Edge cleaning device and reticle protection device

Abstract

The present disclosure relates to an edge cleaning device and a mask protection device, the edge cleaning device comprising a bearing platform, a cleaning mechanism and a protection mechanism. The present disclosure supports and fixes the mask by the bearing platform, so that the mask is stably stopped on the bearing platform. The dust removal assembly cleans the edge of the mask body installed on the bearing platform by abutting the edge top surface of the main body not covered by the protective film and reciprocating, thereby removing the dust particles on the edge top surface of the mask body. In the working process of the cleaning mechanism, in order to reduce the possibility of the cleaning mechanism polluting the protective film covered on the pattern area, the pattern area is covered by the protection mechanism, that is, the protective film is covered by the isolation assembly. The possibility of splashing water droplets, dust particles and the like to the protective film by the dust removal assembly during reciprocating or dust removal action is reduced, and the possibility of the cleaning assembly polluting the protective film and causing the mask to be damaged and fail is reduced.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and more particularly to an edge cleaning device and a photomask protection device. Background Technology

[0002] Currently, photomasks are an essential mold in semiconductor manufacturing. Generally, to prevent particles from falling on the pattern area and affecting exposure imaging, a transparent protective film is placed on the pattern area. The protective film is attached to a special frame, and the protective film frame is fixed to the photomask with adhesive.

[0003] Currently, the main cleaning area for photomasks is the glass area, while dust particles also accumulate on the outer edge of the protective film frame and require cleaning. Summary of the Invention

[0004] The following is an overview of the subject matter described in detail in this disclosure. This overview is not intended to limit the scope of the claims.

[0005] To overcome the problems existing in related technologies, this disclosure provides an edge cleaning device and a photomask protection device.

[0006] This disclosure provides an edge cleaning device, comprising: a support platform, a cleaning mechanism, and a protection mechanism; the support platform supports a target device and fixes the target device at a target position; the cleaning mechanism includes a dust removal component located on the support platform and slidable relative to the support platform, the dust removal component abutting against the top edge surface of the target device, and the dust removal component includes a power end for moving the dust removal component on the top edge surface of the target device; the protection mechanism includes an isolation component located on the support platform and used to cover the target device, the isolation component including a drive end for moving the isolation component closer to or away from the target device.

[0007] According to some embodiments of this disclosure, the carrying platform includes a body and clamping components. There are multiple clamping components arranged in an array. The clamping components are slidable relative to the body and move closer to or away from the target position. The carrying platform also includes a fixing component disposed on the clamping components and movable relative to the clamping components. The fixing component is used to press against the body and press the clamping components against the target position on the body.

[0008] According to some embodiments of this disclosure, the clamping assembly includes a base slidably connected to the body, and the fixing assembly includes a fixing bolt fixedly connected to the base and a fixing nut threadedly connected to the fixing bolt, with at least a portion of the body body located between the base and the fixing nut.

[0009] According to some embodiments of this disclosure, a sliding groove is provided on the machine body in a vertical direction, and the fixing bolt passes through the sliding groove.

[0010] According to some embodiments of this disclosure, the base has a receiving groove for at least accommodating a portion of the edge of the target device.

[0011] According to some embodiments of this disclosure, the cleaning mechanism further includes a power component located on the support platform and driving the dust removal assembly to move along the top surface of the target device.

[0012] According to some embodiments of this disclosure, the dust removal assembly includes a mounting rod and a dust removal sleeve sleeved on one end of the mounting rod, the dust removal sleeve being used to attach to the edge top surface of the target device; the power assembly includes a motor fixed to the bearing platform, a lead screw fixed coaxially with the motor output shaft, and a limiting rod fixed to the bearing platform, the limiting rod being parallel to the lead screw, the lead screw passing through the mounting rod and threadedly connected to the mounting rod, and the limiting rod being arranged parallel to the lead screw and passing through the mounting rod.

[0013] According to some embodiments of this disclosure, a torque sensor is fixed on the mounting rod, and the torque sensor is used to obtain the contact torque between the dust removal sleeve and the target device.

[0014] According to some embodiments of this disclosure, the protection mechanism includes a drive component fixedly connected to the carrier platform, the drive component being fixedly connected to the drive end, and the drive component driving the isolation component to move closer to or away from the target device.

[0015] According to some embodiments of this disclosure, the drive assembly includes a cylinder fixed to the support platform, the cylinder being vertically arranged and the piston rod of the cylinder being fixedly connected to the isolation assembly.

[0016] According to some embodiments of this disclosure, the isolation assembly includes a protective cover fixedly connected to the piston rod of the cylinder, the opening of the protective cover being vertically downward and used to fasten onto the top of the target device.

[0017] According to some embodiments of this disclosure, the protective cover includes a top cover for covering the top of the target device and side plates for covering the sides of the target device. There are at least two side plates distributed on opposite sides of the top cover. The side plates are movably connected to the top cover, and the side plates are provided with locking components for fixing the side plates to the top cover.

[0018] According to some embodiments of this disclosure, the side plate is slidably connected to the top cover, and the locking assembly includes a locking bolt fixedly connected to the side plate and a locking nut threadedly connected to the locking bolt, with at least a portion of the top cover body located between the locking nut and the side plate.

[0019] According to some embodiments of this disclosure, the top cover has a movable groove that extends vertically through the top cover, and the locking bolt passes through the movable groove.

[0020] A second aspect of this disclosure provides a photomask protection device, the photomask protection device including a frame and a protective film fixed within the area enclosed by the frame, the top of the frame having a receiving groove for accommodating the bottom edge of the aforementioned protective mechanism, and the end of the aforementioned cleaning component abutting against the outer wall of the frame.

[0021] The technical solutions provided by the embodiments of this disclosure can include the following beneficial effects: The photomask is supported and fixed by a support platform, allowing it to remain stably on the platform. The dust removal component cleans the edge of the photomask body mounted on the support platform by abutting against the top surface of the edge not covered by the protective film and reciprocating, removing dust particles from the top surface of the photomask body edge. During the operation of the cleaning mechanism, to reduce the possibility of the cleaning mechanism contaminating the protective film covering the pattern area, the pattern area is covered by a protective mechanism; that is, the protective film is covered by an isolation component. This reduces the possibility of the dust removal component splashing water droplets, dust particles, etc., onto the protective film during reciprocating motion or dust removal action, thus reducing the possibility of the cleaning component contaminating the protective film and causing damage or failure of the photomask.

[0022] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Other aspects will become apparent upon reading and understanding the accompanying drawings and detailed description. Attached Figure Description

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0024] Figure 1 This is a schematic diagram of a photomask structure according to an exemplary embodiment.

[0025] Figure 2 This is a schematic diagram of a support platform structure according to an exemplary embodiment.

[0026] Figure 3 This is a schematic diagram illustrating the structure of a dust removal assembly according to an exemplary embodiment.

[0027] Figure 4This is a schematic diagram illustrating a fixed component structure according to an exemplary embodiment. Figure 5 This is a schematic diagram illustrating a protective shield structure according to an exemplary embodiment.

[0028] Figure 6 This is a schematic diagram illustrating the structure of a power assembly according to an exemplary embodiment.

[0029] Figure 7 This is a schematic diagram of a structure according to an exemplary embodiment.

[0030] Figure Labels 1. Supporting platform; 11. Body; 111. Slide groove; 112. Dovetail groove; 12. Clamping assembly; 121. Base; 1211. Receiving groove; 13. Fixing assembly; 131. Fixing bolt; 132. Fixing nut; 133. Positioning rod; 14. Positioning hole; 2. Cleaning mechanism; 21. Dust removal assembly; 211. Dust removal sleeve; 212. Mounting rod; 213. Torque sensor; 22. Power assembly; 221. Motor; 2211. Wedge block; 222. Wire 223. Rod; 224. Limiting rod; 225. Support block; 226. Limiting bolt; 3. Protective mechanism; 31. Isolation assembly; 311. Protective cover; 3111. Top cover; 3112. Side plate; 312. Locking assembly; 3121. Locking bolt; 3122. Locking nut; 3123. Moving slot; 32. Drive assembly; 321. Cylinder; 33. Portal frame; 4. Frame; 41. Protective film; 42. Receiving slot; 5. Main body; 51. Glass surface; 52. Pattern area. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions in the disclosed embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this disclosure can be arbitrarily combined with each other.

[0032] As mentioned in the background section, photomasks are currently an essential mold in semiconductor manufacturing. Figure 1The photomask includes a main body 5, with a patterned area 52 on its top surface and a glass surface 51 on its bottom surface. Generally, to prevent particles from falling onto the patterned area 52 and affecting exposure imaging, a transparent protective film 41 is placed on the patterned area 52. The protective film 41 is attached to a special frame 4, which is fixed to the photomask with adhesive. Currently, the main cleaning area of ​​the photomask is the glass surface 51, but dust particles also accumulate on the edges of the main body 5 outside the frame 4 and also require cleaning.

[0033] Based on this, this disclosure provides an edge cleaning device and a photomask protection device. The photomask is supported and fixed by a support platform, ensuring its stable placement on the platform. A dust removal component cleans the edge of the photomask mounted on the support platform by abutting against the top surface of the edge not covered by the protective film and reciprocating, removing dust particles from the top surface of the photomask edge. During the cleaning process, to reduce the possibility of contamination of the protective film covering the pattern area by the cleaning component, the pattern area is covered by a protection mechanism. That is, the protective film is covered by an isolation component, reducing the possibility of water droplets, dust particles, etc., splashing onto the protective film during the reciprocating motion or dust removal action, thus reducing the possibility of the cleaning component contaminating the protective film and causing damage or failure of the photomask.

[0034] This disclosure provides an edge cleaning device and a photomask protection device in exemplary embodiments, such as Figure 1 As shown, Figure 1 This is a schematic diagram of a photomask structure according to an exemplary embodiment; Figure 2 This is a schematic diagram illustrating a support platform structure according to an exemplary embodiment; Figure 3 This is a schematic diagram illustrating the structure of a dust removal assembly according to an exemplary embodiment; Figure 4 This is a schematic diagram illustrating a fixed component structure according to an exemplary embodiment; Figure 5 This is a schematic diagram illustrating a protective shield structure according to an exemplary embodiment; Figure 6 This is a schematic diagram illustrating the structure of a power assembly according to an exemplary embodiment; Figure 7 This is a schematic diagram of a structure according to an exemplary embodiment.

[0035] The specific embodiments described below are intended to help those skilled in the art understand this embodiment, but this embodiment is not limited to the specific embodiments described below.

[0036] Reference Figure 2 and Figure 3An exemplary embodiment of this disclosure provides an edge cleaning device, which includes: a support platform 1, a cleaning mechanism 2, and a protection mechanism 3; the support platform 1 is used to support a target device and to fix the target device at a target position; the cleaning mechanism 2 includes a dust removal component 21 located on the support platform 1 and capable of sliding relative to the support platform 1, the dust removal component 21 is used to abut against the top edge surface of the target device, and the dust removal component 21 includes a power end for driving the dust removal component 21 to move on the top edge surface of the target device; the protection mechanism 3 includes an isolation component 31 located on the support platform 1 and used to cover the target device, the isolation component 31 includes a drive end for driving the isolation component 31 to move closer to or away from the target device.

[0037] For example, refer to Figure 2 and Figure 3 The main body 5 and the frame 4 are both placed in the central area of ​​the top surface of the bearing platform 1. There are two dust removal components 21, which are respectively set on opposite sides of the top surface of the bearing platform 1. The positions of the dust removal components 21 correspond to the two opposite edge areas of the main body 5 that are not covered by the protective film 41. The side walls of the two dust removal components 21 respectively abut against the top surface of the two opposite edge areas of the main body 5 that are not covered by the protective film 41. The part of the dust removal component 21 that abuts against the main body 5 is located between the edge of the bearing platform 1 and the frame 4. The power end on the dust removal component 21 is used to connect to the power source and drive the dust removal component 21 to reciprocate along the length direction of the edge area of ​​the main body 5 that is not covered by the protective film 41. A gantry frame 33 is fixedly connected to the support platform 1. The two ends of the gantry frame 33 are located on opposite sides of the support platform 1. The protection mechanism 3 is fixed to the gantry frame 33 and the isolation component 31 is located between the gantry frame 33 and the support platform 1 through the gantry frame 33. The isolation component 31 is a box-shaped structure with a hollow interior and an open bottom. The drive end on the isolation component 31 is used to connect to a power source and drive the box-shaped isolation component 31 to cover the area of ​​the main body 5 covered by the protective film 41, or to drive the box-shaped isolation component 31 away from the main body 5 and expose the area of ​​the main body 5 covered by the protective film 41.

[0038] In this embodiment, the photomask is supported and fixed by the support platform 1, allowing it to remain stably on the support platform 1. The dust removal component 21 cleans the edge of the photomask body 5 mounted on the support platform 1 by abutting against the top surface of the edge not covered by the protective film 41 and reciprocating, removing dust particles from the top surface of the edge of the photomask body 5. During the operation of the cleaning mechanism 2, in order to reduce the possibility of the cleaning mechanism 2 contaminating the protective film 41 covering the pattern area 52, the pattern area 52 is covered by the protection mechanism 3. That is, the protective film 41 is covered by the isolation component 31, which reduces the possibility of water droplets, dust particles, etc. splashed onto the protective film 41 during the reciprocating motion or dust removal action of the dust removal component 21, and reduces the possibility of the cleaning component contaminating the protective film 41, causing damage and failure of the photomask.

[0039] In an exemplary embodiment of this disclosure, reference is made to Figure 2 and Figure 3 The support platform 1 includes a body 11 and a clamping assembly 12. There are multiple clamping assemblies 12 arranged in an array. The clamping assemblies 12 can slide relative to the body 11 and move closer to or away from the target position. The support platform 1 also includes a fixing assembly 13 disposed on the clamping assembly 12 and movable relative to the clamping assembly 12. The fixing assembly 13 is used to press against the body 11 and press the clamping assembly 12 against the target position on the body 11.

[0040] For example, refer to Figure 2 and Figure 3 There are four clamping components 12. All four clamping components 12 are slidably connected to the body 11 in the horizontal direction. The sliding directions of two adjacent clamping components 12 are perpendicular to each other, and the sliding directions of the four clamping components 12 are radial outward from the center of the top surface of the body 11.

[0041] In this embodiment, by sliding the clamping assembly 12, all four clamping assemblies 12 can move towards the center of the top surface of the main body 5, thus stably fixing the target device at the target position. For example, the four clamping assemblies 12 can be pressed against the four side walls of the target device to fix the target device. Then, the fixing assembly 13 presses the clamping assembly 12 with the target device against the body 11 at the current position, reducing the possibility of the clamping assembly 12 moving during the cleaning process of the main body 5. Since the side wall of the dust removal assembly 21 abuts against the edge of the top surface of the main body 5, and the dust removal assembly 21 needs to reciprocate at the edge of the top surface of the main body 5 during operation to remove dust particles from the edge of the top surface of the main body 5, fixing the photomask to the target position on the body 11 by the clamping assembly 12 and fixing the clamping assembly 12 to the body 11 by the fixing assembly 13 can reduce the possibility of the dust removal effect of the dust removal assembly 21 being reduced or even the isolation effect of the isolation assembly 31 being reduced due to the movement of the target device during the operation of the dust removal assembly 21.

[0042] In an exemplary embodiment of this disclosure, reference is made to Figure 2 and Figure 3 The clamping assembly 12 includes a base 121 slidably connected to the body 11, and the fixing assembly 13 includes a fixing bolt 131 fixedly connected to the base 121 and a fixing nut 132 threadedly connected to the fixing bolt 131. At least a portion of the body 11 is located between the base 121 and the fixing nut 132.

[0043] For example, refer to Figure 2 and Figure 3The base 121 is located on the body 11. One end of the fixing bolt 131 is fixedly connected to the bottom surface of the base 121, and the other end extends through the body 11 to the bottom of the body 11. The fixing nut 132 is threadedly connected to the fixing bolt 131 at the bottom of the body 11.

[0044] In this embodiment, after the base 121 moves and fixes the target device at the target position on the body 11, the fixing nut 132 is tightened so that the fixing nut 132 abuts against the bottom surface of the body 11. Simultaneously, the bottom surface of the base 121 abuts against the top surface of the body 11. By increasing the friction between the base 121 and the body 11, the possibility of the base 121 moving relative to the body 11 is reduced, thereby fixing the position of the base 121. This reduces the possibility of the dust removal effect of the dust removal component 21 being reduced or even failing due to the movement of the target device during the operation of the dust removal component 21.

[0045] It should be understood that the aforementioned fixing component 13, including the fixing bolt 131 fixedly connected to the base 121 and the fixing nut 132 threadedly connected to the fixing bolt 131, is only one specific embodiment. In other embodiments, the fixing component 13 may also be in other forms. For example: Refer to Figure 4 The fixing component 13 is a positioning rod 133 movably connected to the base 121. The top surface of the body 11 is provided with a plurality of positioning holes 14 that are adapted to the positioning rod 133. There are multiple sets of positioning holes 14, and each base 121 has a set of positioning holes 14 corresponding to it. The positioning holes 14 in the same set are distributed along the sliding direction of the base 121. The base 121 is fixed by inserting the positioning rod 133 into the positioning hole 14. In this embodiment, the positioning rod 133 is inserted into the base 121 in the vertical direction and passes through the base 121.

[0046] In an exemplary embodiment of this disclosure, reference is made to Figure 2 and Figure 3 The machine body 11 has a slide groove 111 that runs vertically through the machine body 11, and the fixing bolt 131 passes through the slide groove 111.

[0047] For example, there are four slides 111, and the base 121 is located above the slide 111 and each base 121 corresponds to one slide 111. The length directions of two adjacent slides 111 are perpendicular to each other, and the length directions of the four slides 111 are radially radiating outward from the center of the top surface of the body 11. The fixing bolt 131 passes through the slide 111 and extends to the outside of the slide 111. The side wall of the fixing bolt 131 abuts against the inner wall of the slide 111.

[0048] In this embodiment, when the base 121 moves, the fixing bolt 131 moves inside the slide groove 111 and along the length of the slide groove 111. The fixing bolt 131 and the slide groove 111 limit the sliding direction and the maximum sliding range of the base 121.

[0049] In an exemplary embodiment of this disclosure, reference is made to Figure 2 and Figure 3 The base 121 has a receiving groove 1211 for accommodating at least part of the edge of the target device.

[0050] For example, the base 121 is cubic in shape, and the receiving groove 1211 extends downward from the top corner of the base 121 and extends to the bottom corner of the base 121, forming a notch located at the corner of the upper half of the base 121. The photomask body 5 is cuboid in shape, and the receiving groove 1211 is used to accommodate the sharp corner of the photomask body 5. The four sharp corners of the photomask body 5 are respectively placed inside the four receiving grooves 1211 on the four bases 121 and are supported and clamped by the four bases 121.

[0051] In this embodiment, the receiving groove 1211 opened at the corner of the cube base 121 can accommodate the sharp corner of the cuboid photomask body 5. That is, the base 121 can simultaneously abut against two adjacent side walls on the photomask body 5. The combined effect of the four bases 121 enhances the clamping effect on the photomask body 5 and provides stable support for the photomask body 5, so that the photomask body 5 can be stably fixed at the target position on the body 11. This reduces the possibility that the dust removal effect of the dust removal component 21 will be reduced or even fail due to the movement of the target device during the operation of the dust removal component 21, and the isolation effect of the isolation component 31 will be reduced or even fail.

[0052] In an exemplary embodiment of this disclosure, reference is made to Figure 5 The cleaning mechanism 2 also includes a power component 22 located on the support platform 1 and driving the dust removal component 21 to move along the top surface of the target device.

[0053] For example, the power assembly 22 is fixedly connected to the body 11, and the power assembly 22 is connected to the dust removal assembly 21 and is used to drive the dust removal assembly 21 to reciprocate in a straight line in the horizontal direction.

[0054] In this embodiment, refer to Figure 3 and Figure 5The dust removal component 21 has a power end connected to the power component 22. The power component 22 provides power to the dust removal component 21, enabling the dust removal component 21 to reciprocate along the length of the edge top surface that is not covered by the protective film 41 while adhering to the top surface of the main body 5. This removes dust particles from the edge top surface of the main body 5 that is not covered by the protective film 41. Compared to manually driving the dust removal component 21 to perform the dust removal action, driving the dust removal component 21 through the power component 22 can make the dust removal action more consistent and stable. Under the premise that the parameters of the power component 22 and the dust removal component 21 are determined, the dust removal effect achieved after each dust removal action is closer to the expected dust removal effect.

[0055] In an exemplary embodiment of this disclosure, reference is made to Figure 3 and Figure 5 The dust removal assembly 21 includes a mounting rod 212 and a dust removal sleeve 211 sleeved on one end of the mounting rod 212. The dust removal sleeve 211 is used to attach to the edge top surface of the target device. The power assembly 22 includes a motor 221 fixed on the support platform 1, a lead screw 222 fixed coaxially with the output shaft of the motor 221, and a limiting rod 223 fixed on the support platform 1. The limiting rod 223 is parallel to the lead screw 222. The lead screw 222 passes through the mounting rod 212 and is threadedly connected to the mounting rod 212. The limiting rod 223 is set parallel to the lead screw 222 and passes through the mounting rod 212.

[0056] For example, the dust removal sleeve 211 is a sleeve structure formed by bending and rolling up a cleanroom cloth and fixing it at the connection point. The dust removal sleeve 211 covers the side wall of one end of the mounting rod 212, and the mounting rod 212 serves as the power end of the dust removal assembly 21 and is connected to the power assembly 22. The motor 221 is fixedly connected to one side of the top surface of the machine body 11, and a support block 224 is also fixedly connected to the other side of the top surface of the machine body 11 at the position corresponding to the electrode. The lead screw 222 and the limiting rod 223 both extend into the support block 224 and are rotatably connected to the support block 224.

[0057] In this embodiment, when it is necessary to clean the top edge of the photomask body 5 that is not covered by the protective film 41, the motor is started, and the motor drives the lead screw 222 to rotate. Since the lead screw 222 is threadedly connected to the mounting rod 212, and a limiting rod 223 for fibers is inserted into the mounting rod 212, the mounting rod 212 will slide along the length direction of the lead screw 222. That is, the dust removal sleeve 211 fitted on the mounting rod 212 begins to wipe the top edge of the photomask body 5 that is not covered by the protective film 41. As the motor 221 rotates forward and reverses, the dust removal sleeve 211 moves back and forth on the top edge of the photomask body 5 that is not covered by the protective film 41 and wipes repeatedly, finally completing the dust removal action.

[0058] It should be understood that the power assembly 22 described above, including the motor 221 fixed on the support platform 1, the lead screw 222 coaxially fixed with the output shaft of the motor 221, and the limiting rod 223 fixed on the support platform 1, is only one specific embodiment. In other embodiments, the power assembly 22 may also be a hydraulic cylinder fixedly connected to the machine body 11. The piston rod of the hydraulic cylinder is fixedly connected to the mounting rod 212 and is set perpendicular to the mounting rod 212. By extending or retracting the piston rod of the hydraulic cylinder, the dust removal assembly 21 is controlled to reciprocate along the length direction of the top edge of the photomask body 5 that is not covered by the protective film 41, thereby performing the dust removal action.

[0059] In an exemplary embodiment of this disclosure, reference is made to Figure 5 and Figure 6 A torque sensor 213 is fixed on the mounting rod 212. The torque sensor 213 is used to obtain the contact torque between the dust removal sleeve 211 and the target device.

[0060] For example, the torque sensor 213 is fixed to the end of the mounting rod 212 facing the frame 4 and is covered by the dust cover 211. Figure 5 and Figure 6 (The middle part indicates that the position of the torque sensor 213 is exposed). The working part of the torque sensor 213 is set vertically downward and in contact with the dust collector sleeve 211.

[0061] In this embodiment, the signal from the torque sensor 213 can be used to determine the tightness of the dust removal sleeve 211 against the top surface of the photomask body 5 that is not covered by the protective film 41. This can be used as a reference to adjust the thickness of the dust removal sleeve 211, thereby changing the tightness of the dust removal sleeve 211 against the top surface of the photomask body 5 that is not covered by the protective film 41. This reduces the possibility that the dust removal sleeve 211 may apply too much pressure to the photomask body 5 and damage it, or that the dust removal sleeve 211 may apply too little pressure to the photomask body 5 and fail to achieve the expected cleaning effect.

[0062] In an exemplary embodiment of this disclosure, reference is made to Figure 2 The protection mechanism 3 includes a drive component 32 fixedly connected to the support platform 1. The drive component 32 is fixedly connected to the drive end and drives the isolation component 31 to move closer to or further away from the target device.

[0063] For example, the drive component 32 is fixedly connected to the gantry frame 33, and the power output end of the drive component 32 is set vertically downward and fixedly connected to the drive end of the isolation component 31. When the drive component 32 is working, it drives the isolation component 31 to move downward to the photomask body 5, or drives the isolation component 31 to move upward away from the photomask body 5.

[0064] In this embodiment, compared to manually driving the isolation component 31 to perform the isolation action, driving the isolation component 31 by the driving component 32 can make each isolation action more consistent and stable. Under the premise that the parameters of the driving component 32 and the isolation component 31 are determined, each process of controlling the isolation component 31 to move downward and cover the photomask body 5 is closer to the expected effect, so that the area on the photomask body 5 covered by the protective film 41 can be stably covered by the isolation component 31, reducing the possibility of contamination during the dust removal process.

[0065] In an exemplary embodiment of this disclosure, reference is made to Figure 2 The drive assembly 32 includes a cylinder 321 fixed on the support platform 1. The cylinder 321 is vertically arranged and the piston rod of the cylinder 321 is fixedly connected to the isolation assembly 31.

[0066] For example, the cylinder body of cylinder 321 is fixedly connected to gantry frame 33, and the piston rod of cylinder 321 is set vertically downward and fixedly connected to the drive end of isolation assembly 31.

[0067] In an exemplary embodiment of this disclosure, reference is made to Figure 2 and Figure 3 The isolation assembly 31 includes a protective cover 311 fixedly connected to the piston rod of the cylinder 321. The opening of the protective cover 311 is vertically downward and is used to fasten onto the top of the target device.

[0068] For example, the protective cover 311 is a box-shaped structure with a hollow interior and an open bottom. The center of the top surface of the protective cover 311 forms the driving end of the isolation component 31, and the bottom end of the piston rod of the cylinder 321 is fixedly connected to the center of the top surface of the protective cover 311.

[0069] In this embodiment, when dust removal is required on the top edge of the photomask body 5 that is not covered by the protective film 41, the piston rod of the control cylinder 321 is extended first. The protective cover 311 moves downward as the extension rod extends, eventually covering the top of the photomask body 5 and covering the protective film 41. Dust removal can then begin. After dust removal is complete, the piston rod of the control cylinder 321 is retracted. The protective cover 311 moves upward as the piston rod retracts, moving away from the photomask body 5, thus exposing the photomask body 5.

[0070] In an exemplary embodiment of this disclosure, reference is made to Figure 2 The protective cover 311 includes a top cover 3111 for covering the top of the target device and a side plate 3112 for covering the side of the target device. There are at least two side plates 3112 distributed on opposite sides of the top cover 3111. The side plates 3112 are movably connected to the top cover 3111. The side plates 3112 are provided with locking components 312 for fixing the side plates 3112 to the top cover 3111.

[0071] For example, refer to Figure 2 and Figure 3 The top cover 3111 is horizontally set, and the side plates 3112 are vertically set. There are two side plates 3112, which are distributed on opposite sides of the bottom surface of the top cover 3111. Each side plate 3112 has a dust removal component 21, which is located on the same side of the frame 4. The side plates 3112 are slidably connected to the top cover 3111. The sliding direction of the side plates 3112 is set along the length direction of the mounting rod 212. The locking component 312 is fixedly connected to the side plates 3112 and detachably connected to the top cover 3111.

[0072] In this embodiment, the photomask body 5 has different dimensions depending on its type and function, meaning the size of the area covered by the protective film 41 varies. The sliding connection between the side plate 3112 and the top cover 3111 allows the two side plates 3112 to move towards each other or away from each other, thereby adjusting the shortest straight-line distance between the two side plates 3112. This adjusts the width of the area covering the protective film 41, ensuring that the width of the area between the two side plates 3112 covering the protective film 41 is consistent with the width of the protective film, thus fully exposing the top surface of the photomask body 5 that is not covered by the protective film 41 and fully covering the protective film 41. The locking assembly 312 can fix the adjusted side plate 3112 in its current position, reducing the possibility that the side plate 3112 may shift during the driving process of the driven assembly 32 or during dust removal, causing a change in the coverage area, thus failing to achieve the expected isolation effect, encroaching on the top surface of the photomask body 5 to be dusted, or even damaging the protective film 41.

[0073] In an exemplary embodiment of this disclosure, reference is made to Figure 6 The side plate 3112 is slidably connected to the top cover 3111. The locking assembly 312 includes a locking bolt 3121 fixedly connected to the side plate 3112 and a locking nut 3122 threadedly connected to the locking bolt 3121. At least part of the body of the top cover 3111 is located between the locking nut 3122 and the side plate 3112.

[0074] For example, refer to Figure 3 and Figure 6 One end of the locking bolt 3121 is fixedly connected to the top surface of the side plate 3112, and the other end extends through the top cover 3111 to the top of the top cover 3111. The locking nut 3122 is threadedly connected to the locking bolt 3121 on the top of the top cover 3111.

[0075] In this embodiment, after the side plate 3112 moves and forms a desired area with another side plate 3112, the locking nut 3122 is tightened, so that the locking nut 3122 abuts against the top surface of the top cover 3111. Simultaneously, the top surface of the side plate 3112 abuts against the bottom surface of the top cover 3111. By increasing the friction between the side plate 3112 and the top cover 3111, the possibility of the side plate 3112 moving relative to the top cover 3111 is reduced, thereby fixing the position of the side plate 3112. This reduces the possibility of the dust removal effect of the dust removal component 21 being reduced or even failing due to the movement of the side plate 3112 during the operation of the drive component 32 and the dust removal component 21.

[0076] In an exemplary embodiment of this disclosure, reference is made to Figure 3 and Figure 6 The top cover 3111 has a moving groove 3123 that extends vertically through the top cover 3111, and the locking bolt 3121 passes through the moving groove 3123.

[0077] For example, there are four moving slots 3123. Each side plate 3112 corresponds to two moving slots 3123 located at both ends of the side plate 3112. The moving slots 3123 are parallel to each other. The locking bolt 3121 passes through the moving slot 3123 and even extends above the moving slot 3123. The side wall of the locking bolt 3121 abuts against the inner wall of the moving slot 3123.

[0078] In this embodiment, when the side plate 3112 moves, the locking bolt 3121 moves inside the moving groove 3123 and along the length of the moving groove 3123. The sliding direction and maximum sliding range of the side plate 3112 are defined by the locking bolt 3121 and the moving groove 3123.

[0079] In an exemplary embodiment of this disclosure, reference is made to Figure 5 and Figure 7 The cleaning mechanism 2 is slidably connected to the support platform 1.

[0080] For example, refer to Figure 5 and Figure 7 A dovetail groove 112, positioned on the body 11 corresponding to the location of the motor 221 and extending along the length of the mounting rod 212, is provided. A wedge-shaped block 2211, matching the shape of the dovetail groove 112, is fixedly connected to the bottom of the motor 221. The wedge-shaped block 2211 is located inside the dovetail groove 112. A limiting bolt 225 is threaded onto the wedge-shaped block 2211. The limiting bolt 225 penetrates the wedge-shaped block 2211 vertically, with its head located outside the dovetail groove 112 and its threaded tail end abutting against the inner wall of the dovetail groove 112.

[0081] In this embodiment, the photomask body 5 has different sizes depending on its type and function, that is, the size of the area covered by the protective film 41 is different. The bottom opening size of the protective cover 311 can be adjusted by sliding the two side plates 3112 to suit photomask bodies 5 of different sizes. By turning the limiting bolt 225, the threaded end of the limiting bolt 225 is disengaged from the inner wall of the dovetail groove 112, allowing the motor 221 to slide freely along the length of the dovetail groove 112, that is, to move the dust removal component 21 freely along the length of the mounting rod 212. This changes the position of the dust removal component 21, reducing the possibility of interference between the dust removal component 21 and the frame 4, preventing the dust removal action from being performed, or the gap between the dust removal component 21 and the frame 4 being too large to completely remove dust.

[0082] A second aspect of this disclosure provides a photomask protection device, referring to... Figure 6 The photomask protection device includes a frame 4 and a protective film 41 fixed within the area enclosed by the frame 4. The top of the frame 4 is provided with a receiving groove 42 for accommodating the bottom edge of the aforementioned protective mechanism 3. The end of the aforementioned cleaning component abuts against the outer wall of the frame 4.

[0083] For example, the frame 4 is horizontally arranged in a square shape, the protective film 41 is a transparent film, the shape of the protective film 41 is adapted to the frame 4 and the edge of the protective film 41 is adhered to the top surface of the frame 4. The receiving groove 42 extends from the top surface of the frame 4 into the frame 4, and the shape of the receiving groove 42 is adapted to the bottom shape of the side plate 3112.

[0084] In this embodiment, by adjusting the distance between the two opposing side plates 3112, the bottom end of the side plate 3112 can be inserted into the receiving groove 42 at the top of the frame 4 during the downward movement of the protective cover 311. This reduces the coverage area of ​​the protective cover 311 on the edge of the photomask body 5, allowing the dust removal component 21 to thoroughly remove dust from the top edge of the photomask body 5. The receiving groove 42 provides limitation and support for the protective cover 311, further improving the isolation effect of the protective cover 311 on the photomask body 5. This reduces the possibility of displacement of the protective cover 311 during dust removal, which could alter the coverage area, prevent the achievement of the expected isolation effect, encroach on the top edge of the photomask body 5 to be cleaned, or even damage the protective film 41.

[0085] In this embodiment, other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This disclosure is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the claims.

[0086] It should be understood that this disclosure is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this disclosure is limited only by the appended claims.

Claims

1. An edge cleaning device, characterized in that, The edge cleaning device includes: a support platform, a cleaning mechanism, and a protection mechanism; The support platform is used to support the target device and fix the target device at the target position. The target device includes a photomask body. The top surface of the photomask body is a pattern area. A transparent protective film is provided in the pattern area. The protective film is attached to the frame. The frame is fixed to the photomask body. The cleaning mechanism includes a dust removal component located on the support platform and capable of sliding relative to the support platform. The dust removal component is used to abut against the top edge of the photomask body that is not covered by the protective film. The dust removal component includes a power end for driving the dust removal component to move on the top edge. The protection mechanism includes an isolation component located on the support platform, the isolation component being used to cover the area on the photomask body covered by the protective film, the isolation component including a drive end for moving the isolation component closer to or away from the target device; the protection mechanism includes a drive component fixedly connected to the support platform, the drive component being fixedly connected to the drive end, the drive component driving the isolation component closer to or away from the target device, the drive component including a cylinder fixed to the support platform, the cylinder being vertically arranged and the piston rod of the cylinder being fixedly connected to the isolation component, the isolation component including a protective cover fixedly connected to the piston rod of the cylinder, the opening of the protective cover being vertically downward and used to fasten onto the top of the target device, the protective cover including a top cover and a side plate for covering the top of the target device; the top of the frame has a receiving groove for accommodating the bottom end of the side plate.

2. The edge cleaning device according to claim 1, characterized in that, The support platform includes a body and clamping components. There are multiple clamping components arranged in an array. The clamping components can slide relative to the body and move closer to or away from the target position. The support platform also includes a fixing component disposed on the clamping components and movable relative to the clamping components. The fixing component is used to press against the body and press the clamping components against the target position on the body.

3. The edge cleaning device according to claim 2, characterized in that, The clamping assembly includes a base slidably connected to the body, and the fixing assembly includes a fixing bolt fixedly connected to the base and a fixing nut threadedly connected to the fixing bolt, with at least a portion of the body located between the base and the fixing nut.

4. The edge cleaning device according to claim 3, characterized in that, The machine body has a vertically penetrating groove, and the fixing bolt passes through the groove.

5. The edge cleaning device according to claim 3, characterized in that, The base has a receiving groove for accommodating at least a portion of the edge of the target device.

6. The edge cleaning device according to claim 1, characterized in that: The cleaning mechanism also includes a power component located on the support platform. The power component is fixedly connected to the power end and drives the dust removal component to move along the top surface of the target device.

7. The edge cleaning device according to claim 6, characterized in that, The dust removal assembly includes a mounting rod and a dust removal sleeve fitted onto one end of the mounting rod. The dust removal sleeve is used to attach to the top edge of the target device. The power assembly includes a motor fixed to the bearing platform, a lead screw fixed coaxially with the motor output shaft, and a limiting rod fixed to the bearing platform. The limiting rod is parallel to the lead screw. The lead screw passes through the mounting rod and is threadedly connected to the mounting rod. The limiting rod is set parallel to the lead screw and passes through the mounting rod.

8. The edge cleaning device according to claim 7, characterized in that, A torque sensor is fixed on the mounting rod, and the torque sensor is used to obtain the contact torque between the dust removal sleeve and the target device.

9. The edge cleaning device according to claim 1, characterized in that, There are at least two side plates distributed on opposite sides of the top cover. The side plates are movably connected to the top cover, and the side plates are provided with locking components for fixing the side plates to the top cover.

10. The edge cleaning device according to claim 9, characterized in that, The side plate is slidably connected to the top cover, and the locking assembly includes a locking bolt fixedly connected to the side plate and a locking nut threaded onto the locking bolt. At least a portion of the top cover is located between the locking nut and the side plate.

11. The edge cleaning device according to claim 10, characterized in that, The top cover has a movable groove that extends vertically through it, and the locking bolt passes through the movable groove.

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