Signal quality assessment method and system for coplanar array capacitive sensors

CN116299123BActive Publication Date: 2026-09-01BEIJING XINGHANG MECHANICAL ELECTRICAL EQUIP CO LTD +1
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Patent Information

Application Number
CN202310217574.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-03-08
Publication Date
2026-09-01
Estimated Expiration
2043-03-08

AI Technical Summary

Technical Problem

[0004]鉴于上述的分析,本发明实施例旨在提供一种同面阵列电容传感器的信号质量评估方法及系统,用以解决现有技术中同面阵列电容传感器的输出信号质量无法有效评估的问题

Benefits of technology

[0045]与现有技术相比,本发明至少可实现如下有益效果之一:

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Abstract

This invention relates to a signal quality assessment method and system for a coplanar array capacitive sensor, belonging to the field of coplanar array capacitance detection technology, and solves the problem that the output signal quality of coplanar array capacitive sensors cannot be effectively assessed in the prior art. The signal quality assessment method for a coplanar array capacitive sensor of this invention includes the following steps: determining the number of effective electrode pairs and the number of ineffective electrode pairs in the target coplanar array capacitive sensor based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitive sensor; calculating the electrode utilization rate of the target coplanar array capacitive sensor based on the number of effective and ineffective electrode pairs; and assessing the quality of the array output signal of the target coplanar array capacitive sensor based on the electrode utilization rate. This invention uses the electrode utilization rate as an evaluation index, achieving an effective assessment of the array output signal quality of the target coplanar array capacitive sensor.
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Description

Technical Field

[0001] This invention relates to the field of coplanar array capacitance detection technology, and in particular to a signal quality assessment method and system for a target coplanar array capacitance sensor. Background Technology

[0002] Coplanar array capacitive sensors are a novel type of capacitive sensor that uses dielectric properties as its detection principle. They offer advantages such as low cost, high sensitivity, non-invasiveness, non-destructive testing, and the ability to detect targets from one side only. Coplanar array capacitive sensors have demonstrated broad research value and application prospects in non-destructive testing fields such as composite material damage identification, moisture content detection, and concrete defect detection.

[0003] The output signal quality of a coplanar capacitive array sensor is a key factor determining its detection accuracy. Therefore, evaluating the output signal quality of a coplanar capacitive array sensor is of great significance for coplanar capacitive array detection technology. However, currently, there is a lack of effective methods for evaluating the output signal of a coplanar capacitive array sensor. Summary of the Invention

[0004] Based on the above analysis, the embodiments of the present invention aim to provide a signal quality evaluation method and system for coplanar array capacitive sensors, so as to solve the problem that the output signal quality of coplanar array capacitive sensors cannot be effectively evaluated in the prior art.

[0005] On one hand, embodiments of the present invention provide a method for evaluating the signal quality of a coplanar array capacitive sensor, the method comprising the following steps:

[0006] The number of valid electrode pairs and the number of invalid electrode pairs in the target coplanar array capacitive sensor are determined based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitive sensor.

[0007] The electrode utilization rate of the target coplanar array capacitive sensor is calculated based on the number of effective electrode pairs and the number of ineffective electrode pairs.

[0008] The quality of the array output signal of the target coplanar array capacitive sensor is evaluated based on the electrode utilization rate.

[0009] A further improvement to the above method, determining the number of valid electrode pairs and the number of invalid electrode pairs in the target coplanar array capacitive sensor based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitive sensor, includes the following steps:

[0010] The array output signal of the coplanar array capacitance sensor of the target is measured by a capacitance measuring instrument, and the dynamic range of the array output signal is calculated.

[0011] The number of effective electrode pairs and the number of ineffective electrode pairs of the target coplanar array capacitive sensor are determined based on the minimum detectable value of the capacitance measuring instrument and the dynamic range of the array output signal of the target coplanar array capacitive sensor.

[0012] Based on a further improvement of the above method, the array output signal of the target coplanar array capacitance sensor is measured using a capacitance measuring instrument, and the dynamic range of the array output signal is calculated, including:

[0013] The empty field data and full field data of each electrode pair of the target coplanar array capacitive sensor are measured using a capacitance measuring instrument.

[0014] The dynamic range of the array output signal of the target coplanar array capacitive sensor is calculated according to formula (1).

[0015]

[0016] In the formula, The dynamic range of the output signal of the nth electrode pair formed by the i-th and j-th electrodes of the coplanar array capacitive sensor; and These are the full-field data and empty-field data for the nth electrode pair, respectively; i = 1, 2…N, j = 1, 2…N, n = 1, 2…N(N-1) / 2, where N is the total number of electrodes in the target coplanar array capacitive sensor, and N ≥ 3.

[0017] Based on a further improvement to the above method, determining the number of effective electrode pairs and the number of ineffective electrode pairs of the target coplanar array capacitance sensor according to the minimum detectable value of the capacitance measuring instrument and the dynamic range of the array output signal of the target coplanar array capacitance sensor includes:

[0018] like Then the nth electrode pair is the effective electrode pair;

[0019] like Then the nth electrode pair is an invalid electrode pair;

[0020] Where λ is the minimum detectable value, k is the relaxation factor, and k≥0.

[0021] A further improvement to the above method, the step of calculating the electrode utilization rate of the target coplanar array capacitive sensor based on the number of effective electrode pairs and the number of ineffective electrode pairs, includes:

[0022] The electrode utilization rate of the target coplanar array capacitive sensor is calculated according to formula (2).

[0023]

[0024] In the formula, EUR represents the electrode utilization rate, and N... FEP N represents the number of effective electrode pairs. NEP This represents the number of invalid electrode pairs.

[0025] A further improvement to the above method, wherein evaluating the quality of the output signal of the target coplanar array capacitive sensor based on the electrode utilization rate includes:

[0026] If the electrode utilization rate is greater than or equal to a preset threshold, the array output signal of the target coplanar array capacitive sensor is a valid signal.

[0027] If the electrode utilization rate is less than a preset threshold, the array output signal of the target coplanar array capacitive sensor is an invalid signal.

[0028] On the other hand, embodiments of the present invention provide a signal quality assessment system for a target coplanar array capacitive sensor, the system comprising:

[0029] A capacitance measuring instrument used to measure the array output signal of a target coplanar array capacitance sensor;

[0030] The processing module is used to determine the number of valid electrode pairs and the number of invalid electrode pairs in the target coplanar array capacitive sensor based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitive sensor.

[0031] The calculation module is used to calculate the electrode utilization rate of the target coplanar array capacitive sensor based on the number of effective electrode pairs and the number of ineffective electrode pairs; and

[0032] An evaluation module is used to evaluate the quality of the array output signal of the target coplanar array capacitive sensor based on the electrode utilization rate.

[0033] Based on a further improvement to the above system, the processing module determines the number of valid electrode pairs and the number of invalid electrode pairs in the target coplanar array capacitance sensor according to the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitance sensor, including:

[0034] The array output signal of the coplanar array capacitance sensor of the target is measured by a capacitance measuring instrument, and the dynamic range of the array output signal is calculated.

[0035] The number of effective electrode pairs and the number of ineffective electrode pairs of the target coplanar array capacitive sensor are determined based on the minimum detectable value of the capacitance measuring instrument and the dynamic range of the array output signal of the target coplanar array capacitive sensor.

[0036] Based on further improvements to the above system, the step of measuring the array output signal of the target coplanar array capacitance sensor using a capacitance measuring instrument and calculating the dynamic range of the array output signal includes:

[0037] The empty field data and full field data of each electrode pair of the target coplanar array capacitive sensor are measured using a capacitance measuring instrument.

[0038] The processing module calculates the dynamic range of the array output signal of the target coplanar array capacitive sensor according to formula (1).

[0039]

[0040] In the formula, The dynamic range of the output signal of the nth electrode pair formed by the i-th and j-th electrodes of the coplanar array capacitive sensor; and These are the full-field data and empty-field data for the nth electrode pair, respectively; i = 1, 2…N, j = 1, 2…N, n = 1, 2…N(N-1) / 2, where N is the total number of electrodes in the target coplanar array capacitive sensor, and N ≥ 3.

[0041] Based on a further improvement to the above system, the processing module determines the number of effective electrode pairs and the number of ineffective electrode pairs of the target coplanar array capacitance sensor according to the minimum detectable value of the capacitance measuring instrument and the dynamic range of the array output signal of the target coplanar array capacitance sensor, including:

[0042] like The processing module then determines that the nth electrode pair is a valid electrode pair;

[0043] like The processing module then determines that the nth electrode pair is an invalid electrode pair;

[0044] Where λ is the minimum detectable value, k is the relaxation factor, and k≥0.

[0045] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0046] 1. In this invention, the electrode utilization rate, calculated based on the number of effective electrode pairs and the number of ineffective electrode pairs, is proposed as an evaluation index for assessing the quality of the array output signal of a coplanar array capacitive sensor. The output signal of the effective electrode pairs provides information that is beneficial to the detection results, while the output signal of the ineffective electrode pairs contains a large amount of noise, which can lead to deviations in the detection results. Therefore, the electrode utilization rate can effectively evaluate the quality of the array output signal of the coplanar array capacitive sensor.

[0047] 2. In this invention, by measuring the array output signal of the coplanar array capacitance sensor and calculating the dynamic range of the array output signal using a capacitance measuring instrument, the influence of the parasitic capacitance of the capacitance measuring instrument can be shielded, thereby obtaining a more accurate number of effective electrode pairs and ineffective electrode pairs.

[0048] 3. In this invention, the electrode utilization rate is calculated by comprehensively considering the difference between the number of effective electrode pairs and ineffective electrode pairs of the target coplanar array capacitive sensor, so that the calculated electrode utilization rate can more intuitively and effectively evaluate the quality of the array output signal of the target coplanar array capacitive sensor.

[0049] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages may become apparent from the description or be learned by practicing the invention. The objects and other advantages of this invention can be realized and obtained from what is particularly pointed out in the description and drawings. Attached Figure Description

[0050] The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0051] Figure 1 This is a flowchart of a signal quality assessment method in one embodiment of the present invention;

[0052] Figure 2 This is a schematic diagram of the structure of a coplanar array capacitive sensor in one embodiment of the present invention;

[0053] Figure 3 This is a schematic diagram of the empty field data, full field data, and dynamic range of each electrode pair of the coplanar array capacitive sensor in Embodiment 1 of the present invention.

[0054] Figure label:

[0055] 1-12, representing the first to twelfth electrodes respectively;

[0056] 20. External shielding;

[0057] 30. Inter-electrode shielding;

[0058] 40. Bottom shielding;

[0059] 50. Outer shell. Detailed Implementation

[0060] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0061] A specific embodiment of the present invention discloses a method for evaluating the signal quality of a coplanar array capacitive sensor, such as... Figure 1 As shown. The method includes the following steps:

[0062] Step 1: Determine the number of valid electrode pairs and invalid electrode pairs in the target coplanar array capacitance sensor based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitance sensor.

[0063] Step 2: Calculate the electrode utilization rate of the target coplanar array capacitive sensor based on the number of effective electrode pairs and the number of ineffective electrode pairs;

[0064] Step 3: Evaluate the array output signal of the target coplanar array capacitive sensor based on electrode utilization.

[0065] A coplanar array capacitive sensor contains multiple independent electrodes, which are combined in pairs to form an electrode pair. The array output signal of the coplanar array capacitive sensor is the collection of the output signals (capacitance signals) of each electrode pair.

[0066] When using a coplanar array capacitive sensor to achieve the detection purpose, it is first necessary to use existing capacitance measurement technology or instruments to measure and obtain the capacitance signal output by the sensor in a certain way. Then, the dielectric distribution in the measurement domain is retrieved by inverting the capacitance signal, and the analyte is qualitatively and quantitatively judged by the dielectric distribution.

[0067] Ideally, increasing the number of independent electrodes in a coplanar capacitive array sensor can yield more measurement data, thereby improving detection accuracy. However, in reality, increasing the number of electrodes only brings a limited improvement in detection accuracy; when the number of electrodes is too large, the detection accuracy of the target coplanar capacitive array sensor may actually decrease. Research has found that this is because in a coplanar capacitive array sensor with a large number of electrodes, the output signals of some electrode pairs that are far apart may be weak and overwhelmed by noise.

[0068] Since the array output signal of the coplanar capacitive sensor needs to be measured using a capacitance measuring instrument, it cannot be measured if the output signal of the electrode pair is less than the minimum detectable value of the capacitance measuring instrument. Therefore, based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the coplanar capacitive sensor, it can be determined whether each electrode pair is a valid electrode pair or an invalid electrode pair.

[0069] The minimum detectable value mentioned above is the minimum value that the capacitance measuring instrument can detect.

[0070] Compared with the prior art, in this embodiment of the invention, the electrode utilization rate calculated based on the number of effective electrode pairs and the number of ineffective electrode pairs is proposed as an evaluation index for assessing the quality of the array output signal of the target coplanar array capacitive sensor. The output signal of the effective electrode pairs provides information that is beneficial to the detection results, while the output signal of the ineffective electrode pairs contains a large amount of noise, which can lead to deviations in the detection results. Therefore, the electrode utilization rate can effectively evaluate the quality of the array output signal of the target coplanar array capacitive sensor.

[0071] In one embodiment, step 1 includes the following steps:

[0072] Step 11: Measure the output signal of the target coplanar array capacitive sensor using a capacitance measuring instrument, and calculate the dynamic range of the output signal.

[0073] Step 12: Determine the number of effective electrode pairs and the number of ineffective electrode pairs of the target coplanar array capacitance sensor based on the minimum detectable value of the capacitance measuring instrument and the dynamic range of the output signal of the target coplanar array capacitance sensor.

[0074] In this embodiment, by measuring the array output signal of the target coplanar array capacitance sensor and calculating the dynamic range of the array output signal using a capacitance measuring instrument, the influence of the parasitic capacitance of the capacitance measuring instrument can be shielded, thereby obtaining a more accurate number of effective electrode pairs and ineffective electrode pairs.

[0075] Specifically, step 11 includes:

[0076] Step 111: Measure the empty field data and full field data of each electrode pair of the target coplanar array capacitive sensor using a capacitance measuring instrument.

[0077] Step 112: Calculate the dynamic range of the array output signal of the target coplanar array capacitive sensor according to formula (1).

[0078]

[0079] In the formula, The dynamic range of the output signal of the nth electrode pair formed by the i-th and j-th electrodes of the coplanar array capacitive sensor; and These are the full-field data and empty-field data for the nth electrode pair, respectively; i = 1, 2…N, j = 1, 2…N, n = 1, 2…N(N-1) / 2, where N is the total number of electrodes in the target coplanar array capacitive sensor, and N ≥ 3.

[0080] Here, empty field data refers to the output signal data of each electrode pair when the measurement field of the coplanar array capacitive sensor is empty (generally filled with air); full field data refers to the output signal data of each electrode pair when the measurement field of the coplanar array capacitive sensor is full (filled with the measured object). The measurement field refers to the detectable space of the coplanar capacitive sensor.

[0081] The dynamic range of the array output signal of a coplanar array capacitive sensor characterizes the amplitude range (difference between the maximum and minimum values) of the output signal of each electrode pair.

[0082] Further, step 12 includes: if Then the nth electrode pair is an effective electrode pair; if Then the nth electrode pair is an invalid electrode pair; where λ is the minimum detectable value, k is the relaxation factor, and k≥0.

[0083] In this embodiment, if the dynamic range of the output signal of a certain electrode pair is less than the minimum detectable value of the capacitance measuring instrument, it indicates that the capacitance measuring instrument cannot measure the output signal of the electrode pair, that is, its output signal is noise.

[0084] Meanwhile, in this embodiment, a relaxation factor k is introduced to eliminate the output signals of electrode pairs that are close to the minimum detectable value of the capacitance instrument. Such signals have high noise and poor noise resistance.

[0085] In practice, the dynamic range of the array output signal of the target coplanar array capacitive sensor is thresholded using the minimum detectable value λ, as shown in formula (3).

[0086]

[0087] In the formula, η H (ω,λ) indicates that ω is subjected to a λ threshold.

[0088] Specifically, if the dynamic range of the output signal of an electrode pair is greater than λ+k, it is retained; electrode pairs with retained dynamic range are called functioning electrode pairs (FEP). If the dynamic range of the output signal of an electrode pair is less than or equal to λ+k, it is set to zero; electrode pairs with zero dynamic range are called non-functioning electrode pairs (NEP). The number of non-functioning electrode pairs and functioning electrode pairs can then be obtained by counting the number of zeroed and non-zero data in ω.

[0089] In one embodiment, in step 2, the electrode utilization rate of the target coplanar array capacitive sensor is calculated according to formula (2).

[0090]

[0091] In the formula, EUR represents the electrode utilization rate, and N... FEP N represents the number of effective electrode pairs. NEP This represents the number of invalid electrode pairs.

[0092] In this embodiment, the electrode utilization rate is calculated by comprehensively considering the difference between the number of effective electrode pairs and ineffective electrode pairs of the coplanar array capacitive sensor. This allows the calculated electrode utilization rate to more intuitively and effectively evaluate the quality of the array output signal of the target coplanar array capacitive sensor.

[0093] In one embodiment, in step 3, if the electrode utilization rate is greater than or equal to a preset threshold, the output signal of the target coplanar array capacitive sensor is a valid signal; if the electrode utilization rate is less than the preset threshold, the output signal of the target coplanar array capacitive sensor is an invalid signal.

[0094] In this embodiment, a higher electrode utilization rate indicates that the array output signal of the target coplanar array capacitive sensor contains a larger amount of effective information and a lower noise content, meaning that the quality of its array output signal is higher. Conversely, a lower electrode utilization rate indicates a lower quality array output signal.

[0095] Specifically, the aforementioned preset threshold can be set to zero. A negative electrode utilization rate indicates that the effective output information in the array output signal of the same-plane capacitive sensor may be masked by noise, i.e., the output signal quality is low.

[0096] On the other hand, embodiments of the present invention provide a signal quality evaluation system for a coplanar array capacitive sensor, the system comprising: a capacitance measuring instrument, a processing module, a calculation module, and an evaluation module.

[0097] The system includes a capacitance measuring instrument for measuring the array output signal of a target coplanar array capacitance sensor; a processing module for determining the number of valid electrode pairs and invalid electrode pairs in the target coplanar array capacitance sensor based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitance sensor; a calculation module for calculating the electrode utilization rate of the target coplanar array capacitance sensor based on the number of valid electrode pairs and invalid electrode pairs; and an evaluation module for evaluating the quality of the array output signal of the target coplanar array capacitance sensor based on the electrode utilization rate.

[0098] Specifically, the capacitance measuring instrument mentioned above can be an ITS-M3C capacitance chromatography instrument.

[0099] Example 1

[0100] The following section uses a 3×4 coplanar array capacitive sensor as an example to specifically illustrate the signal quality evaluation method of the coplanar array capacitive sensor of the present invention.

[0101] like Figure 2 As shown, the coplanar array capacitive sensor includes a housing 50, a substrate, and 12 electrodes. The top of the housing is open, and the substrate is disposed within the opening. The 12 electrodes are arranged in an array on the substrate, sequentially designated as electrode 1, electrode 2, ..., electrode 12. The length and width of each electrode are 40.7 mm and 39.8 mm, respectively, and the electrode spacing is 3 mm. An outer shield 20 with a width of 10 mm is provided around the outer periphery of all electrodes. An inter-electrode shield 30 with a width of 1 mm is provided between adjacent electrodes. A bottom shield 40 is provided at the bottom of the substrate. The electrodes and shields are made of copper, and the housing 50 is made of fiber-reinforced fire-resistant PC / ABS.

[0102] I. The capacitance measurement instrument used is the ITS-M3C capacitance tomography instrument, and its minimum detectable value was determined to be 3fF through experiments.

[0103] II. The empty field data, full field data, and dynamic range data of this coplanar array capacitive sensor, such as... Figure 3 As shown in the image.

[0104] III. Based on the minimum detectable value of the capacitance measuring instrument, determine whether each electrode pair (66 pairs in total) of the target coplanar array capacitance sensor is a valid or invalid electrode pair according to its dynamic range, and count the number of valid and invalid electrode pairs. The results are shown in Table 1. Let i represent the dynamic range of the nth electrode pair consisting of the i-th electrode and the j-th electrode, where i,j = 1…12, n = 1…66.

[0105] Table 1

[0106]

[0107]

[0108] 4. Calculate electrode utilization rate based on the number of effective and ineffective electrode pairs. The formula for calculating electrode utilization rate is:

[0109] In this embodiment, when the ITS-M3C capacitance tomography instrument is used to measure the array output signal of the target coplanar array capacitance sensor, the electrode utilization rate of the target coplanar array capacitance sensor is 6.06%, and its array output signal is a valid signal.

[0110] Example 2

[0111] The coplanar array capacitive sensor in this embodiment has the same configuration parameters as the coplanar array capacitive sensor in Embodiment 1, except for the number of electrodes, and will not be described again here.

[0112] The total number of electrode pairs, the number of effective electrode pairs, the number of ineffective electrode pairs, and the electrode utilization rate of coplanar array capacitive sensors with different numbers of electrodes are shown in Table 2.

[0113] Table 2

[0114]

[0115] As shown in Table 2, the electrode utilization rate of the target coplanar array capacitive sensor gradually decreases with the increase of the number of independent electrodes. In particular, when the number of electrodes is greater than 12, the electrode utilization rate is negative, indicating that the effective information in the array output signal of these coplanar capacitive sensors has been overwhelmed by noise, the signal quality is low, and the array output signal is an invalid signal.

[0116] Research has found that increasing the number of electrodes in a coplanar capacitive array sensor only leads to a limited improvement in detection accuracy. Furthermore, when the number of electrodes is too large, the detection accuracy of the target coplanar capacitive array sensor actually decreases, meaning the signal quality provided by the target coplanar capacitive array sensor deteriorates. As shown in Table 2, the electrode utilization rate gradually decreases with increasing electrode number, thus demonstrating the effectiveness of the signal quality assessment method and system proposed in this invention, which uses electrode utilization rate as an indicator to evaluate the output signal quality of the coplanar capacitive array sensor.

[0117] Those skilled in the art will understand that all or part of the processes of the methods described in the above embodiments can be implemented by a computer program instructing related hardware, and the program can be stored in a computer-readable storage medium. The computer-readable storage medium may be a disk, optical disk, read-only memory, or random access memory, etc.

[0118] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A method of signal quality assessment of a co-planar array capacitive sensor, characterized in that, The method includes the following steps: The number of valid electrode pairs and the number of invalid electrode pairs in the target coplanar array capacitive sensor are determined based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitive sensor, including the following steps: The array output signal of the coplanar array capacitance sensor of the target is measured by a capacitance measuring instrument, and the dynamic range of the array output signal is calculated. The number of effective electrode pairs and the number of ineffective electrode pairs of the target coplanar array capacitance sensor are determined based on the minimum detectable value of the capacitance measuring instrument and the dynamic range of the array output signal of the target coplanar array capacitance sensor, specifically including: If then the first electrode pair is an effective electrode pair; If then the first electrode pair is an invalid electrode pair; in, The first target coplanar array capacitive sensor Electrode and the first The first electrode composition The dynamic range of the output signal of the electrode pair; The minimum detectable value, As a relaxation factor, relaxation factor This is used to eliminate output signals from electrode pairs that are close to the minimum detectable value of the capacitance instrument. Such signals have high noise and poor noise immunity. The electrode utilization rate of the target coplanar array capacitive sensor is calculated based on the number of effective electrode pairs and the number of ineffective electrode pairs. The quality of the array output signal of the target coplanar array capacitive sensor is evaluated based on the electrode utilization rate. The array output signal of the coplanar array capacitance sensor is measured using a capacitance measuring instrument, and the dynamic range of the array output signal is calculated, including: The empty field data and full field data of each electrode pair of the target coplanar array capacitive sensor are measured using a capacitance measuring instrument. The dynamic range of the array output signal of the target coplanar array capacitive sensor is calculated according to formula (1). (1) In the formula, The first target coplanar array capacitive sensor Electrode and the first The first electrode composition The dynamic range of the output signal of the electrode pair; and The first Full-field and empty-field data of the electrode pair; , , , The total number of electrodes in the target coplanar array capacitive sensor. .

2. The signal quality assessment method according to claim 1, characterized in that, The calculation of the electrode utilization rate of the target coplanar array capacitive sensor based on the number of effective electrode pairs and the number of ineffective electrode pairs includes: The electrode utilization rate of the target coplanar array capacitive sensor is calculated according to formula (2). (2) In the formula, For electrode utilization rate, The number of effective electrode pairs. This represents the number of invalid electrode pairs.

3. The signal quality assessment method according to claim 2, characterized in that, The step of evaluating the quality of the output signal of the target coplanar array capacitive sensor based on the electrode utilization rate includes: If the electrode utilization rate is greater than or equal to a preset threshold, the array output signal of the target coplanar array capacitive sensor is a valid signal. If the electrode utilization rate is less than a preset threshold, the array output signal of the target coplanar array capacitive sensor is an invalid signal.

4. A signal quality assessment system for a target coplanar array capacitive sensor, characterized in that, The system includes: A capacitance measuring instrument used to measure the array output signal of a target coplanar array capacitance sensor; The processing module is used to determine the number of valid electrode pairs and the number of invalid electrode pairs in the target coplanar array capacitive sensor based on the minimum detectable value of the capacitance measuring instrument and the array output signal of the target coplanar array capacitive sensor, including the following steps: The array output signal of the coplanar array capacitance sensor of the target is measured by a capacitance measuring instrument, and the dynamic range of the array output signal is calculated. The number of effective electrode pairs and the number of ineffective electrode pairs of the target coplanar array capacitance sensor are determined based on the minimum detectable value of the capacitance measuring instrument and the dynamic range of the array output signal of the target coplanar array capacitance sensor, specifically including: like Then the first The electrode pair is a valid electrode pair; like Then the first The electrode pair is invalid. in, The first target coplanar array capacitive sensor Electrode and the first The first electrode composition The dynamic range of the output signal of the electrode pair; The minimum detectable value, As a relaxation factor, relaxation factor This is used to eliminate output signals from electrode pairs that are close to the minimum detectable value of the capacitance instrument. Such signals have high noise and poor noise immunity. The calculation module is used to calculate the electrode utilization rate of the target coplanar array capacitive sensor based on the number of effective electrode pairs and the number of ineffective electrode pairs; and An evaluation module is used to evaluate the quality of the array output signal of the target coplanar array capacitive sensor based on the electrode utilization rate. The step of measuring the array output signal of the target coplanar array capacitance sensor using a capacitance measuring instrument and calculating the dynamic range of the array output signal includes: The empty field data and full field data of each electrode pair of the target coplanar array capacitive sensor are measured using a capacitance measuring instrument. The processing module calculates the dynamic range of the array output signal of the target coplanar array capacitive sensor according to formula (1). (1) In the formula, The first target coplanar array capacitive sensor Electrode and the first The first electrode composition The dynamic range of the output signal of the electrode pair; and The first Full-field and empty-field data of the electrode pair; , , , The total number of electrodes in the target coplanar array capacitive sensor. .