Gasket and flow path joint structure

Abstract

In a state in which the annular primary seal portion 11 of the gasket 3 is pressed into the annular primary seal groove 2b of the fluid apparatus 2, a tapered surface 14 that gradually increases in diameter from the inner axial side toward the outer axial end is formed at the outer axial end of the inner peripheral surface 3a of the gasket 3. The start point P1 of the increase in diameter of the tapered surface 14 is located within a range R from a deformation start position P2 to a central position P3 in the axial direction of the inner peripheral surface 3a. The deformation start position becomes a start point of deformation of the inner peripheral surface 3a due to an external force applied to the primary seal portion 11 from the fluid apparatus 2 when the primary seal portion 11 is pressed into the primary seal groove 2b.

Description

Technical Field

[0001] This invention relates to sealing gaskets and flow path connector structures. Background Technology

[0002] For piping paths of fluids such as pharmaceutical solutions, high-purity liquids, ultrapure water, or cleaning solutions processed in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, and food processing / chemical industry, a sealing gasket is used to prevent fluid leakage as a connection structure that connects the flow paths formed by two fluid devices such as pumps, valves, reservoirs, filters, flow meters, pressure sensors, and piping modules to each other (see, for example, Patent Document 1).

[0003] Figure 4 This is a cross-sectional view showing the current sealing gasket along its axial direction. The current sealing gasket 100 has: a cylindrical main body portion 110; a pair of annular primary sealing portions 111, which are formed to protrude radially inward toward axially outward at both axial ends of the main body portion 110; and a pair of annular secondary sealing portions 112, which are formed to protrude radially outward toward axially outward at both axial ends of the main body portion 110. A tapered surface 113 that gradually expands in diameter from the axially inward side toward the axially outward end is formed at the axially outer end of the inner circumferential surface of the sealing gasket.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2019-173844 Summary of the Invention

[0005] Figure 5 This is an axial cross-sectional view showing the state in which the flow paths 153 formed in the two fluid devices 150 are connected to each other using the current sealing gasket 100. The internal space of the main body 110 becomes a fluid flow path 114 that connects the flow paths 153 of the two fluid devices 150 to each other. The primary sealing part 111 and the secondary sealing part 112 are pressed into the annular primary sealing groove 151 and secondary sealing groove 152 formed in each fluid device 150. As a result, the sealing performance between each fluid device 150 and the sealing gasket 100 can be ensured, preventing fluid leakage.

[0006] However, as Figure 5 As shown, the primary sealing portion 111 of the sealing gasket 100 is pressed against the primary sealing groove 151 of the fluid device 150 and deformed by tilting radially inward. As a result, the axially outer end of the inner circumferential surface of the sealing gasket 100 protrudes into the fluid flow path 114, thus causing adverse effects such as a decrease in the displacement characteristics of the fluid flowing in the fluid flow path 114 and a longer flushing time required within the sealing gasket 100.

[0007] The present invention was made in view of this situation, and its purpose is to suppress the axial outer end of the inner circumferential surface of the sealing gasket from protruding into the fluid flow path.

[0008] (1) The present invention is a sealing gasket having a pair of annular sealing portions on both sides of an annular sealing groove formed at the connection end of the flow paths of the two fluid devices respectively, for connecting the flow paths of the two fluid devices respectively. A fluid flow path is formed on the radially inner side of the inner circumferential surface. Before the sealing portion is pressed into the sealing groove, a conical surface is formed at the axially outer end of the inner circumferential surface, which gradually expands in diameter from the axially inner side to the axially outer end. The starting point of the expansion of the conical surface is located in the range from the deformation starting point to the axial center of the inner circumferential surface. The deformation starting point is the starting point of the deformation of the inner circumferential surface caused by the sealing portion being subjected to external force from the fluid device when the sealing portion is pressed into the sealing groove.

[0009] According to the sealing gasket of the present invention, the starting point of the expansion of the conical surface formed at the axially outer end of the inner circumferential surface of the sealing gasket is located further axially inward than the deformation starting point position, which is the starting point of deformation of the inner circumferential surface caused by external force from the fluid device on the sealing part. Therefore, the portion of the inner circumferential surface of the sealing gasket that is further axially outward than the deformation starting point position ensures a deformation allowance for radially inward deformation, thus preventing the axially outer end of the inner circumferential surface of the sealing gasket from bulging into the fluid flow path.

[0010] (2) Preferably, the starting point of the diameter expansion of the conical surface is located at the starting point of the deformation.

[0011] In this case, at a position on the inner circumferential surface of the gasket that is axially outer than the deformation start point, only the conical surface that ensures the deformation allowance towards the radially inner side deforms towards the radially inner side, thus further suppressing the axially outer end of the inner circumferential surface of the gasket from protruding into the fluid flow path.

[0012] (3) From another perspective, the present invention is a flow path connector structure having: a sealing gasket for connecting the flow paths of two fluid devices to each other (1) or (2); and a pair of annular sealing grooves formed at the connection ends of the flow paths of the two fluid devices for pressing the sealing portions of the sealing gasket into each other.

[0013] The flow path connector structure according to the present invention can achieve the same effect as the sealing gasket.

[0014] The effects of the invention

[0015] According to the present invention, it is possible to suppress the axial outer end of the inner circumferential surface of the sealing gasket from protruding into the fluid flow path. Attached Figure Description

[0016] Figure 1 This is an axial cross-sectional view showing the flow path connector structure according to an embodiment of the present invention.

[0017] Figure 2 This is an axial cross-sectional view showing the sealing gasket of the flow path connector structure.

[0018] Figure 3 It refers to the conical surface of the inner circumferential surface of the sealing gasket. Figure 2 Enlarged cross-sectional view of the main part.

[0019] Figure 4 This is a cross-sectional view showing the current sealing gasket along its axial direction.

[0020] Figure 5 It is an axial cross-sectional view showing the current usage status of the gasket. Detailed Implementation

[0021] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings.

[0022] [Overall structure of the flow path connector]

[0023] Figure 1 This is an axial cross-sectional view showing the flow path connector structure according to an embodiment of the present invention. Figure 1 The flow path connector structure 1 shown is used, for example, as a piping path for supplying liquid to a semiconductor manufacturing apparatus, as a connection structure that connects the flow paths 2a, 2a formed by two adjacent fluid devices 2, 2 respectively. Examples of fluid devices 2 in this embodiment include pumps, valves, reservoirs, filters, flow meters, pressure sensors, or piping modules.

[0024] The flow path connector structure 1 includes: a sealing gasket 3; and an annular primary sealing groove (sealing groove) 2b and a cylindrical secondary sealing groove 2c respectively formed in each fluid device 2. The sealing gasket 3 is a sealing component that seals the flow paths 2a, 2a of the two fluid devices 2, 2 to each other. Hereinafter, for convenience, in this embodiment, the direction from the axial center of the sealing gasket 3 toward both axial sides will be referred to as the axial outer side, and the direction from both axial sides of the sealing gasket 3 toward the axial center will be referred to as the axial inner side (for...). Figure 2 , Figure 3 Same here).

[0025] The primary sealing groove 2b of each fluid device 2 is a cone-shaped cut on the circumferential surface of the connection end of the flow path 2a, gradually expanding in diameter from the outer axial end to the inner axial end. The secondary sealing groove 2c of each fluid device 2 is located radially outward in each fluid device 2 and is formed in a cylindrical shape.

[0026] [Structure of the sealing gasket]

[0027] Figure 2This is a cross-sectional view showing the axial direction of the sealing gasket 3. The sealing gasket 3 is formed of polyvinyl chloride (PVC), polypropylene (PP), polyethylene (PE), or fluoropolymer (perfluoroalkoxy resin (PFA), Teflon (PTFE), or polyvinylidene fluoride (PVDF), etc.) synthetic resin materials.

[0028] exist Figure 1 and Figure 2 In this device, a fluid flow path 3b is formed radially inside the inner circumferential surface 3a of the sealing gasket 3. The fluid flow path 3b connects the flow paths 2a and 2a of the two fluid devices 2, 2 to each other. The sealing gasket 3 has: a main body 10, which is formed in a cylindrical shape; a pair of annular primary sealing parts (sealing parts) 11; and a pair of cylindrical secondary sealing parts 12.

[0029] Each pair of primary seal portions 11 is formed to protrude radially inward from the outer ends of the main body portion 10 on both sides towards the outer side. The outer peripheral surface 11a of each primary seal portion 11 is formed to gradually narrow from the inner end towards the outer end. Each primary seal portion 11 is pressed into the primary seal groove 2b of the corresponding fluid device 2.

[0030] A pair of secondary sealing portions 12 are formed to protrude radially outward from the outer ends of both sides of the main body portion 10. Each secondary sealing portion 12 is formed in a cylindrical shape and is pressed into the secondary sealing groove 2c of the corresponding fluid device 2. An annular groove 13 with an arc-shaped cross-section is formed between the primary sealing portion 11 and the secondary sealing portion 12.

[0031] Based on the above structure, the pair of primary sealing parts 11 and the pair of secondary sealing parts 12 of the sealing gasket 3 are pressed into the primary sealing groove 2b and the secondary sealing groove 2c of each fluid device 2. Therefore, the sealing performance of the connection between the flow paths 2a and 2a of the two fluid devices 2 can be ensured by using the sealing gasket 3.

[0032] [Inner circumferential surface of the sealing gasket]

[0033] Figure 2 This is a cross-sectional view showing the axial direction of the sealing gasket 3, indicating the state before the primary sealing part 11 and the secondary sealing part 12 are respectively pressed into the primary sealing groove 2b and the secondary sealing groove 2c of the fluid device 2. For example... Figure 2 As shown, the sealing gasket 3 has a pair of conical surfaces 14 formed on the outer ends of the inner circumferential surface 3a on both sides of the axial direction.

[0034] Each conical surface 14 is formed at its axially outer end on the inner circumferential surface 3a such that its diameter gradually increases from the axially inner side toward the axially outer end. In this embodiment, the conical surface 14 is, for example, formed to be inclined in a curved shape when viewed in section. Alternatively, the conical surface 14 may be formed to be inclined in a straight line when viewed in section.

[0035] Figure 3This refers to the conical surface 14 of the inner circumferential surface 3a of the sealing gasket 3. Figure 2 Enlarged cross-sectional view of the main part. Figure 3 In the preferred embodiment, the expansion starting point P1 of the conical surface 14 is located within a range R from the deformation starting point P2 of the inner circumferential surface 3a to the axial center position P3 of the inner circumferential surface 3a. Here, "the range R from the deformation starting point P2 to the center position P3" also includes the deformation starting point P2 and the center position P3.

[0036] In this embodiment, the starting point P1 of the diameter expansion of the conical surface 14 is located at the deformation starting point position P2 within the range R. The deformation starting point position P2 is the starting point where, when the primary sealing part 11 is pressed into the primary sealing groove 2b, the primary sealing part 11 is subjected to external force from the corresponding fluid device 2 via the primary sealing groove 2b, causing the axially outer end of the inner peripheral surface 3a of the sealing gasket 3 to tilt radially inward. In this embodiment, the deformation starting point position P2 is located at the intersection of the radially extending virtual tangent K of the annular groove 13 and the inner peripheral surface 3a.

[0037] Based on the above structure, at the axially outer end of the inner circumferential surface 3a of the sealing gasket 3, the portion further axially outward than the deformation starting point P2 deforms by tilting towards the radially inward. Moreover, the axially outer portion is formed as a conical surface 14 that gradually expands in diameter from the axially inner end (expansion starting point P1) towards the axially outer end, thus ensuring a deformation allowance for the tilting of the axially outer portion on the radially inner side of the conical surface 14.

[0038] like Figure 1 As shown, in this embodiment, when the primary sealing portion 11 is pressed into the primary sealing groove 2b, the entire conical surface 14 deforms in a radially inward tilting manner, thereby becoming a state in which it extends straight in the axial direction along the inner circumferential surface 3a, which is further inward than the expansion starting point P1. Therefore, even if the outer axial end of the inner circumferential surface 3a of the sealing gasket 3 deforms in a radially inward tilting manner when the primary sealing portion 11 is pressed into the primary sealing groove 2b, it will not bulge into the fluid flow path 3b.

[0039] [Effects of this implementation method]

[0040] According to the flow path connector structure 1 of this embodiment, the starting point P1 of the expansion of the conical surface 14 formed at the axially outer end of the inner peripheral surface 3a of the sealing gasket 3 is located within a range R from the deformation starting point position P2 to the axial center position P3 of the inner peripheral surface 3a. This deformation starting point position P2 is the starting point for the deformation of the inner peripheral surface 3a caused by the external force exerted on the primary sealing part 11 from the fluid device 2. As a result, the portion of the inner peripheral surface 3a of the sealing gasket 3 that is axially outer than the deformation starting point position P2 can ensure a deformation margin for radially inward deformation. Therefore, it is possible to suppress the axially outer end of the inner peripheral surface 3a of the sealing gasket 3 from protruding into the fluid flow path 3b, and to suppress the decrease in the displacement characteristics of the fluid flowing in the fluid flow path 3b.

[0041] Furthermore, in this embodiment, the starting point P1 of the diameter expansion of the conical surface 14 is located at the deformation starting point position P2 within the range R. Therefore, at a position on the inner circumferential surface 3a of the sealing gasket 3 that is axially outer than the deformation starting point position P2, only when the conical surface 14, ensuring a deformation allowance towards the radially inner side, deforms radially inward can it further suppress the axially outer end of the inner circumferential surface 3a of the sealing gasket 3 from protruding into the fluid flow path 3b, and further suppress the decrease in the displacement characteristics of the fluid flowing in the fluid flow path 3b.

[0042] [other]

[0043] The sealing gasket 3 of the above embodiment has a primary sealing portion 11 and a secondary sealing portion 12, but it is sufficient to have at least a primary sealing portion 11. Furthermore, it is sufficient that at least one of the pair of primary sealing portions 11 on both axial sides of the sealing gasket 3 has a conical surface 14 formed therein. In addition to semiconductor manufacturing apparatuses, the flow path connector structure and sealing gasket of the present invention can also be applied to the fields of liquid crystal / organic EL, medical / pharmaceutical, or automotive-related fields, etc.

[0044] It should be understood that the embodiments disclosed herein are illustrative in all respects and are not restrictive. The scope of the invention is not as defined above, but is indicated by the claims and is intended to include the equivalent scope of the claims and all modifications within that scope.

[0045] Explanation of the label

[0046] 1. Flow path connector construction

[0047] 2. Fluid Equipment

[0048] 2a flow path

[0049] 2b Primary sealing groove (sealing groove)

[0050] 3 sealing gaskets

[0051] 3a inner circumferential surface

[0052] 3b fluid flow path

[0053] 11. Primary sealing section (sealing section)

[0054] 14 cones

[0055] P1 diameter expansion starting point

[0056] P2 Deformation starting point position

[0057] P3 Center Location

[0058] R range

Claims

1. A sealing gasket having a pair of annular primary sealing portions on both sides of an annular primary sealing groove formed at the connecting ends of the flow paths of the two fluid devices, respectively, for connecting flow paths formed in two fluid devices to each other, wherein a fluid flow path is formed on the radially inner side of the inner circumferential surface, wherein, The device has cylindrical secondary sealing grooves pressed into the connecting ends of the two fluid devices on both axial sides, and a pair of cylindrical secondary sealing portions formed at a position further radially outward than the primary sealing grooves. An annular groove with a circular arc cross-section is formed between the primary sealing part and the secondary sealing part. The deformation initiation point is located at the intersection of a virtual tangent that is the tangent to the annular groove and extends radially along the inner circumferential surface with the inner circumferential surface. This deformation initiation point is the starting point where the inner circumferential surface deforms due to the external force exerted on the primary sealing part by the fluid device when the primary sealing part is pressed into the primary sealing groove. Before the primary sealing part is pressed into the primary sealing groove, the outer end of the inner circumferential surface has a tapered surface that gradually expands in diameter from the inner axial side toward the outer axial side. The starting point of the diameter expansion of the conical surface is located at the starting point of the deformation.

2. A flow path connector structure, wherein, The flow path connector has the following features: The sealing gasket of claim 1, used to connect flow paths formed in two fluid devices to each other; and A pair of annular primary sealing grooves are formed at the connection ends of the flow paths of the two fluid devices, for each primary sealing part of the sealing gasket to be pressed in. A pair of cylindrical secondary sealing grooves are formed at the connection ends of the two fluid devices, for each secondary sealing part of the gasket to be pressed in.

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