基于多物理场耦合的多环谐振式微机械陀螺结构的优化设计方法
By using multiphysics coupling simulation and genetic algorithm optimization design with COMSOL and MATLAB, the ring width structure of the multi-ring resonant micromechanical gyroscope was identified and optimized, which solved the problem of reduced sensitivity caused by MEMS manufacturing process errors and improved the performance of the gyroscope.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NORTHWESTERN POLYTECHNICAL UNIV
- Filing Date
- 2022-10-29
- Publication Date
- 2026-07-17
AI Technical Summary
The performance of existing multi-ring resonant micromechanical gyroscopes is limited by MEMS manufacturing process errors and the reduced sensitivity caused by the shrinkage of device size. The equal-ring width structure design cannot achieve optimal performance.
A multiphysics-based coupled simulation and genetic algorithm optimization design method based on COMSOL and MATLAB is adopted. By identifying the n=2nd order degenerate mode, the ring width structure of the multi-ring resonant micromechanical gyroscope is optimized to improve mechanical sensitivity and mechanical thermal noise performance.
The mechanical sensitivity and mechanical thermal noise performance of the multi-ring resonant micromechanical gyroscope were improved, and the optimized design method improved the accuracy and efficiency of the gyroscope.
Smart Images
Figure CN116305600B_ABST