In-line metrology system, apparatus and method for optical devices

Abstract

Embodiments of the present disclosure relate to optical devices for augmented, virtual, and / or mixed reality applications. In one or more embodiments, an optical device metrology system is configured to measure a plurality of first metrics and one or more second metrics for an optical device, the one or more second metrics including a display leakage metric.

Description

Technical Field

[0001] Embodiments of this disclosure relate to optical devices for augmented, virtual, and / or mixed reality applications. In one or more embodiments, an optical device metrology system is configured to measure a plurality of first parameters and one or more second parameters for the optical device, the one or more second parameters including a display leakage indicator. Background Technology

[0002] Virtual reality is generally considered to be a computer-generated simulated environment in which the user has a tangible physical presence. Virtual reality experiences can be generated in 3D and viewed through head-mounted displays (HMDs), such as glasses or other wearable display devices, which have near-eye display panels as lenses to display a virtual reality environment that substitutes for the real environment.

[0003] However, augmented reality (AR) enables an experience where users can still see their surroundings through the display lenses of glasses or other HMD devices, and also see images of virtual objects generated for display and appearing as part of the environment. AR can include any type of input, such as audio and haptic input, as well as virtual images, graphics, and videos that enhance or augment the environment experienced by the user. As an emerging technology, AR faces many challenges and design limitations.

[0004] One challenge is displaying a virtual image superimposed on the surrounding environment. An enhanced waveguide combiner is used to assist in this image superposition. The resulting light input is coupled into the enhanced waveguide combiner, propagates through it, couples out from the output of the combiner, and is superimposed on the surrounding environment. A surface-embossed grating is used to couple the light in and out of the enhanced waveguide combiner. It may be difficult to adequately control the intensity of the output coupled light.

[0005] Therefore, this technology requires an optical measurement system and method. Summary of the Invention

[0006] Embodiments of this disclosure relate to optical devices for augmented, virtual, and / or mixed reality applications. In one or more embodiments, an optical device metrology system is configured to measure a plurality of first parameters and one or more second parameters for the optical device, the one or more second parameters including a display leakage indicator.

[0007] In one embodiment, an optical device metrology system includes a stage configured to move a tray along a stage path, and a first subsystem. The first subsystem includes a first body having a first opening and a second opening to allow the stage to move through the first and second openings, and a first optical engine positioned within the first body and mounted above the stage path. The first optical engine is configured to guide a first light beam along the stage path. The first optical engine includes a first illuminator, which includes a first light source and a first projection structure. The first optical engine includes a first lens positioned along an optical path between the first illuminator and the stage path, and one or more two-dimensional electron microscopes configured to deflect the first light beam at a 90-degree angle along the stage path. The first subsystem includes a first detector positioned within the first body and mounted above the stage path to receive a first projected light beam projected upward from the stage path. The first subsystem includes a second detector positioned within the first body and mounted below the stage path to receive a second projected light beam projected downward from the stage path. The optical device metrology system includes a second subsystem, and the second subsystem includes a second body having a first opening and a second opening to allow a stage to move through the first and second openings of the second body. The second subsystem includes a second optical engine positioned within the second body and mounted above a stage path. The second optical engine is configured to guide a second beam of light through the stage path. The second subsystem includes a surface illumination detector configured to receive a third projected beam of light projected upward from the stage path. The optical device metrology system includes a controller in communication with the stage, the first subsystem, and the second subsystem. The controller includes instructions that, when executed, cause the stage to position the optical device within the first subsystem to align the optical device with a first detector and a second detector of the first subsystem. These instructions cause the first optical engine to guide the first beam of light toward the optical device, and this guidance includes turning the first beam of light 90 degrees toward the stage path. These instructions also cause the first detector to acquire multiple first images of the first projected beam of light projected from the optical device, and cause the second detector to acquire multiple second images of the second projected beam of light projected from the optical device. These instructions also cause the processing of one or more of a plurality of first images or a plurality of second images to determine a plurality of first indicators of the optical device. These instructions also cause the stage to position the optical device within the second subsystem to align the optical device with the surface illumination detector of the second subsystem. These instructions also cause the second light engine to direct a second beam of light toward the optical device, and cause the surface illumination detector to acquire a plurality of third images of a third projected beam projected from the optical device. These instructions also cause the processing of the plurality of third images to determine one or more second indicators of the optical device, including a display leakage indicator.

[0008] In one embodiment, an optical device metrology system includes a stage configured to move a tray along a stage path, and a first subsystem. The first subsystem includes a first body having a first opening and a second opening to allow the stage to move through the first and second openings, and a first optical engine positioned within the first body and mounted above the stage path. The first optical engine is configured to direct a first light beam along the stage path. The first optical engine includes a first illuminator, which includes a first light source and a first projection structure. The first optical engine includes a first lens positioned along an optical path between the first illuminator and the stage path, and one or more two-dimensional electron microscopes configured to deflect the first light beam at a 90-degree angle along the stage path. The first subsystem includes a first detector positioned within the first body and mounted above the stage path to receive a first projected light beam projected upward from the stage path, and a second detector positioned within the first body and mounted below the stage path to receive a second projected light beam projected downward from the stage path. The optical device metrology system includes a second subsystem. The second subsystem includes a second body having a first opening and a second opening to allow the stage to move through the first and second openings of the second body. The second subsystem includes a second optical engine located within the second body and mounted above the stage path. The second optical engine is configured to guide a second beam of light along the stage path. The second subsystem also includes a surface illumination detector configured to receive a third projected beam of light projected upward from the stage path.

[0009] In one embodiment, a method for analyzing an optical device includes positioning the optical device within a first subsystem to align the optical device with first and second detectors of the first subsystem, and guiding a first beam of light from a first light engine of the first subsystem toward the optical device. This guidance includes directing the first beams along a 90-degree bend toward a stage path. The method includes acquiring multiple first images of a first projected beam projected from the optical device using the first detectors of the first subsystem, and acquiring multiple second images of a second projected beam projected from the optical device using a second detector of the first subsystem. The method includes processing one or more of the multiple first images or multiple second images to determine multiple first indicators of the optical device, and positioning the optical device within a second subsystem to align the optical device with a surface illumination detector of the second subsystem. The method includes guiding a second beam of light from a second light engine of the second subsystem toward the optical device, and acquiring multiple third images of a third projected beam projected from the optical device using a surface illumination detector of the second subsystem. The method includes processing the multiple third images to determine one or more second indicators of the optical device. The one or more second indicators include indicators of leakage. Attached Figure Description

[0010] Therefore, a more specific description of the above-briefly summarized features of this disclosure can be obtained by referring to embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the drawings illustrate exemplary embodiments only and should not be construed as limiting the scope of this disclosure, and other equally effective embodiments are permissible.

[0011] Figure 1A This is a perspective front view of a substrate according to one embodiment.

[0012] Figure 1B This is a perspective front view of an optical device according to one embodiment.

[0013] Figure 2 This is a schematic diagram of an optical device measurement system according to one embodiment.

[0014] Figure 3A For the implementation of an scheme Figure 2 A schematic partial cross-sectional view of the first subsystem shown.

[0015] Figure 3B For the implementation of an scheme Figure 2 A schematic partial cross-sectional view of the second subsystem shown.

[0016] Figure 3C For the implementation of an scheme Figure 2 A schematic partial cross-sectional view of the third subsystem shown.

[0017] Figure 4A For the implementation of an scheme Figure 2 and Figure 3A A schematic diagram of the configuration of the first subsystem shown.

[0018] Figure 4B For the implementation of an scheme Figure 2 and Figure 3A A schematic diagram of the configuration of the first subsystem shown.

[0019] Figure 4C For the implementation of an scheme Figure 2 and Figure 3A A schematic diagram of the configuration of the first subsystem shown.

[0020] Figure 4D For the implementation of an scheme Figure 2 and Figure 3A A schematic diagram of the configuration of the first subsystem shown.

[0021] Figure 4E For the implementation of an scheme Figure 2 and Figure 3BA schematic diagram of the configuration of the second subsystem shown.

[0022] Figure 4F For the implementation of an scheme Figure 2 and Figure 3C A schematic diagram of the configuration of the third subsystem shown.

[0023] Figure 4G For the implementation of an scheme Figure 2 and Figure 3C A schematic diagram of the configuration of the third subsystem shown.

[0024] Figure 5 This is a schematic diagram of an embodiment.

[0025] Figures 6A to 6C This is a schematic diagram of an embodiment.

[0026] Figures 7A to 7C This is a schematic diagram of an embodiment.

[0027] Figure 8 This is a schematic diagram of an embodiment.

[0028] Figures 9A to 9C This is a schematic diagram of an embodiment.

[0029] Figure 10 This is a schematic block diagram of a method for analyzing an optical device according to one embodiment.

[0030] Figure 11 This is a schematic block diagram of a method for analyzing an optical device according to one embodiment.

[0031] Figure 12 This is a schematic block diagram of a method for analyzing an optical device according to one embodiment.

[0032] For ease of understanding, the same reference numerals have been used to denote common elements in the figures where possible. Elements and features of one embodiment are intended to be advantageously incorporated into other embodiments without further description. Detailed Implementation

[0033] Embodiments of this disclosure relate to optical devices for augmented, virtual, and / or mixed reality applications. In one or more embodiments, an optical device metrology system is configured to measure a plurality of first parameters and one or more second parameters for the optical device, the one or more second parameters including a display leakage indicator.

[0034] Figure 1AThis is a perspective front view of a substrate 101 according to one embodiment. The substrate includes a plurality of optical devices 100 disposed on a surface 103 of the substrate 101. The optical devices 100 are waveguide combiners for virtual, augmented, and / or mixed reality. The optical devices 100 may be part of the substrate 101 such that the optical devices 100 can be cut to separate them from the substrate 101.

[0035] Figure 1B This is a perspective front view of an optical device 100 according to one embodiment. It should be understood that the optical device 100 described herein is an exemplary optical device, and other optical devices (such as optical devices other than waveguide combiners) may be used with or modified to implement aspects of this disclosure.

[0036] Optical device 100 includes a plurality of optical device structures 102 disposed on a surface 103 of substrate 101. Optical device structures 102 may be nanostructures having submicron dimensions (e.g., nanometer-sized dimensions). Regions of optical device structures 102 correspond to one or more gratings 104, such as a first grating 104a, a second grating 104b, and a third grating 104c. In one embodiment that can be combined with other embodiments, optical device 100 includes at least a first grating 104a corresponding to an input coupling grating and a third grating 104c corresponding to an output coupling grating. In one embodiment that can be combined with other embodiments described herein, optical device 100 also includes a second grating 104b corresponding to an intermediate grating. Optical device structures 102 may be angular or binary. Optical device structures 102 are rectangular. Optical device structures 102 may have other shapes, including but not limited to circular, triangular, elliptical, regular polygonal, irregular polygonal, and / or irregularly shaped cross-sections.

[0037] In operation (e.g., for augmented reality glasses), the input coupling grating 104a receives an incident beam (virtual image) of varying intensity from a microdisplay. The incident beam can be split by the optical structure 102 into T1 beams of all intensities of the incident beam to guide the virtual image to either the intermediate grating 104b (if used) or the output coupling grating 104c. In one embodiment, which can be combined with other embodiments, the T1 beams undergo total internal reflection (TIR) ​​through the optical structure 100 until they contact the optical structure 102 of the intermediate grating 104b. The optical structure 102 of the intermediate grating 104b diffracts the T1 beams into a T-1 beam, which undergoes TIR through the optical structure 100 and reaches the optical structure 102 of the output coupling grating 104c. The optical structure 102 of the output coupling grating 104c couples the T-1 beam output to the user's eye to modulate the field of view of the virtual image generated by the microdisplay from the user's perspective, and further increases the viewing angle of the virtual image that the user can see. In one embodiment that can be combined with other embodiments, the T1 beam undergoes total internal reflection (TIR) ​​through the optical device 100 until the T1 beam comes into contact with the optical structure 102 of the output coupling grating and is output coupled to modulate the field of view of the virtual image generated by the microdisplay.

[0038] To facilitate ensuring that the optical device 100 meets image quality standards, the metrological parameters of the manufactured optical device 100 are obtained before its use.

[0039] Figure 2 This is a schematic diagram of an optical device metrology system 200 according to one embodiment. The embodiment of the optical device metrology system 200 described herein provides the ability to obtain multiple metrological parameters with increased throughput. Metrological parameters include angular uniformity, contrast ratio, efficiency, color uniformity, modulation transfer function (MTF), field of view (FOV), ghosting, eyebox, display leakage, perspective distortion, perspective flare, perspective ghosting, and perspective transmittance. The throughput is increased by utilizing a feed system coupled to each of one or more subsystems of the optical device metrology system 200.

[0040] The optical device measurement system 200 includes a first subsystem 202, a second subsystem 204, and a third subsystem 206. Each of the first subsystem 202, the second subsystem 204, and the third subsystem 206 includes a corresponding body 201A-201C having a first opening 203 and a second opening 205 to allow a stage 207 to move through it along a stage path 211 parallel to and / or in the XY plane. The stage 207 is operable to move within the bodies 201A-201C of the first subsystem 202, the second subsystem 204, and the third subsystem 206 in the X, Y, and Z directions. The stage 207 includes a tray 209, which is operable to hold the optical device 100 (as shown herein) or one or more substrates 101. The stage 207 and tray 209 may be transparent so that the measurement parameters obtained by the first subsystem 202, the second subsystem 204, and the third subsystem 206 are not affected by the translucency of the stage 207 of the tray 209. The first subsystem 202, the second subsystem 204, and the third subsystem 206 communicate with a controller 208, which is operable to control the operation of the first subsystem 202, the second subsystem 204, and the third subsystem 206. The controller 208 includes instructions stored in a non-transitory computer-readable medium (such as memory). When these instructions are executed by a processor of the controller 208, the operations described herein are performed. When these instructions are executed by a processor of the controller 208, one or more operations of methods 1000, 1100, and / or 1200 are performed.

[0041] The instructions for controller 208 include machine learning algorithms and / or artificial intelligence algorithms to optimize operation. In one embodiment, which can be combined with other embodiments, the instructions for controller 208 include a machine learning (ML) model, which is a regression model and averages data (such as metrics determined herein and / or image data collected using alignment module 494). In one example, which can be combined with other examples, the ML model is used to average and combine data to determine optimal spacing and tilt of the projection structure, lens, and camera. In another example, which can be combined with other examples, the ML model is used to average and combine data to determine optimal power applied to the light source and laser source to generate beams and laser beams.

[0042] The first subsystem 202 is operable to obtain one or more metrics, including angular uniformity, contrast ratio, efficiency, color uniformity, MTF, FOV, ghosting, or eyebox metrics. The second subsystem 204 is operable to obtain display leakage metrics. The third subsystem 206 is operable to obtain one or more perspective metrics, including perspective distortion, perspective flare, perspective ghosting, or perspective transmittance.

[0043] The optical device metrology system 200 is configured to determine display leakage parameters, one or more perspective parameters, and one or more other metrological parameters for multiple optical devices (such as waveguide combiners) on a single system using a single stage path 211.

[0044] Figure 3A For the implementation of an scheme Figure 2 A schematic partial cross-sectional view of the first subsystem 202 shown. The first subsystem 202 may include... Figures 4A to 4D One or more of the configurations 400A, 400B, 400C, and 400D shown.

[0045] like Figure 3A As shown, the first subsystem 202 includes an upper portion 304 oriented toward the top side of the optical device 100 and a lower portion 306 oriented toward the bottom side of the optical device 100.

[0046] The first subsystem 202 includes a first body 201A having a first opening 203 and a second opening 205 to allow a stage 207 to move through the first opening 203 and the second opening 205. The stage 207 is configured to move a tray 209 along a stage path 211. The first subsystem 202 includes a first optical engine 310 positioned within the first body 201A and mounted above the stage path 211. The first optical engine 310 is an upper optical engine. The first optical engine 310 is configured to guide a first light beam through the stage path 211. In one embodiment, which can be combined with other embodiments, the first light beam is guided in a light pattern toward the stage path 211 and toward one of the optical devices 100 for determining a metrological index. The first subsystem 202 includes a first detector 312 positioned within the first body 201A and mounted above the stage path 211 to receive a first projected light beam projected upward from the stage path 211. This disclosure contemplates that the projected light may be light reflected from or transmitted through the optical device. The first detector 312 is a reflection detector. The first subsystem 202 includes a second detector 316, which is positioned within the first body 201A and mounted below the stage path 211 to receive a second projected beam projected downward from the stage path 211. The second detector 316 is a transmission detector. The first and second projected beams are projected from the optical device 100. In one embodiment that can be combined with other embodiments, the first optical engine 310 is configured to guide the first beam to the input coupling grating of the optical device 100, and the first detector 312 and the second detector 316 are configured to receive the projected beam projected from the output coupling grating of the optical device 100.

[0047] The upper portion 304 of the first subsystem 202 includes an alignment detector 308. The alignment detector 308 includes a camera. The alignment detector 308 is operable to determine the position of the stage 207 and the optical device 100. The lower portion 306 of the first subsystem 202 includes a code reader 314 mounted below the stage path 211. The code reader 314 is operable to read codes of the optical device 100, such as quick response (QR) codes or barcodes of the optical device 100. The codes read by the code reader 314 may include instructions for obtaining one or more metrological parameters of various optical devices 100.

[0048] Figure 3B For the implementation of an scheme Figure 2 A schematic partial cross-sectional view of the second subsystem 204 shown. The second subsystem 204 may include, for example: Figure 4E At least one of the configurations shown is 400E.

[0049] like Figure 3BAs shown, the second subsystem 204 includes an upper portion 304 oriented toward the top side of the optical device 100 and a lower portion oriented toward the bottom side of the optical device 100.

[0050] The second subsystem 204 includes a second body 201B and a second optical engine 360 ​​positioned within the second body 201B and mounted above the stage path 211. The second optical engine 360 ​​is configured to guide a second beam of light through the stage path 211. The upper portion 304 of the first subsystem 202 includes an alignment detector 308.

[0051] The second subsystem 204 includes a surface illumination detector 318 configured to receive a third projected beam projected upward from the stage path 211. The third projected beam is projected from the optical device 100. The lower portion 306 of the second subsystem 204 includes a code reader 314.

[0052] A surface illumination detector 318 is operable to acquire an image to obtain a display leakage indicator of the optical device 100. In one embodiment, which can be combined with other embodiments, a light pattern is designed to be directed from a second light engine 360 ​​toward the optical device 100, and an image of light outside the user's eye position is acquired and processed to obtain an eye box indicator.

[0053] Figure 3C For the implementation of an scheme Figure 2 The diagram shows a schematic partial cross-sectional view of the third subsystem 206. The third subsystem 206 may include, for example: Figure 4F and Figure 4G One or more of the configurations shown are 400F and / or 400G.

[0054] like Figure 3CAs shown, the third subsystem 206 includes an upper portion 304 oriented toward the top side of the optical device 100 and a lower portion 306 oriented toward the bottom side of the optical device 100. The third subsystem 206 includes a first optical engine 370 mounted above the stage path 211 and configured to guide an upper beam onto the stage path 211; a second optical engine 380 mounted below the stage path 211 and configured to guide a lower beam onto the stage path 211; and a detector 390 mounted above the stage path and configured to receive a projected beam projected from the stage path 211. The upper portion 304 of the third subsystem 206 includes an alignment detector 308. The detector 390 is a reflection detector. The detector 390 detects a projected (e.g., reflected) beam projected from (e.g., reflected) from the top side of the optical device 100 via an output coupling grating. The lower portion 306 of the third subsystem 206 includes a code reader 314. Each of the first light engine 370, the second light engine 380, and the detector 390 is located within the third body 201C of the third subsystem 206.

[0055] Figure 4A For the implementation of an scheme Figure 2 and Figure 3A The diagram shows a configuration 400A of the first subsystem 202. Configuration 400A includes a first optical engine 310, a first detector 312, and a second detector 316.

[0056] The first light engine 310 includes a first illuminator 401, and the first illuminator 401 includes a first light source 402 and a first projection structure 404. The first light engine 310 includes a first lens 406 positioned between the first illuminator 401 and the stage path 211. The first light engine 310 includes one or more devices 413 positioned between the first lens 406 and the stage path 211 (in... Figure 4A (One is shown in the diagram). The one or more devices 413 include one or more of a quarter-wave plate or a linear polarizer. In one embodiment that can be combined with other embodiments described herein, the first optical engine 310 is configured to emit (e.g., project) a beam of light in the red, green, and blue spectra. In one example that can be combined with other examples, the first optical engine 310 is configured to modulate or pulse the beam of light between the red, green, and blue spectra. In one example that can be combined with other examples, the first optical engine 310 includes three light sources, each configured to emit light in the red, green, and blue spectra, respectively.

[0057] The first projection structure 404 includes one or more of a display and / or a reticle. In one embodiment that can be combined with other embodiments, the first projection structure 404 includes one or more of a microdisplay, a spatial light modulator (SLM), and / or a reticle. In one example that can be combined with other examples, the SLM includes one or more of a digital micromirror device (DMD) and / or a liquid crystal on silicon (LCOS) emitter.

[0058] The first detector 312 includes a first camera 412 and a second lens 410 positioned between the first camera 412 and the stage path 211. The second detector 316 includes a second camera 416 and a third lens 414 positioned between the second camera 416 and the stage path 211. Figure 4A In the embodiment shown, the first projection structure 404 and the first lens 406 are oriented parallel to the stage path 211.

[0059] Optical device 100 is positioned such that its input coupler 121 is aligned with a first optical engine 310, and its output coupler 122 is aligned with a first detector 312 and a second detector 316. A first beam B1 is guided from the first optical engine 310 toward the input coupler 121 of optical device 100. The first detector 312 acquires multiple first images of the first projected beam BP1 projected from the output coupler 122 in the red, green, and blue spectra. The second detector 316 acquires multiple second images of the second projected beam BP2 projected from the output coupler 122 in the red, green, and blue spectra.

[0060] The first and second images are full-field images. One or more of the first and / or second images are processed (e.g., by using controller 208) to determine a plurality of first indicators of the optical device 100.

[0061] Multiple first metrics include an angular uniformity metric. An angular uniformity metric can represent the ratio of light intensity in different parts of the light field. For the angular uniformity metric, processing one or more of multiple first images or multiple second images includes comparing one or more first portions of the light pattern design with one or more second portions of the light pattern design within a single image. For the angular uniformity metric, the first beam B1 input coupled to the input coupler 121 undergoes TIR until the input-coupled first beam B1 output couples (e.g., projected, such as reflected) to the first detector 312.

[0062] Multiple first metrics include a contrast metric. A contrast metric can represent the contrast between the brightest light captured within an image and the darkest light captured within an image. For the contrast metric, processing one or more of multiple first images or multiple second images includes comparing one or more bright portions of a light pattern design with one or more dark portions of a light pattern design within a single image. For the contrast metric, the first beam B1 input coupled to the input coupler 121 undergoes TIR until the input-coupled first beam B1 output couples (e.g., projects, such as reflects) to the first detector 312.

[0063] Multiple primary metrics include a color uniformity metric. A color uniformity metric can represent one or more ratios between red, green, and blue light in the field. Multiple primary images, multiple secondary images, and / or multiple tertiary images (hereinafter referred to as...) Figure 4E One or more of the first images or one or more of the second images are acquired to obtain red, green, and blue spectra. For color uniformity metrics, processing one or more of the multiple first images or multiple second images includes comparing the red spectral image with the green and blue spectral images using the same field region. For color uniformity metrics, the first beam B1 input coupled to the input coupler 121 undergoes TIR until the first beam B1 output coupled (e.g., projected, such as reflected) to the first detector 312.

[0064] Several first metrics include an efficiency metric. For the efficiency metric, the second detector 316 is positioned at the calibration location (for...) before acquiring multiple first images and multiple second images. Figure 4A The second detector 316 (shown in ghosting mode) is aligned with the input coupler 121 of the optical device 100. When the second detector 316 is in the calibration position, the first optical engine 310 directs a calibration beam to the input coupler 121 of the optical device 100, and the second detector 316 acquires one or more calibration images of the calibration projection beam CP1 projected from the input coupler 121 of the optical device 100. These one or more calibration images are full-field images. The second detector 316 is then positioned to be aligned with the output coupler 122 of the optical device 100. For efficiency purposes, the first beam B1 input coupled to the input coupler 121 undergoes TIR until the input-coupled first beam B1 output couples (e.g., projected, such as reflected) to the first detector 312 and output couples (e.g., projected, such as transmitted) to the second detector 316. The first image is a reflected image, and the second image is a transmitted image.

[0065] For efficiency metrics, processing one or more of a plurality of first images or a plurality of second images includes comparing one or more calibration images with a plurality of first images and a plurality of second images.

[0066] One or more first metrics include a modulation transfer function (MTF) metric. For the MTF metric, before acquiring multiple first images and multiple second images, a calibration beam is guided from the first optical engine 301 toward the second detector 316. While the second detector 316 is misaligned with the optical device 100, the second detector 316 acquires one or more calibration images of the calibration beam. The second detector 316 may be located in... Figure 4A The optical device 100 is positioned at the calibration location shown in the image and aligned with the first optical engine 310, while the optical device 100 can be positioned away from the second detector 316 to be within the field of view of the second detector 316 and the first optical engine 310 (e.g., ...). Figure 4A (See image for optical device 100 in the image). The second detector 316 may then be positioned to align with the first detector 312. In one embodiment that can be combined with other embodiments, the second image is acquired before the first image is acquired. For MTF metrics, the first beam B1 input coupled to the input coupler 121 undergoes TIR until the first beam B1 output is coupled (e.g., projected, such as reflected or transmitted) to either the first detector 312 or the second detector 316.

[0067] For the MTF metric, processing one or more of a plurality of first images or a plurality of second images includes comparing the outer edges of one or more portions of one or more calibration images with the same outer edges of one or more portions of the same plurality of first images or a plurality of second images.

[0068] The multiple first indicators include an eyebox indicator. For the eyebox indicator, during the acquisition of multiple first images or multiple second images, the first detector 312 or the second detector 316 is moved to scan multiple locations along the output coupler 122 of the optical device 100. Processing one or more of the multiple first images or multiple second images includes comparing different images corresponding to different field regions of the output coupler 122. For the eyebox indicator, the first beam B1 input coupled to the input coupler 121 undergoes TIR until the input-coupled first beam B1 output coupled (e.g., projected, such as reflected or transmitted) to the first detector 312 or the second detector 316.

[0069] Multiple first indicators include a ghosting indicator. For the ghosting indicator, before acquiring multiple first images and multiple second images, a calibration beam is guided from the first optical engine 310 toward the second detector 316. While the second detector 316 is misaligned with the optical device 100, the second detector 316 acquires one or more calibration images of the calibration beam. The second detector 316 may be located in... Figure 4A The calibration position is shown in the image and aligned with the first optical engine 310, while the optical device 100 can be positioned away from the second detector 316 to be within the field of view of the second detector 316 and the first optical engine 310 (e.g., ...). Figure 4A (The image is shown in a ghost image relative to the optical device 100). The second detector 316 may then be positioned to align with the first detector 312. In one embodiment that can be combined with other embodiments, the second image is acquired before the first image is acquired.

[0070] For ghosting indices, processing one or more of a plurality of first images or a plurality of second images includes comparing one or more calibration images with one or more of the plurality of first images or a plurality of second images to determine an offset between the one or more calibration images and one or more of the plurality of first images or a plurality of second images. In one embodiment that can be combined with other embodiments, the offset is an offset between the light pattern design (such as a photomask) of one or more calibration images and the light pattern design (such as a photomask) in the first or second image.

[0071] Figure 4B For the implementation of an scheme Figure 2 and Figure 3A A schematic diagram of configuration 400B of the first subsystem 202 shown. Configuration 400B includes a first light engine 310, a first detector 312, and a second detector 316. The first light engine 310 includes a first light source 402, a first projection structure 404, and a first lens 406. The first light engine 310 in configuration 400B includes one or more two-dimensional Galvano mirrors 408 (such as an array of two-dimensional electron mirrors) configured to cause a first beam emitted by the first projection structure 404 to bend 90 degrees toward the stage path 211. Figure 4B In the embodiment shown, the first projection structure 404 and the first lens 406 are oriented perpendicular to the stage path 211.

[0072] The first detector 312 includes a second lens 410 and a first camera 412. The second detector 316 includes a third lens 414 and a second camera 416. The first optical engine 310 uses one or more two-dimensional electron microscopes 408 to direct the first light beam B1 along a 90-degree bend toward the stage path 211 and toward the input coupler 121 of the optical device 100.

[0073] exist Figure 4B In the illustrated embodiment, a first lens 406 is positioned between the first illuminator 401 and the stage path 211 along an optical path from the first illuminator to the stage path 211. One or more two-dimensional electron microscopes 408 are positioned between the first lens 406 and the stage path 211 along this optical path. The optical path includes 90-degree bends.

[0074] Figure 4C For the implementation of an scheme Figure 2 and Figure 3A The diagram shows a configuration 400C of the first subsystem. Configuration 400C is similar to... Figure 4A The configuration 400A shown includes one or more of its aspects, features, components and / or properties.

[0075] Configuration 400C includes an alignment module 494. The alignment module 494 is shown in relation to the first optical engine 310 for aligning the first projection structure 404 and the first lens 406. The alignment module 494 includes a laser source 495, a beam splitter 496, and an alignment detector 497. The alignment module 494 includes a pinhole 498 formed in a plate 499. The alignment detector 497 may include a camera. The alignment module 494 may also be used in addition to the alignment detector 308.

[0076] Alignment module 494 is used to perform alignment operations. During alignment, the first light source 402, the first projection structure 404, and the first lens 406 are moved so that they are no longer aligned with the input coupler 121 of the optical device 100. Alignment module 494 uses laser source 495 to guide the first laser L1 toward the optical device 100 via pinhole 498. Alignment detector 497 is used to determine the light intensity of the first reflected laser RL1. The first reflected laser RL1 is the first laser L1 reflected away from the optical device 100. Beam splitter 496 is used to guide the first reflected laser RL1 toward alignment detector 497. The tilt and spacing of laser source 495 are adjusted to increase the light intensity. The first position of the first reflected laser RL1 received by alignment detector 497 is determined under the increased light intensity. The first position is the position of the first reflected laser RL1 within the image of the first reflected laser RL1 acquired by alignment detector 497.

[0077] During the alignment operation, the first lens 406 is moved to align with the input coupler 121 of the optical device 100 (e.g., ...). Figure 4C (As shown in the image with double image), and the second laser is guided through the pinhole 498 and toward the first lens 406. The tilt and spacing of the first lens 406 are adjusted until the second position of the second reflected laser received by the alignment detector matches the first position of the first reflected laser RL1. The second reflected laser is the second laser that reflects off the first lens 406 and returns toward the beam splitter 496.

[0078] During the alignment operation, the first projection structure 404 is moved to align with the input coupler 121 of the optical device 100 (e.g., Figure 4C (As shown in the image with double image), and the third laser is guided through the pinhole 498 and toward the first projection structure 404. The tilt and spacing of the first projection structure 404 are adjusted until the third position of the third reflected laser received by the alignment detector matches the first position of the first reflected laser RL1. The third reflected laser is the third laser that reflects off the first projection structure 404 and returns toward the beam splitter 496.

[0079] The alignment module 494 can then be moved to no longer be aligned with the input coupler 121 of the optical device 100, and the first light source 402 can be moved to be aligned with the input coupler 121 of the optical device 100. The alignment module 494 and the alignment operation can be used to align lenses, projection structures, and cameras to facilitate accurate operation, such as accurately determining the specifications of the optical device 100. The operations described for the alignment operation can be combined with the methods 1000, 1100, and 1200 described below.

[0080] Figure 4D For the implementation of an scheme Figure 2 and Figure 3A A schematic diagram of configuration 400D of the first subsystem 202 shown. Configuration 400D includes a first light engine 310, a first detector 312, and a second detector 316. The first light engine 310 includes a first light source 402, a first projection structure 404, a first lens 406a positioned between a first illuminator 401 and a stage path 211, and a lens 406b positioned between the first lens 406a and the stage path 211. The first light engine 310 includes an adjustable aperture 407 positioned between lens 406b and the first lens 406a. The adjustable aperture 407 may be formed in a plate 415. The adjustable aperture 407 can be adjusted by moving the adjustable aperture 407 up and down (e.g., by moving the plate 415) and / or by opening and closing the adjustable aperture 407.

[0081] The first light engine 310 may include Figure 4AOne or more devices 413 are shown positioned between lens 406b and stage path 211. First detector 312 includes second lens 410 and first camera 412. Second detector 316 includes third lens 414 and second camera 416. In one embodiment that can be combined with other embodiments, each of the first lens 406, first lens 406a, lens 406b, second lens 410, and / or third lens 414 is formed of the same convex lens structure having the same radius of curvature. Each of the first lens 406, first lens 406a, lens 406b, second lens 410, and / or third lens 414 has the same lens structure. Using the same lens structure for the lens facilitates compensation for optical aberrations, such as aberrations in the reflection and / or transmission of light.

[0082] Figure 4E For the implementation of an scheme Figure 2 and Figure 3B The diagram shows a configuration 400E of the second subsystem 204. Configuration 400E includes a second light engine 360 ​​and a surface illumination detector 318. The second light engine 360 ​​includes a second illuminator 461 and a fourth lens 466 positioned between the second illuminator 461 and the stage path 211. The second illuminator 461 includes a second light source 462 and a second projection structure 464. The second projection structure 464 and the fourth lens 466 are oriented parallel to the stage path 211.

[0083] The second projection structure 464 includes one or more of a display and / or a photomask. In one embodiment that can be combined with other embodiments, the second projection structure 464 includes one or more of a microdisplay, a spatial light modulator (SLM), and / or a photomask. In one example that can be combined with other examples, the SLM includes one or more of a digital micromirror device (DMD) and / or a liquid crystal on silicon (LCOS) emitter.

[0084] The surface illumination detector 318 includes a third camera 426, a fifth lens 424 positioned between the third camera 426 and the stage path 211, and an eyebox blocker 420 positioned between the fifth lens 424 and the stage path 211.

[0085] Optical device 100 is positioned such that input coupler 121 is aligned with second optical engine 360 ​​and output coupler 122 is aligned with surface illumination detector 318. Second beam B2 is guided from second optical engine 360 ​​toward input coupler 121 of optical device 100. Surface illumination detector 318 acquires multiple third images (excluding those related to the third projected beam BP3 projected from output coupler 122 of optical device 100) of the third projected beam BP3. Figure 4A (Besides the first and second images mentioned).

[0086] Multiple third images include a third projected beam BP3 projected from the output coupler 122 of the optical device 100 and passing through the eyebox blocker 422 of the surface illumination detector 318. Multiple third images are processed (e.g., by using the controller 208) to determine one or more second indicators of the optical device. These one or more second indicators include a display leakage indicator.

[0087] Figure 4F For the implementation of an scheme Figure 2 and Figure 3C The diagram shows a configuration 400F of the third subsystem 206. The third subsystem 206 includes a first optical engine 310 mounted above the stage path 211 and configured to guide an upper beam into the stage path 211, and a second optical engine 322 mounted below the stage path 211 and configured to guide a lower beam into the stage path 211.

[0088] Configuration 400F includes a detector 320 mounted above stage path 211 and configured to receive projected light beams projected from stage path 211. These projected light beams are projected from optical device 100. First light engine 310 includes a first illuminator 401 and a first lens 406. Detector 320 includes a second lens 410 and a first camera 412. Second light engine 322 includes a device and a third lens.

[0089] The second light engine 322 includes a second illuminator 471 and a second lens 476 positioned between the second illuminator 471 and the stage path 211. The second illuminator 471 includes a second light source 472 and a second projection structure 474. The second projection structure 474 is a display or a light mask. In one embodiment that can be combined with other embodiments, the transmittance index of the optical device 100 is obtained by using a configuration 400F and illuminating the output coupling grating of the optical device 100 with the lower beam emitted by the second light engine 322.

[0090] like Figure 4F As shown, the input coupler 121 of the optical device 100 is aligned with the first optical engine 310, and the output coupler 122 is aligned with the second optical engine 322. The detector 320 is aligned with the second optical engine 322 (e.g., vertically) and misaligned with the first optical engine 310. The second optical engine 322 directs the first beam LB1 to the output coupler 122. The upper beam LB2 can be directed from the first optical engine 310 to the input coupler 121 of the optical device 100. Using the detector 320, multiple first images of the first beam LB1, which is the first projected beam PB1, transmitted through and projected from the output coupler 122 are acquired. The optical device 100 is positioned away from the second optical engine 322 such that the optical device 100 is misaligned with the second optical engine 322 (e.g., ...). Figure 4F The optical device 100 is shown in ghosting mode, and is positioned outside the field of view of the second optical engine 322 and detector 320. A second beam is guided from the second optical engine 322 and directed to the detector 320. The detector acquires multiple second images of the second beam projected from the waveguide combiner as a second projection beam. The first and second images are full-field images. The first and second beams are emitted from the optical engine (e.g., sequentially) in red, green, and blue spectra, respectively. The multiple first images and multiple second images acquire the first and second beams in the red, green, and blue spectra, respectively. In one embodiment that can be combined with other embodiments, the second image is acquired before the first image.

[0091] The second image is compared with the first image (e.g., by using controller 208) to determine the transmittance index of the optical device 100. In one embodiment, which can be combined with other embodiments, the comparison includes comparing the second light intensity of a plurality of second images with the first light intensity of a plurality of first images.

[0092] Figure 4G For the implementation of an scheme Figure 2 and Figure 3C A schematic diagram of configuration 400G of the third subsystem 206 shown. Configuration 400G includes detector 320 and first optical engine 310. Configuration 400G includes a patterned substrate 490 positioned below stage path 211. Patterned substrate 490 includes a patterned design formed thereon. Each of the first optical engine 310, patterned substrate 490, and detector 320 is positioned within the third body 201C of the third subsystem 206. In one embodiment that can be combined with other embodiments, patterned substrate 490 includes a plurality of protrusions 493 and / or a plurality of recesses 489 forming the patterned design. Figure 4G One or more of them (as shown in the double image).

[0093] exist Figure 4G At the alignment position shown, the patterned substrate 490 is at least partially aligned below the detector 320, and the patterned substrate 490 is at least partially misaligned with the first optical engine 310. The optical device 100 is positioned below the detector 320 to align the optical device 100 with the detector 320, and the optical device 100 is positioned above the patterned substrate 490 and at a distance D1 from the patterned substrate 490.

[0094] Patterned substrate 490 directs lower beam 491 to optical device 100. Lower beam 491 is reflected off the upper surface of patterned substrate 490 and toward optical device 100. Lower beam 491 is transmitted through optical device 100 and captured by detector 322. In one embodiment that can be combined with other embodiments, patterned substrate 490 reflects ambient light as lower beam 491. In one embodiment that can be combined with other embodiments, patterned substrate 490 reflects light from a light engine (such as a second light engine 322). In one embodiment that can be combined with other embodiments, configuration 400G includes a second light engine 322 configured to direct beams to patterned substrate 490, and patterned substrate 490 reflects beams from the second light engine 322 as lower beam 491. First light engine 310 includes a first light source 402, a first projection structure 404, and a first lens 406. Detector 320 includes a second lens 410 and a first camera 412.

[0095] The patterned substrate 490 is partially aligned with and partially misaligned with the detector 320 (e.g., Figure 4G Simultaneously (as shown), detector 320 acquires multiple first images of the projected beam 492 projected from the output coupler 122 of optical device 100. The multiple first images acquire the red, green, and blue spectra of the projected beam 492. The multiple first images are processed (e.g., via controller 208) to determine one or more perspective parameters of optical device 100.

[0096] The one or more perspective indicators include perspective flash indicators. For the perspective flash indicator, the optical device 100 is positioned below the first optical engine 310 such that the input coupler 121 of the optical device 100 is aligned with the first optical engine 310. A first beam LB3 is guided from the first optical engine 310 toward the input coupler 121 of the optical device 100. In this embodiment, the projected beam 492 includes the first beam LB3 from the first optical engine 310 and a lower beam 491 reflected from the patterned substrate 490. The first beam LB3 is emitted from the first optical engine 310 with a light pattern design different from the pattern design of the patterned substrate 490.

[0097] One or more perspective parameters include one or more of a perspective distortion parameter and / or a perspective transmittance parameter. For the perspective distortion parameter and / or perspective transmittance parameter, the projected beam 492 includes a beam 491 reflected from the patterned substrate 490. The optical device 100 is positioned away from the detector 320 such that the optical device 100 is misaligned with the detector 320 and the patterned substrate 490 (e.g., Figure 4GThe optical device 100 is shown in ghosting mode, and is positioned outside the field of view of the patterned substrate 490 and the detector 320. The detector 320 acquires multiple second images of the reflected beams reflected from the patterned substrate 490 and directed toward the detector 320. The multiple second images acquire the reflected beams in the red, green, and blue spectra. Processing the multiple first images includes comparing the multiple second images with the multiple first images to determine a perspective distortion index and / or a perspective transmittance index. In one embodiment, which can be combined with other embodiments, the second images are acquired before the first images are acquired.

[0098] The one or more perspective indicators include a perspective ghosting indicator. For the perspective ghosting indicator, the optical device 100 is positioned away from the detector 320 to misalign the optical device 100 with the detector 320 and the patterned substrate 490. The detector 320 uses the detector 320 to acquire multiple second images of the reflected beam reflected from the patterned substrate 490. The multiple second images acquire the reflected beam in the red, green, and blue spectra. Processing the multiple first images includes determining an offset between the multiple second images and the multiple first images. In one embodiment that can be combined with other embodiments, the offset is an offset between a pattern design (such as a photomask) in the first image and a pattern design (such as a photomask) in the second image.

[0099] Figure 5 This is a schematic diagram of image 500 according to one embodiment. Image 500 includes a light pattern design (such as a light mask) having dark portions 501 and bright portions 502. Image 500 can be used to determine contrast metrics and / or angular uniformity metrics.

[0100] For the angular uniformity index, the process includes comparing one or more first portions 502a of the light pattern design with one or more second portions 502b, 502c of the light pattern design within the image 500. The first portions 502a and the second portions 502b, 502c correspond to the bright portion 502. The process also includes comparing the light intensity of one or more first portions 502a with the light intensity of one or more second portions 502b, 502c. The portions 502a, 502b, 502c are positioned at different radii relative to the center of the image 500.

[0101] For the contrast ratio, the process involves comparing the light intensity of one or more bright portions 502a of the light pattern design with the light intensity of one or more dark portions 501a of the light pattern design within the image 500. The bright portions 502a have a light intensity l1, and the dark portions 501a have a light intensity l2. The contrast ratio can be determined and represented as "C" by the following Equation 1:

[0102]

[0103] Figures 6A to 6C These are schematic diagrams of images 610, 620, and 630 according to one implementation scheme. Figure 6A Image 610 in red is shown. Figure 6B The image shows a green image 620, and Figure 6C A blue image 630 is shown. Images 610, 620, and 630 are used to determine a color uniformity index. The process involves comparing images 610, 620, and 630 using the same field region in each corresponding image 610, 620, and 630. This same field region includes one or more bright portions 602a–602c, 603a–603c at the same location in each image 610, 620, and 630. The color uniformity index can represent the ratio of light intensity of one or more bright portions 602a–602c, 603a–603c in each image 610, 620, and 630.

[0104] Figures 7A to 7C Schematic diagrams of images 710, 720, and 730 according to one embodiment. Figure 7A The calibration image 710 is shown. Figure 7B The first image is shown (e.g., a reflected image), and Figure 7C A second image (e.g., a transmission image) is shown. Images 710, 720, and 730 can be used to determine efficiency metrics.

[0105] The process includes comparing the calibration image 710 with the first image 720 and the second image 730 using the same field region in each of the corresponding images 710, 720, and 730. This same field region includes one or more bright portions 702a-702c at the same location in each image 710, 720, and 730. The process includes comparing the light intensity of one or more bright portions 702a-702c in the images 710, 720, and 730. The calibration image 710 includes the light intensity lC1 of the bright portion 702a, the first image 720 includes the light intensity lR1 of the bright portion 702b, and the second image 730 includes the light intensity lT1 of the bright portion 702c.

[0106] The efficiency index can be determined by the following equation 2 and expressed as "E":

[0107]

[0108] Figure 8This is a schematic diagram of image 800 according to one embodiment. Image 800 includes a light pattern design (such as a light mask) having dark and bright portions. Image 800 can be used to determine MTF metrics. The process includes comparing edge regions 832 of one or more calibration images with the same edge regions (e.g., the same locations within the images) of the same one or more portions of one or more of a plurality of first images or a plurality of second images. Edge regions 832 at least partially cover the outer edge 831 of one or more portions (such as bright portions).

[0109] Figures 9A to 9C These are schematic diagrams of images 910, 920, and 930 according to one embodiment. Each of images 910, 920, and 930 illustrates a light pattern design that can be used for light guided by a first light engine 310, a first light engine 370, a second light engine 360, a first light engine 370, a second light engine 380, a second light engine 322, and / or a patterned substrate 490. Each of images 910, 920, and 930 can be used to determine ghosting indicators and / or other indicators (such as other first indicators). Each of images 910, 920, and 930 includes a plurality of dark regions 901a-901c and a plurality of bright regions 902a-902c, respectively.

[0110] Figure 10 A schematic block diagram of a method 1000 for analyzing an optical device according to one embodiment.

[0111] Operation 1002 of method 1000 includes positioning the optical device within a first subsystem to align the optical device with a first detector and a second detector of the first subsystem.

[0112] Operation 1004 includes guiding a first light beam from a first light engine of the first subsystem toward an optical device. In one embodiment, which can be combined with other embodiments, the guiding includes turning the first light beam along a 90-degree bend toward the stage path.

[0113] Operation 1006 includes acquiring multiple first images of a first projected beam projected from an optical device using a first detector of a first subsystem.

[0114] Operation 1008 includes acquiring multiple second images of a second projected beam projected from an optical device using a second detector of the first subsystem.

[0115] Operation 1010 includes processing one or more of a plurality of first images or a plurality of second images to determine a plurality of first metrics of the optical device. The first metrics include angular uniformity metrics, contrast metrics, efficiency metrics, color uniformity metrics, modulation transfer function (MTF) metrics, field of view (FOV) metrics, ghosting metrics, and / or eyebox metrics.

[0116] Operation 1012 includes positioning the optical device within the second subsystem to align the optical device with the surface illumination detector of the second subsystem.

[0117] Operation 1014 includes guiding a second beam from the second light engine of the second subsystem toward the optical device.

[0118] Operation 1016 includes acquiring multiple third images of a third projected beam projected from an optical device using a surface illumination detector of the second subsystem.

[0119] Operation 1018 includes processing multiple third images to determine one or more second indicators of the optical device. The one or more second indicators include indicators showing leakage.

[0120] Figure 11 A schematic block diagram of a method 1100 for analyzing an optical device according to one embodiment.

[0121] Operation 1102 of method 1100 includes positioning the optical device above the light engine to align the optical device with the light engine.

[0122] Operation 1104 includes guiding a first beam of light from the light engine toward the optical device.

[0123] Operation 1106 includes using a detector to acquire multiple first images of a first beam projected from an optical device as a first projected beam.

[0124] Operation 1108 includes positioning the optical device away from the light engine to misalign the optical device with the light engine.

[0125] Operation 1110 includes guiding a second beam from the light engine toward the detector.

[0126] Operation 1112 includes acquiring multiple second images of the second beam.

[0127] Operation 1114 includes comparing multiple second images with multiple first images to determine the transmittance index of the optical device.

[0128] Figure 12 A schematic block diagram of a method 1200 for analyzing an optical device according to one embodiment.

[0129] Operation 1202 of method 1200 includes positioning the optical device below the detector to align the optical device with the detector.

[0130] Operation 1204 includes positioning the optical device above and at a distance from the patterned substrate. The patterned substrate includes a pattern design formed thereon.

[0131] Operation 1206 includes using the detector to acquire multiple first images of a projected beam projected from an optical device while the patterned substrate is at least partially aligned with the detector.

[0132] Operation 1208 includes processing multiple first images to determine one or more perspective parameters of the optical device. The one or more perspective parameters include one or more of a perspective transmittance parameter, a perspective distortion parameter, a perspective flare parameter, and / or a perspective ghosting parameter.

[0133] The benefits of this disclosure include using a single optical device metrology system 200 to determine multiple metrological parameters (such as display leakage parameters, one or more perspective parameters, and one or more other metrological parameters) for multiple optical devices (such as waveguide combiners) on a single system using a single stage path 211. In one embodiment that can be combined with other embodiments, the single system using a single stage path 211 can be used to determine display leakage parameters, angular uniformity parameters, contrast parameters, efficiency parameters, color uniformity parameters, modulation transfer function (MTF) parameters, field of view (FOV) parameters, ghosting parameters, eyebox parameters, perspective distortion parameters, perspective flare parameters, perspective ghosting parameters, and perspective transmittance parameters. Benefits also include increased throughput, reduced latency and cost, and enhanced efficiency. The throughput is increased by utilizing a feed system coupled to each subsystem of the optical device metrology system.

[0134] It is anticipated that one or more aspects disclosed herein may be combined. As an example, one or more aspects, features, components, and / or properties of optical device metrology system 200, first subsystem 202, second subsystem 204, third subsystem 206, configurations 400A, 400B, 400C, 400D, 400E, 400F, 400G, image 500, images 610-630, images 710-730, image 800, images 910-930, method 1000, method 1100, and / or method 1200 may be combined. As an example, one or more of the operations described with respect to optical device metrology system 200, subsystems 202, 204, 206, and / or configurations 400A-400G may be combined with one or more of the operations described with respect to method 1000, method 1100, and / or method 1200. Furthermore, it is anticipated that one or more aspects disclosed herein may include some or all of the aforementioned benefits.

[0135] While the foregoing has described embodiments of the present disclosure, other and additional embodiments of the present disclosure may be devised without departing from the basic scope of the present disclosure, the scope of which is defined by the appended claims.

Claims

1. An optical device measurement system, comprising: A platform, the platform being configured to move a tray along a platform path; The first subsystem includes: A first body having a first opening and a second opening to allow the stage to move through the first opening and the second opening. A first optical engine, positioned within the first body and mounted above the stage path, is configured to guide a first light beam through the stage path. The first optical engine includes: The first illuminator includes a first light source and a first projection structure. A first lens, positioned along an optical path between the first illuminator and the stage path, and One or more two-dimensional electron microscopes, the one or more two-dimensional electron microscopes being configured to redirect the first beam along a 90-degree bend in the path of the stage, and A first detector, positioned within the first body and mounted above the stage path, receives a first projected beam projected upwards from the stage path. A second detector, positioned within the first body and mounted below the stage path, receives a second projected beam projected downwards from the stage path; and The second subsystem includes: A second body having a first opening and a second opening to allow the stage to move through the first opening and the second opening of the second body. A second light engine, positioned within the second body and mounted above the stage path, is configured to guide a second light beam through the stage path. A surface illumination detector, configured to receive a third projected beam projected upward from the path of the stage; and A controller, which communicates with the stage, the first subsystem, and the second subsystem, includes instructions that, when executed, cause: The stage positions the optical device within the first subsystem so that the output coupler of the optical device is aligned with the first detector and the second detector of the first subsystem; The first optical engine directs a first light beam toward the input coupler of the optical device, the directing including turning the first light beam 90 degrees toward the stage path; The first detector acquires multiple first images of a first projected beam projected from the output coupler of the optical device, the first projected beam being a beam coupled from the input coupler to the input coupler and then output from the output coupler after undergoing total internal reflection in the optical device; The second detector acquires multiple second images of the second projected beam projected from the output coupler of the optical device; Process one or more of the plurality of first images or the plurality of second images to determine a plurality of first indicators of the optical device; The stage positions the optical device within the second subsystem so that the output coupler of the optical device is aligned with the surface illumination detector of the second subsystem; The second optical engine directs the second beam of light to the input coupler of the optical device; The surface illumination detector acquires multiple third images of the third projected beam projected from the output coupler of the optical device; The plurality of third images are processed to determine one or more second indicators of the optical device, the one or more second indicators including a leakage indicator.

2. The optical device measurement system according to claim 1, wherein one or more of the plurality of first images, the plurality of second images, or the plurality of third images acquire red, green, and blue spectra.

3. An optical device measurement system, comprising: A platform, the platform being configured to move a tray along a platform path; The first subsystem includes: A first body having a first opening and a second opening to allow the stage to move through the first opening and the second opening. A first optical engine, positioned within the first body and mounted above the stage path, is configured to guide a first light beam to the input coupler of an optical device positioned on the stage path. The first optical engine includes: The first illuminator includes a first light source and a first projection structure. A first lens is positioned along an optical path between the first illuminator and the stage path. One or more two-dimensional electron microscopes, the one or more two-dimensional electron microscopes being configured to redirect the first beam along a 90-degree bend in the path of the stage, and A first detector, positioned within the first body and mounted above the stage path, receives a first projected beam projected upward from the output coupler of the optical device positioned on the stage path. The first projected beam is a beam coupled from the input coupler to the input coupler, undergoing total internal reflection within the optical device, and then output from the output coupler. A second detector, positioned within the first body and mounted below the stage path, receives a second projected beam projected downwards from the output coupler of the optical device positioned on the stage path; and The second subsystem includes: A second body having a first opening and a second opening to allow the stage to move through the first opening and the second opening of the second body. A second optical engine, positioned within the second body and mounted above the stage path, is configured to guide a second beam of light to the input coupler of the optical device positioned on the stage path. A surface illumination detector is configured to receive a third projected beam projected upward from the output coupler of the optical device positioned on the stage path.

4. The optical device measurement system according to claim 3, wherein the first projection structure and the first lens of the first subsystem are oriented perpendicular to the stage path, and the first optical engine further includes an alignment module, the alignment module including a laser source, a beam splitter, a pinhole, and an alignment detector.

5. The optical device measurement system according to claim 4, wherein the first detector includes a first camera and a second lens positioned between the first camera and the stage path, and the second detector includes a second camera and a third lens positioned between the second camera and the stage path.

6. The optical device measurement system according to claim 5, wherein the second optical engine of the second subsystem includes a second illuminator and a fourth lens positioned between the second illuminator and the stage path, the second illuminator including a second light source and a second projection structure.

7. The optical device measurement system of claim 6, wherein the second projection structure and the fourth lens are oriented parallel to the stage path.

8. The optical device metrology system of claim 7, wherein the surface illumination detector of the second subsystem comprises: Third camera; The fifth lens is positioned between the third camera and the path of the stage; as well as An eyebox blocker is positioned between the fifth lens and the stage path.

9. The optical device measurement system of claim 8, further comprising a controller communicating with the first subsystem and the second subsystem, the controller including instructions that, when executed: The first subsystem is used to determine one or more first parameters of the optical device, said one or more first parameters including one or more of angular uniformity, contrast ratio, efficiency, color uniformity, modulation transfer function (MTF), field of view (FOV), ghosting, or eyebox parameters; and The second subsystem is used to determine one or more second indicators of the optical device, the one or more second indicators including an indicator of leakage.

10. A method for analyzing an optical device, comprising the following steps: The optical device is positioned within the first subsystem such that the output coupler of the optical device is aligned with the first and second detectors of the first subsystem. A first light beam is guided from the first light engine of the first subsystem toward the input coupler of the optical device, the guiding comprising turning the first light beam along a 90-degree bend toward the stage path; The first detector of the first subsystem acquires multiple first images of a first projected beam projected from the output coupler of the optical device, the first projected beam being a beam coupled from the input coupler to the input coupler and then output from the output coupler after undergoing total internal reflection in the optical device; Multiple second images of the second projected beam projected from the output coupler of the optical device are acquired using the second detector of the first subsystem; Process one or more of the plurality of first images or the plurality of second images to determine a plurality of first indicators of the optical device; The optical device is positioned within the second subsystem such that the output coupler of the optical device is aligned with the surface illumination detector of the second subsystem; The second light beam is guided from the second light engine of the second subsystem toward the input coupler of the optical device; Multiple third images of the third projected beam projected from the output coupler of the optical device are acquired using the surface illumination detector of the second subsystem; The plurality of third images are processed to determine one or more second indicators of the optical device, the one or more second indicators including a leakage indicator.

11. The method of claim 10, further comprising the following steps: An alignment operation is performed on the first optical engine, the alignment operation including: A laser source is used to guide the first laser beam through the pinhole and toward the optical device; The intensity of the first reflected laser light was determined using an alignment detector. Adjust the tilt and spacing of the laser source to increase the light intensity to the increased light intensity; Under the increased light intensity, the first position of the first reflected laser received by the alignment detector is determined; The second laser is guided through the pinhole and toward the first lens of the first optical engine; Adjust the tilt and spacing of the first lens until the second position of the second reflected laser received by the alignment detector matches the first position; The third laser is guided through the pinhole and toward the first projection structure of the first optical engine; and Adjust the tilt and spacing of the first projection structure until the third position of the third reflected laser received by the alignment detector matches the first position.

12. The method of claim 10, wherein the plurality of first images are acquired while the first detector is aligned with the output coupler of the optical device, and the plurality of second images are acquired while the second detector is aligned with the output coupler of the optical device.

13. The method of claim 10, wherein the plurality of first indicators includes an angular uniformity indicator, and the step of processing one or more of the plurality of first images or the plurality of second images includes the following steps: Compare one or more first portions of the light pattern design with one or more second portions of the light pattern design within a single image.

14. The method of claim 10, wherein the plurality of first indicators includes a contrast indicator, and the step of processing one or more of the plurality of first images or the plurality of second images includes the following steps: Compare one or more bright portions of a light pattern design with one or more dark portions of the light pattern design within a single image.

15. The method of claim 10, wherein: The plurality of first indicators include a color uniformity indicator; One or more of the plurality of first images, the plurality of second images, or the plurality of third images acquire red, green, and blue spectra; as well as The steps of processing one or more of the plurality of first images or the plurality of second images include the following steps: The red spectral image was compared with the green and blue spectral images using the same field region.

16. The method of claim 10, wherein the plurality of first indicators includes efficiency indicators, and the method further includes the following steps: Before the steps of acquiring the plurality of first images and acquiring the plurality of second images: Position the second detector to align it with the input coupler of the optical device; The calibration beam is guided from the first optical engine of the first subsystem toward the optical device; The second detector is used to acquire one or more calibration images of the calibration projected beam projected from the input coupler of the optical device; as well as Position the second detector to align it with the output coupler of the optical device.

17. The method of claim 10, wherein the one or more first metrics include a modulation transfer function (MTF) metric, and the method further comprises the following steps: Before the steps of acquiring the plurality of first images and acquiring the plurality of second images: The calibration beam is guided from the first optical engine of the first subsystem toward the second detector; and While the second detector is misaligned with the optical device, one or more calibration images of the calibration beam are acquired using the second detector; The step of processing one or more of the plurality of first images or the plurality of second images includes the following steps: comparing the outer edge of one or more portions of the one or more calibration images with the same outer edge of the same one or more portions of the plurality of first images or the plurality of second images.

18. The method of claim 10, wherein: The plurality of first indicators include the eye box indicator; During the step of acquiring multiple first images or the step of acquiring multiple second images, the first detector or the second detector is moved to scan multiple locations along the output coupler of the optical device; as well as The steps of processing one or more of the plurality of first images or the plurality of second images include the following steps: comparing different images corresponding to different field regions of the output coupler.

19. The method of claim 10, wherein the plurality of first indicators includes a ghosting indicator, and the method further comprises the following steps: Before the steps of acquiring the plurality of first images and acquiring the plurality of second images: The calibration beam is guided from the first optical engine of the first subsystem toward the second detector; and While the second detector is misaligned with the optical device, one or more calibration images of the calibration beam are acquired using the second detector; The step of processing one or more of the plurality of first images or the plurality of second images includes the following steps: comparing the one or more calibration images with one or more of the plurality of first images or the plurality of second images to determine the offset between the one or more calibration images and one or more of the plurality of first images or the plurality of second images.

20. The method of claim 19, wherein the plurality of third images comprises the third projected beam projected from the optical device and passing through the eyebox blocker of the face illumination detector.

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