A two-dimensional light beam scanning device based on a mixed material of lead zirconate titanate and silicon nitride

Abstract

The application discloses a two-dimensional light beam scanning device based on a mixed material of lead zirconate titanate and silicon nitride. The device comprises a laser, a cascaded multimode interference coupler, a waveguide array, an integrated electric control system and a light emitter array. The output end of the laser is connected to the input end of the multimode interference coupler, the output end of the multimode interference coupler is connected to the two-dimensional waveguide array, and the light emitter array is used for output. The cascaded multimode interference coupler and the waveguide array are both prepared from the mixed material of lead zirconate titanate and silicon nitride. The two-dimensional light beam scanning device is designed in combination with the lead zirconate titanate material, the high electro-optic coefficient of the lead zirconate titanate material is fully utilized, the scanning device has higher integration, lower loss and higher scanning speed, the power consumption and control complexity are greatly reduced in combination with the FPSA, the scanning array can be further expanded, and the device has wide application prospects.

Claims

1. A two-dimensional beam scanning device based on a hybrid material of lead zirconate titanate and silicon nitride, characterized in that, The system includes a laser, a cascaded multimode interference coupler, a waveguide array, an integrated electronic control system, a lens, and a light emitter array. The output of the laser is connected to the input of the cascaded multimode interference coupler, and the output of the cascaded multimode interference coupler is connected to the waveguide array. The output light is then emitted from the light emitter array after passing through a lens. Both the cascaded multimode interference coupler and the waveguide array are made of a mixed material of lead zirconate titanate and silicon nitride. The laser is used to emit laser light. The cascaded multimode interference coupler splits the laser light into multiple beams and directs the beams into the waveguide array. The beams are collimated and redirected by the lens to complete the angular scanning of the output light.

2. The two-dimensional beam scanning device based on a hybrid material of lead zirconate titanate and silicon nitride according to claim 1, characterized in that, The input waveguide, output waveguide, and multimode interference section of the cascaded multimode interference coupler are all made of a mixed material of lead zirconate titanate and silicon nitride.

3. The two-dimensional beam scanning device based on a hybrid material of lead zirconate titanate and silicon nitride according to claim 1, characterized in that, The cascaded multimode interference coupler includes a first waveguide layer, a second waveguide layer, and a third waveguide layer. The first waveguide layer is a lead zirconate titanate waveguide layer, the second waveguide layer is a silicon nitride waveguide layer, and the third waveguide layer is a silicon dioxide waveguide layer. The lead zirconate titanate waveguide layer is placed above the silicon nitride waveguide layer, and the silicon nitride waveguide layer is placed above the silicon dioxide waveguide layer.

4. A two-dimensional beam scanning device based on a hybrid material of lead zirconate titanate and silicon nitride according to claim 2, characterized in that, The cascaded multimode interference coupler consists of multiple cascaded 1×2 multimode interference couplers. Each multimode interference coupler consists of one input terminal, two output terminals, and an intermediate electro-optic phase shifter. The output light is controlled by electronically controlling the phase of the input light wave.

5. A two-dimensional beam scanning device based on a hybrid material of lead zirconate titanate and silicon nitride according to claim 2, characterized in that, The cascaded multimode interference coupler is equipped with an integrated electronic control system, which consists of contact electrodes and heating electrodes. Each multimode interference coupler in the cascaded multimode interference coupler is equipped with a heating electrode, and the heating electrode of each multimode interference coupler is connected between two contact electrodes, which are connected to an external voltage source.

6. A two-dimensional beam scanning device based on a hybrid material of lead zirconate titanate and silicon nitride according to claim 1, characterized in that, The curved waveguide within each of the cascaded multimode interference couplers employs a gradually changing curvature curved structure design to ensure that higher-order modes are not excited during light transmission.

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