A inchworm resonant piezoelectric motor based on cantilever structure synthesis motion

Abstract

The present application belongs to the technical field of precision driving and positioning, and particularly relates to a inching resonant piezoelectric motor based on cantilever beam structure synthesis motion, comprising a motor base, a flexible stator mechanism, a clamping elastic vibrator, a driving elastic vibrator, a pre-tightening mechanism, a linear slide rail and a pair of sliding blocks; since the overhanging end of the substrate of the clamping elastic vibrator is flexibly connected through a first connecting plate and a stator base, the substrate of the driving elastic vibrator is flexibly connected through a second connecting plate and the first connecting plate, when a harmonic excitation signal with a phase difference of 90º is input, the clamping elastic vibrator realizes approaching or moving away from the linear slide rail in a vibration period, the linear slide rail realizes linear motion in the pair of sliding grooves, and changing the phase difference of the input harmonic signal can realize reverse linear motion of the motor; therefore, the present application realizes the integration of driving and clamping of the piezoelectric motor, adopts single harmonic driving, works in a resonant state, has better energy conversion efficiency, has no sliding friction in the running process, and the motor is stable in operation and long in service life.

Description

Technical Field

[0001] This invention belongs to the technical field of precision drive and positioning, specifically relating to an inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure. Background Technology

[0002] In recent decades, with the increasing demand for actuators in engineering applications, piezoelectric motors have experienced rapid development. Piezoelectric motors utilize the inverse piezoelectric effect of piezoelectric materials to convert input electrical energy into output mechanical energy. Compared to traditional electromagnetic motors, piezoelectric motors have advantages such as small size, fast response, and no electromagnetic interference. Piezoelectric motors have found wide application in fields such as micro-robotics, aerospace equipment, biomedicine, and optical measurement.

[0003] Currently, there are many types of piezoelectric motors. Based on their working principle, they can be mainly divided into ultrasonic motors, inchworm motors, and inertial impact motors. Among them, ultrasonic motors have advantages such as high frequency, high torque, and low noise. However, because ultrasonic motors generate motion through friction between the stator and the mover, they are accompanied by friction and wear during operation, making them unsuitable for long-term operation. Inertial impact motors have advantages such as large stroke, simple structure, high resolution, and small size, allowing for miniaturization. However, because this type of motor uses the inertial impact of the stator to create a micro-displacement difference in the mover for linear or rotational motion, the backlash step distance varies in each cycle, affecting the stability of this type of motor operation.

[0004] In 2015, Qu Jianjun et al. designed a passive clamping inchworm-type piezoelectric motor. Its stator structure consists of a driving clamping body, a holding clamping body, and a driving body. Under certain signal timing control, the lateral movement of the piezoelectric stack in the driving body drives the vertical movement of the clamping body. The lateral movement of the piezoelectric stack and the orderly clamping and releasing of the clamping body against the linear guide rail form an inchworm process, thus achieving linear drive of the motor. During operation, the lateral movement of the piezoelectric stack is converted into the vertical movement of the clamping body, resulting in a relatively small driving force. Therefore, at an operating frequency of 70 Hz, the maximum no-load speed is 0.43 mm / s, and the maximum output force is 2.1 N. The operating frequency is relatively low compared to other types of motors, resulting in a lower output speed. Furthermore, the use of a piezoelectric stack for drive in the structure increases the cost. Summary of the Invention

[0005] To address the above problems, this invention provides a inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure. It has a simple structure and uses single harmonic drive. When operating in the resonant state, it has good energy conversion efficiency. Compared with other motors of the same type, it has the characteristics of no backlash and convenient power supply control. Moreover, its operation in the resonant state can significantly improve the working efficiency of the motor. The piezoelectric bicrystalline wafer can simplify the stator structure and reduce the cost of the motor.

[0006] The specific technical solution of the present invention is as follows: a inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure, comprising a motor base 1, a flexible stator mechanism 2, a clamping elastic oscillator 3, a driving elastic oscillator 4, a pre-tightening mechanism 5, a linear slide rail 6 and a pair of sliders 7; The motor base 1 is an L-shaped plate. The pre-tightening mechanism 5 includes an upright pre-tightening plate 51 and a pair of pre-tightening bolts 52. The pre-tightening plate 51 is arranged longitudinally at the horizontal extension end of the motor base 1, so that the pre-tightening plate 51 and the vertical part of the motor base 1 are arranged opposite to each other and are pre-tightened and fixed by a pair of pre-tightening bolts 52. The pair of sliders 7 are fixedly installed on the inner side of the pre-tightening plate 51, and the linear slide rail 6 is slidably fitted in the pair of slide grooves of the pair of sliders 7, so that the linear slide rail 6 is arranged longitudinally. The flexible stator mechanism 2 includes a stator base 21, a first connecting plate 22, and a second connecting plate 23. The stator base 21 is arranged inside the vertical part of the motor base 1 via a mounting bracket 24. The first connecting plate 22 is arranged vertically, and one longitudinal end of the first connecting plate 22 is flexibly connected to one longitudinal end of the stator base 21. The second connecting plate 23 is inverted L-shaped, and the horizontal and vertical parts of the second connecting plate 23 are flexibly connected. The horizontal part of the second connecting plate 23 is fixedly connected to the first connecting plate 22, so that the vertical part of the second connecting plate 23 is arranged longitudinally. The clamping elastic oscillator 3 and the driving elastic oscillator 4 have the same structure, both including a substrate 31, a pair of piezoelectric sheets 32 and a pair of mass blocks 33. The substrate 31 is an upright, long, rectangular thin sheet. The pair of piezoelectric sheets 32 are arranged on the two sides of the substrate 31, and the pair of mass blocks 33 are arranged on the two sides of the overhanging end of the substrate 31. One end of the substrate 31 of the clamping elastic vibrator 3 is inserted into the slot of the first connecting plate 22, so that the clamping elastic vibrator 3 is arranged longitudinally and cantilevered. One end of the substrate 31 of the driving elastic vibrator 4 is inserted into the slot of the vertical part of the second connecting plate 23, so that the driving elastic vibrator 4 is arranged laterally and cantilevered above the linear slide rail 6. The substrate 31 of the driving elastic oscillator 4 is provided with a driving foot 34, so that the driving foot 34 and the inner side surface of the linear slide rail 6 are in corresponding contact. During operation, harmonic excitation signals with a phase difference of 90° are input to a pair of piezoelectric plates 32 of the clamping elastic oscillator 3 and a pair of piezoelectric plates 32 of the driving elastic oscillator 4, respectively, causing the clamping elastic oscillator 3 and the driving elastic oscillator 4 to oscillate back and forth within one cycle. When the clamping elastic oscillator 3 oscillates towards the linear slide rail 6, the driving foot 34 and the inner side of the linear slide rail 6 come into close contact. At this time, the movement of the driving foot 34 causes the linear slide rail 6 to slide within a pair of grooves. Adjusting the phase difference of the input harmonic excitation signal causes the linear slide rail 6 to slide in the opposite direction within a pair of grooves. The excitation signal is cyclically applied to achieve bidirectional linear motion of the linear slide rail 6.

[0007] Furthermore, the mounting bracket 24 includes a horizontal mounting block 241 and a pair of L-shaped mounting plates 242. The pair of horizontal portions of the pair of mounting plates 242 are arranged longitudinally inside the vertical portion of the motor base 1. The mounting block 241 is located between the pair of mounting plates 242 and is fixedly connected to the pair of mounting plates 242. The stator base 21 is fixedly mounted on the upper end of the mounting block 241.

[0008] Furthermore, one longitudinal end of the first connecting plate 22 is a single-axis straight-circular flexible hinge, realizing a flexible connection between the first connecting plate 22 and the stator base 21 at one longitudinal end; the lower end of the vertical part of the second connecting plate 23 is a single-axis straight-circular flexible hinge, realizing a flexible connection between the horizontal and vertical parts of the second connecting plate 23, and a pair of U-shaped grooves are provided side by side on the vertical part of the second connecting plate 23, and a pair of bolts are fixed by passing horizontally through the pair of U-shaped mounting grooves of the first connecting plate 22 and the second connecting plate 23, so that the horizontal part of the second connecting plate 23 and the first connecting plate 22 are fixedly connected.

[0009] Furthermore, each slider is inverted U-shaped, the bottom plate of the slider is fixedly connected to the inner side of the pre-tightening plate 51, and the linear slide rail 6 is slidably fitted in a pair of slide grooves in the U-shape of the pair of sliders 7; Each of the pre-tightening bolts passes horizontally through the corresponding end of the pre-tightening plate 51 and the vertical part of the motor base 1 via a pre-tightening spring 53, and the overhanging end of the pre-tightening bolt is locked and fixed by a wing nut 54, so that the inner side of the linear slide rail 6 and the drive foot 34 are in close contact.

[0010] Furthermore, the driving foot 34 is an upright rectangular block, and the end face of the driving foot 34 that is close to the inner side of the linear slide rail 6 is an arc surface.

[0011] Furthermore, the lower end of the pretension plate 51 is bent inward to form a lower side plate. The two ends of the lower side plate are respectively provided with insert strips 511 and inverted U-shaped insert plates 512, and both insert strips 511 and inverted U-shaped insert plates 512 are arranged laterally. The two ends of the horizontal part of the motor base 1 are respectively provided with slots. The insert strips 511 are inserted into the slots and locked and fixed by bolts and U-shaped insert plates 512, so that the pretension plate 51 is arranged longitudinally and fixed to the horizontal protruding end of the motor base 1.

[0012] Furthermore, each of the piezoelectric elements is made of piezoelectric ceramic PZT-4.

[0013] Furthermore, when the piezoelectric motor operates at a frequency of 80 Hz, its maximum no-load speed is 7.8 mm / s and its maximum output force is 2.4 N.

[0014] The beneficial technical effects of the present invention are as follows: (1) A inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to the present invention includes a driving elastic oscillator and a clamping elastic oscillator. The clamping elastic oscillator and the linear slide rail are arranged in parallel longitudinally. Since the overhanging end of the substrate of the clamping elastic oscillator is flexibly connected to the stator base through a first connecting plate, The substrate of the driving elastic oscillator is flexibly connected to the first connecting plate through the second connecting plate. When a harmonic excitation signal with a phase difference of 90º is input, the clamping elastic oscillator moves closer to or further away from the linear slide rail within one vibration cycle, so that the driving foot is close to or separates from the inner side of the linear slide rail, realizing the linear slide rail moving linearly in a pair of slide grooves. Changing the phase difference of the input harmonic signal can realize the motor moving linearly in the opposite direction. Therefore, this invention integrates the driving and clamping of a piezoelectric motor, resulting in a simple structure. Both components utilize single-harmonic drive, operating in a resonant state, leading to superior energy conversion efficiency. Compared to other motors of the same type, it eliminates sliding friction during operation, significantly reducing wear and tear, ensuring stable operation, and extending the motor's lifespan.

[0015] (2) The present invention provides a inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure. It adopts a driving elastic oscillator and a clamping elastic oscillator. The driving elastic oscillator directly provides the driving force, and the clamping elastic oscillator indirectly provides the driving force. Under the action of the dual driving force, not only can the travel be theoretically extended indefinitely under the condition that the linear slide rail and the slider are long enough, but it also has higher tensile strength than the traditional piezoelectric stack, and can connect larger mass blocks. It has the advantage of low cost compared to the piezoelectric stack, and can theoretically save 80% of the cost. It can be applied in the conventional daily working voltage (220V).

[0016] (3) The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure of the present invention uses harmonic signals to drive the elastic oscillator and clamping elastic oscillator to achieve separation of driving and control, which better realizes the control of the piezoelectric motor and improves the accuracy of the system. Moreover, during the motion, the "clamping-releasing" state of the driving foot avoids 90% of harmful friction and improves the efficiency of the motor. When the working frequency is 80 Hz, the maximum speed under no-load operation is 7.8 mm / s, and the maximum output force is 2.4 N. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of an inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to the present invention.

[0018] Figure 2 This is a schematic diagram of the installation of the flexible stator mechanism of the present invention.

[0019] Figure 3 for Figure 2 Exploded view.

[0020] Figure 4 This is a schematic diagram of the flexible connection between the stator base and the first connecting plate of the present invention.

[0021] Figure 5 This is a schematic diagram of the structure of the second connecting plate of the present invention.

[0022] Figure 6 This is a schematic diagram of the installation of the motor base and preload plate of the present invention.

[0023] Figure 7 This is a diagram of the excitation electrical signal for the piezoelectric motor of the present invention.

[0024] Figure 8 For the piezoelectric motor of the present invention in Figure 7 The working principle diagram for time t0-t1.

[0025] Figure 9 For the piezoelectric motor of the present invention in Figure 7 The working principle diagram for time t1-t2.

[0026] Figure 10 For the piezoelectric motor of the present invention in Figure 7 The working principle diagram for time t2-t3.

[0027] Figure 11 For the piezoelectric motor of the present invention in Figure 7 The working principle diagram for t3-t4.

[0028] The components include: motor base 1, flexible stator mechanism 2, stator base 21, first connecting plate 22, second connecting plate 23, mounting bracket 24, mounting block 241, a pair of mounting plates 242, clamping elastic vibrator 3, driving elastic vibrator 4, substrate 31, a pair of piezoelectric plates 32, a pair of mass blocks 33, driving foot 34, pre-tightening mechanism 5, pre-tightening plate 51, insert strip 511, insert plate 512, a pair of pre-tightening bolts 52, pre-tightening spring 53, wing nut 54, linear slide rail 6, and a pair of sliders 7. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Example

[0030] See Figure 1 A inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure includes a motor base 1, a flexible stator mechanism 2, a clamping elastic oscillator 3, a driving elastic oscillator 4, a preload mechanism 5, a linear slide rail 6, and a pair of sliders 7. The motor base 1 is an L-shaped plate. The pre-tightening mechanism 5 includes an upright pre-tightening plate 51 and a pair of pre-tightening bolts 52. The pre-tightening plate 51 is arranged longitudinally at the horizontal extension end of the motor base 1, so that the pre-tightening plate 51 and the vertical part of the motor base 1 are arranged opposite to each other and are pre-tightened and fixed by a pair of pre-tightening bolts 52. The pair of sliders 7 are fixedly installed on the inner side of the pre-tightening plate 51, and the linear slide rail 6 is slidably fitted in the pair of slide grooves of the pair of sliders 7, so that the linear slide rail 6 is arranged longitudinally. Furthermore, each slider is inverted U-shaped, the bottom plate of the slider is fixedly connected to the inner side of the pre-tightening plate 51, and the linear slide rail 6 is slidably fitted in a pair of slide grooves in the U-shape of the pair of sliders 7; Each of the pre-tightening bolts passes horizontally through the corresponding end of the pre-tightening plate 51 and the vertical part of the motor base 1 via a pre-tightening spring 53, and the overhanging end of the pre-tightening bolt is locked and fixed by a wing nut 54, so that the inner side of the linear slide rail 6 and the drive foot 34 are in close contact.

[0031] See Figures 2-5 The flexible stator mechanism 2 includes a stator base 21, a first connecting plate 22, and a second connecting plate 23. The stator base 21 is arranged inside the vertical part of the motor base 1 via a mounting bracket 24. The first connecting plate 22 is arranged vertically, and one longitudinal end of the first connecting plate 22 is flexibly connected to one longitudinal end of the stator base 21. The second connecting plate 23 is inverted L-shaped, and the horizontal and vertical parts of the second connecting plate 23 are flexibly connected. The horizontal part of the second connecting plate 23 is fixedly connected to the first connecting plate 22, so that the vertical part of the second connecting plate 23 is arranged longitudinally. The clamping elastic oscillator 3 and the driving elastic oscillator 4 have the same structure, both including a substrate 31, a pair of piezoelectric sheets 32 and a pair of mass blocks 33. The substrate 31 is an upright, long, rectangular thin sheet. The pair of piezoelectric sheets 32 are arranged on the two sides of the substrate 31, and the pair of mass blocks 33 are arranged on the two sides of the overhanging end of the substrate 31. One end of the substrate 31 of the clamping elastic vibrator 3 is inserted into the slot of the first connecting plate 22, so that the clamping elastic vibrator 3 is arranged longitudinally and cantilevered. One end of the substrate 31 of the driving elastic vibrator 4 is inserted into the slot of the vertical part of the second connecting plate 23, so that the driving elastic vibrator 4 is arranged laterally and cantilevered above the linear slide rail 6. The substrate 31 of the driving elastic oscillator 4 is provided with a driving foot 34, so that the driving foot 34 and the inner side surface of the linear slide rail 6 are in corresponding contact.

[0032] Furthermore, the mounting bracket 24 includes a horizontal mounting block 241 and a pair of L-shaped mounting plates 242. The pair of horizontal portions of the pair of mounting plates 242 are arranged longitudinally inside the vertical portion of the motor base 1. The mounting block 241 is located between the pair of mounting plates 242 and is fixedly connected to the pair of mounting plates 242. The stator base 21 is fixedly mounted on the upper end of the mounting block 241.

[0033] Furthermore, one longitudinal end of the first connecting plate 22 is a single-axis straight-circular flexible hinge, realizing a flexible connection between the first connecting plate 22 and the stator base 21 at one longitudinal end; the lower end of the vertical part of the second connecting plate 23 is a single-axis straight-circular flexible hinge, realizing a flexible connection between the horizontal and vertical parts of the second connecting plate 23, and a pair of U-shaped grooves are provided side by side on the vertical part of the second connecting plate 23, and a pair of bolts are fixed by passing horizontally through the pair of U-shaped mounting grooves of the first connecting plate 22 and the second connecting plate 23, so that the horizontal part of the second connecting plate 23 and the first connecting plate 22 are fixedly connected.

[0034] Furthermore, the driving foot 34 is an upright rectangular block, and the end face of the driving foot 34 that is close to the inner side of the linear slide rail 6 is an arc surface.

[0035] See Figure 6 The lower end of the pretension plate 51 is bent inward to form a lower side plate. The two ends of the lower side plate are respectively provided with insert strips 511 and inverted U-shaped insert plates 512, and both insert strips 511 and inverted U-shaped insert plates 512 are arranged horizontally. The two ends of the horizontal part of the motor base 1 are respectively provided with slots. The insert strips 511 are inserted into the slots and locked and fixed by bolts and U-shaped insert plates 512, so that the pretension plate 51 is arranged longitudinally and fixed to the horizontal part of the motor base 1.

[0036] Furthermore, each piezoelectric element is made of piezoelectric ceramic PZT-4. When the piezoelectric motor operates at a frequency of 80Hz, its maximum no-load speed is 7.8 mm / s, and its maximum output force is 2.4 N.

[0037] During operation, harmonic excitation signals with a phase difference of 90° are input to a pair of piezoelectric plates 32 of the clamping elastic oscillator 3 and a pair of piezoelectric plates 32 of the driving elastic oscillator 4, respectively, causing the clamping elastic oscillator 3 and the driving elastic oscillator 4 to oscillate back and forth within one cycle. When the clamping elastic oscillator 3 oscillates towards the linear slide rail 6, the driving foot 34 and the inner side of the linear slide rail 6 come into close contact. At this time, the movement of the driving foot 34 causes the linear slide rail 6 to slide within a pair of grooves. Adjusting the phase difference of the input harmonic excitation signal causes the linear slide rail 6 to slide in the opposite direction within a pair of grooves. The excitation signal is cyclically applied to achieve bidirectional linear motion of the linear slide rail 6.

[0038] The working principle of this invention is explained in detail below: See Figure 7Harmonic excitation signals are input to a pair of piezoelectric plates 32 of the clamping elastic oscillator 3, and harmonic signals with a phase difference of 90° are input to a pair of piezoelectric plates 32 of the driving elastic oscillator 4, so that the clamping elastic oscillator 3 and the driving elastic oscillator 4 oscillate back and forth within one cycle.

[0039] At time t0, the clamping elastic oscillator 3 is in its initial position, and the driving elastic oscillator 4 is in its maximum counterclockwise position.

[0040] See Figure 8 During the time interval from t0 to t1, the voltage of the pair of piezoelectric plates 32 of the clamping elastic oscillator 3 gradually increases, causing the clamping elastic oscillator 3 to move counterclockwise from the initial position to the maximum bias position. At the same time, as the voltage of the pair of piezoelectric plates 32 of the driving elastic oscillator 4 gradually decreases, it moves clockwise from the maximum bias position on the left to the initial position. During this process, the driving foot 34 swings around the axis under the action of the driving elastic oscillator 4, but the clamping elastic oscillator 3 moves away from the linear slide rail 6, and the linear slide rail 6 remains stationary. See Figure 9 During the time interval t1 to t2, the voltage of the pair of piezoelectric plates 32 of the clamping elastic oscillator 3 gradually decreases, causing the clamping elastic oscillator 3 to move from the maximum bias position on the lower side to the initial position, while the voltage of the pair of piezoelectric plates 32 on the driving elastic oscillator 4 gradually increases to the maximum in the opposite direction, causing it to move from the initial position to the maximum bias position on the right side. During this process, the driving foot 34 separates from the linear slide rail 6, and the linear slide rail 6 remains stationary. See Figure 10 During the time interval t2 to t3, the voltage of a pair of piezoelectric plates 32 on the clamping elastic vibrator 3 increases in the reverse direction to the maximum, causing the clamping elastic vibrator 3 to move from the initial position to the upper maximum bias position. During this process, the driving foot 34 will clamp the linear slider, and the driving elastic vibrator 4 will drive the driving foot 34 to move from the right maximum bias position to the initial position. During this process, the linear slide rail 6 will move a distance X1 along the direction of the linear slide rail 4. See Figure 11 During the time interval t3 to t4, the voltage of a pair of piezoelectric plates 32 on the clamping elastic vibrator 3 gradually decreases to zero, causing the clamping elastic vibrator 3 to swing back from the maximum bias position on the upper side to the initial position. During this process, the driving foot and the linear slide rail 6 remain clamped, so that the driving foot moves from the initial position to the maximum bias position on the left side under the drive of the driving elastic vibrator 4. During this process, the linear slide rail 6 will move a distance X2 along the direction of the linear slide rail 4. The piezoelectric motor generates a macroscopic displacement of X1 + X2 over the entire cycle. Therefore, using a continuous harmonic excitation signal will cause the piezoelectric motor to move continuously, while the reverse movement of the linear guide rail 6 can be achieved by changing the phase difference of the signal.

[0041] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure, characterized in that: It includes a motor base (1), a flexible stator mechanism (2), a clamping elastic vibrator (3), a driving elastic vibrator (4), a preload mechanism (5), a linear slide rail (6), and a pair of sliders (7); The motor base (1) is an L-shaped plate. The pre-tightening mechanism (5) includes an upright pre-tightening plate (51) and a pair of pre-tightening bolts (52). The pre-tightening plate (51) is arranged longitudinally at the horizontal extension end of the motor base (1), so that the pre-tightening plate (51) and the vertical part of the motor base (1) are arranged opposite to each other and are pre-tightened and fixed by a pair of pre-tightening bolts (52). The pair of sliders (7) are fixedly installed on the inner side of the pretension plate (51), and the linear slide rail (6) is slidably located in the pair of slide grooves of the pair of sliders (7), so that the linear slide rail (6) is arranged longitudinally. The flexible stator mechanism (2) includes a stator base (21), a first connecting plate (22), and a second connecting plate (23). The stator base (21) is arranged on the inner side of the vertical part of the motor base (1) through a mounting bracket (24). The first connecting plate (22) is arranged vertically, and one longitudinal end of the first connecting plate (22) is flexibly connected to one longitudinal end of the stator base (21). The second connecting plate (23) is inverted L-shaped, and the horizontal part and the vertical part of the second connecting plate (23) are flexibly connected. The horizontal part of the second connecting plate (23) is fixedly connected to the first connecting plate (22), so that the vertical part of the second connecting plate (23) is arranged longitudinally. The clamping elastic oscillator (3) and the driving elastic oscillator (4) have the same structure, both including a substrate (31), a pair of piezoelectric sheets (32) and a pair of mass blocks (33). The substrate (31) is an upright, long, rectangular thin sheet. The pair of piezoelectric sheets (32) are arranged on the two sides of the substrate (31), and the pair of mass blocks (33) are arranged on the two sides of the overhanging end of the substrate (31). One end of the substrate (31) of the clamping elastic vibrator (3) is inserted into the slot of the first connecting plate (22), so that the clamping elastic vibrator (3) is longitudinally suspended. One end of the substrate (31) of the driving elastic vibrator (4) is inserted into the slot of the vertical part of the second connecting plate (23), so that the driving elastic vibrator (4) is laterally suspended above the linear slide rail (6). The substrate (31) of the driving elastic oscillator (4) is provided with a driving foot (34), so that the driving foot (34) and the inner side of the linear slide rail (6) are in corresponding contact; During operation, a harmonic excitation signal with a phase difference of 90° is input to a pair of piezoelectric plates (32) of the clamping elastic oscillator (3) and a pair of piezoelectric plates (32) of the driving elastic oscillator (4), causing the clamping elastic oscillator (3) and the driving elastic oscillator (4) to swing back and forth in one cycle. When the clamping elastic oscillator (3) swings towards the linear slide rail (6), the driving foot (34) and the inner side of the linear slide rail (6) come into close contact. At this time, the driving foot (34) moves to drive the linear slide rail (6) to slide in a pair of grooves. The phase difference of the input harmonic excitation signal is adjusted so that the linear slide rail (6) slides in the opposite direction in a pair of grooves. The excitation signal is cyclical to realize the bidirectional linear motion of the linear slide rail (6).

2. The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to claim 1, characterized in that: The mounting bracket (24) includes a horizontal mounting block (241) and a pair of L-shaped mounting plates (242). The pair of horizontal portions of the mounting plates (242) are arranged longitudinally inside the vertical portion of the motor base (1). The mounting block (241) is located between the pair of mounting plates (242) and is fixedly connected to the pair of mounting plates (242). The stator base (21) is fixedly installed on the upper end of the mounting block (241).

3. The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to claim 1, characterized in that: The first connecting plate (22) has a single-axis straight circular flexible hinge at one longitudinal end, which realizes the flexible connection between the first connecting plate (22) and the stator base (21) at one longitudinal end; the second connecting plate (23) has a single-axis straight circular flexible hinge at the lower end of the vertical part, which realizes the flexible connection between the horizontal and vertical parts of the second connecting plate (23), and a pair of U-shaped grooves are provided side by side on the vertical part of the second connecting plate (23).

4. The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to claim 1, characterized in that: Each of the sliders is an inverted U-shape, and the bottom plate of the slider is fixedly connected to the inner side of the pre-tightening plate (51). The linear slide rail (6) is slidably fitted in a pair of grooves in the U-shape of the pair of sliders (7). Each of the pre-tightening bolts passes horizontally through the corresponding end of the pre-tightening plate (51) and the vertical part of the motor base (1) via a pre-tightening spring (53), and the overhanging end of the pre-tightening bolt is locked and fixed by a wing nut (54), so that the inner side of the linear slide rail (6) and the drive foot (34) are in close contact.

5. The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to claim 4, characterized in that: The driving foot (34) is an upright rectangular block, and the end face of the driving foot (34) that is close to the inner side of the linear slide rail (6) is an arc surface.

6. The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to claim 1, characterized in that: The lower end of the pretension plate (51) is bent inward to form a lower side plate. The two ends of the lower side plate are respectively provided with insert strip (511) and inverted U-shaped insert plate (512), and the insert strip (511) and the inverted U-shaped insert plate (512) are arranged horizontally. The two ends of the horizontal part of the motor base (1) are respectively provided with slots. The insert strip (511) is inserted into the slot and locked and fixed by the cooperation of bolts and U-shaped insert plate (512), so that the pretension plate (51) is arranged longitudinally and fixed at the horizontal part of the motor base (1).

7. The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to claim 1, characterized in that: Each of the piezoelectric elements is made of piezoelectric ceramic PZT-4.

8. The inchworm resonant piezoelectric motor based on the synthetic motion of a cantilever beam structure according to claim 1, characterized in that: When the piezoelectric motor operates at a frequency of 80 Hz, its maximum no-load speed is 7.8 mm / s and its maximum output force is 2.4 N.

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