to lift the crucible and the cover; the lifting member is connected to the hook component to lift the hook component.

[0008] Preferably, the cover includes a connecting ring and a sealing element; the sealing element is installed on the connecting ring to seal the through hole inside the connecting ring; the hook is located on the connecting ring; the connecting ring is used to install at the upper opening position of the crucible.

[0009] Preferably, the connecting ring is used for threaded connection with the upper end of the crucible.

[0010] Preferably, both the hook and the claw are multiple, and the multiple hooks are distributed at intervals along the edge of the cover, with each hook corresponding to one claw.

[0011] Preferably, the lower end of the hook portion has an opening, and the hook is inserted upward into the opening; a notch is formed between two adjacent hook portions that is recessed into the middle of the cover, and the notch is used to avoid the hook when the hook component and the cover move relative to each other in the vertical direction.

[0012] Preferably, the hooking part is provided with a plurality of limiting structures, which are respectively located on both sides of the hook, so that when the hook and the hooking part rotate relative to each other in the hooking state, the hook is limited from both sides.

[0013] Preferably, the lifting member passes through the hook component in a vertical direction, and the lower end of the lifting member has a supporting portion for supporting the hook component.

[0014] Preferably, a limiting member is installed on the supporting portion to restrict the relative rotation of the lifting member and the claw component, the limiting member passing through the claw component.

[0015] Preferably, the limiting member is a connecting screw, the supporting part is provided with a threaded hole that matches the connecting screw, and the hook component is provided with a vertical through hole for the connecting screw to pass through.

[0016] Preferably, the upper end of the lifting member is provided with an internal or external thread for connecting to the lifting mechanism.

[0017] The present invention achieves the following technical effects compared to the prior art:

[0018] In the mounting device of this invention, when the cover is lifted, the cover transfers heat to the hook component through thermal conduction, thereby forming a localized low-temperature zone at the attachment point. Since the attachment point is located at the edge of the cover, rather than its center, the temperature abrupt changes between the upper and lower central regions of the crucible are reduced, ensuring a smooth temperature gradient at the crystal growth interface within the crucible and providing conditions for a stable growth driving force at the crystal growth interface. Furthermore, the connection and separation operations between the hook and the attachment point are relatively convenient, facilitating rapid assembly and disassembly of the hook component and the cover. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a cross-sectional view of the claw-type crucible mounting device in this embodiment;

[0021] Figure 2 This is a schematic diagram of the claw-type crucible mounting device in this embodiment;

[0022] Explanation of reference numerals in the attached drawings: 1-Lifting component; 2-Connecting screw; 3-Hook component; 4-Connecting ring. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] The purpose of this invention is to provide a claw-type crucible mounting device that reduces temperature abrupt changes in the central region of the upper and lower surfaces of the crucible, ensures a smooth temperature gradient at the crystal growth interface within the crucible, and provides conditions for ensuring a stable growth driving force at the crystal growth interface.

[0025] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] Reference Figure 1 , Figure 2 This embodiment provides a claw-type crucible mounting device (hereinafter referred to as the mounting device), including a lifting member 1, a claw component 3, and a cover. The cover is detachably mounted at the upper opening of the crucible to form a sealed cavity inside the crucible. A hooking portion is provided at the edge of the cover. The claw component 3 has a claw that is hooked to the hooking portion to lift the crucible and the cover. The lifting member 1 is connected to the claw component 3 to lift the claw component 3.

[0027] In the mounting device of this embodiment, when the cover is lifted, the cover transfers heat to the hook component 3 through thermal conduction, thereby forming a local low-temperature zone at the attachment point. Since the attachment point is located at the edge of the cover rather than at the center, the temperature abrupt change between the upper and lower central regions of the crucible is reduced, ensuring a smooth temperature gradient at the crystal growth interface within the crucible and providing conditions for ensuring a stable growth driving force at the crystal growth interface.

[0028] As a possible example, in this embodiment, the cover includes a connecting ring 4 and a sealing element. The sealing element is mounted on the connecting ring 4 to seal the through hole inside the connecting ring 4. A hook-and-loop connection is located on the connecting ring 4, which is used to mount the cover at the upper opening of the crucible. Since the connection between the cover and the crucible and the hook component 3 is achieved through the connecting ring 4, the interaction force between the connecting ring 4 and the sealing element is reduced, thereby improving the sealing performance at the connection point between the connecting ring 4 and the sealing element. However, the actual implementation is not limited to this. For example, the connecting ring 4 and the sealing element can be an integral structure.

[0029] As a possible example, in this embodiment, the connecting ring 4 is used for a threaded connection to the upper end of the crucible. Specifically, the lower end of the connecting ring 4 has an external thread, and the upper opening of the crucible has an internal thread that matches the external thread. However, the actual implementation is not limited to this. For example, the lower end of the connecting ring 4 has an internal thread, and the upper opening of the crucible has an external thread that matches the internal thread. Another example is that the crucible and the connecting ring 4 are connected by screws.

[0030] As a possible example, in this embodiment, both the hook and the claw include multiple hooks, which are spaced apart along the edge of the cover, and each hook corresponds to one claw. Specifically, there are six hooks and six claws. The six hooks are spaced apart (preferably evenly distributed) along the circumference of the cover with the axis of the cover as the center. The six claws are spaced apart (preferably evenly distributed) along the circumference of the claw component 3 with the axis of the claw component 3 as the center. The claw component 3 is coaxial with the cover. However, the actual implementation is not limited to this. For example, there may be only one hook and one claw. Or, for example, there may be one hook and multiple claws; or one claw and multiple hooks.

[0031] As a possible example, in this embodiment, the lower end of the hook part has an opening, and the hook is inserted upward into the opening. This opening can be a hole or a groove. A notch is formed between two adjacent hook parts, recessed towards the center of the cover. This notch is used to avoid the hook when the hook component 3 moves relative to the cover in the vertical direction. In actual use, the hook component 3 is first positioned on the upper side of the cover and coaxial with the cover. Then, the hook is adjusted to be directly above the notch by rotating the hook component 3 (rotating about its own axis). Next, the hook component 3 is moved downwards to move the hook below the notch. Then, the hook is adjusted to be directly below the opening by rotating the hook component 3 (rotating about its own axis). Finally, the hook component 3 is moved upwards to insert the hook into the opening, at which point the hook is hooked and connected to the hook part. However, the actual implementation is not limited to this. For example, the hook can be mounted on the hook component 3 in a hinged manner, allowing the hook to avoid the cover by swinging when the hook component 3 moves relative to the cover in the vertical direction.

[0032] As a possible example, in this embodiment, the hook-and-mount part is provided with multiple limiting structures, which are respectively located on both sides of the hook claw, thereby limiting the hook claw from both sides when it rotates relative to the hook-and-mount part in the hooked state. However, the actual implementation is not limited to this. For example, by passing a limiting pin through both the hook claw and the hook-and-mount part simultaneously, the relative rotation between the hook claw component 3 and the cover can be restricted.

[0033] As a possible example, in this embodiment, the lifting member 1 passes through the hook member 3 in a vertical direction, and the lower end of the lifting member 1 has a support portion for supporting the hook member 3. When the lifting member 1 is lifted, the upper surface of the support portion contacts the lower surface of the hook member 3, thereby lifting the hook member 3 through the support portion. However, the actual implementation is not limited to this. For example, the lower end of the lifting member 1 may be threadedly connected to the hook member 3.

[0034] As a possible example, in this embodiment, a limiting member is installed on the support portion to restrict the relative rotation of the lifting member 1 and the hook member 3, and the limiting member passes through the hook member 3. However, the actual implementation is not limited to this. For example, the limiting member is provided on the hook member 3, and the limiting member passes through the support portion.

[0035] As a possible example, in this embodiment, the limiting member is a connecting screw 2, the support portion has a threaded hole that matches the connecting screw 2, and the claw component 3 has a vertical through hole through which the connecting screw 2 passes. That is, the limiting member is installed on the support portion by a threaded connection. However, the actual implementation is not limited to this. For example, the limiting member can be a vertical pin, the lower end of which is fixed to the support portion, and the claw component 3 has a vertical through hole through which the vertical pin passes.

[0036] As a possible example, in this embodiment, the upper end of the lifting member 1 is provided with an internal or external thread for connecting to the lifting mechanism, that is, the upper end of the lifting member 1 is threadedly connected to the lifting mechanism. However, the actual implementation is not limited to this. For example, the upper end of the lifting member 1 is connected to the lifting mechanism by a horizontal pin, which is fixed to the lifting mechanism and passes through the upper end of the lifting member 1.

[0037] As a possible example, in this embodiment, the outer diameter of the hook component 3 is the same as the outer diameter of the connecting ring 4, and the portion of the lifting member 1 above the support portion is a vertical cylinder, with the support portion being flange-shaped and coaxial with the vertical cylinder. Two connecting screws 2 are included, and the two connecting screws 2 are symmetrical about the axis of the support portion. However, the actual implementation is not limited to this. For example, the outer diameter of the hook component 3 may also be larger or smaller than the outer diameter of the connecting ring 4, the portion of the lifting member 1 above the support portion may be a vertical regular square prism, and the connecting screws 2 may include one or more.

[0038] This specification uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. Furthermore, those skilled in the art will recognize that, based on the ideas of the present invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A claw-type crucible mounting device, characterized in that, The system includes a lifting component, a hook component, and a cover. The cover is detachably mounted at the upper opening of the crucible to form a sealed cavity inside the crucible. A hook-and-loop connection is provided at the edge of the cover. The hook component has hooks that are connected to the hook-and-loop connection to lift the crucible and the cover. When the cover is lifted, it transfers heat to the hook component via thermal conduction, thereby creating a localized low-temperature zone at the hook-and-loop connection to reduce temperature abrupt changes in the central region of the crucible during crystal growth. The lifting component is connected to the hook component to lift the hook component. The cover includes a connecting ring and a sealing element; the sealing element is installed on the connecting ring to seal the through hole on the inner side of the connecting ring; the hook part is located on the connecting ring; the connecting ring is used to install at the upper opening position of the crucible; The lower end of the hook part has an opening, and the hook is inserted upward into the opening; a notch is formed between two adjacent hook parts that is recessed into the middle of the cover, and the notch is used to avoid the hook when the hook part and the cover move relative to each other in the vertical direction.

2. The claw-type crucible mounting device according to claim 1, characterized in that, The connecting ring is used for threaded connection with the upper end of the crucible.

3. The claw-type crucible mounting device according to claim 1, characterized in that, Both the hook and the claw include multiple hooks, which are distributed at intervals along the edge of the cover, and each hook corresponds to one claw.

4. The claw-type crucible mounting device according to claim 3, characterized in that, The hook part is provided with multiple limiting structures, which are located on both sides of the hook claw, so that when the hook claw and the hook part rotate relative to each other in the hooked state, the hook claw is limited from both sides.

5. The claw-type crucible mounting device according to claim 1, characterized in that, The lifting member passes through the hook component in a vertical direction, and the lower end of the lifting member has a supporting portion for supporting the hook component.

6. The claw-type crucible mounting device according to claim 5, characterized in that, The support portion is equipped with a limiting member for restricting the relative rotation of the lifting member and the claw component, the limiting member passing through the claw component.

7. The claw-type crucible mounting device according to claim 6, characterized in that, The limiting component is a connecting screw, the supporting part is provided with a threaded hole that matches the connecting screw, and the hook component is provided with a vertical through hole for the connecting screw to pass through.

8. The claw-type crucible mounting device according to claim 1, characterized in that, The upper end of the lifting component is provided with internal or external threads for connecting to the lifting mechanism.

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