Optical modulation device for optical module

Abstract

This application discloses an optical adjustment device for an optical module. The device includes an adjustment module and a control module. The adjustment module is used to adjust the position of the optical device relative to the optical element. The control module is used to determine whether the position of the optical device and the optical element meets the preset conditions of at least one of the previous N adjustment processes after at least one adjustment process is completed and the position of the optical device and the optical element is located. If the conditions are met, the control module is controlled to enter the next adjustment process; otherwise, the control module is controlled to return to the adjustment process that does not meet the preset conditions. This application adds verification of the preset conditions of one or several previous adjustment processes before entering the next adjustment process. Only if the verification is successful will the next adjustment process be entered. This can improve the positioning accuracy of the optical device and the optical element in various dimensions and improve the imaging quality of the optical module.

Description

Technical Field

[0001] This application relates to the field of optical calibration technology, and in particular to an optical module optical adjustment device. Background Technology

[0002] An optical module is a general term for structures capable of emitting light signals or receiving echo light signals; for example, an optical module includes a light emitting module and a light receiving module. A light emitting module includes an emitting chip (optical device) and an emitting lens (optical element). The emitting chip generates the emitted light signal, and the emitting lens receives the light signal emitted by the emitting chip and emits a detection light signal to the detection area. A light receiving module includes a receiving lens (optical element) and a photosensitive device (optical device). The receiving lens receives the echo light signal reflected by the subject and transmits the echo light signal to the photosensitive device, allowing the photosensitive device to obtain relevant information about the subject; this relevant information can include the subject's distance, orientation, height, speed, attitude, and even shape.

[0003] In related technologies, inaccurate positioning of optical devices and optical elements in optical modules leads to poor imaging quality, which in turn affects the ranging performance of optical modules. Summary of the Invention

[0004] This application provides an optical module light adjustment device to solve the problem in related technologies where the imaging quality of the optical module is poor due to inaccurate positioning of optical elements and optical devices.

[0005] This application provides a light adjustment device for an optical module, the optical module including optical devices and optical elements, the light adjustment device comprising:

[0006] An adjustment module is connected to at least one of the optical device and the optical element, and electrically connected to a control module, for sequentially adjusting the relative positions of the optical device and the optical element in six degrees of freedom under the control of the control module;

[0007] The control module is used to acquire multiple calibration parameters of a calibration plate corresponding to the multiple relative positions of the optical device and the optical element in the current degree of freedom during each adjustment process of the adjustment module, and to position the optical device and the optical element at a relative position where the calibration parameters meet the current preset conditions through the adjustment module.

[0008] The control module is also used to determine, before the next adjustment process, whether the calibration parameters corresponding to at least one adjustment process in the previous N adjustment processes still meet their preset conditions. If yes, the control module is controlled to enter the next adjustment process; if no, the control module is controlled to return to the adjustment process where the preset conditions are not met. N is a positive integer and N≥1.

[0009] In one exemplary embodiment, the control module is configured to control the adjustment module to adjust the relative positions of the optical device and the optical element in the three degrees of freedom in the order of a first degree of freedom, a second degree of freedom, and a third degree of freedom; the planes containing the first and second degrees of freedom are perpendicular to the optical axis of the optical element; the third degree of freedom is parallel to the optical axis of the optical element; the control module is further configured to control the adjustment module to adjust the relative positions of the optical device and the optical element in the three degrees of rotation after the adjustment module has completed the relative position adjustment of the optical device and the optical element in the three degrees of freedom.

[0010] Specifically, the control module controls the adjustment module to adjust the relative positions of the optical device and the optical element in the three rotational degrees of freedom in the order of the third rotational degree of freedom, the first rotational degree of freedom, and the second rotational degree of freedom or the third rotational degree of freedom, the second rotational degree of freedom, and the first rotational degree of freedom, respectively; the first rotational degree of freedom, the second rotational degree of freedom, and the third rotational degree of freedom are the rotational degrees of freedom about the first translational degree of freedom, the second translational degree of freedom, and the third translational degree of freedom, respectively.

[0011] In another exemplary embodiment, the control module is further configured to adjust the relative position of the optical device and the optical element again along at least one of the first, second, and third degrees of freedom of movement after the adjustment module has adjusted the relative position of the optical device and the optical element along the three rotational degrees of freedom.

[0012] Specifically, the calibration plate is arranged with its surface perpendicular to the optical axis of the optical element; a plurality of first patterns and a plurality of second patterns are provided on the side of the calibration plate near the optical element along a direction parallel to the first and second degrees of freedom of movement, and the first and second patterns are alternately arranged; the reflectivity of the first pattern is greater than that of the second pattern.

[0013] Furthermore, the calibration parameters acquired by the control module include:

[0014] The reflectance parameter of the first pattern includes at least one of the reflectance of the outline of the first pattern and the difference in reflectance between the outline of the first pattern and the center point.

[0015] And / or, the reflectance parameter of the second pattern, which includes the reflectance difference between the outline of the second pattern and the center point;

[0016] And / or, a reflectance difference parameter between the first pattern and the second pattern, wherein the reflectance difference parameter between the first pattern and the second pattern includes at least one of the reflectance contrast difference between the first pattern and the second pattern, and the reflectance grayscale difference between the outline of the first pattern and the outline of the second pattern.

[0017] Specifically, when the adjustment module adjusts the relative position of the optical device and the optical element in the first degree of freedom of movement, the calibration parameters obtained by the control module include a first type of calibration parameter: the reflectance of at least one second contour line of the first pattern located in the central region of the calibration plate, and a seventh type of calibration parameter: at least one of the reflectance difference between the second contour line of the first pattern and its center point and / or the reflectance difference between the fourth contour line of the second pattern and its center point.

[0018] And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the second degree of freedom of movement, the calibration parameters obtained by the control module include a second type of calibration parameter: the reflectance of at least one first contour line of the first pattern located in the central region of the calibration plate, and an eighth type of calibration parameter: at least one of the reflectance difference between the first contour line of the first pattern and its center point and / or the reflectance difference between the third contour line of the second pattern and its center point;

[0019] And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the third degree of freedom of movement, the calibration parameters obtained by the control module include the reflectance contrast difference of four patterns located in the central region of the calibration plate and adjacent to each other.

[0020] And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the third rotational degree of freedom, the calibration parameters obtained by the control module include the grayscale difference of reflectance between the first pattern and the second pattern located on both sides of the first central axis of the calibration plate and / or the grayscale difference of reflectance between the first pattern and the second pattern located on both sides of the second central axis of the calibration plate.

[0021] And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the second rotational degree of freedom, the calibration parameters obtained by the control module include the reflectance grayscale difference between the second contour line of the first pattern and the fourth contour line of the second pattern, which are located on both sides of the first central axis of the calibration plate and close to the boundary of the calibration plate.

[0022] And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the first rotational degree of freedom, the calibration parameters obtained by the control module include the reflectance grayscale difference between the first contour line of the first pattern and the third contour line of the second pattern, which are located on both sides of the second central axis of the calibration plate and close to the boundary of the calibration plate.

[0023] Furthermore, the control module is also used to determine whether the obtained calibration board graphic information matches the preset calibration board graphic information after the adjustment module completes the relative position adjustment of the optical device and the optical element in six degrees of freedom. If yes, the control of the adjustment module ends; if no, the adjustment module returns to the first step of the adjustment process.

[0024] Furthermore, before the adjustment module adjusts the relative position of the optical device and the optical element, under the control of the control module, the position of the optical element relative to the calibration plate is adjusted so that the optical axis of the optical element is perpendicular to the calibration plate.

[0025] In one exemplary embodiment, when the adjustment module adjusts the relative positions of the optical device and the optical element in six degrees of freedom, the optical element is fixed, and the relative positions of the optical device and the optical element in six degrees of freedom are adjusted by adjusting the position of the optical device in six degrees of freedom.

[0026] In one exemplary embodiment, the optical module includes at least one light receiving module, which includes a receiving lens and a photosensitive device. The receiving lens is an optical element of the light receiving module, used to receive light signals reflected from the calibration plate. The photosensitive device is an optical component of the light receiving module, used to receive light signals output from the receiving lens, the light signals carrying information about calibration parameters. The control module is electrically connected to the photosensitive device, used to receive electrical signals output from the photosensitive device and obtain the required calibration parameters.

[0027] The adjustment module is used to adjust the relative positions of the photosensitive device and the receiving lens in six degrees of freedom in sequence under the control of the control module.

[0028] Furthermore, the optical module further includes at least one light emitting module, which includes a light-emitting device and a light-emitting lens; the light-emitting device is the optical component of the light emitting module and is used to emit light signals; the light-emitting lens is the optical element of the light emitting module and is used to receive the light signals emitted by the light-emitting device and emit light signals to the calibration plate; the adjustment module is also used to adjust the relative positions of the light-emitting device and the light-emitting lens in six degrees of freedom under the control of the control module.

[0029] When the adjustment module adjusts the relative positions of the photosensitive device and the receiving lens in six degrees of freedom, it fixes the light emitting module; when the adjustment module adjusts the relative positions of the light emitting device and the emitting lens in six degrees of freedom, it fixes the light receiving module.

[0030] Furthermore, the number of light emitting modules is two, and the combination of the emission fields of the two emitting lenses of the two light emitting modules matches the receiving field of view of the receiving lens of the light receiving module; the adjustment module adjusts the position of the light-emitting device and the emitting lens in six degrees of freedom, with the light emitting module as the unit.

[0031] When the adjustment module adjusts the relative positions of the light-emitting device and the emitting lens of one light-emitting module in six degrees of freedom, it fixes the light-receiving module and the other light-emitting module; when the adjustment module adjusts the relative positions of the photosensitive device and the receiving lens in six degrees of freedom, it fixes both light-emitting modules.

[0032] In another exemplary embodiment, the optical module includes at least one light emitting module, which includes a light-emitting device and a emitting lens; the light-emitting device is the optical element of the light emitting module and is used to emit light signals; the emitting lens is the optical element of the light emitting module and is used to receive the light signals emitted by the light-emitting device and emit light signals to the calibration plate; the adjustment module is further used to adjust the relative positions of the light-emitting device and the emitting lens in six degrees of freedom under the control of the control module.

[0033] The optical emitting module acquires signals carrying calibration parameters during its adjustment process through a signal acquisition module, and the signal acquisition module sends the signals carrying calibration parameters to the control module.

[0034] Furthermore, the light adjustment device also emits a light signal to the calibration plate through a supplementary light source to ensure that the calibration plate receives uniform light.

[0035] The optical adjustment device of this application, after completing at least one adjustment process and positioning the optical devices and optical elements, determines whether the positions of the optical devices and optical elements at this time meet the preset conditions of at least one of the previous N adjustment processes. If they do, the adjustment module is controlled to enter the next adjustment process; otherwise, the adjustment module is controlled to return to the adjustment process that does not meet the preset conditions. That is, before entering the next adjustment process from the current adjustment process, the embodiments of this application add a verification of the preset conditions of one or more previous adjustment processes of the current adjustment process. If the verification is successful, the next adjustment process is entered; otherwise, the adjustment process that does not meet the preset conditions is returned to. In this way, the positioning accuracy of the optical devices and optical elements in various dimensions can be improved, the imaging quality of the optical module can be improved, and the ranging performance of the optical module can be improved. Furthermore, the light adjustment device provided in this application uses the reflectivity of the pattern outline, the contrast difference of reflectivity of different patterns, the grayscale difference of reflectivity of different patterns, the grayscale difference of reflectivity of the outline of different patterns, and the difference of reflectivity between the outline of different patterns and their own center point as calibration parameters for each adjustment process. This can solve the problem of visual error caused by the human eye. Moreover, it is suitable for the alignment of structures such as LiDAR with large individual pixel size and the smallest resolvable distance offset with pixel precision, and has a wide range of applications. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1 This is a diagram showing the usage state of the light-adjusting device provided in the embodiments of this application;

[0038] Figure 2 This is a schematic diagram of a pattern on the calibration plate in the light-adjusting device provided in this application embodiment;

[0039] Figure 3 This is another structural schematic diagram of the pattern on the calibration plate in the light adjustment device provided in this application embodiment;

[0040] Figure 4 yes Figure 5 A schematic diagram of the first pattern in the pattern on the calibration plate shown;

[0041] Figure 5 yes Figure 5 A schematic diagram of the second pattern in the pattern on the calibration plate shown;

[0042] Figure 6 This is a schematic diagram of the calibration parameters in the panel image corresponding to the first adjustment process of the light adjustment device provided in this application embodiment;

[0043] Figure 7 This is a schematic diagram of the calibration parameters in the panel image corresponding to the second step adjustment process of the light adjustment device provided in this application embodiment;

[0044] Figure 8 This is a schematic diagram of the calibration parameters in the panel image corresponding to the third step of the adjustment process of the light adjustment device provided in this application embodiment;

[0045] Figure 9 This is a schematic diagram of the calibration parameters in the panel image corresponding to the fourth step of the light adjustment process of the light adjustment device provided in this application embodiment;

[0046] Figure 10 This is a schematic diagram of the calibration parameters in the panel image corresponding to the fifth step of the adjustment process of the light adjustment device provided in this application embodiment;

[0047] Figure 11 This is a schematic diagram of the calibration parameters in the plate image corresponding to the sixth step of the light adjustment device provided in this application embodiment;

[0048] Figure 12 This is a schematic diagram of the calibration parameters in the panel image corresponding to the seventh step of the light adjustment device provided in this application embodiment;

[0049] Figure 13 This is a schematic diagram of the calibration parameters in the panel image corresponding to the eighth step of the adjustment process of the light adjustment device provided in this application embodiment;

[0050] Figure 14 This is a flowchart of the light modulation process of the light modulation device provided in the embodiments of this application;

[0051] Figure 15 This is a structural diagram of the calibration plate and the supplementary light source used in the light adjustment device provided in the embodiments of this application when they are aligned;

[0052] Figure 16 This is a structural diagram of the calibration plate used in the optical adjustment device provided in this application embodiment when the optical components in the optical module are aligned;

[0053] Figure 17 This is a first structural diagram of the optical module that is adjusted in the light-adjusting device provided in the embodiments of this application;

[0054] Figure 18 This is a second structural diagram of the optical module that is adjusted in the light-adjusting device provided in the embodiments of this application;

[0055] Figure 19This is a third structural diagram of the optical module that is adjusted in the light-adjusting device provided in the embodiments of this application;

[0056] Figure 20 This is a fourth structural diagram of the optical module that is adjusted in the light-adjusting device provided in the embodiments of this application. Detailed Implementation

[0057] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0058] In the following description, when referring to the accompanying drawings, the same numbers in different drawings denote the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0059] In a first aspect, embodiments of this application provide an optical adjustment device 10 for an optical module 20. The optical module 20 may include an optical device 21 and an optical element 22. The optical device 21 can be used to transmit optical signals or receive echo optical signals, and the optical element 22 can be located on the transmission path of the transmitted optical signal or on the transmission path of the echo optical signal. The optical adjustment device 10 of this application embodiment is mainly used for the calibration of the optical device 21 and the optical element 22 in the optical module 20. The optical module 20 can be used in any electronic device such as lidar, mobile phones, and computers that can generate transmitted optical signals and / or receive echo optical signals; this application embodiment does not limit this use.

[0060] Specifically, please refer to Figure 1 The light adjustment device 10 includes an adjustment module 11 and a control module 12. The adjustment module 11 is connected to at least one of the optical device 21 and the optical element 22, and is electrically connected to the control module 12. Under the control of the control module 12, the adjustment module 11 drives one of the optical device 21 and the optical element 22 to move relative to the other. In an exemplary embodiment, the control module 12 controls the motion parameters of the adjustment module 11 to drive one of the optical device 21 and the optical element 22 to move relative to the other, thereby adjusting the relative position of the optical device 21 and the optical element 22. The motion parameters include the direction of motion and the amplitude of motion.

[0061] Furthermore, the adjustment module 11 may move only the optical device 21 to achieve the movement of the optical device 21 relative to the optical element 22, or it may move only the optical element 22 to achieve the movement of the optical device 21 relative to the optical element 22, or it may move both the optical device 21 and the optical element 22 to achieve the movement of the optical device 21 relative to the optical element 22. This embodiment does not limit the scope of the application. The following description will exemplify the situation where the adjustment module 11 moves only the optical device 21.

[0062] Preferably, when the adjustment module 11 provided in this application adjusts the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom, the optical element 22 is kept fixed. By adjusting the position of the optical device 21 in six degrees of freedom, the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom are adjusted. Compared with adjusting the optical element 22, the operation is simpler.

[0063] In this embodiment, the adjustment module 11 adjusts the relative position of the optical device 21 and the optical element 22 in six degrees of freedom. The object has six degrees of freedom in space, namely, the degree of freedom of movement along the three rectangular coordinate axes x, y, and z, and the degree of freedom of rotation about these three coordinate axes. Specifically, the six degrees of freedom include a first degree of movement, a second degree of movement, and a third degree of movement, as well as a first degree of rotational freedom, a second degree of rotational freedom, and a third degree of rotation about the first degree of movement, the second degree of movement, and the third degree of movement, respectively.

[0064] In one example, the first degree of translation is x-direction, the second degree of translation is y, and the third degree of translation is z-direction; correspondingly, the first degree of rotation is pitch (rotation about x-direction), the second degree of rotation is yaw (rotation about y-direction), and the third degree of rotation is roll (rotation about z-direction); in another example, the first degree of translation is y-direction, the second degree of translation is x, and the third degree of translation is z-direction; correspondingly, the first degree of rotation is yaw (rotation about y-direction), the second degree of rotation is pitch (rotation about x-direction), and the third degree of rotation is roll (rotation about z-direction).

[0065] Furthermore, the control module 12 is also used to obtain multiple calibration parameters of the calibration plate 30 corresponding to the multiple relative positions of the optical device 21 and the optical element 22 in the current degree of freedom during each adjustment process of the adjustment module 11, and to position the optical device 21 and the optical element 22 at the relative positions where the calibration parameters meet the current preset conditions through the adjustment module 11.

[0066] Furthermore, the control module 12 is also used to determine, after the current adjustment process of the adjustment module 11, whether the calibration parameters corresponding to at least one adjustment process in the previous N adjustment processes still meet their preset conditions. If yes, the control module 11 enters the next adjustment process; if no, the control module 11 returns to the adjustment process where the preset conditions are not met. N is a positive integer and N≥1.

[0067] Since the positions of optical device 21 and optical element 22 may not necessarily meet the preset conditions of one or more steps in the previous adjustment process after the current adjustment process is completed and their positions are positioned, please refer to [the relevant documentation]. Figure 14 In this embodiment, the control module 12 is further configured to, after at least one adjustment process is completed and the relative positions of the optical device 21 and optical element 22 are positioned such that the calibration parameters meet the current preset conditions, determine whether the relative positions of the optical device 21 and optical element 22 at this time meet the preset conditions of at least one of the previous N adjustment processes. If they do, the control module 11 is instructed to proceed to the next adjustment process; otherwise, the control module 11 is instructed to return to the adjustment process that does not meet the preset conditions. That is, in this embodiment, before proceeding from the current adjustment process to the next adjustment process, the preset conditions of one or more previous adjustment processes are verified. If the verification is successful, the next adjustment process is initiated; otherwise, the process returns to the adjustment process that does not meet the preset conditions. This improves the positioning accuracy of the optical device 21 and optical element 22 in various dimensions and enhances the imaging quality of the optical module 20.

[0068] Reference Figures 1 to 3 As shown, in this embodiment, the optical axis of the optical element 22 is set parallel to the z-direction of freedom of movement, that is, the optical axis of the optical element 22 is perpendicular to the plane containing the x-direction and y-direction of freedom of movement; the calibration plate 30 is set with its surface perpendicular to the optical axis of the optical element 22, that is, the surface of the calibration plate 30 is also perpendicular to the optical axis of the optical element 22; the calibration plate 30 has a surface pattern 31 on the side of the calibration plate 30 closest to the optical element 22, and the aforementioned obtained surface image of the calibration plate 30 corresponds to the surface pattern on the calibration plate, including information about the surface pattern 31. For example, the surface pattern 31 includes a first pattern 311 and a second pattern 312, then the obtained surface image also includes the features of the first pattern 311 and / or the features of the second pattern 312. By obtaining the surface image corresponding to the surface pattern 31, multiple calibration parameters of the surface pattern 31 corresponding to multiple relative positions in each adjustment step can be known. The shape and size of the plate pattern 31 can be determined based on the field of view of the optical element 22 and the distance between each lens in the optical element 22, etc., and the embodiments of this application do not limit this.

[0069] Specifically, the calibration plate 30 has a pattern 31 on its surface, which includes a plurality of first patterns 311 and a plurality of second patterns 312, with the first patterns 311 and the second patterns 312 alternating. The first patterns 311 and the second patterns 312 are alternating in the x-direction degree of freedom, and / or, the first patterns 311 and the second patterns 312 are alternating in the y-direction degree of freedom; preferably, the first patterns 311 and the second patterns 312 are alternating in both the x-direction and y-direction degrees of freedom, which facilitates the alignment of the optical device 21 and the optical element 22 in six degrees of freedom.

[0070] Optionally, both the first pattern 311 and the second pattern 312 are approximately quadrilateral structures; each of the four outlines of each first pattern 311 can be connected to one outline of a second pattern 312, and each of the four outlines of each second pattern 312 can be connected to one outline of a first pattern 311.

[0071] Optionally, please refer to Figure 4 The outline of the first pattern 311 includes a first outline 3111 that moves along a degree of freedom parallel to the x-direction and a second outline 3112 that moves along a degree of freedom parallel to the y-direction. See also... Figure 5 The contour lines of the second pattern 312 include a third contour line 3121 with a degree of freedom of movement parallel to the x-direction and a fourth contour line 3122 with a degree of freedom of movement parallel to the y-direction. The first pattern 311 can be approximately square in structure, and the second pattern 312 can also be approximately square in structure. In this case, each first pattern 311 has two opposing first contour lines 3111 and two opposing second contour lines 3112, and each second pattern 312 has two opposing third contour lines 3121 and two opposing fourth contour lines 3122. Each contour line of the first pattern 311 can be equal to each contour line of the second pattern 312.

[0072] Furthermore, the reflectivity of the first pattern 311 is greater than that of the second pattern 312. Designing the reflectivity of the first pattern 311 and the second pattern 312 to be different makes it easier to use the reflectivity of the pattern as a calibration parameter for judging at least one adjustment process of the optical device 21 and the optical element 22 in each adjustment process. Among all colors, white has the highest reflectivity of light, and the difference in reflectivity between white and black is the largest, which makes it easier to judge.

[0073] Reference Figures 1 to 3As shown, in this embodiment, the calibration plate 30 adopts a black and white checkerboard pattern. The surface of the checkerboard pattern is provided with multiple white checkerboard patterns and multiple black checkerboard patterns along the two directions parallel to the x-direction and y-direction degrees of freedom of movement, and the white checkerboard patterns and black checkerboard patterns are arranged alternately. Among them, the white checkerboard patterns correspond to the first pattern 311, and the black checkerboard patterns correspond to the second pattern 312. It can be understood that the reflectivity of the white checkerboard patterns is greater than that of the black checkerboard patterns.

[0074] like Figure 2 As shown, in one exemplary embodiment, the calibration board 30 employs a generally rectangular checkerboard pattern; as Figure 3 As shown, in another exemplary scheme, the calibration board 30 adopts an anti-distortion checkerboard pattern; as for whether the calibration board 30 chooses a rectangular checkerboard pattern or an anti-distortion checkerboard pattern, it can be flexibly selected according to actual needs during the actual light adjustment process.

[0075] Furthermore, the specific shape of the anti-distortion checkerboard pattern is related to the specific structure of the optical element 22. Different optical elements 22 can be selected to create corresponding anti-distortion checkerboard patterns. Specifically, the optical element 22 and the anti-distortion checkerboard pattern satisfy the following condition: the degree of distortion of light passing through the optical element 22 is exactly the opposite of the degree of distortion presented by the anti-distortion checkerboard pattern. Thus, the image formed after light passes through the optical element 22 can be approximately a regular pattern (e.g., a regular checkerboard pattern), which helps reduce the computational burden on the subsequent system and improves system processing efficiency. It should be noted that the pattern on the calibration plate 30 in this embodiment is not limited to rectangular checkerboard patterns and anti-distortion checkerboard patterns; other graphics can also be used on the calibration plate 30, and this embodiment does not impose any limitations on this. For ease of description, the following will use a 10*4 matrix arrangement of checkerboard patterns 31 as an example for detailed explanation.

[0076] In this embodiment, the control module 12 acquires electrical signals related to the light signals reflected by the calibration plate 30, and forms a plate surface image (e.g., ...) corresponding to the plate surface pattern 31 on the calibration plate 30. Figures 6 to 13 (as shown); At the same time, the control module can know the calibration parameters corresponding to the plate pattern 31 of the calibration plate 30 on the plate image based on the electrical signal related to the light signal reflected by the calibration plate 30; Specifically, the control module 12 displays the plate image of the plate pattern 31 and the calibration parameters corresponding to the plate pattern 31 (for example, the reflectivity of a specific pattern outline) through a display module. By judging the calibration parameters of the plate pattern 31 at different relative positions, the plate image of the plate pattern 31 that meets the preset conditions of the current adjustment process can be found, and the optical device 21 and the optical element 22 can be positioned at the relative position of the plate image that meets the preset conditions.

[0077] In this embodiment, the control module 12 can be used to obtain multiple calibration parameters corresponding to multiple relative positions of the plate pattern 31 by acquiring plate images of the plate pattern 31 at multiple positions during each adjustment process, so as to find the plate image corresponding to the calibration parameters that meet the preset conditions, and the control adjustment module 11 positions the optical device 21 and the optical element 22 at the relative positions corresponding to the plate image that meets the preset conditions.

[0078] Furthermore, during each adjustment step of the adjustment module 11, when the adjustment module 11 adjusts the optical device 21 and the optical element 22 to multiple relative positions in the current degree of freedom, the calibration parameters of the calibration plate 30 obtained by the control module 12 are related to the reflectivity of the first pattern 311 and the reflectivity parameters of the second pattern 312. Specifically, the control module 12 determines the relative position corresponding to the reflectivity parameter that meets the preset conditions among the multiple reflectivity parameters corresponding to the multiple relative positions by obtaining the reflectivity parameters of the pattern 31 on the surface of the calibration plate 30 when the optical device 21 and the optical element 22 are adjusted to multiple relative positions, and positions the optical device 21 and the optical element 22 at the relative position where the reflectivity parameters meet the current preset conditions through the adjustment module 11.

[0079] Specifically, during the multi-step adjustment process of the adjustment module 11, the calibration parameters acquired by the control module 12 include:

[0080] The reflectance parameters of the first pattern 311, wherein the reflectance parameters of the first pattern 311 include the reflectance of the outline of the first pattern 312 (e.g., Figure 6 (as shown in Figure 7) and the reflectance difference between the outline of the first pattern 312 and the center point (as shown in Figure 7) Figure 12 At least one of the following (as shown in Figure 13);

[0081] And / or, the reflectance parameter of the second pattern 312, wherein the reflectance parameter of the second pattern includes the reflectance difference between the outline of the second pattern and the center point (e.g., Figure 12 (as shown in Figure 13);

[0082] And / or, the reflectance difference parameter between the first pattern 311 and the second pattern 312, wherein the reflectance difference parameter between the first pattern 311 and the second pattern 312 includes the reflectance contrast difference between the first pattern 311 and the second pattern 312 (e.g., Figure 8 As shown), and the difference in reflectance grayscale between the outline of the first pattern 311 and the outline of the second pattern 312 (as shown). Figure 9 At least one of (shown in 10, 11).

[0083] Optionally, the preset conditions for each adjustment process include at least one of the following: the reflectance of the outline of the first pattern 311, the contrast difference in reflectance between the first pattern 311 and the second pattern 312, the grayscale difference in reflectance between the first pattern 311 and the second pattern 312, the grayscale difference in reflectance between the outline of the first pattern 311 and the outline of the second pattern 312, the reflectance difference between the outline of the first pattern 311 and the center point of the first pattern 311, and the reflectance difference between the outline of the second pattern 312 and the center point of the second pattern 312. Using the reflectance of the pattern outline, the contrast difference in reflectance between different patterns, the grayscale difference in reflectance between different patterns, the grayscale difference in reflectance between the outline of different patterns, and the reflectance difference between the outline of different patterns and their own center point as calibration parameters for each adjustment process can solve the problem of visual errors caused by the human eye; and it is applicable to the alignment of structures such as LiDAR with large individual pixel sizes and minimum resolvable distance offsets of pixel precision, thus having a wide range of applications.

[0084] Specifically, during each adjustment process of the adjustment module 11, as the adjustment module 11 adjusts the optical device 21 and the optical element 22 to multiple relative positions in the current degree of freedom, the multiple reflectivity parameters or reflectivity difference values ​​of the calibration plate 30 obtained by the control module 12 reach their maximum values ​​to meet the preset conditions. The adjustment module 11 then positions the optical device 21 and the optical element 22 at the relative positions of the reflectivity parameters or reflectivity difference values.

[0085] More specifically, when the adjustment module 11 adjusts the relative position of the optical device 21 and the optical element 22 in the x-direction, the calibration parameters acquired by the control module 12 include at least one of a first calibration parameter and a seventh calibration parameter; the first calibration parameter is: the reflectance (e.g., the reflectance of at least one second contour line of the first pattern 311 located in the central region of the calibration plate 30 along the y-direction) of the seventh calibration parameter. Figure 6 (as shown); the seventh calibration parameter is: the reflectance difference between the second contour line of the first pattern 311 and its center point and / or the reflectance difference between the fourth contour line of the second pattern 312 (the contour line of the second pattern 312 along the y direction) and its center point (as shown). Figure 12 (As shown).

[0086] More specifically, when the adjustment module 11 adjusts the relative position of the optical device 21 and the optical element 22 in the y-direction, the calibration parameters acquired by the control module 12 include at least one of a second type of calibration parameter and an eighth type of calibration parameter; the second type of calibration parameter is: the reflectance (e.g., the reflectance of at least one first contour line of the first pattern 311 located in the central region of the calibration plate 30 along the x-direction) of the first pattern 311. Figure 7(as shown); the eighth calibration parameter is: the difference in reflectance between the first contour line of the first pattern 311 and its center point and / or the difference in reflectance between the third contour line of the second pattern 312 (the contour line of the second pattern 312 along the x-direction) and its center point (as shown). Figure 13 (As shown).

[0087] More specifically, when the adjustment module 11 adjusts the relative position of the optical device 21 and the optical element 22 in the z-direction, the calibration parameters acquired by the control module 12 include a third type of calibration parameter: the reflectance contrast difference of four adjacent patterns (including two first patterns 311 and two second patterns 312) located in the central region of the calibration plate 30 (e.g., Figure 8 (As shown).

[0088] More specifically, when the adjustment module 11 adjusts the relative position of the optical device 21 and the optical element 22 in the roll rotation degree of freedom, the calibration parameters acquired by the control module 12 include a fourth type of calibration parameter: the grayscale difference of reflectance between the first pattern 311 and the second pattern 312 located on both sides of the first central axis L1 (along the x direction) of the calibration plate 30 and / or the grayscale difference of reflectance between the first pattern 311 and the second pattern 312 located on both sides of the second central axis L2 (along the y direction) of the calibration plate 30 (e.g. Figure 9 (As shown).

[0089] More specifically, when the adjustment module 11 adjusts the relative position of the optical device 21 and the optical element 22 in the pitch rotation degree of freedom, the calibration parameters acquired by the control module 12 include a fifth type of calibration parameter: the reflectance grayscale difference between the first contour line of the first pattern 311 and the third contour line of the second pattern 312, located on both sides of the second central axis l2 of the calibration plate 30 and close to the boundary of the calibration plate 30 (e.g., Figure 10 (As shown).

[0090] More specifically, when the adjustment module 11 adjusts the relative position of the optical device and the optical element in the yaw rotation degree of freedom, the calibration parameters acquired by the control module include a sixth type of calibration parameter: the reflectance grayscale difference between the second contour line of the first pattern and the fourth contour line of the second pattern, located on both sides of the first central axis of the calibration plate and close to the boundary of the calibration plate (e.g., ...). Figure 11 (As shown).

[0091] In one exemplary embodiment, the control module 11 controls the adjustment module 12 to adjust the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom according to the steps of the first degree of freedom, the second degree of freedom, the third degree of freedom, the third degree of rotation, the first degree of rotation, and the second degree of rotation, that is, to perform coarse adjustment of the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom.

[0092] The plane containing the first and second degrees of freedom is perpendicular to the optical axis of the optical element; the third degree of freedom is parallel to the optical axis of the optical element.

[0093] Accordingly, the control module 11 adjusts the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom and reasonably limits the adjustment sequence of the six degrees of freedom, which facilitates the improvement of the alignment speed of the optical device 21 and the optical element 22 and improves the light modulation efficiency.

[0094] Furthermore, after each adjustment process is completed, the control module 12 determines whether the positions of the optical device 21 and the optical element 22 after the current adjustment process meet the preset conditions of at least one of the previous N adjustment processes. If they meet the conditions, the control module 11 is controlled to enter the next adjustment process; otherwise, the control module 11 returns to the adjustment process that does not meet the preset conditions.

[0095] In another exemplary scheme, the control module 11 is used to control the adjustment module 12 to adjust the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom according to the steps of the first degree of freedom of movement, the second degree of freedom of movement, the third degree of freedom of movement, the third degree of freedom of rotation, the first degree of freedom of rotation, the second degree of freedom of rotation, the first degree of freedom of movement, and the second degree of freedom of movement. That is, after coarsely adjusting the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom, finely adjusting the relative positions of the optical device 21 and the optical element 22 in the first degree of freedom of movement and the second degree of freedom of movement.

[0096] Correspondingly, after the adjustment module 11 completes the relative position adjustment of the optical device 21 and the optical element 22 in six degrees of freedom, it adds the adjustment process along the first degree of freedom and the second degree of freedom again, which can improve the alignment accuracy of the optical device 21 and the optical element 22.

[0097] Furthermore, after each adjustment process is completed, the control module 12 determines whether the positions of the optical device 21 and the optical element 22 after the current adjustment process meet the preset conditions of at least one of the previous N adjustment processes. If they meet the conditions, the control module 11 is controlled to enter the next adjustment process; otherwise, the control module 11 returns to the adjustment process that does not meet the preset conditions.

[0098] In other exemplary solutions, the control module 11 is used to control the adjustment module 12 to adjust the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom according to the steps of the first degree of motion freedom, the second degree of motion freedom, the third degree of motion freedom, the third degree of rotation freedom, the first degree of rotation freedom, the second degree of rotation freedom, the second degree of motion freedom, the first degree of motion freedom, and the third degree of motion freedom. That is, after coarsely adjusting the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom, finely adjusting the relative positions of the optical device 21 and the optical element 22 in the first degree of motion freedom, the second degree of motion freedom, and the third degree of motion freedom.

[0099] like Figure 14 As shown, in one specific embodiment, the control module 12 adjusts the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom through the adjustment module 11. A detailed description follows:

[0100] The first step of the adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 in the first degree of freedom of movement, and positions the optical device 21 and the optical element 22 at a relative position where the calibration parameters meet the first preset condition;

[0101] like Figure 6 As shown, the calibration parameter of the first step adjustment process is the reflectance of the second outline 3112 of the first pattern 311 at the center of the pattern 31 on the calibration plate 30. The first pattern 311 in the central region of the pattern 31 on the plate includes the first pattern 311a and the first pattern 311b, and the second outline 3112 of the first pattern 311 at the center includes the second outline 3112a of the first pattern 311a and the second outline 3112b of the first pattern 311b.

[0102] The first preset condition is that the reflectivity of the second outline 3112 of the first pattern 311 in the central region of the plate pattern 31 reaches the maximum value; the adjustment module 11 positions the optical device 21 and the optical element 22 at the relative position where the reflectivity of the second outline 3112 of the first pattern 311 in the central region reaches the maximum value.

[0103] Specifically, when adjusting the position of the optical device 21 relative to the optical element 22 along the x-direction, multiple graphic information can be acquired throughout the entire stroke of the x-direction, and one graphic information that meets the preset conditions can be compared among the multiple graphic information. Finally, the optical device 21 and the optical element 22 are adjusted to the position corresponding to the graphic information that meets the preset conditions. It should be noted that during each adjustment process, if more than two graphic information meet the preset conditions, the position corresponding to the best graphic information can be selected.

[0104] In one exemplary scheme, when the optical device 21 is moved 10µm relative to the optical element 22 along the x-direction, image information is collected every 0.5µm to obtain 20 image images. Then, the image information that meets the first preset condition is selected from the 20 image images. The specific movement distance of the optical device 21 relative to the optical element 22 along the x-direction can be flexibly adjusted according to specific circumstances, and this application embodiment does not limit it in this way.

[0105] The second step of the adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 in the second degree of freedom of movement, and positions the optical device 21 and the optical element 22 at a relative position where the calibration parameters meet the second preset conditions;

[0106] like Figure 7 As shown, the calibration parameter y-direction movement degree of freedom in the second step adjustment process is the reflectance of the first outline 3111 of the first pattern 311 in the central region of the plate pattern 31. The first pattern 311 in the central region of the plate pattern 31 includes the first pattern 311a and the first pattern 311b. The first outline 3111 of the first pattern 311 in the central region includes the first outline 3111a of the first pattern 311a and the first outline 3111b of the first pattern 311b.

[0107] The second step presets the condition that the reflectivity of the first outline 3111 of the first pattern 311 in the center region of the central area of ​​the pattern 31 on the board surface reaches the maximum value; the adjustment module 11 positions the optical device 21 and the optical element 22 at the relative position where the reflectivity of the first outline 3111 of the first pattern 311 in the central region reaches the maximum value.

[0108] The process of adjusting the optical device 21 relative to the optical element 22 along the y-direction is similar to the process of adjusting the optical device 21 relative to the optical element 22 along the x-direction. Similarly, when the optical device 21 is moved 10µm relative to the optical element 22 along the y-direction, graphic information is collected every 0.5µm to obtain 20 graphic information images. Then, the graphic information images that meet the second preset condition are selected from the 20 graphic information images, and the optical device 21 and the optical element 22 are positioned at the relative position where the graphic information meets the second preset condition.

[0109] The light adjustment device provided in this embodiment first adjusts the relative positions of the light device 21 and the optical element 22 on the first and second degrees of freedom of movement so that the center of the optical axis and the center of the pixel are aligned. The accuracy of the optical axis alignment directly affects the accuracy of the alignment during the adjustment process as well as the accuracy of the alignment between the light emitting module 23 and the light receiving module 24.

[0110] The third adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 in the third degree of freedom of movement to make the diagonal clear;

[0111] The light adjustment device provided in this embodiment adjusts the relative positions of the light device 21 and the optical element 22 in the third degree of freedom of movement so that the center of the optical axis and the center of the pixel are aligned. The accuracy of the optical axis alignment directly affects the accuracy of the alignment process and the accuracy of the alignment of the light emitting module 23 and the light receiving module 24.

[0112] like Figure 8 As shown, the calibration parameter of the third step adjustment process is the reflectance contrast difference between the first pattern 311 and the second pattern 312 among the four central patterns of the pattern 31 on the calibration plate 30. The four central patterns of the pattern 31 on the calibration plate 30 correspond to the first pattern 311a, the first pattern 311b, the second pattern 312a, and the second pattern 312b, respectively.

[0113] The third preset condition is that the reflectance contrast difference between the first pattern 311 and the second pattern 312 among the four central patterns of the panel pattern 31 reaches the maximum value; in this embodiment, the reflectance contrast difference between the first pattern 311 and the second pattern 312 among the four central patterns reaches the maximum value means that the reflectance contrast difference between any two adjacent patterns of the four central patterns reaches the maximum value.

[0114] The process of adjusting the optical device 21 relative to the optical element 22 along the z-direction is similar to the process of adjusting the optical device 21 relative to the optical element 22 along the x-direction. Similarly, the optical device 21 is moved 10µm relative to the optical element 22 along the z-direction, and graphic information is collected every 0.5µm to obtain 20 graphic information images. Then, the graphic information that meets the third preset condition is selected from the 20 graphic information images, and the optical device 21 and the optical element 22 are positioned at the relative position where the graphic information meets the third preset condition.

[0115] The fourth step of the adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 in the third rotational degree of freedom, and positions the optical device 21 and the optical element 22 at a relative position where the calibration parameters meet the fourth preset condition;

[0116] like Figure 9As shown, the calibration parameters for the fourth step of the adjustment process are the grayscale difference in reflectance between the first pattern 311 and the second pattern 312 located on both sides of the first central axis l1 in the pattern 31 on the calibration plate 30, and the grayscale difference in reflectance between the first pattern 311 and the second pattern 312 located on both sides of the second central axis l2 in the pattern 31 on the plate surface. The first central axis l1 has a degree of freedom of movement parallel to the x-direction, and the second central axis l2 has a degree of freedom of movement parallel to the y-direction. The reflectance of the patterns on both sides of the first central axis l1 is different, and the reflectance of the patterns on both sides of the second central axis l2 is also different. By comparing the reflectance differences of the patterns on both sides of the first central axis l1 and the second central axis l2, the grayscale difference can be obtained.

[0117] The fourth preset condition is that the grayscale difference of reflectance between the first pattern 311 and the second pattern 312 located on both sides of the first central axis l1 in the pattern 31 on the board surface, and the grayscale difference of reflectance between the first pattern 311 and the second pattern 312 located on both sides of the second central axis l2 in the pattern 31 on the board surface reach the maximum value.

[0118] The process of adjusting the optical device 21 relative to the optical element 22 by rotating around the roll degree of freedom is similar to the process of adjusting the optical device 21 relative to the optical element 22 by moving along the x-direction degree of freedom. Similarly, the optical device 21 is rotated from -2° to +2° relative to the optical element 22 along the roll degree of freedom. Graphic information is collected once every 0.2° rotation to obtain 20 graphic information. Then, the graphic information that meets the fourth preset condition is selected from the 20 graphic information, and the optical device 21 and the optical element 22 are positioned at the relative position where the graphic information meets the fourth preset condition.

[0119] Fifth step of adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 in the first rotational degree of freedom, and positions the optical device 21 and the optical element 22 at a relative position where the calibration parameters meet the fifth preset condition;

[0120] like Figure 10As shown, the calibration parameters for the fifth step of the adjustment process are the grayscale difference in reflectance between the first contour line 3111 of the first pattern 3111 located on both sides of the second central axis l2 and at the boundary line of the calibration plate 30 and the third contour line 3121 of the second pattern 312. The patterns located on both sides of the second central axis l2 and at the boundary line include the first pattern 311c, the second pattern 312c, the first pattern 311d, and the second pattern 312d. The grayscale difference in reflectance between the first contour line 3111 of the first pattern 3111 and the third contour line 3121 of the second pattern 312 located on both sides of the second central axis l2 and at the boundary line of the calibration plate 30 includes: the grayscale difference in reflectance between the first contour line 3111c of the first pattern 311c and the third contour line 3121c of the second pattern 312c, and the grayscale difference in reflectance between the first contour line 3111d of the first pattern 311d and the third contour line 3121d of the second pattern 312d.

[0121] The fifth preset condition is that the difference in reflectance grayscale between the first outline 3111 of the first pattern 311 and the third outline 3121 of the second pattern 312 located on both sides of the second central axis l2 and at the boundary line in the pattern 31 on the board surface reaches the maximum value.

[0122] The process of adjusting the optical device 21 relative to the optical element 22 along the pitch rotation degree of freedom is similar to the aforementioned process of adjusting the optical device 21 relative to the optical element 22 along the roll rotation degree of freedom. Similarly, when the optical device 21 is rotated from -2° to +2° relative to the optical element 22 along the pitch rotation degree of freedom, graphic information is collected once every 0.2° rotation to obtain 20 graphic information images. Then, the graphic information images that meet the fifth preset condition are selected from the 20 graphic information images, and the optical device 21 and the optical element 22 are positioned at the relative position where the graphic information meets the fifth preset condition.

[0123] The sixth step of the adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 in the second rotational degree of freedom, and positions the optical device 21 and the optical element 22 at a relative position where the calibration parameters meet the sixth preset condition;

[0124] like Figure 10As shown, the calibration parameters for the sixth step of the adjustment process are the grayscale difference in reflectance between the second contour line 3112 of the first pattern 311 located on both sides of the first central axis l1 and at the boundary line of the pattern 31 on the calibration plate 30, and the fourth contour line 3122 of the second pattern 312. The patterns located on both sides of the first central axis l1 and at the boundary line include the first pattern 311e, the second pattern 312e, the first pattern 311f, and the second pattern 312f. The grayscale difference in reflectance between the second contour line 3112 of the first pattern 311 and the fourth contour line 3122 of the second pattern 312 located on both sides of the first central axis l1 and at the boundary line of the pattern 31 on the plate 30 includes: the grayscale difference in reflectance between the second contour line 3112e of the first pattern 311e and the fourth contour line 3122e of the second pattern 312e, and the grayscale difference in reflectance between the second contour line 3112f of the first pattern 311f and the fourth contour line 3122f of the second pattern 312f.

[0125] The sixth preset condition is that the difference in reflectance grayscale between the second contour line 3112 of the first pattern 311 located on both sides of the first central axis l1 and at the boundary line and the fourth contour line 3122 of the second pattern 312 reaches the maximum value.

[0126] The process of adjusting the optical device 21 relative to the optical element 22 along the yaw rotational degree of freedom is similar to the aforementioned process of adjusting the optical device 21 relative to the optical element 22 along the roll rotational degree of freedom. Similarly, when the optical device 21 is rotated from -2° to +2° relative to the optical element 22 along the yaw rotational degree of freedom, graphic information is collected once every 0.2° rotation to obtain 20 graphic information images. Then, the graphic information images that meet the sixth preset condition are selected from the 20 graphic information images, and the optical device 21 and the optical element 22 are positioned at the relative position where the graphic information meets the sixth preset condition.

[0127] The seventh step of the adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 again in the first degree of freedom of movement, and positions the optical device 21 and the optical element 22 at a relative position where the calibration parameters meet the seventh preset condition;

[0128] like Figure 12 As shown, the calibration parameters of the seventh step adjustment process include the reflectance difference between the second contour line 3112 of each first pattern 311 and the center point of each first pattern 311 in the pattern 31 on the calibration plate 30, and the reflectance difference between the fourth contour line 3122 of each second pattern 312 and the center point of each second pattern 312.

[0129] The seventh preset condition is that the reflectance difference between the second outline 3112 of each first pattern 311 and the center point of each first pattern 311, and the reflectance difference between the fourth outline 3122 of each second pattern 312 and the center point of each second pattern 312, both reach their maximum values.

[0130] The process of adjusting the optical device 21 relative to the optical element 22 by moving the degree of freedom along the x-direction again is the same as the process of adjusting the optical device 21 relative to the optical element 22 by moving the degree of freedom along the x-direction during the first step of adjustment, and will not be repeated here.

[0131] Eighth adjustment process: The adjustment module 11 adjusts the relative position of the optical device 21 with respect to the optical element 22 again in the second degree of freedom of movement, positioning the optical device 21 and the optical element 22 at a relative position where the calibration parameters meet the eighth preset condition;

[0132] like Figure 13 As shown, the calibration parameters for the eighth step of the adjustment process are the reflectance difference between the first contour line 3111 of each first pattern 311 and the center point of each first pattern 311 in the pattern 31 on the calibration plate 30, and the reflectance difference between the third contour line 3121 of each second pattern 312 and the center point of each second pattern 312.

[0133] The eighth preset condition is that the reflectance difference between the first outline 3111 of each first pattern 311 and the center point of each first pattern 311, and the reflectance difference between the third outline 3121 of each second pattern 312 and the center point of each second pattern 312, both reach their maximum values.

[0134] The process of adjusting the optical device 21 relative to the optical element 22 by moving the degree of freedom along the y-direction again is the same as the process of adjusting the optical device 21 relative to the optical element 22 by moving the degree of freedom along the y-direction mentioned above, and will not be repeated here.

[0135] Furthermore, the control module 12 is also used to determine, after the current adjustment process of the adjustment module 11, whether the calibration parameters corresponding to at least one adjustment process in the previous N adjustment processes still meet their preset conditions. If yes, the control module 11 proceeds to the next adjustment process; if no, the control module 11 returns to the adjustment process where the preset conditions are not met. N is a positive integer, and N≥1. A specific implementation scheme is as follows:

[0136] Before the control adjustment module 12 enters the third adjustment process, the control module 12 acquires multiple calibration parameters corresponding to the second adjustment process at multiple relative positions of the second degree of freedom of movement, and at the same time acquires multiple calibration parameters corresponding to the first adjustment process, so as to determine whether the relative position that meets the second preset condition still meets the first preset condition. If yes, the control adjustment module 12 enters the third adjustment process; if no, the control adjustment module 12 returns to the first adjustment step.

[0137] Before the control and adjustment module 12 enters the fourth adjustment process, the control module 12 acquires multiple calibration parameters corresponding to the third adjustment process at multiple relative positions of the third degree of freedom, as well as multiple calibration parameters corresponding to the first and second adjustment processes, to determine whether the relative position that meets the third preset condition also meets the first preset condition. If not, the control and adjustment module 12 returns to the first adjustment process; if so, it continues to determine whether the relative position that meets the third preset condition also meets the second preset condition. If so, the control and adjustment module 12 enters the fourth adjustment process; if not, the control and adjustment module 12 returns to the second adjustment process.

[0138] Before the control adjustment module 12 enters the fifth adjustment process, the control module 12 acquires multiple calibration parameters corresponding to the fourth adjustment process at multiple relative positions of the third rotational degree of freedom, and simultaneously acquires multiple calibration parameters corresponding to the third adjustment process, in order to determine whether the relative positions that meet the fourth preset condition also meet the third preset condition; if yes, the control adjustment module 12 enters the fifth adjustment process; if no, the control adjustment module 12 returns to the third adjustment process.

[0139] Before the control adjustment module 12 enters the sixth adjustment process, the control module 12 acquires multiple calibration parameters corresponding to the fifth adjustment process at multiple relative positions of the first rotational degree of freedom, and at the same time acquires multiple calibration parameters corresponding to the fourth adjustment process, so as to determine whether the relative position that meets the fifth preset condition also meets the fourth preset condition; if yes, the control adjustment module 12 enters the sixth adjustment process; if no, the control adjustment module 12 returns to the fourth adjustment process.

[0140] Before the control adjustment module 12 enters the seventh adjustment process, the control module 12 acquires multiple calibration parameters corresponding to the sixth adjustment process at multiple relative positions of the second rotational degree of freedom, and simultaneously acquires multiple calibration parameters corresponding to the fifth adjustment process, in order to determine whether the relative positions that meet the sixth preset condition also meet the fifth preset condition; if yes, the control adjustment module 12 enters the seventh adjustment process; if no, the control adjustment module 12 returns to the fifth adjustment process.

[0141] Before the control adjustment module 12 enters the eighth adjustment process, the control module 12 acquires multiple calibration parameters corresponding to the seventh adjustment process at multiple relative positions of the first degree of freedom, as well as multiple calibration parameters corresponding to the fifth and sixth adjustment processes. It then determines whether the relative position that meets the seventh preset condition also meets the fifth preset condition. If not, it returns to the fifth adjustment process. If yes, it continues to determine whether the relative position that meets the seventh preset condition also meets the sixth preset condition. If yes, it enters the eighth adjustment process; if not, it returns to the sixth adjustment process.

[0142] The control module 12 is also used to acquire multiple calibration parameters corresponding to the eighth step adjustment process at multiple relative positions of the second degree of freedom of movement, while acquiring multiple calibration parameters corresponding to the fifth step adjustment process, as well as multiple calibration parameters of the sixth step adjustment process and multiple parameters of the seventh step adjustment process. It then determines whether the relative position that meets the eighth preset condition also meets the fifth preset condition. If not, the control module 12 returns to the fifth step adjustment process. If yes, it continues to determine whether the relative position that meets the eighth preset condition also meets the sixth preset condition. If not, the control module 12 returns to the sixth step adjustment process. If yes, it continues to determine whether the relative position that meets the eighth preset condition also meets the seventh preset condition. If not, the control module 12 returns to the seventh step adjustment process. If yes, the control module 12 enters the global judgment step.

[0143] Reference Figure 15As shown in Figure 16, optionally, before adjusting the relative positions of the optical device 21 and the optical element 22, the relative positions of the optical element 22 and the calibration plate 30 can be calibrated, i.e., a pre-adjustment process. In an exemplary scheme, the calibration process of the optical element 22 and the calibration plate 30 can be as follows: the device emitting light, such as a light-emitting plate carrying the light-emitting device 231, and the supplementary light source 40 (in this embodiment, the supplementary light source is a reference laser) are fixed on the optical adjustment stage 50, and the first aperture 61 and the second aperture 62 are fixed between the supplementary light source 40 and the calibration plate 30. The light emitted by the supplementary light source 40 passes through the light-transmitting holes of the first aperture 61 and the second aperture 62 in sequence and reaches the surface of the calibration plate 30. A plane mirror 70 is fixed at the position where the light signal falls on the calibration plate 30, and the orientation of the supplementary light source 40 on the optical adjustment stage 50 is adjusted so that the light signal passes through the plane mirror. After reflection, the light signal from the reference laser 40 passes through the light-transmitting holes of the second aperture 62 and the first aperture 61, fixing the positions of the optical adjustment stage 50 and the supplementary light source 40. Once the positions of the optical adjustment stage 50 and the supplementary light source 40 are fixed, the optical element 22 is fixed on the six-dimensional adjustment frame 80, with the optical element 22 located on the side of the second aperture 62 away from the first aperture 61. By adjusting the degrees of freedom of the six-dimensional adjustment frame 80, the light signal emitted by the reference laser 40, after being reflected by the optical element 22, can sequentially pass through the light-transmitting holes of the second aperture 62 and the first aperture 61 to reach the reference laser 40. The optical element 22 is then fixed, completing the calibration of the relative position of the optical element 22 and the calibration plate 30. For example, this completes the calibration to make the optical axis of the optical element 22 perpendicular to the surface of the calibration plate 30.

[0144] In this embodiment, before adjusting the relative positions of the optical device 21 and the optical element 22, the control module 11 adjusts the position of the optical element 22 relative to the calibration plate 30 under the control of the control module 12, so that the optical axis of the optical element 22 is perpendicular to the calibration plate. In this embodiment, during the process of adjusting the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom, the optical element 22 remains fixed. The adjustment module 11 adjusts the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom by adjusting the position of the optical device 21 in six degrees of freedom, which facilitates adjustment.

[0145] Furthermore, the adjustment module 11 adjusts the orientation of the light-emitting device on the light adjustment stage 50, such as the supplementary light source 40, including at least one of the first, second, and third rotational degrees of freedom. The adjustment in the third rotational degree of freedom can be performed using a level or a gaiter. Optionally, the height of the light-emitting device, such as the supplementary light source 40, can be approximately the height corresponding to the optical axis of the optical element 22 when the adjustment range of the six-dimensional adjustment frame 80 is centered after the optical element 22 is fixed to it. Optionally, the optical element 22 can be fixed to the six-dimensional adjustment frame 80 using a bracket.

[0146] In this embodiment, during the pre-adjustment process, the supplementary light source 40 is used to calibrate the relative position of the optical element 22 and the calibration plate 30; when adjusting the relative position of the optical device 21 and the optical element 22 in the subsequent process, the optical device 21 is fixed on the six-dimensional adjustment frame 80.

[0147] In this embodiment, the light adjustment device 10 emits light signals to the calibration plate 30 through the supplementary light source 40 to make the calibration plate 30 receive light evenly and improve the imaging quality of the optical module.

[0148] like Figure 17 As shown, in one exemplary embodiment, the optical module 20 includes at least one light receiving module 24, which includes a photosensitive element 241 and a receiving lens 242. The receiving lens 242 is an optical element 22 corresponding to the light receiving module 24, used to receive the light signal reflected by the calibration plate 30. The photosensitive element 241 is an optical element 21 corresponding to the light receiving module 24. The receiving lens 242 is located on the transmission path of the reflected light signal (echo light signal), used to transmit the reflected light signal to the photosensitive element 241. 1. The detection receiving lens 242 outputs an electrical signal with the characteristics of reflected light signal and sends it to the control module 12. After being processed by the control module 12, the electrical signal with the characteristics of reflected light signal is presented as a board image or point cloud map of the board pattern 31. The board image or point cloud map of the board pattern 31 can be used to characterize the calibration parameters. That is, the reflected light signal carries the information of the calibration parameters. The control module 12 processes the reflected light signal and presents the calibration parameters in the form of a board image or point cloud map, which is convenient for obtaining the calibration parameters.

[0149] In this exemplary scheme, the adjustment module 12 is used to adjust the relative positions of the photosensitive device 241 and the receiving lens 242 in six degrees of freedom under the control of the control module 11; the photosensitive device 241 is electrically connected to the control module 12 and is used to collect multiple reflected light signals in each adjustment process, and output an electrical signal with the characteristics of the reflected light signal to the control module 12, which processes the data to form an image that can reflect the calibration parameters, such as a panel image or a point cloud map.

[0150] In this exemplary solution, the adjustment module can be any six-dimensional adjustment mechanism from the related technologies, which will not be described in detail in this application embodiment.

[0151] In this exemplary scheme, the light adjustment device 10 emits an optical signal to the calibration plate 30 through the supplementary light source 40; optionally, the wavelength of the optical signal emitted by the supplementary light source 40 is 905nm or 940nm, the supplementary light source 40 achieves a light uniformity of ±2% and an illuminance stability of ±1%, thereby reducing the interference of uneven light received by the calibration plate 30 on the alignment between the photosensitive device 241 and the receiving lens 242, and improving the alignment accuracy between the photosensitive device 241 and the receiving lens 242.

[0152] Furthermore, the optical receiving module 24 also includes a receiving board 243 for carrying the photosensitive device 241. The receiving board 243 can be electrically connected to the photosensitive device 241 to provide power supply signals, control signals, etc. to the photosensitive device 241.

[0153] like Figure 18 As shown, in another exemplary embodiment, in addition to the light receiving module 24, the optical module 20 also includes a light emitting module 23, which includes a light-emitting device 231 and a light-emitting lens 232. The light-emitting device 231 is the light device 21 of the light emitting module 23, used to emit light signals. The light-emitting lens 232 is the optical element 22 of the light emitting module 23, used to receive the light signals emitted by the light-emitting device 231 and emit light signals to the calibration plate 30. The adjustment module 12 is used to adjust the relative positions of the photosensitive device 241 and the receiving lens 242 in six degrees of freedom under the control of the control module 11. It is also used to adjust the relative positions of the light-emitting device 231 and the light-emitting lens 232 in six degrees of freedom under the control of the control module 11. When the adjustment module 12 adjusts the relative positions of the photosensitive device 241 and the receiving lens 242 in six degrees of freedom, it fixes the light emitting module 23. When the adjustment module 12 adjusts the relative positions of the light-emitting device 231 and the light-emitting lens 232 in six degrees of freedom, it fixes the light receiving module 24.

[0154] Specifically, the adjustment module 12 can first calibrate one of the light emitting module 23 and the light receiving module 24, and then calibrate the other of the two modules. For example, after the light emitting module 23 is calibrated, the adjustment module 11 can fix the relative position between the emitting lens 232 and the light-emitting device 231 of the light emitting module 23, and then adjust the relative position between the photosensitive device 241 and the receiving lens 242 of the light receiving module 24. After the light receiving module 24 is calibrated, the adjustment module 11 can fix the relative position between the receiving lens 242 and the photosensitive device 241 of the light receiving module 24, and then adjust the relative position between the light-emitting device 231 and the emitting lens 232 of the light emitting module 23.

[0155] In this exemplary solution, the photosensitive device 241 is electrically connected to the control module 12 to collect multiple reflected light signals during each adjustment process and output an electrical signal with the characteristics of the reflected light signal to the control module 12. The control module 12 processes the data to form an image that reflects the calibration parameters, such as a board image or a point cloud image. The calibration parameters can be obtained based on the board image or point cloud image.

[0156] In this exemplary solution, the light adjustment device 10 emits light signals to the calibration plate 30 through the light-emitting device 231 in the light emitting module 23. Optionally, it is not necessary to set up a supplementary light source 40. Preferably, in this exemplary solution, the light adjustment device 10 also emits light signals to the calibration plate 30 through the supplementary light source 40 to make the calibration plate 30 receive light more uniformly and the imaging quality of the optical module 20, such as the imaging of the plate surface image and point cloud map, is more accurate.

[0157] In one specific embodiment of this exemplary solution, the receiving lens 242 of the light receiving module 24 and the emitting lens 232 of the light emitting module 23 are fixed together by a bracket; when the adjustment module 11 adjusts the relative position of the receiving lens 242 and the photosensitive device 241, the bracket connecting the receiving lens 242 and the emitting lens 232 is fixed in position, and the adjustment module 11 adjusts the relative position of the receiving lens 242 and the photosensitive device 241 by adjusting the position of the photosensitive device 241 in six degrees of freedom; when the adjustment module 11 adjusts the relative position of the emitting lens 232 and the light emitting device 231, the bracket connecting the receiving lens 242 and the emitting lens 232 is fixed in position, and the adjustment module 11 adjusts the relative position of the emitting lens 232 and the light emitting device 231 by adjusting the position of the light emitting device 231 in six degrees of freedom.

[0158] like Figure 19 As shown, in another exemplary scheme, the optical module 20 has two light emitting modules 23. The combination of the emission fields of the two emitting lenses 232 corresponding to the two light emitting modules 23 matches the receiving field of view of the receiving lens 242 in the light receiving module 24. Compared with the related technology where the emission field of one light emitting module 23 is matched with the receiving field of view of one light receiving module 24, the arrangement of two light emitting modules 23 is more flexible and can realize the miniaturization design of the optical module 20. In addition, setting two light emitting modules 23 can also improve the field of view reception rate of the light receiving module 24 and expand the detection field of view of the optical module 20.

[0159] In this exemplary scheme, the adjustment module 12 adjusts the position of the light-emitting device 231 and the emitting lens 232 in six degrees of freedom, taking the light emitting module 23 as a unit; when the adjustment module 12 adjusts the relative position of the light-emitting device 231 and the emitting lens 232 of one light emitting module 23 in six degrees of freedom, the light receiving module 24 and another light emitting module 23 are fixed; when the adjustment module 11 adjusts the relative position of the photosensitive device 241 and the receiving lens 242 in six degrees of freedom, the two light emitting modules 24 are fixed.

[0160] In one specific embodiment of this exemplary solution, the adjustment module 12 may first calibrate the two light emitting modules 23, and then calibrate the light receiving module 24; alternatively, it may first calibrate the light receiving module 24, and then calibrate the two light emitting modules 23. For example, after the two light emitting modules 23 are calibrated, the adjustment module 11 fixes the relative positions of the emitting lenses 232 and the light-emitting devices 231 in the two light emitting modules 23, and then adjusts the relative positions between the photosensitive devices 241 and the receiving lenses 242 in the light receiving module 24. After the light receiving module 24 is calibrated, the adjustment module 11 fixes the relative positions of the photosensitive devices 241 and the receiving lenses 242 in the light receiving module 24, and then adjusts the relative positions between the light-emitting devices 231 and their respective emitting lenses 232 in the two light emitting modules 23.

[0161] In one specific embodiment of this exemplary solution, the receiving lens 242 of the light receiving module 24 and the emitting lens 232 of the light emitting module 23 are fixed together by a bracket; when the adjustment module 11 adjusts the relative position of the receiving lens 242 and the photosensitive device 241, the bracket connecting the receiving lens 242 and the emitting lens 232 is fixed in position, and the adjustment module 11 adjusts the relative position of the receiving lens 242 and the photosensitive device 241 by adjusting the position of the photosensitive device 241 in six degrees of freedom; when the adjustment module 11 adjusts the relative position of the emitting lens 232 and the light emitting device 231, the bracket connecting the receiving lens 242 and the emitting lens 232 is fixed in position, and the adjustment module 11 adjusts the relative position of the emitting lens 232 and the light emitting device 231 by adjusting the position of the light emitting device 231 in six degrees of freedom.

[0162] like Figure 20As shown, in another exemplary embodiment, the optical module 20 includes only the light emitting module 23, which includes a light-emitting device 231 and a light-emitting lens 232. The light-emitting device 231 is the light device 21 of the light emitting module 23, used to emit light signals. The light-emitting lens 232 is the optical element 22 of the light emitting module 23, used to receive the light signals emitted by the light-emitting device 231 and emit light signals to the calibration plate 30. The adjustment module 12 is also used to adjust the relative positions of the light-emitting device 231 and the light-emitting lens 232 in six degrees of freedom under the control of the control module 11. The light emitting module 23 collects the signal carrying the calibration parameters during the adjustment of the relative positions of the light-emitting device 231 and the light-emitting lens 232 through a signal acquisition module, and the signal acquisition module sends the electrical signal carrying the calibration parameters to the control module.

[0163] In one specific embodiment of this exemplary solution, the signal acquisition module can be an infrared camera. The infrared camera acquires the light spot image formed by the light emitted by the light-emitting device 231 towards the calibration plate 30. The collimation degree of the light spot can be obtained through the light spot image. The collimation degree of the light spot is used as the calibration parameter in this embodiment to determine whether the collimation degree of the light spot meets the corresponding preset conditions.

[0164] In another specific embodiment of this scheme, the signal acquisition module acquires the reflected light signal and outputs an electrical signal with the characteristics of the reflected light signal to the control module 12. After being processed by the control module 12, the electrical signal with the characteristics of the reflected light signal is presented as a point cloud map of the board surface pattern 31. This point cloud map can be used to characterize the calibration parameters and facilitate the acquisition of the calibration parameters.

[0165] More specifically, the signal acquisition module includes a photodetector (such as a photosensitive device 241), which collects reflected light signals and outputs an electrical signal with the characteristics of reflected light signals to the control module 12. After being processed by the control module 12, the electrical signal with the characteristics of reflected light signals is presented as a point cloud map of the board surface pattern 31. This point cloud map can be used to characterize calibration parameters and facilitate the acquisition of calibration parameters.

[0166] In this exemplary scheme, the calibration parameters are the collimation degree of the spot image in various directions or the distance, azimuth angle, pitch angle and other parameters of the point cloud image.

[0167] In this embodiment, the light adjustment device 10 is used for the calibration of the light-emitting device 231 and the emitting lens 232 and / or for the calibration of the photosensitive device 241 and the receiving lens 242. Furthermore, due to the small size or difficulty in fixing the light-emitting device 231 and the photosensitive device 241, the calibration of the light-emitting device 231 and the emitting lens 232 by the light adjustment device 10 can be converted into the calibration of the light-emitting plate 233 and the emitting lens 232, and the calibration of the photosensitive device 241 and the receiving lens 242 can be converted into the calibration of the receiving plate 243 and the receiving lens 242.

[0168] This application embodiment also provides an optical module light modulation method, including the following steps:

[0169] Adjustment process: Sequentially adjust the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom to position the optical device and the optical element at a relative position where the calibration parameters meet the current preset conditions;

[0170] Judgment Step: Before entering the next adjustment process, determine whether the calibration parameters corresponding to at least one adjustment process in the previous N adjustment processes still meet their preset conditions. If yes, control the adjustment module to enter the next adjustment process. If no, control the adjustment module to return to the adjustment process where the preset conditions are not met, N≥1.

[0171] In one exemplary scheme, the adjustment process includes:

[0172] The control module 11 controls the adjustment module 12 to adjust the relative positions of the optical device 21 and the optical element 22 in the three degrees of freedom in the order of the first degree of freedom, the second degree of freedom, and the third degree of freedom; the plane containing the first degree of freedom and the second degree of freedom is perpendicular to the optical axis of the optical element 22; the third degree of freedom is parallel to the optical axis of the optical element 22.

[0173] After the adjustment module 12 completes the relative position adjustment of the optical device 21 and the optical element 22 in the three degrees of translational freedom, the control module 11 controls the adjustment module 12 to adjust the relative position adjustment of the optical device 21 and the optical element 22 in the three degrees of rotational freedom.

[0174] Furthermore, the control module 11 controls the adjustment module 12 to adjust the relative positions of the optical device 21 and the optical element 22 in the three rotational degrees of freedom in the order of the third rotational degree of freedom, the first rotational degree of freedom, and the second rotational degree of freedom or the third rotational degree of freedom, the second rotational degree of freedom, and the first rotational degree of freedom.

[0175] In one exemplary embodiment, the control module 11 controls the adjustment module 12 to adjust the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom according to the steps of the first degree of motion, the second degree of motion, the third degree of motion, the third degree of rotation, the first degree of rotation, and the second degree of rotation.

[0176] In another exemplary embodiment, the adjustment process further includes: after the adjustment module 11 completes the relative position adjustment of the optical device 21 and the optical element 22 along three rotational degrees of freedom, it adjusts the relative position of the optical device and the optical element again along at least one of the first, second, and third degrees of freedom.

[0177] In one specific embodiment, the adjustment module 11 includes:

[0178] The first sub-adjustment module is used to complete the movement of the optical device 21 and the optical element 22 along the first degree of translational freedom and the rotation along the first degree of rotational freedom;

[0179] The second sub-adjustment module is used to complete the movement of the optical device 21 and the optical element 22 along the second degree of freedom of movement and the rotation along the second degree of freedom of rotation.

[0180] The third sub-adjustment module is used to complete the movement of the optical device 21 and the optical element 22 along the third degree of freedom of movement and the rotation along the third degree of freedom of rotation.

[0181] Furthermore, when the adjustment module 11 adjusts the relative positions of the optical device 21 and the optical element 22 in six degrees of freedom, the movements of the sub-adjustment modules corresponding to the two adjacent adjustment steps do not interfere with each other, thus avoiding coupling between the two connected adjustment steps and affecting the calibration process.

[0182] like Figure 14 As shown, in this embodiment, the adjustment process includes:

[0183] The first step of the adjustment process is to adjust the relative position of the optical device with respect to the optical element in the first degree of freedom of movement, and to position the optical device and the optical element at a relative position where the calibration parameters meet the first preset condition.

[0184] The second step of the adjustment process: Adjust the relative position of the optical device with respect to the optical element in the second degree of freedom of movement, and position the optical device and the optical element at a relative position where the calibration parameters meet the second preset conditions;

[0185] The third step of the adjustment process: Adjust the relative position of the optical device with respect to the optical element in the third degree of freedom of movement, and position the optical device and the optical element at a relative position where the calibration parameters meet the second preset condition;

[0186] The fourth step of the adjustment process: Adjust the relative position of the optical device with respect to the optical element in the third rotational degree of freedom, and position the optical device and the optical element at a relative position where the calibration parameters meet the fourth preset condition;

[0187] Fifth step of adjustment process: Adjust the relative position of the optical device with respect to the optical element in the first rotational degree of freedom, and position the optical device and the optical element at a relative position where the calibration parameters meet the fifth preset condition;

[0188] The sixth step of the adjustment process: Adjust the relative position of the optical device with respect to the optical element in the second degree of rotational freedom, and position the optical device and the optical element at a relative position where the calibration parameters meet the sixth preset condition;

[0189] Step 7: Adjust the relative position of the optical device with respect to the optical element again in the first degree of freedom of movement, and position the optical device and the optical element at a relative position where the calibration parameters meet the seventh preset condition;

[0190] Step 8: Adjust the relative position of the optical device with respect to the optical element again in the second degree of freedom of movement, and position the optical device and the optical element at a relative position where the calibration parameters meet the fourth preset condition.

[0191] like Figure 14 As shown, in this embodiment, the determination step includes,

[0192] First judgment step: Before entering the third adjustment step, determine whether the relative position that meets the second preset condition also meets the first preset condition. If yes, enter the third adjustment step; otherwise, return to the first adjustment step.

[0193] Specifically, while acquiring multiple calibration parameters corresponding to the second step adjustment process at multiple relative positions of the second degree of freedom of movement, multiple calibration parameters corresponding to the first step adjustment process are also acquired to determine whether the relative positions that meet the second preset conditions still meet the first preset conditions.

[0194] Second judgment step: Before entering the fourth adjustment process, determine whether the relative position that meets the third preset condition also meets the first preset condition. If not, return to the first adjustment process; if yes, continue to determine whether the relative position that meets the third preset condition also meets the second preset condition. If yes, enter the fourth adjustment process; if not, return to the second adjustment process.

[0195] Specifically, while acquiring multiple calibration parameters corresponding to the third step adjustment process at multiple relative positions of the third degree of freedom of movement, multiple calibration parameters corresponding to the first step adjustment process and multiple calibration parameters corresponding to the second step adjustment process are also acquired, so as to determine whether the relative position that meets the third preset condition also meets the first preset condition and the second preset condition.

[0196] The third judgment step: Before entering the fifth adjustment process, determine whether the relative position that meets the fourth preset condition also meets the third preset condition; if yes, enter the fifth adjustment process; if no, return to the third adjustment process.

[0197] Specifically, while acquiring multiple calibration parameters corresponding to the fourth step adjustment process at multiple relative positions of the third rotational degree of freedom, multiple calibration parameters corresponding to the third step adjustment process are also acquired to determine whether the relative positions that meet the fourth preset conditions still meet the third preset conditions.

[0198] Fourth judgment step: Before entering the sixth adjustment process, determine whether the relative position that meets the fifth preset condition also meets the fourth preset condition; if yes, enter the sixth adjustment process; if no, return to the fourth adjustment process.

[0199] Specifically, while acquiring multiple calibration parameters corresponding to the fifth step adjustment process at multiple relative positions of the first rotational degree of freedom, multiple calibration parameters corresponding to the fourth step adjustment process are also acquired to determine whether the relative positions that meet the fifth preset conditions also meet the fourth preset conditions.

[0200] Fifth judgment step: Before entering the seventh adjustment process, determine whether the relative position that meets the sixth preset condition also meets the fifth preset condition; if yes, enter the seventh adjustment process; if no, return to the fifth adjustment process.

[0201] Specifically, while acquiring multiple calibration parameters corresponding to the sixth step adjustment process at multiple relative positions of the second rotational degree of freedom, multiple calibration parameters corresponding to the fifth step adjustment process are also acquired to determine whether the relative positions that meet the sixth preset condition also meet the fifth preset condition.

[0202] The sixth judgment step: Before entering the eighth adjustment process, determine whether the relative position that meets the seventh preset condition also meets the fifth preset condition. If not, return to the fifth adjustment process; if yes, continue to determine whether the relative position that meets the seventh preset condition also meets the sixth preset condition. If yes, enter the eighth adjustment process; if not, return to the sixth adjustment process.

[0203] Specifically, while acquiring multiple calibration parameters corresponding to the seventh step adjustment process at multiple relative positions of the first degree of freedom of movement, multiple calibration parameters corresponding to the fifth step adjustment process and multiple calibration parameters corresponding to the sixth step adjustment process are also acquired, so as to determine whether the relative positions that meet the seventh preset conditions also meet the fifth and sixth preset conditions.

[0204] The seventh judgment step: At multiple relative positions of the second degree of freedom of movement, while acquiring multiple calibration parameters corresponding to the eighth step of the adjustment process, at multiple relative positions of the fifth step of the adjustment process, while acquiring multiple calibration parameters corresponding to the sixth step of the adjustment process and multiple parameters of the seventh step of the adjustment process, determine whether the relative position that meets the eighth preset condition also meets the fifth preset condition. If not, return to the fifth step of the adjustment process; if yes, continue to determine whether the relative position that meets the eighth preset condition also meets the sixth preset condition. If not, return to the sixth step of the adjustment process; if yes, continue to determine whether the relative position that meets the eighth preset condition also meets the seventh preset condition. If not, return to the seventh step of the adjustment process; if yes, enter the global judgment step.

[0205] In this embodiment, the global judgment step includes: determining whether the obtained calibration board 30 surface image matches the preset calibration board 30 surface image; if yes, ending the optical adjustment of the optical module; if no, returning to the first step adjustment process.

[0206] The above-disclosed embodiments are merely preferred embodiments of this application and should not be construed as limiting the scope of this application. Therefore, any equivalent variations made in accordance with the claims of this application shall still fall within the scope of this application.

Claims

1. A light adjustment device for an optical module, characterized in that, The optical module includes optical devices and optical elements, and the light modulation device includes: An adjustment module is connected to at least one of the optical device and the optical element, and electrically connected to a control module, for sequentially adjusting the relative positions of the optical device and the optical element in six degrees of freedom under the control of the control module; wherein, when the adjustment module adjusts the relative positions of the optical device and the optical element in six degrees of freedom, the optical element remains fixed, and the adjustment module adjusts the position of the optical device in six degrees of freedom; The control module is used to acquire multiple calibration parameters of a calibration plate corresponding to the multiple relative positions of the optical device and the optical element in the current degree of freedom during each adjustment process of the adjustment module, and to position the optical device and the optical element at a relative position where the calibration parameters meet the current preset conditions through the adjustment module. The control module is also used to add verification of the preset conditions in the previous N adjustment processes before the next adjustment process, and to determine whether the calibration parameters corresponding to the previous N adjustment processes still meet their preset conditions. If yes, the control module is controlled to enter the next adjustment process; if no, the control module is controlled to return to the adjustment process where the preset conditions are not met. N is a positive integer and N≥2. The optical module includes at least one light receiving module, which includes a receiving lens and a photosensitive device; the receiving lens is an optical element of the light receiving module, and the photosensitive device is an optical element of the light receiving module; or, the optical module further includes at least one light emitting module, which includes a light emitting device and an emitting lens; the light emitting device is an optical element of the light emitting module, and the emitting lens is an optical element of the light emitting module. The light adjustment device is used for the light-emitting device and the emitting lens, and / or for the calibration of the photosensitive device and the receiving lens.

2. The light-adjusting device according to claim 1, characterized in that: The control module is used to control the adjustment module to adjust the relative positions of the optical device and the optical element in the three degrees of freedom in the order of the first degree of freedom, the second degree of freedom, and the third degree of freedom. The plane containing the first and second degrees of freedom of movement is perpendicular to the optical axis of the optical element. The third degree of freedom of movement is parallel to the optical axis of the optical element; The control module is further configured to control the adjustment module to adjust the relative position of the optical device and the optical element in the three rotational degrees of freedom after the adjustment module has completed the relative position adjustment of the optical device and the optical element in the three degrees of translational freedom.

3. The light-adjusting device according to claim 2, characterized in that: The control module controls the adjustment module to adjust the relative positions of the optical device and the optical element in the three rotational degrees of freedom in the order of the third rotational degree of freedom, the first rotational degree of freedom, and the second rotational degree of freedom or the third rotational degree of freedom, the second rotational degree of freedom, and the first rotational degree of freedom. The first rotational degree of freedom, the second rotational degree of freedom, and the third rotational degree of freedom are the rotational degrees of freedom about the first translational degree of freedom, the second translational degree of freedom, and the third translational degree of freedom, respectively.

4. The light-adjusting device according to claim 2, characterized in that: The control module is further configured to adjust the relative position of the optical device and the optical element again along at least one of the first, second, and third degrees of freedom of movement after the adjustment module has adjusted the relative position of the optical device and the optical element along the three rotational degrees of freedom.

5. The light-adjusting device according to claim 2, characterized in that: The calibration plate is arranged with its surface perpendicular to the optical axis of the optical element; a plurality of first patterns and a plurality of second patterns are provided on the side of the calibration plate near the optical element along a direction parallel to the first and second degrees of freedom of movement, and the first and second patterns are arranged alternately; the reflectivity of the first pattern is greater than that of the second pattern.

6. The light-adjusting device according to claim 5, characterized in that, The calibration parameters acquired by the control module include: The reflectance parameter of the first pattern includes at least one of the reflectance of the outline of the first pattern and the difference in reflectance between the outline of the first pattern and the center point. And / or, the reflectance parameter of the second pattern, which includes the reflectance difference between the outline of the second pattern and the center point; And / or, a reflectance difference parameter between the first pattern and the second pattern, wherein the reflectance difference parameter between the first pattern and the second pattern includes at least one of the reflectance contrast difference between the first pattern and the second pattern, and the reflectance grayscale difference between the outline of the first pattern and the outline of the second pattern.

7. The light-adjusting device according to claim 6, characterized in that, When the adjustment module adjusts the relative position of the optical device and the optical element in the first degree of freedom of movement, the calibration parameters obtained by the control module include a first type of calibration parameter: the reflectance of at least one second contour line of the first pattern located in the central region of the calibration plate, and a seventh type of calibration parameter: at least one of the reflectance difference between the second contour line of the first pattern and its center point and / or the reflectance difference between the fourth contour line of the second pattern and its center point. And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the second degree of freedom of movement, the calibration parameters obtained by the control module include a second type of calibration parameter: the reflectance of at least one first contour line of the first pattern located in the central region of the calibration plate, and an eighth type of calibration parameter: at least one of the reflectance difference between the first contour line of the first pattern and its center point and / or the reflectance difference between the third contour line of the second pattern and its center point; And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the third degree of freedom of movement, the calibration parameters obtained by the control module include the reflectance contrast difference of four patterns located in the central region of the calibration plate and adjacent to each other. And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the third rotational degree of freedom, the calibration parameters obtained by the control module include the grayscale difference of reflectance between the first pattern and the second pattern located on both sides of the first central axis of the calibration plate and / or the grayscale difference of reflectance between the first pattern and the second pattern located on both sides of the second central axis of the calibration plate. And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the first rotational degree of freedom, the calibration parameters obtained by the control module include the reflectance grayscale difference between the first contour line of the first pattern and the third contour line of the second pattern, which are located on both sides of the second central axis of the calibration plate and close to the boundary of the calibration plate. And / or, when the adjustment module adjusts the relative position of the optical device and the optical element in the second rotational degree of freedom, the calibration parameters obtained by the control module include the reflectance grayscale difference between the second contour line of the first pattern and the fourth contour line of the second pattern, which are located on both sides of the first central axis of the calibration plate and close to the boundary of the calibration plate.

8. The light-adjusting device according to claim 1, characterized in that: The control module is also used to determine whether the obtained calibration board surface image matches the preset calibration board surface pattern after the adjustment module completes the relative position adjustment of the optical device and the optical element in six degrees of freedom. If yes, the control of the adjustment module ends; if no, the adjustment module returns to the first step of the adjustment process.

9. The light-adjusting device according to claim 1, characterized in that: Before the adjustment module adjusts the relative position of the optical device and the optical element, under the control of the control module, the position of the optical element relative to the calibration plate is adjusted so that the optical axis of the optical element is perpendicular to the calibration plate.

10. The light-adjusting device according to any one of claims 1-9, characterized in that: The optical module includes at least one light receiving module, the receiving lens being used to receive the light signal reflected by the calibration plate; the photosensitive device being used to receive the light signal output by the receiving lens, the light signal carrying information about calibration parameters; the control module being electrically connected to the photosensitive device, being used to receive the electrical signal output by the photosensitive device and obtain the required calibration parameters. The adjustment module is used to adjust the relative positions of the photosensitive device and the receiving lens in six degrees of freedom in sequence under the control of the control module.

11. The light-adjusting device according to claim 10, characterized in that, The optical module further includes at least one light emitting module, wherein the light-emitting device is used to emit light signals; the emitting lens is used to receive the light signals emitted by the light-emitting device and emit light signals to the calibration plate; the adjustment module is also used to adjust the relative positions of the light-emitting device and the emitting lens in six degrees of freedom under the control of the control module. When the adjustment module adjusts the relative positions of the photosensitive device and the receiving lens in six degrees of freedom, it fixes the light emitting module; when the adjustment module adjusts the relative positions of the light emitting device and the emitting lens in six degrees of freedom, it fixes the light receiving module.

12. The light-adjusting device according to claim 11, characterized in that, The number of light emitting modules is two, and the combination of the emission field of view of the two emitting lenses of the two light emitting modules is matched with the receiving field of view of the receiving lens of the light receiving module. The adjustment module, based on the light-emitting module, adjusts the position of the light-emitting device and the emitting lens in six degrees of freedom. When the adjustment module adjusts the relative positions of the light-emitting device and the emitting lens of one light-emitting module in six degrees of freedom, it fixes the light-receiving module and the other light-emitting module; when the adjustment module adjusts the relative positions of the photosensitive device and the receiving lens in six degrees of freedom, it fixes both light-emitting modules.

13. The light-adjusting device according to any one of claims 1-9, characterized in that: The optical module includes at least one light emitting module, wherein the light-emitting device is used to emit light signals; the emitting lens is used to receive the light signals emitted by the light-emitting device and emit light signals to the calibration plate; the adjustment module is also used to adjust the relative positions of the light-emitting device and the emitting lens in six degrees of freedom under the control of the control module. The optical emitting module acquires signals carrying calibration parameters during its adjustment process through a signal acquisition module, and the signal acquisition module sends the signals carrying calibration parameters to the control module.

14. The light-adjusting device according to any one of claims 1-9, characterized in that: The light adjustment device also emits a light signal to the calibration plate through a supplementary light source to make the calibration plate receive light evenly.

Images