一种冷却液分流板及芯片冷却结构
By introducing a coolant distribution plate structure into the chiplet integrated chip, and using the notch formed by the serpentine plate and baffle to guide the coolant, the problem of uneven heat dissipation caused by the rise in coolant temperature is solved, and the uniformity of cooling effect of each part of the chip and the overall cooling effect are improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZHEJIANG LAB
- Filing Date
- 2023-01-19
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional on-chip cooling methods result in high local heat flux density and uneven heat distribution in chiplets. The gradually increasing coolant temperature leads to uneven heat dissipation, affecting the normal operation of the chip.
The coolant distribution plate structure includes a plate and a guide plate. The guide plate separates the inlet and outlet channels in the flow channel, and the serpentine plate and baffle form a notch to guide the coolant, ensuring that the coolant is evenly distributed on the chip surface.
This achieves uniform cooling across all parts of the chiplet integrated chip, improving the overall cooling performance and heat dissipation uniformity of the chip.
Smart Images

Figure CN116417423B_ABST