一种实现分立式变形镜表面连续化的方法

By fixing a flexible optical film onto a discrete deformable mirror and coating it with a UV-curable adhesive, combined with vacuum coating technology, the surface continuity of the discrete deformable mirror was achieved, solving the problems of energy loss and phase discontinuity, and improving the mirror quality and service life.

CN116413904BActive Publication Date: 2026-07-17INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
Filing Date
2023-04-13
Publication Date
2026-07-17

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Abstract

本发明提供了一种实现分立式变形镜表面连续化的方法，首先加工出弹性镂空支架，然后将柔性光学薄膜支撑固定于弹性镂空支架上表面，通过旋涂工艺将紫外固化胶液涂覆于柔性光学薄膜上表面。将柔性光学薄膜翻转使其有胶一面接触分立式变形镜上表面，施加均匀紫外光辐照使紫外固化胶液固化，柔性光学薄膜有胶一面被牢牢粘贴在分立式变形镜上表面。去除边缘多余柔性光学薄膜和弹性镂空支架，利用真空镀膜技术在柔性光学薄膜无胶一面沉积光学反射膜，完成分立式变形镜的表面连续化。本发明具有表面连续无间隙，有效避免了能量损失和衍射效应的问题。同时降低了对变形镜表面粗糙度的要求，通过紫外固化胶液的浸润作用能使粗糙的变形镜表面平坦化。
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