Multipole field device and method of multipole field device processing

By metallizing and groove-cutting on an insulating base to form conductive and insulating components, the complex structure and processing difficulties of traditional multipole field devices are solved, and simplified processing and high-precision alignment of multipole field devices are achieved, making them suitable for charged particle beam instruments and equipment.

CN116417311BActive Publication Date: 2026-07-21SUZHOU SILICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SUZHOU SILICON TECH CO LTD
Filing Date
2021-12-30
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

Traditional multipole field devices have complex structures and require complicated and difficult-to-control fabrication processes, especially in terms of electrode assembly symmetry and precision.

Method used

By employing a metallizable insulating base, conductive and insulating parts are formed on the insulating base through a metallization process. The electrode block is divided into multiple mutually insulated electrode blocks using grooves, realizing the integrated processing of multi-field devices, simplifying the processing technology and improving the alignment accuracy.

Benefits of technology

It simplifies the structure and facilitates the fabrication of multi-field devices, improves the alignment accuracy of electrodes, simplifies the assembly process, and is suitable for functions such as deflection and aberration correction in charged particle beam instruments and equipment.

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Abstract

The present application relates to a kind of multipole field devices and multipole field device processing method, wherein multipole field device includes insulating base that can be metallized, insulating base is provided with conductive part and the insulating part connected with conductive part, conductive part has at least one set of electrode group, each electrode group includes two electrode blocks that are radially symmetrical distribution along the insulating base, each electrode block includes at least one electrode, all electrode blocks can jointly generate multipole field pair specific electric field force generated by charged particle beam;All electrode blocks are insulated from each other by insulating part.It is first formed by first forming processing to insulating base, then the surface is covered by metallization process, finally, the structure of the above multipole field device is obtained according to the requirement of electrode block separation and communication.The above-mentioned processing technology is simple and easy to realize, and the multipole field device obtained by processing is an integrated structure, the structure is simple, the centering accuracy of each electrode is improved, and it is possible to expand the multipole field device with more complex structure.
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