A method for optimizing electric field uniformity using equivalent electrodes

Abstract

This invention relates to a method for optimizing electric field uniformity using equivalent electrodes, comprising: determining the cathode tip structure and the number of auxiliary electrodes of an electrostatic deflection plate according to the requirements of a good field region, and parameterizing the cathode tip and auxiliary electrodes; optimizing the electric field uniformity of the good field region using an optimization algorithm based on the parameterized cathode tip and auxiliary electrodes; optimizing the electric field uniformity of the good field region using an optimization algorithm based on the parameterized cathode tip and auxiliary electrodes to obtain the optimal cathode tip structure and auxiliary electrode parameters that meet the electric field optimization requirements; merging and connecting the optimal cathode tip and auxiliary electrodes into an equivalent electrode with a special structure; further optimizing the shape of the equivalent electrode to obtain an equivalent electrode model. This invention utilizes equivalent electrodes to reduce the number of auxiliary electrodes while ensuring high electric field uniformity, thereby improving the overall reliability of the equipment and reducing operational risks.

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