一种晶圆盒定位传输装置及方法
By combining a transmission platform and positioning components, and using telescopic components and sensors to monitor the wafer cassette position, the problems of unstable wafer cassette transmission and poor compatibility are solved, achieving stable and widely applicable wafer cassette positioning and transmission.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XIAN ESWIN MATERIAL TECHNOLOGY CO LTD
- Filing Date
- 2023-04-28
- Publication Date
- 2026-07-17
AI Technical Summary
In existing technologies, the lack of a fixed gripping position for wafer cassettes leads to unstable transmission, poses a risk of dropping, and has poor compatibility, making it unable to adapt to different models of wafer cassettes.
By employing a conveying platform and positioning components, and monitoring the wafer cassette position through retractable telescopic components and sensors, the working status of the telescopic components and conveying platform is controlled to achieve precise positioning and transmission of the wafer cassette.
It achieves stable transmission to different wafer cassettes, has good compatibility, avoids the risk of dropping, and is suitable for various wafer cassettes without relying on mushroom heads or handles to fix the gripping position.
Smart Images
Figure CN116313965B_ABST