Article storage device and logistics system of semiconductor manufacturing plant provided with the same

Abstract

Embodiments of the present invention provide a semiconductor manufacturing plant article storage device capable of supplying power with a simpler structure and a semiconductor manufacturing plant logistics system having the same. A semiconductor manufacturing plant article storage device according to an aspect of the present invention includes: a storage unit disposed around a track providing a travel path of a transport vehicle and storing a transport container in which a wafer is accommodated; a purge unit supplying an inert gas to the inside of the transport container; a control unit identifying the transport container stored in the storage unit and controlling the purge unit to supply the inert gas to the transport container; and a power supply unit supplying a current induced from a power supply cable disposed along the track to the control unit.

Description

Technical Field

[0001] This invention relates to a storage device for semiconductor manufacturing plants that simplifies installation operations, and a logistics system for semiconductor manufacturing plants equipped with the device. Background Technology

[0002] Semiconductor manufacturing is a process of producing a final product through dozens to hundreds of steps on a substrate (wafer or glass). Each step can be performed using manufacturing equipment that executes the corresponding process. Once a process on a particular manufacturing device is completed, the substrate can be transported to the next manufacturing device to perform the next process, and can be stored in a storage device for a certain period. Here, the wafer is stored or transported in a transport container such as a FOUP (Front Opening Unified Pod).

[0003] As mentioned above, a logistics system refers to a system for transporting or storing goods for manufacturing processes. It can be broadly divided into goods conveying equipment for transporting goods and goods storage equipment for storing goods.

[0004] Goods storage equipment includes warehouse-like devices, such as stockers. Additionally, equipment for temporarily storing goods around the path of a goods transport vehicle can include side track buffers located to the side of the track and under track buffers located below the track.

[0005] On the other hand, storage equipment such as side rail buffer zones or under-rail buffer zones requires electricity to identify transport containers and inject inert gas (e.g., N2 gas) into them, as well as communication equipment for data exchange with higher-level control and management devices. However, with the increasing size of semiconductor manufacturing plants, the area required for storing equipment has also increased, making it very difficult to install power supply and communication equipment individually. Summary of the Invention

[0006] Therefore, embodiments of the present invention provide a storage device for a semiconductor manufacturing plant capable of supplying power in a more simplified structure, and a logistics system for a semiconductor manufacturing plant equipped with the device.

[0007] In addition, embodiments of the present invention provide a storage device for a semiconductor manufacturing plant that enables communication in a simplified structure, and a logistics system for a semiconductor manufacturing plant equipped with the device.

[0008] The problems solved by the present invention are not limited to those mentioned above, and those skilled in the art can clearly understand other problems not mentioned from the following description.

[0009] According to one aspect of the present invention, a storage device for a semiconductor manufacturing plant includes: a storage unit disposed around a track providing a travel path for a transport vehicle, and storing a transport container containing wafers; a cleaning unit supplying an inert gas into the interior of the transport container; a control unit identifying the transport container stored in the storage unit and controlling the cleaning unit to supply the inert gas to the transport container; and a power supply unit supplying current induced from a power cable arranged along the track to the control unit.

[0010] According to an embodiment of the present invention, the storage unit may include: a frame disposed on the side of the track; a support platform disposed on the lower surface of the frame and configured to hold the transport container; and an RFID reader disposed on the support platform to acquire identification information of the transport container and transmit it to the control unit.

[0011] According to an embodiment of the present invention, the purging unit may include: a gas supply port disposed in a mounting slot of the support platform and communicating with a gas inlet formed in the delivery container when the delivery container is mounted in the mounting slot; and a gas supply unit that supplies the inert gas to the delivery container through the gas supply port according to a control signal received from the control unit.

[0012] According to an embodiment of the present invention, the gas supply unit may transmit information related to the supply status of the inert gas to the control unit.

[0013] According to an embodiment of the present invention, the control unit may include: an identification information acquisition unit for acquiring identification information of the delivery container from the RFID reader; a gas supply control unit for transmitting the control signal to the gas supply unit if the delivery container is identified, and receiving information related to the supply status of the inert gas from the gas supply unit; and an output unit for outputting whether the delivery container is placed in each placement slot of the storage unit and the supply status of the inert gas.

[0014] According to an embodiment of the present invention, the output unit may include: a light-emitting device that displays whether the delivery container in each of the placement slots is in place and the supply status of the inert gas.

[0015] According to an embodiment of the present invention, the light-emitting device may be configured to display, facing the ground of the semiconductor manufacturing plant, whether the delivery container is placed and the supply status of the inert gas.

[0016] According to an embodiment of the present invention, the power supply unit may include: a current converter that senses current from the power supply cable; and a power supply cable that supplies current from the current converter to the control unit, the power supply cable being configured to be close to or embedded in the track and the storage unit so as not to interfere with the transport vehicle.

[0017] According to an embodiment of the present invention, the current converter may include: an annular core component configured to surround the power supply cable in an annular shape and form a magnetic field by current flowing along the power supply cable; and a coil component wound around the core component and inducing current by the magnetic field.

[0018] According to another aspect of the present invention, a storage device for a semiconductor manufacturing plant includes: a storage unit disposed around a track providing a travel path for a transport vehicle, and storing a transport container containing wafers; a cleaning unit supplying inert gas to the interior of the transport container; a control unit identifying the transport container stored in the storage unit and controlling the cleaning unit to supply the inert gas to the transport container; a power supply unit supplying current induced from a power cable arranged along the track to the control unit; and a controller management unit wirelessly connected to the control unit to manage the operation of the control unit.

[0019] According to an embodiment of the present invention, the storage unit may include: a frame disposed on the side of the track; a support platform disposed on the lower surface of the frame and configured to hold the transport container; and an RFID reader disposed on the support platform to acquire identification information of the transport container and transmit it to the control unit.

[0020] According to an embodiment of the present invention, the purging unit may include: a gas supply port disposed on the support platform and communicating with a gas inlet formed in the delivery container when the delivery container is mounted on the support platform; and a gas supply control unit that supplies the inert gas to the delivery container through the gas supply port according to a control signal received from the control unit.

[0021] According to an embodiment of the present invention, the gas supply unit may transmit information related to the supply status of the inert gas to the control unit.

[0022] According to an embodiment of the present invention, the control unit may include: an identification information acquisition unit for acquiring identification information of the delivery container from the RFID reader; a gas supply control unit for transmitting the control signal to the gas supply unit if the delivery container is identified, and receiving information related to the supply status of the inert gas from the gas supply unit; and an output unit for outputting whether the delivery container is placed in each placement slot of the storage unit and the supply status of the inert gas.

[0023] According to an embodiment of the present invention, the output unit may include: a light-emitting device that displays whether the delivery container is placed on each of the support platforms and the supply status of the inert gas, the light-emitting device being configured to display the placement of the delivery container and the supply status of the inert gas facing the ground of the semiconductor manufacturing plant.

[0024] According to an embodiment of the present invention, the power supply unit may include: a current converter that senses current from the power supply cable; and a power supply cable that supplies current from the current converter to the control unit, the power supply cable being configured to be close to or embedded in the track and the storage unit so as not to interfere with the transport vehicle.

[0025] According to an embodiment of the present invention, the current converter may include: an annular core component configured to surround the power supply cable in an annular shape and form a magnetic field by current flowing along the power supply cable; and a coil component wound around the core component and inducing current by the magnetic field.

[0026] According to an embodiment of the present invention, the control unit may further include: a wireless communication module that transmits information related to whether the delivery container is placed on each of the support platforms and the supply status of the inert gas to the controller management unit.

[0027] According to an embodiment of the present invention, the control unit and the controller management unit may perform wireless communication through an access point located on the ceiling of the semiconductor manufacturing plant. The controller management unit is located on the ground of the semiconductor manufacturing plant and receives information related to the placement of the delivery container and the supply status of the inert gas from the control unit through the access point, and transmits signals for controlling the control unit to the control unit.

[0028] The logistics system of a semiconductor manufacturing plant according to the present invention includes: a track disposed on the ceiling of the semiconductor manufacturing plant to provide a path for the movement of transport vehicles; a power cable disposed along the track to supply power to the transport vehicles; and a storage device for storing transport containers from the transport vehicles, the storage device including: a storage unit disposed around the track and storing transport containers containing wafers; a cleaning unit for supplying inert gas to the interior of the transport containers; a control unit for identifying the transport containers stored in the storage unit and controlling the cleaning unit to supply the inert gas to the transport containers; a power supply unit for supplying current induced from the power cable to the control unit; and a controller management unit connected to the control unit wirelessly to manage the operation of the control unit.

[0029] According to the present invention, by using the current induced from the power supply cable arranged along the track, it is possible to supply power to the control unit of the item storage device in a more simplified structure.

[0030] Furthermore, according to the present invention, the controller management unit manages the operation of the control unit via wireless communication, thereby enabling communication in a more simplified structure.

[0031] The effects of the present invention are not limited to those mentioned above, and those skilled in the art can clearly understand other effects not mentioned from the following description. Attached Figure Description

[0032] Figure 1 The invention provides a summary of a semiconductor manufacturing plant and logistics system to which the present invention can be applied.

[0033] Figure 2 as well as Figure 3 This illustration shows a logistics system for a semiconductor manufacturing plant according to an embodiment of the present invention.

[0034] Figure 4 The structure of the control unit of the storage device according to an embodiment of the present invention is shown.

[0035] Figure 5 This is a diagram illustrating the output section of the control unit according to an embodiment of the present invention.

[0036] Figure 6 as well as Figure 7 This is a diagram illustrating a power supply unit according to an embodiment of the present invention.

[0037] Figure 8 Another example of a logistics system for a semiconductor manufacturing plant according to an embodiment of the present invention is shown.

[0038] Figure 9The structure of the control unit of the storage device according to an embodiment of the present invention is shown.

[0039] Figure 10 The diagram illustrates the inter-entity connection structure of a logistics control system for a semiconductor manufacturing plant according to an embodiment of the present invention.

[0040] Figure 11 The hierarchical structure of a logistics control system for a semiconductor manufacturing plant according to an embodiment of the present invention is shown.

[0041] (Explanation of reference numerals in the attached diagram)

[0042] 10: Track

[0043] 100: Transport vehicle

[0044] 20: Power supply cable

[0045] 30: Goods storage equipment

[0046] 310: Storage Unit

[0047] 312: Framework

[0048] 314: Support platform

[0049] 316: RFID reader / writer

[0050] 320: Cleaning Unit

[0051] 322: Gas supply port

[0052] 324: Gas Supply Department

[0053] 330: Control Unit

[0054] 332: Identification Information Acquisition Department

[0055] 334: Gas Supply Control Department

[0056] 336: Output Department

[0057] 338: Wireless communication module

[0058] 340: Power Supply Unit

[0059] 342: Current converter

[0060] 344: Power supply cable

[0061] 350: Controller Management Unit

[0062] 5: Conveying Container

[0063] AP: Access Point

[0064] OCS: Conveyor Control System Detailed Implementation

[0065] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art to which this invention pertains can readily implement it. The present invention can be implemented in various different forms and is not limited to the embodiments described herein.

[0066] For the purpose of clearly illustrating the invention, parts that are not related to the description have been omitted, and the same or similar components are marked with the same reference numerals throughout the specification.

[0067] Furthermore, in multiple embodiments, the same reference numerals are used for components with the same structure, and only representative embodiments are described. In other embodiments, only representative embodiments and other components are described.

[0068] In the specification as a whole, when it is stated that a certain part is "connected (or combined)" with other parts, it not only refers to the case of "direct connection (or combination)" but also to the case of "indirect connection (or combination)" through other components. In addition, when it is stated that a certain part "includes" a certain constituent element, unless there is a particularly contrary statement, it means that other constituent elements may also be included, rather than excluding other constituent elements.

[0069] Unless otherwise defined, technical or scientific terms, including those commonly understood by one of ordinary skill in the art to which this invention pertains, shall have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in commonly used dictionaries shall be interpreted as having the same meaning as they have in the context of the relevant art, and shall not be ideally or excessively interpreted as having a formal meaning unless expressly defined in this application.

[0070] Figure 1 The invention provides a summary of a semiconductor manufacturing plant and logistics system to which the present invention can be applied.

[0071] A semiconductor manufacturing plant consists of one or more cleanrooms, each equipped with manufacturing equipment 1 for performing semiconductor manufacturing processes. Typically, multiple manufacturing processes are repeatedly performed on a substrate (e.g., a wafer) to complete the processed substrate. Once the manufacturing process is completed in a specific semiconductor manufacturing equipment, the substrate is transported to equipment for the next manufacturing process. Here, wafers can be transported in a transport container (e.g., a front-opening unified pod, FOUP) capable of holding multiple substrates. The transport container containing the wafers can be transported by a transport vehicle 100 (e.g., overhead hoist transport, OHT).

[0072] Reference Figure 1 This can be achieved by providing manufacturing equipment 1 for performing processes within a semiconductor manufacturing plant, and providing a transport vehicle 100 that simultaneously transports items to the manufacturing equipment 1 via a transport path (e.g., a ceiling track) and a travel track 10 that forms a transport path for transporting items between manufacturing equipment 1. Here, when the transport vehicle 100 transports items between manufacturing equipment 1, items can be transported directly from one manufacturing equipment to another, or items can be stored in a storage device and then transported to another manufacturing equipment.

[0073] The storage device can be a storage cabinet 2 in the form of a multi-tiered rack. Alternatively, the storage device can provide items storage devices 30 such as a side track buffer located to the side of the track 10 and an under track buffer located below the track 10. In this document, the side track buffer located to the side of the track 10 is described as an example of the items storage device 30, but the scope of the invention is not limited to this; it can be applied not only to the under track buffer but also to any form of storage device located around the travel path of the transport vehicle 100.

[0074] The following describes the storage equipment 30 for semiconductor manufacturing plants that simplifies installation operations, as well as the logistics system of semiconductor manufacturing plants equipped with it.

[0075] Figure 2 as well as Figure 3 This illustration shows a logistics system for a semiconductor manufacturing plant according to an embodiment of the present invention.

[0076] The logistics system of the semiconductor manufacturing plant according to the present invention includes: a track 10 provided on the roof of the semiconductor manufacturing plant to provide a path for the movement of a transport vehicle 100; a power cable 20 provided along the track 10 to supply power to the transport vehicle 100; and a goods storage device 30 for storing transport containers 5 from the transport vehicle 100.

[0077] like Figure 2 as well as Figure 3 As shown, track 10 provides a path for the wheels 120 of the transport vehicle 100 to travel on, and is composed of a pair of track components. The transport vehicle 100 travels along the track and conveys the transport container 5. Figure 3As shown, the handling unit that holds the conveying container 5 can load and unload the conveying container 5 onto the item storage device 30 (or manufacturing device 1) by sliding and lifting. The conveying vehicle 100 may include: a driving body 110 that generates power for acceleration or deceleration; wheels 120 that are coupled to the driving body 110 and rotate along the track 10; a power receiving unit 130 that receives power from the power supply cable 20; an item moving unit 140 that holds the conveying container 5 and performs loading and unloading; and a frame 150 that protects the conveying container 5 and is equipped with sensors for sensing the front or rear.

[0078] The power supply cable 20 is installed along the track 10 and supplies power to the transport vehicle 100. The power receiving unit of the transport vehicle 100 uses the induced current generated from the power supply cable 20 to supply the driving body 110 with the power required for the operation of the transport vehicle 100.

[0079] The article storage device 30 according to the present invention includes: a storage unit 310 disposed on the side of the track 10 and storing a transport container 5 containing a wafer; a cleaning unit 320 that supplies inert gas to the interior of the transport container 5; a control unit 330 that identifies the transport container 5 stored in the storage unit 310 and controls the cleaning unit 320 to supply inert gas to the transport container 5; and a power supply unit 340 that supplies current induced from a power supply cable 20 disposed along the track 10 to the control unit.

[0080] According to an embodiment of the present invention, the storage unit 310 may include: a frame 312 disposed on the side of the track 10; a support platform 314 disposed on the lower surface of the frame 312 and configured to hold the transport container 5; and an RFID reader 316 disposed on the support platform 314, which acquires the identification information of the transport container 5 and transmits it to the control unit 330.

[0081] Frame 312 serves as a structure providing space for storing and transporting container 5, i.e., it can be used as... Figure 2 as well as Figure 3 As shown, it can be installed along the track 10 on both sides, or it can be installed on only one side. The frame 312 can be installed on the ceiling and can be configured with a support 12 for installation on the ceiling.

[0082] A support platform 314 is disposed below the frame 312 and provides space for placing the transport container 5. The support platform 314 may consist of multiple mounting slots 314A capable of holding the transport container 5. A purging unit 320 for supplying inert gas to the transport container 5 may be configured on the support platform 314.

[0083] On the other hand, cables for transmitting signals and power supply cables 344 can be laid along the structure of the frame 312 and the support platform 314, and pipes, switches and the like for supplying inert gas can be provided.

[0084] An RFID reader 316 is configured in each mounting slot 314A of the support 314 and identifies the RFID (radio frequency identification) tag attached to the transport container 5, thereby providing the identification information of the transport container 5 to the control unit 330. On the other hand, as a method for obtaining the identification information of the transport container 5, not only RFID can be used, but also tags such as barcodes and QR codes can be used, and devices for identifying tags can be used.

[0085] According to the present invention, the cleaning unit 320 includes: a gas supply port 322, each of the mounting slots 314A provided on the support platform 314, which communicates with the gas inlet hole (not shown) formed in the transport container 5 when the transport container 5 is mounted on the mounting slot 314A; and a gas supply section 324, which supplies inert gas into the transport container 5 through the gas supply port 322 according to the control signal received from the control unit 330.

[0086] The purging unit 320 supplies inert gas (e.g., N2 gas) to maintain a clean environment inside the transport container 5 containing the wafers. Multiple gas supply ports 322 can be configured in each mounting slot 314A and can be located at positions corresponding to the gas inlet holes provided in the transport container 5. The gas supply unit 324 can be connected to an external gas supply source to supply inert gas to the gas supply ports 322 and can include valves for opening or closing to supply inert gas from the gas supply source. The opening or closing of the valves can be adjusted by the control unit 330. Alternatively, the opening or closing of the valves can be adjusted based on the pressure measured inside the transport container 5, although not shown, and can also be configured as a discharge port for removing gas from inside the transport container 5.

[0087] According to an embodiment of the present invention, the gas supply unit 324 can transmit information related to the supply status of inert gas to the control unit 330. The gas supply unit 324 may include a flow meter, and may transmit a signal indicating that inert gas is supplied to the control unit 330 if the gas flow rate measured by the flow meter is greater than a reference value, and a signal indicating that inert gas is not supplied to the control unit 330 if the gas flow rate is less than the reference value. Alternatively, the gas supply unit 324 may also transmit a signal indicating whether inert gas is supplied to the control unit 330 based on whether a valve controlling the supply of inert gas is open or closed.

[0088] According to embodiments of the present invention, such as Figure 4As shown, the control unit 330 may include: an identification information acquisition unit 332, which acquires identification information of the delivery container 5 from the RFID reader 316; a gas supply control unit 334, which, if the delivery container 5 is identified, transmits a control signal instructing the gas supply unit 324 to supply inert gas, and receives information related to the state of inert gas supply from the gas supply unit 324; and an output unit 336, which outputs whether the delivery container 5 is placed in each slot 314A of the storage unit 310 and the state of inert gas supply.

[0089] The identification information acquisition unit 332 can acquire and store the identification information (RFID) of the transport container 5 received from the RFID reader / writer 316. In particular, the identification information acquisition unit 332 can provide the gas supply control unit 334 and the output unit 336 with the placement information of the transport container 5 in each placement slot 314A of the storage unit 310, as well as the identification information.

[0090] If the gas supply control unit 334 receives the placement and identification information of the delivery container 5 in each placement slot 314A provided by the identification information acquisition unit 332, the gas supply unit 324 transmits a control signal to supply inert gas to the delivery container 5 placed in the corresponding placement slot 314A. Alternatively, the gas supply control unit 334 can determine whether the delivery container 5 is placed based on a load sensor (not shown) provided for each placement slot 314A of the support platform 314. If the load sensor detects placement of the delivery container 5, the gas supply unit 324 can control the supply of inert gas. Furthermore, if the delivery container 5 is detected to have detached from a specific placement slot 314A, the gas supply control unit 334 can control the gas supply unit 324 to interrupt the supply of inert gas in the corresponding placement slot 314A. The gas supply control unit 334 can provide information on the status of whether inert gas is being supplied to the output unit 336 according to each placement slot 314A.

[0091] Figure 5 This is a diagram illustrating the output section 336 of the control unit 330 according to an embodiment of the present invention.

[0092] According to an embodiment of the present invention, the output unit 336 may include light-emitting devices 336A and 336B, which respectively display whether the delivery container 5 of each placement slot 314A is placed or not, and the supply status of inert gas. The output unit 336 can output the placement status of the delivery container 5 of each placement slot 314A provided by the identification information acquisition unit 332 to the first light-emitting device 336A, and can also output the supply status of inert gas in each placement slot 314A provided by the gas supply control unit 334 to the second light-emitting device 336B. Figure 5As shown, the first light-emitting device 336A and the second light-emitting device 336B are provided to respectively display whether the delivery container 5 is placed in each of the placement slots 314A and the gas supply status. The first light-emitting device 336A and the second light-emitting device 336B can display the working status using colors such as green and red. If there is no delivery container 5 in the placement slot 314A, the light-emitting device can be turned off. Furthermore, the output unit 336 can also be implemented using a display panel such as an LCD or OLED, and can be configured to output not only the placement status and whether the gas is supplied, but also information such as the ID of the delivery container 5 and the inert gas supply flow rate.

[0093] According to an embodiment of the present invention, the light-emitting devices 336A and 336B can be configured to face the ground of the semiconductor manufacturing plant to display whether the delivery container 5 is placed and the inert gas supply status. By aligning the light-emitting devices 336A and 336B towards the ground, on-site personnel can easily confirm the relevant information.

[0094] Figure 6 as well as Figure 7 This is a diagram illustrating the power supply unit 340 according to an embodiment of the present invention.

[0095] According to an embodiment of the present invention, the power supply unit 340 may include: a current converter 342 for inducing current from the power supply cable 20; and a power supply cable 344 for supplying current from the current converter 342 to the control unit 330. Alternatively, the current converter 342 may be configured in a loop around the power supply cable 20 to supply the current induced from the current in the power supply cable 20 to the power supply cable 344, the power supply cable 344 supplying power from the current converter 342 to the control unit 330.

[0096] On the other hand, the power supply cable 344 can be configured to avoid the movement trajectory of the transport vehicle 100, so that the transport vehicle 100 is not disturbed during operation. According to an embodiment of the present invention, the power supply cable 344 can be configured to be close to or embedded in the structure of the track 10 and the storage unit 310, so as not to interfere with the transport vehicle 100. That is, the current induced from the power supply cable 20 can be supplied to the control unit 330 along the power supply cable 344 combined with the structure of the track 10 and the storage unit 310.

[0097] like Figure 6As shown, the control unit 330 is driven by current induced from the power supply cable 20 that supplies power to the transport vehicle 100 along the track 10. This significantly simplifies the installation of the goods storage device 30, instead of requiring a separate power source on the ground to supply power to the control unit 330 and laying cables from the ground to the goods storage device 30. When power is supplied to the goods storage device 30 from the ground, a large amount of materials and personnel are needed to lay cables. However, if the control unit 330 is powered by current induced from the power supply cable 20 as in this invention, only a current converter 342 and a power supply cable 344 are needed, thus saving on installation materials and personnel.

[0098] Additionally, refer to Figure 6 The power supply cable 344 is disposed below the track 10 and is attached to a hook-shaped structure 105 to prevent the power supply cable 344 from drooping. In addition, the power supply cable 344 is configured to be attached to or embedded in the frame 312 of the storage unit 310, so that it can be configured not to interfere with the transport vehicle 100.

[0099] According to an embodiment of the present invention, the current converter 342 may include: an annular core component 3422, configured to surround the power supply cable 20 in an annular shape, and carrying current (I) flowing along the power supply cable 20. P A magnetic field is formed; and a coil component 3424 is wound around a core component 3422, and a current (I) is induced through the magnetic field. S ).

[0100] like Figure 7 As shown, if the current (I) P As the current flows along the power supply cable 20, a circular magnetic field is formed inside the core component 3422, which is configured in a ring shape around the power supply cable 20. Furthermore, an induced current (I0) is generated in the coil component 3424, which is configured to surround the core component 3422, through the magnetic field. S The corresponding induced current (I) is transmitted through the power supply cable 344. S Power is supplied to the control unit 330, thereby enabling the supply of electricity.

[0101] Figure 8 Another example of a logistics system for a semiconductor manufacturing plant according to an embodiment of the present invention is shown.

[0102] The article storage equipment 30 of the semiconductor manufacturing plant according to the present invention may include: a storage unit 310 disposed around the track 10 that provides the travel path of the transport vehicle 100, and storing a transport container 5 containing wafers; a cleaning unit 320 that supplies inert gas to the interior of the transport container 5; a control unit 330 that identifies the transport container 5 stored in the storage unit 310 and controls the cleaning unit 320 to supply inert gas to the transport container 5; a power supply unit 340 that supplies current induced from the power supply cable 20 disposed along the track 10 to the control unit 330; and a controller management unit 350 that is wirelessly connected to the control unit 330 to manage the operation of the control unit 330.

[0103] Reference Figure 8 Access points (APs) providing wireless connectivity can be installed in the ceiling of the manufacturing plant. These APs enable the control units 330 of the storage equipment 30 to transmit and receive data wirelessly. Specifically, a controller management unit 350 can be provided to manage the operation of the control units 330. Operators can use the controller management unit 350 to check the operational status of each control unit 330 and confirm information about the transport containers 5 stored in each storage equipment 30. The controller management unit 350 can be installed on the ground floor of the semiconductor manufacturing plant for easy access by operators. Furthermore, the controller management unit 350 can wirelessly connect to the control units 330 via the APs.

[0104] Access points (APs) can provide resources for wireless communication to client devices (e.g., control unit 330, controller management unit 350) and connect to an upstream network to provide communication services such as the Internet and Ethernet to the client devices.

[0105] According to an embodiment of the present invention, the control unit 330 may include: an identification information acquisition unit 332, which acquires identification information of the transport container 5 from an RFID reader / writer 316; a gas supply control unit 334, which, if the transport container 5 is identified, transmits a control signal instructing the supply of inert gas to the gas supply unit 324, and receives information related to the supply status of the inert gas from the gas supply unit 324; and an output unit 336, which outputs whether the transport container 5 is placed in each placement slot 314A of the storage unit 310 and the supply status of the inert gas. Additionally, the control unit 330 may also include: a wireless communication module 338, which transmits information related to whether the transport container 5 is placed in each placement slot 314A of the support platform 314 and the supply status of the inert gas to the controller management unit 350.

[0106] Figure 10This illustration shows the inter-unit connection structure of a logistics control system in a semiconductor manufacturing plant according to an embodiment of the present invention. For example... Figure 10 As shown, the control unit 330 and the controller management unit 350 are wirelessly connected to each other via an access point (AP). Alternatively, the access point (AP) can be connected to the conveyor control system (OCS) via the semiconductor manufacturing plant's network. The conveyor control system (OCS) controls the overall system for conveying items within the semiconductor manufacturing plant. If an event occurs requiring the conveying of items, the conveyor control system (OCS) can control each conveyor vehicle 100 to move the corresponding item. For example... Figure 11 As shown, the conveying control system OCS can be connected to the controller management unit 350 through the access point AP. In addition, the controller management unit 350 can obtain information from each control unit 330 of the goods storage equipment 30 or control the operation of each control unit 330.

[0107] The conveying control system (OCS) can receive information related to the conveying container 5 placed in the goods storage equipment 30 and the inert gas supply status through the controller management unit 350. The OCS transmits the location information of the required conveying container 5 to the surrounding conveying vehicles 100 to execute the conveying. Furthermore, the OCS can control each control unit 330 through the controller management unit 350.

[0108] Furthermore, in this invention, since the power to the control unit 330 of the goods storage device 30 is supplied via the power supply cable 20, the power supply to the transport vehicles 100 may be weakened when the goods storage device 30 is installed in a certain section. For example, consider the following situation: in a specific section, the power supply cable 20 can supply 200kW, each transport vehicle 100 requires 20kW of power, and the total power consumed by the control unit 330 of the goods storage device 30 is 20kW. In a specific section, the power supplied to the goods storage device 30 is 20kW. When there are 9 transport vehicles 100 traveling in the specific section, the transport control system OCS can cause other transport vehicles 100 to avoid the specific section and travel on other routes, thereby preventing power overload in the specific section.

[0109] This embodiment and the accompanying drawings are merely illustrative representations of a portion of the technical concept contained in this invention. Obviously, variations and specific embodiments that can be readily derived by those skilled in the art within the scope of the technical concept contained in the specification and drawings of this invention are all included within the scope of the claims of this invention.

[0110] Therefore, the concept of the present invention should not be limited to the illustrated embodiments, not only to the appended claims, but all concepts that are equivalent or modified to the claims should be included within the scope of the present invention.

Claims

1. A type of goods storage device, used in a semiconductor manufacturing plant, wherein, The item storage equipment includes: The storage unit is located around the track that provides the travel path for the transport vehicles and stores the transport containers containing the wafers. The purging unit supplies inert gas into the interior of the conveying container; The control unit identifies the delivery container stored in the storage unit and controls the purging unit to supply the inert gas to the delivery container; and The power supply unit supplies the control unit with current induced from the power supply cables that supply power to the transport vehicle along the track. The conveying vehicle is controlled by a conveying control system. The conveying control system compares the power supplied by the power supply cable with the power supplied to the control unit of the item storage equipment and the conveying vehicles traveling in the section, and controls other conveying vehicles to avoid the section so as not to generate power overload in the section.

2. The article storage device according to claim 1, wherein, The storage unit includes: A frame is positioned to the side of the track; A support platform, disposed on the lower surface of the frame and configured to hold the conveying container; and An RFID reader is installed on the support platform to acquire the identification information of the conveying container and transmit it to the control unit.

3. The article storage device according to claim 2, wherein, The cleaning unit includes: A gas supply port is disposed in a mounting slot on the support platform and communicates with a gas inlet formed in the delivery container when the delivery container is mounted in the mounting slot; and The gas supply unit supplies the inert gas into the delivery container through the gas supply port according to the control signal received from the control unit.

4. The article storage device according to claim 3, wherein, The gas supply unit transmits information related to the supply status of the inert gas to the control unit.

5. The article storage device according to claim 4, wherein, The control unit includes: The identification information acquisition unit acquires the identification information of the delivery container from the RFID reader / writer; The gas supply control unit, upon detecting the delivery container, transmits the control signal to the gas supply unit and receives information from the gas supply unit regarding the supply status of the inert gas; and The output unit outputs whether the delivery container is placed in each slot of the storage unit and the supply status of the inert gas.

6. The article storage device according to claim 5, wherein, The output section includes: The light-emitting device displays whether the delivery container in each of the placement slots is in place and the supply status of the inert gas.

7. The article storage device according to claim 6, wherein, The light-emitting device is configured to display, facing the ground of the semiconductor manufacturing plant, whether the delivery container is in place and the supply status of the inert gas.

8. The article storage device according to claim 1, wherein, The power supply unit includes: A current converter that senses current from the power supply cable; and A power supply cable supplies current from the current converter to the control unit. The power supply cable is configured to be close to or embedded in the track and the storage unit so as not to interfere with the transport vehicle.

9. The article storage device according to claim 8, wherein, The current converter includes: A ring-shaped core component is configured to surround the power supply cable in a ring shape, and a magnetic field is formed by the current flowing along the power supply cable; and A coil component is wound around the core component and induces current through the magnetic field.

10. A storage device for goods, used in a semiconductor manufacturing plant, wherein, The item storage equipment includes: The storage unit is located around the track that provides the travel path for the transport vehicles and stores the transport containers containing the wafers. The purging unit supplies inert gas into the interior of the conveying container; The control unit identifies the delivery container stored in the storage unit and controls the purging unit to supply the inert gas to the delivery container; The power supply unit supplies the control unit with current induced from the power supply cable that supplies power to the transport vehicle along the track; and The controller management unit manages the operation of the control unit via a wireless communication connection. The conveying vehicle is controlled by a conveying control system. The conveying control system compares the power supplied by the power supply cable with the power supplied to the control unit of the item storage equipment and the conveying vehicles traveling in the section, and controls other conveying vehicles to avoid the section so as not to generate power overload in the section.

11. The article storage device according to claim 10, wherein, The storage unit includes: A frame is positioned to the side of the track; A support platform, disposed on the lower surface of the frame and configured to hold the conveying container; and An RFID reader is installed on the support platform to acquire the identification information of the conveying container and transmit it to the control unit.

12. The article storage device according to claim 11, wherein, The cleaning unit includes: A gas supply port is disposed on the support platform and communicates with a gas inlet formed in the delivery container when the delivery container is mounted on the support platform; and The gas supply unit supplies the inert gas into the delivery container through the gas supply port according to the control signal received from the control unit.

13. The article storage device according to claim 12, wherein, The gas supply unit transmits information related to the supply status of the inert gas to the control unit.

14. The article storage device according to claim 13, wherein, The control unit includes: The identification information acquisition unit acquires the identification information of the delivery container from the RFID reader / writer; The gas supply control unit, upon detecting the delivery container, transmits the control signal to the gas supply unit and receives information from the gas supply unit regarding the supply status of the inert gas; and The output unit outputs whether the delivery container is placed in each slot of the storage unit and the supply status of the inert gas.

15. The article storage device according to claim 14, wherein, The output section includes a light-emitting device that displays whether the delivery container on each support platform is in place and the supply status of the inert gas. The light-emitting device is configured to display, facing the ground of the semiconductor manufacturing plant, whether the delivery container is in place and the supply status of the inert gas.

16. The article storage device according to claim 10, wherein, The power supply unit includes: A current converter that senses current from the power supply cable; and A power supply cable supplies current from the current converter to the control unit. The power supply cable is configured to be close to or embedded in the track and the storage unit so as not to interfere with the transport vehicle.

17. The article storage device according to claim 16, wherein, The current converter includes: A ring-shaped core component is configured to surround the power supply cable in a ring shape, and a magnetic field is formed by the current flowing along the power supply cable; and A coil component is wound around the core component and induces current through the magnetic field.

18. The article storage device according to claim 13, wherein, The control unit further includes: The wireless communication module transmits information related to whether the delivery container is placed on each of the support platforms and the supply status of the inert gas to the controller management unit.

19. The article storage device according to claim 18, wherein, The control unit and the controller management unit perform wireless communication through an access point located in the ceiling of the semiconductor manufacturing plant. The controller management unit is located on the ground of the semiconductor manufacturing plant and receives information related to the placement of the delivery container and the supply status of the inert gas from the control unit through the access point, and transmits signals for controlling the control unit to the control unit.

20. A logistics system for a semiconductor manufacturing plant, wherein, The logistics system of the semiconductor manufacturing plant includes: Tracks, installed in the ceiling of a semiconductor manufacturing plant, provide a path for transport vehicles to move; A power supply cable, arranged along the track, supplies power to the transport vehicle; and Goods storage equipment for storing transport containers from the transport vehicle. The item storage equipment includes: A storage unit is located around the track and stores the transport container containing the wafers. The purging unit supplies inert gas into the interior of the conveying container; The control unit identifies the delivery container stored in the storage unit and controls the purging unit to supply the inert gas to the delivery container; The power supply unit supplies current induced from the power supply cable to the control unit; and The controller management unit manages the operation of the control unit via a wireless communication connection. The conveying vehicle is controlled by a conveying control system. The conveying control system compares the power supplied by the power supply cable with the power supplied to the control unit of the item storage equipment and the conveying vehicles traveling in the section, and controls other conveying vehicles to avoid the section so as not to generate power overload in the section.

Images