A calibration device direct current driving type parameter traceability device and method

Abstract

The application provides a kind of calibration device DC drive class parameter traceability device and method, comprising: the traceability interface of traceability board is connected to the calibration interface of calibration device, and the connection terminal of traceability board is connected to DC standard source by connection cable;The measurement uncertainty of DC standard source DC drive class parameter is less than or equal to one third of the measurement uncertainty of calibration device DC drive class parameter;DC drive class parameter includes: DC current signal and / or DC voltage signal;Control calibration device enters DC drive signal measurement mode, and control DC standard source output DC drive signal;Get the indication of DC drive signal measured by calibration device at traceability interface side, and get the standard value of DC drive signal measured by DC standard source;Compare indication and standard value, and get the measurement error of calibration device at DC drive class parameter calibration point.The application comprehensively and truly reflects the technical index of calibration device DC drive class parameter as a whole.

Description

Technical Field

[0001] This invention belongs to the field of microelectronic testing and measurement technology, and more specifically, relates to a DC-driven parameter traceability device and method for calibration. Background Technology

[0002] The DC drive parameters of an integrated circuit test system (hereinafter referred to as the test system) mainly include DC voltage drive parameters and DC current drive parameters. DC voltage drive parameters include driver voltage drive, PMU voltage drive, and DPS voltage drive parameters, while DC current drive parameters include PMU current drive and DPS current drive parameters. Currently, the calibration of DC drive parameters of the test system is mainly achieved by developing and establishing an integrated circuit test system calibration device (hereinafter referred to as the calibration device). The calibration device includes a calibration board and external instruments. During calibration, the calibration board is loaded onto the test system, and the external instruments are connected to the loading board. The external instruments are then controlled to measure various parameters of the test system, thereby completing the calibration. This method is quite effective in transferring the values ​​from the calibration device down to the test system.

[0003] However, there is currently no dedicated method for tracing the values ​​of calibration devices upwards. Typically, the external instruments that make up the calibration device are sent separately to a metrology institute for instrument-level traceability. Other components of the calibration device, such as matrix switches, various cables, interfaces, and calibration software, all affect the calibration results. These components can influence the measurement uncertainty of DC drive parameters of the calibration device by more than 20%, indicating that they are non-negligible sources of uncertainty and are the main factors affecting uncertainty. The true technical specifications of the calibration device cannot be directly obtained from the specifications of the external instruments, and the overall technical specifications of the DC drive parameters of the calibration device are not currently fully and accurately reflected in the traceability process. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this invention is to provide a traceability device and method for DC drive parameters of calibration devices, which aims to solve the problem that the overall technical indicators of DC drive parameters of existing calibration devices are not fully and accurately reflected in the process of traceability.

[0005] To achieve the above objectives, in a first aspect, the present invention provides a DC drive parameter traceability device for an integrated circuit test system calibration apparatus, comprising: a traceability board;

[0006] The traceability board includes: a connection terminal and a traceability interface, wherein the positive terminal of the connection terminal is connected to the positive terminal of the traceability interface, and the negative terminal of the connection terminal is connected to the negative terminal of the traceability interface;

[0007] The traceability interface is used to connect to the calibration interface of the calibration device, wherein the positive terminal of the traceability interface is connected to the positive terminal of the calibration interface, and the negative terminal of the traceability interface is connected to the negative terminal of the calibration interface.

[0008] The connection terminal is used to connect to a DC standard source; wherein, the positive terminal of the connection terminal is connected to the positive terminal of the DC standard source, and the negative terminal of the connection terminal is connected to the negative terminal of the DC standard source; the measurement uncertainty of the DC drive parameters of the DC standard source is less than or equal to one-third of the measurement uncertainty of the DC drive parameters of the calibration device; the DC drive parameters include: DC current signal and / or DC voltage signal;

[0009] When tracing the DC drive parameters of the calibration device, the calibration device is controlled to enter the DC drive signal measurement mode, and the DC standard source is controlled to output a DC drive signal. The DC drive signal is related to the value of the calibration point of the DC drive parameter of the calibration device. Then, the indicated value of the DC drive signal measured by the calibration device at the traceability interface side is obtained, and the standard value of the DC drive signal measured by the DC standard source is obtained. The indicated value and the standard value are compared to obtain the measurement error of the calibration device at the calibration point of the DC drive parameter.

[0010] Among them, the calibration point for DC drive parameters of the calibration device refers to: when calibrating the DC current measurement value of the calibration device, the calibration point is the DC current calibration point; when calibrating the DC voltage measurement value of the calibration device, the calibration point is the DC voltage calibration point.

[0011] In one optional example, the traceability board is a PCB board; the positive and negative terminals of the connection terminals and the traceability interface are connected through PCB traces.

[0012] In an optional example, the DC drive signal output range of the DC standard source should be able to meet the traceability requirements of the DC drive parameters of the calibration device.

[0013] Secondly, the present invention provides a method for tracing DC drive parameters of an integrated circuit test system calibration device, comprising the following steps:

[0014] Connect the calibration interface of the calibration device to the traceability interface of the traceability board, wherein the positive and negative terminals of the calibration interface of the calibration device are connected to the positive and negative terminals of the traceability interface, respectively.

[0015] Connect the DC standard source to the connection terminal of the traceability board; wherein, the positive and negative terminals of the DC standard source are connected to the positive and negative terminals of the connection terminal respectively; the positive and negative terminals of the connection terminal are connected to the positive and negative terminals of the traceability interface respectively; the measurement uncertainty of the DC drive parameters of the DC standard source is less than or equal to one-third of the measurement uncertainty of the DC drive parameters of the calibration device; the DC drive parameters include: DC current signal and / or DC voltage signal;

[0016] The control calibration device enters the DC drive signal measurement mode and controls the DC standard source to output a DC drive signal, wherein the DC drive signal is related to the value of the calibration point of the DC drive parameter of the calibration device;

[0017] The calibration device obtains the reading of the DC drive signal measured at the traceability interface side, and obtains the standard value of the DC drive signal measured by the DC standard source.

[0018] By comparing the indicated value with the standard value, the measurement error of the calibration device at the DC drive type parameter calibration point is obtained.

[0019] In an optional example, the DC drive signal output range of the DC standard source should be able to meet the traceability requirements of the DC drive parameters of the calibration device.

[0020] In summary, the technical solutions conceived by this invention have the following beneficial effects compared with the prior art:

[0021] The present invention provides a device and method for tracing DC drive parameters of a calibration device. (1) The traceability of values ​​is based entirely on the normal calibration process of the DC drive parameters of the calibration device. The external instruments, cables and calibration software of the calibration device are configured in accordance with the normal calibration process, which can reflect the technical indicators of the calibration device under actual calibration working conditions. (2) The calibration device does not need to make any software or hardware adjustments, which reduces the cost of adapting the calibration device. Attached Figure Description

[0022] Figure 1 A flowchart of a DC drive parameter tracing method for a calibration device provided in an embodiment of the present invention;

[0023] Figure 2 This is a structural diagram of a DC-driven parameter tracing device for calibration provided in an embodiment of the present invention.

[0024] Figure 3 A flowchart of another calibration device DC drive parameter tracing method provided in an embodiment of the present invention. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0027] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0028] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0029] In the description of this invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0030] In the description of this invention, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0031] To address the current lack of a dedicated method for tracing the values ​​of DC drive parameters in calibration devices, which instead relies on sending external instruments to metrology institutions for instrument-level traceability and fails to fully and accurately reflect the overall technical specifications of the calibration device during traceability, this invention proposes a method for tracing DC drive parameters in integrated circuit testing system calibration devices. This invention is entirely based on the calibration process of the calibration device. The external instruments, cables, and calibration software are configured according to the normal calibration procedure. While ensuring the accuracy of measurement results meets traceability requirements, it can reflect the technical specifications of DC drive parameters under actual calibration conditions, without requiring any hardware or software adjustments at the calibration device level.

[0032] Figure 1 A flowchart of a DC drive parameter tracing method for a calibration device provided in an embodiment of the present invention; as shown. Figure 1 As shown, it includes the following steps:

[0033] S101, connect the calibration interface of the calibration device to the traceability interface of the traceability board, wherein the positive and negative terminals of the calibration interface of the calibration device are respectively connected to the positive and negative terminals of the traceability interface;

[0034] S102, connect the DC standard source to the connection terminal of the traceability board; wherein, the positive and negative terminals of the DC standard source are connected to the positive and negative terminals of the connection terminal respectively; the positive and negative terminals of the connection terminal are connected to the positive and negative terminals of the traceability interface respectively; the measurement uncertainty of the DC drive parameters of the DC standard source is less than or equal to one-third of the measurement uncertainty of the DC drive parameters of the calibration device; the DC drive parameters include: DC current signal and / or DC voltage signal;

[0035] The connection methods for the traceability board, calibration device, and DC standard source are described in [reference needed]. Figure 2 As shown.

[0036] S103, control the calibration device to enter the DC drive signal measurement mode, and control the DC standard source to output a DC drive signal, wherein the DC drive signal is related to the value of the calibration point of the DC drive parameter of the calibration device;

[0037] S104, obtain the indicated value of the DC drive signal measured by the calibration device at the traceability interface side, and obtain the standard value of the DC drive signal measured by the DC standard source;

[0038] S105, compare the indicated value with the standard value to obtain the measurement error of the calibration device at the DC drive type parameter calibration point.

[0039] Optionally, the DC drive signal output range of the DC standard source should be able to meet the traceability requirements of the DC drive parameters of the calibration device.

[0040] In one specific embodiment, refer to Figure 2 The specific implementation of this invention is illustrated using the DC voltage drive parameter of a calibration device for an integrated circuit test system with 50 calibration interface channels as an example. The flowchart is shown below. Figure 3 :

[0041] (1) In this embodiment, the DC standard source selected is Fluke's multi-functional calibration source 5720A. It is used as a DC standard voltage source when tracing the DC voltage drive parameters of the calibration device. The function of 5720A is set to DC voltage. The two DC voltage output interfaces of 5720A are connected to the connection terminals of the traceability board through the connecting cable.

[0042] (2) Connect the traceability interface of the traceability board to the calibration interface of the calibration device. Through the above connection method, the DC standard source can be connected to the traceability board and the calibration device. The DC voltage signal output by the DC standard source can be output to the calibration interface of the calibration device through the traceability board.

[0043] (3) The front of the PCB board of the traceability board is equipped with connection terminals, which are banana plug sockets, used to connect to the DC voltage output interface of 5720A through banana plug connection wires. The front of the PCB board is also equipped with a traceability interface, which is an IDC50 socket, used to connect to the IDC50 plug of the calibration device. The connection terminals on the PCB board and the traceability interface are connected one-to-one through PCB traces according to the positive and negative poles.

[0044] (4) Control the output DC voltage parameter value of 5720A according to the traceability requirements, and record the value as the standard value of DC voltage drive parameter. Then control the calibration device to measure the DC voltage and record the value as the indicated value of DC voltage drive parameter. Compare the standard value with the indicated value to obtain the error of DC voltage drive parameter of calibration device.

[0045] (5) Finally, the DC voltage drive parameters of the calibration device can be corrected based on the above error values ​​to ensure the reliability of the calibration device values.

[0046] It is understood that the DC current drive parameter tracing method can be referred to the description in the above embodiments, and the present invention will not elaborate on it.

[0047] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A DC-driven parameter traceability device for calibration, characterized in that, include: Traceability board; The traceability board includes: a connection terminal and a traceability interface, wherein the positive terminal of the connection terminal is connected to the positive terminal of the traceability interface, and the negative terminal of the connection terminal is connected to the negative terminal of the traceability interface; The traceability interface is used to connect to the calibration interface of the calibration device, wherein the positive terminal of the traceability interface is connected to the positive terminal of the calibration interface, and the negative terminal of the traceability interface is connected to the negative terminal of the calibration interface. The connection terminal is used to connect to a DC standard source; wherein, the positive terminal of the connection terminal is connected to the positive terminal of the DC standard source, and the negative terminal of the connection terminal is connected to the negative terminal of the DC standard source; the measurement uncertainty of the DC drive parameters of the DC standard source is less than or equal to one-third of the measurement uncertainty of the DC drive parameters of the calibration device; the DC drive parameters include: DC current signal and / or DC voltage signal; When tracing the DC drive parameters of the calibration device, the calibration device is controlled to enter the DC drive signal measurement mode, and the DC standard source is controlled to output a DC drive signal. The DC drive signal is related to the value of the calibration point of the DC drive parameter of the calibration device. Then, the indicated value of the DC drive signal measured by the calibration device at the traceability interface side is obtained, and the standard value of the DC drive signal measured by the DC standard source is obtained. The indicated value and the standard value are compared to obtain the measurement error of the calibration device at the calibration point of the DC drive parameter. The traceability of the DC drive parameter is based entirely on the normal operation calibration process of the calibration device. The external instruments, cables and calibration software of the calibration device are all configured according to the normal calibration process. The calibration device does not need to be adjusted in any software or hardware, so that the measurement error can reflect the overall technical indicators of the calibration device under actual calibration conditions, including the influence of matrix switches, cables, interfaces and calibration software.

2. The apparatus according to claim 1, characterized in that, The traceability board is a PCB board; the positive and negative terminals of the connection terminals and the traceability interface are connected through PCB traces.

3. The apparatus according to claim 1, characterized in that, The output range of the DC drive signal of the DC standard source should be able to meet the traceability requirements of the DC drive parameters of the calibration device.

4. A method for tracing DC drive parameters of a calibration device, characterized in that, Includes the following steps: Connect the calibration interface of the calibration device to the traceability interface of the traceability board, wherein the positive and negative terminals of the calibration interface of the calibration device are connected to the positive and negative terminals of the traceability interface, respectively. Connect the DC standard source to the connection terminal of the traceability board; wherein, the positive and negative terminals of the DC standard source are connected to the positive and negative terminals of the connection terminal respectively; the positive and negative terminals of the connection terminal are connected to the positive and negative terminals of the traceability interface respectively; the measurement uncertainty of the DC drive parameters of the DC standard source is less than or equal to one-third of the measurement uncertainty of the DC drive parameters of the calibration device; the DC drive parameters include: DC current signal and / or DC voltage signal; The control calibration device enters the DC drive signal measurement mode and controls the DC standard source to output a DC drive signal, wherein the DC drive signal is related to the value of the calibration point of the DC drive parameter of the calibration device; The calibration device obtains the reading of the DC drive signal measured at the traceability interface side, and obtains the standard value of the DC drive signal measured by the DC standard source. By comparing the indicated value with the standard value, the measurement error of the calibration device at the calibration point of DC drive type parameters is obtained; The traceability of DC drive parameters is based entirely on the normal operation calibration process of the calibration device. The external instruments, cables, and calibration software of the calibration device are all configured according to the normal calibration process. The calibration device does not require any software or hardware adjustments, so that the measurement error can reflect the overall technical indicators of the calibration device under actual calibration conditions, including the influence of matrix switches, cables, interfaces, and calibration software.

5. The method according to claim 4, characterized in that, The output range of the DC drive signal of the DC standard source should be able to meet the traceability requirements of the DC drive parameters of the calibration device.

Images