A vacuum rectangular valve suitable for the semiconductor industry

Abstract

The present invention is a vacuum rectangular valve suitable for the semiconductor industry, which mainly includes a power component, a lifting component, a shell component, and a cavity component; a mechanism device for connecting a transmission chamber and a reaction chamber, or for sealing a vacuum cavity. By designing a spatial cam and track structure, the input is a rotating power source motor or a rotating cylinder, which realizes the stable rise and horizontal closing of the valve. By designing a reasonable lifting path and method, the possibility of pollution particles generated by vibration is avoided. The lifting and horizontal closing of the valve shaft are realized to ensure that the valve does not generate friction when closing, and smooth movement within the action cycle is achieved through the principle of spatial cam and track. The present invention has the advantages of simple structure, simple assembly, and convenient maintenance.

Description

Technical Field

[0001] This invention is a rectangular vacuum valve suitable for the semiconductor industry, used as a mechanical device connecting a transfer chamber and a reaction chamber. Using a rotary cylinder or motor as the power source, and employing a spatial cam and its track structure, it achieves vertical lifting and horizontal movement of the roller, thereby driving the valve's horizontal closure. The design employs degree-of-freedom constraints to ensure stable and smooth operation. Background Art

[0002] In the semiconductor industry, valves in each chamber are crucial. Their sealing, stability, low vibration, and ease of maintenance significantly impact the efficiency and yield of the entire process. Current valves are typically driven by custom-designed cylinders, with corresponding air circuits designed to achieve the valve's lifting and lowering motion. These valves are complex to assemble, and failure of the air circuits can render the valve useless. Furthermore, friction between the sealing surfaces during closing and opening can easily generate microparticles, contaminating the chamber environment.

[0003] This invention utilizes a spatial cam combined with a track structure to address the impact loads and vibrations associated with the swing-type closing mechanism of most valves. This allows for rapid vertical rise and gentle horizontal closing of the valve, ensuring fast response, low vibration, and tight sealing during the closing cycle. The guide structure and degree-of-freedom constraint design ensure smooth lifting of the lifting shaft and stable closing of the valve. Summary of the Invention

[0004] To address the deficiencies in the background technology, the present invention provides a vacuum valve suitable for the semiconductor industry.

[0005] The technical solution adopted in the present invention is as follows:

[0006] A vacuum valve suitable for the semiconductor industry, mainly comprising a power assembly, a lifting assembly, a shell assembly, and a cavity assembly;

[0007] The above-mentioned power assembly mainly consists of a motor, support bearings, set screws, a rotating shaft, and a shaft retaining spring. The motor is connected to the rotating shaft through the set screws, transmitting power to the rotating shaft to cause it to rotate. The rotating shaft passes through the support bearings at both ends and is restricted in position by the shaft retaining spring. The support bearings are installed on the left and right housings. The lifting assembly is installed on the rotating shaft through a hole-shaft fit.

[0008] The lifting assembly is mainly composed of a space cam, a roller, a lifting shaft, a lifting shaft seat, and a guide shaft; the space cam is installed on the rotating shaft through a hole shaft, and the cam's string movement is limited by a shaft retaining spring. The space cam is composed of a constant diameter structure and a variable diameter structure, and a track is designed on the contour; the raised structure on the roller cooperates with the track on the space cam, and the roller can roll along the track; the roller is connected to the lifting shaft through a rotating shaft and a retaining spring, and the lifting shaft is limited and guided by the lifting shaft seat; the lifting shaft seat is limited and guided by the guide shafts on both sides with the right shell and the left shell; part of the bellows structure is fixed on the lifting shaft seat, and the other part is fixed on the left shell and the right shell. At this time, a sealed space is formed between the bellows structure and the left shell, the right shell, the support structure, and the cavity connecting plate.

[0009] The cavity assembly primarily consists of a cavity connection plate, the cavity, and a valve plate. The cavity connection plate features a sealing structure on one side and mounting holes on the other. The cavity connection plate is connected to the cavity via screws and sealed with a sealing structure. The cavity connection plate secures the housing assembly with screws. The lifting shaft moves into the cavity through the center hole of the cavity connection plate, and the valve is secured to the lifting shaft with vacuum screws.

[0010] The shell assembly is mainly composed of a left shell, a right shell, and a supporting structure; the upper ends of the left shell and the right shell are fixed on the cavity connecting plate, and the lower ends are fixed to the two supporting structures by screws, and the supporting structure is fixed to the cavity connecting plate by screws.

[0011] The beneficial effects of the present invention are:

[0012] 1. The present invention uses a motor or a rotary cylinder as a power source, which is more economical. By designing a spatial cam and a specific track, the vertical rise and horizontal closing of the valve are achieved, which in principle avoids the impact load and loose closing generated during closing.

[0013] 2. The present invention has a simple design structure, simple assembly and convenient maintenance.

[0014] 3. The present invention realizes the stable rising and smooth horizontal movement of the lifting shaft by designing a limit and freedom constraint mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is an exploded view of the overall structure of the present invention.

[0016] Figure 2 This is an assembly diagram of the present invention.

[0017] Figure 3 This is an intermediate position diagram of the present invention.

[0018] Figure 4 This is a diagram of the closed position of the present invention.

[0019] Figure 5 This is one of the spatial cam position diagrams of the present invention.

[0020] Figure 6 This is the second spatial cam position diagram of the present invention.

[0021] Figure 7 This is a structural diagram of the bellows of the present invention. DETAILED DESCRIPTION

[0022] The following is attached with the instruction manual Figure 1-7 The present invention is further described in detail with reference to the accompanying drawings.

[0023] A vacuum valve suitable for the semiconductor industry, mainly comprising a power assembly, a lifting assembly, a housing assembly, and a cavity assembly; specifically, it comprises a motor 1, a support bearing 2, a set screw 3, a rotating shaft 4, a spatial cam 5, a shaft retaining spring 6, a roller 7, a lifting shaft 8, a lifting shaft seat 9, a guide shaft 10, a bellows structure 11, a cavity connecting plate 12, a cavity 13, a valve plate 14, a left housing 15, a right housing 16, and a support structure 17;

[0024] The power assembly is mainly composed of a motor 1, a support bearing 2, a set screw 3, a rotating shaft 4, and a shaft retaining spring 6. The motor 1 is connected to the rotating shaft 4 via the set screw 3, transmitting power to the rotating shaft, causing it to rotate. The rotating shaft 4 passes through the support bearings 2 at both ends and is restricted in position by the shaft retaining spring 6. The support bearings 2 are mounted on the left and right housings 15 and 16. The lifting assembly is mounted on the rotating shaft 4 via a hole-shaft fit.

[0025] The lifting assembly is mainly composed of a space cam 5, a roller 7, a lifting shaft 8, a lifting shaft seat 9, and a guide shaft 10; the space cam 5 is installed on the rotating shaft 4 through a hole shaft, and the cam's string movement is limited by the shaft retaining spring 6. The space cam 5 is composed of a constant diameter structure and a variable diameter structure, and a track is designed on the contour; the raised structure on the roller 7 cooperates with the track on the space cam 5, and the roller 7 can roll along the track; the roller 7 is connected to the lifting shaft 8 through a rotating shaft and a retaining spring, and the lifting shaft 8 is limited and guided by the lifting shaft seat 9; the lifting shaft seat 9 is limited and guided by the guide shafts 10 on both sides with the right shell 16 and the left shell 15; a part of the bellows structure 11 is fixed on the lifting shaft seat 9, and the other part is fixed on the left shell 15 and the right shell 16. At this time, a sealed space is formed between the bellows structure 11 and the left shell 15, the right shell 16, the support structure 17, and the cavity 13 connecting plate.

[0026] The cavity assembly primarily consists of a cavity connecting plate 12, a cavity 13, and a valve plate 14. The cavity connecting plate 12 features a sealing structure on one side and mounting holes on the other. The cavity connecting plate 12 and cavity 13 are connected by screws and sealed by the sealing structure. The cavity connecting plate secures the housing assembly with screws. The lifting shaft 8 moves through the center hole of the cavity connecting plate 12 into the cavity 13. The valve 14 is secured to the lifting shaft 8 with vacuum screws.

[0027] The shell assembly is mainly composed of a left shell 15, a right shell 16, and a support structure 17; the upper ends of the left shell 15 and the right shell 16 are fixed on the connecting plate of the cavity 13, and the lower ends are fixed to the two support structures 17 by screws, and the support structure 17 is fixed to the connecting plate of the cavity 13 by screws. Example

[0028] When the valve is in its initial position, the roller is at the starting point of the spatial cam's track, at the nearest end 5-2 of the spatial cam's variable diameter structure. At this point, the lifting shaft and valve plate are on one side of the cavity space. When the motor begins running, the rotating shaft begins to rotate, driving the spatial cam. The specific track 5-4 designed on the spatial cam is helical. When in the variable diameter stage, the lifting shaft and valve plate move together horizontally and vertically, driven by the movement of the roller. At this point, the lifting shaft and the lifting shaft seat form a moving pair, while the guide shaft fixed to the lifting shaft seat forms a moving pair with the right and left outer shells.

[0029] When the valve moves to the closed height, the specific track design allows the spatial cam to rotate to the constant diameter section 5-5. As the motor continues to rotate, the rollers drive the lifting shaft and valve to move horizontally along the track on the constant diameter structure. The guide shaft, along with the right and left housings, forms a moving pair. When the horizontal movement reaches the point where the valve plate and cavity seal, the motor stops, the spatial cam stops rotating, and the rollers are confined to the track, creating a self-locking closed valve. Furthermore, the difference in radius between the closest and farthest ends of the spatial cam (5-2) is the valve's lift height.

[0030] When the valve opens, the motor begins to reverse, driving the spatial cam in the opposite direction. The roller moves along the track, driving the lifting shaft and valve plate horizontally to open the valve. When the roller reaches the farthest end 5-5 of the spatial cam, the valve plate separates from the cavity, and the lifting shaft begins to move downward. When the roller reaches the closest end 5-2 of the spatial cam, the valve is fully opened.

[0031] The bellows structure 11 is provided with a vacuum connection hole 11-1, which is fixed to the left and right outer shells by vacuum screws. The vacuum connection hole 11-2 is fixed to the lifting shaft seat by vacuum screws. A vacuum sealing ring 11-3 is provided on the outside of the bellows structure, and a vacuum sealing ring 11-4 is provided in the center hole. Corrugations 11-5 are on both sides of the center hole.

Claims

1. A vacuum valve suitable for the semiconductor industry, characterized in that: It mainly consists of power components, lifting components, shell components and cavity components; The power assembly mainly consists of a motor, support bearings, set screws, a rotating shaft, and a shaft retaining spring. The motor is connected to the rotating shaft through the set screws, transmitting power to the rotating shaft to make it rotate. The rotating shaft passes through the support bearings at both ends and is limited in position by the shaft retaining spring. The support bearing is installed on the left and right housings; the lifting assembly is installed on the rotating shaft through hole-shaft matching; The lifting assembly is mainly composed of a space cam, a roller, a lifting shaft, a lifting shaft seat, and a guide shaft; the space cam is installed on the rotating shaft through a hole shaft, and the cam's string movement is limited by a shaft retaining spring. The space cam is composed of a constant diameter structure and a variable diameter structure, and a track is designed on the contour; the raised structure on the roller cooperates with the track on the space cam, and the roller can roll along the track; the roller is connected to the lifting shaft through a rotating shaft and a retaining spring, and the lifting shaft is limited and guided by the lifting shaft seat; the lifting shaft seat is limited and guided by the guide shafts on both sides and the right shell and the left shell; a part of the bellows structure is fixed on the lifting shaft seat, and the other part is fixed on the left shell and the right shell. At this time, a sealed space is formed between the bellows structure and the left shell, the right shell, the support structure, and the cavity connecting plate; The cavity assembly is mainly composed of a cavity connecting plate, a cavity, and a valve plate. The cavity connecting plate has a sealing structure on one side and a mounting hole on the other. The cavity connecting plate is connected to the cavity by screws and sealed by the sealing structure. The shell assembly is fixed to the cavity connecting plate by screws, and the lifting shaft moves into the cavity through the center hole of the cavity connecting plate. The valve is fixed to the lifting shaft by vacuum screws. The housing assembly is mainly composed of a left housing, a right housing, and a support structure; the upper ends of the left and right housings are fixed to the cavity connection plate, and the lower ends are fixed to the two support structures by screws, and the support structure is fixed to the cavity connection plate by screws; When the valve is in its initial position, the roller is at the starting point of the spatial cam's track, at the nearest end of the spatial cam's variable diameter structure; at this time, the lifting shaft and valve plate are on one side of the cavity space; when the motor starts running, the rotating shaft starts to rotate, driving the spatial cam to rotate; the specific track on the spatial cam is spiral-shaped, and when in the variable diameter stage, the lifting shaft and valve plate move together in the horizontal and vertical directions under the movement of the roller; at this time, the lifting shaft and the lifting shaft seat form a moving pair, and the guide shaft fixed to the lifting shaft seat and the right and left shells form a moving pair; When the valve moves to the closing height, due to the action of the specific track, the spatial cam just turns to the equal diameter section; when the motor continues to rotate, the roller drives the lifting shaft and the valve to move horizontally along the track on the equal diameter structure; at this time, the guide shaft and the right and left shells form a moving pair; when the horizontal movement reaches the point where the valve plate and the cavity are sealed, the motor stops moving, the spatial cam stops rotating, and the roller is confined to the track, forming a self-locking valve closure; the difference in radius between the nearest and farthest ends of the spatial cam's variable diameter is the lifting height of the valve.

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