Diffusion sintering equipment furnace door control device

Abstract

This invention discloses a furnace door control device for a diffusion junction forming equipment, relating to the technical field of battery silicon wafer processing equipment. The diffusion junction forming equipment includes a diffusion furnace, which comprises a furnace door, a support assembly, and a drive device. The drive device includes a first furnace door connecting assembly and a second furnace door connecting assembly. The second furnace door connecting assembly is connected to the furnace door and includes a furnace door safety control device, a second limiting block, and a first limiting block. The furnace door safety control device is disposed on the upper end face of the diffusion furnace and includes a control board, a second hydraulic cylinder, and a first sealing plate. The first sealing plate matches the first and second furnace door connecting assemblies. The support assembly includes a first support base and a second support base, with the second limiting block fixedly connected to the upper end face of the second support base. This invention ensures that the telescopic rod of the drive device, the furnace door connecting assembly, and the furnace door are not prone to displacement during extension and retraction, resulting in high safety.

Description

Technical Field

[0001] This invention relates to the field of battery silicon wafer processing equipment technology, and in particular to a furnace door control device for diffusion junction forming equipment. Background Technology

[0002] In the production of solar cells, diffusion is an important process. Diffusion occurs at high temperatures, above 800°C, where phosphorus atoms diffuse into the surface of the silicon wafer to form a PN junction. Photons enter the silicon absorption layer and generate photogenerated carriers. The PN junction can separate these photogenerated carriers and output current.

[0003] The diffusion process is as follows: S1. Entering the diffusion furnace: The silicon wafer is fed into the furnace tube; S2. Heating: The temperature is raised to the required process temperature; S3. Pre-oxygenation: Oxygen is introduced to form an oxide layer on the surface of the silicon wafer, protecting the wafer; at the same time, the oxide layer can slow down the phosphorus diffusion rate and improve uniformity; S4. Deposition: Nitrogen, oxygen, and phosphorus oxychloride are introduced, and phosphorus is deposited on the surface of the silicon wafer in response to the reaction; S5. Driving in: The PN junction depth is increased; oxygen is continued to be introduced to allow phosphorus oxychloride to react fully; S6. Cooling down: The furnace temperature is lowered to prevent damage to the silicon wafer caused by a rapid temperature change when exiting the furnace; S7. Unloading: The silicon wafer is pulled out of the furnace tube.

[0004] A diffusion furnace generally consists of a furnace door, a drive unit, and a support assembly. Since the furnace doors of diffusion furnaces in the prior art are usually heavy, a drive unit is generally used to control the opening and closing of the furnace door. The drive unit includes furnace door connectors.

[0005] During the process of controlling the opening and closing of the furnace door, the heavy furnace door, coupled with the lack of a limit device during its extension and retraction, can easily cause the drive unit, furnace door connecting components, and furnace door to shift during the extension and retraction control. This results in the furnace door failing to achieve a proper seal during closing, leading to failures in the diffusion furnace production process. Furthermore, the drive unit is prone to damage when in a tilted state for extended periods, the lifespan of the furnace door connecting components is shortened, and the furnace door is susceptible to deformation due to prolonged tilting, resulting in instability during pressure extraction and significantly increasing production costs. Summary of the Invention

[0006] The purpose of this invention is to provide a furnace door control device for diffusion sintering equipment, which can ensure that the telescopic rod of the drive device, the furnace door connecting assembly, and the furnace door are not easily deviated during extension and retraction, thus ensuring high safety.

[0007] To achieve the above objectives, embodiments of the present invention provide a furnace door control device for a diffusion sintering apparatus. The diffusion sintering apparatus includes a diffusion furnace, which includes a furnace door, a support assembly, and a drive device. The drive device includes a first furnace door connecting assembly and a second furnace door connecting assembly, the second furnace door connecting assembly being connected to the furnace door. The device includes: A furnace door safety control device is installed on the upper end face of the diffusion furnace. The furnace door safety control device includes a control board, a second hydraulic cylinder, and a first sealing plate. The first sealing plate is matched with a first furnace door connecting assembly and a second furnace door connecting assembly. The second limiting block, the support assembly includes a first support base and a second support base, the upper end face of the second support base is fixedly connected to the second limiting block, and the second limiting block is located on one end face of the furnace door; The first limiting block is connected to the upper end face of the second support base. The first limiting block is located on one side end face of the drive device and is matched with the drive device.

[0008] In one or more embodiments of the present invention, the second support base is provided with a limiting groove that matches the first limiting block, the limiting groove abuts against the first limiting block, the projection of the limiting groove on the horizontal plane is greater than the projection of the first limiting block on the horizontal plane, the end face of the first limiting block located in the limiting groove is provided with a pair of second screw holes, the second support base is provided with a third screw hole that matches the pair of second screw holes, and both the second screw holes and the third screw hole are threaded with a first bolt.

[0009] In one or more embodiments of the present invention, the second hydraulic cylinder includes a second telescopic rod, a second telescopic rod is fixedly connected to the second telescopic rod, a plurality of connecting columns are fixedly connected between the second telescopic rod and the first sealing plate, and a first groove is provided on both the first sealing plate and the second telescopic rod, the first groove matching the second furnace door connecting assembly and the first furnace door connecting assembly.

[0010] In one or more embodiments of the present invention, a second connecting plate is fixedly connected to the end face of the second hydraulic cylinder contact control plate, a pair of sixth screw holes are provided on the second connecting plate, and a fourth screw hole matching the pair of sixth screw holes is provided on the control plate, and a third bolt is threadedly connected to both the sixth screw hole and the fourth screw hole.

[0011] In one or more embodiments of the present invention, a first sliding groove is provided on the end face of the diffusion furnace that contacts the furnace door safety control device, a third support seat that matches the furnace door safety control device is fixedly connected to the upper end face of the first support seat, a second sliding groove that matches the first sliding groove is provided on the third support seat, and a sliding block that matches the first sliding groove is fixedly connected to the bottom end face of the furnace door safety control device.

[0012] In one or more embodiments of the present invention, a first hydraulic cylinder is connected to one side end face of the control panel. The first hydraulic cylinder is located at the top end face of the diffusion furnace. The first hydraulic cylinder includes a first telescopic rod, which is connected to one side end face of the furnace door safety control device.

[0013] In one or more embodiments of the present invention, a plurality of fifth screw holes are provided on the first sealing plate, and a first screw hole matching the plurality of fifth screw holes is provided on the furnace door, and a second bolt is threadedly connected to both the first screw hole and the fifth screw hole.

[0014] In one or more embodiments of the present invention, a second groove matching the control plate is provided on the first support base, and the bottom end face of the control plate is located at the middle end face of the furnace door.

[0015] In one or more embodiments of the present invention, a positioning sensor is provided on the end face of the diffusion furnace near the furnace door.

[0016] In one or more embodiments of the present invention, a distance sensor is provided on the upper end face of the diffusion furnace door.

[0017] Compared with the prior art, the furnace door control device for diffusion sintering equipment according to the embodiments of the present invention has the following beneficial effects; (1) When the drive device is in the telescopic control, the drive device, furnace door connecting components and furnace door are not prone to displacement during telescopic operation, which is safe and improves the service life of the drive device, furnace door connecting components and furnace door.

[0018] (2) When the furnace door is closed, the furnace door safety control device provides assistance in closing the furnace door. After the furnace door is closed, the furnace door safety control device will push the furnace door to enhance the sealing of the furnace door. Even if the furnace door is deviated, the furnace door can be reset under the push of the furnace door safety control device. The sealing is high and the pressure is stable. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of a furnace door control device for a diffusion sintering apparatus according to an embodiment of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the structure of a furnace door control device for a diffusion sintering apparatus according to an embodiment of the present invention. Figure 2 ; Figure 3 yes Figure 2 A schematic diagram of the structure at point A; Figure 4 This is a schematic diagram of the first operating state of the furnace door control device of the diffusion sintering equipment according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the second operating state of the furnace door control device of the diffusion sintering equipment according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the third operating state of the furnace door control device of the diffusion sintering equipment according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the fourth operating state of the furnace door control device of the diffusion sintering equipment according to an embodiment of the present invention; Explanation of key figure labels: 1-Diffusion furnace, 101-First sliding groove, 2-Furnace door, 201-First screw hole, 3-Support assembly, 301-First support base, 302-Second support base, 303-Third support base, 304-Second sliding groove, 4-Drive device, 401-First furnace door connecting assembly, 402-Second furnace door connecting assembly, 5-First limit block, 501-First bolt, 6-Furnace door safety control device, 601-First sealing plate, 602-Connecting column, 603-Second bolt, 604-Third bolt, 605-Control board, 606-Sliding block, 7-First hydraulic cylinder, 701-First telescopic rod, 702-First connecting plate, 703-Fourth bolt, 8-Position sensor, 9-Second hydraulic cylinder, 901-Second telescopic rod, 902-Second sealing plate, 903-Second connecting plate, 904-Sixth screw hole, 10-Second limit block. Detailed Implementation

[0020] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings, but it should be understood that the scope of protection of the present invention is not limited to the specific embodiments.

[0021] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "comprises" shall be understood to include the stated elements or components without excluding other elements or other components.

[0022] like Figures 1 to 2 As shown, according to a preferred embodiment of the present invention, the diffusion sintering equipment furnace door control device includes a diffusion furnace 1, the diffusion furnace 1 includes a furnace door 2, a support assembly 3 and a drive device 4, the drive device 4 includes a first furnace door connecting assembly 401 and a second furnace door connecting assembly 402, the second furnace door connecting assembly 402 is connected to the furnace door 2, and the drive device 4 realizes the control of the extension and retraction of the furnace door 2 to achieve the opening and closing of the furnace door 2.

[0023] The support assembly 3 includes a first support base 301, a second support base 302 and a third support base 303. The first support base 301 is connected to the second support base 302, and the third support base 303 is fixedly connected to the upper end face of the first support base 301.

[0024] The lower end face of the drive device 4 is located on the upper end face of the second support 302. The support component 3 has the function of supporting the drive device 4. The second furnace door connecting component 402 is located on the middle end face of the furnace door 2. The first furnace door connecting component 401 and the second furnace door connecting component 402 are connected. The above is the prior art and will not be described in detail here.

[0025] like Figures 1 to 3 As shown, the furnace door safety control device 6 is installed on the upper end face of the diffusion furnace 1. The furnace door safety control device 6 includes a control plate 605, a second hydraulic cylinder 9, and a first sealing plate 601. The first sealing plate 601 matches the first furnace door connecting assembly 401 and the second furnace door connecting assembly 402 to achieve enhanced sealing of the furnace door 2. The furnace door safety control device 6 can control the furnace door 2 to push the furnace door 2 in the closing direction again after it is closed, so as to enhance the closing effect of the furnace door 2 and prevent the furnace door 2 from tilting after it is closed.

[0026] like Figures 1 to 3 As shown, the control panel 605 includes an upper control panel and a lower control panel. The upper control panel is located on the upper end face of the diffusion furnace 1, and the lower control panel is perpendicular to the horizontal direction of the diffusion furnace 1. The bottom end face of the lower control panel is located on the middle end face of the furnace door 2. The second hydraulic cylinder 9 includes a second telescopic rod 901, on which a second sealing plate 902 is fixedly connected. Multiple connecting posts 602 are fixedly connected between the second sealing plate 902 and the first sealing plate 601. The first sealing plate 601 can be tightly fitted to the outer end face of the furnace door 2. The second hydraulic cylinder 9 controls the first sealing plate 601 to fit against the outer end face of the furnace door 2 through the second telescopic rod 901. When the furnace door 2 is closed, the second hydraulic cylinder 9 can push in the direction of closing the furnace door 2 to enhance the sealing effect of the furnace door 2.

[0027] The first sealing plate 601 is in the shape of a ring. When the first sealing plate 601 contacts the second furnace door connecting assembly 402, the first sealing plate 601 can be sleeved on the outer end face of the second furnace door connecting assembly 402, and the first sealing plate 601 directly contacts the outer end face of the furnace door 2.

[0028] Furthermore, the projections of the first sealing plate 601 and the second sealing plate 902 on the horizontal plane are both greater than the projection of the second furnace door connecting assembly 402 on the horizontal plane, thereby increasing the contact area between the first sealing plate 601 and the furnace door 2 and achieving rapid closing of the furnace door 2.

[0029] The first sealing plate 601 and the second sealing plate 902 are both provided with a first groove. The first groove matches the second furnace door connecting component 402 and the first furnace door connecting component 401. When the first sealing plate 601 contacts the furnace door 2, the first sealing plate 601 can directly contact the furnace door 2. The first furnace door connecting component 401 and the second furnace door connecting component 402 do not affect the first sealing plate 601 from directly contacting the outer end face of the furnace door 2.

[0030] Specifically, when furnace door 2 is closed, if it tilts, the second hydraulic cylinder 9 on the furnace door safety control device 6 is activated. This activates the second telescopic rod 901, causing the second sealing plate 902 and the first sealing plate 601 to move forward until they are tightly fitted against furnace door 2. The first sealing plate 601 abuts against the outer end face of furnace door 2. This prevents furnace door 2 from tilting when closed, extending the service life of furnace door 2 and the drive device 4, while also ensuring a proper seal and not affecting the normal operation of the diffusion furnace 1.

[0031] like Figures 5 to 6 As shown, the second hydraulic cylinder 9 is fixedly connected to the end face of the control board 605 with a second connecting plate 903. The second connecting plate 903 has a pair of sixth screw holes 904, and the control board 605 has a fourth screw hole that matches the pair of sixth screw holes 904.

[0032] Both the sixth screw hole 904 and the fourth threaded hole are threaded with a third bolt 604. The third bolt 604 passes through the sixth screw hole 904 and the fourth threaded hole, thereby fixing the second hydraulic cylinder 9 on the control plate 605, which facilitates the maintenance of the second hydraulic cylinder 9.

[0033] When the second hydraulic cylinder 9 needs maintenance after prolonged use, the third bolt 604 is rotated to remove it from the second connecting plate 903, and then the second hydraulic cylinder 9 is moved to remove it for maintenance.

[0034] A position sensor 8 is installed on the end face of the diffusion furnace 1 near the furnace door 2 to monitor the furnace door 2 after it has been positioned. When the furnace door 2 moves to the end face of the diffusion furnace 1 and begins to close, the position sensor 8 detects that the furnace door 2 has been positioned. The position sensor 8 is connected to the main controller, which controls the second hydraulic cylinder 9 to start. The second hydraulic cylinder 9 controls the first sealing plate 601 to abut against the furnace door 2 through the second telescopic rod 901, thereby assisting in the sealing of the furnace door 2.

[0035] Among them, the positioning sensor 8 is an angle displacement sensor, which converts angle measurement into the measurement of other physical quantities. Its specific model is WDA-D22-A angle displacement sensor.

[0036] like Figure 1 As shown, a distance sensor is installed on the upper end face of the diffusion furnace 1 at the furnace door 2 to monitor the tilt distance when the furnace door 2 is closed. The distance sensor is connected to the main controller. After receiving the data transmitted by the distance sensor, the main controller controls the extension and retraction length of the second hydraulic cylinder 9 according to the tilt distance to achieve better sealing of the furnace door 2 and improve the pumping stability.

[0037] like Figures 1 to 3 As shown, the second limiting block 10 is fixedly connected to the upper end face of the second support base 302. The second limiting block 10 is located on one side end face of the furnace door 2. When the driving device 4 controls the furnace door 2 to open, and the driving device 4 is located on the upper end face of the second support base 302, the distance between the second limiting block 10 and the furnace door 2 is 0.5~2cm, which achieves the limitation of the furnace door 2. When the furnace door 2 extends and retracts, it is not easy for it to deviate.

[0038] like Figures 1 to 3 As shown, the first limiting block 5 is connected to the upper end face of the second support base 302. The first limiting block 5 is located on one side end face of the drive device 4, and the first limiting block 5 matches the drive device 4. When the control furnace door 2 is opened or closed, the drive device 4 runs on the upper end face of the second support base 302, and the drive device 4 limits the first limiting block 5. The present invention achieves a situation where the drive device 4 is less likely to deviate during operation. In the prior art, the drive device 4 often deviates during operation, affecting the opening and closing of the furnace door 2, and also affecting the service life of the furnace door 2 and the drive device 4. The present invention achieves a limit on the drive device 4 during operation, so that the drive device 4 is less likely to deviate during operation, which is safer and improves the service life of the drive device 4 and the furnace door 2.

[0039] like Figure 1 or Figure 7 As shown, the second support 302 has a limiting groove that matches the first limiting block 5. The first limiting block 5 abuts in the limiting groove. The projection of the limiting groove on the horizontal plane is greater than the projection of the first limiting block 5 on the horizontal plane, thus limiting the first limiting block 5 and making it difficult for the first limiting block 5 to move.

[0040] The first limiting block 5 has a pair of second screw holes on the end face of the limiting groove. The second support 302 has a third screw hole that matches the pair of second screw holes. The second screw holes and the third screw holes are threaded with a first bolt 501. The first bolt 501 passes through the second screw hole and the third screw hole, thereby limiting the position of the first limiting block 5 against the drive device 4. At the same time, it is convenient to disassemble the first limiting block 5 to maintain the drive device 4.

[0041] Specifically, when installing the first limiting block 5, the first limiting block 5 can be placed in the limiting groove, and the distance between the first limiting block 5 and the driving device 4 can be adjusted to a suitable distance as needed. Then, the first bolt 501 can be rotated until the first bolt 501 passes through the second screw hole and the third screw hole, so as to fix the first limiting block 5 on the second support base 302. When maintenance is required on the drive unit 4, the first bolt 501 can be rotated to remove it, and then the drive unit 4 can be removed for maintenance.

[0042] like Figures 1 to 3 As shown, a first sliding groove 101 is provided on the end face of the diffusion furnace 1 that contacts the furnace door safety control device 6, and a third support 303 that matches the furnace door safety control device 6 is fixedly connected to the upper end face of the first support 301.

[0043] The third support 303 has a second sliding groove 304 that matches the first sliding groove 101. The bottom end face of the furnace door safety control device 6 is fixedly connected to a sliding block 606 that matches the first sliding groove 101. The furnace door safety control device 6 slides on the first sliding groove 101 and the third support 303 through the sliding block 606.

[0044] A first hydraulic cylinder 7 is connected to one end face of the control panel 605. The first hydraulic cylinder 7 is located on the top end face of the diffusion furnace 1. The first hydraulic cylinder 7 includes a first telescopic rod 701. The first telescopic rod 701 is connected to one end face of the furnace door safety control device 6. The operation of the first hydraulic cylinder 7 controls the extension and retraction of the first telescopic rod 701, thereby driving the furnace door safety control device 6 to slide on the first sliding groove 101 and the second sliding groove 304, thus controlling the furnace door safety control device 6 to slide on the diffusion furnace 1.

[0045] like Figure 6 As shown, a first connecting plate 702 is fixedly connected to the lower end face of the first hydraulic cylinder 7. A pair of seventh screw holes are opened on the end face of the first connecting plate 702 and the diffusion furnace 1 that contacts the first connecting plate 702. A fourth bolt 703 is threaded into each pair of seventh screw holes to fix the first hydraulic cylinder 7 to the upper end face of the diffusion furnace 1.

[0046] like Figures 4 to 6 As shown, the first sealing plate 601 has multiple fifth screw holes, and the furnace door 2 has a first screw hole 201 that matches the multiple fifth screw holes.

[0047] Both the first screw hole 201 and the fifth screw hole are threaded with a second bolt 603. The second bolt 603 passes through the fifth screw hole and the first screw hole 201, thereby fixing the first sealing plate 601 to the furnace door 2, so that the furnace door safety control device 6 and the auxiliary drive device 4 can control the opening and closing of the furnace door 2. The existing furnace door 2 is relatively heavy. Relying solely on the drive device 4 to control the opening and closing of the furnace door 2 can easily lead to a large load on the drive device 4, reducing its service life and making it prone to damage. The present invention uses a furnace door safety control device 6 to assist the operation of the drive device 4, thereby increasing its service life and reducing wear and tear.

[0048] The first support 301 has a second groove that matches the control plate 605, so that the operation of the furnace door safety control device 6 is not affected during the process of the furnace door 2 being opened and closed by the furnace door safety control device 6 and the drive device 4. The furnace door safety control device 6 can slide normally on the first sliding groove 101 and the second sliding groove 304.

[0049] Specifically, when the drive unit 4 starts running and controls the furnace door 2 to open and close, the furnace door safety control device 6 moves along with the drive unit 4. The furnace door safety control device 6 is connected to the furnace door 2 through the first sealing plate 601. When the drive unit 4 is running and moving, the first hydraulic cylinder 7 controls the operation of the furnace door safety control device 6 through the first telescopic rod 701. The furnace door safety control device 6 moves accordingly, thereby reducing the wear and tear of the drive unit 4 during operation and providing thrust for the opening and closing of the furnace door 2.

[0050] Preferably, when the furnace door safety control device 6 is not required to operate the auxiliary drive device 4 to control the opening and closing of the furnace door 2, the second bolt 603 can be rotated off the furnace door 2, at which time the first sealing plate 601 is not connected to the furnace door 2. When the positioning sensor 8 detects that the furnace door 2 has closed, the main controller controls the first hydraulic cylinder 7 to start, and the furnace door safety control device 6 operates as the furnace door 2 moves forward; When the furnace door 2 is closed, the second hydraulic cylinder 9 controls the first sealing plate 601 to move forward. The main controller controls the extension and retraction length of the second telescopic rod 901 based on the data fed back by the position sensor 8 and the distance sensor, so that the first sealing plate 601 pushes the furnace door 2 to close, thereby enhancing the sealing performance of the furnace door 2 after it is closed.

[0051] After the furnace door safety control device 6 closes the furnace door 2, the first hydraulic cylinder 7 controls the furnace door safety control device 6 to move towards the third support 303 until the furnace door safety control device 6 no longer affects the normal use of the furnace door 2.

[0052] When using, such as Figure 4As shown, when the furnace door 2 needs to be opened, the drive device 4 starts to control the operation of the furnace door 2 and moves it out of the diffusion furnace 1. At this time, the first hydraulic cylinder 7 is activated, controlling the furnace door safety control device 6 to move along with the furnace door 2. The furnace door safety control device 6 is connected to the furnace door 2 through the first sealing plate 601, thereby reducing the wear and tear of the drive device 4 during operation, providing thrust for the opening and closing of the furnace door 2, and improving the service life of the furnace door 2. This is the first operating state.

[0053] like Figure 5 As shown, when the furnace door safety control device 6 is not required to operate the power drive device 4 to control the opening and closing of the furnace door 2, the second bolt 603 can be rotated off the furnace door 2. When the position sensor 8 detects that the furnace door 2 is closed, the main controller controls the first hydraulic cylinder 7 to start. The first hydraulic cylinder 7 controls the furnace door safety control device 6 to move to the first sealing plate 601 to abut the outer end face of the furnace door 2. When the furnace door 2 is closed, the main controller controls the extension and retraction of the second telescopic rod 901 based on the data fed back by the position sensor 8 and the distance sensor, so that the first sealing plate 601 pushes the furnace door 2 inward to close, thereby improving the sealing performance of the furnace door 2 and making it less likely for the furnace door 2 to tilt when closed. This is the second use state.

[0054] like Figure 6 As shown, when maintenance is required on the second hydraulic cylinder 9, the third bolt 604 is rotated until it is removed from the second connecting plate 903, and then the second hydraulic cylinder 9 is moved until it is removed to perform maintenance on the second hydraulic cylinder 9. After the maintenance is completed, the second hydraulic cylinder 9 is connected to the furnace door safety control device 6. This is the third operating state.

[0055] like Figure 7 As shown, when installing the first limiting block 5, after placing the first limiting block 5 in the limiting groove, adjust the distance between the first limiting block 5 and the drive device 4 to a suitable distance as needed. Then, rotate the first bolt 501 until it passes through the second screw hole and the third screw hole, thereby fixing the first limiting block 5 on the second support base 302. This limits the operation of the drive device 4 and prevents it from tilting during operation, which would affect the normal use of the furnace door 2 and the drive device 4. This is the fourth operating state.

[0056] The foregoing description of specific exemplary embodiments of the invention is for illustrative and explanatory purposes. These descriptions are not intended to limit the invention to the precise forms disclosed, and it will be apparent that many changes and variations can be made in accordance with the foregoing teachings. The exemplary embodiments were chosen and described in order to explain the specific principles of the invention and its practical application, thereby enabling those skilled in the art to implement and utilize various different exemplary embodiments of the invention, as well as various different choices and variations. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. A furnace door control device for a diffusion sintering apparatus, the diffusion sintering apparatus comprising a diffusion furnace, the diffusion furnace comprising a furnace door, a support assembly, and a drive device, the drive device comprising a first furnace door connecting assembly and a second furnace door connecting assembly, the second furnace door connecting assembly being connected to the furnace door, characterized in that, include; A furnace door safety control device is installed on the upper end face of the diffusion furnace. The furnace door safety control device includes a control board, a second hydraulic cylinder, and a first sealing plate. The first sealing plate is matched with a first furnace door connecting assembly and a second furnace door connecting assembly. The second limiting block, the support assembly includes a first support base and a second support base, the upper end face of the second support base is fixedly connected to the second limiting block, and the second limiting block is located on one end face of the furnace door; A first limiting block is connected to the upper end face of a second support base. The first limiting block is located on one end face of a driving device and matches the driving device. A limiting groove matching the first limiting block is provided on the second support base, and the first limiting block abuts in the limiting groove. The projection of the limiting groove on the horizontal plane is larger than the projection of the first limiting block on the horizontal plane. A pair of second screw holes are provided on the end face of the first limiting block located in the limiting groove. A third screw hole matching the pair of second screw holes is provided on the second support base. Both the second and third screw holes are threaded with first bolts. A first sliding groove is provided on the end face of the diffusion furnace that contacts the furnace door safety control device. A third support base matching the furnace door safety control device is fixedly connected to the upper end face of the first support base. A second sliding groove matching the first sliding groove is provided on the third support base. A sliding block matching the first sliding groove is fixedly connected to the bottom end face of the furnace door safety control device.

2. The furnace door control device for diffusion sintering equipment as described in claim 1, characterized in that, The second hydraulic cylinder includes a second telescopic rod, on which a second sealing plate is fixedly connected. Multiple connecting columns are fixedly connected between the second sealing plate and the first sealing plate. A first groove is provided on both the first and second sealing plates, and the first groove matches the second furnace door connecting assembly and the first furnace door connecting assembly.

3. The furnace door control device for diffusion sintering equipment as described in claim 2, characterized in that, The end face of the second hydraulic cylinder contact control board is fixedly connected to a second connecting plate. The second connecting plate is provided with a pair of sixth screw holes. The control board is provided with a fourth screw hole that matches the pair of sixth screw holes. Both the sixth screw holes and the fourth screw hole are threaded with a third bolt.

4. The furnace door control device for diffusion sintering equipment as described in claim 1, characterized in that, A first hydraulic cylinder is connected to one end face of the control panel. The first hydraulic cylinder is located at the top end face of the diffusion furnace. The first hydraulic cylinder includes a first telescopic rod, which is connected to one end face of the furnace door safety control device.

5. The furnace door control device for diffusion sintering equipment as described in claim 1, characterized in that, The first sealing plate has multiple fifth screw holes, and the furnace door has a first screw hole that matches the multiple fifth screw holes. Both the first screw hole and the fifth screw hole are threaded with a second bolt.

6. The furnace door control device for diffusion sintering equipment as described in claim 1, characterized in that, The first support base has a second groove that matches the control panel, and the bottom end face of the control panel is located at the middle end face of the furnace door.

7. The furnace door control device for diffusion sintering equipment as described in claim 1, characterized in that, A positioning sensor is installed on the end face of the diffusion furnace near the furnace door.

8. The furnace door control device for diffusion sintering equipment as described in claim 1, characterized in that, A distance sensor is installed on the upper end face of the diffusion furnace door.

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