Cross rail structure for oht system and oht system using the same

Abstract

The present application relates to a cross rail structure for an OHT system and an OHT system using the same. The present application provides a cross rail structure for an OHT system, which is a structure of a place where two rails orthogonal to each other in a rail through which a carrier is transferred in the OHT system cross, wherein the cross rail structure for the OHT system includes: a pair of auxiliary rails provided at a place where the rails cross at substantially the same height as the rail and arranged in parallel to each other at a certain interval; a moving unit that moves the auxiliary rails in the up-down direction; a rotating unit that rotates the auxiliary rails so that the auxiliary rails can be arranged in either of two directions orthogonal to each other; and an interval maintaining unit for maintaining the interval between the pair of auxiliary rails without interfering with the carrier.

Description

Technical Field

[0001] This invention relates to a cross-track structure for an OHT system and an OHT system utilizing the same. Background Technology

[0002] Manufacturing semiconductors involves several major categories, ranging from eight processes to hundreds of smaller categories. These hundreds of processes require the movement of hundreds of thousands of components between them; automating this process is known as Overhead Hoist Transport (OHT).

[0003] When the OHT vehicle (also known as the FOUP, or Front Opening Unified Pod) is used, the wafers contained in the FOUP are transported to various process manufacturing equipment via tracks installed on the factory ceiling.

[0004] When an OHT device has two perpendicularly intersecting tracks, the vehicle travels along the tracks with wheels attached to them. However, during this process, the wheels wear down due to the steps between the tracks, generating particles. To minimize particle generation, the vehicle speed is reduced, but this cannot completely prevent particle generation.

[0005] On the other hand, vehicles crossing intersecting tracks need to be equipped with cross wheels. However, if the addition of equipment lines affects intersecting tracks, then all existing vehicles must be equipped with cross wheels, which can lead to excessive costs. (Because it's unknown which vehicles will cross intersecting tracks, cross wheels must be installed on all vehicles.) Summary of the Invention

[0006] The present invention is proposed to solve the problems of the prior art. The problem to be solved by the present invention is to provide an OHT system cross track structure that can solve the problems generated in cross track, and an OHT system utilizing the same.

[0007] As a solution to the aforementioned problems, the present invention provides a cross-track structure for an OHT system. The cross-track structure is a structure located at the intersection of two orthogonal tracks in an OHT system used for transporting a vehicle. The cross-track structure for the OHT system includes: a pair of auxiliary tracks, positioned at substantially the same height as the tracks and arranged parallel to each other at a certain distance at the intersection point; a moving unit for moving the auxiliary tracks vertically; a rotating unit for rotating the auxiliary tracks so that they can be positioned in either of the two orthogonal directions; and a spacing maintaining unit for maintaining the spacing between the pair of auxiliary tracks without interference with the vehicle.

[0008] Preferably, the OHT system with cross-track structure further includes: a vehicle sensing sensor, which is set at a certain distance from the cross-track in the track to sense vehicles entering the cross-track.

[0009] The moving unit may include: a plate-shaped moving part frame, disposed above the auxiliary track and fixed to the track by a frame arm; a piston, a hydraulic device disposed on the moving part frame; and a piston arm, one end of which is engaged with the piston and the other end of which is engaged with the auxiliary track.

[0010] The rotating unit may include: a plate-shaped rotating frame disposed above the auxiliary track and fixed to the track by a frame arm; a motor disposed on the rotating frame; and a rotating arm, one end of which is connected to the motor and the other end of which is connected to the auxiliary track in order to transmit the rotation of the motor to the auxiliary track.

[0011] Preferably, the pistons are provided in pairs, and the rotating unit further includes: a plate-shaped rotating frame, with both ends respectively connected to the pair of pistons, the rotating unit being fixed to the moving frame to rotate the rotating frame, thereby causing the pair of pistons connected to the rotating frame and the auxiliary track to rotate together.

[0012] Alternatively, the moving part frame may have an arc-shaped through hole, i.e., a guide hole, configured such that the piston arm passes through the guide hole.

[0013] Alternatively, the spacing maintaining unit may include: a plate-shaped first component disposed above the auxiliary track; and a pair of second components extending downward from both ends of the first component and joining the auxiliary track.

[0014] Preferably, the vehicle sensing sensor is an infrared sensor, and four are arranged around the cross track.

[0015] The present invention further provides an OHT system including the aforementioned track structure for an OHT system.

[0016] The present invention provides an OHT system cross track structure capable of solving problems arising in cross tracks, and an OHT system utilizing the same. Attached Figure Description

[0017] Figures 1 to 4 This is a diagram illustrating the operation of a cross-track structure in an OHT system according to an embodiment of the present invention.

[0018] Figure 5 It is a diagram used to illustrate the relationship between the auxiliary track and the vehicle.

[0019] (Explanation of reference numerals in the attached diagram)

[0020] 10: Auxiliary track 20: Moving unit

[0021] 30: Rotation unit; 40: Spacing maintenance unit

[0022] 50: Vehicle sensing sensor Detailed Implementation

[0023] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, thereby providing specific details for carrying out the present invention.

[0024] Figures 1 to 4 This is a diagram illustrating the operation of a cross-track structure in an OHT system according to an embodiment of the present invention. Figure 5 It is a diagram used to illustrate the relationship between the auxiliary track and the vehicle.

[0025] First, the cross-track structure for the first form of the invention, namely the OHT system, will be described. The cross-track structure refers to... Figures 1 to 4 The diagram shows the intersection of two orthogonal tracks in the OHT system used for vehicle transport. In the attached diagram, the two orthogonal tracks are designated R1 and R2. R1 represents the track along the x-axis, and R2 represents the track along the y-axis; however, these directions are arbitrary and do not necessarily have to be either x-axis or y-axis.

[0026] The cross track structure according to this embodiment is composed of an auxiliary track 10, a moving unit 20, a rotating unit 30, a spacing maintaining unit 40, and a vehicle sensing sensor 50.

[0027] The auxiliary track 10 is set at the point where it intersects with the track R at substantially the same height as the track, and is provided as a pair arranged parallel to each other at a certain interval. The substantially the same height does not mean that the error is zero and the height is exactly the same, but it means that when the vehicle V moves from the track to the auxiliary track 10, there is almost no height difference, so that the wheels W do not vibrate greatly and can move smoothly.

[0028] The moving unit 20, which is used to move the auxiliary track 10 in the vertical direction, is composed of a moving part frame 21, a frame arm 22, a piston 23, a piston arm 24, and a guide hole 25.

[0029] The movable frame 21, as a plate-like structure positioned above the auxiliary track 10, is fixed to the track R by frame arms 22. In this embodiment, the movable frame 21 is cuboid in shape, and four frame arms 22 are provided at each of the four corners of the movable frame 21. The shape of the movable frame 21 or the number of frame arms 22 is not limited and can be appropriately designed and modified according to the site conditions.

[0030] The piston 23 is as follows Figures 1 to 4 As shown, there is a pair.

[0031] The piston arm 24 serves as a connection between the piston 23 and the auxiliary rail 10, and is provided in pairs like the piston 23. However, in this embodiment, the piston arm 24 is connected to the spacing retaining unit 40, rather than directly connected to the auxiliary rail 10. The piston 23 and the auxiliary rail 10 are connected through the spacing retaining unit 40.

[0032] The pistons 23 do not necessarily have to be a pair. The rigidity of the spacing holding unit 40 is sufficiently high, so when one side of the spacing holding unit 40 is lifted by one piston 23, the sag of the spacing holding unit 40 is small, and therefore the rotation of the auxiliary track 10 is not a problem. If the weight of the pair of auxiliary tracks 10 and the spacing holding unit 40 can be supported by only one piston 23, then one piston 23 can also be used. However, if using a pair of pistons 23 provides a more stable drive for the auxiliary track 10 than using a single piston 23, then using a pair of pistons 23 is preferred. Therefore, in this embodiment, a pair of pistons 23 is used.

[0033] The moving part frame 21 is provided with an arc-shaped through hole, i.e., a guide hole 25, and is configured such that the piston arm 24 passes through the guide hole 25.

[0034] The rotating unit 30 is configured to rotate the auxiliary track 10 around the center of the intersection point. In this embodiment, it includes a rotating frame 31 and a motor 32.

[0035] The motor 32 is fixed to the moving part frame 21 and is shown in a box shape. The motor 32 refers to a device that rotates a certain configuration, which may include an electric motor and a reducer. On the other hand, it is not necessary to use an electric motor and may include configurations that enable linear motion, such as a piston, and configurations that convert linear motion into rotational motion, such as a rack and pinion.

[0036] The rotating frame 31 is attached to the upper part of the motor 32, and is rotated by the motor 32. A pair of pistons 23 are disposed on the upper part of the rotating frame 31, so the pistons 23 and the auxiliary track 10 attached to the pistons 23 rotate together with the motor 32 and the rotating frame 31. The piston arm 24 is configured to pass through a through hole provided in the rotating frame 31.

[0037] In this embodiment, the moving unit 20 and the rotating unit 30 share a portion of their configuration, such that the rotating unit 30, together with a portion of the moving unit 20, causes the auxiliary track 10 to rotate. However, the moving unit 20 and the rotating unit 30 can also be completely separate configurations. Nevertheless, when the auxiliary track 10 moves upward via the moving unit 20, the rotating unit 30 is required, and therefore the configuration should be adjusted accordingly.

[0038] The spacing maintaining unit 40 is configured to maintain the spacing between the pair of auxiliary tracks 10, as follows: Figure 5 As shown, it includes a first component 41 and a second component 42, and the whole is... The shape of the character is designed to prevent interference with the vehicle V.

[0039] The vehicle sensing sensor 50 is configured to be positioned at a certain distance from the intersecting tracks (intersection points) on the track R, and to sense the vehicle V entering the intersecting tracks. It uses an infrared sensor and, as... Figure 1 Four are set up as shown to allow sensing of all vehicles V entering the intersecting tracks in all directions.

[0040] The mechanism for rotating the auxiliary track 10 will be explained below through the aforementioned configuration, thereby illustrating the function, role, and effect of the configuration.

[0041] Figure 1 This shows the state in which the vehicle V is configured with the auxiliary track 10, allowing it to move in the x-axis direction.

[0042] In this state, if a vehicle moving in the y-axis direction is sensed by the vehicle sensing sensor 50, the auxiliary track 10 is rotated, but in the following manner.

[0043] First, using piston 23 to move piston arm 24 upwards (to the side) Figure 1 The piston arm 24 moves along the +z axis direction. The piston arm 24 connects the spacing holding unit 40 to the auxiliary track 10 via a medium, thus the auxiliary track 10 moves as... Figure 2 Move upwards as shown.

[0044] exist Figure 2 In the shown state, if the rotating frame 31 is rotated using the motor 32, the piston 23 connected to the rotating frame 31 will rotate. However, as the piston arm 24 rotates with the guide hole 25, the auxiliary track 10 connected to the piston arm 24 will also rotate. This rotational state of the auxiliary track 10 is shown in... Figure 3 .

[0045] With the auxiliary track 10 rotating, the piston arm 24 can be tilted downwards ( Figure 1 (in the -z axis direction) decreases, such as Figure 4 As shown, the auxiliary track 10 moves downward and the vehicle V moves in the y-axis direction.

[0046] The second aspect of the invention relates to an OHT system, characterized by including a cross-track structure and a control unit for use with the aforementioned OHT system.

[0047] The cross-track structure for the OHT system has been fully explained, and the mechanism by which the control unit drives the cross-track structure for the OHT system has also been fully explained, so further explanation is omitted.

[0048] The following description, while focusing on preferred embodiments of the present invention to provide specific details of implementing the invention, does not limit the technical concept of the invention to the described embodiments and can be embodied in various forms within the scope of the technical concept of the invention.

Claims

1. A cross-track structure for an OHT system, said cross-track structure being a structure at the intersection of two orthogonal, parallel pairs of tracks arranged in the OHT system for transporting a vehicle, wherein, The cross-track structure used in the OHT system includes: A pair of auxiliary tracks are set at the same height as the tracks at the point where the tracks intersect and are arranged parallel to each other at the same distance as the spacing between the pair of tracks; The moving unit causes the auxiliary track to move in the vertical direction; A rotating unit rotates the auxiliary track so that the auxiliary track can be configured in either of two mutually orthogonal directions; A spacing maintaining unit is used to maintain the spacing between the pair of auxiliary tracks as the same as the spacing between the pair of tracks without interference with the vehicle. The mobile unit includes: The frame arm is attached to the track; A plate-shaped movable frame is disposed above the auxiliary track and fixed to the track by the frame arm, and is provided with a pair of arc-shaped guide holes; A pair of pistons are hydraulically mounted on the rotating unit; and A pair of piston arms, one end of which engages with the piston, and the other end of which engages with the auxiliary track. The rotating unit includes: A plate-shaped rotating frame, with its upper two sides respectively connected to the pair of pistons, and provided with a pair of through holes; and The motor is fixed at the lower part to the moving part frame and at the upper part to the rotating part frame; The piston arm passes through the through hole and the guide hole to engage with the auxiliary track. The motor causes the rotating frame to rotate, thereby causing the pair of pistons and the auxiliary track to rotate together.

2. The cross-track structure for the OHT system according to claim 1, wherein, The OHT system using a cross-track structure further includes: a vehicle sensing sensor, which is set at a certain distance from the cross-track in the track to sense vehicles entering the cross-track.

3. The cross-track structure for the OHT system according to claim 1 or 2, wherein, The spacing maintaining unit includes: a plate-shaped first component disposed above the auxiliary track; and a pair of second components extending downward from both ends of the first component and engaging with the auxiliary track.

4. The cross-track structure for the OHT system according to claim 2, wherein, The vehicle sensing sensors are infrared sensors, and four are arranged around the intersecting tracks.

5. An OHT system, comprising: The OHT system of claim 1 uses a cross-track structure; as well as The control unit controls the moving and rotating units of the OHT system using a cross-track structure.

6. The OHT system according to claim 5, wherein, The OHT system further includes a vehicle sensing sensor, which is positioned at a certain distance from the intersecting tracks in the track to sense vehicles entering the intersecting tracks.

7. The OHT system according to claim 5 or 6, wherein, The spacing maintaining unit includes: a plate-shaped first component disposed above the auxiliary track; and a pair of second components extending downward from both ends of the first component and engaging with the auxiliary track.

8. The OHT system according to claim 6, wherein, The vehicle sensing sensors are infrared sensors, and four are arranged around the intersecting tracks.

9. A cross rail structure for an OHT system, the cross rail structure being a structure of a point where a pair of rails, which are orthogonal in a rail in which a carrier is transferred in the OHT system, are crossed, the pair of rails being arranged in parallel with each other, wherein The cross-track structure used in the OHT system includes: A pair of auxiliary tracks are set at the same height as the tracks at the points where the tracks intersect and are arranged parallel to each other at the same interval as the spacing between the pair of tracks; The moving unit causes the auxiliary track to move in the vertical direction; A rotating unit rotates the auxiliary track so that the auxiliary track can be configured in either of two mutually orthogonal directions; A spacing maintaining unit includes: a plate-shaped first component disposed above the auxiliary rail; and a pair of second components extending downward from both ends of the first component and coupled to the auxiliary rail, the spacing maintaining unit maintaining the spacing between the pair of auxiliary rails the same as the spacing between the pair of rails without hindering the movement of the vehicle; The vehicle sensing sensor is an infrared sensor that is set at a certain distance from the intersecting tracks in the track to sense vehicles entering the intersecting tracks, and four sensors are set around the intersecting tracks; The moving unit includes: a frame arm coupled to the track; a plate-shaped moving part frame disposed above the auxiliary track and fixed to the track by the frame arm, and provided with a pair of arc-shaped guide holes; a pair of pistons, which are hydraulic devices disposed in the rotating unit; a pair of piston arms, one end of which is coupled to the pistons and the other end of which is coupled to the auxiliary track; and a plate-shaped rotating part frame, the upper two sides of which are respectively coupled to the pair of pistons. The rotating unit includes: a plate-shaped rotating frame, with its upper sides respectively connected to the pair of pistons and having a pair of through holes; and a motor, with its lower part fixed to the moving frame and its upper part fixed to the rotating frame. The piston arm passes through the through hole and the guide hole to engage with the auxiliary track. The motor causes the rotating frame to rotate, thereby causing the pair of pistons and the auxiliary track to rotate together.

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