一种加速度计
By employing an asymmetrically arranged detection plate and detection electrode structure in the accelerometer, differential drive detection is formed, which solves the parasitic capacitance problem caused by the complex wiring of the detection electrodes, improves detection accuracy and anti-interference ability, and enhances detection stability and sensitivity.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- AAC KAITAI TECHNOLOGIES (WUHAN) CO LTD
- Filing Date
- 2023-04-11
- Publication Date
- 2026-07-17
AI Technical Summary
Existing micromechanical accelerometers suffer from low accuracy and poor measurement precision due to the complex wiring of their detection electrodes, which can lead to parasitic capacitance.
An asymmetrical detection plate and detection electrode structure is adopted to form differential drive detection. The detection result is obtained by analyzing the differential capacitance change between the detection plate and the detection electrode. The detection electrode and the detection plate are spaced apart to reduce the parasitic capacitance effect caused by complex wiring.
It improves the detection accuracy and anti-interference ability of the accelerometer, reduces interference caused by complex wiring, and enhances the stability and sensitivity of the detection.
Smart Images
Figure CN116298387B_ABST