一种有源差分磁场探头装置
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANGHAI JIAOTONG UNIV
- Filing Date
- 2023-04-18
- Publication Date
- 2026-07-17
AI Technical Summary
Existing differential magnetic field probes suffer from positional deviations in high-density integrated circuits, leading to measurement errors and making it difficult to simultaneously achieve high spatial resolution and high sensitivity.
An active differential magnetic field probe device is designed, comprising an upper conductor layer, a first dielectric layer, an inner conductor layer, a second dielectric layer, and a lower conductor layer. It employs first and second induction loops, a linearly tapered conductor, and a differential amplifier. High sensitivity and high spatial resolution are achieved through the overlapping of the induction loops and the connection of the differential amplifier.
The spatial resolution of the magnetic field probe was improved by approximately 50.0%, and the sensitivity was increased by 30 dB, achieving simultaneous measurement with high spatial resolution and high sensitivity.
Smart Images
Figure CN116381578B_ABST