Guiding device, workpiece conveying table and inkjet printing device

Abstract

A guide device, a workpiece conveying table, and an inkjet printing device that improve the traveling accuracy of a movable portion and achieve lightweight. The guide device includes a base, first and second guide members disposed on the base, a movable portion that moves along the first and second guide members, and an air bearing portion that supports the movable portion so as to be movable. The movable portion includes a movable body, first and second bearing support members that extend downward from the movable body and sandwich the first guide member in a width direction of the first guide member. The air bearing portion includes first and second width direction air bearing portions that support the movable portion to the first guide member in the width direction and are disposed on the first and second bearing support members, and a first floating air bearing portion that supports the movable portion to the first guide member in a vertical direction and is disposed on the movable body. The movable body is formed to have a thickness that is thicker than other portions in a thick wall portion that includes the disposed positions of the first and second bearing support members and the first floating air bearing portion.

Description

Technical Field

[0001] This disclosure relates to a guiding device, a workpiece conveying table, and an inkjet printing device. Background Technology

[0002] In recent years, the method of manufacturing devices using inkjet printing equipment has attracted attention. Inkjet printing equipment has multiple nozzles that eject droplets, and while controlling the positional relationship between the nozzles and the object to be printed, it ejects droplets from the nozzles, thereby coating the object with droplets.

[0003] As one type of inkjet printing apparatus, a printing apparatus having multiple line heads is known. Each line head has multiple inkjet heads arranged side by side along the width direction of the object to be printed. Each inkjet head is a droplet nozzle with multiple nozzle exits. By arranging such multiple line heads in a direction orthogonal to the main scanning direction, i.e., the sub-scanning direction, it is possible to coat a wide object with ink in a single transport step. Moreover, by arranging multiple line heads with multiple inkjet heads arranged side by side in the sub-scanning direction also in the main scanning direction, it is possible to coat multiple inks, such as different colors, onto the object in a single transport step. With this structure, for example, for large objects with a size of G4 (680mm × 880mm) or larger, multiple inks can be coated in a single transport step, thus reducing the production cycle time for coating ink onto the object. Furthermore, there are advantages in the printing process, such as the ability to uniformly control the ink film thickness to facilitate uniform drying conditions after ink coating.

[0004] However, in recent years, the demand for increased productivity has led to further increases in the size of printed objects. On the other hand, there is also a strong demand for higher precision display panels, resulting in increasingly higher requirements for printing position accuracy. Therefore, large workpiece transport tables with high travel accuracy are needed. As a structure responding to this demand, workpiece transport tables using guide devices with air bearings exist. For example... Figure 17 As shown, the guide device 900 includes a base 901, a guide member 902, and a movable part 903. In the left-right direction of the base 901 ( Figure 17 The left and right sides of the movable part 903 are respectively fixed with guides along the direction of the movable part 903. Figure 17A guide member 902 extends in the front-to-back direction (within the movable part 903). Bearing support members 905 are fixed on both sides of the movable body 904 in the left-to-right direction. Each bearing support member 905 is configured to support a horizontal hydrostatic air bearing 906 located on the outer side of each guide member 902 (the right side of the right guide member 902 and the left side of the left guide member 902), and a lower hydrostatic air bearing 907 located below each guide member 902. Upper hydrostatic air bearings 908 are respectively arranged in the movable part 903 at positions corresponding to each lower hydrostatic air bearing 907.

[0005] However, in Figure 17 In the guide device 900 shown, to improve the reproducibility of the movement of the movable part 903, it is necessary to increase the bearing rigidity of each hydrostatic air bearing 906, 907, and 908. To increase this bearing rigidity, the bearing clearance of the hydrostatic air bearings (the clearance between each hydrostatic air bearing 906, 907, and 908 and the portion of the guide member 902 opposite to each hydrostatic air bearing 906, 907, and 908) needs to be maintained at a level of a few micrometers to tens of micrometers. On the other hand, when the movable part 903 becomes larger and the distance between the two guide members 902 increases, due to the thermal expansion of the guide members 902, it may be difficult to precisely maintain the bearing clearance of the horizontally positioned hydrostatic air bearings 906 opposite to the sides of each guide member 902. For example, the bearing clearance may disappear, and the horizontally positioned hydrostatic air bearings 906 may break. Therefore, methods to solve such problems have been studied (e.g., Patent Document 1).

[0006] In the guiding device described in Patent Document 1, a guide member extending along the guiding direction of the movable part is fixed to a reference surface on the base. Two opposing portions, each facing one of the two sides of the guide member, are fixed to the lower side of the movable body of the movable part. A horizontal hydrostatic air bearing is arranged at a position opposite each side of the guide member in one of the two opposing portions. Furthermore, a second opposing portion is fixed to the lower side of the movable body in an arrangement with the two opposing portions. Vertical hydrostatic air bearings are respectively arranged on the lower surface of the outer opposing portion (the opposing portion furthest from the second opposing portion) and the lower surface of the second opposing portion. Moreover, attraction mechanisms that attract the movable body toward the base in a non-contact state are respectively arranged on the outer side of the outer opposing portion (the side without the other opposing portion (the inner opposing portion)) and the outer side of the second opposing portion (the side without the inner opposing portion). With this structure, the distance between the horizontal hydrostatic air bearings facing each other on both sides of the guide member can be kept small, so it is not easily affected by the thermal expansion of the guide member. Even if the workpiece conveying table is large, the bearing clearance can be precisely maintained.

[0007] Prior art literature

[0008] Patent documents

[0009] Patent Document 1: Patent No. 4270192 Summary of the Invention

[0010] One aspect of the guiding device disclosed herein includes a base, a first guiding member and a second guiding member extending along a guiding direction on the base, a movable portion movable along the first guiding member and the second guiding member, and an air bearing portion supporting the movable portion for movable movement. The movable portion includes a plate-shaped movable body located on the first guiding member and the second guiding member, and a first bearing support member and a second bearing support member extending downward from the movable body and clamping the first guiding member in the width direction. The air bearing portion includes: a first width-direction air bearing portion and a second width-direction air bearing portion, which support the movable portion on the first guiding member in the width direction and are respectively disposed on the first bearing support member and the second bearing support member; and a first upward floating air bearing portion, which supports the movable portion on the first guiding member in the vertical direction and is disposed on the movable body. The movable body is formed such that the thickness of the thick-walled portion including the placement positions of the first bearing support member, the second bearing support member, and the first upward floating air bearing portion is thicker than the thickness of other portions. Attached Figure Description

[0011] Figure 1 This is a front view of the guiding device according to the first embodiment.

[0012] Figure 2 It is along Figure 1 A cross-sectional view along line AA.

[0013] Figure 3 This is a side view of the movable part of the guide device constituting the first embodiment.

[0014] Figure 4 This is a perspective view of the movable part of the first embodiment when viewed from a slightly lower angle.

[0015] Figure 5 This is a side view of the guide device according to the first embodiment.

[0016] Figure 6 This is a top view of the guide device according to the first embodiment.

[0017] Figure 7 This is a perspective view of the movable body constituting the movable part of the first embodiment, viewed from a slightly lower angle.

[0018] Figure 8This diagram illustrates the deformation state of the movable body in the movable part of the comparative example when the thickness is uniform and thin.

[0019] Figure 9 This is a side view of the inkjet printing apparatus according to the second embodiment.

[0020] Figure 10 This is a front view of the inkjet printing apparatus according to the second embodiment.

[0021] Figure 11 This is a top view of the inkjet printing apparatus according to the second embodiment.

[0022] Figure 12 It is along Figure 9 A cross-sectional view of the BB line.

[0023] Figure 13 This is a top view of the display panel according to the second embodiment.

[0024] Figure 14 This is a top view showing the inkjet printing apparatus of the second embodiment and the temperature control chamber for temperature control of the inkjet printing apparatus.

[0025] Figure 15 This is a side view showing the inkjet printing apparatus of the second embodiment and the temperature control chamber for temperature control of the inkjet printing apparatus.

[0026] Figure 16 This is the front view of the guide device in the modified example.

[0027] Figure 17 This is an explanatory diagram of a previous guiding device.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1 Inkjet Printing Unit

[0030] 2 racks

[0031] 3. 901 abutment

[0032] 3A base perforation

[0033] 4 linear motor mounting rods

[0034] 5 leveling blocks

[0035] 6. 902 guiding components

[0036] 6L Left Guide Component (First Guide Component)

[0037] 6R Right Guide Component (Second Guide Component)

[0038] 6LP Left Guide Leak (First Leak)

[0039] 6RP Right Guide Protrusion (Second Protrusion)

[0040] 7 Display Panel

[0041] 7B Blue Pixel

[0042] 7P substrate

[0043] 7G Green Pixel

[0044] 7L ink tank

[0045] 7m alignment mark

[0046] 7R Red Pixel

[0047] 8. Adjust the feet

[0048] 10. Substrate Alignment Mechanism

[0049] 12 First Micro-motion Mechanism

[0050] 13 Second micro-motion mechanism

[0051] 14 Third micro-motion mechanism

[0052] 15 workpiece holding stage

[0053] 20, 90, 903 movable parts

[0054] 21, 91, 904 movable bodies

[0055] 21A Thick-walled section

[0056] 21Aa Left thick-walled portion (first thick-walled portion)

[0057] 21Ab Right thick-walled section (second thick-walled section)

[0058] 21 B Thin-walled section

[0059] 21 C concave part

[0060] 21D movable body perforation

[0061] 22L left air bearing support component (first bearing support component)

[0062] 22R Right Air Bearing Support Component (Third Bearing Support Component)

[0063] 23. Inner air bearing support component (second bearing support component)

[0064] 24 Air Bearing Section

[0065] 25L left width direction air bearing section (first width direction air bearing section)

[0066] 25R right width direction air bearing section (second width direction air bearing section)

[0067] 26. Floating air bearing section

[0068] 26L Left Upper Floating Air Bearing Section (First Upper Floating Air Bearing Section)

[0069] 26R Right Upper Floating Air Bearing Section (Second Upper Floating Air Bearing Section)

[0070] 27L Left-Right-Down Air Bearing Section (First Up-Down Air Bearing Section)

[0071] 27La upper left vertical direction air bearing section (first vertical direction air bearing section)

[0072] The lower left-up / down direction air bearing section (first up / down direction air bearing section) on the lower side of 27Lb

[0073] 27R Right-up-down direction air bearing section (second up-down direction air bearing section)

[0074] The upper right vertical air bearing section (second vertical air bearing section) on the upper side of 27Ra

[0075] 27Rb lower right vertical air bearing section (second vertical air bearing section)

[0076] 30 workpiece conveying worktable

[0077] 30a workpiece feeding position

[0078] 30b Printing Standby Position

[0079] 40B Third Head Equipment

[0080] 40G second head device

[0081] 40R First Head Equipment

[0082] 41a First Rack

[0083] 41b Second rack

[0084] 42 base frames

[0085] 43 Droplet Position Measurement Camera

[0086] 50 linear motor

[0087] 51 linear motor stator

[0088] 52 linear motor rotor

[0089] 60 linear scale

[0090] 61 Linear Scale Main Body

[0091] 62 Linear Scale Reading Head

[0092] 63 Reading head bracket

[0093] Room 71

[0094] 72a First Temperature Control Zone

[0095] 72b Second Temperature Control Zone

[0096] 72c third temperature control zone

[0097] 73a First Air Conditioner

[0098] 73b Second Air Conditioner

[0099] 73c Third Air Conditioner

[0100] 100, 900 guiding devices

[0101] 221L Left Vertical Section

[0102] 222L Left Horizontal Section

[0103] 221R Right Vertical Section

[0104] 222R Right Horizontal Section

[0105] 905 bearing support components

[0106] 906 Horizontal Hydrostatic Air Bearing

[0107] 907 Lower Side Static Air Bearing

[0108] 908 upper side hydrostatic air bearing. Detailed Implementation

[0109] According to the structure described in Patent Document 1, in addition to the mounting guide member in the reference plane of the base, a high-precision plane is also required for the part opposite the vertical hydrostatic air bearing so that the vertical hydrostatic air bearing can pass through that part, and a perforation for weight reduction cannot be formed in the base. Moreover, space is needed to set up the suction generating mechanism on both sides of the base, so the area of ​​the base when viewed from above becomes larger.

[0110] Furthermore, when the movable body is thin, the portion of the movable body with the fixed opposing part may deform when a torque about the vertical line is applied to the movable body, resulting in a decrease in the traveling accuracy of the movable part. To solve this problem, it is considered to thicken the movable body to improve its torque rigidity, but this makes the movable part heavier, and the base needs to be thickened to support the weight.

[0111] In the structure described in Patent Document 1, due to the difficulty in forming perforations in the base as mentioned above, the area of ​​the base becomes larger and the overall weight of the guiding device increases. This necessitates an increase in the load-bearing capacity of the installation site, which leads to an increase in the cost of building construction.

[0112] The purpose of this disclosure is to provide a guide device, a workpiece conveying table, and an inkjet printing device that can improve the travel accuracy of the movable part and achieve overall lightweighting of the device.

[0113] [Implementation Method]

[0114] Hereinafter, embodiments of this disclosure will be described with reference to the accompanying drawings. Figure 1 The explanation will be provided later.

[0115] <First Implementation>

[0116] First, the first implementation method will be described. Figure 1 This is the front view of the guiding device. Figure 2 It is along Figure 1 A cross-sectional view along line AA. Figure 3 This is a side view of the movable part that constitutes the guide device. Figure 4 This is a three-dimensional view of the movable part when viewed from a slightly lower angle. Figure 5 This is a side view of the guiding device. Figure 6 This is a top view of the guiding device. Figure 7 This is a three-dimensional view of a movable body that constitutes the movable part, viewed from a slightly lower angle. Figure 8 This diagram illustrates the deformation state of the movable body in the movable part of the comparative example when the thickness is uniform and thin.

[0117] like Figure 1 As shown, the guide device 100 includes a base 3, a left guide member 6L and a right guide member 6R, a movable part 20, and an air bearing part 24. The left guide member 6L and the right guide member 6R are examples of the first and second guide members of this disclosure, respectively. The left guide member 6L and the right guide member 6R are configured to extend along the guide direction on the base 3. The movable part 20 moves along the left guide member 6L and the right guide member 6R. The air bearing part 24 supports the movable part 20 so that it can move. It should be noted that the aforementioned guide direction is the direction in which the movable part 20 moves and is... Figures 1 to 8 The positive and negative directions of the X-axis are shown. The width direction described below is orthogonal to the guiding direction and parallel to the horizontal plane. Figures 1 to 8 The positive and negative directions of the Y-axis are shown. The upward direction is the vertical upward direction and is... Figures 1 to 8The positive direction of the Z-axis is shown. The downward direction is the opposite of the upward direction and is the negative direction of the Z-axis. The left direction is the left direction when viewing the guide device 100 from one direction of the guide direction (the negative side of the X-axis) and is the positive direction of the Y-axis. The right direction is the opposite of the left direction and is the negative direction of the Y-axis. The details of each structure of the guide device 100 are described below.

[0118] The base 3 is formed as a rectangular plate parallel to the guiding direction along its long side (see reference). Figure 5 A left guide member 6L and a right guide member 6R are fixed to the upper surface of the base 3. The left guide member 6L is fixed to the left end of the upper surface of the base 3, and the right guide member 6R is fixed to the right end of the upper surface of the base 3. The left guide member 6L and the right guide member 6R each include a left guide protrusion 6LP and a right guide protrusion 6RP extending separately from each other toward the outer side in the width direction. The left guide protrusion 6LP and the right guide protrusion 6RP are examples of the first protrusion and the second protrusion of this disclosure, respectively. The left guide protrusion 6LP is formed on the upper part of the left side surface of the left guide member 6L. The right guide protrusion 6RP is formed on the upper part of the right side surface of the right guide member 6R.

[0119] like Figures 1-4 As shown, the movable part 20 has a movable body 21 in the shape of a four-cornered plate. Two left air bearing support members 22L, two inner air bearing support members 23, and two right air bearing support members 22R are fixed to the lower surface (lower main surface) of the movable body 21. The left air bearing support member 22L, the inner air bearing support member 23, and the right air bearing support member 22R are examples of the first, second, and third bearing support members of this disclosure, respectively. When each of the left air bearing support member 22L, the inner air bearing support member 23, and the right air bearing support member 22R is grouped together, the two groups are fixed in a manner arranged along the guide direction. These two groups are fixed such that one group is positioned at each end of the movable body 21 in the guide direction. The left air bearing support member 22L is located to the left of the left guide member 6L. The left air bearing support member 22L has a left vertical portion 221L extending downward from the left end of the movable body 21 and a left horizontal portion 222L extending to the right from the lower end of the left vertical portion 221L. The inner air bearing support member 23 is located to the right of the left guide member 6L. The inner air bearing support member 23 is formed to extend downward. The right air bearing support member 22R is located to the right of the right guide member 6R. The right air bearing support member 22R has a right vertical portion 221R extending downward from the right end of the movable body 21 and a right horizontal portion 222R extending to the left from the lower end of the right vertical portion 221R.

[0120] The air bearing section 24 supports the movable section 20, enabling it to move. The air bearing section 24 includes two left-width-direction air bearing sections 25L, two right-width-direction air bearing sections 25R, two left-upward-floating air bearing sections 26L, and two right-upward-floating air bearing sections 26R. The air bearing section 24 also includes two sets of a pair of left-upward-downward air bearing sections 27L and a pair of right-upward-downward air bearing sections 27R. The left-width-direction air bearing section 25L, right-width-direction air bearing section 25R, left-upward-floating air bearing section 26L, right-upward-floating air bearing section 26R, left-upward-downward air bearing section 27L, and right-upward-downward air bearing section 27R are all constructed from hydrostatic air bearings. The left-width-direction air bearing section 25L and the right-width-direction air bearing section 25R are examples of the first and second width-direction air bearing sections of this disclosure, respectively. The left-upward floating air bearing section 26L and the right-upward floating air bearing section 26R are examples of the first and second upward floating air bearing sections of this disclosure, respectively. The left-upward and right-upward air bearing section 27L and the right-upward and right-downward air bearing section 27R are examples of the first and second upward and downward air bearing sections of this disclosure, respectively. When the left-width direction air bearing section 25L, the right-width direction air bearing section 25R, the left-upward floating air bearing section 26L, the right-upward floating air bearing section 26R, the left-upward and right-upward air bearing section 27L, and the right-upward and right-downward air bearing section 27R are grouped together with a pair of left-upward and right-upward air bearing sections 27L and 27R, respectively, they are arranged in two groups along the guide direction.

[0121] The left-width direction air bearing portion 25L and the right-width direction air bearing portion 25R are respectively disposed in the left air bearing support member 22L and the inner air bearing support member 23, respectively, at positions opposite to the two sides of the left guide member 6L. Specifically, the left-width direction air bearing portion 25L is disposed in the left vertical portion 221L of the left air bearing support member 22L, facing the left side of the left guide protrusion 6LP. The right-width direction air bearing portion 25R is disposed in the inner air bearing support member 23, facing the right side of the left guide member 6L. The gap (bearing clearance) between the left-width direction air bearing portion 25L and the right-width direction air bearing portion 25R and the left and right sides of the left guide member 6L is a few micrometers to tens of micrometers. The left-width direction air bearing portion 25L and the right-width direction air bearing portion 25R do not bear the weight of the movable part 20, but support the movable part 20 in the width direction to the left guide member 6L in a non-contact manner. The position of the movable part 20 relative to the left guide member 6L in the width direction is adjusted by adjusting the left width direction of the air bearing part 25L and the right width direction air bearing part 25R.

[0122] The left upper floating air bearing section 26L and the right upper floating air bearing section 26R are disposed on the lower surface of the movable body 21. The left upper floating air bearing section 26L and the right upper floating air bearing section 26R are disposed opposite the upper surfaces of the left guide member 6L and the right guide member 6R, respectively. The gap (bearing clearance) between the left upper floating air bearing section 26L and the upper surfaces of the left guide member 6L and the right guide member 6R is a few micrometers to tens of micrometers, supporting the movable body 21 vertically on the left guide member 6L and the right guide member 6R, respectively. The left upper floating air bearing section 26L and the right upper floating air bearing section 26R bear the weight of the movable body 21. It should be noted that in the following description, the two left upper floating air bearing sections 26L and the two right upper floating air bearing sections 26R are sometimes collectively referred to as the upper floating air bearing section 26.

[0123] One of the pair of left-up-down direction air bearing portions 27L is disposed on the lower surface of the movable body 21, and the other is disposed on the upper surface of the left horizontal portion 222L of the left air bearing support member 22L. The gaps (bearing clearances) between the pair of left-up-down direction air bearing portions 27L and the upper and lower surfaces of the left guide protrusion 6LP are respectively a few micrometers to tens of micrometers. The pair of left-up-down direction air bearing portions 27L do not bear the weight of the movable part 20, but support the movable part 20 in the vertical direction in a non-contact manner. The pair of left-up-down direction air bearing portions 27L adjust the position of the movable part 20 relative to the left guide protrusion 6LP in the vertical direction. It should be noted that, in the following description, the left-up-down direction air bearing portion 27L located on the upper side of the left guide protrusion 6LP is sometimes referred to as the upper left-up-down direction air bearing portion 27La, and the left-up-down direction air bearing portion 27L located on the lower side of the left guide protrusion 6LP is referred to as the lower left-up-down direction air bearing portion 27Lb.

[0124] One of the pair of right-up-down direction air bearing portions 27R is disposed on the lower surface of the movable body 21, and the other right-up-down direction air bearing portion 27R is disposed on the upper surface of the right horizontal portion 222R of the right air bearing support member 22R. The pair of right-up-down direction air bearing portions 27R are configured such that the gap (bearing clearance) between the pair and the upper and lower surfaces of the right guide protrusion 6RP is a few micrometers to tens of micrometers. The pair of right-up-down direction air bearing portions 27R do not bear the weight of the movable part 20, but support the movable part 20 in the right guide protrusion 6RP in the vertical direction in a non-contact manner. The pair of right-up-down direction air bearing portions 27R adjust the position of the movable part 20 relative to the right guide protrusion 6RP in the vertical direction. It should be noted that, in the following description, the right-up-down direction air bearing portion 27R located on the upper side of the right guide protrusion 6RP is sometimes referred to as the upper right-up-down direction air bearing portion 27Ra, and the right-up-down direction air bearing portion 27R located on the lower side of the right guide protrusion 6RP is referred to as the lower right-up-down direction air bearing portion 27Rb.

[0125] It should be noted that granite is used as the material for the movable body 21 to facilitate the achievement of machining accuracy and to reduce weight. As for the hydrostatic air bearing mentioned above, a porous type hydrostatic air bearing made of stainless steel is preferred.

[0126] like Figures 2-4As shown, four corner plates forming air bearing sections 24 are arranged on the lower surface of the movable body 21. The left-upper-side floating air bearing section 26L, the right-upper-side floating air bearing section 26R, the left-upper-lower-side air bearing section 27L, and the right-upper-lower-side air bearing section 27R, arranged along the guide direction, function to improve the pitch rigidity of the movable part 20 in the guide direction. The left-width-direction air bearing section 25L and the right-width-direction air bearing section 25R, arranged along the guide direction, function to improve the yaw rigidity of the movable part 20 in the guide direction.

[0127] The movable body 21 is formed such that the plate thickness at the four corners where the hydrostatic air bearings are disposed is greater than the plate thickness at the approximately cross-shaped portions other than the four corners. The movable body 21 may also be described as having a thick-walled portion 21A where the hydrostatic air bearings are disposed and a thin-walled portion 21B that is thinner than the thick-walled portion 21A. In the following description, the two thick-walled portions 21A on the left side of the four corners are sometimes referred to as left thick-walled portions 21Aa, and the two thick-walled portions 21A on the right side are sometimes referred to as right thick-walled portions 21Ab. The left thick-walled portions 21Aa and the right thick-walled portions 21Ab are examples of the first and second thick-walled portions of this disclosure, respectively. Each of the two left thick-walled portions 21Aa is provided with one left air bearing support member 22L, one inner air bearing support member 23, one left upper floating air bearing portion 26L, and one upper left-upward-downward air bearing portion 27La. Each of the two right thick-walled portions 21Ab is provided with a right air bearing support member 22R, a right upper floating air bearing portion 26R, and an upper right vertical air bearing portion 27Ra. In this way, by providing a thin-walled portion 21B that is thinner than the thick-walled portion 21A in the movable body 21, the movable body 21 can be made lighter.

[0128] In the movable body 21, at locations corresponding to the four sides of the four-cornered plate-like structure, recesses 21C are formed that are concave towards the center on the XY plane of the movable body 21. The recesses 21C are formed at the center of the locations corresponding to each side. Thus, by forming the recesses 21C in the movable body 21, further weight reduction of the movable body 21 can be achieved. That is, in the movable body 21, the lengths along the X and Y axes where the thick-walled portions are arranged are longer than the lengths along the X and Y axes where only the thin-walled portions are arranged.

[0129] Movable body through-holes 21D are formed in the portions between the two left thick-walled portions 21Aa and the two right thick-walled portions 21Ab of the thin-walled portion 21B, respectively. By forming movable body through-holes 21D in the movable body 21, further weight reduction of the movable body 21 can be achieved. It should be noted that the shape and number of movable body through-holes 21D are not limited to... Figure 2 The shapes and numbers shown can be designed arbitrarily.

[0130] Next, the overall structure of the guide device 100 will be described. For example... Figure 5 and Figure 6 As shown, the guide member 6 is supported on the base 3 along its entire length. In the guide device 100 of this disclosure, the surface of the guide member 6 is used as the guide surface for the entire hydrostatic air bearing, while the surface of the base 3 is not used. Therefore, the only portion of the base 3 requiring planarity is the portion supporting the guide member 6. Therefore, lightweight base perforations 3A for the guide device 100 can be formed in the portion of the base 3 other than the portion supporting the guide member 6. It should be noted that the shape and number of base perforations 3A are not limited to... Figure 6 The shapes and numbers shown can be designed arbitrarily.

[0131] Based on the above structure, the movable part 20 can slide in a non-contact manner by supporting the guide member 6 with the air bearing part 24. It should be noted that granite is preferably used as the material for the guide member 6 and the base 3 in order to facilitate the achievement of machining accuracy and reduce weight.

[0132] Next, an example of the structure of the movable body 21 will be described. For example... Figure 7 As shown, the movable body 21 includes a thick-walled portion 21A equipped with a hydrostatic air bearing and a thin-walled portion 21B without a hydrostatic air bearing. The movable body 21 also includes four recesses 21C. The maximum dimension of the main surface of the movable body 21 is 2200mm (left-right direction) × 2140mm (guide direction), the thickness of the thick-walled portion 21A is 185mm, and the thickness of the thin-walled portion 21B is 150mm. By making the length between the bottoms of the two recesses 21C arranged in the left-right direction 2000mm and the length between the bottoms of the two recesses 21C arranged in the guide direction 1940mm, the movable body 21 can be made lightweight. Furthermore, by forming φ310mm movable body through-holes 21D in two locations, the movable body 21 can be further lightweighted. Through these lightweighting measures, the movable body 21 can be made lighter compared to a movable body with a main surface size of 2200mm×2140mm and a uniform plate thickness of 150mm.

[0133] Next, the reason for providing the thick-walled portion 21A only in the movable body 21 where the hydrostatic air bearing is configured will be explained. Figure 8The movable part 90 of the comparative example is shown. The movable part 90 of the comparative example differs from the movable part 20 of the first embodiment only in the shape of the movable body 91. Specifically, the movable body 91 is formed as a square plate with a uniform plate thickness. The dimensions of the main surface of the movable body 91 are the same as those of the movable body 21 of the first embodiment, 2200mm × 2140mm. The plate thickness of the movable body 91 is the same as that of the thin-walled portion 21B of the movable body 21 of the first embodiment, 150mm. That is, the movable body 91 differs from the movable body 21 of the first embodiment in that it does not have the thick-walled portion 21A, the recess 21C, and the movable body through-hole 21D.

[0134] On the other hand, the constituent elements disposed on the movable body 91 are the same as those of the movable body 21 in the first embodiment. A left air bearing support member 22L, an inner air bearing support member 23, and a right air bearing support member 22R are fixed to the lower surface of the movable body 91. On the lower surface of the movable body 91, the left air bearing support member 22L, the inner air bearing support member 23, and the right air bearing support member 22R, the aforementioned left width direction air bearing portion 25L, right width direction air bearing portion 25R, left upper floating air bearing portion 26L, right upper floating air bearing portion 26R, left upper and lower direction air bearing portion 27L, and right upper and lower direction air bearing portion 27R are disposed at the same positions as in the first embodiment.

[0135] In the movable part 90 of the first embodiment and comparative example having the above structure, the gap (bearing gap) between the movable part and the opposing plane in each hydrostatic air bearing is adjusted to a few micrometers to a dozen micrometers, and the static pressure generated by the bearings, for example in the left width direction air bearing part 25L and the right width direction air bearing part 25R, is approximately 8000N for each. Therefore, when... Figure 8 When the portion of the movable body 91 in the comparative example, where the static pressure air bearing is mounted, becomes thinner (to the same thickness as the portion without the static pressure air bearing), under the static pressure of the left width direction air bearing portion 25L and the right width direction air bearing portion 25R, the movable body 91 may deform such that the lower ends of the left air bearing support member 22L and the inner air bearing support member 23 separate from each other. Due to this deformation, the bearing clearance between the left width direction air bearing portion 25L and the right width direction air bearing portion 25R and the left guide member 6L expands to approximately twice the size of the undeformed bearing clearance, resulting in a decrease in bearing rigidity due to this increased bearing clearance.

[0136] As a method to prevent the bearing clearance from widening, one approach is to pre-adjust the bearing clearance to a smaller value before applying static pressure to the hydrostatic air bearing. However, even with this method, when the movable body 91 is subjected to a yaw load, the movable body 91 rotates only a small amount in the yaw direction due to deformation caused by its low rigidity. That is, the amount of rotation in the yaw direction caused by the torque applied to the movable body 91 in the yaw direction depends on both the amount of rotation determined by the rigidity of the left width direction air bearing portion 25L and the right width direction air bearing portion 25R, and the amount of rotation determined by the rigidity of the movable body 91.

[0137] To minimize the aforementioned rotational amount and improve the reproducibility of the movable body's movement, a method of increasing the thickness of the movable body's plates to reduce its deformation is considered. However, this method increases the weight of the movable body itself. Furthermore, the guide member 6, which supports the weight of the movable body, needs to be thickened to increase rigidity, thus increasing the weight of the guide member 6. Moreover, to support both the increased weight of the movable body and the guide member 6, the base 3 also needs to be thickened to increase rigidity. As a result, the overall weight of the guiding device increases, and the load-bearing capacity of the floor where the guiding device is installed also needs to be increased, thereby increasing the construction cost of the building.

[0138] To address this issue, in the movable body 21 of the first embodiment, the thick-walled portion 21A where the hydrostatic air bearing is disposed is thick, and the thin-walled portion 21B other than the thick-walled portion 21A is thin, thus achieving a lightweight design for the movable body 21 itself. Furthermore, the left air bearing support member 22L and the inner air bearing support member 23, which are respectively disposed in the left width direction air bearing portion 25L and the right width direction air bearing portion 25R, are fixed to the left thick-walled portion 21Aa. Therefore, the rigidity of the support structure of the left width direction air bearing portion 25L and the right width direction air bearing portion 25R is increased, thereby improving the yaw rigidity relative to the moment in the yaw direction of the movable body 21. Therefore, the travel accuracy of the movable part 20 can be improved. In addition, the movable body 21 can be lightweight, thus eliminating the need to increase the weight of the guide member 6 and the base 3, suppressing the increase in the overall weight of the guide device 100, and also reducing the load on the floor where the guide device 100 is installed.

[0139] Furthermore, making the portion of the movable body 21 other than the location of the hydrostatic air bearing thin-walled portion 21B has other effects. Even with precise machining and adjustment of each component, a slight planar deviation remains on the track surface formed by the flat upper surface of the guide member 6. To address this planar deviation, in order to align the left-width direction air bearing portion 25L, right-width direction air bearing portion 25R, left-upward floating air bearing portion 26L, right-upward floating air bearing portion 26R, left-upward and right-upward air bearing portion 27L, and right-upward and right-downward air bearing portion 27R located on the lower surface of the movable body 21 with bearing clearances of a few micrometers to tens of micrometers according to design, and to allow the portion of the movable body 21 other than the location of the hydrostatic air bearing to deform flexibly. When the overall plate thickness of the movable body is increased to improve its rigidity, the lower surface of the movable body can no longer follow the planar deviation of the track surface. In this case, the bearing clearance between a portion of the hydrostatic air bearing and the guide member 6 can no longer maintain the design dimensions, and the bearing performance as designed can no longer be achieved. Since the movable body 21 in the first embodiment is provided with a thin-walled portion 21B that is more easily deformable than the thick-walled portion 21A, even if the aforementioned planar deviation occurs, the lower surface of the movable body 21 can follow the planar deviation of the track surface through the deformation of the thin-walled portion 21B, and the designed performance can be achieved regardless of which hydrostatic air bearing is used.

[0140] <Second Implementation Method>

[0141] Next, the second embodiment will be described. Figure 9 This is a side view of an inkjet printing device. Figure 10 This is the front view of the inkjet printing device. Figure 11 This is a top view of an inkjet printing device. Figure 12 It is along Figure 9 A cross-sectional view of the BB line. Figure 13 This is a top view of the monitor panel. Figure 14 This is a top view showing the inkjet printing apparatus and the temperature control chamber used to control the temperature of the inkjet printing apparatus. Figure 15 This is a side view showing the inkjet printing apparatus and the temperature control chamber used to control the temperature of the inkjet printing apparatus.

[0142] First, the structure of the inkjet printing apparatus 1 equipped with the guide device 100 of this disclosure will be described. For example... Figures 9-11 As shown, the guide device 100 provided in the inkjet printing apparatus 1 has the same structure as the guide device 100 in the first embodiment, and includes a base 3, a guide member 6 and a movable part 20.

[0143] The inkjet printing apparatus 1 includes a frame 2 that supports a base 3 from below. Two first micro-motion mechanisms 12, two second micro-motion mechanisms 13, and one third micro-motion mechanism 14 are mounted on the upper surface of the movable body 21. The two first micro-motion mechanisms 12 are mounted on one of the two diagonals of the movable body 21 when viewed from above. The two second micro-motion mechanisms 13 are mounted on the other diagonal. Each first micro-motion mechanism 12 and each second micro-motion mechanism 13 is mounted directly above the guide member 6 and the upper left floating air bearing portion 26L, or directly above the guide member 6 and the upper right floating air bearing portion 26R. The third micro-motion mechanism 14 is mounted at the center of the upper surface of the movable body 21. A workpiece holding stage 15 is mounted on top of the first micro-motion mechanisms 12, second micro-motion mechanisms 13, and third micro-motion mechanisms 14. The workpiece holding stage 15 is configured to hold the display panel 7 containing the object to be printed on its upper surface.

[0144] Each first micro-motion mechanism 12 includes a drive mechanism (not shown) that drives along the Y-axis direction (left-right direction). This drive mechanism is positioned and controlled by a substrate alignment control unit (not shown). Furthermore, each first micro-motion mechanism 12 includes a sliding mechanism (not shown) capable of moving along the X-axis direction (guide direction) and a rotary sliding mechanism (not shown) capable of rotating around the Z-axis. Each second micro-motion mechanism 13 includes a sliding mechanism (not shown) capable of freely moving along both the X-axis and Y-axis directions and a rotary sliding mechanism (not shown) capable of rotating around the Z-axis. The third micro-motion mechanism 14 includes a sliding mechanism capable of moving only along the Y-axis direction and a rotary sliding mechanism (not shown) capable of rotating around the Z-axis.

[0145] The first micro-motion mechanism 12, the substrate alignment control unit, the second micro-motion mechanism 13, the third micro-motion mechanism 14, and the workpiece holding stage 15 constitute the substrate alignment mechanism 10. The substrate alignment mechanism 10 positions the workpiece holding stage 15 in the Y-axis direction and in the rotational direction about the Z-axis. The movable part 20 and the substrate alignment mechanism 10 constitute the workpiece transport stage 30.

[0146] A linear motor rotor 52 is fixed to the lower surface of the movable body 21. A linear motor fixing rod 4 extending along the guide direction is fixed to the upper surface of the base 3. The linear motor fixing rod 4 is formed parallel to the guide member 6. A linear motor stator 51 extending along the guide direction is fixed on the linear motor fixing rod 4. The linear motor stator 51 and the linear motor rotor 52 constitute a linear motor 50. The linear motor 50 causes the movable part 20 to move relative to the base 3 along the guide direction.

[0147] A linear scale body 61 is fixed to the side of the linear motor fixing rod 4. A linear scale reading head 62 is fixed to the lower surface of the movable part 21 via a reading head bracket 63. The linear scale body 61 and the linear scale reading head 62 constitute a linear scale 60. The linear scale 60 detects the position of the movable part 20 on the base 3.

[0148] The linear motor 50 and the linear scale 60 are controlled by a worktable control unit (not shown) with feedback.

[0149] It should be noted that the fixed position of the linear motor 50 in the Y-axis direction is preferably such that the center of gravity of the workpiece transport table 30 coincides with the drive point of the linear motor rotor 52. With this structure, the torque about the Z-axis applied to the workpiece transport table 30 during acceleration and deceleration can be eliminated. The fixed position of the linear motor 50 in the Z-axis direction is preferably such that the center of gravity of the workpiece transport table 30 is as close as possible to the drive point of the linear motor rotor 52. With this structure, the torque about the Y-axis applied to the workpiece transport table 30 during acceleration and deceleration can be suppressed.

[0150] like Figures 10-12 As shown, two platform bases 42 are provided at the center of the guide direction in the base 3. Each platform base 42 is provided on both sides parallel to the guide direction. A first platform 41a and a second platform 41b are mounted on the two platform bases 42 in a manner that connects the platform bases 42.

[0151] A droplet position measuring camera 43 is mounted on one side of the first mounting frame 41a, and a first inkjet head 40R for ejecting red ink is mounted on the opposite side. A second inkjet head 40G for ejecting green ink is mounted on one side of the second mounting frame, and a third inkjet head 40B for ejecting blue ink is mounted on the opposite side. Each of the first inkjet head 40R, second inkjet head 40G, and third inkjet head 40B is equipped with multiple inkjet heads (not shown). Each inkjet head's droplet ejection is controlled by an ejection control unit (not shown) based on the position of a linear scale 60. The ejection control unit is configured to adjust the ejection timing for each nozzle of each inkjet head. With this configuration, the droplet's position on the display panel 7 can be adjusted for each nozzle.

[0152] It should be noted that the first head device 40R, the second head device 40G, the third head device 40B, and the droplet position measuring camera 43, mounted on the first frame 41a or the second frame 41b, each weigh several hundred kg to several thousand kg. Therefore, when the workpiece transport table 30 accelerates or decelerates, the reaction force during acceleration and deceleration is applied to the entire inkjet printing apparatus 1, causing the entire inkjet printing apparatus 1 to vibrate slightly along the X-axis. It was found that due to this slight vibration, the first frame 41a and the second frame 41b oscillate along the X-axis by a few micrometers, resulting in a decrease in printing position accuracy. Therefore, in the inkjet printing apparatus 1 of the second embodiment, the legs of the first frame 41a and the second frame 41b are formed such that their width in the X-axis direction increases as they tend downwards, thereby solving the above-mentioned problem.

[0153] Next, the display panel 7 of the printed object will be described. For example... Figure 13 As shown, alignment marks 7m are formed at the four corners of the substrate 7P of the display panel 7 for positioning the coating position. An ink bank 7L, which separates the pixels, is formed in the center of the substrate 7P. The alignment marks 7m and the ink bank 7L are formed of a material that forms water-repellent partitions. The ink bank 7L forms red pixels 7R, green pixels 7G, ​​and blue pixels 7B. The substrate 7P can be exemplified as a glass plate with a main surface size of 2200mm × 2300mm and a thickness of 0.5mm.

[0154] Next, the operation of the inkjet printing apparatus 1 configured as described above will be explained. First, the worktable control unit positions the workpiece transport worktable 30 at... Figure 9 The solid line indicates the workpiece feeding position 30a. Then, a workpiece transport mechanism (not shown) is used to place the display panel 7 onto the workpiece holding stage 15, and the workpiece holding stage 15 is used to hold and fix the display panel 7 in place.

[0155] Next, using an alignment camera (not shown), the alignment marks 7m at the four corners of the fixed display panel 7 are observed, and the deviation from the preset target position is measured. Based on the measurement result, the substrate alignment control unit activates the substrate alignment mechanism 10 to position the display panel 7 at the target position. When the positioning of the display panel 7 is completed, the worktable control unit moves the workpiece transport worktable 30 towards... Figure 9 The printing standby position 30b, indicated by the double-dotted line, is moved and positioned.

[0156] Subsequently, the worktable control unit moves the workpiece transport worktable 30 to the workpiece feeding position 30a at a constant speed (300 mm / s in the second embodiment). The measurement result of the linear scale 60 moving at a constant speed is sent to the ejection control unit (not shown). The ejection control unit outputs ejection signals to the inkjet heads (not shown) mounted on the first head device 40R, the second head device 40G, and the third head device 40B, respectively, causing droplets to fall onto the target positions. As a result, red ink falls onto the red pixel 7R of the display panel 7, green ink falls onto the green pixel 7G, and blue ink falls onto the blue pixel 7B.

[0157] It should be noted that, due to variations in the ejection angle of each nozzle in the inkjet head, there are instances where the droplets may not reach the target position. In such cases, a droplet position measurement pattern (not shown) is printed on a glass substrate for measuring the droplet position, instead of the display panel 7. A droplet position measurement camera 43 is used to measure the deviation from the target position. The measurement result is sent to the ejection control unit, and the ejection timing is corrected for each nozzle, thereby correcting the positional deviation in the printing direction (X direction). In this way, droplets can be accurately dropped onto each pixel of the display panel 7.

[0158] It should be noted that the movable body 21 is subjected to the weight of five micro-motion mechanisms (two first micro-motion mechanisms 12, two second micro-motion mechanisms 13, and one third micro-motion mechanism 14) and the weight of the workpiece holding platform 15. In the second embodiment, this applied weight is approximately 1300 kg. Of the approximately 1300 kg weight applied to the movable body 21, approximately 1100 kg is applied at the positions of the four corner micro-motion mechanisms (two first micro-motion mechanisms 12 and two second micro-motion mechanisms 13), which is approximately 85% of the total applied weight. The remaining 15% of the weight is applied at the position of the third micro-motion mechanism in the center of the movable body 21.

[0159] As described above, the first micro-motion mechanism 12 and the second micro-motion mechanism 13 are located directly above the guide member 6 and the left upper floating air bearing section 26L, or directly above the guide member 6 and the right upper floating air bearing section 26R. Therefore, the workpiece transport table 30 is configured such that 85% of the total weight of the components mounted on the movable body 21 is directly applied to the upper floating air bearing section 26, and the remaining 15% is indirectly applied to the upper floating air bearing section 26 via the movable body 21.

[0160] In addition, the plate thickness is thick only near the static pressure air bearings at the four corners of the movable body 21, and thin elsewhere, so the upward floating air bearing portions 26 at the four corners can easily follow the plane formed by the upper surfaces of the two guide members 6.

[0161] Furthermore, almost all the weight of the components on the movable body 21 is applied to these four locations directly above the levitation air bearing section 26, so the levitation air bearing section 26 can be easily aligned parallel to the upper surface of the guide member 6, thus maximizing the performance of the levitation air bearing section 26.

[0162] Furthermore, the upward-floating air bearing section 26 is supported by the guide member 6. The guide member 6 is configured to be supported by a leveling block 5, a frame 2, and an adjusting foot 8, which are respectively arranged directly below the guide member 6 via the base 3, allowing for leveling and adjustment of the guide member 6 directly below it. With this structure, the upper surface of the guide member 6 can be easily made flat, and a plurality of base perforations 3A are formed in the base 3, except directly below the guide member 6. Moreover, a space can be formed in the frame 2, except directly below the guide member 6, without the use of steel pipes. By forming the base perforations 3A and the space in this way, the overall weight reduction of the inkjet printing apparatus 1 can be achieved. In addition, by forming a downward flow of purified air (downward airflow) through the base perforations 3A around the guide member 6, the overall cleanliness of the inkjet printing apparatus 1 can be improved, and the occurrence of printing defects caused by particulate matter can be suppressed. Furthermore, by forming a temperature-controlled airflow that passes through the base perforation 3A from top to bottom, the overall temperature of the inkjet printing apparatus 1 can be kept constant, and deviations in the printing position caused by thermal expansion can be suppressed.

[0163] This describes the structure of the inkjet printing apparatus 1 described above, which is capable of suppressing printing position deviations caused by thermal expansion. For example... Figure 14 and Figure 15 As shown, the inkjet printing apparatus 1 is surrounded by a booth 71. A first air conditioner 73a, a second air conditioner 73b, and a third air conditioner 73c are fixed to the ceiling of the booth 71. The first air conditioner 73a is positioned above the workpiece feeding position 30a. The third air conditioner 73c is positioned above the printing standby position 30b. The second air conditioner 73b is positioned between the first air conditioner 73a and the third air conditioner 73c, and above the first frame 41a and the second frame 41b.

[0164] By arranging three air conditioners 73a, 73b, and 73c in room 71, the room 71 can be divided into three temperature-controlled zones: a first temperature-controlled zone 72a, a second temperature-controlled zone 72b, and a third temperature-controlled zone 72c. Temperature-set air is then blown independently into each of these zones. The blown air passes around the inkjet printing device 1 and through the gap between the base perforation 3A of the base 3 and the frame 2, and is then recovered via a return channel (not shown) and returned to each of the air conditioners 73a, 73b, and 73c. ​​This return channel is one example of the recovery unit disclosed herein. It should be noted that an intake port can also be provided in the frame of the frame 2 and used as a return channel.

[0165] Next, the reason for dividing the chamber 71 into three temperature-controlled zones 72a, 72b, and 72c will be explained. There are multiple heat-generating areas in the inkjet printing apparatus 1. The area with the highest heat generation is the printhead unit. The inkjet head control components within the printhead unit generate heat. Therefore, the temperature around the first frame 41a and the second frame 41b of the inkjet printing apparatus 1 tends to rise more easily than other areas. Therefore, when the temperature of the air blown onto the inkjet printing apparatus 1 is kept uniform throughout the entire area, the temperature around the first frame 41a and the second frame 41b, which generate the most heat, becomes higher than other areas. As a result, the temperature of the workpiece holding stage 15 passing under the first frame 41a and the second frame 41b also varies depending on the frequency of passage. For example, the temperature of the workpiece holding stage 15 when it is continuously stopped immediately after passing under the first frame 41a and the second frame 41b during normal printing is higher than the temperature of the workpiece holding stage 15 immediately after it has stopped at the workpiece feed position 30a. As the temperature of the workpiece holding stage 15 rises, the temperature of the display panel 7 adsorbed on it also rises, and the display panel 7 extends due to thermal expansion. When the display panel 7 extends, it can no longer print to the target pixel position.

[0166] In the second embodiment, by setting the temperature of the second air conditioner 73b lower than that of the first air conditioner 73a and the third air conditioner 73c, the ambient temperature of the first stand 41a and the second stand 41b of the inkjet printing apparatus 1 is adjusted to be the same as the temperature of the workpiece feeding position 30a and the printing standby position 30b. With this structure, the temperature of the workpiece holding stage 15 can be maintained at a constant temperature regardless of the printing frequency. Therefore, printing can always be performed on the target pixel position of the display panel 7, regardless of the printing frequency.

[0167] Furthermore, in the second embodiment, a first air conditioner 73a and a third air conditioner 73c are respectively arranged above the workpiece feeding position 30a and the printing standby position 30b. Due to the surrounding equipment configuration of the inkjet printing apparatus 1, there is a possibility of temperature unevenness occurring in the room 71 even when the first air conditioner 73a and the third air conditioner 73c are set to the same temperature. In such cases, by setting the first air conditioner 73a and the third air conditioner 73c to different temperature settings, this temperature unevenness can be eliminated.

[0168] As described above, by making the plate near the hydrostatic air bearing of the movable body 21 thicker and the plate at other locations thinner, and by applying most of the weight of the components mounted on the movable body 21 to the four floating air bearing portions 26 positioned directly above the guide member 6, the performance of each hydrostatic air bearing can be maximized. Furthermore, with this structure, base perforations 3A can be formed over a wide area of ​​the base 3, making the inkjet printing apparatus 1 lighter. In addition, a large space can be formed in the frame 2 supporting the base 3, excluding the area directly below the guide member 6, ensuring good airflow not only around the inkjet printing apparatus 1 but also inside the apparatus. As a result, the cleanliness and temperature control accuracy of the inkjet printing apparatus 1 can be improved. Moreover, an inkjet printing apparatus 1 can be provided that achieves high precision in travel accuracy by improving yaw rigidity, and can always perform high-positional-precision printing on lightweight display panels 7, which are the printing targets.

[0169] [Variations on the implementation method]

[0170] This disclosure is not limited to the embodiments described herein, and various modifications can be made without departing from its spirit. Furthermore, the above embodiments and the modifications shown below can be combined arbitrarily as long as they function properly.

[0171] For example, in the first embodiment, the movable body 21 is provided with a pair of left-up-down direction air bearing portions 27L and right-up-down direction air bearing portions 27R, respectively. However, since the movable body 21 itself is large and heavy, the rigidity of the hydrostatic air bearing can be ensured solely by the balance between its own weight and the upward-floating air bearing portion 26. Therefore, it is also possible to achieve the following: Figure 16 As shown, the left-up-down direction air bearing section 27L and the right-up-down direction air bearing section 27R are not configured. Similarly, in the second embodiment, since the workpiece conveying table 30 itself is large and heavy, the rigidity of the hydrostatic air bearing can be ensured solely by the balance between its own weight and the upward floating air bearing section 26, so the left-up-down direction air bearing section 27L and the right-up-down direction air bearing section 27R can also be omitted.

[0172] Furthermore, the right thick-walled portion 21Ab may not be formed to the same thickness as the left thick-walled portion 21Aa; for example, it may be the same as the thin-walled portion 21B. The advantage of making the right thick-walled portion 21Ab the same thickness as the left thick-walled portion 21Aa, as in the first and second embodiments, is that the mounting surfaces of the left upper floating air bearing portion 26L and the right upper floating air bearing portion 26R can be accurately aligned to the same plane by simultaneously grinding them. As a result, the opposing left guide member 6L and right guide member 6R can also be set to the same height, and the left guide member 6L and right guide member 6R can also be accurately machined to the same height by simultaneously grinding them.

[0173] In the first and second embodiments, the lower surface of the movable body 21 is provided with independently constructed left-upward floating air bearing portion 26L, right-upward floating air bearing portion 26R, upper left-downward air bearing portion 27La, and upper right-downward air bearing portion 27Ra. However, it is also possible to configure a single hydrostatic air bearing having the bearing performance of the left-upward floating air bearing portion 26L and the upper left-downward air bearing portion 27La, and a single hydrostatic air bearing having the bearing performance of the right-upward floating air bearing portion 26R and the upper right-downward air bearing portion 27Ra. Alternatively, each hydrostatic air bearing may be composed of multiple hydrostatic air bearings.

[0174] In the second embodiment, the first micro-motion mechanism 12 and the second micro-motion mechanism 13 are mechanisms that can move along the X-axis direction, the Y-axis direction and the rotational direction about the Z-axis, and the third micro-motion mechanism 14 is a mechanism that can move along the Y-axis direction and the rotational direction about the Z-axis. However, the first micro-motion mechanism 12, the second micro-motion mechanism 13 and the third micro-motion mechanism 14 may also be configured to rotate 45° about the Z-axis respectively.

[0175] In the second embodiment, by eliminating, for example, the sliding mechanism in the X-axis direction of one of the two first micro-motion mechanisms 12, the workpiece holding stage 15 can be moved along the Y-axis and about the Z-axis. In this case, the third micro-motion mechanism 14 may not be arranged in the center of the movable body 21.

[0176] In the second embodiment, printing is performed with a single scan, but it can also be performed by repeated scans as needed.

[0177] The guiding device, workpiece conveying table, and inkjet printing device disclosed herein can improve the traveling accuracy of the movable part and achieve overall lightweighting of the device.

[0178] Industrial availability

[0179] The guiding device, workpiece conveying table, and inkjet printing apparatus disclosed herein are effective for applying ink to large printed objects and are applicable to apparatuses that efficiently apply ink and other materials to large printed objects in printing organic EL light emitters, hole transport layers, or electron transport layers, or color filters.

Claims

1. A guiding device, wherein, The guiding device includes: abutment; A first guide member and a second guide member extend along the guide direction on the base; The movable part moves along the first guide member and the second guide member; and An air bearing section supports the movable part, enabling it to move. The movable part includes: A plate-shaped movable body located on the first guide member and the second guide member; and A first bearing support member and a second bearing support member extend downward from the movable body and sandwich the first guide member in the width direction. The air bearing section includes: A first width-direction air bearing portion and a second width-direction air bearing portion support the movable portion in the width direction on the first guide member, and are respectively disposed on the first bearing support member and the second bearing support member; as well as A first upward-floating air bearing section supports the movable part vertically against the first guide member and is disposed on the movable body. The movable body is formed such that the thickness of the thick-walled portion, including the configuration positions of the first bearing support member, the second bearing support member, and the first floating air bearing portion, is greater than the thickness of other portions.

2. The guiding device according to claim 1, wherein, The movable part includes a third bearing support member that extends downward from the movable body and is configured to be located on the opposite side of the first guide member relative to the second guide member. The first bearing support member is configured to be located on the opposite side of the second guide member relative to the first guide member. The first guide member and the second guide member each include a first protrusion and a second protrusion that extend apart from each other toward the outer side in the width direction. The air bearing section includes: The second upward-floating air bearing section supports the movable part in the vertical direction on the second guide member and is disposed on the movable body; A pair of first vertically oriented air bearing portions, which support the movable part vertically against the first protrusion, and one portion is disposed on each of the movable body and the first bearing support member; and A pair of second vertically oriented air bearings support the movable part in the vertical direction against the second protrusion, and one of each is disposed on the movable body and the third bearing support member. The thick-walled portion includes: The first thick-walled portion includes the arrangement positions of the first bearing support member, the second bearing support member, the first upward-floating air bearing portion, and one of the first vertically oriented air bearing portions; and The second thick-walled portion includes the arrangement of the third bearing support member, the second upward floating air bearing portion, and one of the second vertical air bearing portions.

3. The guiding device according to claim 1, wherein, The movable part includes a third bearing support member that extends downward from the movable body and is configured to be located on the opposite side of the first guide member relative to the second guide member. The air bearing section includes a second upward-floating air bearing section, which supports the movable part in the vertical direction against the second guide member and is disposed on the movable body. The thick-walled portion includes: The first thick-walled portion includes the arrangement positions of the first bearing support member, the second bearing support member, and the first upward-floating air bearing portion; and The second thick-walled portion includes the arrangement of the third bearing support member and the second upward-floating air bearing portion.

4. The guiding device according to claim 1, wherein, The first guide member includes a first protrusion extending outward toward the width direction. The air bearing section includes a pair of first vertical air bearing sections, which support the movable part on the first protrusion in the vertical direction, and one of each is disposed on the movable body and the first bearing support member.

5. The guiding device according to claim 1, wherein, The movable part includes a third bearing support member that extends downward from the movable body and is configured to be located on the opposite side of the first guide member relative to the second guide member. The second guide member includes a second protrusion extending outward toward the width direction. The air bearing section includes a pair of second vertical air bearing sections, which support the movable part in the vertical direction on the second protrusion, and one of each is disposed on the movable body and the third bearing support member.

6. The guiding device according to claim 1, wherein, The length of the guiding direction of at least one of the first bearing support member, the second bearing support member, and the first floating air bearing portion is shorter than the length of the guiding direction of the thick-walled portion.

7. The guiding device according to any one of claims 1 to 6, wherein, A movable body perforation is formed in the other parts of the movable body, which penetrates the movable body.

8. The guiding device according to any one of claims 1 to 6, wherein, A base perforation is formed in the portion of the base where the first guide member and the second guide member are not disposed.

9. A workpiece conveying worktable, wherein, The workpiece conveying worktable includes: The guiding device according to any one of claims 1 to 7; A micro-motion mechanism, disposed on the thick-walled portion of the movable body; and A workpiece holding stage is mounted on the micro-motion mechanism.

10. A workpiece conveying worktable, wherein, The workpiece conveying worktable includes: The guiding device as described in claim 8; A micro-motion mechanism, disposed on the thick-walled portion of the movable body; and A workpiece holding stage is mounted on the micro-motion mechanism.

11. An inkjet printing apparatus, wherein, The inkjet printing apparatus includes: The workpiece conveying worktable as described in claim 9 or 10; A platform, which is disposed on the base; and An inkjet head, disposed on the stage, is used to eject ink onto a printing object held on the workpiece holding stage.

12. An inkjet printing apparatus comprising: The workpiece conveying worktable as described in claim 10; A platform, which is disposed on the base; and An inkjet head, disposed on the stage, is used to eject ink onto a printing object held on the workpiece holding stage, wherein... The inkjet printing apparatus also features: The room that surrounds the entire inkjet printing apparatus; An air conditioner that causes temperature-regulated air to flow downwards from above within the area surrounded by the room; and The recovery unit recovers the gas flowing through the air conditioner via perforations in the base.

13. The inkjet printing apparatus according to claim 12, wherein, Multiple air conditioners, each capable of independently setting the temperature of the gas, are arranged along the guiding direction.

Images