能够原位校准的视觉系统、识别控制方法及装置
By setting up a projection unit in the vision system for in-situ calibration, the problem of errors introduced during the movement of the vision system is solved, and the alignment accuracy is improved.
CN116385551BActive Publication Date: 2026-07-17BEIJING U PRECISION TECH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING U PRECISION TECH
- Filing Date
- 2023-02-07
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In existing technologies, errors introduced by vision systems during movement result in insufficient alignment accuracy, making it difficult to meet the requirements for high-precision alignment detection.
Method used
A vision system capable of in-situ calibration is adopted. By setting a projection unit on the imaging unit, optical path deviation calibration is performed on the imaging target surface using projection marks, thereby reducing the error introduced by the movement of the vision system.
Benefits of technology
It improves the alignment accuracy of the vision system, reduces the introduction of optical path deviation during movement, and enhances alignment accuracy.
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Figure CN116385551B_ABST
Abstract
本发明涉及一种能够原位校准的视觉系统、识别控制方法及装置，涉及晶圆键合校验技术领域。本发明的能够原位校准的视觉系统，包括第一成像单元和第二成像单元，两个所述成像单元能够分别识别目标对象上的识别标记，其中一个所述成像单元上还设置有投影单元，所述投影单元能够将投影标记分别投影到两个所述成像单元的成像靶面上，根据所述投影标记分别在两个所述成像单元上的成像位置信息，确定两个所述成像单元的光路偏差值。能够减少视觉系统在移动过程中引入误差，从而提高对准精度。
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