Shielding of sensor configuration and alignment of coordinate measuring machine probe

Abstract

A scanning probe for a coordinate measuring machine includes a stylus suspension module, a stylus position detection module, an interferometer configuration, and a signal processing and control circuit module. The stylus position detection module includes a sensor configuration including various coils and a shield configuration positioned around the sensor configuration and including electrically conductive material for shielding the sensor configuration. The stylus position detection module is mounted to the stylus suspension module using a module mounting configuration that enables adjustment of the relative position of the sensor configuration for alignment during assembly of the scanning probe.

Description

Background Technology Technical Field

[0001] This disclosure relates to precision metrology, and more specifically to coordinate measuring machine probes.

[0002] Related technical descriptions

[0003] A coordinate measuring machine (CMM) obtains measurement results of the inspected workpiece. An exemplary prior art CMM described in U.S. Patent No. 8,438,746 includes a probe for measuring the workpiece, a movement mechanism for moving the probe, and a controller for controlling the movement; that U.S. patent is hereby incorporated herein by reference in its entirety. A CMM including a surface scanning probe is described in U.S. Patent No. 7,652,275, which is also hereby incorporated by reference in its entirety. As disclosed in those U.S. patents, mechanical contact probes or optical probes can scan across the workpiece surface.

[0004] CMM employing a mechanical contact probe is also described in U.S. Patent No. 6,971,183, which is hereby incorporated herein by reference in its entirety. The probe disclosed in that U.S. patent comprises a stylus having a probe tip (i.e., a surface contact portion), an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes a moving member that allows the probe tip to move in the direction of the central axis of the measuring probe (also referred to as the Z-direction or axial direction). The rotary motion mechanism includes a rotating member that allows the probe tip to move perpendicular to the Z-direction. The axial motion mechanism is nested within the rotary motion mechanism. The probe tip position and / or workpiece surface coordinates are determined based on the displacement of the rotating member and the axial displacement of the axial motion moving member.

[0005] Inductive position detectors for stylus position measurement in CMM scanning probes are disclosed in U.S. Patent Publications 2020 / 0141714 and 2020 / 0141717, each of which is hereby incorporated herein by reference in its entirety. The disclosed configurations include a rotational sensing coil configuration and a corresponding axial sensing coil configuration. A conductive interferometer coupled to the stylus moves in the Z (axial) and XY (rotational) directions within a motion volume. A generating coil generates a varying magnetic flux around the interferometer and the coil, and the coil signal indicates the position of the interferometer and / or the stylus.

[0006] It would be desirable to improve or otherwise enhance the configuration of such CMM scanning probes (e.g., regarding ease of assembly and / or improved operational characteristics). Summary of the Invention

[0007] The summary is provided to introduce, in a simplified form, the selection of concepts further described in the detailed embodiments below. This summary is not intended to identify key features of the claimed subject matter, nor is it intended to help determine the scope of the claimed subject matter.

[0008] According to one aspect, a modular configuration for a scanning probe of a coordinate measuring machine is provided. The modular configuration for the scanning probe includes a stylus suspension module comprising: a stylus coupling portion configured to rigidly couple to a stylus having a probe tip; and a stylus motion mechanism that enables the stylus coupling portion to move axially in an axial direction and to rotate about a rotation center.

[0009] The modular configuration for the scanning probe also includes a stylus position detection module, which is configured to be assembled separately from the stylus suspension module before being installed onto the stylus suspension module as part of assembling the scanning probe. When installed, the stylus position detection module is configured to be arranged along a central axis parallel to the axial direction and nominally aligned with the rotation center. The stylus position detection module includes a sensor configuration comprising: a field generating coil configuration including at least one field generating coil; a top axial sensing coil configuration including at least one top axial sensing coil; a bottom axial sensing coil configuration including at least one bottom axial sensing coil; and a plurality of top rotation sensing coils and a plurality of bottom rotation sensing coils.

[0010] The jammer configuration of the scanning probe is configured to be coupled to the stylus suspension module. The jammer configuration includes a conductive jammer element providing a jammer region, wherein the jammer element is configured to be positioned along the central axis within the jammer movement volume and coupled to the stylus suspension module via a jammer coupling configuration, and to move within the jammer movement volume relative to an undeflected position in response to deflection of the stylus suspension module. The jammer element moves within an operating range of + / -Rz along the axial direction in response to the axial movement and within corresponding operating ranges of + / -Rx and + / -Ry along orthogonal X and Y directions orthogonal to the axial direction in response to the rotational movement. The field generating coil configuration is configured to generate a varying magnetic flux generally along the axial direction within the jammer movement volume in response to a coil drive signal.

[0011] The modular configuration for the scanning probe also includes a signal processing and control circuit module configured to be assembled separately from the stylus position detection module and the stylus suspension module, and then rigidly coupled to the stylus position detection module as part of the assembled scanning probe. The signal processing and control circuit module is configured to be operatively connected to the coils of the stylus position detection module (e.g., the field generation coil configuration, the axial sensing coil configuration, and the rotation sensing coil) to provide the coil drive signals, and to input signals including corresponding signal components provided by the respective rotation sensing coils and the axial sensing coils, and to output signals indicating the axial and rotational positions of one or more of the interfering element, the stylus coupling portion, or the probe tip (e.g., in various embodiments, the output signals may indicate the axial and rotational positions of each of the interfering element, the stylus coupling portion, and the probe tip).

[0012] According to another aspect, a scanning probe for a coordinate measuring machine is provided. The scanning probe includes a stylus suspension module comprising: a stylus coupling portion configured to rigidly couple to a stylus having a probe tip; and a stylus motion mechanism that enables the stylus coupling portion to move axially in an axial direction and to rotate about a rotation center.

[0013] The scanning probe also includes a stylus position detection module, which is arranged along a central axis parallel to the axial direction and nominally aligned with the rotation center. The stylus position detection module includes:

[0014] Sensor configuration, which includes:

[0015] A field generating coil configuration, the field generating coil configuration including at least one field generating coil;

[0016] A top axial sensing coil configuration, the top axial sensing coil configuration including at least one top axial sensing coil;

[0017] A bottom axial sensing coil configuration, the bottom axial sensing coil configuration including at least one bottom axial sensing coil; and

[0018] Multiple top rotation sensing coils and multiple bottom rotation sensing coils; and

[0019] A shielding configuration is positioned around the sensor configuration and includes a conductive material for shielding the sensor configuration.

[0020] The scanning probe also includes a jammer configuration comprising a conductive jammer element providing a jammer region. The jammer element is positioned within the jammer movement volume along the central axis and is coupled to the stylus suspension module via a jammer coupling configuration. The jammer element moves within the jammer movement volume relative to its undeflected position in response to deflection of the stylus suspension module. The jammer element moves within an operating range of + / -Rz along the axial direction in response to axial movement and within corresponding operating ranges of + / -Rx and + / -Ry in response to rotational movement along orthogonal X and Y directions orthogonal to the axial direction. The field generating coil configuration generates a varying magnetic flux generally along the axial direction within the jammer movement volume in response to a coil drive signal.

[0021] The scanning probe also includes a signal processing and control circuit module configured to be operatively connected to the coils of the stylus position detection module to provide the coil drive signal, and to input signals including corresponding signal components provided by the respective rotation sensing coils and the respective axial sensing coils, and to output signals indicating the axial and rotational positions of one or more of the interfering element, the stylus coupling portion, or the probe tip. Attached Figure Description

[0022] Figure 1 This is a diagram showing the various typical components of a measurement system, including a CMM using a scanning probe such as the scanning probe disclosed herein;

[0023] Figure 2 This is a block diagram showing the various components of a scanning probe coupled to a CMM and providing rotational and axial position signals;

[0024] Figure 3 This is a diagram showing a portion of a first exemplary embodiment of a stylus suspension module coupled to a stylus and a first exemplary embodiment of a stylus position detection module for detecting the position of the stylus suspension module;

[0025] Figures 4A-4C This diagram illustrates a specific implementation of the stylus suspension module, stylus position detection module, and signal processing and control circuit module of the assembled scanning probe.

[0026] Figure 5 It shows Figure 3 and Figures 4A-4C A partial schematic isometric view of an alternative embodiment of the stylus position detection module shown;

[0027] Figure 6 It shows Figure 5Partial schematic isometric view of certain components of the stylus position detection module and signal processing and control circuit module shown;

[0028] Figure 7 It shows Figure 4A The specific implementation of the signal processing and control circuit module may include, and may include, with Figure 6 A diagram of a circuit similar to the one in question;

[0029] Figures 8A-8D It shows Figure 4A A diagram illustrating the specific implementation of the stylus position detection module;

[0030] Figure 9 It shows Figure 4A A diagram illustrating the specific implementation of the stylus suspension module;

[0031] Figure 10 It shows the method for using Figures 8A-8D The stylus position detection module is installed on Figure 9 A diagram illustrating the specific implementation of the stylus suspension module's installation and configuration;

[0032] Figure 11 This demonstrates the integration of signal processing and control circuit modules in... Figure 4A A diagram illustrating the specific implementation of the jammer components used in the specific implementation;

[0033] Figure 12 This is a flowchart illustrating an example of a method for assembling a modular configuration of a scanning probe based on the principles disclosed herein; and

[0034] Figure 13 This is a flowchart illustrating an example of a method for measuring the surface of a workpiece using a scanning probe. Detailed Implementation

[0035] Figure 1 This diagram illustrates the various typical components of a measurement system 100, which includes a CMM 200 using a scanning probe 300 such as the scanning probe disclosed herein. The measurement system 100 includes an operation unit 110, a motion controller 115 that controls the movement of the CMM 200, a host computer 120, and the CMM 200. The operation unit 110 is coupled to the motion controller 115 and may include a joystick 111 for manual operation of the CMM 200. The host computer 120 is coupled to the motion controller 115 and operates the CMM 200 and processes measurement data of the workpiece W. The host computer 120 includes an input device 125 (e.g., a keyboard, etc.) for inputting, for example, measurement conditions, and an output device 130 (e.g., a display, printer, etc.) for outputting, for example, measurement results.

[0036] The CMM 200 includes a drive mechanism 220 positioned on a planar plate 210 and a drive mechanism attachment portion 224 for attaching a scanning probe 300 to the drive mechanism 220. The drive mechanism 220 includes an X-axis movement mechanism 222, a Y-axis movement mechanism 221, and a Z-axis movement mechanism 223 (e.g., sliding mechanisms) for three-dimensional movement of the scanning probe 300. A stylus 306 attached to the end of the scanning probe 300 includes a probe tip 348 (e.g., the probe tip may also or alternatively be referred to as a contact portion 348). As will be described in more detail below, the stylus 306 is attached to a stylus suspension module of the scanning probe 300, which allows the probe tip 348 to freely change its position in three directions as it moves along the measurement path on the surface of the workpiece W.

[0037] Figure 2 This is a block diagram illustrating the various components of a scanning probe 300 coupled to a CMM 200 and providing rotational (e.g., X, Y) position signals and axial (e.g., Z) position signals. In various embodiments, the scanning probe 300 may include a stylus suspension portion 307P, a stylus position detection portion 311P, and a signal processing and control circuitry portion 380P. Each portion may include corresponding modules, such as the stylus suspension module 307, the stylus position detection module 311, and the signal processing and control circuitry module 380, each of which will be described in more detail below. In various embodiments, the probe body 302 may include each of the modules of the scanning probe 300.

[0038] The stylus suspension module 307 includes a stylus coupling portion 342 and a stylus motion mechanism 309. The stylus coupling portion 342 is rigidly coupled to the stylus 306. The stylus motion mechanism 309 is configured such that the stylus coupling portion 342 and the attached stylus 306 can move axially in the axial direction and can rotate about a rotation center, as will be discussed below. Figure 3 and Figure 4A In a more detailed description, the signal processing and control circuit module 380, included in the scanning probe 300, is connected to and controls the operation of the stylus position detection module 311 and can perform related signal processing, all of which are described in more detail below.

[0039] like Figure 2As shown, the stylus position detection module 311 uses an inductive sensing principle and includes a receiver coil portion 370 and a field generating coil configuration 360. The stylus position detection module 311 senses the position of the interfering element 351 (which may be part of the interfering configuration 350, which in some embodiments may include multiple portions). In various embodiments, the interfering configuration 350 having the interfering element 351 may be part of the stylus position detection portion 311P (e.g., included or not included in the stylus position detection module 311), or may be a separate configuration and / or element.

[0040] The receiver coil portion 370 may include a rotation sensing coil portion (also referred to as a rotation sensing coil) RSC and an axial sensing coil configuration ASCC. In short, a moving interfering element 351 (or more generally, interfering configuration 350) causes a position-dependent change in the changing magnetic field generated by the field generating coil configuration 360. The receiver coil portion 370 responds to the changing magnetic field and the change in the changing magnetic field caused by the interfering element 351. Specifically, for example, the rotation sensing coil portion RSC outputs at least first and second rotational signal components RSig indicating the rotational position (e.g., X and Y position signals) of the stylus coupling portion 342 on the corresponding signal line, and the axial sensing coil configuration ASCC outputs one or more axial signal components ASig indicating the axial position (e.g., Z position signal) of the stylus coupling portion 342 on the corresponding signal line, as referenced below. Figure 3 , 5 As described in more detail in section 6. In various embodiments, the signal processing and control circuit module 380 receives the rotational signal component RSig and the axial signal component ASig, and can perform various levels of related signal processing in various embodiments. For example, in one embodiment, the signal processing and control circuit module 380 can cause the signal components from the respective receiver coils to be combined and / or processed in various relationships, and provide the results as a rotational position signal output RPSOut and an axial position signal output APSOut in a desired output format via the attachment portion 224. One or more receiving portions (e.g., in CMM 200, motion controller 115, host computer 120, etc.) can receive the rotational position signal output RPSOut and the axial position signal output APSOut, and can use one or more associated processing and control portions to determine the three-dimensional position of the stylus coupling portion 342 and / or the three-dimensional position of the probe tip 348 of the attached stylus 306 as the probe tip of the attached stylus moves along the surface of the workpiece W being measured.

[0041] Figure 3This is a partial schematic cross-sectional view of a portion of a first exemplary embodiment of a stylus suspension module 407, schematically representing a stylus suspension portion 407P coupled to a stylus 406, and a portion of a first exemplary embodiment of a stylus position detection module 411, which is a stylus position detection portion 411P for detecting at least a portion of the stylus suspension module 407 (e.g., the stylus coupling portion 442) and / or the position of the stylus 406. It should be understood that... Figure 3 Some numbered components 4XX can correspond to Figure 2 The corresponding components with similar designations 3XX and / or having similar operations can be understood by analogy with the corresponding components and can be understood as otherwise described below. This numbering scheme for indicating elements with similar designs and / or functions also applies to the following Figures 4A-11 .like Figure 3 As shown, the stylus suspension portion 407 includes a stylus motion mechanism 409 and a stylus coupling portion 442. The stylus coupling portion 442 is configured to be rigidly coupled to a stylus 406, which has a contact point for a workpiece W (e.g., see...). Figure 1 The probe tip 448 on the surface.

[0042] The following text will be about Figure 4A In more detail, the stylus motion mechanism 409 may be attached to (e.g., a scanning probe) a frame and is configured such that the stylus coupling portion 442 and the attached stylus 406 are capable of axial and rotational movement, allowing the probe tip 448 to change its position in three directions along the shape of the workpiece W's surface. For illustrative purposes, Figure 3 The vertical and horizontal directions on the paper plane are defined as the Z and Y directions, respectively, and the direction perpendicular to the paper plane is defined as the X direction. The direction of the central axis CA of the measuring probe 300 (also known as the axial direction) is consistent with the Z direction in this diagram.

[0043] exist Figure 3 The image shows the rotary motion portion of the stylus motion mechanism 409, which includes a rotating member 436, a flexural element 440, and a moving member 412 disposed within the rotating member 436. The following text will discuss... Figure 4AIn more detail, the flexure element 440 enables the rotating member 436 to rotate about the rotation center RC. As will be described in more detail below, in various embodiments, the rotation sensing coils TRSCi and BRSCi (where i is an index integer identifying a particular coil) of the stylus position detection module 411 are capable of sensing the rotated position of the interfering element 451 and thereby sensing the rotated position of the moving member 412 (e.g., in the X and Y directions), and the axial sensing coil configurations TASCC and BASCC (also referred to as axial sensing coils) are capable of sensing the axial position of the interfering element 451 and thereby sensing the axial position of the moving member 412 (e.g., in the Z direction).

[0044] like Figure 3 As shown, the jammer element 451 (or more generally, the jammer configuration 450) is coupled to the moving member 412 and moves relative to the scanning probe frame (e.g., where the frame is included as part of the scanning probe body, etc.) within a jammer movement volume MV respectively positioned between the top coil substrate 471T and the bottom coil substrate 471B. Figure 3 As shown, the moving member 412 extends through and moves within a hole 491B positioned in the bottom coil substrate 471B along the central axis CA. The attached disruptor element 451 moves within the disruptor motion volume MV relative to an undeflected position UNDF (e.g., which may also correspond to zero or a reference position) in response to deflection of the stylus suspension module 407 and the moving member 412. In various embodiments, the disruptor configuration 450 having the disruptor element 451 may be part of the stylus position detection portion 411P (e.g., included or excluded from the stylus position detection module 411), or may be a separate configuration and / or element.

[0045] exist Figure 3 In the specific implementation shown, the field generating coil configuration 460 includes a single planar field generating coil 461 that is substantially located at the midplane of the interferator's moving volume MV and is nominally planar and orthogonal to the central axis CA. As previously discussed... Figure 2 In summary, the receiver coil section 470 typically includes a rotation sensing coil section (also referred to as a rotation sensing coil) RSC and an axial sensing coil configuration ASCC. The rotational position detection configuration RSC typically includes a top rotation sensing coil TRSCi and a bottom rotation sensing coil BRSCi.

[0046] exist Figure 3In the example, the planar top coil substrate 471T includes N top rotation sensing coils TRSC (e.g., TRSC1-TRSC4, where N=4, located at uniformly spaced positions around the central axis CA) and a top axial sensing coil configuration TASCC (e.g., including a single individual coil in this embodiment), and the planar bottom coil substrate 471B includes N bottom rotation sensing coils BRSC (e.g., BRSC1-BRSC4, where N=4, located at uniformly spaced positions around the central axis CA) and a bottom axial sensing coil configuration BASCC (e.g., including a single individual coil in this embodiment). The top coil substrate 471T and the bottom coil substrate 471B may be nominally parallel to each other and nominally orthogonal to the central axis CA, and spaced apart along the central axis CA by an interferator movement volume positioned between the top coil substrate and the bottom coil substrate. It should be understood that, although for the sake of simplicity of illustration, Figure 3 The various sensing coils shown in Figure 4 may be represented as “closed loops” in some cases, but all coils include windings or conductors having a first connection end and a second connection end configured to operate as one or more inductively coupled “turns” and coupled to associated circuitry (e.g., the circuitry of signal processing and control circuitry module 480).

[0047] exist Figure 3 In the cross-section shown, only the two top rotating sensing coils TRSC1 and TRSC2 and the two bottom rotating sensing coils BRSC1 and BRSC2 are visible. These rotating sensing coils can provide signal components indicating the position of the interfering element 451 along the Y direction. Specifically, the signal components of these rotating sensing coils vary according to the amount of displacement ΔY of the interfering element 451 along the Y direction, and thus indicate the amount of displacement ΔY. The displacement ΔY determines the associated amount of "overlap" between the interfering element 451 and the respective rotating sensing coils TRSC1 and BRSC1, and thereby determines the amount of coupling between each rotating sensing coil and the changing magnetic field generated by the field generating coil 461 (this coupling amount determines the composite signal component). Other rotating sensing coils (e.g., top rotating sensing coils TRSC3 and TRSC4 and bottom rotating sensing coils BRSC3 and BRSC4) provide similar signal components indicating the position of the interfering element 451 along the X-axis. Rotating sensing coils TRSC3, TRSC4, BRSC3, and BRSC4 will be relative to Figure 3 The view is visible in a view rotated 90° around the central axis CA (e.g., and in the rotated view, it will be positioned relative to the view with respect to the axis CA). Figure 3 The positions shown in the current diagram are similar to those of the rotating sensing coils TRSC1, TRSC2, BRSC1, and BRSC2.

[0048] The axial sensing coil configuration ASCC includes the top axial sensing coil configuration TASCC and the bottom axial sensing coil configuration BASCC. Figure 3 In the specific implementation shown, the top axial sensing coil configuration (TASCC) includes a single top axial sensing coil at least partially surrounding the central axis CA, and the bottom axial sensing coil configuration (BASCC) includes a single bottom axial sensing coil at least partially surrounding the central axis CA, as illustrated. In this particular exemplary embodiment, these axial sensing coils always completely "overlap" with the interfering element 451. Therefore, the signal components of the axial sensing coils nominally respond only to the position of the interfering element 451 along the axial or Z-direction and indicate the position of the interfering element 451 along the Z-direction.

[0049] Compared with previous references Figure 2 The operation is similar to that described above. In operation, the moving interfering element 451 causes a position-related local change in the axially varying magnetic field generated by the field generating coil 461. The receiver coil section 470 responds to the varying magnetic field and the change in the varying magnetic field caused by the interfering element 451, and outputs a rotational signal component RSig and an axial signal component ASig. These rotational and axial signal components can be processed to determine the rotational position (e.g., Y and X positions, and corresponding signals) and axial position (e.g., Z position) of the interfering element 451, as previously discussed. Figure 2 This is an overview and will be described in further detail below. It should be understood that the position of the interfering element 451 is related by the known geometry to the position of the stylus coupling portion 442 and / or the probe tip 448 of the stylus, such that a signal / position indicating one of these positions also indicates the other. For example, for a small rotation angle, for the movement or displacement ΔY of the interfering element 451 along the Y direction away from null (e.g., from the undeflected position UNDF):

[0050] ΔY=Hθ Y (Equation 1)

[0051] Where H is the distance from the rotation center RC to the nominal plane of the interferator element 451, and θ Y The rotational motion of the rotating member 436 (and the moving member 412) in a plane parallel to the Y direction is tilted (that is, rotation about an axis parallel to the X-axis at the rotation center RC). If a larger rotation angle is used in the various embodiments, a similar expression that is accurate for the larger rotation angle can be used, as is known in the art. The probe tip 448 of the stylus 406 moves or displaces Y in the Y direction away from the empty (e.g., corresponding to the undeflected position UNDF). 触针 The tilt component θ relative to the rotational motionY It can be approximated as:

[0052] ΔY 触针 =θ Y *(h S +l S (Equation 2)

[0053] Where h S It is the distance from the end of the stylus coupling portion 442 to the rotation center RC, and l S This is the length of the stylus 406. Combining equations 1 and 2, the ratio of the displacement ΔY of the interferator element 451 to the Y-direction displacement at the probe tip 448 can be approximated as:

[0054] ΔY / ΔY 触针 =H / (h) S +l S (Equation 3)

[0055] It should be understood that the X-coordinate motion component is similar to the expression above, and will not be explained further in this paper. The stylus length l of each stylus... S The XY position of the probe tip 448 can be determined in equations (e.g., trigonometry of the system) based on the signal from the rotating sensing coil RSC (i.e., as indicating the XY position of the interferator element 451). Regarding the Z-coordinate displacement or position component, the displacement ΔZ (not shown) of the interferator element 451 along the axial or Z-direction away from the empty (e.g., corresponding to the undeflected position UNDF) relative to the Z-direction displacement ΔZ at the stylus contact portion (e.g., probe tip 448). 触针 It can be approximated as:

[0056] ΔZ / ΔZ 触针 ≈1 (Equation 4)

[0057] Figures 4A-4C This is a diagram illustrating a specific implementation of the assembled scanning probe 400. Figure 4A This shows a stylus suspension module 407' with stylus suspension portion 407P' (e.g., which may be used as a stylus suspension module 407'). Figure 3 A partial schematic diagram of the cross-section of the stylus suspension module 407 shown in the figure. Figure 4A The diagram also shows a stylus position detection module 511 of the stylus position detection section 511P (e.g., similar to...). Figure 3 The stylus position detection module 411 shown and the signal processing and control circuit module 480 of the signal processing and control circuit section 480P are also shown. The aforementioned components may be at least partially included within the probe cover 403 and the body frame 408 of the probe body 402 of the scanning probe 400. In various embodiments, the probe cover 403 may be cylindrical (e.g., as shown in the figure). Figure 4CAs shown in the figure, and is configured to surround the stylus suspension module 407' and the stylus position detection module 511 (e.g., radially around in a direction perpendicular to the central axis CA) when the scanning probe 400 is assembled.

[0058] The sensor configuration SNC substrates 571T and 571B of the stylus position detection module 511, as well as the field generating coil 561 or the substrate of the field generating coil (e.g., a printed circuit board), can be positioned for proper operation within the scanning probe 400 using the alignment and mounting portion 417 or other known techniques. Various signal connections associated with the stylus position detection module 511 can be provided according to known techniques via electrical connectors 419 (e.g., 419B and 419T; flexible printed and / or wire connections), etc. In some specific embodiments, some or all of the circuitry of the signal processing and control circuitry portion 480P can be provided as follows: Figure 4A The individual circuit components shown herein (i.e., included in the signal processing and control circuit module 480). In other embodiments, some circuitry of the signal processing and control circuit section 480P may be integrated onto the substrate of the stylus position detection module 511 if desired.

[0059] like Figure 4A As shown, the stylus suspension module 407' includes a stylus motion mechanism 409 and a stylus coupling portion 442 coupled to the stylus 406. The stylus motion mechanism 409 may include a moving member 412, a rotating member 436, a flexure element 440 (e.g., a frame coupled to the stylus suspension module 407', which is coupled to the main frame 408 to support the rotating member 436 and enable the rotating member to rotate), and flexure elements 414 and 415 (i.e., referred to as the first flexure element) that support the moving member 412 and couple it to the rotating member 436 to enable the moving member 412 to move axially. The scanning probe 400 includes a stylus position detection module 511 having components and operations for determining the position and / or movement of the probe tip 448 of the stylus motion mechanism 409 and / or the stylus 406.

[0060] A flexural element 440 (i.e., referred to as the second flexural element) may be disposed in the axial direction O between corresponding planes of a pair of flexural elements 414 and 415 (i.e., referred to as the first flexural elements). The flexural design suitable for flexural elements 414, 415, and 440 may be determined according to principles known in the art. For example, a possible embodiment is described in U.S. Patent No. 9,791,262, which is hereby incorporated herein by reference in its entirety. The rotating member 436 may have a shape symmetrical with respect to the second flexural element 440 and may integrally include: two ring portions 436A; two connecting portions 436B; and a cylindrical portion 436C. The peripheral portions of the first flexural elements 414 and 415 are fixed to the ring portions 436A. The connecting portions 436B extend inside the ring portions 436A to connect to the cylindrical portion 436C having a hollow center. The first flexural elements 414 and 415 may be arranged at a symmetrical distance relative to the second flexural element 440, but it should be understood that such specific implementation is merely exemplary and not limiting.

[0061] An axial motion mechanism 410, including a moving member 412, is supported inside a rotating member 436, and the rotating member 436 and the axial motion mechanism 410 together constitute a motion module as part of a stylus motion mechanism 409. The axial motion mechanism 410 allows the probe tip 448 to move in the axial direction O. A rotating motion mechanism 434, including the rotating member 436, allows the probe tip 448 of the stylus 406 to move laterally (e.g., substantially perpendicularly) to the axial direction O by rotational motion about a rotation center RC.

[0062] The movable member 412 integrally includes: a lower portion 412A; a rod portion 412B; and an upper portion 412C. (See previous reference...) Figure 3 In summary, the disruptor element 551 attached to the upper portion 412C of the moving member 412 serves as both a rotational position indicator and an axial position indicator. A rod portion 412B is disposed between a pair of first flexural elements 414 and 415. The rod portion 412B is housed within a rotating member 436. A lower portion 412A is formed below the rod portion 412B, and a stylus coupling portion 442 (e.g., a flange member) is attached to the lower portion 412A. A flange member 444 is provided for attaching the stylus 406. The flange member 444 and the stylus coupling portion 442 together can constitute a detachable coupling mechanism (e.g., a known type of motion joint or coupler) that allows for various attachments and detachments between the stylus 406 and the stylus coupling portion 442 in cases of repositioning (e.g., in the event of a collision knocking the stylus off, or when the stylus is intentionally altered, etc.).

[0063] Scanning probe 400 includes an automatic connector connection portion 401 (e.g., an attachment portion for attaching to a CMM, such as...). Figure 1 The CMM 200 drive mechanism attachment portion 224). In various embodiments, based on known principles, the automatic connector connection portion 401 may include precise motion mount features and electrical connections providing a physical interface common to various interchangeable CMM probes or sensors. Exemplary known techniques and mechanisms for automatically exchanging CMM probes to and from the automatic connector and for automatically exchanging CMM probes from the automatic connector are described in U.S. Patent No. 4,651,405, which is hereby incorporated herein by reference in its entirety. In various embodiments, the automatic connector connection portion 401 may include an automatic connector connection element ACON (e.g., an electrical connection element, etc.) that can be connected to or passed through components in the automatic connector component portion 401C.

[0064] Figure 4B This diagram shows a portion of the scanning probe 400 including the stylus position detection module 511. Certain electrical connectors 419 are shown. Figure 4B Not shown in the image, so as to more clearly illustrate certain spatial relationships relative to probe cover 403. At least partially as Figure 4B As shown, the probe cover 403 does not contact the stylus position detection module 511 at any point (e.g., any component including the rigid portion of the stylus position detection module 511), and it should be understood that a corresponding distance exists between the probe cover 403 and the stylus position detection module 511 at all points surrounding the stylus position detection module 511. In various embodiments, the amount of distance between the probe cover 403 and the stylus position detection module 511 (e.g., between the inner surface of the probe cover 403 and the outer surface of the stylus position detection module 511, such as the outer surface of a shielded configuration SHC) may vary at different points surrounding the stylus position detection module 511. Minimum distance SPS (e.g., as...) Figure 4B The distance (shown in the diagram) can be specified as the closest distance between the probe cover 403 and the stylus position detection module 511, wherein the distance from the probe cover 403 at all other points surrounding the stylus position detection module 511 can be equal to or greater than the minimum distance SPS. For example, in some embodiments, the minimum distance SPS can fall within the range of 0.2 mm to 2.0 mm (e.g., such as a value of approximately 0.8 mm).

[0065] According to various implementation schemes, the shielded configuration SHC allows the sensor configuration SNC to be electromagnetically and mechanically isolated from the influence within the scanning probe 400. Depending on the specific application, the shielded configuration SHC can be a single component or multiple components.

[0066] Similarly, the probe cover 403 also does not contact the signal processing and control circuit module 480 at any point (e.g., any rigid component of the signal processing and control circuit module 480) (e.g., such as...). Figure 4A (as best shown in the diagram), and it should be understood that there are corresponding spacings between the probe cover 403 and the signal processing and control circuit module 480 at all points surrounding the signal processing and control circuit module 480. In various embodiments, the amount of spacing between the probe cover 403 and the signal processing and control circuit module 480 (e.g., between the inner surface of the probe cover 403 and the outer surface of the signal processing and control circuit module 480) may vary at different points surrounding the signal processing and control circuit module 480. Minimum spacing SPA (e.g., as shown in the diagram) Figure 4A The location shown in the diagram can be specified as the closest distance between the probe cover 403 and the signal processing and control circuit module 480, wherein the distance between the probe cover 403 and all other points around the signal processing and control circuit module 480 can be equal to or greater than the minimum distance SPA.

[0067] In various specific implementations, the shielding configuration SHC includes horizontal slots SL (e.g., SLB and SLT; perpendicular to the central axis CA orientation) to allow the electrical connector 419 to pass through. The following will discuss... Figures 8A-8D In more detail, in various specific implementations, it may be expected that any slot is horizontal (i.e., not vertical, etc.). For example... Figure 4B As indicated, the shielding configuration SHC includes: a top horizontal slot SLT configured to receive a top electrical connector 419T from the signal processing and control circuit module 480 for connection to a coil (e.g., a coil on the top coil substrate 571T). Figure 4A (as indicated in the diagram); and a bottom horizontal slot SLB configured to receive a bottom electrical connector 419B from the signal processing and control circuit module 480 for connection to a coil (as indicated in the diagram) on the bottom coil substrate 571B. Figure 4A (As indicated in the text). Figure 4A As indicated, portions of electrical connectors 419T and 419B are provided and pass through the gap between the stylus position detection module 511 and the probe cover 403.

[0068] like Figure 4A and Figure 4B As indicated, the stylus position detection module 511 can be mounted to the stylus suspension module 407' via a module mounting configuration MMC, and the signal processing and control circuit module 480 can be coupled to the stylus position detection module 511 via a module coupling configuration MCC. As will be explained below (e.g., regarding...) Figure 8D , Figure 9 and Figure 10In more detail, as part of the Module Mounting Configuration (MMC), the stylus position detection module 511 may include a first mounting portion FMP, and the stylus suspension module 407' may include a second mounting portion SMP. The first mounting portion FMP may include a lower extension LEP configured to be at least partially positioned below and in contact with the upper extension UEP of the second mounting portion SMP as part of the mounting process.

[0069] In various embodiments, as part of the Module Coupling Configuration (MCC), the stylus position detection module 511 includes a first coupling portion FCP (e.g., included on the module cover portion MLD of the stylus position detection module 511), and the signal processing and control circuit module 480 includes a second coupling portion SCP. As part of the coupling process, the second coupling portion SCP is configured to couple to the first coupling portion FCP for coupling the signal processing and control circuit module 480 to the stylus position detection module 511. In various embodiments, the first coupling portion FCP includes a receiving portion CGR (e.g., a circular recess, see...). Figure 8C The receiving portion CGR is configured to receive the retaining component SCC (e.g., a positioning screw) of the second coupling portion SCP. More specifically, as part of the coupling process, the retaining component SCC (e.g., a positioning screw) is rotated in a threaded hole in the second coupling portion SCP to extend into the receiving portion CGR of the first coupling portion FCP for securing the second coupling portion SCP to the first coupling portion FCP, and thus rigidly coupling the signal processing and control circuit module 480 to the stylus position detection module 511.

[0070] The following text will be about Figure 11 In more detail, the interfering component 554 of the scanning probe includes an interfering configuration 550 (including an interfering element 551), a recessed element 596, an adjustment component 597 (e.g., a positioning screw), and a spindle 598. In various embodiments, as part of the interfering coupling configuration 553, the upper portion 412C of the moving member 412 of the stylus suspension module 407' may include or have a designated upper coupling portion 412CP (e.g., as part of or rigidly attached to the upper portion 412C), to which the spindle 598 is rigidly coupled. Regarding the interfering component 554, as... Figure 4BAs shown, top hole 591T and bottom hole 591B are included in substrates 571T and 571B, and intermediate hole 591M is included in the substrate for the field generation coil configuration 560. As will be described in more detail below, during the assembly process, top hole 591T in substrate 571T provides a pathway to interferator configuration 550 (e.g., for adjusting the position of interferator element 551). Intermediate hole 591M and bottom hole 591B provide space, respectively, for interferator element 561 and spindle 598 to move during operation of scanning probe 400 (e.g., rotational movement relative to probe tip 448, etc.).

[0071] Figure 4C This is a 3D view of the scanning probe 400. (Example) Figure 4C As indicated, a stylus 406 with a probe tip 448 is attached to the bottom of the scanning probe 400 (e.g., to a stylus suspension module 407', which may be included within the main frame 408, such as...). Figure 4A (As indicated in the diagram). A probe cover 403 is disposed on the upper portion of the scanning probe 400 (e.g., surrounding the signal processing and control circuit module 480 and the stylus position detection module 511, such as...). Figure 4A (As indicated in the diagram). The automatic connector connection portion 401 is shown at the top (i.e., the proximal end) of the scanning probe 400 (e.g., an attachment portion for attaching to the CMM, such as...). Figure 1 The drive mechanism attachment portion 224 of the CMM 200. In various specific implementations, this includes the automatic connector connecting element ACON (see...). Figure 4A The automatic connector connection portion 401 can be configured to connect to the CMM in only one manner (e.g., with a single specified angular orientation relative to rotation about the central axis CA).

[0072] In various specific implementations, it may be generally desirable for the scanning probe module to be substantially aligned with respect to the drive mechanism attachment portion 224 at a preferred angular orientation (i.e., with respect to rotation about a central axis). This could be achieved by aligning the scanning probe's rotational (e.g., X, Y) position signals with the X and Y position signals of the X-axis movement mechanism 222 and the Y-axis movement mechanism 221, and / or with respect to a system that automatically replaces hardware in a specific orientation as part of an automated process. To achieve this alignment, it is generally desirable for the scanning probe module to have a preferred angular alignment with respect to the automatic connector connection portion and the corresponding drive mechanism attachment portion 224. This could be achieved by connecting the automatic connector connection portion 401 to the drive mechanism attachment portion 224 in only one manner, with a set angular orientation between the two portions. Therefore, it may be desirable to assemble the scanning probe 400 including the angular orientation of the modules to have such a preferred angular orientation and corresponding alignment.

[0073] For example, regarding Figures 4A-4C As part of the scanning probe assembly process, the automatic connector connection portion 401 may be one of the final installation components and may be angled relative to the stylus suspension module 407' and other modules of the scanning probe (e.g., by rotational adjustment about a central axis) to be in a preferred angular orientation. This process can also be described as "clockwise" fixing the automatic connector connection portion 401 to one or more modules (e.g., stylus suspension module 407'). In various embodiments, a circular attachment portion 401AT may be used to attach the automatic connector connection portion 401 to the remainder of the scanning probe (e.g., using adhesive to attach it to the top portion of the probe cap 403). The circular attachment portion 401AT may have a top portion rigidly attached to the automatic connector connection portion 401 and a bottom portion (e.g., using adhesive) attached to the remainder of the scanning probe (e.g., attached to the top portion of the probe cap 403). In one embodiment, the bottom portion of the circular attachment portion 401AT may be rotatable within the top portion of the probe cap 403 before the adhesive hardens. This configuration allows the automatic connector connection portion 401 to be "clockwise fixed" or otherwise angled relative to the stylus suspension module 407' and / or other modules to achieve a desired angular orientation and corresponding alignment, after which the adhesive is allowed to solidify to maintain the orientation.

[0074] During operation, the scanning probe 400 can be used to measure the surface of the workpiece W (see, for example, see...). Figure 1In various embodiments, at least some signal errors (e.g., signals indicating the axial and rotational positions of the sensing coil of the sensor configuration SNC, the interferometer element 551, the stylus coupling portion 442, the stylus 406, and / or the probe tip 448) may occur due to crosstalk or other interference between components (e.g., between one or more components of the first module and one or more components of the second module and / or between other influences external to the probe). For example, in some embodiments, crosstalk may refer to a situation where a signal or field generated or generated therein by one circuit, channel, or component of the system produces undesirable effects in another circuit, channel, or component of the system (e.g., due to undesirable electromagnetic coupling or otherwise). Furthermore, certain external components or systems (e.g., workpieces and / or other components or systems in the workplace environment, etc.) may be sources of undesirable effects. For example, with respect to certain configurations of the scanning probe, such as those described herein, crosstalk could otherwise occur between components of the sensor configuration SNC (e.g., field generation coil configuration, sensing coil configuration, and / or interference configuration) of the stylus position detection module 511, or between any of these components and components of other modules (e.g., signal processing and control circuitry module 480 and / or stylus suspension module 407') and / or other influences external to the probe (e.g., workpieces and / or other components or systems in the workplace environment). According to the principles disclosed herein, the shielding configuration SHC reduces crosstalk or other interference that would otherwise be caused by components and / or operation (e.g., and / or other external influences) of at least one of the signal processing and control circuitry module 480 or stylus suspension module 407' and would otherwise affect the signal of the sensing coil of the sensor configuration SNC in the absence of the shielding configuration SHC around the sensor configuration (e.g., where such influences could otherwise result in errors in the three-dimensional position information determined based on signals generated by the sensing coil of the sensor configuration SNC of the scanning probe 400). Regarding this concept, the operating principles of the signals generated by the sensing coil of the scanning probe will be discussed below. Figure 5 and Figure 6 To describe in more detail.

[0075] Figure 5 It is similar to Figure 4A The diagram shows a partial schematic isometric view of a specific implementation of the stylus position detection module 511P' of the stylus position detection section 511P, emphasizing certain aspects. The stylus position detection modules 511' and 511 are similar, differing only in the field generation coil configuration 560, as explained further below. Generally, the stylus position detection module 511' includes... Figure 2 , Figure 3Some components are similar to those in the stylus position detection modules 311, 411 and 511 of Figure 4, and will be understood to operate similarly unless otherwise described below.

[0076] exist Figure 5 In the specific implementation shown, the stylus position detection module 511' includes a receiver coil portion 570, an interfering configuration 550' including an interfering element 551', and a field generation coil configuration 560. In various implementations, the interfering element 551' (or more generally, the interfering configuration 550) may include a conductive plate or conductive loop, or parallel conductive plates or conductive loops (e.g., patterned using printed circuit board manufacturing techniques, as fabricated on both sides of a printed circuit board substrate), or any other desired operational configuration providing an interfering region (e.g., the internal region of the interfering element). Figure 5 and Figure 6 In the example, the interfering element 551' is typically represented as a conductive plate with a square shape. In other specific implementations (e.g., in...), Figure 4A and Figure 4B In the example, the interfering element (e.g., interfering element 551) can be a conductive element with a different shape (e.g., it can have a circular shape), wherein the configuration and size of the conductive element are as follows: Figure 4A , Figure 4B and Figure 11 As indicated herein. Generally, it should be understood that interfering elements of different shapes can be used in accordance with the principles disclosed herein.

[0077] about Figure 5 For example, the interfering element 551' is positioned along the central axis CA in the interfering motion volume MV between the top coil substrate 571T and the bottom coil substrate 571B, and is coupled to the stylus suspension module 507 via an interfering coupling configuration 553 (e.g., including a moving member 512) to the stylus suspension portion 507P. For illustrative purposes, the interfering element 551' can be described as responding to the deflection of the stylus suspension module 507 and / or the stylus 506 and / or the moving member 512 relative to... Figure 5 The undeflected position shown (see Figure 3 The undeflected position (UNDF) moves within the operating range of + / -Rz in response to axial motion. The disruptor element can be described as moving in the axial direction with displacement increments ΔZ within the operating range of + / -Rx and + / -Ry in response to rotational motion along orthogonal X and Y directions orthogonal to the axial direction (Z direction). The specified or anticipated operating ranges are described in more detail below.

[0078] The receiver coil portion 570 may include a planar top coil substrate 571T comprising N top rotation sensing coils TRSC (e.g., TRSC1-TRSC4, where N=4) and a top axial sensing coil configuration TASCC (e.g., in this embodiment, a single individual coil as shown), and a planar bottom coil substrate 571B comprising N bottom rotation sensing coils BRSC (e.g., BRSC1-BRSC4, where N=4) and a bottom axial sensing coil configuration BASCC (e.g., in this embodiment, a single individual coil as shown). The top coil substrate 571T and the bottom coil substrate 571B are mounted in a fixed relationship, with the bottom coil substrate closer to the stylus 506 and / or the stylus suspension module 507. The top coil substrate 571T and the bottom coil substrate 571B may be nominally parallel to each other and nominally orthogonal to the central axis CA, and spaced apart along the central axis CA by an interferator movement volume MV positioned between the top coil substrate and the bottom coil substrate. It should be understood that, although for simplicity of illustration, Figure 5 The individual sensing coils shown are represented by a “closed loop,” but all coils include a first connection end and a second connection end configured to operate as one or more inductively coupled “turns” (e.g., as shown in the diagram). Figure 6 The winding or conductor (as indicated in the text).

[0079] Typically, a field generating coil configuration (e.g., field generating coil configuration 560) includes at least a first field generating coil located near the moving volume MV of the interfering device and nominally planar and orthogonal to the central axis CA. Figure 3 Compared to the single planar field generating coil 461 in the illustrated embodiment (which is approximately positioned at the midplane of the interferator's moving volume MV), in Figure 5In the illustrated embodiment, the field generating coil configuration 560 includes a pair of planar field generating coils 561T and 561B (positioned on the top coil substrate 571T and bottom coil substrate 571B, respectively) that are substantially equidistant from the midplane of the interferator motion volume MV along the central axis CA and are nominally planar and orthogonal to the central axis CA. Generally, either the field generating coil configuration 460 or 560 can be used with the receiver coil portion 570. In some specific embodiments, it may be desirable for the field generating coil configuration to include at least a first field generating coil, which is configured such that the projection of the coil region of the first field generating coil in the axial direction (Z direction) covers the interferator region of the interferator configuration 550 (e.g., the interferator element 551') and the coil regions of all the rotation sensing coils RSCi and axial sensing coils ASCC positioned on the top coil substrate 571T and bottom coil substrate 571B. Generally, the field generating coil configuration is set to generate a generally axially varying magnetic flux within the interferometer's moving volume MV in response to a coil drive signal, as desired by the operation of the stylus position detection module 511'. It should be understood that, although for the sake of simplicity, Figure 5 The individual field-generating coils shown are represented by a single “closed loop” comprising a wide, flat conductive trace (showing the edges of these field-generating coils), but in an actual device, all coils include a first connection end and a second connection end (e.g., as shown in the diagram). Figure 6 (as indicated in the text) and configured as a winding or conductor that generates "turns" of one or more fields.

[0080] like Figure 5 As shown, the interferator element 551' extends axially through the projection of the inner coil region of the top axial sensing coil configuration TASCC (e.g., as shown in the diagram). Figure 5 The top axial sensing overlap region TASOA (indicated by the dot pattern filling this inner coil region) is defined by the thin dashed line PRJ, and the bottom axial sensing overlap region BASOA (indicated by the dot pattern filling this inner coil region) is defined by the projection of the interfering element 551' through the inner coil region of the bottom axial sensing coil configuration BASCC in the axial direction. Similarly, the projection of the interfering element 551' through the inner coil region of any corresponding top rotating sensing coil TRSCi (e.g., TRSC1-TRSC4) in the axial direction defines the area as shown in the image. Figure 5The dot pattern filling the respective overlapping regions shown in the diagram indicates the corresponding top rotating coil sensing overlapping regions TRSCOAi (e.g., TRSCOA1-TRSCOA4), where i is a single coil identifier index ranging from 1 to N. The projection of the interfering element 551' along the axial direction through the inner coil region of any corresponding bottom rotating sensing coil BRSCi (e.g., BRSC1-BRSC4) defines, as shown in the diagram. Figure 5 The dot pattern filling the respective overlapping areas shown in the figure indicates the corresponding bottom rotating coil sensing overlapping areas BRSCOAi (e.g., TRSCOA1-TRSCOA4).

[0081] Regarding axial position detection in the stylus position detection module (e.g., 511'), the receiver coil portion (e.g., 570) and the interfering element (e.g., 551') are typically configured to provide a top axial sensing overlap region TASOA and a bottom axial sensing overlap region BASOA, wherein the amount of each of the overlap regions TASOA and BASOA is constant or independent of the position of the interfering element 551' within the operating motion range + / -Rz, + / -Rx, and + / -Ry. It should be understood that, for a particular scanning probe, the operating motion range may be specified or designated in conjunction with the configuration of the probe's specific stylus position detection module, if desired, to meet this requirement. In this way, the signal components generated in the top axial sensing coil configuration TASCC and the bottom axial sensing coil configuration BASCC are nominally independent of rotational motion (i.e., the position of the interfering element 551' along the X and Y directions), and are nominally sensitive only to changes in the "nearby" or gap of the interfering element 551', which varies according to the axial (Z) position or displacement ΔZ of the interfering element 551'. In operation, the current induced in the interfering element 551' by the changing magnetic field of the field generating configuration 560 causes an opposing magnetic field. Generally, the signal components generated in the interfering element 551' along the X and Y directions are independent of rotational motion (i.e., the position of the interfering element 551' along the X and Y directions. Figure 5 When the coil moves upward in the axial (Z) direction, the opposite magnetic field is more firmly coupled to the top axial sensing coil configuration TASCC, thereby reducing the signal component of the opposite magnetic field caused by the changing magnetic field. Conversely, the opposite magnetic field is weakly coupled to the bottom axial sensing coil configuration BASCC, thereby increasing the signal component of the opposite magnetic field caused by the changing magnetic field. According to the conventions used in this disclosure, the signal component SIGTASCC may be referred to as the signal component originating from a particular top axial sensing coil configuration (or coil) TASCC, etc.

[0082] It should be understood that at the undeflected position UNDF, the net signal components SIGTASCC and SIGBASCC can be approximately balanced. For small displacements ΔZ, such as those expected during operation, the net signal components SIGTASCC and SIGBASCC can vary approximately linearly and inversely proportional to each other. In one embodiment, the axial displacement or position ΔZ can be indicated by or correspond to the following signal relationship:

[0083] The function ΔZ = [(SIGBASCC - SIGTASCC) / (SIGBASCC + SIGTASCC)]

[0084] (Equation 5)

[0085] This signal relationship is exemplary and not limiting. In various embodiments, this signal relationship can be adjusted or compensated for by additional calibration or signal processing operations, such as operations to reduce the effects of geometric and / or signal cross-coupling between the various displacement directions or signal components, if desired. In various embodiments, the top axial sensing coil configuration may include at least one top axial sensing coil that is not one of the N top rotation sensing coils and is arranged closer to the central axis than the top rotation sensing coils, and the at least one top axial sensing coil and the interfering element are characterized in that: the at least one top axial sensing coil has an internal coil region smaller than that of the interfering element, and for any position of the interfering element within the operating range of movement + / -Rz, + / -Rx, and + / -Ry, the projection of the interfering element in the axial direction completely fills the internal coil region of the at least one top axial sensing coil, thereby the top axial sensing overlap area TASOA does not change due to the position of the interfering element. Similarly, in various such embodiments, the bottom axial sensing coil configuration may include at least one bottom axial sensing coil that is not one of N bottom rotation sensing coils and is arranged closer to the central axis than the bottom rotation sensing coils. The at least one bottom axial sensing coil and the interfering element are characterized in that: the at least one bottom axial sensing coil has an inner coil region smaller than that of the interfering element, and for any position of the interfering element within the operating range of + / -Rz, + / -Rx, and + / -Ry, the projection of the interfering element along the axial direction completely fills the inner coil region of the at least one bottom axial sensing coil, thereby ensuring that the bottom axial sensing overlap area (TASOA) does not change due to the position of the interfering element. It can be seen that... Figure 5The specific implementation of the stylus position detection module 511' shown conforms to this specification, wherein the top axial sensing coil configuration (TASCC) and the bottom axial sensing coil configuration (BASCC) each include a single sensing coil. It should be understood that various configurations of the top axial sensing coil configuration (TASCC) and the bottom axial sensing coil configuration (BASCC) can be used, and Figure 5 The specific configurations shown are merely illustrative and not restrictive.

[0086] Regarding rotational position detection in the stylus position detection module (e.g., 511'), the receiver coil portion (e.g., 570) and the interfering element (e.g., 551') are typically configured to provide N complementary pairs of rotational sensing coils CPi (e.g., CP1-CP4, where N=4), each comprising a top rotational sensing coil TRSCI and a bottom rotational sensing coil BRSCI, wherein for any complementary pair CPi, and for any interfering element displacement increment within the operating motion range + / -Rz, + / -Rx, and + / -Ry, the magnitudes of the changes in the overlapping regions TRSCOAi and BRSCOAi associated with that interfering displacement increment are nominally identical within that complementary pair. It should be understood that, for a particular scanning probe, the operating motion range may be specified or designated in conjunction with the configuration of the specific stylus position detection module for that particular scanning probe, if desired, to satisfy this requirement. Figure 5 The CPTable indicator in the table is used for Figure 5 The corresponding complementary pair of CPi shown in the embodiments are the corresponding members TRSCi and BRSCi.

[0087] By conforming to the above principles, it can be used Figure 5 The complementary pair CPi shown is used to compensate for or eliminate certain cross-coupling errors and / or to simplify the signal processing required to provide accurate rotational position or displacement measurements (e.g., along the X and / or Y directions). Specifically, in Figure 5 The signal component pairs appearing in the complementary pair of rotating sensing coils CPi in the specific embodiment shown can provide a relational combination or processing of a synthetic output signal that is nominally insensitive to changes in the gap between the individual coils of the "nearby" or complementary pair and the interfering element 551'. That is, the synthetic output signal may be insensitive to the axial (Z) position or displacement ΔZ of the interfering element 551' and nominally sensitive only to rotational position or displacement (e.g., along the X and / or Y directions), as described in more detail below. For Figure 5As illustrated in the specific implementation, it should be understood that the displacement of the interfering element 551' having a displacement component ΔY along the Y-axis will increase (decrease) the overlapping regions TRSCOA2 and BRSCOA2 in complementary pair CP2 and decrease (increase) the overlapping regions TRSCOA1 and BRSCOA1 in complementary pair CP1. Similarly, the displacement of the interfering element 551' having a displacement component ΔX along the X-axis will increase (or decrease) the overlapping regions TRSCOA3 and BRSCOA3 in complementary pair CP3 and decrease (or increase) the overlapping regions TRSCOA4 and BRSCOA4 in complementary pair CP4.

[0088] As previously outlined, in operation, the current induced in the interfering element 551' by the changing magnetic field generated by the field generating configuration 560 produces an opposing magnetic field. Generally, the signal component SIGTRSCi (or SIGBRSCi) generated in any rotating sensing coil TRSCi (or BRSCi) will decrease as the proximal portion of the interfering element 551' moves closer to the rotating sensing coil in the axial direction or as the overlap between the interfering element and the rotating sensing coil increases TRSCOAi (or BRSCOAi).

[0089] It should be understood that, for Figure 5 The complementary pairs CP1-CP4 indicated in the diagram (where the coils in the complementary pair CPi can be identical and aligned axially) have signal components (e.g., SIGTRSC1 and SIGBRSC1) in each complementary pair that are approximately balanced at the undeflected position UNDF shown. According to the previously outlined principles, for a portion of the interfering element 551' near the complementary pair (e.g., CP1), for small displacements ΔZ, such as those expected in operation, the net signal components (e.g., SIGTRSC1 and SIGBRSC1) can vary approximately linearly and inversely proportionally to each other. Therefore, the sum of such signals of the complementary pair CPi can nominally be insensitive to ΔZ associated with the proximal portion of the interfering element 551'. Furthermore, in Figure 5 In the specific implementation shown, the edge of the interferator element 551' may be parallel to the X and Y directions, such that within the operating motion ranges + / -Rx and + / -Ry, the Y-direction displacement component does not change the rotating coil sensing overlap areas TRSCOA3, BRSCOA3 and / or TRSCOA4 and BRSCOA4, and the X-direction displacement component does not change the rotating coil sensing overlap areas TRSCOA2, BRSCOA2 and / or TRSCOA1 and BRSCOA1. Therefore, in one specific implementation, ideally, regardless of ΔZ and / or ΔY, the rotational displacement or position component ΔX along the X direction can be indicated or correspond to the following signal relationship:

[0090] ΔX=[(SIGTRSC3+SIGBRSC3)-(SIGTRSC4+SIGBRSC4)]÷

[0091] The function [(SIGTRSC3+SIGBRSC3)+(SIGTRSC4+SIGBRSC4)]

[0092] (Equation 6)

[0093] Similarly, in one implementation, ideally, regardless of ΔZ and / or ΔX, the rotational displacement or position component ΔY along the Y direction can be indicated or correspond to the following signal relationship:

[0094] ΔY=[(SIGTRSC2+SIGBRSC2)-(SIGTRSC1+SIGBRSC1)]÷

[0095] The function [(SIGTRSC2+SIGBRSC2)+(SIGTRSC1+SIGBRSC1)]

[0096] (Equation 7)

[0097] These signal relationships are exemplary and not limiting. In various specific implementations, these signal relationships may be adjusted or compensated for by additional calibration or signal processing operations, such as operations that reduce the effects of geometric and / or signal cross-coupling between the various displacement directions or signal components, if desired.

[0098] In some particularly advantageous embodiments, the receiver coil portion (e.g., 570) and the jammer element (e.g., 551') are configured such that, for any complementary pair CPi and any jammer element displacement increment within the operating range of motion + / -Rz, + / -Rx, and + / -Ry, the magnitude and sign of the changes in the overlapping regions TRSCOAi and BRSCOAi associated with that jammer displacement increment are both identical in that complementary pair. In some such embodiments, the receiver coil portion is configured such that each complementary pair CPi includes a top rotation sensing coil TRSCI and a bottom rotation sensing coil BRSCi, characterized in that the shapes of the internal areas of the top and bottom rotation sensing coils are nominally identical when projected along the axial direction. It can be seen that... Figure 5 The specific implementation of the stylus position detection module 511' shown conforms to this specification. However, it should be understood that various configurations of complementary pairs can be used, and Figure 5 The specific configurations shown are merely illustrative and not restrictive.

[0099] In some specific embodiments, the receiver coil portion (e.g., 570) and the jammer element (e.g., 551') can be configured such that the jammer element includes at least N straight edges, and for any corresponding complementary pair CPi, the corresponding straight edge of the jammer element transverses both the top rotary sensing coil TRSCi and the bottom rotary sensing coil BRSCi of that corresponding complementary pair. In some such embodiments, N = 4, and the at least N straight edges comprise 4 sides arranged parallel to the sides of a rectangular or square shape. It can be seen that... Figure 5 The specific implementation of the stylus position detection module 511' shown conforms to this specification. However, it should be understood that various combinations of complementary pair configurations and interfering element edge configurations can be used, and Figure 5 The specific configuration combinations shown are merely exemplary and not limiting. Specifically, in other specific implementations, the jammer may have a circular or other shape (e.g., as may correspond to...). Figures 4A-4C (Specific implementation, etc.)

[0100] Figure 6 yes Figure 5 The diagram shows a partial schematic isometric view of certain components of the stylus position detection module 511', including a schematic representation of the connection CONN to a block diagram of an exemplary embodiment of the signal processing and control circuitry module 680 of the signal processing and control circuitry section 680P. (See diagram for reference.) Figure 6 As shown, the signal processing and control circuit module 680 is operatively connected to the respective coils of the stylus position detection module 511'. Figure 6 In the specific implementation shown, the signal processing and control circuit module 680 includes a digital controller / processor 681 capable of managing various timing and signal connection or exchange operations between its interconnected components, including a drive signal generator 682, an amplification / switching section 683, a sample and hold section 684, a multiplexing section 685, and an A / D converter section 686. The digital controller / processor 681 can also perform various digital signal processing operations to determine the output signals APSOut and RPSOut, as previously referenced. Figure 2 Overview. Based on known principles, parts of the design and operation of the signal processing and control circuit module 680 are generally recognized and understood by those skilled in the art. For example, in one particular embodiment, certain elements of the signal processing and control circuit module 680 may be designed and operated by analogy to corresponding elements disclosed in U.S. Patent No. 5,841,274, which is hereby incorporated herein by reference in its entirety.

[0101] In operation, a drive signal generator 682 is operated to provide a varying coil drive signal Dsig (e.g., a pulse) to a field generating coil configuration 560, which, in response to the coil drive signal, generates a generally axially varying magnetic flux in the interferator motion volume MV. In the illustrated configuration, the top field generating coil 561T and the bottom field generating coil 561B are configured to provide varying magnetic flux that amplifies each other. An amplification / switching section 683 is configured to input signals RSIG and ASIG from a receiver coil section 570, which include corresponding signal components (e.g., the previously outlined signal components SIGTASCC, SIGBASCC, SIGTRSC1-SIGTRSC4, and SIGBRSC1-SIGBRSC4) provided by corresponding rotation sensing coils and axial sensing coils positioned on the top and bottom coil substrates. In some embodiments, the amplification / switching section 683 may include a switching circuit that can combine various analog signals to provide various desired and different signals (e.g., through appropriate series or parallel connections, etc.), as specified, for example, in the relationships shown in Equations 5-7, etc. However, in other embodiments, where all signal combination operations are performed in other circuit sections, the amplification / switching section 683 may perform only amplification and signal conditioning operations (e.g., and possibly signal inversion operations).

[0102] The sampling and holding section 684 receives various analog signals from the amplification / switching section 683 and performs sampling and holding operations according to known principles, such as simultaneously sampling and holding all corresponding signal components generated by the respective sensing coils of the receiver coil section 570. In one embodiment, the multiplexing section 685 can sequentially connect the individual signals to the A / D converter section 686, and / or in combinations related to various desired signal relationships (e.g., as specified in the relationships shown in Equations 5-7). The A / D converter section 686 outputs the corresponding digital signal value to the digital controller / processor 681.

[0103] The digital controller / processor 681 can then process and / or combine digital signal values ​​according to various desired relationships (e.g., those specified in equations 5-7) to determine and output output signals APSOut and RPSOut, which indicate the axial and rotational positions of at least one of the interferator element 551' or stylus 506 (e.g., relative to the frame of the scanning probe). In some embodiments, the digital controller / processor 681 may be configured such that the output signals APSOut and RPSOut directly indicate the three-dimensional position of stylus 506 or the probe tip 548 of the stylus (e.g., relative to the frame of the scanning probe). In other specific implementations, the digital controller / processor may be configured to output a signal that indirectly indicates the three-dimensional position of stylus 506 or the probe tip 548 of the stylus (e.g., relative to the frame of the scanning probe), and the main system (e.g., CMM) may input such signals and perform additional processing to further combine or refine such signals and determine the three-dimensional position of stylus 506 or the probe tip 548 of the stylus relative to the scanning probe and / or relative to the global coordinate system used for CMM measurements.

[0104] Figure 7 It shows Figure 4A The diagram illustrates a specific implementation of the signal processing and control circuit module 480. In various embodiments, the signal processing and control circuit module 480 may include... Figure 6 The circuitry is similar to that of the circuitry (e.g., it may be included on or within a circuit board and / or other components). The signal processing and control circuitry module 480 includes a second coupling portion SCP (e.g., as part of a module coupling configuration MCC for coupling to a first coupling portion FCP of the stylus position detection module 511). A retaining component SCC (e.g., a positioning screw) for the second coupling portion SCP is shown. As described above, as part of the coupling process, the retaining component SCC (e.g., the positioning screw) is rotated in a threaded hole in the second coupling portion SCP to extend into a receiving portion CGR of the first coupling portion FCP for securing the second coupling portion SCP to the first coupling portion FCP, and thus rigidly coupling the signal processing and control circuitry module 480 to the stylus position detection module 511.

[0105] Figures 8A-8D It shows Figure 4A A diagram illustrating the specific implementation of the stylus position detection module 511. (See diagram for example.) Figure 8A As indicated, the stylus position detection module 511 includes substrates 571T and 571B, a field generation coil 561 and its substrate (e.g., a printed circuit board), and an alignment and mounting portion 417 of the sensor configuration SNC, such as being surrounded by a shielding configuration SHC. (The above refers to...) Figure 4B A more detailed description Figure 8AVarious other components and aspects of the stylus position detection module 511.

[0106] Figure 8B A specific embodiment of at least a portion of a shielded configuration SHC is shown. In various embodiments, the shielded configuration SHC includes a conductive material (e.g., aluminum or stainless steel). Figure 8C A specific implementation of the assembled stylus position detection module 511 is shown, which displays the shielded configuration SHC as an SNC configuration surrounding the sensor (see [link]). Figure 8A In various specific implementations, the module cover portion MLD may be included as part of the shielding configuration SHC, or it may be a separate element.

[0107] In various specific implementations, the shielded configuration SHC provides a defined stability boundary for the electromagnetic field generated by the sensor configuration SNC (e.g., based on the varying magnetic flux / electromagnetic field generated by the field generating coil configuration 560). Therefore, the use of the shielded configuration SHC reduces the risk of potential signal errors (e.g., corresponding to measurement signal errors) that could otherwise be caused by various factors (e.g., operation and / or components of the stylus suspension module 407' and / or signal processing and control circuitry module 480, or damage to the probe cover 403, etc.). The shielded configuration SHC also allows the sensor configuration SNC to be mechanically isolated from the probe cover 403 and the CMM mount (e.g., as seen at the automatic connector connection portion 401).

[0108] In various specific implementations, the minimum expected thickness of the conductive material of the shielding configuration SHC can be determined and used based on the radio frequency penetration depth. For example, in a particular exemplary implementation where the radio frequency penetration depth is approximately 20 μm at the operating frequency used (e.g., for field generation coil configuration 560), it may be desirable to use a shielding configuration with at least that thickness or greater.

[0109] In various specific implementations, for any slots (e.g., for allowing electrical connectors to pass through) or interruptions (e.g., for forming shielding configurations of more than one sheet of material) included in the shielding configuration SHC, it may be desirable for such elements to have an orientation primarily perpendicular to the central axis CA / axial direction O (e.g., horizontal orientation). For example, slots or interruptions oriented parallel to the central axis CA / axial direction O in the shielding configuration SHC (e.g., vertical slots or interruptions) are more likely to reduce shielding performance (e.g., with respect to the electromagnetic field generated by the field generating coil configuration 560). Therefore, if the shield is formed of multiple sheets of material, it may preferably have a stacked configuration (e.g., stacked cylindrical portions or disks) with corresponding interruptions perpendicular to the central axis CA / axial direction O.

[0110] like Figure 8B and Figure 8C As shown, the shielded configuration SHC includes a top horizontal slot SLT, a middle horizontal slot SLM, and a bottom horizontal slot SLB. The top horizontal slot SLT is configured to receive a top electrical connector 419T, which is configured to couple the coil of the top coil substrate 571T to the signal processing and control circuit module 480. The middle horizontal slot SLM is configured to receive a middle electrical connector 419M, which is configured to couple the coil of the field generation coil configuration 560 to the signal processing and control circuit module 480. The bottom horizontal slot SLB is configured to receive a bottom electrical connector 419B, which is configured to couple the coil of the bottom coil substrate 571B to the signal processing and control circuit module 480. It should be understood that the position of the slot SL and the corresponding electrical connector 419 can indicate the desired angular orientation of the signal processing and control circuit module 480 when it is coupled to the pin position detection module 511 (e.g., so that the electrical connector 419 can easily and directly extend upward from the pin position detection module 511 to the corresponding connection point on the signal processing and control circuit module 480).

[0111] Figure 8D A specific implementation of a first mounting portion FMP located at the bottom of the stylus position detection module 511 is shown. The first mounting portion FMP includes a lower plate portion LPP, which includes lower extension portions LEP (e.g., four lower extension portions LEP in the illustrated example), and wherein the gap / spacing between the lower extension portions LEP is referred to as a lower gap portion LGP (e.g., four lower gap portions LGP in the illustrated example). The first mounting portion FMP also includes a rotation limiting portion RLP, which restricts the rotation / movement of the first mounting portion FMP relative to the second mounting portion SMP (i.e., relative to rotation about the central axis CA), as will be described in more detail below. A threaded rod THR is rigidly attached to the first mounting portion FMP (e.g., approximately at the location of the rotation limiting portion RLP in the illustrated example) and extends upwards. Figure 8C As indicated in the illustrations, when the stylus position detection module 511 is assembled, in various embodiments, each component may have a hole through which the threaded rod THR can slide, wherein for assembly, each component may sequentially descend onto the threaded rod THR (e.g., including substrates / components 571B, 561, 571T and various other alignment and mounting portions 417, such as...). Figure 8A (as indicated in the document).

[0112] In various specific implementations, the shielded configuration SHC can be configured to allow adjustment of the sensor configuration SNC in both the X and Y directions (e.g., to achieve offset correction, etc.). As part of this adjustability, it should be noted that... Figure 8DAs shown, the first mounting portion FMP can be rigidly attached to the threaded rod THR. The corresponding components of the sensor configuration SNC (e.g., including substrates / components 571B, 561, 571T, and others) Figure 4A and Figure 8A The respective alignment and mounting portions 417 shown above and below may each have corresponding holes for sliding downward over the threaded rod THR during assembly of the sensor configuration SNC, wherein each component of the sensor configuration SNC remains in relative alignment with each other. In various embodiments, the holes or other openings through which the threaded rod THR extends at the top and bottom of the shield configuration SHC (e.g., including in the module cover portion MLD) may have a sufficient diameter or area to allow the threaded rod THR to move relative to the shield configuration SHC in the X and Y directions (e.g., before tightening the threaded nut THN downward).

[0113] Based on these features, the sensor configuration SNC can be moved in the X and Y directions within and relative to the shielded configuration SHC as part of an alignment process (e.g., to achieve the desired positioning / centering of the interfering element 551 relative to the sensor configuration SNC, wherein the interfering element 551 is coupled to the stylus suspension module 407'). In various embodiments, to adjust the position of the sensor configuration SNC in the X and Y directions, the sensor configuration SNC can use locating pins or other mechanisms via passages through corresponding holes in the sides of the shielded configuration SHC (e.g., as...). Figure 8B and 8C (as shown) is pushed or otherwise manipulated, and wherein the first mounting portion FMP, attached to the bottom of the threaded rod THR, is correspondingly movable relative to the second mounting portion SMP in the X and Y directions as part of the operation of the module mounting configuration MMC.

[0114] Once the desired alignment in the X and Y directions is achieved, the threaded nut THN can be tightened downwards as part of the module fixing configuration MSC to rigidly secure the alignment and mounting of the stylus position detection module 511 to the stylus suspension module 407'. It should be understood that tightening the threaded nut THN downwards compresses the module cover portion MLD and, in turn, compresses and secures all components of the sensor configuration SNC in a fixed and stable relationship. In various specific embodiments, the module cover portion MLD may be included as part of the shielding configuration SHC or may be specified as a separate element.

[0115] In various specific implementations, the module fixing configuration MSC includes one or more mechanical fastening configurations MFC for rigidly fixing the first mounting portion FPM to the second mounting portion SMP, and wherein, without the use of adhesive, the stylus position detection module 511 (including the sensor configuration SNC) is rigidly fixed to the stylus suspension module 407. In such cases... Figure 8C and Figure 8D In the exemplary configuration shown, the module fixing configuration MSC includes four mechanical fastening configurations MFC, each of which includes a threaded rod THR rigidly attached to the first mounting portion FMP and a threaded nut THN (e.g., which can be rotated to tighten downwards onto the corresponding threaded rod THR).

[0116] Figure 9 It shows Figure 4A A diagram illustrating a specific implementation of the stylus suspension module 407'. (See diagram for reference.) Figure 9 As shown, a stylus 406 with a probe tip 448 is attached to the bottom of a stylus suspension module 407'. The second mounting portion SMP (i.e., it is connected to...) Figure 8D The first mounting portion (FMP engagement) is shown located at the top of the stylus suspension module 407'. The second mounting portion (SMP) includes an upper plate portion (UPP) which includes upper extension portions (UEP) (e.g., four upper extension portions (UEP) in the example shown), and wherein the gap / spacing between the upper extension portions is referred to as an upper gap portion (UGP) (e.g., four upper gap portions (UGP) in the example shown). It should be understood that the lower plate portion (LPP) of the stylus position detection module 511 (e.g., see...) Figure 8D The plate aperture PLA is shaped to be fitted downward through the upper plate portion UPP of the stylus suspension module 407'. The shape of the outer boundary of the plate aperture PLA is formed by the upper extension portion UEP and the upper gap portion UGP. The lower plate portion LPP will fit through / receive the plate aperture PLA when it is in an angular orientation in which the lower extension portion LEP is aligned with the upper gap portion UGP (e.g., according to rotation about the central axis CA).

[0117] In various specific implementations, as part of the assembly of the scanning probe (e.g., for mounting the stylus position detection module 511 to the stylus suspension module 407'), a general desired alignment (e.g., angular orientation) between the stylus position detection module 511 and the stylus suspension module 407' can be determined. After the stylus position detection module 511 is positioned near the stylus suspension module 407' with the general desired alignment, the stylus position detection module 511 can be rotated (e.g., about a central axis, such as counterclockwise in the illustrated example) or otherwise manipulated (e.g., such that the lower extension portion LEP is aligned with the upper gap portion UGP) so that the lower plate portion LPP can descend through the plate aperture PLA.

[0118] The following text will be about Figure 10 More specifically, when the lower plate portion LPP is located below in the lower receiving area LRA, the stylus position detection module 511 can be rotated (e.g., about a central axis, such as clockwise in the example shown) such that the lower extension portion LEP is rotated to be at least partially located below the upper extension portion UEP (e.g., returning to approximately the desired angular alignment between the stylus position detection module 511 and the stylus suspension module 407'). It should be noted that the rotation limiting portion RLP (and / or the threaded rod THR) can limit clockwise rotation beyond a certain point (i.e., at which the rotation limiting portion RLP and / or the threaded rod THR can contact the edge of the upper extension portion UEP and thus prevent further rotation, as will be described in more detail below). Figure 10 (The illustration can be visualized). The potential limitations on rotation indicate why it might be expected to initially position the stylus position detection module 511 near the stylus suspension module 407' with approximately the desired alignment. More specifically, after performing a counter-clockwise rotation to allow the lower plate portion LPP to descend through the plate aperture PLA, after the lower plate portion LPP has descended, due to the rotation limitation portion RLP and / or other factors, there may be only a limited amount of subsequent clockwise rotation that can be performed to achieve the desired alignment (e.g., for "clockwise fixation" of the stylus position detection module 511 to the stylus suspension module 407' and / or for otherwise achieving the desired angular alignment of the module of the scanning probe 400, wherein the automatic connector connection portion 401 may also subsequently be clockwise fixed to the stylus suspension module 407', etc.).

[0119] Figure 10 It shows the method for using Figures 8A-8D The stylus position detection module 511 is installed on Figure 9 The diagram illustrates the specific implementation of the MMC (Modular Mounting Control) configuration for the 407' stylus suspension module. Figure 10 In the example, the first installation part FMP has been based on the above regarding Figure 9The process engages with the second mounting portion SMP, wherein the lower extension portion LEP is at least partially located below the upper extension portion UEP (e.g., with at least approximately a desired angular alignment between the stylus position detection module 511 and the stylus suspension module 407'). In this position, the sensor configuration SNC of the stylus position detection module 511, which is rigidly coupled to the first mounting portion FMP (i.e., via the threaded rod THR) relative to the stylus suspension module 407', can be adjusted in the X and Y directions to achieve a desired alignment with the stylus suspension module 407' (e.g., the ability to adjust in the X and Y directions based on the lower plate portion LPP when it is within the lower receiving region LRA).

[0120] like Figure 10 As indicated, within the lower receiving region LRA, the lower plate portion LPP is rotatable and has sufficient spacing to allow the lower plate portion LPP to move laterally in the X and Y directions. In the illustrated embodiment, the lower receiving region LRA is circular and has a diameter DLRA greater than the dimension DLPP spanning the lower plate portion LPP (e.g., the maximum dimension across the outer edges of the two relatively positioned lower extension portions LEP and / or equivalent to the diameter of the circle defined by the outer edges of the lower extension portions of the lower plate portion LPP). As a result of the dimension DLRA being greater than the dimension DLPP, the lower plate portion LPP has space for lateral movement within the lower receiving region LRA. In the illustrated example, the four lower extension portions LEP are at corresponding distances LD1-LD4 from the nearest edge of the usable movement area (e.g., which may correspond to the edge of the lower receiving region LRA, or where other aspects may limit the usable movement area), where each of those distances corresponds to the dimension by which the first mounting portion FMP can move laterally toward the nearest edge of the usable movement area (i.e., in the X and Y directions). In one specific implementation, with the lower plate portion LPP precisely centered in the lower receiving area LRA, the dimensions LD1-LD4 can all be approximately equal.

[0121] Once any movement in the X and Y directions has been completed and the desired alignment has been achieved, the module is fixed in place by the mechanical fastening configuration of the MSC (MFC). Figure 8CThe configuration shown can be used to compress and rigidly secure the stylus position detection module 511 (including the sensor configuration SNC) against the upper extension UEP, compressing upwards to prevent further movement of the lower extension LEP relative to the upper extension UEP and correspondingly preventing further movement of the stylus position detection module 511 relative to the stylus suspension module 407'. In various embodiments, the module mounting configuration MMC avoids the need to use adhesives or other permanent fastening techniques to secure the stylus position detection module 511 (i.e., including the sensor configuration SNC) to the stylus suspension module 407'. It should be understood that the mechanical fastening configuration MFC also allows for relatively simple removal of the stylus position detection module 511 from the stylus suspension module 407' (e.g., by loosening the threaded nut THN), as may be desired in some cases (e.g., for replacing and / or inspecting parts that may be worn or damaged due to repeated use or other means such as impacts over time).

[0122] Figure 11 This illustrates how the stylus position detection module 511 is combined with... Figure 4A A diagram illustrating the specific implementation of the jammer component 554 used in the specific implementation. (See diagram for example.) Figure 4B and Figure 11 As indicated, the interfering assembly 554 includes an interfering configuration 550 (including an interfering element 551), a recessed element 596, an adjustment member 597 (e.g., a positioning screw), and a spindle 598. In various embodiments, the adjustment member 597 may be rigidly attached to the spindle 598 (e.g., by tightening and without the use of adhesive). For coupling the interfering configuration 550 to the stylus suspension module 407', according to the interfering coupling configuration 553, the spindle 598 is rigidly attached to the upper portion 412C of the moving member 412 of the stylus suspension module 407'. In various embodiments, the attachment may be performed when the interfering assembly 554 is located inside the sensor configuration SNC (e.g., where the interfering assembly 554 may have already been placed inside the sensor configuration SNC during assembly of the sensor configuration SNC). In order to access the interferator assembly 554 inside the sensor configuration to perform attachment to the upper portion 412C of the moving member 412 of the stylus suspension module 407', the substrate 571T may include a top hole 591T that provides access to and also provides passage to the interferator element 551 and the adjustment member 597 for adjustment.

[0123] In each specific implementation (e.g., such as) Figure 4A and Figure 4BAs shown, the upper portion 412C may include or have a designated upper coupling portion 412CP (e.g., as part of the upper portion 412C or rigidly attached to the upper portion), to which the spindle 598 is rigidly coupled. The adjustment member 597 is configured to allow adjustment of the position of the interfering element 551 in the axial direction O (e.g., by rotating the interfering element 551 about the threaded adjustment member 597 to move the interfering element 551 up or down) to achieve desired axial alignment within the stylus position detection module 511 after mounting the stylus position detection module to the stylus suspension module 407' (e.g., alignment within the magnetic field generated by the field generating coil 561). After achieving the desired axial alignment, the interfering element 551 can be rigidly attached to the adjustment member 597 (e.g., using adhesive when inserted into the recessed element 596). As noted above, the top hole 591T in the substrate 571T provides a passage for adjusting the position of the interfering element 551 and for applying adhesive to the recess element 596.

[0124] The following is a description of various assembly processes, including those for individual modules and for the overall scanning probe 400. In various specific embodiments, the assembly of the stylus position detection module 511 (e.g., as...) Figures 8A-8D (As shown) may include an attachment of the threaded rod THR to the first mounting portion FMP. The shielding configuration SNC may include holes located in its bottom (e.g., larger than the diameter of the threaded rod THR to enable positional adjustments in the X and Y directions), which allow the shielding configuration SNC to descend downwards as the threaded rod THR passes through these holes until the bottom of the shielding configuration SNC rests on the first mounting portion FMP. Each component of the sensor configuration SNC (e.g., including substrates / components 571B, 561, 571T, and others) Figure 4A and Figure 8AThe respective alignment and mounting portions 417 shown above and below can each descend sequentially, with the threaded rod THR passing through a corresponding hole in each of these portions as they descend. Before the substrate 571T descends, the interfering component 554 can descend into the open intermediate region of the component, after which the substrate 571T can descend (e.g., where the center holes 591B and 591T in substrates 571B and 571T can be smaller than the interfering element 551, thereby preventing the interfering component 554 from being removed from the sensor configuration SNC when the substrates 571B and 571T are in place). Each of the electrical connectors 419B, 419M, and 419T can be connected to the respective substrate / component 571B, 561, 571T via corresponding slots SLB, SLM, and SLT as they descend sequentially to their respective positions. After the respective components of the sensor configuration SNC are in place, the module cover portion MLD can be placed on top. In various embodiments, the module cover portion MLD may be included as part of the shielding configuration SHC. Similar to the bottom of the shielded configuration SHC, the module cover portion MLD may include relatively large holes located in the top (e.g., larger than the diameter of the threaded rod THR to allow positional adjustment in the X and Y directions). These holes allow the module cover portion MLD to descend downwards with the threaded rod THR passing through them, allowing the module cover portion MLD to rest on top of the shielded configuration SHC. At this point in the assembly process, in some embodiments, the threaded nut THN (e.g., along with a corresponding washer) may be loosely mounted on the threaded rod THR and may not be tightened (e.g., to enable operation for coupling to the stylus suspension module 407' and including enabling adjustment of the sensor configuration SNC in the X and Y directions).

[0125] In various specific implementations, the signal processing and control circuit module 480 may be assembled subsequently, in parallel with, or before it, and may include, for example, Figure 7 The configuration indicates the placement of the printed circuit board. The stylus suspension module 407' can similarly be assembled next to, in parallel with, or before other modules.

[0126] For the assembly of the scanning probe 400, in various embodiments, the stylus position detection module 511 may be mounted to the stylus suspension module 407'. In various embodiments, the stylus suspension module 407' may be placed in a retainer, and the stylus position detection module 511 may be positioned approximately aligned (e.g., approximately rotationally aligned) with the stylus suspension module 407' and lowered onto the top of the stylus suspension module 407'. Depending on the operation of the module mounting configuration MMC, the stylus position detection module 511 may then be rotated (e.g., counterclockwise) until the lower extension LEP of the first mounting portion FMP is aligned with the upper gap portion UGP and lowered into the lower receiving area LRA of the second mounting portion SMP. In various embodiments, the threaded nut THN may not be tightened yet so that the lower extension LEP can fall down far enough to continue the process. After the lower extension LEP has fallen downwards, the stylus position detection module 511 can be rotated (e.g., clockwise) to return to a roughly desired alignment with the stylus suspension module 407'. It should be noted that this rotation will correspondingly cause the lower extension LEP to slide below the upper extension UEP of the second mounting portion SMP.

[0127] In various specific embodiments, the interfering component 554 (e.g., as previously placed in the sensor configuration SNC during assembly) can then be coupled to the upper portion 412C of the moving member 412 of the stylus suspension module 407' (e.g., extending upward toward the sensor configuration SNC as part of the mounting of the stylus position detection module 511 to the stylus suspension module 407'). The adjustment member 597 can then be used to adjust the Z-alignment (i.e., in the axial direction) of the interfering element 551 (e.g., for axial alignment such as relative to the field generating coil configuration 560). After achieving the desired axial alignment, the interfering element 551 can be rigidly attached to the adjustment member 597 (e.g., using adhesive when inserted into the recessed element 596). As noted above, the top hole 591T in the substrate 571T provides passage for adjusting the position of the interfering element 551 when the interfering component 554 is within the sensor configuration SNC and for applying adhesive to the recessed element 596.

[0128] In various embodiments, depending on the operation of the module installation configuration MMC, the relative position of the sensor configuration SNC can then be adjusted in the X and Y directions (e.g., to achieve the desired positioning / centering of the interferator element 551 relative to the sensor configuration SNC). In various embodiments, to adjust the position of the sensor configuration SNC in the X and Y directions, the sensor configuration SNC can be pushed or otherwise manipulated (e.g., using locating pins or other mechanisms, such as using a passage through a corresponding hole in the side of the shielded configuration SHC, such as...). Figure 8B and Figure 8C (As shown). Correspondingly, the first mounting portion FMP, attached to the bottom of the threaded rod THR, can move relative to the second mounting portion SMP in the X and Y directions as part of the operation of the module mounting configuration MMC. Once the desired alignment in the X and Y directions is achieved, the threaded nut THN can be tightened downwards as part of the module fixing configuration MSC to rigidly secure the alignment and mounting of the stylus position detection module 511 to the stylus suspension module 407'.

[0129] After the MMC has been fixedly installed and configured, in various specific implementations, the signal processing and control circuit module 480 can be coupled to the pin position detection module 511 (e.g., using a module-coupled configuration MCC). More specifically, the retaining part SEC (locating screw) of the second coupling portion SCP can be rotated into the receiving portion CGR (e.g., a circular recess) of the first coupling portion for rigidly coupling the signal processing and control circuit module 480 to the pin position detection module 511. As part of the coupling process, the signal processing and control circuit module 480 can first be rotated to be angled aligned so that the connectors 419B, 419M, and 419T from the respective substrates / components 571B, 561, 571T can extend upward to the corresponding attachment positions on the signal processing and control circuit module 480 (e.g., as shown in the image). Figure 4A (As shown).

[0130] In various specific implementations, the probe cover 403 may then be lowered onto the signal processing and control circuit module 480 and the stylus position detection module 511, wherein the lower portion of the probe cover 403 may be configured to be rigidly attached to the stylus suspension module 407'. For example, the lower portion of the probe cover 403 may be threaded, or otherwise configured to be twisted downwards onto the corresponding receiving portion of the stylus suspension module 407'.

[0131] After attaching the probe cover 403, in each specific implementation, the automatic connector connection portion 401 can then be installed / attached (e.g., as...). Figure 4A(As shown in the diagram). For installation, the automatic connector connection portion 401 can be angled (e.g., rotated about the central axis CA) relative to the stylus suspension module 407' (and other modules of the scanning probe 400) to achieve a preferred angular orientation and corresponding alignment. This process can also be described as "clockwise fixing" the automatic connector connection portion 401 to one or more modules (e.g., the stylus suspension module 407'). A circular attachment portion 401AT can be used to attach the automatic connector connection portion 401 to the rest of the scanning probe 400 (e.g., using adhesive to attach to the top portion of the probe cap 403). The bottom portion of the circular attachment portion 401AT may be able to rotate within the top portion of the probe cap 403 before the adhesive hardens. This configuration allows the automatic connector connection portion 401 to be "clockwise fixing" or otherwise angled relative to the stylus suspension module 407' and / or other modules to achieve the desired angular orientation and corresponding alignment as described above, after which the adhesive is allowed to harden to maintain the orientation.

[0132] It should be understood that the above text regarding Figures 3-11The principles described herein can be used in conjunction with other configurations of the stylus position detection module. As some specific examples, such principles can be used with the configurations disclosed in the previously incorporated U.S. Patent Publication No. 2020 / 0141717, and in co-pending and co-assigned U.S. Patent Application No. 17 / 135,665, filed December 28, 2020, entitled “Inductive Position Detection Configuration for Indicating a Measurement Device Stylus Position”, and U.S. Patent Application No. 17 / 135,672, filed December 28, 2020, entitled “Inductive Position Detection Configuration for Indicating a Measurement Device Stylus Position and Including Coil Misalignment Compensation”, each of which is hereby incorporated herein by reference in its entirety. It should be understood that these incorporated references illustrate certain configurations with variations in the position, size, and / or shape of the sensing coil, field generating coil, interfering element, etc. (e.g., a single printed circuit board having all the coils in the coil board configuration, and / or having a cylindrical interfering element configured to move and mount within the central hole 591M of the coil board configuration, etc.), but wherein the operation of these coils and / or associated operations is otherwise similar to the operation of those coils and / or associated operations of the stylus position detection modules 411, 511, 511' described herein, and wherein these configurations can be similarly used / implemented with and / or as part of the modules and configurations disclosed herein.

[0133] Figure 12 This is a flowchart illustrating an example of a method for assembling a modular configuration of the scanning probe 300 / 400. The method generally comprises two steps (blocks).

[0134] In block 1202, the first step includes: mounting the stylus position detection module 511 to the stylus suspension module 407' (e.g., using a module mounting configuration MMC). The stylus suspension module 407' includes a stylus coupling portion 342 and a stylus motion mechanism 309. The stylus coupling portion is configured to be rigidly coupled to a stylus 306 having a probe tip 348. The stylus motion mechanism enables the stylus coupling portion 342 to move axially in the axial direction and to rotate about a rotation center. The stylus position detection module 511 is assembled separately from the stylus suspension module 407' before being mounted to it, and when mounted, the stylus position detection module 511 is parallel to the axial direction and nominally coupled to the rotation center. The stylus position detection module 511 is aligned with a central axis and includes a sensor configuration SNC comprising: a field generating coil configuration 460 including at least one field generating coil 461; a top axial sensing coil configuration TASCC including at least one top axial sensing coil; a bottom axial sensing coil configuration BASCC including at least one bottom axial sensing coil; and a plurality of top rotation sensing coils TRSC and a plurality of bottom rotation sensing coils BRSC.

[0135] In block 1204, the second step includes: rigidly coupling the signal processing and control circuit module 480 to the stylus position detection module 511 (e.g., using a module coupling configuration MCC). The signal processing and control circuit module 480 is assembled separately from the stylus position detection module 511 and the stylus suspension module 407' before being rigidly coupled to the stylus position detection module 511, wherein the signal processing and control circuit module 480 is operatively connected to the coils of the stylus position detection module 511 to provide a coil drive signal to at least one field generation coil 461, and to input signals including corresponding signal components provided by the respective rotation sensing coil and axial sensing coil of the stylus position detection module 511, and to output signals indicating the axial and rotational positions of the probe tip 348.

[0136] Figure 13 This is a flowchart illustrating an example of a method for measuring the surface of a workpiece using a scanning probe 300 / 400. The method generally comprises two steps (boxes).

[0137] In block 1302, the first step includes: moving the scanning probes 300 / 400 so that the probe tip 348 is moved along the surface of the workpiece W accordingly.

[0138] In block 1304, the second step includes generating three-dimensional position information based on signals generated by the sensing coils of the scanning probes 300 / 400 as the probe tip 348 moves along the surface of the workpiece.

[0139] Generally, it should be understood that references to top and bottom parts or upper and lower parts in this document are intended to be in the manner of, for example... Figure 1 and Figure 4A The orientation reference scanning probe is shown (e.g., where the central axis CA is vertically oriented and where the probe tip 448 is at the bottom and the auto-connector connection portion 401 is at the top). In various embodiments, the auto-connector connection portion 401 may be referred to as the proximal end of the scanning probe 400 or near that proximal end, and the stylus coupling portion 442 and / or the probe tip 448 may be referred to as the distal end of the scanning probe 200 or near that distal end. As used herein, the relative terms "top" and "bottom" refer to a top component that is closer to the proximal end of the scanning probe than a corresponding bottom component that is closer to the distal end of the scanning probe. Similarly, the relative terms "upper" and "lower" refer to an upper component that is closer to the proximal end of the scanning probe than a corresponding lower component that is closer to the distal end of the scanning probe.

[0140] It should be understood that the configuration disclosed herein has various advantages. For example, the stylus suspension module 407', the stylus position detection module 511, and the signal processing and control circuitry module 480 can each be assembled separately and then attached for assembling the scanning probe 400. These features enable efficient and parallel assembly and testing of each module in the individual modules before the scanning probe 400 is assembled. The assembled scanning probe can also be relatively easily disassembled by removing one or more modules from the individual modules (e.g., thereby enabling the replacement of worn or faulty components, etc.).

[0141] As noted above, in each specific implementation, the probe cover 403 does not contact the stylus position detection module 511 or the signal processing and control circuit module 480. The stylus position detection module 511 is mounted to the stylus suspension module 407' using a Module Mount Configuration (MMC). The signal processing and control circuit module 480 is rigidly coupled to the stylus position detection module 511 using a Module Coupling Configuration (MCC). The stylus suspension module 407' is rigidly coupled to the automatic connector connection portion 401 via the probe cover 403 (i.e., the stylus suspension module 407' is rigidly coupled to the bottom portion of the probe cover 403, and the top portion of the probe cover 403 is rigidly coupled to the automatic connector connection portion 401). Therefore, the probe cover 403 surrounds the stylus position detection module 511 and the signal processing and control circuit module 480 but does not contact them or otherwise directly and rigidly couple them. Isolation from the probe cover 403 helps protect the stylus position detection module 511 and the signal processing and control circuit module 480 from impacts or other events related to the probe cover (e.g., due to rough handling, events during shipping, shocks during use, etc.).

[0142] As part of the Module Mounting Configuration (MMC), the stylus position detection module 511 includes a first mounting portion FMP, and the stylus suspension module 407' includes a second mounting portion SMP. The first mounting portion FMP includes a lower extension portion LEP (e.g., in some cases, it may be referred to as a type of "cutout") that falls into the upper gap portion UGP (e.g., in some cases, it may be referred to as a type of "split") of the second mounting portion SMP. The lower extension portion LEP can then slide below the upper extension portion UEP (e.g., in some cases, it may be referred to as a "cantilever" portion of the second mounting portion). The Module Mounting Configuration (MMC) (e.g., in some cases, it may be referred to as a type of clamping configuration) holds the stylus position detection module 511 onto the stylus suspension module 407'. As described herein, the Module Mounting Configuration (MMC) enables at least a portion of the stylus position detection module 511 (e.g., including a sensor configuration (SNC)) to be aligned with the stylus suspension module 407' in both the X and Y directions (e.g., aligned with the interfering element 551 coupled to the stylus suspension module 407'). In various embodiments, the MMC allows for relatively simple installation (e.g., enabling the stylus position detection module 511 to be blindly mounted onto the stylus suspension module 407'), which may be desirable for various applications. In various embodiments, the MMC enables installation without the use of adhesives, allowing the stylus position detection module 511 and the stylus suspension module 407' to be removed / separated relatively quickly and easily (e.g., allowing the scanning probe 400 to be refurbished and / or easily replaced with defective or worn stylus position detection module 511, etc.), and this avoids problems that might otherwise arise from the use of adhesives (e.g., adhesive swelling and potential impact on module and / or component alignment or other aspects, etc.).

[0143] It should be understood that the use of the Module Mounting Configuration (MMC) enables the stylus position detection module 511 to be mounted to the stylus suspension module 407', wherein the stylus position detection module 511 is not directly and rigidly attached to the probe cover 403, and is therefore mechanically isolated from the probe cover 403. The Module Mounting Configuration (MMC) further enables the adjustment and alignment of at least a portion of the stylus position detection module 511 (e.g., at least including a sensor configuration SNC, etc., adjustable in the X and Y directions to achieve alignment, such as with respect to the interfering element 551 coupled to the stylus suspension module 407').

[0144] It should be understood that the sensor is configured with SNC components (e.g., including substrates / components 571B, 561, 571T, and others). Figure 4A and Figure 8AThe respective alignment and mounting portions 417 shown above and below form a compressed and stable configuration (e.g., particularly when using a module mounting configuration MMC and a module fixing configuration MSC) and are effectively used to perform operations as a three-dimensional sensing sensor.

[0145] In various specific implementations, at least some of the components of the sensor configuration SNC (e.g., including substrates / components 571B, 561, 571T, and others) Figure 4A and Figure 8A The various alignment and mounting portions 417 shown above and below may be conformally coated or constructed of a thermally stable material to prevent environmental drift.

[0146] The following describes various exemplary embodiments of this disclosure, wherein various features and elements are used... Figures 1-13 The accompanying illustrations are annotated. It should be understood that the illustrations are added to indicate exemplary embodiments, and the features and elements are not limited to those described herein. Figures 1-13 The specific implementation shown.

[0147] According to one aspect, a modular configuration (MCF) for a scanning probe 400 of a coordinate measuring machine 200 is provided. The modular configuration MCF for the scanning probe includes a stylus suspension module 407', which includes: a stylus coupling portion 442 configured to rigidly couple to a stylus 406 having a probe tip 448; and a stylus motion mechanism 409 that enables the stylus coupling portion 442 to move axially in an axial direction O and to rotate about a rotation center RC.

[0148] The modular configuration MCF for the scanning probe also includes a stylus position detection module 511, which is configured to be assembled separately from the stylus suspension module 407' before being installed onto the stylus suspension module as part of the assembled scanning probe 400. When installed, the stylus position detection module 511 is configured to be arranged along a central axis CA parallel to the axial direction O and nominally aligned with the rotation center RC. The stylus position detection module 511 includes a sensor configuration SNC comprising: a field generating coil configuration 560 including at least one field generating coil 561; a top axial sensing coil configuration TASCC including at least one top axial sensing coil; a bottom axial sensing coil configuration BASCC including at least one bottom axial sensing coil; and a plurality of top rotation sensing coils TRSC and a plurality of bottom rotation sensing coils BRSC.

[0149] The interfering configuration 550 of the scanning probe is configured to be coupled to the stylus suspension module 407'. The interfering configuration 550 includes a conductive interfering element 551 providing an interfering region, wherein the interfering element 551 is configured to be positioned along the central axis CA in the interfering motion volume MV and coupled to the stylus suspension module 407' via an interfering coupling configuration 553, and moves within the interfering motion volume MV relative to the undeflected position UNDF in response to deflection of the stylus suspension module 407', wherein the interfering element 551 moves along the axial direction O within an operating motion range + / -Rz in response to axial movement, and moves along orthogonal X and Y directions orthogonal to the axial direction O within corresponding operating motion ranges + / -Rx and + / -Ry in response to rotational movement. A field generating coil configuration 560 is configured to generate a generally varying magnetic flux along the axial direction O within the interfering motion volume MV in response to a coil drive signal.

[0150] The modular configuration MCF for the scanning probe also includes a signal processing and control circuit module 480, which is configured to be assembled separately from the stylus position detection module 511 and the stylus suspension module 407' before being rigidly coupled to the stylus position detection module 511 as part of the assembled scanning probe 400. The signal processing and control circuit module 480 is configured to be operatively connected to the coils of the stylus position detection module 511 (e.g., the field generation coil configuration 560, the axial sensing coil configurations TASCC and BASCC, and the rotation sensing coils TRSC and BRSC) to provide coil drive signals and input signals including corresponding signal components provided by the respective rotation sensing coils and axial sensing coils, and output signals indicating the axial and rotational positions of one or more of the interfering element 551, the stylus coupling portion 442, or the probe tip 448 (e.g., in various embodiments, the output signals may indicate the axial and rotational positions of each of the interfering element 551, the stylus coupling portion 442, and the probe tip 448).

[0151] The modular configuration MCF may also include a probe cap 403.

[0152] The probe cover 403 can be configured to surround the stylus position detection module 511 when the scanning probe 400 is assembled.

[0153] In one respect, the probe cover 403 is not configured to be directly and rigidly attached to the stylus position detection module 511 when the scanning probe 400 is assembled.

[0154] The modular configuration MCF may also include at least a minimum spacing SPS between the probe cover 403 and the stylus position detection module 511, which mechanically isolates the probe cover 403 from the stylus position detection module 511 when the scanning probe 400 is assembled. The spacing SPS is configured to reduce any damage to the stylus position detection module 511 that might otherwise occur due to impacts on the outer surface of the probe cover 403.

[0155] The probe cover 403 can be configured to surround the signal processing and control circuit module 480 when the scanning probe 400 is assembled.

[0156] In one respect, the probe cover 403 is not configured to be directly and rigidly attached to the signal processing and control circuitry module 480 when the scanning probe 400 is assembled.

[0157] In one aspect, the assembled scanning probe 400 is configured to have a minimum spacing SPA between the probe cover 403 and the signal processing and control circuit module 480, which mechanically isolates the probe cover 403 from the signal processing and control circuit module 480 when the scanning probe 400 is assembled. The spacing SPA is configured to reduce any damage to the signal processing and control circuit module 480 that might otherwise occur due to impacts on the outer surface of the probe cover 403.

[0158] In one respect, the probe cap 403 can be configured to be rigidly attached to the stylus suspension module 407'.

[0159] In one aspect, the probe cover 403 is configured to surround the signal processing and control circuit module 480 and the stylus position detection module 511 when the scanning probe 400 is assembled, but is not configured to be directly and rigidly attached to the signal processing and control circuit module 480 or the stylus position detection module 511.

[0160] In one aspect, the stylus position detection module 511 further includes a first mounting portion FMP, and the stylus suspension module 407' further includes a second mounting portion SMP. The first mounting portion and the second mounting portion form a module mounting configuration MMC, wherein the second mounting portion SMP is configured to engage with the first mounting portion FMP for mounting the stylus position detection module 511 to the stylus suspension module 407'.

[0161] In one aspect, during the assembly of the scanning probe 400, the module mounting configuration (MMC) is configured to enable the relative position of at least a portion of the stylus position detection module 511 in the X and Y directions relative to the stylus suspension module 407 for aligning the stylus position detection module 511 with the stylus suspension module 407.

[0162] In one aspect, the modular configuration MCF also includes a module fixing configuration MSC, which is configured to rigidly fix a first mounting portion FMP to a second mounting portion SMP after the stylus position detection module 511 has been aligned with the stylus suspension module 407', for the purpose of rigidly fixing the stylus position detection module 511 to the stylus suspension module 407'.

[0163] In one aspect, the signal processing and control circuit module 480 further includes a first coupling portion FCP, and the stylus position detection module 511 further includes a second coupling portion SCP. The first coupling portion and the second coupling portion form a module coupling configuration MCC, wherein the second coupling portion SCP is configured to be coupled to the first coupling portion FCP for coupling the signal processing and control circuit module 480 to the stylus position detection module 511.

[0164] According to another aspect, a method is provided for a modular configuration MCF for assembling a scanning probe 400 of a coordinate measuring machine 200. This method typically includes two steps.

[0165] The first step includes: mounting the stylus position detection module 511 to the stylus suspension module 407' (e.g., according to the configuration disclosed herein).

[0166] The second step includes rigidly coupling the signal processing and control circuit module 480 to the stylus position detection module 511 (e.g., according to a configuration as disclosed herein).

[0167] In one aspect, the method further includes: rigidly coupling a probe cover 403 to a stylus suspension module 407', wherein the probe cover 403 is configured to surround the signal processing and control circuit module 480 and the stylus position detection module 511 when the scanning probe 400 is assembled, but is not configured to be directly and rigidly attached to the signal processing and control circuit module 480 or the stylus position detection module 511.

[0168] In one aspect, mounting the stylus position detection module 511 to the stylus suspension module 407' includes:

[0169] The stylus position detection module 511 is mounted to the stylus suspension module 407' using the Module Mount Configuration (MMC), wherein the Module Mount Configuration (MMC) enables the position of at least a portion of the stylus position detection module 511 to be adjusted relative to the stylus position detection module 511 in the X and Y directions.

[0170] Adjust the position of at least a portion of the stylus position detection module 511 in the X and Y directions to align the stylus position detection module 511 with the stylus suspension module 407'; and

[0171] After the adjustments in the X and Y directions are completed, the stylus position detection module 511 is rigidly fixed to the stylus suspension module 407' using the module fixing configuration MSC.

[0172] According to one aspect, a system (e.g., including a scanning probe 400 as disclosed herein) also includes:

[0173] Drive mechanism 220, configured to be attached to scanning probe 400 and including a movement mechanism for moving scanning probe 400 in three dimensions to measure the surface of workpiece W; and

[0174] A drive mechanism attachment portion 224 is configured to attach the scanning probe 400 to the drive mechanism 220.

[0175] According to another aspect, a scanning probe 400 for a coordinate measuring machine 200 is provided (e.g., according to a configuration as disclosed herein). The scanning probe 400 includes a shielding configuration SHC positioned around a sensor configuration SNC and includes a conductive material for shielding the sensor configuration SNC.

[0176] In one aspect, the shielded configuration SHC is configured to form the electromagnetic boundary of the sensor configuration SNC.

[0177] In one aspect, the shielding configuration SHC is configured to reduce crosstalk or other interference that would otherwise be caused by at least one of the components or operations of at least one of the signal processing and control circuit module 480 or the stylus suspension module 407' and would otherwise affect the signal of the sensing coil of the sensor configuration SNC in the absence of the shielding configuration SHC around the sensor configuration SNC.

[0178] In one aspect, the shielded configuration SHC includes one or more slots SL, each slot SL having dimensions that allow an electrical connector from the signal processing and control circuitry module 480 to pass through the slot SL in the shielded configuration SHC for reception by the sensor configuration SNC. Each slot SL is oriented in a direction perpendicular to the axial direction O such that the dimension of the slot SL in the axial direction O is smaller than the dimension of the slot SL in the direction perpendicular to the axial direction O.

[0179] In one aspect, the scanning probe 400 also includes a probe cover 403 surrounding a shielding configuration SHC of the stylus position detection module 511. The probe cover 403 is mechanically isolated from the stylus position detection module 511 at least by a minimum spacing SPS between the inner surface of the probe cover 403 and the outer surface of the shielding configuration SHC.

[0180] In one aspect, the stylus position detection module 511 further includes a first mounting portion FMP, and the stylus suspension module 407' further includes a second mounting portion SMP. The first mounting portion and the second mounting portion form a module mounting configuration MMC, wherein the second mounting portion SMP is configured to engage with the first mounting portion FMP for mounting the stylus position detection module 511 to the stylus suspension module 407'.

[0181] In one aspect, the second mounting portion SMP includes a plurality of upper extension portions UEP, and the first mounting portion FMP includes a plurality of lower extension portions LEP, the plurality of lower extension portions LEP being configured to be at least partially positioned below the plurality of upper extension portions UEP when the second mounting portion SMP is engaged by the first mounting portion FMP.

[0182] In one aspect, the module mounting configuration MMC is configured such that when the second mounting portion SMP is engaged by the first mounting portion FMP, a plurality of lower extension portions LEP can slide in the X and Y directions below a plurality of upper extension portions UEP.

[0183] In one aspect, the Module Mounting Configuration (MMC) is configured to enable adjustment of the relative position of at least a portion of the stylus position detection module 511 in the X and Y directions relative to the stylus suspension module 407' for aligning the stylus position detection module 511 with the stylus suspension module 407'.

[0184] In one aspect, the scanning probe 400 also includes a module fixing configuration MSC configured to rigidly fix a first mounting portion FMP to a second mounting portion SMP after the stylus position detection module 511 has been aligned with the stylus suspension module 407', for the purpose of rigidly fixing the stylus position detection module 511 to the stylus suspension module 407'.

[0185] In one aspect, the module fixing configuration MSC includes one or more mechanical fastening configurations MFC for rigidly fixing a first mounting portion FMP to a second mounting portion SMP, wherein no adhesive is used to rigidly fix the stylus position detection module 511 to the stylus suspension module 407'.

[0186] In one aspect, the interfering component 554 of the scanning probe 400 includes an interfering element 551, and the interfering component 554 is rigidly attached to the upper portion 412C of the moving member 412 of the stylus suspension module 407' via an interfering coupling configuration 553. The interfering component 554 also includes an adjustment member 597 configured to allow adjustment of the position of the interfering element 551 relative to the moving member 412 of the stylus suspension module 407' in the axial direction O to achieve desired alignment in the axial direction O within the stylus position detection module 511 after it has been mounted to the stylus suspension module 407'. After achieving the desired alignment, the position of the interfering element 551 is rigidly fixed relative to the moving member 412 of the stylus suspension module 407'.

[0187] In one aspect, the sensor configuration SNC includes a top coil substrate 571T and a bottom coil substrate 571B, with at least some top and bottom coils respectively positioned on these top and bottom coil substrates. The top coil substrate 571T includes a top hole 591T that allows access to at least one of an interfering element 551 or an adjustment component 597 for adjusting the position of the interfering element 551 before the signal processing and control circuit module 480, as part of the assembled scanning probe 400, is rigidly coupled to the stylus position detection module 511.

[0188] According to another approach, a method that typically involves two steps is provided.

[0189] The first step includes moving the scanning probe 400 so that the probe tip 448 moves along the surface of the workpiece W accordingly.

[0190] The second step includes generating three-dimensional position information based on the signal generated by the sensing coil of the scanning probe 400 as the probe tip 448 moves along the surface of the workpiece W.

[0191] In one aspect, the shielded configuration SHC forms an electromagnetic boundary with varying magnetic flux generated by the field generating coil configuration 560.

[0192] In one aspect, the shielding configuration SHC reduces crosstalk or other interference that would otherwise be caused by at least one of the components or operations of at least one of the signal processing and control circuit module 480 or the stylus suspension module 407' and would otherwise affect the signal of the sensing coil of the sensor configuration SNC in the absence of the shielding configuration SHC around the sensor configuration SNC.

[0193] In one aspect, as part of assembling the scanning probe 400 before the probe tip 448 moves along the surface of the workpiece W, a stylus position detection module 511 is mounted to a stylus suspension module 407' using a modular mounting configuration (MMC), wherein, as implemented by the modular mounting configuration (MMC), at least a portion of the stylus position detection module 511 is adjusted relative to the stylus suspension module 407' in the X and Y directions to align the stylus position detection module 511 with the stylus suspension module 407'.

[0194] According to another aspect, a system is provided that includes: a scanning probe 400; a drive mechanism 220; and a drive mechanism attachment portion 224 that attaches the scanning probe 400 to the drive mechanism 220.

[0195] According to one aspect, a drive mechanism 220 is used to move the scanning probe 400 so as to correspondingly move the probe tip 448 along the surface of the workpiece W, and wherein the signal processing and control circuitry correspondingly outputs signals indicating the axial position and rotational position of the probe tip 448 as it moves along the surface of the workpiece W.

[0196] Although preferred embodiments of the present disclosure have been illustrated and described, many variations of the feature arrangements and sequences of operation shown and described will be apparent to those skilled in the art based on this disclosure. Various alternative forms can be used to implement the principles disclosed herein. Furthermore, the various embodiments described above can be combined to provide other embodiments. All U.S. patents and U.S. patent applications mentioned in this specification are incorporated herein by reference in their entirety. If it is necessary to employ the concepts of various patents and applications to provide other embodiments, aspects of the embodiments may be modified.

[0197] These and other changes can be made to the specific implementation based on the detailed description above. Generally, the terminology used in the following claims should not be construed as limiting the claims to the embodiments disclosed in this specification and claims, but should be interpreted to include all possible embodiments and the full scope of the equivalents conferred by these claims.

Claims

1. A scanning probe for a coordinate measuring machine, the scanning probe comprising: The stylus suspension module includes: A stylus coupling portion, configured to rigidly couple to a stylus having a probe tip; and The stylus motion mechanism enables the stylus coupling portion to move axially in the axial direction and to rotate around the rotation center. A stylus position detection module, configured to be arranged along a central axis parallel to the axial direction and nominally aligned with the rotation center, the stylus position detection module comprising: Sensor configuration, the sensor configuration including: A field generating coil configuration, the field generating coil configuration including at least one field generating coil; A top axial sensing coil configuration, the top axial sensing coil configuration including at least one top axial sensing coil; A bottom axial sensing coil configuration, the bottom axial sensing coil configuration including at least one bottom axial sensing coil; Multiple top rotation sensing coils and multiple bottom rotation sensing coils; and Multiple alignment and mounting parts; and A shielding configuration, wherein the shielding configuration is positioned around and surrounds the sensor configuration and includes a conductive material for shielding the sensor configuration; An interfering device configuration includes a conductive interfering element providing an interfering device region, wherein the interfering element is positioned within an interfering device movement volume along the central axis and coupled to the stylus suspension module via an interfering device coupling configuration, wherein the interfering element moves within the interfering device movement volume relative to an undeflected position in response to deflection of the stylus suspension module, the interfering element moves within an operating movement range + / - Rz along the axial direction in response to the axial movement and moves within corresponding operating movement ranges + / - Rx and + / - Ry along orthogonal X and Y directions orthogonal to the axial direction in response to the rotational movement, and a field generating coil configuration generates a varying magnetic flux generally along the axial direction within the interfering device movement volume in response to a coil drive signal; and A signal processing and control circuit module is configured to be operatively connected to the coil of the stylus position detection module to provide the coil drive signal, and to input a signal including corresponding signal components provided by the respective rotation sensing coil and the axial sensing coil, and to output signals indicating the axial and rotational positions of one or more of the interference element, the stylus coupling portion, or the probe tip. in The stylus position detection module further includes a first mounting portion, and the stylus suspension module further includes a second mounting portion. The first mounting portion and the second mounting portion form a module mounting configuration, wherein the second mounting portion is configured to engage with the first mounting portion for mounting the stylus position detection module to the stylus suspension module. The first mounting part is located at the bottom of the stylus position detection module, and the second mounting part is located at the top of the stylus suspension module. The second mounting portion located at the top of the stylus suspension module includes a plurality of upper extension portions located at the top of the stylus suspension module, and the first mounting portion located at the bottom of the stylus position detection module includes a plurality of lower extension portions located at the bottom of the stylus position detection module, the plurality of lower extension portions being configured to be at least partially located below the plurality of upper extension portions when the second mounting portion is engaged by the first mounting portion; The module mounting configuration is configured such that when the second mounting portion is engaged by the first mounting portion, it is located below the plurality of alignment and mounting portions; and The module mounting configuration is configured to mount the stylus position detection module to the stylus suspension module as part of assembling the scanning probe.

2. The scanning probe of claim 1, wherein the shielding configuration is configured to form the electromagnetic boundary of the sensor configuration.

3. The scanning probe of claim 1, wherein the shielding configuration is configured to reduce crosstalk or other interference that would otherwise be caused by at least one of the components or operations of the signal processing and control circuit module or the stylus suspension module and would otherwise affect the signal of the sensing coil of the sensor configuration in the absence of the shielding configuration around the sensor configuration.

4. The scanning probe of claim 1, wherein the shielding configuration includes one or more slots, wherein each slot has a size that allows an electrical connector from the signal processing and control circuit module to pass through the slot in the shielding configuration for reception by the sensor configuration, and each slot is oriented in a direction perpendicular to the axial direction such that the size of the slot in the axial direction is smaller than the size of the slot in the direction perpendicular to the axial direction.

5. The scanning probe according to claim 1, further comprising: A probe cover surrounding the shielding configuration of the stylus position detection module, wherein the probe cover is mechanically isolated from the stylus position detection module by at least a minimum distance between the inner surface of the probe cover and the outer surface of the shielding configuration.

6. The scanning probe of claim 1, wherein the module mounting configuration is configured such that when the second mounting portion is engaged by the first mounting portion, the plurality of lower extension portions are slidable below the plurality of upper extension portions in the X and Y directions.

7. The scanning probe according to claim 1, wherein: The module mounting configuration is configured to allow adjustment of the relative position of at least a portion of the stylus position detection module in the X and Y directions relative to the stylus suspension module for aligning the stylus position detection module with the stylus suspension module; The scanning probe also includes a module fixing configuration, which is configured to rigidly fix the first mounting portion to the second mounting portion after the stylus position detection module has been aligned with the stylus suspension module, for rigidly fixing the stylus position detection module to the stylus suspension module; and The module fixing configuration includes one or more mechanical fastening configurations for rigidly fixing the first mounting portion to the second mounting portion.

8. The scanning probe of claim 1, wherein the interfering component of the scanning probe includes the interfering element, and the interfering component is rigidly attached to the upper portion of the movable member of the stylus suspension module via the interfering coupling configuration, the interfering component further comprising an adjustment member configured such that the position of the interfering element relative to the movable member of the stylus suspension module is adjustable along the axial direction to achieve a desired alignment in the axial direction within the stylus position detection module after the stylus position detection module is mounted to the stylus suspension module, wherein after the desired alignment is achieved, the position of the interfering element is rigidly fixed relative to the movable member of the stylus suspension module.

9. The scanning probe of claim 8, wherein the sensor configuration includes a top coil substrate and a bottom coil substrate, at least some of the top coil and the bottom coil are respectively positioned on the top coil substrate and the bottom coil substrate, the top coil substrate including a hole that allows access to at least one of the interfering element or the adjustment member for adjusting the position of the interfering element, before the signal processing and control circuit module is rigidly coupled to the stylus position detection module as part of assembling the scanning probe.

10. A method, the method comprising: Move the scanning probe so that the probe tip moves along the surface of the workpiece accordingly; as well as Three-dimensional position information is generated based on signals generated by the sensing coil of the scanning probe as the probe tip moves along the surface of the workpiece, wherein the scanning probe includes: The stylus suspension module includes: A stylus coupling portion, configured to rigidly couple to a stylus having a probe tip; and The stylus motion mechanism enables the stylus coupling portion to move axially in the axial direction and to rotate around the rotation center. A stylus position detection module, configured to be arranged along a central axis parallel to the axial direction and nominally aligned with the rotation center, the stylus position detection module comprising: Sensor configuration, the sensor configuration including: A field generating coil configuration, the field generating coil configuration including at least one field generating coil; A top axial sensing coil configuration, the top axial sensing coil configuration including at least one top axial sensing coil; A bottom axial sensing coil configuration, the bottom axial sensing coil configuration including at least one bottom axial sensing coil; Multiple top rotation sensing coils and multiple bottom rotation sensing coils; and Multiple alignment and mounting portions; and a shielding configuration positioned around and surrounding the sensor configuration and including conductive material for shielding the sensor configuration; An interfering device configuration includes a conductive interfering element providing an interfering device region, wherein the interfering element is positioned within an interfering device movement volume along the central axis and coupled to the stylus suspension module via an interfering device coupling configuration, wherein the interfering element moves within the interfering device movement volume relative to an undeflected position in response to deflection of the stylus suspension module, the interfering element moves within an operating movement range + / - Rz along the axial direction in response to the axial movement and moves within corresponding operating movement ranges + / - Rx and + / - Ry along orthogonal X and Y directions orthogonal to the axial direction in response to the rotational movement, and a field generating coil configuration generates a varying magnetic flux generally along the axial direction within the interfering device movement volume in response to a coil drive signal; and A signal processing and control circuit module is configured to be operatively connected to the coil of the stylus position detection module to provide the coil drive signal, and to input a signal including corresponding signal components provided by the respective rotation sensing coil and the axial sensing coil, and to output signals indicating the axial and rotational positions of one or more of the interference element, the stylus coupling portion, or the probe tip. in The stylus position detection module further includes a first mounting portion, and the stylus suspension module further includes a second mounting portion. The first mounting portion and the second mounting portion form a module mounting configuration, wherein the second mounting portion is configured to engage with the first mounting portion for mounting the stylus position detection module to the stylus suspension module. The first mounting part is located at the bottom of the stylus position detection module, and the second mounting part is located at the top of the stylus suspension module. The second mounting portion located at the top of the stylus suspension module includes a plurality of upper extension portions located at the top of the stylus suspension module, and the first mounting portion located at the bottom of the stylus position detection module includes a plurality of lower extension portions located at the bottom of the stylus position detection module, the plurality of lower extension portions being configured to be at least partially located below the plurality of upper extension portions when the second mounting portion is engaged by the first mounting portion. The module mounting configuration is located below the plurality of alignment and mounting portions when the second mounting portion is engaged by the first mounting portion; and The module mounting configuration is used to mount the stylus position detection module to the stylus suspension module as part of assembling the scanning probe.

11. The method of claim 10, wherein the shielding configuration forms an electromagnetic boundary of the varying magnetic flux generated by the field generating coil configuration.

12. The method of claim 10, wherein the shielding configuration reduces crosstalk or other interference that would otherwise be caused by at least one of the components or operations of the signal processing and control circuit module or the stylus suspension module and would otherwise affect the signal of the sensing coil of the sensor configuration if the shielding configuration were not present around the sensor configuration.

13. The method of claim 10, wherein, as part of assembling the scanning probe before the probe tip moves along the surface of the workpiece, the stylus position detection module is mounted to the stylus suspension module using the modular mounting configuration, and wherein, as implemented by the modular mounting configuration, at least a portion of the stylus position detection module is adjusted relative to the stylus suspension module in the X and Y directions to align the stylus position detection module with the stylus suspension module.

14. The method of claim 10, wherein the module mounting configuration is configured such that when the second mounting portion is engaged by the first mounting portion, the plurality of lower extension portions are slidable below the plurality of upper extension portions in the X and Y directions.

15. The method of claim 10, wherein: The module mounting configuration is configured to allow adjustment of the relative position of at least a portion of the stylus position detection module in the X and Y directions relative to the stylus suspension module for aligning the stylus position detection module with the stylus suspension module; The scanning probe also includes a module fixing configuration, which is configured to rigidly fix the first mounting portion to the second mounting portion after the stylus position detection module has been aligned with the stylus suspension module, for rigidly fixing the stylus position detection module to the stylus suspension module; and The module fixing configuration includes one or more mechanical fastening configurations for rigidly fixing the first mounting portion to the second mounting portion.

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