Processing apparatus and processing method

Abstract

Embodiments of the present application provide a processing device and a processing method. The processing device comprises a feeding and discharging module for storing materials and carrying the materials to a waiting position; a processing device comprising a carrier and a processing mechanism, the carrier being used for carrying the materials; the processing mechanism being used for processing the materials carried on the carrier and forming burst points on the same cutting path and / or different cutting paths of the materials on the carrier according to the size and thickness of the materials on the carrier; and a material taking and placing device comprising a first material taking and placing assembly and a second material taking and placing assembly, the first material taking and placing assembly and the second material taking and placing assembly being alternatively movable along an arc-shaped track above the carrier and above the waiting position, so as to carry the materials from the waiting position to the carrier before processing the materials and carry the materials from the carrier to the waiting position after processing the materials. The present scheme can simultaneously realize the double operation of taking the processed materials from the carrier and placing the materials to be processed on the carrier, and the processing efficiency is relatively high.

Description

Technical Field

[0001] This invention relates to the field of material processing technology, specifically to a processing device and a processing method. Background Technology

[0002] In the field of material processing, particularly for semiconductor devices (such as wafers), the dicing process is crucial. There are generally two dicing methods: rotary cutting and laser cutting. Taking laser cutting (also known in the industry as stealth dicing, or simply stealth dicing) as an example, it primarily involves focusing a laser beam inside the material to be processed, creating a focal point. By precisely controlling the distance between the focusing lens and the surface of the material, microcracks are formed inside the material. Then, adjacent grains are separated using a cleaver or vacuum dicing device.

[0003] Traditional laser processing equipment mainly consists of a loading device, a processing device, and an unloading device. Specifically, the loading device transports the material onto the platform of the processing device, where the processing mechanism cuts the material to form processed material. The unloading device then moves the processed material from the platform to the unloading position. The loading device then continues transporting the material, and the processing device continues processing, repeating this process continuously.

[0004] However, with the rapid development of automation technology, the traditional separate loading and unloading method in laser processing equipment is too inefficient and can no longer meet the demands. Therefore, there is an urgent need to develop a completely new processing equipment. Summary of the Invention

[0005] To at least partially address the problems existing in the prior art, according to one aspect of the present invention, a processing apparatus is provided. The processing apparatus includes: a loading / unloading module for storing materials and transporting them to a waiting position; a processing device including a platform and a processing mechanism, the platform for carrying materials; the processing mechanism for processing the materials carried on the platform and forming burrs on the same and / or different cutting paths of the materials on the platform according to the size and thickness of the materials; and a pick-and-place device including a first pick-and-place component and a second pick-and-place component, the first and second pick-and-place components being alternately movable along an arcuate trajectory above the platform and above the waiting position, to transport materials from the waiting position to the platform before processing and to transport materials from the platform to the waiting position after processing.

[0006] For example, the processing mechanism processes the material according to at least one of the following processing modes: First processing mode: the processing mechanism forms blast points at different depths on the same cutting track according to the size and thickness of the material on the platform, wherein the direction of the depth is consistent with the thickness direction of the material; Second processing mode: the processing mechanism forms blast points on different cutting tracks simultaneously according to the size and thickness of the material on the platform.

[0007] For example, the loading and unloading module includes: a loading and unloading device, the loading and unloading device including a support mechanism for supporting a material box for storing materials; and a conveying device for conveying materials between the material box and a target position along a material conveying trajectory, the target position being located between the material box and the waiting position.

[0008] For example, the loading and unloading device further includes a lifting mechanism, the driving end of the lifting mechanism is connected to the support mechanism, the support mechanism drives the material box to be lifted and lowered under the drive of the lifting mechanism, the support mechanism has a support center for supporting the material box, and the driving end of the lifting mechanism and the support center of the support mechanism are located on the same vertical line.

[0009] For example, the loading and unloading module further includes an anti-drop device for supporting the materials being transported by the conveying device.

[0010] For example, the conveying device includes a clamping mechanism movable between the material box and the target position, and a detection mechanism for detecting whether the clamping mechanism is clamping material.

[0011] For example, the detection mechanism includes an elastic component and a detection component, which are connected to the clamping mechanism. The elastic component is switchable between an elastic deformation state and a reset state. When the clamping mechanism clamps the material, the elastic component is squeezed to the elastic deformation state by the material. When the clamping mechanism does not clamp the material, the elastic component returns to the reset state. The detection component is used to detect the state of the elastic component.

[0012] For example, the loading and unloading module further includes a positioning device, which includes a positioning mechanism and a stroke compensation mechanism for driving the positioning mechanism to move the material between the target position and the waiting position. The positioning mechanism is used to adjust the posture of the material thereon, and the movement trajectory of the positioning mechanism intersects with the arc trajectory.

[0013] For example, the material handling device further includes a material handling body, a support shaft, and an axial force support member. The first material handling assembly and the second material handling assembly are connected to the second end of the support shaft. The axial force support member is connected between the first end of the support shaft and the material handling body, and is closer to the first end than the second end. The axial force support member is used to share the axial force on the support bearing.

[0014] For example, the axial force support includes an angular contact ball bearing connected between the support shaft and the material handling body.

[0015] For example, the material handling device further includes a connecting component and a buffer component. The first material handling component and the second material handling component are both connected to the support shaft through the connecting component. The upper end of the buffer component is connected to the connecting component, and the lower end of the buffer component is connected to the first material handling component and / or the second material handling component. The buffer component is configured to cushion the first material handling component and / or the second material handling component when the first material handling component and / or the second material handling component it is connected to suddenly fall due to an abnormality.

[0016] For example, the buffer includes a first tensile elastic member and a second tensile elastic member. The upper end of the first tensile elastic member is connected to the connecting assembly, and the lower end of the first tensile elastic member is connected to the first material handling assembly. The upper end of the second tensile elastic member is connected to the connecting assembly, and the lower end of the second tensile elastic member is connected to the second material handling assembly.

[0017] According to another aspect of the present invention, a processing method is also provided. The processing method includes: after a loading and unloading module transports a current material to be processed located at a storage position to a waiting position, it continues to transport a next material to be processed located at the storage position toward the waiting position; during the transport of the next material to be processed, a first picking and placing component picks up the current material to be processed located at the waiting position; driving the first picking and placing component and a second picking and placing component located above a platform to move along an arcuate trajectory, so that the first picking and placing component and the second picking and placing component exchange positions; the first picking and placing component places the current material to be processed on the platform; and processing the current material to be processed carried on the platform, and forming blast points on the same and / or different cutting paths of the current material to be processed according to the size and thickness of the current material to be processed.

[0018] For example, after the loading / unloading module transports the next material to be processed to the waiting position, the processing method further includes a step of picking up the material to be processed: the second picking / unloading component picks up the next material to be processed located at the waiting position; after the current material to be processed is processed, the processing method further includes a step of picking up the processed material: the first picking / unloading component picks up the processed material located on the platform; after the steps of picking up the material to be processed and picking up the processed material, the processing method further includes: driving the first picking / unloading component and the second picking / unloading component to move along the arc trajectory, so that the processed material and the next material to be processed are respectively located at the waiting position and above the platform; and the first picking / unloading component places the processed material on the waiting position and the second picking / unloading component places the next material to be processed on the platform.

[0019] For example, the processing method further includes: detecting whether the current material to be processed has fallen during the entire process of the loading and unloading module transporting the current material to be processed to the waiting position; and / or detecting whether the next material to be processed has fallen during the entire process of the loading and unloading module transporting the next material to be processed to the waiting position.

[0020] For example, after the loading and unloading module transports the material to be processed to the waiting position each time, the processing method further includes: adjusting the posture of the material to be processed located at a target position between the storage position and the waiting position along the transport trajectory of the material to be processed, and transporting the material to be processed to the waiting position.

[0021] The processing equipment provided in this embodiment of the invention allows the first and second material handling components to move along an arc-shaped trajectory, thereby exchanging positions. This enables the simultaneous removal of processed material from the platform (i.e., unloading) and placement of material to be processed onto the platform (i.e., loading), achieving alternating material handling. Therefore, the processing equipment does not require dedicated material handling (loading) and unloading (unloading) mechanisms. Compared to existing laser processing equipment that separates loading and unloading, the processing equipment provided in this embodiment of the invention offers higher processing efficiency and can largely meet the demands. Furthermore, since the processing equipment provided in this embodiment of the invention performs material handling and unloading simultaneously, eliminating the need for dedicated material handling (loading) and unloading (unloading) mechanisms, the structure of the processing equipment is simpler, the layout more rational, the space utilization rate higher, and the overall machine occupies less space.

[0022] A series of simplified concepts are introduced in the description of the invention, which will be further explained in detail in the detailed description section. This description is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0023] The advantages and features of the present invention will be described in detail below with reference to the accompanying drawings. Attached Figure Description

[0024] The following figures are included as part of this invention for understanding its principles. The figures illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention. In the figures,

[0025] Figure 1 A perspective view of a processing apparatus according to an exemplary embodiment of the present invention;

[0026] Figure 2 for Figure 1 The figure shows a perspective view of the loading and unloading device, the conveying device, and the anti-drop device.

[0027] Figure 3 for Figure 2 The figure shows a perspective view of the loading and unloading device;

[0028] Figure 4 for Figure 2 A perspective view of the conveying device shown in the figure;

[0029] Figure 5 for Figure 4 A perspective view of some components of the conveying device shown in the figure;

[0030] Figure 6 for Figure 2 A perspective view of the anti-fall device shown in the image;

[0031] Figure 7 for Figure 1 A perspective view of the positioning device, material handling device, and processing device shown in the figure;

[0032] Figure 8 for Figure 7 A perspective view of the positioning device shown in the figure; and

[0033] Figure 9 for Figure 7 The figure shows a perspective view of the material handling device.

[0034] The above figures include the following reference numerals:

[0035] 1000. Loading / unloading module; 2000. Loading / unloading device; 2100. Material box; 2110. Storage compartment; 2200. Support mechanism; 2300. Lifting mechanism; 3000. Handling device; 3100. Clamping mechanism; 3200. Detection mechanism; 3210. Elastic component; 3220. Detection component; 3300. Handling drive mechanism; 4000. Anti-fall device; 4100. Supporting mechanism; 5000. Positioning device; 5100. Fixed... Positioning mechanism; 5200, stroke compensation mechanism; 6000, processing device; 6100, platform; 6200, processing mechanism; 7000, material handling device; 7100, first material handling assembly; 7200, second material handling assembly; 7300, material handling body; 7400, support shaft; 7500, connecting assembly; 7600, buffer; 7610, first tensile elastic element; 7620, second tensile elastic element; 7700, rotary drive mechanism. Detailed Implementation

[0036] In the following description, numerous details are provided to enable a thorough understanding of the invention. However, those skilled in the art will appreciate that the following description merely illustrates preferred embodiments of the invention, and that the invention can be practiced without one or more of these details. Furthermore, to avoid obscuring the invention, some technical features well-known in the art have not been described in detail.

[0037] According to one aspect of the present invention, a processing apparatus is provided. The processing apparatus includes, but is not limited to, laser processing equipment. The processing apparatus can perform loading, processing, unloading, and other treatments on materials. The materials include, but are not limited to, wafers. According to another aspect of the present invention, a processing method is also provided. The processing apparatus and processing method of the present invention will be described in detail below with reference to specific embodiments.

[0038] like Figure 1 As shown, the processing equipment may include a loading / unloading module 1000, a processing device 6000, and a material handling device 7000. The loading / unloading module 1000 can be used to store materials. Materials can be stored in storage positions on the loading / unloading module 1000. Materials may include materials to be processed and / or processed materials. The loading / unloading module 1000 can move materials between storage positions and waiting positions.

[0039] like Figure 1 and 7As shown, the processing apparatus 6000 may include a stage 6100 and a processing mechanism 6200. The stage 6100 can be used to hold materials. The material to be processed can be held on the stage 6100. Then, the stage 6100 can fix the material to be processed on the stage 6100 by any suitable method such as vacuum adsorption. For example, a glass suction cup may be provided on the stage 6100. The glass suction cup can adsorb the material to be processed. The processing mechanism 6200 can process the material to be processed on the stage 6100 to form processed material. In some embodiments, the processing mechanism 6200 can use components such as a vision positioning component, a laser, an optical path mechanism, and a Z-axis motion mechanism to visually position the material to be processed, and then process the material to be processed through the linkage of the XYθ motion platform. The processing mechanism 6200 can form blast points on the same and / or different cutting paths of the material to be processed on the stage 6100 according to the size and thickness of the material to be processed on the stage 6100 for processing.

[0040] Specifically, the processing mechanism 6200 can process the material to be processed according to at least one of the following processing modes: First processing mode: The processing mechanism 6200 can form blast points at different depths on the same cutting path according to the size and thickness of the material to be processed on the stage 6100. The direction of the depth can be consistent with the thickness direction of the material to be processed. Second processing mode: The processing mechanism 6200 can simultaneously form blast points on different cutting paths according to the size and thickness of the material to be processed on the stage 6100. Whether using the first processing mode and / or the second processing mode, the processing mechanism 6200 achieves better processing results on the material to be processed, thereby resulting in higher quality of the processed material.

[0041] The material handling device 7000 may include a first material handling assembly 7100 and a second material handling assembly 7200. The first and second material handling assemblies 7100 and 7200 can move alternately along an arcuate trajectory above the platform 6100 and above a waiting position. The first and second material handling assemblies 7100 and 7200 can be driven manually or by a motor or any suitable other means to achieve movement. In some embodiments, the material handling device 7000 may further include a rotary drive mechanism 7700. The rotary drive mechanism 7700 can be connected to the first and second material handling assemblies 7100 and 7200, thereby driving the first and second material handling assemblies 7100 and 7200 to move alternately along an arcuate trajectory above the platform 6100 and above a waiting position. The rotary drive mechanism 7700 includes, but is not limited to, a motor rotary drive mechanism or a rotary cylinder rotary drive mechanism. When the first pick-and-place assembly 7100 moves above the platform 6100, the second pick-and-place assembly 7200 can move above the waiting position.

[0042] The first pick-and-place assembly 7100 includes, but is not limited to, grippers, shovels, hooks, and / or suction cups shown in the figure, as long as it can pick up and place materials. The second pick-and-place assembly 7200 includes, but is not limited to, grippers, shovels, hooks, and / or suction cups shown in the figure, as long as it can pick up and place materials. The first pick-and-place assembly 7100 and the second pick-and-place assembly 7200 may be the same or different. The first pick-and-place assembly 7100 and the second pick-and-place assembly 7200 can pick up and place materials independently. After picking up materials, the first pick-and-place assembly 7100 and the second pick-and-place assembly 7200 can exchange positions, thereby exchanging the materials picked up on them between the platform 6100 and the waiting position.

[0043] In practical applications, the loading / unloading module 1000 can move the currently unprocessed material from the storage position to the waiting position and then return, allowing the next unprocessed material from the storage position to be moved towards the waiting position. During the movement of the next unprocessed material, the first pick-and-place component 7100 can pick up the currently unprocessed material from the waiting position. Then, the first pick-and-place component 7100 and the second pick-and-place component 7200, located above the platform 6100, can be driven to move along an arc-shaped trajectory, causing them to exchange positions. This allows the first pick-and-place component 7100 to move from above the waiting position to above the platform 6100, and the second pick-and-place component 7200 to move from above the platform 6100 to above the waiting position. The first pick-and-place component 7100 can then place the currently unprocessed material onto the platform 6100. The processing mechanism 6200 can then process the currently unprocessed material supported on the platform 6100.

[0044] After the loading / unloading module 1000 transports the next material to be processed to the waiting position, the second pick-and-place component 7200 can pick up the next material to be processed located at the waiting position. Once the current material to be processed is completed, it becomes a processed material. The first pick-and-place component 7100 can pick up the processed material located on the platform 6100. Then, the first pick-and-place component 7100 and the second pick-and-place component 7200 can be driven to move along an arc-shaped trajectory to exchange positions. In this way, the first pick-and-place component 7100 can move from above the platform 6100 to above the waiting position; while the second pick-and-place component 7200 can move from above the waiting position to above the platform 6100. Then, the first pick-and-place component 7100 can place the processed material at the waiting position. The second pick-and-place component 7200 can place the next material to be processed on the platform 6100. The processing mechanism 6200 can process the next material to be processed, which is carried on the platform 6100. While processing the next material, the loading / unloading module 1000 can return the processed material in the waiting position to the storage position. Then, the loading / unloading module 1000 can move the next material to be processed from the storage position to the waiting position. This process is repeated, and the processing equipment can continuously process materials.

[0045] It should be noted that the current material to be processed, the next material to be processed, and the next material to be processed after that can be the same or different. The processing mechanism 6200 can use the same or different processing methods for the current material to be processed, the next material to be processed, and the next material to be processed after that.

[0046] The processing equipment provided in this embodiment of the invention allows the first material handling component 7100 and the second material handling component 7200 to move along an arc-shaped trajectory, thereby exchanging positions. This enables the simultaneous removal of processed material from the platform 6100 (i.e., unloading) and placement of material to be processed onto the platform 6100 (i.e., loading), achieving alternating material handling. Therefore, the processing equipment does not require dedicated material handling (loading) and unloading mechanisms. Compared to existing laser processing equipment that separates loading and unloading, the processing equipment provided in this embodiment of the invention offers higher processing efficiency and can largely meet the demands. Furthermore, since the processing equipment provided in this embodiment of the invention performs material handling and unloading simultaneously, eliminating the need for dedicated material handling (loading) and unloading mechanisms, the structure of the processing equipment is simpler, the layout more rational, the space utilization rate higher, and the overall machine occupies less space.

[0047] For example, such as Figure 1-6 As shown, the loading / unloading module 1000 may include a loading / unloading device 2000 and a conveying device 3000.

[0048] The loading / unloading device 2000 may include a support mechanism 2200. The support mechanism 2200 may include a scissor lift support, a support plate, a support rod, or any other suitable structure. The support mechanism 2200 may have a support center and may be used to support a material box 2100. The support center refers to the center of the portion of the support mechanism 2200 connected to the material box 2100. The material box 2100 may be used to store materials. Therefore, the storage location may be within the material box 2100. Exemplarily, the loading / unloading device 2000 may also include a material box 2100. That is, the material box 2100 may be provided during the production or installation of the loading / unloading device 2000, or it may be configured separately by the user. The material box 2100 may be used to store one or more materials. The materials may include materials to be processed and processed materials. That is, the loading / unloading device 2000 can function as both a loading device and a unloading device. Users can place the material to be processed into the material box 2100 by any suitable method, such as manual labor or a robotic arm, and can also remove the processed material from the material box 2100 by any suitable method, such as manual labor or a robotic arm. For example, the material box 2100 may be provided with multiple compartments 2110. Each compartment 2110 can hold one material. In some embodiments, the compartments 2110 may be arranged sequentially in a vertical direction. This allows the material to be arranged vertically. The vertical direction can be the perpendicular direction of the processing equipment. In other embodiments, the compartments 2110 may also be arranged in any other suitable manner, including but not limited to being laid flat.

[0049] The conveying device 3000 can move materials between the loading / unloading device 2000 and the target position. The conveying device 3000 can move materials in any way, such as by clamping, supporting, or adsorbing. Along the material's conveying trajectory, the target position can be located between the material box 2100 and the waiting position. The conveying trajectory refers to the trajectory along which the loading / unloading module 1000 moves the material between the storage position and the waiting position. The conveying trajectory can be any suitable trajectory, such as a straight line, curve, or broken line. In some embodiments, the conveying device 3000 can move materials between the storage position and the target position along the longitudinal direction of the processing equipment. The longitudinal direction can be perpendicular to the vertical direction. This configuration results in a simple structure and low manufacturing cost for the loading / unloading module. The conveying device 3000 can move materials to be processed from the storage position to the target position. Furthermore, the conveying device 3000 can move processed materials from the target position to the storage position.

[0050] For example, the loading / unloading device 2000 may further include a lifting mechanism 2300. The lifting mechanism 2300 may have a drive end. The lifting mechanism 2300 can output power through the drive end. The drive end of the lifting mechanism 2300 can be connected to the support mechanism 2200 by any suitable method such as welding, snap-fitting, or connecting with connectors. Thus, the drive end of the lifting mechanism 2300 can output power to the support mechanism 2200. The lifting mechanism 2300 can employ various types of lifting mechanisms known in the art or likely to emerge in the future, including but not limited to linear module lifting mechanisms, motor lifting mechanisms, or cylinder lifting mechanisms, as long as they can drive the support mechanism 2200 to lift. By driving the support mechanism 2200 to lift, the lifting mechanism 2300 can thereby drive the material box 2100 to lift.

[0051] In practical applications, the lifting mechanism 2300 can drive the material box 2100 to rise and fall to a predetermined height, thereby facilitating the transfer of materials with the handling device 3000. For example, in embodiments where multiple materials can be stacked within the material box 2100, the lifting mechanism 2300 can drive the material box 2100 to rise and fall to a predetermined height so that the storage position is at the same height as the handling device 3000. This facilitates the handling device 3000 in transferring materials to be processed from the material box 2100 and in transferring processed materials into the material box 2100.

[0052] For example, the driving end of the lifting mechanism 2300 and the support center of the support mechanism 2200 can be located on the same vertical line. Preferably, the driving end of the lifting mechanism 2300, the support center of the support mechanism 2200, and the center of gravity of the material box 2100 can all be located on the same vertical line.

[0053] When the material box 2100 is stationary or in the process of lifting, since the drive end of the lifting mechanism 2300 and the support center of the support mechanism 2200 are both on the same vertical line, the loading / unloading device 2000 will not experience a shift in its center of gravity. Therefore, the structure of the loading / unloading device 2000 is relatively stable, especially during lifting. Thus, even when the material box 2100 stores materials that are large in size, heavy in weight, and / or numerous in quantity, the stability of the lifting / unloading device 2100 remains high. Therefore, the material box 2100 can store materials that are larger in size, heavier in weight, and / or more numerous. The loading / unloading device 2000 has better applicability and stronger market competitiveness.

[0054] For example, such as Figure 1-2 As shown in Figure 6, the loading / unloading module may further include an anti-drop device 4000. The anti-drop device 4000 can be used to support materials transported by the conveying device 3000. The anti-drop device 4000 can be positioned between the loading / unloading device 2000 and the target position. The anti-drop device 4000 may include a support mechanism 4100. The support mechanism 4100 can be located below the conveying device 3000. Once the material transported by the conveying device 3000 falls, the material can fall onto the support mechanism 4100, thereby preventing further falls. Exemplarily, the support mechanism 4100 can move together with the conveying device 3000 between the material box 2100 and the target position. Exemplarily, both ends of the support mechanism 4100 can extend to the material box 2100 and the target position, respectively. In this way, the support mechanism 4100 does not need to move, thereby reducing manufacturing costs.

[0055] For example, such as Figure 2 and 4 As shown in Figure 5, the conveying device 3000 may include a clamping mechanism 3100 and a detection mechanism 3200. The clamping mechanism 3100 can be used to clamp materials. The structure of the clamping mechanism 3100 can be arbitrary, including but not limited to a jaw clamping mechanism or a clamping plate clamping mechanism. The clamping mechanism 3100 can move between the material box 2100 and the target position. Thus, the clamping mechanism 3100 can move materials between the storage position and the target position. The detection mechanism 3200 can be used to detect whether the clamping mechanism 3100 is clamping materials. For example, the detection mechanism 3200 can detect whether the clamping mechanism 3100 is clamping materials by detecting changes in position or force conditions in any suitable way. With this configuration, if the material clamped by the clamping mechanism 3100 falls, the detection mechanism 3200 can promptly send a corresponding signal. Thus, the processing equipment can receive this signal and perform corresponding operations such as stopping the machine. Based on this, operators can perform maintenance and other procedures to restore normal operation as quickly as possible.

[0056] Exemplarily, the detection mechanism 3200 may include an elastic component 3210 and a detection component 3220. The elastic component 3210 and the detection component 3220 may be connected to the clamping mechanism 3100. The elastic component 3210 and the detection component 3220 may move with the clamping mechanism 3100. The clamping mechanism 3100 may be driven manually or by any suitable means such as a motor to achieve movement. In some embodiments, the conveying device 3000 may further include a conveying drive mechanism 3300. The conveying drive mechanism 3300 may drive the clamping mechanism 3100 to move between the material box 2100 and the target position. The conveying drive mechanism 3300 includes, but is not limited to, a linear module drive mechanism, a cylinder drive mechanism, or an electric cylinder drive mechanism. The elastic component 3210 may switch between an elastic deformation state and a reset state. The elastic component 3210 includes, but is not limited to, a compression spring or an elastic component made of an elastic material such as rubber. When the clamping mechanism 3100 clamps a material, the material clamped by the clamping mechanism 3100 may compress the elastic component 3210. The elastic component 3210 can be compressed by material to an elastic deformation state. When the clamping mechanism 3100 is not clamping the material, the elastic component 3210 can release its elastic potential energy due to the loss of material compression, thereby returning to its reset state. The detection component 3220 can detect the state of the elastic component 3210 by any suitable method, such as detecting position changes or force conditions.

[0057] In practical applications, when the clamping mechanism 3100 moves between the loading / unloading device 2000 and the target position, the elastic component 3210 and the detection component 3220 can move together with the clamping mechanism 3100. When the clamping mechanism 3100 clamps material, the elastic component 3210 can be compressed by the material to an elastic deformation state. When the material clamped by the clamping mechanism 3100 falls, the elastic component 3210 can return to its reset state. After the material clamped by the clamping mechanism 3100 falls, the detection component 3220 can send a corresponding signal in a timely manner. In this way, the processing equipment can receive the signal and perform corresponding operations such as stopping the machine. Based on this, the operator can perform maintenance and other procedures to restore normal operation as soon as possible. Thus, throughout the entire movement of the clamping mechanism 3100, the detection component 3210 can detect in real time whether the material clamped by the clamping mechanism 3100 has fallen. Therefore, the handling device 3000 has a high level of safety.

[0058] For example, such as Figure 1 and 7 As shown in Figure -8, the loading and unloading module may also include a positioning device 5000. The positioning device 5000 may include a positioning mechanism 5100 and a stroke compensation mechanism 5200.

[0059] The material can be placed on the positioning mechanism 5100. The positioning mechanism 5100 can adjust the posture of the material on it. The positioning mechanism 5100 can adjust the posture of the material in any way, such as by adjusting the entire circumference of the material, or by adjusting the upper and lower surfaces of the material, or by adjusting at least one point of the material. In this way, the positioning mechanism 5100 can prevent the material from shifting and ensure that the material is in the expected position, thereby facilitating the handover of materials with the conveying device 3000 and / or the pick-and-place device 7000.

[0060] The stroke compensation mechanism 5200 can be used to drive the positioning mechanism 5100 to move the material between the target position and the waiting position. In some embodiments, the stroke compensation mechanism 5200 can drive the positioning mechanism 5100 to move in the lateral direction of the processing equipment. The lateral direction can be perpendicular to the longitudinal direction and the vertical direction. Thus, the above-mentioned conveying trajectory can generally be L-shaped. The stroke compensation mechanism 5200 includes, but is not limited to, a motor stroke compensation mechanism, a cylinder stroke compensation mechanism, or an electric cylinder stroke compensation mechanism. The movement trajectory of the positioning mechanism 5100 and the arc-shaped trajectory may have intersection points.

[0061] In practical applications, after the conveying device 3000 places the material to be processed at the target location onto the positioning mechanism 5100, the positioning mechanism 5100 can adjust the posture of the material to be processed. The stroke compensation mechanism 5200 can drive the positioning mechanism 5100 to move, thereby transporting the material to be processed at the target location to the waiting position. Then, the first pick-and-place assembly 7100 or the second pick-and-place assembly 7200 can pick up the material to be processed at the waiting position and transport it onto the platform 6100 for processing. After processing is completed, the first pick-and-place assembly 7100 or the second pick-and-place assembly 7200 can pick up the processed material on the platform 6100 and transport it to the waiting position. The positioning mechanism 5100 can adjust the posture of the material to be processed. The stroke compensation mechanism 5200 can drive the positioning mechanism 5100 to move, thereby transporting the processed material at the waiting position to the target location. Then, the conveying device 3000 transports the processed material at the target location to the storage location.

[0062] It should be noted that the operation of the positioning mechanism 5100 adjusting the posture of the material can be performed before, after, or during the movement of the positioning mechanism 5100 driven by the stroke compensation mechanism 5200. In other words, the operation of the positioning mechanism 5100 adjusting the posture of the material and the operation of the stroke compensation mechanism 5200 driving the positioning mechanism 5100 to move are two independent operations, and their order is not fixed.

[0063] For example, the storage location, target location, waiting location, and the material-bearing surface of the platform 6100 can be at the same height. This allows the material to be transported as horizontally as possible, thus avoiding vertical movement. Therefore, the structure and function of the processing equipment can be relatively simple.

[0064] For example, such as Figure 1 , 7 As shown in Figure 9, the material handling device 7000 may further include a material handling body 7300, a support shaft 7400, and an axial force support member (not shown due to angle). The material handling body 7300 can be any suitable structure such as a bracket, plate, or rod. The support shaft 7400 may include a first end and a second end disposed opposite to each other. The first material handling assembly 7100 and the second material handling assembly 7200 can be directly or indirectly connected to the second end of the support shaft 7400. The first material handling assembly 7100 and the second material handling assembly 7200 can rotate about the axis of the support shaft 7400. Thus, the arcuate trajectory can be a circular trajectory about the vertical axis of the support shaft 7400. The axial force support member can be connected between the first end of the support shaft 7400 and the material handling body 7300. The axial force support member is closer to the first end relative to the second end of the support shaft 7400. The axial force support member can be used to share the axial force borne by the support shaft 7400.

[0065] Because components such as the first and second material handling assemblies 7100 and 7200 are relatively heavy, the support shaft 7400 needs to withstand a large axial force. An axial force support can distribute the axial force borne by the support shaft 7400, thereby improving the operational stability of the material handling device 7000 and extending its service life. This is especially true when the first and second material handling assemblies 7100 and 7200 pick up materials separately, as the axial force on the support shaft 7400 is even greater. Therefore, the axial force support is particularly important.

[0066] Axial force support components include, but are not limited to, support rings or bearings. Preferably, the bearing can be an angular contact ball bearing. The angular contact ball bearing can be connected between the support shaft 7400 and the material handling body 7300. For example, the angular contact ball bearing is connected between the outer periphery of the support shaft 7400 and the material handling body 7300. Angular contact ball bearings can withstand large axial forces and have a long service life. Thus, the material handling device 7000 using angular contact ball bearings has high mechanical strength and a long service life.

[0067] Exemplarily, the pick-and-place device 7000 may further include a connecting assembly 7500 and a buffer 7600. Both the first pick-and-place assembly 7100 and the second pick-and-place assembly 7200 can be connected to the support shaft 7400 via the connecting assembly 7500. The connecting assembly 7500 includes, but is not limited to, a connecting plate, a connecting rod, or a connecting bracket. The upper end of the buffer 7600 can be connected to the connecting assembly 7500. The lower end of the buffer 7600 can be connected to the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200. The buffer 7600 may be configured to cushion the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200 when they suddenly fall due to an abnormality. The buffer 7600 may include any suitable buffer such as a magnetic buffer, an elastic buffer, or a pneumatic buffer. The number of buffers 7600 can be arbitrary, for example, one, two, or more. In embodiments where there are multiple buffers 7600, the multiple buffers 7600 may be the same or different.

[0068] In practical applications, when the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200 malfunctions, such as a power outage, gas outage, or other fault, they will fall under the influence of gravity. This may cause damage to the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200, the material picked up by them (if already picked up), and / or other components below them. The pick-and-place device 7000 is equipped with a buffer 7600, which applies a counter-buffering force to the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200, thereby preventing them from falling. In this way, the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200 will fall slowly, or even not at all. Therefore, the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200, the material picked up on the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200 (if it has already been picked up), and / or other components below the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200 will not be damaged due to excessive falling speed. Moreover, when the processing equipment restarts, the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200, and the material picked up on the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200 (if it has already been picked up), will not collide with other components. In this way, the material picked up by the first pick-and-place assembly 7100 and / or the second pick-and-place assembly 7200 (if it has already been picked up) can be in a safe position, thus avoiding other parts and preventing collisions that may occur when the processing equipment restarts. Therefore, the pick-and-place device 7000 has good safety.

[0069] For example, the buffer 7600 may include a first tensile elastic member 7610 and a second tensile elastic member 7620. The upper end of the first tensile elastic member 7610 may be connected to the connecting assembly 7500. The lower end of the first tensile elastic member 7610 may be connected to the first pick-and-place assembly 7100. The upper end of the second tensile elastic member 7620 may be connected to the connecting assembly 7500. The lower end of the second tensile elastic member 7620 may be connected to the second pick-and-place assembly 7200.

[0070] The first tension elastic element 7610 can be in a stretched state in the vertical direction. The first tension elastic element 7610 includes, but is not limited to, a tension spring or a tension element made of an elastic material such as rubber. In practical applications, when the second pick-and-place assembly 7200 malfunctions, the first tension elastic element 7610 can be in a stretched state, thereby applying an upward tension force to the second pick-and-place assembly 7200 to act as a buffer, thus preventing the second pick-and-place assembly 7200 from falling.

[0071] The second tension elastic element 7620 can be in a stretched state in the vertical direction. The second tension elastic element 7620 includes, but is not limited to, a tension spring or a tension element made of an elastic material such as rubber. In practical applications, when the second pick-and-place assembly 7200 malfunctions, the second tension elastic element 7620 can be in a stretched state, thereby applying an upward tension force to the second pick-and-place assembly 7200 to act as a buffer and thus prevent the second pick-and-place assembly 7200 from falling.

[0072] According to another aspect of the present invention, a processing method is also provided. This processing method can be applied to any of the processing equipment described above. The processing method may include the following:

[0073] The loading and unloading module 1000 can move the current material to be processed from the storage position to the waiting position, and then move the next material to be processed from the storage position toward the waiting position.

[0074] During the transport of the next material to be processed, the first pick-and-place assembly 7100 can pick up the currently processed material located at the waiting position.

[0075] Drive the first pick-and-place assembly 7100 and the second pick-and-place assembly 7200 located above the stage 6100 to move along an arc-shaped trajectory so that the first pick-and-place assembly 7100 and the second pick-and-place assembly 7200 exchange positions.

[0076] The first material handling assembly 7100 can place the material to be processed onto the stage 6100.

[0077] The processing mechanism 6200 can process the material to be processed currently supported on the stage 6100, and form blast points on the same and / or different cutting paths of the material to be processed according to the size and thickness of the material to be processed.

[0078] For example, the processing mechanism 6200 can process materials according to at least one of the following processing modes:

[0079] First processing mode: The processing mechanism 6200 can form blasting points at different depths on the same cutting channel according to the size and thickness of the material to be processed on the stage 6100, with the direction of the depth consistent with the thickness direction of the material.

[0080] Second processing mode: The processing mechanism 6200 can simultaneously form blasting points on different cutting paths according to the size and thickness of the material to be processed on the stage 6100.

[0081] For example, after the loading and unloading module 1000 moves the current material to be processed from the storage position to the waiting position, the processing method may further include the step of picking up the material to be processed: the second picking and unloading component 7200 can pick up the next material to be processed located at the waiting position.

[0082] After the material to be processed is completed, the processing method may also include the step of picking up the processed material: the first picking and placing component 7100 can pick up the processed material located on the stage 6100.

[0083] The processing method, after the steps of picking up the material to be processed and picking up the processed material, may further include: driving the first pick-and-place assembly 7100 and the second pick-and-place assembly 7200 to move along an arc-shaped trajectory, so that the processed material and the next material to be processed are respectively located above the waiting position and above the platform 6100. Furthermore, the first pick-and-place assembly 7100 can place the processed material at the waiting position. The second pick-and-place assembly 7200 can place the next material to be processed on the platform 6100.

[0084] For example, the processing method may further include:

[0085] During the entire process of the loading / unloading module 1000 moving the current material to be processed to the waiting position, it detects whether the current material to be processed has fallen; and / or during the entire process of the loading / unloading module 1000 moving the next material to be processed to the waiting position, it detects whether the next material to be processed has fallen.

[0086] For example, after the loading / unloading module 1000 transports the material to be processed to the waiting position each time, the processing method may further include: adjusting the posture of the material to be processed at a target position located between the storage position and the waiting position along the transport trajectory of the material to be processed, and transporting the material to be processed to the waiting position. For example, after adjusting the posture, the material to be processed can be transported to the waiting position along a horizontal trajectory, and the horizontal trajectory and the arc trajectory have an intersection point.

[0087] For example, the processing method may further include: the loading and unloading module 1000 can put the processed material at the waiting position back into the storage position, and then transport the next material to be processed from the storage position to the waiting position.

[0088] For ease of description, relative terms such as "above," "over," "on the upper surface of," and "above" are used here to describe the regional positional relationship of one or more components or features shown in the figures to other components or features. It should be understood that relative terms include not only the orientation of the component as depicted in the figure but also different orientations during use or operation. For example, if the components in the figures are inverted as a whole, "above" or "above other components or features" will include cases where the component is "below" or "under" other components or features. Thus, the exemplary term "above" can include both "above" and "below." Furthermore, these components or features may also be positioned at other different angles (e.g., rotated 90 degrees or other angles), and this document intends to include all such cases.

[0089] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, parts, components, and / or combinations thereof.

[0090] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0091] The present invention has been described through the above embodiments. However, it should be understood that the above embodiments are for illustrative purposes only and are not intended to limit the invention to the scope of the described embodiments. Furthermore, those skilled in the art will understand that the present invention is not limited to the above embodiments, and many more variations and modifications can be made based on the teachings of the present invention, all of which fall within the scope of protection claimed by the present invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A processing equipment, characterized in that, include: The loading and unloading module is used to store materials and transport them to a waiting position; A processing apparatus, comprising a platform and a processing mechanism, wherein the platform is used to carry materials; and the processing mechanism is used to process the materials carried on the platform and to form blasting points on the same and / or different cutting paths of the materials on the platform according to the size and thickness of the materials. as well as The material handling device includes a first material handling component and a second material handling component. The first and second material handling components can move alternately along an arc-shaped trajectory above the platform and above the waiting position to transport materials from the waiting position to the platform before processing and to transport materials from the platform to the waiting position after processing. The loading and unloading module includes: A loading and unloading device, the loading and unloading device including a support mechanism for supporting a material box, the material box being used to store materials; as well as A conveying device for conveying material between the material box and a target position along a material conveying trajectory, wherein the target position is located between the material box and the waiting position. The conveying device includes a clamping mechanism movable between the material box and the target position, and a detection mechanism for detecting whether the clamping mechanism is clamping material. The detection mechanism includes an elastic component and a detection component, which are connected to the clamping mechanism. The elastic component can switch between an elastic deformation state and a reset state. When the clamping mechanism clamps the material, the elastic component is squeezed to the elastic deformation state by the material. When the clamping mechanism does not clamp the material, the elastic component returns to the reset state. The detection component is used to detect the state of the elastic component.

2. The processing equipment as described in claim 1, characterized in that, The processing mechanism processes the material according to at least one of the following processing modes: First processing mode: The processing mechanism forms blasting points at different depths on the same cutting channel according to the size and thickness of the material on the platform, and the direction of the depth is consistent with the thickness direction of the material; Second processing mode: The processing mechanism simultaneously forms blasting points on different cutting tracks according to the size and thickness of the material on the platform.

3. The processing equipment as described in claim 1, characterized in that, The loading and unloading device also includes a lifting mechanism. The driving end of the lifting mechanism is connected to the support mechanism. The support mechanism drives the material box to move up and down under the drive of the lifting mechanism. The support mechanism has a support center for supporting the material box. The driving end of the lifting mechanism and the support center of the support mechanism are located on the same vertical line.

4. The processing equipment as described in claim 1, characterized in that, The loading and unloading module also includes an anti-drop device, which is used to support the materials being transported by the conveying device.

5. The processing equipment as described in claim 1, characterized in that, The loading and unloading module also includes a positioning device, which includes a positioning mechanism and a stroke compensation mechanism for driving the positioning mechanism to move the material between the target position and the waiting position. The positioning mechanism is used to adjust the posture of the material on it, and the movement trajectory of the positioning mechanism intersects with the arc trajectory.

6. The processing equipment as described in claim 1, characterized in that, The material handling device further includes a material handling body, a support shaft, and an axial force support member. The first material handling assembly and the second material handling assembly are connected to the second end of the support shaft. The axial force support member is connected between the first end of the support shaft and the material handling body, and is closer to the first end than the second end. The axial force support member is used to share the axial force on the support bearing.

7. The processing equipment as described in claim 6, characterized in that, The axial force support includes an angular contact ball bearing, which is connected between the support shaft and the material handling body.

8. The processing equipment as described in claim 6, characterized in that, The material handling device further includes a connecting component and a buffer component. The first material handling component and the second material handling component are both connected to the support shaft through the connecting component. The upper end of the buffer component is connected to the connecting component, and the lower end of the buffer component is connected to the first material handling component and / or the second material handling component. The buffer component is configured to cushion the first material handling component and / or the second material handling component when the first material handling component and / or the second material handling component it is connected to suddenly fall due to an abnormality.

9. The processing equipment as described in claim 8, characterized in that, The buffer includes a first tensile elastic element and a second tensile elastic element. The upper end of the first tensile elastic element is connected to the connecting assembly, and the lower end of the first tensile elastic element is connected to the first material handling assembly. The upper end of the second tensile elastic element is connected to the connecting assembly, and the lower end of the second tensile elastic element is connected to the second material handling assembly.

10. A processing method, characterized in that, include: After the loading and unloading module moves the current material to be processed from the storage position to the waiting position, it continues to move the next material to be processed from the storage position toward the waiting position. During the transport of the next material to be processed, the first pick-and-place component picks up the current material to be processed located at the waiting position; Drive the first pick-and-place component and the second pick-and-place component located above the platform to move along an arc trajectory so that the first pick-and-place component and the second pick-and-place component exchange positions; The first material handling assembly places the material to be processed onto the platform; as well as The material to be processed, supported on the platform, is processed, and blasting points are formed on the same and / or different cutting paths of the material to be processed, according to the size and thickness of the material. The loading and unloading module includes: A loading and unloading device, the loading and unloading device including a support mechanism for supporting a material box, the material box being used to store materials; as well as A conveying device for conveying material between the material box and a target position along a material conveying trajectory, wherein the target position is located between the material box and the waiting position. The conveying device includes a clamping mechanism movable between the material box and the target position, and a detection mechanism for detecting whether the clamping mechanism is clamping material. The detection mechanism includes an elastic component and a detection component, which are connected to the clamping mechanism. The elastic component can switch between an elastic deformation state and a reset state. When the clamping mechanism clamps the material, the elastic component is squeezed to the elastic deformation state by the material. When the clamping mechanism does not clamp the material, the elastic component returns to the reset state. The detection component is used to detect the state of the elastic component.

11. The processing method as described in claim 10, characterized in that, After the loading and unloading module transports the next material to be processed to the waiting position, the processing method further includes the step of picking up the material to be processed: the second picking and unloading component picks up the next material to be processed located at the waiting position; After the current material to be processed is completed, the processing method further includes the step of picking up the processed material: the first picking and placing component picks up the processed material located on the platform; The processing method further includes, after the steps of picking up the material to be processed and picking up the processed material: Drive the first and second pick-and-place components to move along the arc-shaped trajectory, so that the processed material and the next material to be processed are respectively located at the waiting position and above the platform; and The first material handling component places the processed material in the waiting position, and the second material handling component places the next material to be processed on the platform.

12. The processing method as described in claim 11, characterized in that, The processing method further includes: Throughout the entire process of the loading and unloading module transporting the material to be processed to the waiting position, it detects whether the material to be processed has fallen; and / or Throughout the entire process of the loading and unloading module transporting the next material to be processed to the waiting position, it detects whether the next material to be processed has fallen off.

13. The processing method as described in claim 11, characterized in that, After the loading and unloading module moves the material to be processed to the waiting position each time, the processing method further includes: adjusting the posture of the material to be processed at the target position between the storage position and the waiting position along the material's transport trajectory, and moving the material to be processed to the waiting position.

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