Wafer chuck, robot system, communication method, and robot teaching method

Abstract

A wafer chuck for a robot having a hand with a light projecting portion and a light receiving portion. The light receiving portion detects detection light irradiated from the light projecting portion. The wafer chuck is provided with a light source that irradiates a notification light toward the light receiving portion. Information is output to the hand side by irradiating the notification light from the light source toward the light receiving portion.

Description

Technical Field

[0001] This disclosure relates to the use of a fixture on a robot that manipulates wafers. Background Technology

[0002] Previously, a robotic system was known to be configured in a cleanroom for manufacturing semiconductor wafers (semiconductor substrates) and to automatically teach the robot transporting the semiconductor wafers the transport position. Patent Document 1 discloses such a robotic arm for substrate transport.

[0003] Patent Document 1 discloses a robotic arm for transporting substrates, comprising a hand capable of holding a teaching gripper and an arm supporting the hand. In this robotic arm, a signal transmission cable for the teaching gripper, extending from the gripper, is connected via a connector at the end of the hand and guided into the arm to connect to a controller. In the configuration of Patent Document 1, the signal transmission cable for the teaching gripper is maintained in a constant position during teaching operations. Patent Document 1 thus avoids the problem of the cable being caught by surrounding devices, potentially damaging the gripper or other devices.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2010-137300 Summary of the Invention

[0007] The technical problem that the invention aims to solve

[0008] In the configuration of Patent Document 1, a cable is required to connect the gripper and the robot controller in order to transmit electrical signals. This presents difficulties in aspects such as miniaturization of the gripper. In addition, the requirement for a cable may sometimes be unsuitable for applications involving semiconductors that are prone to generating dust.

[0009] In view of this, the purpose of this disclosure is to provide a wafer jig that does not require a communication cable with a robot, and a robot system using the wafer jig.

[0010] Technical solutions used to solve the problem

[0011] The problem that this disclosure seeks to solve has been explained above. The means used to solve this problem and their effectiveness are described below.

[0012] According to a first aspect of this disclosure, a wafer jig with the following structure is provided. Specifically, the wafer jig is used for a robot having a hand, the hand having a light-projecting part and a light-receiving part for detecting detection light emitted from the light-projecting part. The wafer jig includes a light source for illuminating notification light toward the light-receiving part. The wafer jig outputs information to the hand side by illuminating the notification light toward the light-receiving part through the light source.

[0013] According to a second aspect of this disclosure, a wafer jig with the following structure is provided. That is, the wafer jig is used for a robot having a hand, the hand having a light-projecting portion and a light-receiving portion for detecting detection light emitted from the light-projecting portion. The wafer jig includes a jig light-receiving portion capable of detecting light emitted from the light-projecting portion of the hand.

[0014] According to a third aspect of this disclosure, a wafer jig with the following structure is provided. Specifically, this wafer jig is used for a robot with a hand, the hand having a light-projecting part and a light-receiving part for detecting detection light emitted from the light-projecting part. The wafer jig has a light switching part. The light switching part is capable of switching between a state where the light-receiving part receives the detection light from the light-projecting part and a state where it does not receive the detection light. Information is output to the hand side through the switching of the light switching part.

[0015] According to a fourth aspect of this disclosure, the following communication method is provided. That is, in this communication method, the wafer jig transmits information towards the hand side between the robot and the wafer jig. The robot has a hand, which includes a light-projecting part and a light-receiving part. The light-receiving part detects detection light emitted from the light-projecting part. The wafer jig can be held by the hand. The communication method includes a first step and a second step. In the first step, the wafer jig is held by the hand. In the second step, a light source provided by the wafer jig emits notification light corresponding to the information towards the light-receiving part.

[0016] Therefore, the wafer jig can communicate with the robot (and consequently, the control unit that controls the robot) using a portion of the robot's structure (the light-projecting part and the light-receiving part). Since no communication cable is required, the wafer jig can be miniaturized, simplified, and lightweight, while still maintaining the robot's degrees of freedom of movement appropriately.

[0017] The benefits of invention

[0018] According to this disclosure, a wafer jig that does not require a communication cable to communicate with a robot, and a robot system using the wafer jig, can be provided. Attached Figure Description

[0019] Figure 1This is a perspective view showing the structure of the robot system disclosed herein;

[0020] Figure 2 It is a block diagram showing the structure of a part of the robot system;

[0021] Figure 3 This is a top view showing the structure of the wafer fixture according to the first embodiment;

[0022] Figure 4 This is a side view showing the structure of the wafer fixture according to the first embodiment;

[0023] Figure 5 It is a partial perspective view showing the condition of the object being inspected using the wafer fixture of the first embodiment;

[0024] Figure 6 This is a top view showing the structure of the wafer fixture according to the second embodiment;

[0025] Figure 7 This is a side view showing the structure of the wafer fixture according to the second embodiment;

[0026] Figure 8 This is a partial perspective view showing the condition of the object being inspected using the wafer jig of the second embodiment; and

[0027] Figure 9 This is a partial perspective view showing the condition of the object being inspected using the wafer fixture of the third embodiment.

[0028] Explanation of reference numerals in the attached figures

[0029] 1. Robot 2. 2x, 2y wafer fixture

[0030] 5. Controller (Control Unit) 6. Positioning Sensor

[0031] 9. 9x Object 10 Hand

[0032] 22 Object detection sensor (sensor) 23 Obstruction (blocking part)

[0033] 24 transmitters (light sources) 61 projection units

[0034] 62 Light Receiving Units 100 Robot System Detailed Implementation

[0035] The embodiments of this disclosure will now be described with reference to the accompanying drawings. Figure 1 This is a perspective view showing the structure of the robot system 100 disclosed herein. Figure 2 This is a block diagram showing the structure of a part of the robot system 100. Figure 3 This is a top view showing the structure of the wafer fixture 2 according to the first embodiment. Figure 4This is a side view showing the structure of the wafer fixture 2 according to the first embodiment. Figure 5 This is a partial perspective view showing the condition of the object 9 being inspected using the wafer jig 2 according to the first embodiment.

[0036] Figure 1 The robot system 100 shown is a system that enables robot 1 to work in a cleanroom or other workspace. The robot system 100 is capable of automatic teaching, such as effectively and correctly teaching the position of robot 1 (specifically, the hand 10 described later).

[0037] The robot system 100 includes a robot 1, a wafer fixture (communication fixture) 2, and a controller (control unit) 5.

[0038] Robot 1, for example, functions as a wafer transfer robot for transporting wafers stored in a storage device (not shown). In this embodiment, robot 1 is implemented as a SCARA-type horizontal articulated robot. SCARA is an abbreviation for Selective Compliance Assembly Robot Arm.

[0039] like Figure 1 As shown, robot 1 has a hand (end effector) 10, a robotic arm 11, and a posture detection unit 12.

[0040] The hand 10 is a type of end effector, typically appearing as a V or U shape when viewed from above. The hand 10 is supported at the front end of the robotic arm 11 (specifically, the second link 16 described later). The hand 10 rotates relative to the second link 16 about a third axis c3 extending vertically.

[0041] In robot 1 of this embodiment, as Figure 1 As shown, a positioning sensor (optical sensor) 6 is provided on the front end of the hand part 10. The positioning sensor 6 enables non-contact confirmation (positioning) of the presence or absence of objects such as wafers. In this embodiment, the positioning sensor 6 is, for example, a transmissive sensor, which has a light-emitting part 61 and a light-receiving part 62.

[0042] The light-projecting part 61 and the light-receiving part 62 are arranged at appropriate intervals when viewed from above, off to one side (the front end side of the hand 10). Here, the center of the hand 10 refers to the position that coincides with the center of the wafer when the hand 10 is held in a circular wafer position.

[0043] The light-projecting unit 61 illuminates the light-receiving unit 62 with detection light, such as infrared light. The light-receiving unit 62 is connected to the controller 5 wirelessly or via a wired connection. The light-receiving unit 62 outputs an electrical signal to the controller 5 to indicate whether the detection light has been received.

[0044] When there is no object between the projection section 61 and the receiving section 62, the receiving section 62 outputs an electrical signal indicating that it has received light because the detection light from the projection section 61 reaches the receiving section 62. When there is an object between the projection section 61 and the receiving section 62, the detection light from the projection section 61 is blocked by the object, so the receiving section 62 outputs an electrical signal indicating that it has not received light.

[0045] The robotic arm 11 mainly includes a base 13, a lifting shaft 14, and multiple links (here, the first link 15 and the second link 16).

[0046] The base 13 is fixed to the ground (e.g., the floor of a cleanroom). The base 13 functions as a base component supporting the lifting shaft 14.

[0047] The lifting shaft 14 moves relative to the base 13 in the vertical direction. By lifting it, the height of the first link 15, the second link 16, and the hand 10 can be changed.

[0048] The first link 15 is supported on the upper part of the lifting shaft 14. The first link 15 rotates relative to the lifting shaft 14 about a first shaft c1 extending in the vertical direction. As a result, the posture of the first link 15 can be changed in the horizontal plane.

[0049] The second link 16 is supported at the front end of the first link 15. The second link 16 rotates relative to the first link 15 about a second axis c2 extending in the vertical direction. As a result, the posture of the second link 16 can be changed in the horizontal plane.

[0050] The posture detection unit 12 includes multiple rotation sensors 12a. The rotation sensors 12a are, for example, encoders. Each rotation sensor 12a detects each rotational position of the drive motors (not shown) driving the hand 10, the first link 15, and the second link 16. Each rotation sensor 12a is electrically connected to the controller 5 and transmits the detected rotational position to the controller 5.

[0051] Wafer fixture 2 is a fixture that simulates wafer forming, and its overall shape is roughly circular. For example... Figure 3 As shown, the wafer fixture 2 has a body 21, an object detection sensor 22, a block (shielding part) 23, and a transmitter (light source) 24.

[0052] The body 21 is formed into a circular flat plate. The diameter of the body 21 is equal to the diameter of the wafer that is transported by the robot 1. As long as the shape of the body 21 substantially simulates the wafer, the material of the body 21 does not need to be the same as the wafer.

[0053] The object detection sensor 22 is used to detect the object 9. The object detection sensor 22 is, for example, a reflective sensor, which includes a light-emitting part and a light-receiving part. The light-emitting part and the light-receiving part of the object detection sensor 22 are located at the lower part of the circular body 21, at its center. The optical axis of the light emitted by the object detection sensor 22 is located on the central axis of the body 21.

[0054] like Figure 5 As shown, the object 9 is, for example, formed into an elongated frustum-shaped cone. The object 9 is positioned vertically at a suitable location within the movable range of the hand 10. The upper surface of the object 9 is formed to reflect light. A reflective sheet or the like may also be attached to the top of the object 9.

[0055] The obstruction 23 is used to block the detection light irradiated by the projection unit 61. The obstruction 23 is provided in a manner that protrudes downward toward the body 21.

[0056] The transmitter 24 is used to illuminate the light receiving part 62 with detection light. The transmitter 24 has, for example, the same configuration as the light projector 61, and illuminates the light receiving part 62 with notification light such as infrared light. The transmitter 24 is provided to protrude downward toward the body 21.

[0057] The obstruction 23 and the transmitter 24 are arranged at appropriate intervals at a position off to one side from the center of the main body 21 when viewed from above.

[0058] Specifically, such as Figure 3 As shown, when the wafer jig 2 is held by the hand 10, both the obstruction 23 and the transmitter 24 are located on the optical path of the detection light of the positioning sensor 6 (the optical path from the light-emitting part 61 to the light-receiving part 62). At this time, the obstruction 23 is located on the side closer to the light-emitting part 61 on the optical path, and the transmitter 24 is located on the side closer to the light-receiving part 62.

[0059] When the obstruction 23 is facing the projection unit 61, it blocks the detection light from the projection unit 61. When the transmitter 24 is facing the light receiving unit 62, it irradiates notification light toward the light receiving unit 62.

[0060] In this embodiment, such as Figure 3 As shown, when the wafer jig 2 is held by the hand 10, the block 23 and the emitter 24 are symmetrically arranged about an axis A1 parallel to the extending direction of the hand 10. However, the arrangement of the block 23 and the emitter 24 is not limited to this.

[0061] like Figure 3 As shown, the wafer fixture 2 of this embodiment includes an amplifier 25 and a battery 26.

[0062] Amplifier 25 amplifies the detection signal from object detection sensor 22. Amplifier 25 is mounted on the main body 21. Amplifier 25 is electrically connected to object detection sensor 22 and battery 26. Amplifier 25 operates using power from battery 26, amplifying the detection signal received from object detection sensor 22. The voltage of the amplified detection signal is compared with a predetermined voltage using a comparator (not shown). The comparator outputs the comparison result as an operation signal to battery 26.

[0063] The battery 26 supplies power to the object detection sensor 22, amplifier 25, and transmitter 24, etc.

[0064] The battery 26 switches the transmitter 24 on / off based on the signal from the comparator. Thus, the comparator essentially functions as a light source control unit, used to control the transmitter 24 to implement the communication method of this disclosure.

[0065] The wafer jig 2 configured as described above can communicate with the controller 5 via a positioning sensor 6 located on the hand part 10. Details will be described later.

[0066] The controller 5 is configured as a known computer equipped with a CPU, ROM, RAM, and auxiliary storage devices. The auxiliary storage devices are configured as, for example, HDDs or SSDs. The auxiliary storage devices store robot control programs and other data used to control the robot 1.

[0067] The controller 5 controls the output of command values ​​to each drive motor that drives each part of the robot 1 according to a predetermined action program or movement commands input by the user, so that the hand 10 moves to the predetermined command position.

[0068] Next, the robot teaching method will be described in detail. In the robot system 100 of this embodiment, the command position of the robot 1 is corrected by means of the communication method disclosed herein and based on the detection position of the hand 10 obtained from the detection result of the wafer jig 2.

[0069] When not in use, the wafer jig 2 is stored in a suitable storage location. Robot 1, according to control instructions from controller 5, holds the wafer jig 2 in its storage location (first step). Robot 1 then transports the held wafer jig 2 to a predetermined position. After transport, the object detection sensor 22 of the wafer jig 2 is located near the object 9.

[0070] Subsequently, robot 1 moves its hand 10 and wafer jig 2 together in various directions within a suitable range when viewed from above, while scanning object 9 using object detection sensor 22. In this embodiment, the object 9 has a circular shape. Therefore, the center of the circle can be determined as long as the positions of at least three points on the circle can be detected by object detection sensor 22. In this embodiment, the center of the circle on object 9 when viewed from above becomes the reference position for position correction described later.

[0071] During the scanning process, if object 9 is detected by object detection sensor 22 on wafer fixture 2, transmitter 24 lights up; otherwise, it turns off (second step). The notification light from transmitter 24 can be detected by light-receiving part 62 on the hand 10 side. Light-receiving part 62 outputs an electrical signal to controller 5 indicating whether the notification light has been received. Thus, controller 5 can identify whether object detection sensor 22 has detected object 9 through light-receiving part 62.

[0072] When the object detection sensor 22 detects the object 9, it can also flash at a predetermined frequency instead of illuminating the transmitter 24. In this case, the controller 5 can easily distinguish between the notification light from the transmitter 24 and the detection light from the projection unit 61.

[0073] Due to tolerances of robot 1, an offset may occur between the position of the hand 10 indicating robot 1 and its actual position. According to this embodiment, the offset can be determined based on the result of scanning the object 9 through the wafer jig 2, and the command position of indicating robot 1 can be corrected.

[0074] The following is a brief explanation. The controller 5 pre-stores instruction positions for the robot 1, which correspond to three points detected by the object detection sensor 22 on the object 9. The controller 5 calculates the instruction position corresponding to the center of the circle connecting the instruction positions at the three points using a known method. If there is an offset between the calculated instruction position and the previously used instruction position to align the center of the hand 10 with the center of the object 9, the controller 5 calculates this offset. This offset can be displayed, for example, as a planar vector. The controller 5 corrects the displacement of the instruction position by subtracting the offset vector from the original instruction position. The controller 5 provides the corrected instruction position to the robot 1, thereby improving the motion accuracy of the robot 1.

[0075] The wafer jig 2 is modeled after a wafer, so the hand 10 can operate the wafer jig 2 in the same way as operating a normal wafer. Therefore, the scanning and position correction operations can be easily and automatically performed.

[0076] The wafer fixture 2 notifies the controller 5 of the detection of the object 9 by the object detection sensor 22 via the positioning sensor 6 (specifically, the light-receiving unit 62). Since information is transmitted via optical communication, cables can be eliminated. This results in a simplified and lightweight design. Furthermore, the elimination of cables reduces dust generation. Additionally, because it utilizes the positioning sensor 6, which is commonly found in robots, it is easily applicable to existing robots.

[0077] As explained above, the wafer jig 2 of this embodiment is used in a robot 1 having a hand 10, which includes a light-emitting part 61 and a light-receiving part 62. The wafer jig 2 has a transmitter 24 that irradiates notification light toward the light-receiving part 62. The wafer jig 2 outputs information to the hand 10 by irradiating notification light toward the light-receiving part 62 through the transmitter 24.

[0078] Therefore, the wafer jig 2 can communicate with the robot 1 using a portion of the robot 1's structure (light-projecting part 61 and light-receiving part 62). Since the communication cable can be eliminated, the wafer jig 2 can be miniaturized, simplified, and lightweight, while maintaining the robot 1's degrees of freedom of movement appropriately.

[0079] In addition, the wafer jig 2 of this embodiment includes a blocking element 23. When the wafer jig 2 is held by the hand 10, the blocking element 23 blocks the light path between the light-emitting part 61 and the light-receiving part 62.

[0080] Therefore, when the wafer fixture 2 is used, the light receiving part 62 can be prevented from receiving detection light from the light projecting part 61.

[0081] Furthermore, the wafer jig 2 of this embodiment includes an object detection sensor 22 for detecting the object 9. The transmitter 24 of the wafer jig 2 outputs information as to whether the object detection sensor 22 has detected the object 9.

[0082] Therefore, it is possible to identify whether object 9 is detected on the wafer fixture 2 side from the robot 1 side.

[0083] In addition, in this embodiment, the object detection sensor 22 is located at the center of the wafer fixture 2.

[0084] Therefore, since the object 9 is detected from the position corresponding to the center of the wafer fixture 2, the position of the wafer fixture 2 that detects the object 9 can be accurately determined.

[0085] In addition, in this embodiment, when the wafer jig 2 is held by the hand 10, the object detection sensor 22 is located at the center of the hand 10.

[0086] Therefore, it is possible to obtain the detection result at the center position of the hand 10, which is typically used as a reference for position control. Thus, for example, by using the detection result for position control, the motion accuracy of the robot 1 can be improved.

[0087] In addition, in the wafer fixture 2 of this embodiment, the lighting / lighting of the transmitter 24 indicates whether the object detection sensor 22 has detected the object 9.

[0088] Thus, information can be transmitted from both sides of the wafer fixture with a simple configuration.

[0089] Next, the second embodiment will be described. Figure 6 This is a top view showing the structure of the wafer fixture 2x according to the second embodiment. Figure 7 This is a side view showing the structure of the wafer fixture 2x according to the second embodiment. Figure 8 This is a partial perspective view showing the condition of inspecting the object 9x using the wafer jig 2x according to the second embodiment. Furthermore, in the description of this embodiment, sometimes the same or similar components as those in the described embodiment are given the same reference numerals as in the drawings, and descriptions are omitted.

[0090] In the wafer fixture 2x of this embodiment, as follows Figure 6 As shown, a slit portion 27 is formed on the body 21x. When the wafer jig 2x is held by the hand 10, the slit portion 27 is formed along the length direction of the hand 10, opening from the center of the body 21x toward the front end. The slit portion 27 penetrates the body 21x in the thickness direction.

[0091] The wafer jig 2x of this embodiment includes two object detection sensors 22. Both object detection sensors 22 are light sensors. The object detection sensors 22 are configured so as not to interfere with the hand 10 when the wafer jig 2x is held by the hand 10.

[0092] Each object detection sensor 22 includes a light-emitting section and a light-receiving section. Hereinafter, each light-emitting section will be labeled 22x and 22a, and each light-receiving section will be labeled 22y and 22b for description. One object detection sensor 22 is composed of a light-emitting section 22x and a light-receiving section 22y, and another object detection sensor 22 is composed of a light-emitting section 22a and a light-receiving section 22b.

[0093] Since the components of the light-emitting parts 22x, 22a, and the light-receiving parts 22y, 22b are the same as those of the light-emitting part 61 and the light-receiving part 62 of the positioning sensor 6, the description is omitted.

[0094] The light-receiving part 22y is positioned opposite the light-projecting part 22x across axis A1. The light-receiving part 22b is positioned opposite the light-projecting part 22a across axis A1. The two object detection sensors 22 are arranged such that their optical paths intersect in an X-shape when viewed from above. The point where the optical paths intersect coincides with the center of the main body 21x.

[0095] Amplifier 25 has two channels. Light receiving part 22y is electrically connected to the first channel Ch1 of amplifier 25. Light receiving part 22b is electrically connected to the second channel Ch2 of amplifier 25.

[0096] In this embodiment, for example, such as Figure 7 as well as Figure 8 As shown, the object 9x is composed of a rod-shaped component that can penetrate the slit 27 of the main body 21x. The object 9x is formed into a rod shape from a light-blocking material.

[0097] In the wafer fixture 2x of this embodiment, if the object 9x is not detected by the object detection sensor 22 in either the first channel Ch1 or the second channel Ch2, the transmitter 24 is controlled to turn off the lights.

[0098] If an object 9x is detected by the object detection sensor 22 in the first channel Ch1 but not by the object detection sensor 22 in the second channel Ch2, the transmitter 24 is controlled to flash at a predetermined first frequency (e.g., 10Hz).

[0099] If object 9x is not detected in the object detection sensor 22 of the first channel Ch1 but is detected in the object detection sensor 22 of the second channel Ch2, the transmitter 24 is controlled to flash at a predetermined second frequency (e.g., 20Hz).

[0100] When an object 9x is detected by the object detection sensor 22 through both the first channel Ch1 and the second channel Ch2, the transmitter 24 is controlled to flash at a predetermined third frequency (e.g., 30Hz).

[0101] As described above, the flashing period of the transmitter 24 varies according to the combination of the detection results of the two object detection sensors 22.

[0102] To control the flashing of the transmitter 24, the wafer jig 2x includes a small computer (not shown). This computer includes, for example, a CPU, ROM, and RAM. The computer functions as a light source control unit and transmits information to the controller 5 via the transmitter 24.

[0103] In this embodiment, unlike the first embodiment, the detection results of two object detection sensors 22 can be monitored simultaneously. Therefore, the center position of the object 9x can be determined by a simple single linear movement of the wafer jig 2 (hand 10). Thus, position correction can be completed in a short time.

[0104] As explained above, in the wafer fixture 2x of this embodiment, the lighting / turning off cycle information is displayed by the repeating transmitter 24.

[0105] This enables the transmission of various types of information from the wafer fixture 2x to the controller 5.

[0106] Furthermore, the wafer fixture 2 in this embodiment is equipped with multiple object detection sensors 22. The on / off cycle of the repeating transmitter 24 varies according to the combination of detection results from each object detection sensor 22.

[0107] Therefore, the detection results of multiple object detection sensors 22 can be transmitted to the controller 5 with a simple configuration.

[0108] Furthermore, the wafer jig 2x of this embodiment is equipped with two object detection sensors 22. When viewed in the thickness direction of the wafer jig 2x, the optical axes of the two object detection sensors 22 intersect. When the wafer jig 2 is held by the hand 10, the intersection of the optical axes when viewed in the thickness direction of the wafer jig 2 is located at the center of the hand 10.

[0109] Therefore, by detecting the object 9x with two object detection sensors 22, the positional relationship between the center position of the hand 10 and the object 9x can be easily determined.

[0110] Next, the third embodiment will be described. Figure 9 This is a partial perspective view showing the state of inspecting the object 9 using the wafer jig 2y according to the third embodiment. Furthermore, in the description of this embodiment, sometimes the same or similar components as those in the described embodiment are given the same reference numerals as in the drawings, and descriptions are omitted.

[0111] like Figure 9 As shown, the wafer jig 2y of this embodiment includes an optical switching unit 28, which replaces the block 23 and the transmitter 24 of the first embodiment.

[0112] The light switching unit 28 is provided so as to protrude below the body 21 of the wafer jig 2y. The light switching unit 28 is located on the light path of the detection light of the positioning sensor 6 (the light path from the light-emitting unit 61 to the light-receiving unit 62).

[0113] The light switching unit 28 is composed of, for example, a liquid crystal shutter or a mechanical shutter, and is capable of switching the passage and obstruction of the detection light of the positioning sensor 6.

[0114] The light switching unit 28, for example, opens and closes based on the detection result of the object detection sensor 22, appropriately switching whether the light receiving unit 62 receives detection light from the light projecting unit 61. Thus, the wafer fixture 2y, like in the previous embodiment, can output information toward the hand 10.

[0115] The preferred embodiments and variations of this disclosure have been described above, but the structure can be modified as follows, for example.

[0116] The obstruction 23 can also be constructed from a receiver (gripper light-receiving part) having the same configuration as the light-receiving part 62. In this case, the controller 5 can provide instructions to the obstruction 23 (i.e., the wafer grippers 2, 2x) via the light-projecting part 61. That is, communication from the robot 1 to the wafer gripper 2 can be achieved without using cables. The instructions issued to the wafer grippers 2, 2x can be arbitrary, for example, they can include starting / stopping the detection of the object detection sensor 22.

[0117] Alternatively, the obstruction 23 can be omitted, and the transmitter 24 can be configured in a manner that also includes the obstruction 23. In a configuration where the light-emitting part 61 is controlled by turning off the lights when using the wafer jig 2, the obstruction 23 is not required.

[0118] When viewed from above (in the thickness direction of the hand 10), if the detection beams from the projection section 22x and the projection section 22a intersect and this intersection point is located at the center of the hand 10 (wafer fixture 2x), then the optical axes of the detection beams can actually not intersect each other. For example, the optical axes of the two object detection sensors 22 can be set at different positions in the thickness direction of the body 21x.

[0119] As long as the two object detection sensors 22 of the wafer jig 2x do not interfere with the hand 10, they can be located below the body 21x. If the optical axis of the object detection sensor 22 can be positioned downwards away from the body 21x, the slit 27 can be omitted.

[0120] The object detection sensor 22 can be a non-contact sensor or a contact sensor.

[0121] It can also replace the object detection sensor 22 or, based on this, mount various sensors on the wafer fixture 2. For example, the wafer fixture 2 can be considered to have a non-contact rangefinder, and the transmitter 24 can be made to flash at a period corresponding to the detected distance.

[0122] There are various methods for controlling the display information of the transmitter 24. The transmitter 24 can be controlled to turn on / off using binary display information. Alternatively, the display information, such as the intensity of light and the wavelength of the light source, can be used instead of controlling the transmitter 24 to turn on / off.

[0123] The wafer fixtures 2, 2x, and 2y can also be used for purposes other than inspecting objects 9 and 9x (in other words, for purposes other than position correction of robot 1).

[0124] The battery 26 can be configured as either a primary battery or a secondary battery. When configured as a secondary battery, it is preferable to install a charging device for charging the battery 26 at the storage location of the wafer jig 2 or another location. This enables automatic charging.

[0125] The wafer fixtures 2, 2x, and 2y can also transmit information to the controller 5 via other optical sensors, such as the load sensor mounted on the hand 10, in place of the positioning sensor 6.

[0126] The functions of the elements disclosed in this specification can be executed using circuits or processing circuits that include general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application-Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. Because it includes transistors or other circuitry, a processor can be considered as a processing circuit or circuit. In this disclosure, a circuit, unit, or means is hardware that performs the listed functions, or can also be hardware programmed to perform the listed functions. The hardware can be the hardware disclosed in this specification, or can also be other known hardware programmed or configured to perform the listed functions. In the case of a processor where the hardware is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used in the configuration of the hardware and / or the processor.

Claims

1. A wafer jig capable of being held by the hand of a robot having a hand portion, the hand portion having a light-projecting portion and a light-receiving portion for detecting detection light emitted from the light-projecting portion, characterized in that... have: A light source that irradiates light toward the light-receiving part, and The notification light is shone onto the light-receiving part by the light source, and information is output to the hand side. The wafer clamp has a shielding portion. When the wafer jig is held by the hand, the blocking part blocks the light path between the light-projecting part and the light-receiving part.

2. The wafer fixture according to claim 1, wherein, An object detection sensor equipped with an object detection sensor, The light source outputs information indicating whether the object detection sensor has detected the object.

3. The wafer fixture according to claim 2, wherein, The object detection sensor is located at the center of the wafer fixture.

4. The wafer fixture according to claim 2, wherein, With the wafer fixture held by the hand, the object detection sensor is located at the center of the hand.

5. The wafer fixture according to claim 1, wherein, The information is represented by repeating the cycle of the light source turning on / off, or by repeating the cycle of varying light intensity.

6. The wafer fixture according to claim 5, wherein, It has multiple sensors, and the period varies according to the combination of detection results from each sensor.

7. The wafer fixture according to claim 6, wherein, Multiple sensors have two light sensors. When viewed along the thickness direction of the wafer fixture, the optical axes of the two optical sensors intersect, and With the wafer jig held by the hand, the intersection of the optical axes, when viewed along the thickness direction of the wafer jig, is located at the center of the hand.

8. A wafer jig capable of being held by the hand of a robot having a hand portion, the hand portion having a light-projecting portion and a light-receiving portion for detecting detection light emitted from the light-projecting portion, characterized in that... have: A light source that irradiates light toward the light-receiving part, and The notification light is shone onto the light-receiving part by the light source, and information is output to the hand side. It includes a light-receiving part for clamping, which is capable of detecting light emitted from the light-projecting part of the hand. The light-receiving part of the fixture also functions as a shielding part. When the wafer fixture is held by the hand, the shielding part blocks the light path between the light-projecting part and the light-receiving part.

9. A robot system, characterized in that... have: The wafer fixture of claim 1; A robot capable of holding the wafer jig using its hand; and The control unit provides instructions to the robot for control. The control unit receives information from the wafer fixture side via the light-receiving unit.

10. A wafer jig capable of being held by the hand of a robot having a hand portion, the hand portion having a light-projecting portion and a light-receiving portion for detecting detection light emitted from the light-projecting portion, characterized in that... have: The fixture has a light-receiving part that can detect light emitted from the light-projecting part of the hand. The light-receiving part of the fixture also functions as a shielding part. When the wafer fixture is held by the hand, the shielding part blocks the light path between the light-projecting part and the light-receiving part.

11. A wafer jig capable of being held by the hand of a robot having a hand portion, the hand portion having a light-projecting portion and a light-receiving portion for detecting detection light emitted from the light-projecting portion, characterized in that... have: The light switching unit is capable of switching between a state where the light receiving unit receives the detection light from the light projecting unit and a state where it does not receive the detection light. The light switching unit also functions as a blocking unit. When switching to a state where the light receiving unit does not receive the detection light from the light projecting unit, the blocking unit blocks the optical path between the light projecting unit and the light receiving unit. Information is output to the hand side by switching the light switching unit.

12. A communication method in which information is transmitted from a robot having a hand to a wafer jig via the wafer jig toward the hand, the hand having a light-projecting part and a light-receiving part, the light-receiving part detecting detection light emitted from the light-projecting part, the wafer jig being able to be held by the hand, the communication method being characterized by comprising the following steps: In the first step, the wafer jig is held by the hand, and the shielding portion of the wafer jig blocks the light path between the light-emitting portion and the light-receiving portion; and In the second step, the light source of the wafer fixture irradiates the light-receiving part with notification light corresponding to the information.

13. A robot teaching method, characterized in that: The command position of the robot is corrected using the communication method of claim 12 and based on the information obtained from the wafer fixture.

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