System and method for protective x-ray enclosure access

Abstract

Some embodiments include an x-ray device comprising: an entry port configured to receive a cathode within an interior volume of a housing of the x-ray device; a first vacuum seal configured to seal a lid over the entry port; and a second seal configured to seal the lid over the entry port, the second seal maintained between the first vacuum seal and the interior volume of the housing during removal of the first vacuum seal.

Description

[0001] Unless otherwise indicated herein, the methods described in this section are not prior art to the claims of this disclosure and are not permitted to be included in this section as prior art.

[0002] Components of an X-ray source can be vacuum-sealed within a housing. For example, the vacuum chamber of an X-ray tube can be permanently welded during manufacturing. While vacuum sealing allows the X-ray tube to withstand and dissipate heat generated during operation, welded seals can hinder post-manufacturing testing, verification, and repair; breaking open the vacuum seal of an X-ray tube can be difficult, time-consuming, and introduce contaminants, potentially rendering the tube unusable. Attached Figure Description

[0003] Figures 1 to 3 An example of an X-ray device with an overlapping cover having an access port, according to some embodiments, is shown.

[0004] Figures 4A to 4B An example of an X-ray device with an overlapping cover having a recessed access port, according to some embodiments, is shown.

[0005] Figures 5A to 5B An example of an X-ray device with an overlapping lipped cover having an access port, according to some embodiments, is shown.

[0006] Figures 6A to 6B An example of an X-ray device with an overlapping lipped cover having a recessed access port, according to some embodiments, is shown.

[0007] Figures 7A to 8B An example of an X-ray device with an overlapping cover having an entry port with a secondary seal is shown according to some embodiments.

[0008] Figures 9A to 10B An example of an X-ray device with an overlapping channel cover having an access port with a protrusion is shown according to some embodiments.

[0009] Figures 11A to 12B An example of a protective, resealable vacuum seal system for an X-ray apparatus housing with an access port is shown.

[0010] Figures 13A to 16C An example of a temporary protective vacuum seal system for an X-ray apparatus housing with an access port is shown.

[0011] Figures 17A to 17B An example of a protective vacuum sealing system for a multi-emitter X-ray device within a housing is shown.

[0012] Figure 18 An example of a protective vacuum-sealed system for a multi-emitter X-ray device is shown within a housing with multiple access ports.

[0013] Figures 19A to 19B An example of a cathode module with multiple fasteners according to some implementation schemes is shown.

[0014] Figures 20A to 22B An example of a cathode module having at least one compression plate is shown according to some embodiments.

[0015] Figure 23 Examples of x-ray apparatus including an anode assembly according to some embodiments are shown.

[0016] Figures 24A to 24B Examples of x-ray apparatuses with segmented anode assemblies according to some embodiments are shown.

[0017] Figures 25A to 26C Examples of segmented anode assemblies according to some implementation schemes are shown.

[0018] Figure 27 and Figure 28 This is a flowchart illustrating an example of a method for sealing the vacuum enclosure of an X-ray device.

[0019] Figure 29 This is a flowchart of an exemplary method for manufacturing the cathode of an X-ray device according to some implementation schemes.

[0020] Figure 30 This is a flowchart of an exemplary method for manufacturing the anode of an X-ray device according to some implementation schemes.

[0021] Figure 31 This is a flowchart illustrating an example of a method for manufacturing the cathode of an X-ray device and sealing a vacuum enclosure according to some implementation schemes. Detailed Implementation

[0022] Components of an X-ray source (such as cathodes and anodes) can be permanently vacuum-sealed within a housing, for example, by welding, brazing, or permanent bonding. However, while conventional vacuum-sealing methods may be sufficient for single-cathode (with one to three emitters) and single-anode assemblies, they can complicate manufacturing and hinder post-fabrication testing, validation, and repair of X-ray sources with multiple cathode modules in cases where a single failure could render the X-ray source unusable. Once the housing of an X-ray apparatus is vacuum-sealed, access to the internal volume is impossible, preventing the replacement or repair of components that fail during initial validation testing or subsequent use. For example, opening many types of permanent vacuum seals can involve peeling, milling, cutting, and / or other debris-generating processes. Debris generated during the opening of these types of vacuum seals can contaminate the housing (potentially causing arcing), damage internal components, disrupt electrical connections, and cause similar problems. Repairing such damage may be impractical or impossible. These problems can be exacerbated in embodiments that include multiple X-ray emitters or cathode modules within the vacuum housing. Multi-emitter X-ray sources may include many cathode modules (e.g., six or more, such as 96). Therefore, a failure of a single component within the vacuum-sealed housing of an X-ray device can render the entire X-ray device inoperable and / or unrepairable.

[0023] Some embodiments involve a protective vacuum sealing system for an X-ray apparatus housing (such as an X-ray source, X-ray tube, X-ray tube body, etc.). The housing body may include an access port configured to allow access to components inside the housing. For example, the access port may allow insertion of a cathode into or removal from the housing. The protective vacuum sealing system may be configured to vacuum seal the access port. The protective vacuum sealing system may also be configured to protect the interior from damage during removal of the vacuum seal. As disclosed in more detail herein, the protective vacuum sealing system may include: a primary sealing mechanism configured to form a primary vacuum seal over the access port; and a secondary sealing mechanism configured to maintain a secondary seal or barrier over the access port during removal of the primary vacuum seal. For example, the secondary seal may be configured to prevent debris generated when the primary vacuum seal is broken from contaminating the housing.

[0024] In some implementations, a protective vacuum seal system allows for the evaluation, inspection, repair, and / or replacement of components of an X-ray apparatus after its housing has been vacuum-sealed. Protective vacuum seal systems can be used to salvage X-ray apparatuses that have failed initial validation tests and / or malfunctioned during operation. In response to validation failures, such as a poorly performing emitter, a protective vacuum seal system can be used to safely unseal the access port, enabling the repair and / or replacement of the faulty component. The access port can then be resealed using the protective vacuum seal system, allowing the X-ray apparatus to be put back into service rather than scrapped.

[0025] Figures 1 to 3 An example of an X-ray device with an overlapping cover having an access port, according to some embodiments, is shown. Figure 1 An example of a system 100 including an X-ray device 101 according to some embodiments is shown. System 100 may include an imaging system, a radiation system, etc. Figure 1 This is a side sectional view showing an example of the housing 102 of the X-ray apparatus 101. Figure 2 yes Figure 1 A top view of the housing 102 shown. (Reference) Figure 1 and Figure 2 The housing 102 may be part of an X-ray source, X-ray tube, X-ray tube body, vacuum tube, vacuum chamber, etc. The housing 102 may include a body 104, which at least partially defines the internal volume 106 of the housing 102.

[0026] The housing 102 may include components for one or more x-ray sources 110 (shown as x-ray sources 110 to 110-S), each x-ray source 110 including a corresponding cathode 120 having an emitter 122 and an anode 130 (e.g., Figure 3(As shown in the diagram). Emitter 122 may include any suitable electron emission component, including but not limited to thermionic emitters, filament emitters, field emitters, electron guns, etc. Field emitters may include various types of emitters. For example, field emitters may include nanotube emitters, nanofilament emitters, Spindt arrays, etc. By convention, a nanotube has at least a portion having a hollow structure, wherein a nanofilament or nanorod has a substantially solid core. For the simplicity of terminology, as used herein, nanotube also refers to nanofilaments and nanorods. A nanotube is a nanoscale (nm-scale) tubular structure with an aspect ratio of at least 100:1 (length:width or diameter). Spindt arrays may include individual field emitters having small pointed cones using electron-generating materials such as molybdenum (Mo) or tungsten (W) In some implementations, the field emitter is formed of a conductive or semiconductive material with high tensile strength and high thermal conductivity, such as pure or doped carbon, metal oxides (e.g., Al₂O₃, titanium dioxide (TiO₂), zinc oxide (ZnO), or manganese oxide (MnO₂). x O y (where x and y are integers), metals, sulfides, nitrides, and carbides, etc. Although cathode 120 may include a single emitter 122, in other embodiments cathode 120 may include multiple emitters 122. Cathode 120 is configured to generate a focal spot of an electron beam on a corresponding anode 130. X-ray source 110 may include and / or be operatively coupled to a corresponding anode 130, as disclosed in more detail herein (where x and y are integers), metals, sulfides, nitrides, and carbides, etc. Figure 1 (Details of the example shown are not shown to avoid obscuring the intended meaning). Although the x-ray source 110 with a single cathode 120 and emitter 122 is used as an example, in other embodiments, the cathode 120 may include multiple cathodes 120, multiple emitters 122, etc.

[0027] Access port 108 may be formed in body 104. Access port 108 may include any suitable means for enabling access to internal volume 106 of housing 102, including but not limited to openings, holes, apertures, etc. in housing 102. Access port 108 may be configured to allow the cathode and / or other components of x-ray source 110 to be visually inspected, inserted into housing 102, removed from housing 102, physically manipulated and / or otherwise accessed.

[0028] As mentioned above, some vacuum sealing methods can complicate manufacturing and hinder post-fabrication testing, verification, and repair. These and other problems can be addressed through the implementation schemes of the protective sealed housing entry technology disclosed herein. Figure 1 and Figure 2In the example shown, the sealing system 150 is configured to vacuum seal the housing 102 of the x-ray apparatus 101. The sealing system 150 provides safe removal of the vacuum seal without contaminating or otherwise damaging the x-ray source 110 (or other components within the housing 102). Thus, the sealing system 150 makes it possible to repair and / or replace internal components of the x-ray apparatus 101 (such as the cathode) without damaging the housing 102.

[0029] The sealing system 150 includes a primary seal 151 configured to form a vacuum seal over the inlet port 108 against the housing 102. As used herein, a vacuum seal refers to a seal configured to maintain a low pressure, near-vacuum, or vacuum pressure difference between the internal volume 106 of the housing 102 and the external environment.

[0030] The primary seal 151 can be configured to vacuum seal the cover 154 to the inlet port 108. The cover 154 may include any suitable component for vacuum sealing the inlet port 108, including but not limited to plates, caps, covers, windows, viewing holes, gaskets, etc. The cover 154 can seal the inlet port 108 by compressing the gasket. The cover 154 may be formed of a vacuum-compatible material, such as a material capable of maintaining a low pressure or vacuum state within the internal volume 106, such as hermetic materials, non-porous materials, metals, bronze, brass, steel, iron, aluminum, lead, plastics, rubber, silicone, etc.

[0031] The primary seal 151 of the sealing system 150 can be configured to form a permanent or long-term vacuum seal between the cover 154 and the body 104. As used herein, a permanent or long-term seal refers to a seal configured to persist throughout the service life of the x-ray source 110. A permanent or long-term seal can be formed by one or more of the following: melting, welding, fusion welding, solid-state welding, brazing, soft soldering, bonding, chemical bonding, permanent adhesion, etc.

[0032] The sealing system 150 also includes a secondary seal 152 configured to protect the internal volume 106 from contamination or damage during removal of the primary seal 151. As disclosed in more detail herein, the secondary seal 152 may be configured to form and / or maintain a protective barrier between the primary seal 151 and the internal volume 106 of the housing 102. The secondary seal 152 may be disposed between the primary seal 151 and the internal volume 106 of the housing 102.

[0033] Secondary seal 152 may be configured to protect the internal volume 106 of housing 102 from contamination and / or other damage during removal of primary seal 151. Secondary seal 152 may or may not be a vacuum seal. Secondary seal 152 may be removed or released without contaminating and / or damaging x-ray source 110 or other internal components. Secondary seal 152 may include one or more mechanical seals, including but not limited to pressure seals, hydrostatic seals, contact seals, compression seals, clamps, bolts, friction seals, physical joints, physical joint seals, surface joint seals, gaskets, rubber gaskets, silicone rubber gaskets, adhesive gaskets, sheet metal gaskets, solid material gaskets, brazed material gaskets, spiral wound gaskets, double-jacketed gaskets, Kammprofile gaskets, Fishbone gaskets, annular gaskets, O-rings, adhesive seals, releasable adhesive seals, adhesive materials, releasable adhesive materials, sealants, sealant materials, removable sealants, etc.

[0034] A sealing system 150 may be used to vacuum seal the housing 102, allowing subsequent access to the housing 102 without contaminating the internal volume 106. A secondary seal 152 may be disposed within the primary seal 151 relative to the access port 108. Therefore, the secondary seal 152 is configured to: a) protect the internal volume 106 from contamination during removal of the primary seal 151; and b) allow the cover 154 to be removed or released from the body 104 without contaminating or otherwise damaging the internal volume 106. The secondary seal 152 may be configured to form and / or maintain a protective barrier through contact between two sufficiently long surfaces (such as the cover 154 and the body 104, the various gaskets or seals described above). The secondary seal 152 may remain completely or adequately sealed during removal of the primary seal 151. Therefore, the secondary seal 152 substantially blocks contamination. Contamination may be removed from the outside of the housing 102 before the secondary seal 152 breaks.

[0035] In some embodiments, a primary seal 151 may be configured to surround the periphery 109 of the inlet port 108. Therefore, the primary seal 151 is capable of vacuum sealing the inlet port 108. A secondary seal 152 and / or a corresponding secondary seal 152 may also be configured to surround the periphery 109 of the inlet port 108. In some embodiments, the secondary seal 152 may be disposed within the primary seal 151 relative to the inlet port 108. In other words, the primary seal 151 may be formed along a first path surrounding the periphery of the inlet port 108, and the secondary seal 152 may be formed along a second path surrounding the periphery of the inlet port 108, the second path being interposed between the first path and the inlet port 108 within the first path. Therefore, the secondary seal 152 and / or the corresponding secondary seal 152 can prevent debris generated during the removal of the primary seal 151 from contaminating the internal volume 106.

[0036] In some embodiments, the outer periphery of the cover 154 may be configured to overlap with the body 104 of the housing 102 when positioned over the inlet port 108. The primary seal 151 may include welds or other permanent adhesives at and / or within a first overlap region 251 (such as along the outer edge of the cover 154). The secondary seal 152 may at least partially include a second overlap region 252. The second overlap region 252 may be positioned between the cover 154 and the body 104 of the housing 102, and between the inlet port 108 and the primary seal 151. In some embodiments, the second overlap region 252 may be configured to have a threshold size or range (e.g., a range measured from the primary seal 151 to the periphery 109 of the inlet port 108 at corresponding points along the periphery 109 of the inlet port 108). The threshold size may be sufficient to ensure that the secondary seal 152 adequately protects the housing 102 from contamination during the removal of the primary seal 151. The threshold size may be determined based on testing, experience, simulation, seal type, seal material, housing material, etc. In some embodiments, the threshold size is at least 5 millimeters (mm), for example, the extent of the surface engagement and / or overlap of the secondary seal 152 may be at least 5 mm at each point along the perimeter 109 of the inlet port 108. In other embodiments, the threshold width may be 10 mm or greater (when using materials that generate more debris, higher-velocity debris, etc., and / or the primary seal 151).

[0037] The sealing system 150 facilitates verification testing and repair of the X-ray apparatus 101. The sealing system 150 can be used to vacuum seal the housing 102 using a primary seal 151 for initial verification testing. Components identified as failing verification tests can be replaced by removing the primary seal 151. During the removal of the primary seal 151, the secondary seal 152 protects the internal volume 106 of the housing 102 from contamination.

[0038] Figure 3 Further examples of system 100A and x-ray apparatus 101A according to some embodiments are shown. System 100A may be similar to system 100 described above. X-ray source 110 may include cathode 120 and anode 130. During operation, cathode 120 directs electron beam 124 to target 132 of anode 130, which converts at least a portion of the energy into x-ray radiation 134. Although a single target 132 and a single electron beam 124 have been used as examples, in other embodiments, each anode 130 may include multiple targets 132, a single target having multiple focal spots from multiple electron beams 124, etc.

[0039] Figures 4A to 4B An example of an X-ray device with an overlapping cover having a recessed access port, according to some embodiments, is shown. Reference Figure 4A The system 100B, including the x-ray device 101B, may be similar to the systems 100 and 100A described above, including similar components. In some embodiments, the cover 154B of the sealing system 150B is configured to physically engage with the body 104. The body 104 includes engagement structures, such as a notch 404. The notch 404 may be formed around the periphery 109 of the access port 108. The notch 404 may be configured to engage with the cover 154B; the size and / or configuration of the notch 404 may correspond to the size and / or configuration of the cover 154B such that the cover 154B can be fitted within the notch 404.

[0040] Primary seal 151B may include a portion of cap 154B and body 104. Primary seal 151B may include a vertical segment 405 of recess 404. Similarly, secondary seal 152B may include another portion of cap 154B and body 104. Secondary seal 152B may include a horizontal segment 406 of recess 404.

[0041] refer to Figure 4B The housing 102 is in a closed, vacuum-sealed state. In this example, the primary seal 151B includes sealing the outer edge of the cover 154B to the welded portion of the body 104 at a vertical section 405 of a recess 404 formed in the body 104. The secondary seal 152B can be configured to maintain the secondary seal 152B between the primary seal 151B and the internal volume 106 during removal of the primary seal 151B, as disclosed herein.

[0042] Figures 5A to 5B An example of an X-ray device with an overlapping lipped cover having an access port, according to some embodiments, is shown. Reference Figures 5A to 5BThe system 100C, including the X-ray device 101C, may be similar to the systems 100 and 100A described above, including similar components. The cover 154C of the sealing system 150C may include a lip 504 and a central section 506, the central section being configured to physically engage with or partially enter the access port 108. The central section 506 of the cover 154C may be configured to mate within and / or extend into the access port 108.

[0043] The primary seal 151C includes the outer edge of the cap 154C and a portion of the body 104. The secondary seal 152C includes a lip (or flange) 504, a portion of the central section 506 of the cap 154C, and a portion of the periphery 109 surrounding the inlet port 108.

[0044] refer to Figure 5B The housing 102 is in a closed, vacuum-sealed state. The primary seal 151C of the sealing system 150C is formed by welding the outer edge of the cover 154C to the body 104. The secondary seal 152C may include a mechanical seal maintained by the engagement between the body 104 and the lip 504 and / or the engagement between the central section 506 and the periphery 109 of the inlet port 108.

[0045] Figures 6A to 6B An example of an X-ray device with an overlapping lipped cover having a recessed access port, according to some embodiments, is shown. Reference Figures 6A to 6B The system 100D, including the x-ray device 101D, may be similar to the systems 100, 100A, 100B, and 100C described above, including similar components. A cover 154D is configured to physically engage with the access port 108 of the housing 102. The cover 154D may include a lip 504 and a central section 506. The body 104 may also be configured to physically engage with the cover 154D as a primary seal 151D through engagement of a notch 404D with the outer edge of the cover 154D. A secondary seal 152D may include engagement between the lip 504 of the cover 154D and the notch 404 formed in the body 104, and b) engagement between the central section 506 and the periphery 109 of the access port 108.

[0046] refer to Figure 6B The housing 102 is in a closed, vacuum-sealed state. The primary seal 151D can be formed by welding the outer edge of the cover 154 to the body 104. The secondary seal 152D may include a mechanical seal maintained by the engagement between the lip 504 and the notch 404 and / or the engagement between the periphery of the access port 108 and the central section 506.

[0047] Figures 7A to 8BAn example of an X-ray apparatus with an overlapping cover having an entry port with a secondary seal, according to some embodiments, is shown. Reference Figures 7A to 7B The system 100E, including the x-ray device 101E, may be similar to the system 100 described above, including similar components. The secondary seal 152E includes a secondary seal member 702. The secondary seal member 702 may be configured to surround the inlet port 108. The secondary seal member 702 may include components of temporary, non-debris-generating seals disclosed herein, such as mechanical seals, gaskets, O-rings, etc. The secondary seal 152E may also include an overlapping surface 704 of the cap 154E and the body 104, the overlapping surface 704 being configured to engage, for example, contact or compress the secondary seal member 702.

[0048] refer to Figure 7B The housing 102 is in a closed, vacuum-sealed state. The housing 102 can be sealed by a sealing system 150E similar to the sealing system 150 described above, wherein the primary seal 151E of the sealing system 150E is formed by welding the outer edge of the cover 154E to the body 104. A secondary seal 152E can be configured to form and / or maintain the secondary seal 152E, which includes a mechanical seal maintained by the engagement between the cover 154E and the overlapping surface 704 of the body 104, and the engagement between the overlapping surface 704 and the secondary seal member 702.

[0049] refer to Figures 8A to 8B The system 100F, including the x-ray device 101F, may be similar to the systems 100 and 100E described above, including similar components. The secondary seal 152F of the sealing system 150F includes a mechanical gasket member, such as an O-ring 802. The O-ring 802 may be configured to surround the inlet port 108 of the housing 102, as disclosed herein. The secondary seal 152F may also include a channel 804 formed within the cover 154F (e.g., on the inner surface of the cover 154F), the channel 804 being configured to mate with and / or physically engage with the O-ring 802 when the cover 154F is sealed over the inlet port 108. Alternatively, the channel 804 may be formed on the body 104 (e.g., on the outer surface of the body 104), on both the body 104 and the cover 154F, etc.

[0050] refer to Figure 8BThe housing 102 is in a closed, vacuum-sealed state. The primary seal 151F can be formed by welding the outer edge of the cover 154F to the body 104. The secondary seal 152F is maintained by the engagement between the overlapping surfaces of the cover 154F and the body 104 and / or the engagement between the O-ring 802, the channel 804 and the body 104, and protects the internal volume 106 from contamination during the removal of the primary seal 151F.

[0051] Figures 9A to 10B An example of an X-ray device with an overlapping channel cover having an access port with a protrusion, according to some embodiments, is shown. Reference Figures 9A to 9B The system 100G, including the x-ray device 101G, may be similar to the systems 100 and 100A-100F described above, including similar components. The secondary seal 152G of the sealing system 150G includes a protrusion 902. The protrusion 902 may extend around the inlet port 108 of the housing 102 and is formed on the outer surface of the body 104. The secondary seal 152G may also include a channel 904 formed within the cover 154G (e.g., on the inner surface of the cover 154G), the channel 904 being configured to mate with and / or physically engage with the protrusion 902 when the cover 154G is sealed over the inlet port 108.

[0052] refer to Figure 9B The outer casing 102 is in a closed, vacuum-sealed state. The primary seal 151G can be formed by welding the outer edge of the cover 154G to the body 104. The secondary seal 152G can be maintained by the engagement between the overlapping surfaces of the cover 154G and the body 104 and / or the engagement between the protrusion 902 and the channel 904, and protects the internal volume 106 from contamination during the removal of the primary seal 151G.

[0053] refer to Figures 10A to 10B The system 100H, including the X-ray device 101H, may be similar to the systems 100 and 100A-100G described above, including similar components. The secondary seal 152H of the sealing system 150H includes corresponding protrusions 1002 and channels 1004 formed on the body 104 and the cover 154H, respectively. The protrusions 1002 may be configured to mate with and / or physically engage with the corresponding channels 1004 when the cover 154H is placed over the inlet port 108 of the housing 102, such as... Figure 10BAs shown in the diagram. The primary seal 151H can be formed by welding the outer edge of the cover 154H to the body 104. The secondary seal 152H can protect the internal volume 106 from contamination during the removal of the primary seal 151H through the physical engagement between the overlapping surfaces of the cover 154H and the body 104 and / or the engagement between the protrusion 1002 and the corresponding channel 1004. In some embodiments, the secondary seal 152H may include additional temporary or short-term sealing mechanisms, such as sealant or adhesive disposed on the overlapping surfaces, protrusion 1002 and / or channels, gaskets, O-rings, etc.

[0054] Figures 11A to 12B An example is shown of a protective, resealable vacuum seal system for the housing of an X-ray apparatus with an access port. (Reference) Figures 11A to 11B The system 100I, including the X-ray device 101I, may be similar to the systems 100 and 100A-100H described above, including similar components. The sealing system 150I includes a releasable vacuum seal 1152 configured as an inlet port 108 of the vacuum-sealed housing 102. The releasable vacuum seal 1152 may include one or more releasable, temporary, short-term removable sealing mechanisms that do not produce debris or require safe removal, such as mechanical seals, gaskets, brazed gaskets, O-rings, sealant materials, releasable adhesives, etc. The releasable vacuum seal 1152 may be configured to vacuum-seal the housing 102 independently of other seals and / or sealing mechanisms and / or sealing system 150I (e.g., independently of the primary vacuum seal 151).

[0055] In some embodiments, the releasable vacuum seal 1152 may be configured to vacuum seal a temporary cover 1154 over the inlet port 108. The temporary cover 1154 may be adapted for validation test operations, as disclosed in more detail herein. Therefore, validation testing of the x-ray apparatus 101I and / or the x-ray source 110 may be performed while fabricating permanent or long-term vacuum seals (such as... Figure 11B This is performed before and / or without the need for a permanent or long-term vacuum seal (as shown in the primary seal 151I). The releasable vacuum seal 1152 can be removed without contaminating or otherwise damaging components (such as the x-ray source 110) within the internal volume 106 of the housing 102. Therefore, the sealing system 150I allows the x-ray device 101I and / or the x-ray source 110 to recover from a verification failure. In response to a detected component failure, the releasable vacuum seal 1152 can be released, allowing the temporary cover 1154 to be removed to expose the access port 108, the faulty component to be repaired or replaced, and the releasable vacuum seal 1152 to be reapplied without contaminating or otherwise damaging the x-ray source 110 within the internal volume 106 of the housing 102.

[0056] The releasable vacuum seal 1152 includes a channel 1155 formed in the body 104 (e.g., around the periphery 109 of the inlet port 108) and an O-ring 1157 configured to physically engage and / or mate with the channel 1155. The releasable vacuum seal 1152 may also include a physical engagement seal between a temporary cap 1154 and the overlapping surfaces of the body 104 of the housing 102. In some embodiments, the overlapping surfaces may be adapted to facilitate and / or reinforce the releasable vacuum seal 1152; for example, the surfaces may be roughened, include a sealant or adhesive, include additional physical engagement members, etc. In some embodiments, the releasable vacuum seal 1152 may include one or more fasteners, such as clamps, bands, bolts, etc. Figure 11A (Not shown to avoid obscuring details of the example shown). The fastener can be configured to secure the temporary cover 1154 to the inlet port 108 when a vacuum is drawn into the internal volume 106 of the housing 102, and to allow for subsequent release or removal. Alternatively, the fastener can be used to secure the temporary cover 1154 during verification testing.

[0057] like Figure 11B As shown, the sealing system 150I may also include a primary seal 151I and a secondary seal 152I. The primary seal 151I may be configured to replace the releasable vacuum seal 1152 with a permanent, long-term vacuum seal. More specifically, the releasable vacuum seal 1152 (and the temporary cap 1154) may be configured to be removed and replaced with the primary seal 151I and the cap 1156 (such as the production cap 1156). The releasable vacuum seal 1152 may be replaced with the primary seal 151I after successful validation testing of the x-ray apparatus 101I or its components. The primary seal 151I may include any suitable permanent or long-term sealing mechanism as disclosed herein. The secondary seal 152I may be similar to the various secondary seals 152A-152H described herein.

[0058] In some embodiments, the temporary cover 1154 may be configured to facilitate validation testing of the x-ray source 110. For example, the temporary cover 1154 may include one or more test and diagnostic components or capabilities, such as temperature sensors, observation ports, etc. The temporary cover 1154 may be used during validation testing of many different x-ray devices 101I (and / or housing 102). Thus, the releasable vacuum seal 1152 and / or the temporary cover 1154 may be adapted to withstand numerous vacuum sealing cycles. For example, the releasable vacuum seal 1152 may include a highly durable heavy-duty vacuum sealing component, and the temporary cover 1154 may be formed of a thick, high-strength material, etc. (e.g., thicker, heavier, and / or more durable than the production cover 1156).

[0059] refer to Figures 12A to 12B The system 100J, including the x-ray device 101J, may be similar to the systems 100 and 100A-100I described above, including similar components. System 100J includes a sealing system 150J, a primary vacuum seal 151J, and a secondary seal 152J, the sealing system including a releasable vacuum seal 1152J. The releasable vacuum seal 1152J may also include one or more fasteners configured to secure and / or clamp a temporary cover 1154J over the access port 108. Fasteners may include clamps, bolts, screws, snap rings, clips, pins, tethers, etc., that interface with the flange 153J of the body 104J. The releasable vacuum seal 1152J may be used to vacuum seal the housing 102 during validation testing of the x-ray device 101J (and / or the x-ray source 110), as disclosed herein.

[0060] The releasable vacuum seal 1152J can be replaced with the primary seal 151J, such as... Figure 12B As shown in the diagram. The secondary seal 152J may be formed in a manner similar to the various ways in which the secondary seals 152 and 152A-I described above are formed, and may be similar to or different from the releasable vacuum seal 1152J. In some embodiments, the fasteners of the releasable vacuum seal 1152J may be excluded from the secondary seal 152J because the fasteners are positioned relative to the inlet port 108 outside the primary seal 151J (rather than between the primary seal 151J and the inlet port 108).

[0061] Figures 13A to 16C An example of a temporary protective vacuum seal system for an X-ray apparatus housing with an access port is shown. Systems 100K-100N may be similar to systems 100 and 100A-100J described above, having similar components. For example, temporary covers 1154K-1154N and releasable vacuum seals 1152K-1152N may be similar to releasable vacuum seals 1152 and 1152J, etc. Covers 1156K-1156N may be similar to covers 154, 154A-154H, 1156, and 1156J, etc. However, in some embodiments, secondary seals similar to secondary seals 152 and 152A-152J may be omitted.

[0062] refer to Figures 15A to 16C In some implementations, the system 100M or 100N may include different types of entry ports 108M-1 to 108M-2 and covers 1156M-1 and 1156M-2. Figure 15B and Figure 15C (as shown) or enter ports 108N-1 and 108N-2 ( Figure 16A and Figure 16B(As shown in the diagram). Multiple temporary covers 1154M or 1154N and multiple covers 1156M or 1156N may be used in conjunction with the multiple access ports 108. Although two covers 1156M or 1156N have been used as an example, in other embodiments, the number of access ports 108 and the corresponding number of covers 1156M or 1156N may be greater than 2.

[0063] Figures 17A to 17B An example of a protective vacuum sealing system for a multi-emitter X-ray device within a housing is shown. (Reference) Figure 17A and Figure 17B The system 100O, including the x-ray device 101O, may be similar to systems 100 and 100A-100N, including similar components. In some embodiments, the x-ray device 101O may include a plurality of x-ray sources 110-1 to 110-S, each x-ray source including a corresponding cathode 120 and anode 130. Here, there are S x-ray sources 110, where S is an integer greater than 1.

[0064] Cathodes 120 may each include a cathode stack 1722, each cathode stack 1722 including a plurality of plates 1724. Each cathode 120 may include P plates 1724-1 to 1724-P arranged in an aligned vertical stack configuration; however, the plates 1724 may have any suitable physical arrangement, configuration, or alignment. Plates 1724 may include electrodes, grids, meshes, spacers, emitters, dielectrics, insulators, etc.

[0065] Precise alignment of the plate 1724 of the cathode 120 within the housing 102 may be difficult due to space constraints and other factors. The x-ray apparatus 101O may include one or more cathode modules 1720, each including one or more cathodes 120. Although a single cathode module 1720 is used as an example, in other embodiments, the x-ray apparatus 101O may include any number of cathode modules 1720, each having one or more cathodes 120, with different cathode modules 1720 including different numbers of cathodes 120.

[0066] The cathode module 1720 can be assembled before installation into the housing 102. More specifically, cathodes 120-1 to 120-S can be pre-assembled within the cathode module 1720 before the cathode module 1720 is installed into the internal volume 106. As used herein, a pre-assembled cathode 120 refers to a cathode having a plurality of plates 1724 and / or other components (e.g., plates 1724-1 to 1724-P, etc., fixed in an aligned stack) that are fixed in a specified manner. In some embodiments, the plates 1724-1 to 1720-P of each cathode 120-1 to 120-S can be fixed in a specified alignment within the cathode module 1720 by fasteners 1726 (such as screws, bolts, rivets, pins, etc.). This disclosure is not limited thereto.

[0067] In some embodiments, cathode 120 may be implemented on a corresponding portion or segment of plate 1724. For example, cathode stacks 1722-1 to 17220S may share plates 1724-1 to 1724-P. Cathode 120 is implemented on a corresponding stack 1722 of plate 1724. For example, stack 1722-1 of cathode 120-1 may include segments 1725-1-1 to 1725-1-P of plates 1724-1 to 1724-P, stack 1722-2 of cathode 120-2 may include segments 1725-2-1 to 1725-2-P, stack 1722-S of cathode 120-S may include segments 1725-S-1 to 1725-SP, and so on. The stack 1722 of cathode plates 1724-1 to 1724-P and corresponding cathodes 120-1 to 120-S can be secured in a specific alignment by fasteners 1726. Although cathodes 120 sharing each plate 1724 have been used as an example, in other embodiments, cathodes 120 may not share all plates 1724, including sharing only one of the plates 1724.

[0068] During operation, the selected cathode 120 can be configured to generate an electron beam 124, which can be directed to a target 132 of the corresponding anode 130. Accurate aiming of the electron beam 124 can be based on precise alignment between the cathode 120 and the corresponding anode 130 (and precise alignment of the cathode stack 1722 itself). However, due to space constraints and other issues, precise alignment of the cathode 120 within the housing 102 can be difficult. To address these and other issues, the cathode module 1720 and / or housing 102 may include a cathode mount 1729. The cathode mount 1729 can be configured to set the position, orientation, and / or alignment of the cathode module 1720 and the corresponding pre-assembled cathodes 120-1 to 120-S within the housing 102. The cathode mount 1729 can be configured to precisely align the position and / or orientation of the electron beam 124 generated by the respective cathode 120 with the corresponding target 132. In some embodiments, the cathode mount 1729 is configured to securely hold the position, orientation, and / or alignment of the cathode module 1720 (and / or corresponding cathodes 120-1 to 120-S). Alternatively or additionally, the cathode mount 1729 may be configured to allow precise adjustment of position, orientation, and / or alignment when the cathode module 1720 is housed and / or sealed within the housing 102. The cathode mount 1729 may include fasteners similar to fasteners 1726 used to secure the cathode stack 1722 to the support structure 1920, flanges, portions of the body 104 or housing 102, insulating supports, etc.

[0069] The housing 102 may include an inlet port 108 that can be selectively vacuum-sealed by a sealing system 150O. The sealing system 150O may include one or more of the protective vacuum sealing systems 150 disclosed herein, including various releasable vacuum seals 1152, such as... Figures 1 to 10B The protective vacuum sealing systems 150A to 150H shown are Figures 11A to 16C The protective vacuum sealing systems 150I to 150N shown are examples.

[0070] Figure 18 An example of a protective vacuum-sealed system for a multi-emitter x-ray device within a housing having multiple access ports is shown. In some embodiments, a system 100P including x-ray device 101P may be similar to systems 100 and 100A-100O, including similar components. X-ray device 110P may include multiple cathode modules 1720P-1 to 1720P-M, where M is any integer greater than 1, and the multiple cathode modules include cathodes 120 corresponding to anode 130. Thus, x-ray source 110 may include an M×S x-ray source capable of generating an M×S x-ray radiation beam.

[0071] The housing 102 may include M access ports 108-1 to 108-M, each access port 108 being configured to allow access to the internal volume 106. In some embodiments, the access ports 108 may be configured to correspond to and allow access to the respective cathode modules 1720P and anode 130. In some embodiments, the system 100P also includes cathode mounts 1729P-1 to 1729P-M, which may be configured to secure the position, orientation, and / or alignment of the respective cathode modules 1720P-1 to 1720P-M within the housing 102, as disclosed herein.

[0072] The sealing system 150P can be configured to vacuum seal each inlet port 108-1 to 108-M. The protective vacuum sealing systems 150P-1 to 150P-M may include one or more of the protective vacuum sealing systems 150, 150A-150N, etc. disclosed herein.

[0073] Cathode modules 1720P-1 to 1720P-M may each include corresponding electrical feeders 1825-1 to 1825-M. The electrical feeder 1825 of cathode module 1720P may be configured to supply power, signals, control voltages, etc., to the corresponding cathodes 120-1 to 120-S, such as transmitter voltages, grid voltages, etc., from the control system, voltage generator, etc. of system 100P.

[0074] System 100P may also include an internal electrical connection 1805 that can be connected to each cathode module 1720P-1 to 1720P-M. The internal electrical connection 1805 can be connected to the corresponding cathode 120 of each cathode module 1720P (e.g., in a daisy-chain configuration, in series, etc.). In some embodiments, the internal electrical connection 1805 includes a common internal ground that can be connected to a grounding connection of each cathode 120 (e.g., to a ground plane, etc.). The internal electrical connection 1805 can be connected to a common electrical feedthrough 1815 of the x-ray apparatus 101P. Since the common electrical feedthrough 1815 is connected to each cathode 120 via the internal electrical connection 1805 between cathode modules 1720, the common electrical feedthrough 1815 can be used to apply a common voltage to the cathodes 120-1 to 120-S of each cathode module 1720P-1 to 1720P-M. Even if one or more of its individual electrical feeders 1825-1 to 1825-M fail, a common voltage can still be applied. The redundancy provided by the internal electrical connector 1805 and the common electrical feeder 1815 can be used to extend the service life of the x-ray source 110.

[0075] Figures 19A to 19B An example of a cathode module with multiple fasteners according to some implementation schemes is shown. Figure 19A and Figure 19B A top front view and a top view are shown of a cathode module 1720Q comprising cathode stacks 1722-1 to 1722-5. While five cathodes 120, each with six emitters 1927, are used as an example, the number of cathodes 120 and / or emitters 1927 may vary in other embodiments. The cathodes 120 may be arranged in a substantially linear configuration. Internal electrical connections 1805Q-1 and 1805Q-2 may be coupled to the respective cathodes 120 described above, the common electrical feedthrough 1815, and / or one or more other cathode modules 1720.

[0076] The cathode stack 1722 may be secured to the support structure 1920 of the cathode module 1720Q. The support structure 1920 may include any suitable mechanism, such as a substrate, layer, plate, panel, thin plate, base, etc., for securing the cathode stack 1722 according to a prescribed alignment. In some embodiments, the support structure 1920 may include a focusing electrode 1922 of the cathode stack 1722. The focusing electrode 1922 may be configured to focus and / or guide the electron beam 124 generated by the respective cathode 120 to the corresponding anode 130. The cathode mount 1925 may be configured to secure the cathode module 1720Q within the housing 102 (e.g., securing the cathode module 1720Q to a cathode mount 1729 within the housing 102, as disclosed herein). As will be described in more detail below, the cathode mount 1925 may be configured to align the cathode module 1720Q with other components, such as the anode 130.

[0077] To distribute clamping forces and / or other forces, the sides of the respective cathode stacks 1722 can be secured by groups or sets of fasteners 1726 (fastener sets 1926). Each fastener set 1926 can be positioned between adjacent cathodes 120 of the cathode module 1720Q. The fasteners 1726 can be secured to the support structure 1920 through openings formed by plates in the cathode stacks 1722. However, this disclosure is not limited thereto and fastener sets 1926 comprising any suitable number of fasteners 1726 and / or any suitable type of fasteners 1726 can be utilized. The suitable number of fasteners 1726 in the fastener set 1926 can be determined, for example, through testing, experience, simulation, design constraints, etc., to ensure that the contact and / or load distribution along the sides of each cathode stack 1722 is consistent.

[0078] Using multiple fasteners 1726 can complicate manufacturing and lead to defects. Drilling and tapping precisely aligned openings (e.g., threaded holes) for each fastener 1726 in each fastener group 1926-1 to 1926-6 can be difficult. Furthermore, installing and tightening each of the fasteners 1726 to the appropriate torque while maintaining cathode alignment and avoiding damage can be lengthy and time-consuming.

[0079] Figures 20A to 22B An example of a cathode module having at least one compression plate according to some embodiments is shown. The compression plate 2026 may be configured to provide consistent contact along the sides of the respective cathode stack 1722 and distribute clamping forces and other forces, while reducing the number of fasteners 1726 used to secure the respective cathode stack 1722 to the support structure 1920 with the desired precision.

[0080] refer to Figure 20A and Figure 20B The cathode module 1720R may be similar to the cathode module 1720 described above. The cathode stacks 1722 of the cathode module 1720R can be fixed and / or clamped to the support structure 1920R via a compression plate 2026. The compression plate 2026 may include a plate, rigid plate, compression plate, thin plate, clamp, panel, etc. The compression plate 2026 may be configured to uniformly distribute the clamping load and / or clamping force on the respective sides of each cathode stack 1722 or to increase the uniformity of the clamping load and / or clamping force distribution. The compression plate 2026 may be configured to fix the cathode plates 1724-1 to 1724-P and / or the cathode stacks 1722-1 to 1722-M in alignment with the focusing electrode 1922R. The compression plate 2026 can be fixed using a single opening disposed between adjacent cathodes 120 of the cathode module 1720R and a corresponding fastener 1726. For example, a single opening through the cathode stack 1722 and a corresponding fastener 1726 may be disposed between each pair of adjacent cathodes 120 of the cathode module 1720R. Additionally, the single opening and the corresponding fastener 1726 may be disposed at the respective ends of the cathode stack 1722. Thus, the fasteners 1726 are disposed adjacent to both sides of each cathode stack 1722.

[0081] refer to Figure 21A and Figure 21B The cathode module 1720S includes a plurality of compression plates 2026S-1 to 2026S-6, each compression plate being disposed along one side and / or between corresponding cathode stacks 1722 or cathodes 120 such that the compression plates 2026S are positioned adjacent to both sides of each cathode stack 1722. Each compression plate 2026S-1 to 2026S-6 can be secured and / or clamped to the support structure 1920S by one of the fasteners 1726-1 to 1726-6.

[0082] The compression plate 2026 reduces the number of fastener openings formed through the cathode stack 1722. The compression plate 2026 reduces the number of fastener openings required to secure the cathode stack 1722 of the cathode module 1720 by (F-1)×(S+1), where F is the number of fasteners 1726 required to secure the cathode stack 1722 without the compression plate 2026, and S is the number of cathode stacks 1722 implemented by the cathode module 1720 (e.g., compared to 18 fastener openings in the case of F=3 and S=5, as in...). Figures 19A to 21B Compared to the previous method, only six fastener openings are required. In the various embodiments described herein, due to the use of a compressible plate 2026, a single fastener 1726 can be placed between the cathodes 120. Therefore, fewer openings and fasteners are used in the cathode module 1720.

[0083] Although a substantially straight or flat cathode module 1720 has been used as an example, in other embodiments, the cathode module 1720 may have different configurations. Reference Figures 22A to 22B In some embodiments, the cathode module 1720T may be configured to arrange the cathodes 120-1 to 120-8 in a curved or arc-shaped arrangement. The cathode plates 1724-1 to 1724-P and the corresponding focusing electrodes 1922T may be formed in a curved or arc-shaped arrangement, thereby forming a corresponding curved or arc-shaped arrangement of the cathodes 120 and the cathode stack 1722.

[0084] Figure 22B An example of an X-ray source 110 is shown, comprising multiple cathode modules 1720T-1 and 1720T-2, each cathode module including corresponding cathodes 120-1-1 to 120-1-8 and 120-2-1 to 120-2-8. Cathode modules 1720T-1 and 1720T-2 are connectable to internal electrical connector 1805T-2. Cathode modules 1720T-1 and 1720T-2 can be connected to other cathode modules 1720 and / or a common electrical feedthrough 1815 via internal electrical connectors 1805T-1 and / or 1805T-3.

[0085] Figure 23 Examples of x-ray apparatuses including an anode assembly are shown according to some embodiments. System 100U may be similar to systems 100, 100A-100P, etc., described above, and includes similar components. X-ray apparatus 101U may include cathodes 2320U, including various cathodes 120, cathode modules 1720, etc., described above. X-ray apparatus 101U includes an anode assembly 2330, which includes corresponding anodes 130. X cathodes 120 and anodes 130 may be part of x-ray apparatus 101U, where X is an integer greater than 1.

[0086] During operation, electrons emitted by a selected cathode 120 of the X-ray source 110 are directed toward a target 132 corresponding to the anode 130. The electrons can be accelerated into an electron beam 124 by the voltage difference generated between the cathode 120 and the anode 130. To maintain this voltage difference, the anode 130 can be electrically isolated from the cathode 120 and / or other components of the X-ray source 110 (such as the body 104 of the housing 102). In some embodiments, the anode assembly 2330 can be secured within the housing 102 by a support 2335. The support 2335 can also be configured to electrically isolate the anode assembly 2330 from the housing 102 and / or other components of the X-ray source 110, and may comprise, for example, non-conductive or electrically insulating materials such as ceramics, ceramic-ceramic composites, porcelain, etc. In some embodiments, the support 2335 may be configured to provide cooling for the anode assembly 2330, such as in U.S. Patent Application No. 17 / 173,036, filed February 10, 2021, the entire contents of which are incorporated herein by reference.

[0087] The anode assembly 2330U is secured within the housing 102 by L supports 2335U-1 to 2335U-L to maintain alignment of the anodes 130 with each other and / or with other components of the X-ray source 110. In some embodiments, the anode assembly 2330U may include 96 anodes 130 and may be secured within the housing 102 by eight supports 2335U (e.g., X = 96 and L = 8). The supports 2335U-1 to 2335U-L may be arranged in any suitable manner. In some embodiments, the supports 2335U may be spaced apart by an offset distance 2304, for example, each support 2335U may be spaced apart from adjacent supports 2335U by an offset distance 2304.

[0088] Using multiple supports 2335U and / or other physical contact points with the housing 102 can have significant disadvantages. Thermal expansion of the anode assembly 2330U can cause strain in structural elements of the X-ray device 101U, potentially leading to damage or even structural failure. For example, when the electron beam 124 is aimed at the anode 130, a large portion of the corresponding energy can be converted into heat (e.g., 90% or more). For instance, the electron beam 124-4 can heat the anode 130-4, causing the anode assembly 2330U to thermally expand in directions 2316 and 2318. This thermal expansion can increase the effective length of the anode assembly 2330U, thereby forcing the supports 2335U-1 and 2335U-2 to separate further. Therefore, during operation, thermal expansion of the anode assembly 2330U can cause strain or even breakage in structural elements such as one or more anode supports 2335U, the body 104 of the housing 102, the anode assembly 2330U itself, etc. Furthermore, mitigating the adverse effects of thermal expansion through the use of flexible mounting mechanisms may not be feasible. For example, a flexible support mechanism may not be suitable for adequately stabilizing and / or fixing the anode 130 to be aligned with the corresponding cathode 120. These and other problems can be addressed by segmenting the anode assembly 2330.

[0089] Figures 24A to 24B An example of an X-ray apparatus with a segmented anode assembly is shown according to some embodiments. System 100V may be similar to System 100U described above. However, the anode assembly 2330V includes a plurality of structurally independent anode modules 2430. Figure 24A The anode assembly 2330V shown includes X anodes 130 distributed across M structurally independent anode modules 2430-1 to 2430-M. Each of the M anode modules 2430 of the anode assembly 2330 may include a corresponding subgroup of the X anodes 130. In some embodiments, the number of anodes 130 in each anode module 2430 may be the same, while in other embodiments the number may vary.

[0090] The anode modules 2430 of the anode assembly 2330V can be configured to be structurally independent. In other words, each of the anode modules 2430 of the anode assembly 2330 can be fixed and / or stabilized within the housing 102 independently of any other anode modules 2430 of the anode assembly 2330. In some embodiments, each anode module 2430 may be supported in the housing 102 by a single support member 2335. Each of the supports 2335 may be structurally independent of any other support member in the support member 2335. Although a single support member 2335 is shown, in some embodiments, one or even all of the anode modules 2430 may each be supported by multiple supports 2335.

[0091] In some embodiments, the anode modules 2430 may be physically separated from each other by a gap 2402. The gap 2402 structurally isolates each anode module 2430 from its adjacent anode modules 2430. The gap 2402 may be configured such that the thermal expansion of one or more of the anode modules 2430 does not contact other anode modules 2430 and therefore does not contact the support 2335 and the housing 102, or otherwise exert structural forces or strain on other anode modules 2430 and therefore on the support 2335 and the housing 102. The size of the gap 2402 may correspond to the maximum degree of thermal expansion of the anode modules 2430, which can be determined through testing, experience, simulation, design considerations, etc. For example, the operating temperature range may include from about 25 degrees Celsius (°C) to about 1100°C. Within this temperature range, the gap 2402 may include from about 0.1 millimeters (mm) to about 10 millimeters (mm).

[0092] In some implementations, the support 2335 may include a feedthrough 2435. During operation, the feedthrough 2435 may be configured to maintain the voltage difference between the anode module 2430 and other components, such as the cathode 120.

[0093] In some implementations, the anode module 2430 can be connected to the common anode feedthrough 2415 via a flexible internal electrical connection 2405, such as... Figure 24A or Figure 24B As shown in the diagram. The flexible internal electrical connection 2405 can be configured to maintain the structural independence of the anode module 2430; the flexible internal electrical connection 2405 may include, for example, flexible components and / or non-structural components, such as cables, ribbons, strip cables, flexible wiring, flexible conduits, etc. In some embodiments, the support 2335 may not include the feedthrough 2435.

[0094] although Figures 23 to 24B A single entry port 108 has been used as an example, but in some implementations, there may be multiple entry ports 108, such as multiple entry ports 108-1 to 108-M, 108-1 to 108-N, etc.

[0095] Although the anode assembly 2330 has been shown as substantially straight or flat, in other embodiments, the anode assembly 2330 may be in a different configuration or orientation. Figures 25A to 26C Examples of segmented anode assemblies according to some implementation schemes are shown. Figures 25A to 25CThese are perspective, top, and front views of an embodiment of an anode module 2430W configured to arrange anodes 130-1 to 130-6 in a curved or arc-shaped pattern. The body 2504 of the anode module 2430W may include a guide opening 2508 forming a collimator 2509, which is configured to guide X-ray radiation 134 emitted from the respective targets 132-1 to 132-6 in a specified direction.

[0096] The support member 2335W may be similar to the support member 2335 described above. The bushing 2532 of the support member 2335W may be attached to the body 2504 of the anode module 2430W (e.g., by welding, brazing, etc.). The body 2535 of the support member 2335W may comprise a non-conductive electrically insulating material disclosed herein, such as a ceramic support member, such as a ceramic pillar, cylinder, or other suitable structure. The attachment member 2534 of the support member 2335W may be configured to be housed within the housing 102, and may include, for example, threads, bolts, welded attachments, etc. In some embodiments, the anode module 2430W also includes an anode feedthrough 2435W, which may be formed within or through the support member 2335W. Alternatively or additionally, the anode module 2430W may be electrically connected to the common anode feedthrough 2415 via one or more flexible internal electrical connections 2405W-1 and / or 2405W-2, which may be configured to maintain the structural independence of the anode module 2430W as disclosed herein.

[0097] Figures 26A to 26C An example of an anode assembly 2330X comprising two or more anode modules 2430X is shown, the anode modules including 2430X-1 and 2430X-2, wherein each anode module 2430X is similar to anode module 2430 or 2430W. In some embodiments, each anode module 2430X includes a corresponding anode feedthrough 2435X. Alternatively or additionally, the anode modules 2430X may be electrically interconnected via one or more flexible internal electrical connections 2405X-1 to 2405X-3, as disclosed herein.

[0098] Figure 27This is a flowchart illustrating an example of a method 2700 for operating an x-ray source 110 of an x-ray apparatus 101. The method 2700 and other methods disclosed herein may be implemented by one or more (and / or variations thereof) of the systems 100 and / or 100A-X, x-ray apparatus 101 and / or 101A-X, and / or sealing systems 150 and / or 150A-V disclosed herein. At 2710, the x-ray source 110 may be configured to generate x-ray radiation 134, as disclosed herein. During operation at 2710, components of the x-ray source 110 may be vacuum-sealed within a housing 102 by the sealing system 150. The sealing system 150 may be configured to vacuum-seal the inlet port 108 of the housing 102. In some embodiments, the x-ray source 110 may include one or more cathode modules 1720, each cathode module including one or more cathodes 120 (e.g., cathodes 120-1 to 120-S). The x-ray source 110 may also include an anode assembly 2330, which includes a plurality of structurally independent anode modules 2430, as disclosed herein.

[0099] At 2720, a fault related to a component of the x-ray source 110 can be detected. The fault may be related to a component of the cathode 120 of the x-ray source 110 (such as emitter 122).

[0100] At 2730, the sealing system 150 can be used to remove the primary vacuum seal 151 from the access port 108 while protecting the internal volume 106 of the housing 102 from contamination. In some embodiments, the sealing system 150 includes a secondary seal 152 disposed between the primary seal 151 and the access port 108, the secondary seal 152 being configured to protect the internal volume 106 from contamination during removal of the primary seal 151. Alternatively, the housing 102 can be vacuum-sealed by a releasable vacuum seal 1152 of the sealing system 150. The releasable vacuum seal 1152 can be removed at 2730 without contaminating the housing 102, as disclosed herein.

[0101] At 2740, the component associated with the fault detected at 2720 can be repaired and / or replaced via access port 108, and housing 102 can be resealed as disclosed herein.

[0102] Figure 28This is a flowchart illustrating an example of a protective vacuum sealing method 2800. At 2810, the inlet port 108 of the housing 102 including the X-ray source 110 is vacuum sealed by a first vacuum seal 151 and a corresponding secondary seal 152. At 2810, a first cover 154 is sealed over the inlet port 108 by the primary vacuum seal 151, and the secondary seal 152 is disposed between the primary vacuum seal 151 and the internal volume 106 of the housing 102. The primary seal 151 may include a permanent, long-term seal, such as a weld, permanent adhesive, etc. Alternatively, the first vacuum seal may include a releasable vacuum seal 1152 configured to seal a temporary cover 1154 over the inlet port 108, as disclosed herein.

[0103] At 2820, the first vacuum seal 151 can be removed from the inlet port 108 of the housing 102. Removing the first vacuum seal 151 may also include protecting the internal volume 106 of the housing 102 from contamination during removal via the secondary seal 152 described above. In some embodiments, the internal volume 106 may be protected from contamination by the secondary seal 152 maintained between the primary vacuum seal 151 and the inlet port 108. The primary vacuum seal 151 may be removed by milling or other debris-generating processes, and the secondary seal 152 may be configured to prevent the generated debris from contaminating the housing 102. Alternatively, the first vacuum seal may include a releasable seal 1152 configured to be removed without using any debris-generating processes. The releasable seal 1152 may include one or more mechanical seals, as disclosed herein.

[0104] In some implementations, the first vacuum seal can be removed at 2820 in response to a failure of a component of the x-ray source 110. The faulty component can be identified during initial validation testing of the x-ray apparatus 101, during use of the x-ray apparatus 101 in a production environment, etc.

[0105] At 2830, the entry port 108 of the housing 102 can be resealed using a second vacuum seal. The entry port 108 can be resealed in response to repairing and / or replacing one or more faulty components of the x-ray source 110 via the entry port 108 (e.g., in response to removal of the first vacuum seal at 2820). The second vacuum seal can be configured to permanently seal a second cover 154 over the entry port 108 (e.g., manufacturing cover 1156). In some embodiments, the second vacuum seal includes a primary vacuum seal 151 and a secondary seal (e.g., a secondary seal 152), as disclosed herein.

[0106] Figure 29This is a flowchart illustrating an example of a method 2900 for manufacturing an X-ray apparatus 101. At points 2910 to 2920, a cathode module 1720 comprising a plurality of cathodes 120 can be assembled. At point 2910, a plurality of openings can be formed through the cathode stack 1722 of the cathode module 1720. These openings can be formed through a plurality of plates 1724 comprising the cathode stack 1722, as disclosed herein. At point 2920, the plurality of plates 1724 of the cathode stack 1722 can be aligned and secured between a compression plate 2026 and a support structure 1920 of the cathode module 1720 by a plurality of fasteners 1726. The fasteners 1726 can be secured to the support structure 1920 through corresponding openings of the plurality of openings, as... Figures 20A to 22B As shown in the image.

[0107] In some embodiments, an opening is formed at 2910 through the cathode stack 1722 such that a single opening is disposed between each pair of adjacent cathodes 120 of the plurality of cathodes 120 of the cathode module 1720. Assembling the cathode module 1720 may further include clamping the cathode stack between the compression plate 2026 and the support structure 1920 by means of the plurality of fasteners 1726. Alternatively or additionally, the cathode stack 1722 may be clamped between the support structure 1920 and the plurality of compression plates 2026. In these embodiments, assembling the cathode module 1720 may further include clamping the respective compression plate 2026 between each pair of adjacent cathodes 120 by means of a single fastener 1726 secured to the support structure 1920 through a single opening disposed between the pairs of adjacent cathodes 120. The assembled cathode module 1720 can be configured to be mounted through the access port 108 into the internal volume 106 of the housing 102 of the x-ray source 110, as disclosed herein (e.g., the access port can be configured to receive the pre-assembled cathode module 1720 into the internal volume 106).

[0108] Figure 30This is a flowchart of another example of a method 2902 for manufacturing an x-ray apparatus 101. Method 2902 may include forming an anode assembly 2330 comprising a plurality of anodes 130 distributed across a plurality of structurally independent anode modules 2430. At 2912, a plurality of anode modules 2430 of the anode assembly 2330 may be formed, each anode module 2430 comprising one or more anodes 130 (e.g., each anode module 2430 comprising a corresponding subgroup of the anodes 130 of the anode assembly 2330). At 2922, each anode module 2430 of the anode assembly 2330 may be secured within the housing 102 of the x-ray source 110 by a respective single support 2335 of a plurality of supports 2335, for example, by securing each anode module 2430 of the anode assembly 2330 formed at 2912 within the housing 102 by a separate structurally independent support 2335, as disclosed herein. In some embodiments, the respective anode module 2430 of the anode assembly 2330 may be separated from other adjacent anode modules 2430 by one or more gaps 2402, as disclosed herein.

[0109] In some embodiments, a feedthrough 2435 of the anode module 2430 may be formed through the support 2335. Alternatively or additionally, the anode module 2430 may be coupled to a common anode feedthrough 2515 via a flexible internal electrical connection 2405, as disclosed herein.

[0110] Figure 31 This is a flowchart of another example of a method 2904 for manufacturing an x-ray apparatus 101. Method 2904 may include fabricating an x-ray source 110 within a vacuum-sealed housing 102. Method 2904 may also include performing validation tests on the x-ray source and / or recovering from validation failures, as disclosed herein. At 2914, the cathode module 1720 of the x-ray source 110 may be assembled first, and then said cathode module may be installed into the housing 102; 2914 may include pre-assembling the cathode module 1720 separately and / or independently of other components of the x-ray source 110. (The last sentence appears to be incomplete and possibly refers to a different method.) Figure 29 Method 2900 assembles cathode module 1720.

[0111] At 2924, the assembled cathode module 1720 can be installed into the housing 102 of the x-ray source 110. The cathode module 1720 can be installed through the access port 108 of the housing 102. The assembled cathode module 1720 can be secured by cathode mount 1729 and / or one or more cathode mounts 1925, as disclosed herein. The assembled cathode module 1720 can be installed at the end stage of the manufacturing process of the x-ray source 110. As used herein, the end stage refers to a stage in the manufacturing process after the completion of one or more other stages or steps. For example, it can be installed after the anode assembly 2330 of the x-ray source 110 (e.g., after the completion of the anode assembly 2330 of the x-ray source 110). Figure 30 (After the anode assembly method 2902) install the pre-assembled cathode module 1720.

[0112] At 2934, the inlet port 108 of the housing 102 can be vacuum-sealed by the sealing system 150, as disclosed herein. The sealing system 150 may include a primary vacuum seal 151 and a secondary seal 152, the secondary seal 152 being configured to protect the internal volume 106 from contamination during removal of the primary vacuum seal 151, as disclosed herein. Alternatively, the sealing system 150 may include a releasable vacuum seal 1152, as disclosed herein.

[0113] At 2944, the functionality of the x-ray source 110 within the vacuum-sealed housing 102 can be tested and / or verified. If the x-ray source 110 passes the verification test, the process continues to 2964. However, if one or more components of the x-ray source 110 fail the verification test at 2944, the process can continue to 2954. At 2954, the sealing system 150 can be used to repair or replace one or more components of the x-ray source 110. In some embodiments, the vacuum seal above the entry port 108 can be removed by breaking the primary seal 151 (e.g., by removing the cover 154 from the entry port 108 during debris generation). In these embodiments, the secondary seal 152 protects the internal volume 106 of the housing 102 from contamination. Alternatively, the entry port 108 can be exposed by removing the releasable vacuum seal 1152, as disclosed herein. At 2954, the sealing system 150 can also be configured to reseal the housing 102 to allow for testing and verification again at 2944. Resealing the inlet port 108 may include reforming the primary seal 151 (e.g., by welding a new cap 154 ​​onto the inlet port 108). Alternatively, the inlet port 108 may be vacuum-sealed by a releasable vacuum seal 1152 disclosed herein (e.g., by resealing a temporary cap 1154 onto the inlet port 108).

[0114] At point 2964, testing and validation of the x-ray source 110 can be successfully completed. Fabrication of the x-ray apparatus 101 can be completed. In some embodiments, the primary seal 151 and the corresponding secondary seal 152 formed by the sealing system 150 can be maintained when the x-ray source 110 is put into service. In other embodiments, the releasable vacuum seal 1152 can be removed and replaced with the primary vacuum seal 151. The primary vacuum seal 151 can be configured to vacuum seal the production cover 1156 over the inlet port 108 (replacing the temporary cover 1154 used during testing and validation).

[0115] In one embodiment, the number of fasteners 1726 for securing the cathode stack 1722 to the support structure 1920 of the assembled cathode module 1720 is greater than the number of cathode mounts 1729, 1925 for attaching, securing, or aligning the assembled cathode module 1720 within the housing 102 or to the body 104 of the housing 102. The number of fasteners 1726 for securing the cathode stack 1722 to the support structure 1920 of the assembled cathode module 1720 may be two, four, or eight times greater than the number of cathode mounts 1729, 1925 for attaching, securing, or aligning the assembled cathode module 1720 within the housing 102 or to the body 104 of the housing 102.

[0116] X-ray apparatus 101 includes: entry ports 108, 108M, 108N, the entry ports being configured to receive a cathode 120 within the internal volume of a housing 102 of the X-ray apparatus 101; first vacuum seals 151, 151A-151N, the first vacuum seals being configured to seal a cover over the entry ports 108, 108M, 108N; and second seals 152, 152A-152J, the second seals being configured to seal a cover over the entry ports 108, 108M, 108N, the second seals 152, 152A-152J remaining between the first vacuum seals 151, 151A-151N and the internal volume of the housing 102 during removal of the first vacuum seals 151, 151A-151N.

[0117] In some embodiments, first vacuum seals 151, 151A-151N are formed on a first path surrounding inlet ports 108, 108M, 108N, and second seals 152, 152A-152J include physical overlap between the cover and housing 102 on a second path surrounding inlet ports 108, 108M, 108N, the second path being disposed between the first path and the periphery of the inlet ports.

[0118] In some implementations, access ports 108, 108M, and 108N are one of a plurality of access ports, each configured to receive cathode 120 within the internal volume 106 of housing 102 of x-ray apparatus 101.

[0119] In some embodiments, the secondary seals 152, 152A-152J include a protrusion 1004 configured to engage with a channel 1002 formed in one or more of the outer surface of the housing 102 and the inner surface of the covers 154, 154A-154H, 1154, 1154J-1154N.

[0120] In some embodiments, the X-ray apparatus 101 further includes releasable mechanisms 1152, 1152J-1152N configured to seal temporary covers 1156, 1156J-1156N over inlet ports 108, 108M, 108N, wherein first vacuum seals 151, 151A-151N are configured to replace releasable vacuum seals 1152, 1152J-1152N with permanent vacuum seals.

[0121] In some embodiments, cathode 120 is one of a plurality of cathodes 120 of x-ray apparatus 101; inlet ports 108, 108M, 108N are configured to receive pre-assembled cathode modules 1720, 1720O-1720T comprising a plurality of cathodes 120, the pre-assembled cathodes comprising a cathode stack 1722 comprising a plurality of plates 1724 which are aligned and fixed in a prescribed manner.

[0122] In some implementations, each of the cathodes 120 includes a plurality of emitters 1927.

[0123] In some embodiments, the x-ray apparatus 101 further includes: a plurality of openings formed through a plurality of plates of cathode stack 1722; a plurality of fasteners 1926, each fastener 1926 passing through a corresponding opening among the plurality of openings formed through the cathode stack 1722 to a support structure 1920 of cathode modules 1720, 1720O-1720T; and compression plates 2026, 2026S-2026T, wherein a single opening among the plurality of openings formed through the cathode stack 1722 is disposed between adjacent pre-assembled cathodes of cathode modules 1720, 1720O-1720T, and wherein the fasteners 1926 are configured to secure the cathode stack 1722 between the compression plates 2026, 2026S-2026T and the support structure 1920.

[0124] In some embodiments, the X-ray apparatus 101 further includes: a plurality of cathode modules 1720, 1720O-1720T, each cathode module 1720, 1720O-1720T including one or more cathodes and compression plates 2026, 2026S-2026T, the compression plates being configured to secure a cathode stack 1722 of one or more cathodes to a focusing electrode; and at least one internal electrical connector connected between the plurality of cathode modules 1720, 1720O-1720T.

[0125] In some embodiments, the X-ray apparatus 101 further includes: an anode assembly comprising a plurality of anode modules 2430, 2430W-2430X, each anode module 2430, 2430W-2430X comprising one or more anodes; and a plurality of supports, each support configured to secure a corresponding anode module of the plurality of anode modules of the anode assembly within the internal volume of the housing 102 such that each anode module of the anode assembly is secured by a single support of the plurality of supports.

[0126] Some embodiments include a method comprising: sealing entry ports 108, 108M, 108N of a housing 102 using first vacuum seals 151, 151A-151N and secondary seals 152, 152A-152J, 1152, 1152J-1152N, the housing 102 having an internal volume including an X-ray source; and removing the first vacuum seals 151, 151A-151N from the entry ports 108, 108M, 108N of the housing. 51N includes using secondary seals 152, 152A-152J, 1152, 1152J-1152N to protect the internal volume of the housing 102 from contamination during the removal of the first vacuum seals 151, 151A-151N; and resealing the inlet ports 108, 108M, 108N of the housing 102 using the first vacuum seals 151, 151A-151N after the removal of the first vacuum seals 151, 151A-151N.

[0127] In some embodiments, sealing the inlet ports 108, 108M, 108N includes: forming secondary seals 152, 152A-152J, 1152, 1152J-1152N between the first vacuum seals 151, 151A-151N and the internal volume of the housing; and sealing a first cover over the inlet ports 108, 108M, 108N using the first vacuum seals 151, 151A-151N.

[0128] In some implementations, resealing the inlet ports 108, 108M, 108N also includes reforming secondary seals 152, 152A-152J, 1152, 1152J-1152N.

[0129] In some embodiments, the first vacuum seals 151, 151A-151N include a welded portion that attaches the cover to the housing, and removing the first vacuum seals 151, 151A-151N includes milling the welded portion.

[0130] In some embodiments, the method further includes, before sealing the entry ports 108, 108M, 108N of the housing 102 using first vacuum seals 151, 151A-151N and secondary seals 152, 152A-152J, 1152, 1152J-1152N: forming releasable vacuum seals 1152, 1152J-1152N, the releasable vacuum seals being configured to seal a temporary cover over the entry ports 108, 108M, 108N; testing the X-ray source 110; removing the releasable vacuum seals 1152, 1152J-1152N; and after removing the releasable vacuum seals, sealing the entry ports 108, 108M, 108N using the first vacuum seals 151, 151A-151N.

[0131] In some embodiments, the method further includes: assembling cathode modules 1720, 1720O-1720T, the cathode modules including a plurality of cathodes 120, the cathodes 120 including a cathode stack 1722, the cathode stack including a plurality of plates 1724 aligned and fixed in a specified manner; and installing the assembled cathode modules 1720, 1720O-1720T into the internal volume of the housing 102 through access ports 108, 108M, 108N.

[0132] In some embodiments, assembling the cathode modules 1720, 1720O-1720T includes: forming a plurality of openings through the cathode stack 1722 such that a single opening through the cathode stack 1722 is formed between each pair of adjacent cathodes of the cathode modules 1720, 1720O-1720T; and clamping one or more compression plates 2026, 2026S-2026T onto the cathode stack 1722 by a plurality of fasteners 1926, each fastener 1926 being installed through a corresponding opening in the plurality of openings. In some embodiments, the cathode modules 1720, 1720O-1720T can be attached to the body 104 or the housing 102 using very few fasteners.

[0133] In some embodiments, the method further includes: forming an anode assembly 2330U-2330X comprising a plurality of anode modules 2430, 2430W-2430X, each anode module 2430, 2430W-2430X comprising one or more anodes 130; and mounting each anode module 2430, 2430W-2430X of the anode assembly 2330U-2330X within a housing 102 by a single support among a plurality of structurally independent supports.

[0134] Some embodiments include an x-ray apparatus 101, the x-ray apparatus comprising: a component for generating x-rays; a component for maintaining a vacuum around the component for generating x-rays, the component comprising: a component for entering an internal volume of the component for maintaining a vacuum around the component for generating x-rays; a component for vacuum sealing the component for entering the internal volume; and a component for protecting the internal volume from contamination during removal of the component for vacuum sealing the component for entering the internal volume.

[0135] Examples of components for generating X-rays include an X-ray source 110, a cathode 120, an anode 130, etc. Examples of components for maintaining a vacuum around the components for generating X-rays include a housing 102, a body 104, a cover 154, etc. Examples of components for entering the internal volume of the components used to maintain a vacuum around the components for generating X-rays include entry ports 108, 108M, 108N, etc. Examples of components for vacuum sealing the components used to enter the internal volume include first vacuum seals 151, 151A-151N, etc. Examples of components for protecting the internal volume from contamination during the removal of components used to vacuum seal the components used to enter the internal volume include secondary seals 152, 152A-152J, 1152, 1152J-1152N, etc.

[0136] In some embodiments, the X-ray apparatus 101 further includes a component for temporarily vacuum sealing the component for accessing the internal volume before attaching a component for vacuum sealing the component for accessing the internal volume. Examples include releasable vacuum seals 1152, 1152J-1152N, temporary covers 1154, etc.

[0137] Some embodiments include an X-ray device 101, the X-ray device comprising: a housing 102; an anode assembly 2330U-2330X, the anode assembly including a plurality of anode modules 2430, 2430W-2430X, 2430, 2430W-2430X, each anode module anode 130; and a plurality of supports 2335, 2335W-2335X, each support 23... 35, 2335W-2335X are configured to fix the corresponding anode modules 1302430, 2430W-2430X of the anode assembly 2330U-2330X within the internal volume of the housing 102 such that each anode module anode 1302430, 2430W-2430X of the anode assembly 2330U-2330X is fixed by a single support 2335, 2335W-2335X among the plurality of supports 2335, 2335W-2335X.

[0138] In some implementations, each anode module anode 1302430, 2430W-2430X of the anode assembly 2330U-2330X is structurally separated from the adjacent anode modules 2430, 2430W-2430X of the anode assembly 2330U-2330X by one or more gaps.

[0139] In some embodiments, the gap is configured to structurally isolate each anode module anode 1302430, 2430W-2430X of the anode assembly 2330U-2330X during operation from the thermal expansion of any other anode module in the anode modules 2430, 2430W-2430X of the anode assembly 2330U-2330X.

[0140] In some embodiments, the X-ray apparatus 101 further includes a flexible electrical connector for each adjacent pair of anode modules 2430, 2430W-2430X, 2430, 2430W-2430X, the flexible electrical connector electrically connecting the pairs of anode modules 2430, 2430W-2430X together.

[0141] In some embodiments, the x-ray apparatus 101 also includes a common power feedthrough that penetrates the housing 102 and is electrically connected to one of the anode modules 2430, 2430W-2430X.

[0142] In some embodiments, the support is also configured to electrically isolate the anode modules 2430, 2430W-2430X of the anode assemblies 2330U-2330X from at least one of the housing 102 and the cathode.

[0143] In some implementations, the support includes a ceramic support.

[0144] In some implementations, each anode module 2430, 2430W-2430X of the anode assembly 2330U-2330X includes a corresponding feedthrough that extends through a single support structure of the anode module 2430, 2430W-2430X.

[0145] In some implementations, each anode module anode 1302430, 2430W-2430X includes multiple targets 132.

[0146] Some embodiments include a method comprising: mounting a plurality of anode modules 2430, 2430W-2430X within a housing 102 of an x-ray apparatus 101, each anode module 2430, 2430W-2430X having a single support member, wherein gaps are formed between adjacent anode modules 2430, 2430W-2430X, 2430, 2430W-2430X; and each anode module 2430, 2430W-2430X including at least one anode 130; and electrically connecting each of the anode modules 2430, 2430W-2430X, 2430, 2430W-2430X through the housing 102 of the x-ray apparatus 101.

[0147] In some embodiments, the method further includes electrically connecting adjacent anode modules 2430, 2430W-2430X together across an associated gap.

[0148] In some implementations, the method further includes electrically connecting each anode module 2430, 2430W-2430X to the anode module 2430, 2430W-2430X via an associated single support.

[0149] In some embodiments, the method further includes an electrical connection via a single bar power feedthrough through the housing 102 of the x-ray apparatus 101 to each of the anode modules 2430, 2430W-2430X.

[0150] Some embodiments include an x-ray device 101, the x-ray device comprising: a component for containing a vacuum; a component for generating an electron beam; a plurality of separate components for generating x-rays in a vacuum; and, for each of the separate components for generating x-rays in a vacuum, a component for individually supporting the component for generating x-rays in a vacuum.

[0151] Examples of components for containing a vacuum include housing 102, body 104, cover 154, 154A-154H, 1154, etc. Examples of components for generating an electron beam include cathode 120, etc. Examples of individual components for generating X-rays in a vacuum include anode modules 2430, 2430W-2430X, 2430, 2430W-2430X, etc. Examples of components for individually supporting the component for generating X-rays in a vacuum include support members 2335, 2335W-2335X, etc.

[0152] In some embodiments, for each of the components used to individually support the component used to generate x-rays in a vacuum, the x-ray apparatus 101 also includes a component for electrically connecting to the component used to generate x-rays in a vacuum via the component used to individually support the component used to generate x-rays in a vacuum. Examples of components for electrical connection include feedthrough 2435, etc.

[0153] In some embodiments, the x-ray apparatus 101 also includes a single component for electrical connection via a component for containing a vacuum to a separate component for generating x-rays within the vacuum. An example of a single component for electrical connection via a component for containing a vacuum includes a feedthrough 2415.

[0154] In some embodiments, the x-ray apparatus 101 also includes at least one component for flexibly electrically connecting a pair of adjacent individual components used to generate x-rays in a vacuum. Examples of components for flexible electrical connection include flexible internal electrical connector 2405, etc.

[0155] Some embodiments include an x-ray device 101, the x-ray device comprising: a vacuum housing 102; cathode modules 1720, 1720O-1720T, the cathode modules being disposed within the vacuum housing 102, the cathode modules comprising: a support structure; compression plates 2026, 2026S-2026T; and a cathode stack 1722 sandwiched between the support structure and the compression plates 2026, 2026S-2026T, wherein the cathode stack 1722 comprises a plurality of plates 1724 aligned and fixed in a prescribed manner.

[0156] In some implementations, the cathode modules 1720, 1720O-1720T include multiple cathodes, each cathode 120 including at least one emitter 1927.

[0157] In some embodiments, the x-ray apparatus 101 further includes: a plurality of openings formed through the cathode stack 1722; and a plurality of fasteners 1926, each fastener 1926 being secured to a support structure of the cathode modules 1720, 1720O-1720T through a corresponding opening among the plurality of openings.

[0158] In some embodiments, only a single opening of the plurality of openings formed by the cathode stack 1722 and a corresponding single fastener 1926 of the plurality of fasteners 1926 are disposed between adjacent cathodes of cathode modules 1720, 1720O-1720T.

[0159] In some implementations, compression plates 2026, 2026S-2026T are one of a plurality of compression plates 2026, 2026S-2026T; cathode stack 1722 is clamped between the support structure and the compression plates 2026, 2026S-2026T; and each of the plurality of fasteners 1926 is configured to align and fix the cathode stack 1722 in a predetermined manner between the support structure and the corresponding compression plate of the compression plates 2026, 2026S-2026T.

[0160] In some embodiments, cathode modules 1720, 1720O-1720T are one of a plurality of cathode modules 1720, 1720O-1720T housed in a vacuum housing 102; and one or more internal electrical connections are configured to connect each cathode stack 1722 of the plurality of cathode modules 1720, 1720O-1720T to a common electrical feedthrough 1815.

[0161] In some embodiments, the cathode stack 1722 includes a ground plane, and the ground plane is electrically connected to a common grounding connection via internal electrical connections of the cathode modules 1720, 1720O-1720T.

[0162] In some embodiments, the x-ray apparatus 101 further includes one or more internal electrical connections configured to connect the ground plane of the cathode stack 1722 to the ground plane of the cathode stack 1722 adjacent to the cathode modules 1720, 1720O-1720T.

[0163] In some implementations, the support structure includes a focusing electrode.

[0164] In some implementations, the cathode 120 of the cathode module 1720, 1720O-1720T includes a nanotube emitter.

[0165] Some embodiments include a method comprising: stacking a plurality of plates on a support structure, the plurality of plates forming a plurality of cathodes of a plurality of x-ray sources; stacking at least one compression plate 2026, 2026S-2026T on the stacked plates on the support structure; and fastening the compression plate 2026, 2026S-2026T to the support structure to form cathode modules 1720, 1720O-1720T.

[0166] In some embodiments, the method further includes, after fastening the compression plates 2026, 2026S-2026T to the support structure to form the cathode modules 1720, 1720O-1720T, installing the cathode modules 1720, 1720O-1720T into the internal volume of the vacuum housing 102.

[0167] In some implementations, the support structure includes a focusing electrode, and stacking the plates on the support structure also includes securing the plates to be aligned with the focusing electrode.

[0168] In some embodiments, stacking at least one compression plate 2026, 2026S-2026T on a support structure includes stacking multiple compression plates 2026, 2026S-2026T on a support structure.

[0169] In some implementations, the method further includes securing each of the compression plates 2026, 2026S-2026T to the support structure using a single fastener.

[0170] Some embodiments include an X-ray apparatus 101, which includes: a component for containing a vacuum; a plurality of components for emitting electrons within the vacuum; a support component; and a component for clamping the plurality of components for emitting electrons within the vacuum to the support component. Examples of the component for containing the vacuum include a housing 102, a body 104, a cover 154, 154A-154H, 1154, etc. Examples of the component for emitting electrons within the vacuum include a cathode 120, etc. Examples of the support component include a support structure 1920, etc. Examples of the clamping component include a compression plate 2026, etc.

[0171] In some embodiments, the X-ray apparatus 101 also includes a plurality of components for fastening the clamping components to the supporting components. Examples of the fastening components include fasteners 1726, etc.

[0172] In some implementations, a single component for fastening is positioned between each pair of components for emitting electrons in a vacuum.

[0173] In some embodiments, the X-ray apparatus 101 also includes a component for attaching a support component to a component for containing a vacuum. Examples of components for attaching the support component include fasteners 1726, etc.

[0174] Although structures, apparatus, methods, and systems have been described with respect to specific embodiments, those skilled in the art will readily recognize that many variations can be made to the specific embodiments, and therefore any variations should be considered within the spirit and scope disclosed herein. Consequently, those skilled in the art can make many modifications without departing from the spirit and scope of the appended claims.

[0175] The claims accompanying this written disclosure are hereby expressly incorporated into this written disclosure, wherein each claim is an independent embodiment. This disclosure includes all permutations of the independent claims and their dependent claims. Furthermore, additional embodiments that can be derived from the appended independent and dependent claims are also expressly incorporated into this written description. These additional embodiments are identified by replacing the dependency relationship of a given dependent claim with the phrase “any claim that begins with claim [x] and ends with the claim immediately following it,” wherein the parenthesized term “[x]” is replaced with the number of the most recently stated independent claim. For example, for the first group of claims beginning with independent claim 1, claim 4 may be dependent on any one of claims 1 and 3, wherein these independent dependencies produce two different embodiments; claim 5 may be dependent on any one of claims 1, 3, or 4, wherein these individual dependencies produce three different embodiments; claim 6 may be dependent on any one of claims 1, 3, 4, or 5, wherein these individual dependencies produce four different embodiments; and so on.

[0176] The use of the term "first" in a claim relating to a feature or element does not necessarily imply the presence of a second or additional such feature or element. According to 35 U.S.SC §112(f), elements specifically described in a component-plus-function format (if present) are intended to be interpreted as encompassing the corresponding structure, material, or action described herein and its equivalents. Embodiments of the invention that claim proprietary nature or privilege are defined as follows.

Claims

1. An X-ray device, the X-ray device comprising: An inlet port, configured to receive a cathode within the internal volume of the housing of the x-ray apparatus; A first vacuum seal is configured to seal the cover over the inlet port; as well as A second seal is configured to seal the cover over the inlet port, and the second seal is maintained between the first vacuum seal and the internal volume of the housing during removal of the first vacuum seal. The cover includes a central section and a lip extending radially from the central section, wherein the second seal is at least partially formed by the central section, which physically engages with the periphery of the inlet port.

2. The X-ray apparatus as claimed in claim 1, wherein: The first vacuum seal is formed on a first path surrounding the inlet port, and The second seal includes a physical overlap between the cover and the housing on a second path around the entry port, the second path being positioned between the first path and the periphery of the entry port.

3. The x-ray apparatus of claim 1, wherein the access port is one of a plurality of access ports, each of the access ports being configured to receive a cathode within the internal volume of the housing of the x-ray apparatus.

4. The X-ray apparatus of claim 1, wherein the second seal includes a protrusion configured to engage with a channel formed in one or more of the outer surface of the housing and the inner surface of the cover.

5. The X-ray apparatus of claim 1, further comprising a releasable mechanism configured to seal a temporary cover over the inlet port, wherein the first vacuum seal is configured to replace the releasable vacuum seal with a permanent vacuum seal.

6. The X-ray apparatus as claimed in claim 1, wherein: The cathode is one of a plurality of cathodes in the x-ray device; The inlet port is configured to receive a pre-assembled cathode module comprising a plurality of cathodes, the pre-assembled cathodes comprising a cathode stack comprising a plurality of plates aligned and fixed in a prescribed manner.

7. The X-ray apparatus of claim 6, wherein each of the cathodes comprises a plurality of emitters.

8. The X-ray apparatus of claim 6, further comprising: Multiple openings are formed through the multiple plates of the cathode stack; Multiple fasteners, each fastener passing through a corresponding opening in one of the multiple openings of the cathode stack, are secured to the support structure of the cathode module; as well as A compression plate, wherein a single opening formed through one of the plurality of openings in the cathode stack is disposed between adjacent pre-assembled cathodes of the cathode module, and wherein the fastener is configured to secure the cathode stack between the compression plate and the support structure.

9. The x-ray apparatus according to any one of claims 1 to 8, wherein the x-ray apparatus further comprises: Multiple cathode modules, each cathode module including one or more cathodes and a compression plate, the compression plate being configured to stack and fix the cathodes of the one or more cathodes to a focusing electrode; as well as At least one internal electrical connector is connected between the plurality of cathode modules.

10. The x-ray apparatus of any one of claims 1 to 8, wherein the x-ray apparatus further comprises: An anode assembly, comprising a plurality of anode modules, each anode module comprising one or more anodes; as well as Multiple support members, each configured to secure a corresponding anode module of the anode assembly within the internal volume of the housing, such that each anode module of the anode assembly is secured by a single support member of the multiple support members.

11. A method, the method comprising: The inlet port of the housing is sealed by a first vacuum seal and a secondary seal between the cover and the housing, the housing having an internal volume including an X-ray source, the housing defining a recess adjacent to the inlet port such that the cover can be fitted into the recess, wherein the secondary seal is formed between the overlapping and physically joined surfaces of the cover and the recess. Remove the first vacuum seal from the inlet port of the housing, wherein removing the first vacuum seal includes protecting the internal volume of the housing from contamination during the removal of the first vacuum seal using the secondary seal; as well as After the first vacuum seal is removed, the first vacuum seal is used to reseal the inlet port of the housing.

12. The method of claim 11, wherein sealing the inlet port comprises: The secondary seal is formed between the first vacuum seal and the internal volume of the housing; as well as The first vacuum seal is used to seal the cover over the inlet port.

13. The method of claim 12, wherein resealing the inlet port further comprises reforming the secondary seal.

14. The method of claim 12, wherein the first vacuum seal includes a welded portion that attaches the cover to the housing, and wherein removing the first vacuum seal includes milling the welded portion.

15. The method of claim 11, further comprising, before sealing the inlet port of the housing using the first vacuum seal and the secondary seal: A releasable vacuum seal is formed, the releasable vacuum seal being configured to seal a temporary cover over the inlet port; Test the X-ray source; Remove the releasable vacuum seal; After the releasable vacuum seal is removed, the inlet port is sealed using the first vacuum seal.

16. The method of claim 11, further comprising: Assemble a cathode module, the cathode module comprising a plurality of cathodes, the cathodes comprising a cathode stack, the cathode stack comprising a plurality of plates aligned and fixed in accordance with a specified method; as well as The cathode module is installed into the internal volume of the housing through the access port.

17. The method of claim 16, wherein assembling the cathode module comprises: Multiple openings are formed through the cathode stack, such that a single opening through the cathode stack is formed between each pair of adjacent cathodes in the cathode module; as well as One or more compression plates are clamped on the cathode stack by multiple fasteners, each fastener being installed through a corresponding opening in the plurality of openings.

18. The method of any one of claims 11 to 17, further comprising: An anode assembly is formed, the anode assembly comprising multiple segments, and each anode module comprising one or more anodes; as well as Each anode module of the anode assembly is mounted within the housing via a single support among multiple structurally independent support members.

19. An X-ray apparatus, the X-ray apparatus comprising: X-ray source; A housing for maintaining a vacuum around the X-ray source, the housing comprising: An access port is provided for accessing the internal volume of the housing. A first vacuum seal between the cover and the inlet port for vacuum sealing the inlet port; and A second seal, used to protect the internal volume from contamination during removal of the first vacuum seal, is defined by a channel formed in one of the housing or the lid and a protrusion formed in and extending from the other of the housing or the lid.

20. The x-ray apparatus of claim 19, further comprising: A resealable vacuum seal for temporarily vacuum sealing the inlet port before attaching the first vacuum seal.

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