High-precision linear motion device with adjustable motion damping

Abstract

This invention discloses a high-precision linear motion device with adjustable motion damping. The high-precision linear motion device includes a stator assembly and a mover assembly. The stator assembly includes a first stator and a second stator. The mover assembly includes a linear guide mover frame and a first mover and a second mover fixedly mounted on the linear guide mover frame. One of the first stator and the first mover is an electromagnet, and the other is an electromagnet or a permanent magnet. One of the second stator and the second mover is an electromagnet, and the other is a conductor. The first stator and the first mover can generate a driving force that propels the mover assembly towards a third-direction linear motion, and the second stator and the second mover can generate an Ampere force that propels the mover assembly towards a fourth-direction linear motion. The high-precision linear motion device provided by this invention can achieve rapid and stable high-precision thrust and displacement output.

Description

Technical Field

[0001] This invention relates in particular to a high-precision linear motion device with adjustable motion damping, belonging to the technical field of industrial automation equipment and semiconductor manufacturing equipment. Background Technology

[0002] Low-damping or frictionless guides, such as air-bearing, magnetic-bearing, flexible mechanisms, and linear guides, are widely used in high-precision motion systems. These low-damping guides enable the systems to achieve micro- and nano-level positioning accuracy. However, due to the low-damping characteristics of the system, resonance is easily triggered during positioning, leading to increased settling time, insufficient control gain margin, and susceptibility to vibration.

[0003] Traditional high-precision motion systems maintain a constant damping ratio. Common vibration suppression methods include changing the system's resonant frequency through mechanical design to shift it outside the control bandwidth, but this requires significant modifications to the original system; adding filters to remove the excitation at the resonant frequency, but this increases the system's phase delay and reduces the phase margin. Furthermore, when an external vibration source with the resonant frequency is applied to the system, the filter "fails." Summary of the Invention

[0004] The main objective of this invention is to provide a high-precision linear motion device with adjustable motion damping to overcome the shortcomings of the prior art.

[0005] To achieve the aforementioned objectives, the technical solution adopted by this invention includes:

[0006] This invention provides a high-precision linear motion device with adjustable motion damping, including a stator assembly and a mover assembly, wherein the stator assembly is spaced apart on one side of the mover assembly along a first direction;

[0007] The stator assembly includes a first stator and a second stator spaced apart along a second direction; the mover assembly includes a linear guide mover frame and a first mover and a second mover fixedly spaced apart on the linear guide mover frame along the second direction, wherein the first stator matches the first mover, and the second stator matches the second mover.

[0008] In this configuration, one of the first stator and the first mover is an electromagnet, and the other is an electromagnet or a permanent magnet; one of the second stator and the second mover is an electromagnet, and the other is a conductor. When the electromagnets in the first stator, the first mover, the second stator, and the second mover are energized, a driving force is generated between the first stator and the first mover to propel the mover assembly toward a third direction in a straight line, and an Ampere force is generated between the second stator and the second mover to propel the mover assembly toward a fourth direction in a straight line, wherein the Ampere force is less than the driving force, and the fourth direction is opposite to the third direction.

[0009] Compared with the prior art, the advantages of the present invention include:

[0010] 1) The present invention provides a high-precision linear motion device with adjustable motion damping, which adopts an integrated actuation-damping design. The output force of the device is basically proportional to the input current in the coil, which can realize fast and stable high-precision thrust and displacement output.

[0011] 2) The embodiment of the present invention provides a high-precision linear motion device with adjustable motion damping. By adjusting the output current of the damping coil to adjust the non-contact viscous damping force, the damping characteristics of the system can be effectively controlled, and the anti-interference ability and controllability of the device can be improved. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of a high-precision linear motion device with adjustable motion damping provided in an embodiment of the present invention.

[0013] Figure 2 This is a schematic diagram of the assembly and disassembly structure of a high-precision linear motion device with adjustable motion damping provided in an embodiment of the present invention;

[0014] Figure 3 This is a cross-sectional schematic diagram of a high-precision linear motion device with adjustable motion damping provided in an embodiment of the present invention;

[0015] Figure 4 This is a top view of the guide component in a high-precision linear motion device with adjustable motion damping provided in an embodiment of the present invention;

[0016] Explanation of reference numerals in the attached drawings: Stator assembly-1, Mover assembly-2, First iron core-11a, First coil-11b, Second iron core-12a, Second coil-12b, Magnetic bridge-13, Permanent magnet mover-21, Conductive metal mover-22, Linear guide mover frame-23. Detailed Implementation

[0017] In view of the shortcomings of the prior art, the inventors of this invention, through long-term research and extensive practice, have proposed the technical solution of this invention. The following will further explain and illustrate this technical solution, its implementation process, and its principles.

[0018] This invention provides a high-precision linear motion device with adjustable motion damping, used to achieve high-precision linear motion in high-end equipment such as semiconductor devices, for example, a silicon wafer stage leveling device and a laser system focusing device.

[0019] This invention provides a high-precision linear motion device with adjustable motion damping. It proposes an integrated actuation-damping design, where the output force and current are essentially proportional, providing both actuation and damping forces. The actuator, based on electromagnetic coupling, enables high-precision thrust control and displacement output. The damper, based on eddy current effects, provides non-contact viscous damping. By adjusting the input current of the damping coil, the corresponding output damping force is achieved. Without altering the original system's physical characteristics, the device actively adjusts its damping characteristics, improving its anti-disturbance capability and controllability. Furthermore, both the actuator and damper undergo magnetic circuit optimization, resulting in a device with advantages such as high thrust density and a wide adjustable damping coefficient range.

[0020] This invention provides a high-precision linear motion device with adjustable motion damping, including a stator assembly and a mover assembly, wherein the stator assembly is spaced apart on one side of the mover assembly along a first direction;

[0021] The stator assembly includes a first stator and a second stator spaced apart along a second direction; the mover assembly includes a linear guide mover frame and a first mover and a second mover fixedly spaced apart on the linear guide mover frame along the second direction, wherein the first stator matches the first mover, and the second stator matches the second mover.

[0022] In this configuration, one of the first stator and the first mover is an electromagnet, and the other is an electromagnet or a permanent magnet; one of the second stator and the second mover is an electromagnet, and the other is a conductor. When the electromagnets in the first stator, the first mover, the second stator, and the second mover are energized, a driving force is generated between the first stator and the first mover to propel the mover assembly toward a third direction in a straight line, and an Ampere force is generated between the second stator and the second mover to propel the mover assembly toward a fourth direction in a straight line, wherein the Ampere force is less than the driving force, and the fourth direction is opposite to the third direction.

[0023] In some more specific implementations, the stator assembly includes two first stators and one second stator, with the two first stators symmetrically arranged on both sides of the first stator along a second direction.

[0024] In some more specific implementations, the mover assembly includes two first movers and one second mover, with the two first movers symmetrically arranged on both sides of the second mover along a second direction.

[0025] In some more specific implementations, the high-precision linear motion device includes two stator assemblies, which are symmetrically arranged on both sides of the mover assembly along a first direction.

[0026] In some more specific implementations, a magnetic isolation bridge is provided between the first stator and the second stator, and the magnetic isolation bridge provides magnetic isolation.

[0027] In some more specific implementations, the linear guide mover frame is provided with a first slot and a second slot, and the first mover and the second mover are respectively disposed in the first slot and the second slot, wherein the linear guide mover frame is a non-magnetic component.

[0028] In some more specific implementations, the high-precision linear motion device further includes a mover guide mechanism, which is arranged on both sides of the linear guide mover frame along a second direction, and the linear guide mover frame is movably engaged with the mover guide mechanism and can move linearly along the mover guide mechanism.

[0029] In some more specific implementations, the guiding mechanism is a flexible guiding mechanism with an adjustable shape.

[0030] In some more specific implementations, the moving element guide mechanism is a low-damping linear guide.

[0031] In some more specific implementations, the first stator includes a first iron core and a first coil wound on the first iron core, the second stator includes a second iron core and a second coil wound on the second iron core, and a magnetic isolation bridge is provided between the first iron core and the second iron core and magnetically isolated by the magnetic isolation bridge;

[0032] The first mover includes at least one permanent magnet, the second mover includes at least one metal conductor, the end face of the first iron core faces the permanent magnet and there is a gap between the first iron core and the permanent magnet, and the end face of the second iron core faces the metal conductor and there is a gap between the second iron core and the metal conductor.

[0033] In some more specific implementations, the first iron core has two first teeth, and a first coil slot is formed between the two first teeth. The second iron core has two second teeth, and a second coil slot is formed between the two second teeth. The first coil slot and the second coil slot are separated by the magnetic isolation bridge. The first coil and the second coil are respectively disposed in the first coil slot and the second coil slot.

[0034] The following will further explain the technical solution, its implementation process and principle in conjunction with the accompanying drawings and specific implementation examples. It should be understood that the embodiments of the present invention are intended to explain the structural composition, the connection relationship between the components and the working principle of a high-precision linear motion device with adjustable motion damping provided by the present invention. Unless otherwise specified, the permanent magnets, electromagnets, conductive coils, etc. in the embodiments of the present invention can all be obtained commercially, and the size and model of each component are not limited here.

[0035] Example 1

[0036] This embodiment discloses a high-precision linear motion device with adjustable motion damping, which adopts an integrated actuation-damping design. The device includes two parts: a stator assembly and a mover assembly. The stator assembly provides a magnetic field, and the mover assembly encapsulates the linear guide mover frame with the first mover and the second mover as a single unit. Therefore, the force provided by the cooperation between the first stator and the first mover, and the active damping force (i.e., Ampere force) provided by the cooperation between the second stator and the second mover can be simultaneously applied to the linear guide mover frame, and the displacement is output to the outside through the linear guide mover frame.

[0037] Please see Figures 1-4 A high-precision linear motion device with adjustable motion damping includes a stator assembly 1 and a mover assembly 2. The two stator assemblies 11 are symmetrically arranged on both sides of the mover assembly 2 along a first direction.

[0038] The stator assembly 1 includes a first iron core 11a, a second iron core 12a, and a magnetic isolation bridge 13. A first coil 11b is wound on the first iron core 11a. The first coil 11b and the first iron core 11a are combined to form a first stator and can provide a first magnetic field. A second coil (which can be understood as a damping coil, the same below) 12b is wound on the second iron core 12a. The second coil 12b and the second iron core 12a are combined to form a second stator and can provide a second magnetic field. The first iron core 11a and the second iron core 12a are arranged sequentially along a second direction, and the first iron core 11a and the second iron core 12a are isolated by the magnetic isolation bridge 13, so that the first stator and the second stator respectively form independent magnetic circuits.

[0039] The mover assembly 2 includes a linear guide mover frame 23, a permanent magnet mover (i.e., the aforementioned first mover, the same below) 21, and a conductive metal mover (i.e., the aforementioned second mover, the same below) 22. The permanent magnet mover 21 and the conductive metal mover 22 are fixedly arranged at intervals along the second direction on the linear guide mover frame 23. The permanent magnet mover 21 and the conductive metal mover 22 are respectively matched with the first stator and the second stator. When the first coil 11b and the second coil 12b are energized, the permanent magnet mover 21 is subjected to a working force along the third direction in the first magnetic field provided by the first stator, and the conductive metal mover 22 is subjected to an Ampere force along the fourth direction in the second magnetic field provided by the second stator. The mover assembly 2 moves linearly along the third direction under the combined force of the working force and the Ampere force.

[0040] In this embodiment, please refer to Figure 4 The third direction, the fourth direction, and the second direction are parallel, the second direction is perpendicular to the first direction, and the third direction and the fourth direction are opposite. The working force is greater than the Ampere force. It can be understood that the working force serves as the driving force for the mover assembly 2 to move in a straight line. When the mover assembly 2 moves in a straight line as a whole, the conductive metal mover 22 generates an induced current in the second magnetic field, and the induced current causes the conductive metal mover 22 to be subjected to the Ampere force. The direction of the Ampere force always opposes the movement of the conductive metal mover 22, that is, the direction of the Ampere force is always opposite to the direction of the working force.

[0041] Understandably, the first stator and the first mover cooperate to provide the driving force or power to drive the mover assembly 2 to make linear motion, while the Ampere force generated between the second stator and the second mover is the eddy current damping force that prevents the mover assembly 2 from making linear motion in a specified direction.

[0042] It should be noted that the first stator formed by the combination of the first iron core 11a and the first coil is mainly used to provide a first magnetic field that drives the permanent magnet mover 21 to move in a straight line. The excitation method of the first magnetic field can be a permanent magnet, an electromagnet, or a combination of both. The permanent magnet can be a Halbach permanent magnet array or an alternating magnetic pole arrangement, or a multi-layer structure, etc. Preferably, the excitation method of the first magnetic field can be electrical excitation or hybrid excitation, etc., to improve the motor performance.

[0043] In this embodiment, the second stator, formed by the combination of the second stator core 12a and the second coil, is mainly used to provide a second magnetic field (i.e., a damping magnetic field) that drives the conductive metal mover 22 to move in a straight line. The excitation method of the second magnetic field can be a permanent magnet, an electromagnet, or a combination of both. The permanent magnet can be a Halbach permanent magnet array or an alternating magnetic pole arrangement, or a multi-layer structure, etc. Preferably, the excitation method of the second magnetic field can be electrical excitation or hybrid excitation to improve motor performance.

[0044] In this embodiment, the first iron core 11a has two first teeth, and a first coil slot is formed between the two first teeth. The second iron core 12a has two second teeth, and a second coil slot is formed between the two second teeth. The first coil slot and the second coil slot are separated by the magnetic isolation bridge 13. The first coil 11b and the second coil 12b are respectively disposed in the first coil slot and the second coil slot. The end face of the first iron core 11a faces the permanent magnet mover 21 and has a gap with the permanent magnet mover 21. The end face of the second iron core 12a faces the metal conductor mover 22 and has a gap with the metal conductor.

[0045] In this embodiment, both the first coil 11b and the second coil 12b are conductive coils, and the first iron core 11a and the second iron core 12a can be made of different soft magnetic materials with high magnetic permeability, such as silicon steel sheets, electrical pure iron, iron-nickel alloys, etc.

[0046] In this embodiment, the high-precision linear motion device includes two stator components 1, which are symmetrically arranged on both sides of the mover component 2 along a first direction. The symmetrical arrangement of the two stator components 1 can balance the normal suction force.

[0047] In this embodiment, the stator assembly 1 includes two first iron cores 11a and one second iron core 12a. The two first iron cores 11a are symmetrically arranged on both sides of the second iron core 12a along a second direction. Correspondingly, the mover assembly 2 includes two permanent magnet movers 21 and one metal conductor mover 22. The two permanent magnet movers 21 are symmetrically arranged on both sides of the metal conductor mover 22 along a second direction.

[0048] In this embodiment, the size parameters of the second iron core 12a, the second coil 12b, the matching conductive metal mover 22, and the number of turns of the second coil 12b can be optimized and adjusted according to the required damping force.

[0049] In this embodiment, the linear guide mover frame 23 is provided with a first slot and a second slot. The permanent magnet mover 21 and the conductive metal mover 22 are respectively disposed in the first slot and the second slot. The mover frame 23 is encapsulated with the permanent magnet mover 21 and the conductive metal mover 22 to form the mover assembly.

[0050] In this embodiment, the conductive metal mover 22 can be made of a metal material with high conductivity, such as aluminum or silver. The conductive metal mover 22 can have a multi-layer structure and arrangement to improve the density of the generated eddy current damping force.

[0051] In this embodiment, the linear guide mover skeleton 23 can be a low-damping linear guide rail, and the guiding mechanism is a flexible guiding mechanism with adjustable shape and structure. For example, the linear guide mover skeleton 23 can be a low-density, high-strength skeleton such as carbon fiber, glass fiber, or aluminum alloy.

[0052] In this embodiment, the linear guide mover frame 23 is a topological structure formed by machining of a high-strength, low-resistivity non-magnetic material.

[0053] In this embodiment, the permanent magnet mover 21 can improve the working power density through a reasonable arrangement and combination of permanent magnets. For example, the permanent magnet mover 21 can adopt a Halbach permanent magnet array or an alternating magnetic pole arrangement, or it can be a multi-layer structure, etc.

[0054] In this embodiment, the magnitude of the Ampere force generated between the second magnetic field and the energized conductive metal mover 22 can be adjusted by changing the magnitude of the current input to the second coil 12b, the conductivity of the conductive metal mover 22, and the movement speed of the linear guide mover frame 23.

[0055] In this embodiment, the high-precision linear motion device further includes a mover guide mechanism. The mover guide mechanism is disposed on both sides of the linear guide mover frame along the second direction, and the linear guide mover frame is movably engaged with the mover guide mechanism and can move linearly along the mover guide mechanism. The guide mechanism is a flexible guide mechanism with adjustable shape, for example, the mover guide mechanism is a low-damping linear guide rail.

[0056] Example 2

[0057] The high-precision linear motion device with adjustable motion damping in this embodiment is basically the same as the one in Embodiment 1, except that: the first stator in this embodiment is a permanent magnet, the first mover is an electromagnet formed by a combination of an iron core and a conductive coil wound on the iron core, the second stator is a conductive metal, and the second mover is an electromagnet formed by a combination of an iron core and a conductive coil wound on the iron core.

[0058] It should be noted that the first stator and the first mover can both be electromagnets formed by a combination of an iron core and a conductive coil wound on the iron core.

[0059] The present invention provides a high-precision linear motion device with adjustable motion damping. The magnitude of the resultant force driving the mover assembly is basically proportional to the current flowing through the coil. When the permanent magnet mover moves, it generates high-precision driving force. By adjusting the magnitude of the current in the second coil, a non-contact, approximately linear eddy current damping force can be output, thereby improving the device's anti-interference capability and controllability, and enabling fast and stable high-precision thrust and displacement output.

[0060] This invention provides a high-precision linear motion device with adjustable motion damping. It employs an integrated actuation-damping design, enabling rapid and stable high-precision thrust and displacement output. Furthermore, this invention utilizes an active adjustment of the damping coil's output current to regulate non-contact viscous damping force. Without altering the original system's physical characteristics, it effectively controls the system's damping characteristics, improving the device's anti-interference capability and controllability. Additionally, the integrated actuation-damping magnetic circuits in this high-precision linear motion device are optimized, resulting in advantages such as high precision, high thrust density, and a wide adjustable range of damping coefficients.

[0061] It should be understood that the above embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A high-precision linear motion device with adjustable motion damping, characterized in that: It includes a stator assembly and a mover assembly, wherein the stator assembly is spaced apart on one side of the mover assembly along a first direction; The stator assembly includes two first stators and a second stator spaced apart along a second direction. The two first stators are symmetrically arranged on both sides of the first stator spaced apart along the second direction. A magnetic isolation bridge is provided between the first stator and the second stator, and the magnetic isolation bridge provides magnetic isolation. The mover assembly includes a linear guide mover frame and two first movers and a second mover fixedly arranged on the linear guide mover frame spaced apart along a second direction. The two first movers are symmetrically arranged on both sides of the second mover spaced apart along the second direction. The first stator matches the first mover, and the second stator matches the second mover. The linear guide mover frame is provided with a first slot and a second slot. The first mover and the second mover are respectively disposed in the first slot and the second slot. The linear guide mover frame is a non-magnetic component. In this configuration, one of the first stator and the first mover is an electromagnet, and the other is an electromagnet or a permanent magnet; one of the second stator and the second mover is an electromagnet, and the other is a conductor. When the electromagnets in the first stator, the first mover, the second stator, and the second mover are energized, a driving force is generated between the first stator and the first mover to propel the mover assembly toward a third direction in a straight line, and an Ampere force is generated between the second stator and the second mover to propel the mover assembly toward a fourth direction in a straight line, wherein the Ampere force is less than the driving force, and the fourth direction is opposite to the third direction.

2. The high-precision linear motion device according to claim 1, characterized in that... It includes two stator assemblies, which are symmetrically arranged on both sides of the mover assembly along a first direction.

3. The high-precision linear motion device according to claim 1, characterized in that... It also includes a mover guide mechanism, which is arranged on both sides of the linear guide mover frame along the second direction, and the linear guide mover frame is movably engaged with the mover guide mechanism and can move linearly along the mover guide mechanism.

4. The high-precision linear motion device according to claim 3, characterized in that: The moving part guide mechanism is a flexible guide mechanism with an adjustable shape.

5. The high-precision linear motion device according to claim 1, characterized in that: The first stator includes a first iron core and a first coil wound on the first iron core, and the second stator includes a second iron core and a second coil wound on the second iron core. A magnetic isolation bridge is provided between the first iron core and the second iron core and is magnetically isolated by the magnetic isolation bridge. The first mover includes at least one permanent magnet, the second mover includes at least one metal conductor, the end face of the first iron core faces the permanent magnet and there is a gap between the first iron core and the permanent magnet, and the end face of the second iron core faces the metal conductor and there is a gap between the second iron core and the metal conductor.

6. The high-precision linear motion device according to claim 5, characterized in that: The first iron core has two first teeth, and a first coil slot is formed between the two first teeth. The second iron core has two second teeth, and a second coil slot is formed between the two second teeth. The first coil slot and the second coil slot are separated by the magnetic isolation bridge. The first coil and the second coil are respectively arranged in the first coil slot and the second coil slot.

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