Ultrasonic horn and bonding apparatus

Abstract

Provided is an ultrasonic horn (100) and a joining apparatus, the ultrasonic horn (100) having: a longitudinal vibration generating portion (10); a horn portion (20); and a torsional vibration generating portion (30), the torsional vibration generating portion (30) including: a body (31) including a polygonal pillar portion (33); a second laminate (371, 372) in which a plurality of second piezoelectric elements (351 to 354) are laminated, and which is attached to a side surface of the polygonal pillar portion (33); a weight (381, 382); and a pressure applying ring (39) that applies pressure by pressing the second piezoelectric elements (351 to 354) to the polygonal pillar portion (33) via the weight (381, 382).

Description

Technical Field

[0001] This disclosure relates to the structure of an ultrasonic welding head and the structure of a bonding device including the ultrasonic welding head, wherein the ultrasonic welding head vibrates a bonding tool attached to a tip in an ultrasonic manner. Background Technology

[0002] Wire bonding apparatuses are widely used to connect the electrodes of a semiconductor die to the leads of a lead frame. In one method, a capillary tube is used to press the wire against the electrode, and then the capillary tube is vibrated ultrasonically to bond the wire to the electrode. The wire is then bridged to the lead, and the bridged wire is pressed against the lead, and then the capillary tube is vibrated ultrasonically to bond the wire to the lead.

[0003] Incidentally, in order to address the need to improve bonding quality and bonding strength, a method has been proposed to vibrate the tip of a bonding tool in multiple directions. For example, Patent Document 1 discloses a method in which an ultrasonic vibrator is attached to an ultrasonic welding head, and power of different frequencies is supplied to corresponding areas of piezoelectric elements, causing the tip of the bonding tool attached to the ultrasonic welding head to vibrate in multiple directions, thereby generating frictional motion. In the ultrasonic vibrator, piezoelectric elements are stacked, and two areas separated by notches in a direction parallel to the electrode plane are formed on the piezoelectric elements.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent No. 6180736 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] However, the method described in Patent Document 1 has the problem that the structure of the ultrasonic vibrator and the driving device become complicated.

[0009] Therefore, the purpose of this disclosure is to provide an ultrasonic welding head that, with a simple structure, causes a bonding tool attached to a tip to vibrate in multiple directions.

[0010] Technical means to solve the problem

[0011] The ultrasonic welding head disclosed herein is an ultrasonic welding head for bonding equipment. The ultrasonic welding head is characterized by comprising: a longitudinal vibration generating section, wherein a first laminate is attached inside the longitudinal vibration generating section, wherein a plurality of plate-shaped first piezoelectric elements that deform in the thickness direction when a voltage is applied are stacked in the first laminate, and the longitudinal vibration generating section generates ultrasonic vibrations in the front-rear direction; a welding head extending forward from the longitudinal vibration generating section and having a bonding tool attached to its front end; and a torsional vibration generating section extending rearward from the longitudinal vibration generating section, wherein the torsional vibration generating section comprises: a body extending from the longitudinal vibration generating section... Extending rearward and including a polygonal support portion; two second stacked bodies in which a plurality of plate-shaped second piezoelectric elements that are shear-deformable when a voltage is applied are stacked, and the two second stacked bodies are respectively attached to the two side surfaces of the polygonal support portion in a stacking direction orthogonal to the front-rear direction along a width direction; weights are stacked on the outer side of each second stacked body in the width direction; and pressure application rings surround each weight, each second stacked body and the polygonal support portion, and press the plurality of second piezoelectric elements onto the polygonal support portion via each weight, thereby applying pressure in the thickness direction to each second piezoelectric element.

[0012] In this manner, a torsional vibration generating part is set off from the ground along with the longitudinal vibration generating part. A second laminate is attached to the torsional vibration generating part. In the second laminate, a plurality of plate-shaped second piezoelectric elements that are shear-deformed when a voltage is applied are stacked. A weight is attached to the side surface of the polygonal support part of the body. With this configuration, a connecting tool attached to the tip can vibrate in multiple directions with a simple structure.

[0013] In the ultrasonic welding head disclosed herein, each second layer can be attached to the two side surfaces of the polygonal support portion in such a manner that when high-frequency power is applied from the high-frequency power source, each second layer undergoes shear deformation in the up-down direction orthogonal to the front-back direction and the width direction, and the directions of shear deformation are opposite to each other, and each second layer can also be connected to the high-frequency power source.

[0014] With this configuration, when high-frequency power is applied to each of the second stacked bodies, the second stacked bodies on the left and right sides of the polygonal support undergo shear deformation in opposite directions in the vertical direction, and each weight moves in opposite directions in the vertical direction. Therefore, a torsional moment can be applied to the polygonal support, causing the polygonal support to vibrate torsionally.

[0015] In the ultrasonic welding head disclosed herein, in the second stack, electrode plates can be stacked at both ends and between each second piezoelectric element. Multiple electrode plates can be alternately connected to the output terminal and ground terminal of a high-frequency power supply in the stacking direction. Each second piezoelectric element can be stacked in a manner where the polarization direction is alternately reversed. The second stack can be attached to both sides of the polygonal support portion in this manner. The polarization direction of each second piezoelectric element placed symmetrically with respect to the polygonal support portion in the width direction is opposite in the vertical direction. Each electrode plate placed symmetrically with respect to the polygonal support portion in the width direction can be connected to the same terminal of the high-frequency power supply.

[0016] When the second piezoelectric element is connected to the high-frequency power supply in the manner described above, the currents applied to the two adjacent second piezoelectric elements sandwiching the electrode plate flow in opposite directions in the width direction. Additionally, the polarization directions of the two adjacent second piezoelectric elements are opposite to each other. Therefore, currents in opposite directions flow in the two second piezoelectric elements with opposite polarization directions, and thus, the two second piezoelectric elements undergo shear deformation in the same direction. Using this structure, the second laminate is shear deformed integrally.

[0017] Furthermore, the second stack is attached to the two sides of the polygonal support in such a manner that the polarization directions of the second piezoelectric elements, which are symmetrically positioned relative to the polygonal support in the width direction, are opposite in the vertical direction. Incidentally, the electrode plates are positioned symmetrically relative to the polygonal support. Therefore, the current flow direction is symmetrical on the left and right sides of the polygonal support. Consequently, the shear deformation directions of the second piezoelectric elements, which are symmetrically positioned relative to the polygonal support in the width direction, are opposite in the vertical direction; for example, upward on the left and downward on the right. Using this structure, when high-frequency power is applied to each of the second stacks, the second stacks on the left and right sides of the polygonal support undergo shear deformation in opposite vertical directions, and each weight moves in opposite vertical directions. Therefore, torque can be applied to the polygonal support, and the polygonal support can vibrate torsionally.

[0018] In the ultrasonic welding head disclosed herein, in the second stack, electrode plates can be stacked at both ends and between each second piezoelectric element. Multiple electrode plates can be alternately connected to the output terminal and ground terminal of a high-frequency power supply in the stacking direction. Each second piezoelectric element can be stacked in a manner where the polarization direction is alternately reversed. The second stack can be attached to both sides of the polygonal support portion in this manner. The polarization direction of each second piezoelectric element placed symmetrically with respect to the polygonal support portion in the width direction is the same. Each electrode plate placed symmetrically with respect to the polygonal support portion in the width direction can be connected to different terminals of the high-frequency power supply.

[0019] The second stack is attached to both sides of the polygonal support in such a manner that the polarization directions of the second piezoelectric elements, which are symmetrically positioned relative to the polygonal support in the width direction, are the same. Conversely, the electrode plates are not symmetrical relative to the polygonal support, and each electrode plate symmetrically positioned relative to the polygonal support in the width direction is connected to different terminals of the high-frequency power supply. Therefore, the directions of the current flowing in the second piezoelectric elements symmetrically positioned relative to the polygonal support in the width direction are opposite to each other. Consequently, the directions of shear deformation of the second piezoelectric elements symmetrically positioned relative to the polygonal support in the width direction are opposite to each other in the vertical direction, for example, upward on the left and downward on the right. With this configuration, when high-frequency power is applied to each of the second stacks, the second stacks on the left and right sides of the polygonal support undergo shear deformation in opposite vertical directions, and move the weights in opposite vertical directions respectively. Therefore, torque can be applied to the polygonal support, and the polygonal support can vibrate torsionally.

[0020] In the ultrasonic welding head disclosed herein, the pressure application ring may be formed of a shape storage alloy that contracts when heat is applied.

[0021] Using this configuration, pressure can be applied to the second piezoelectric element in the following simple way: with the second laminate and the weight attached to both sides of the polygonal support portion of the body, the pressure application ring is attached to its outer circumference, and then heat is applied.

[0022] In the ultrasonic welding head disclosed herein, the longitudinal vibration generating part may include: a housing, the housing being a quadrilateral frame element extending in the front-rear direction, and the housing having an opening that penetrates in the vertical direction and extends in the front-rear direction, and a first laminate attached to the opening such that the lamination direction is along the front-rear direction; and a pressure applying wedge attached between the end surface of the opening in the front-rear direction and the first laminate, and the pressure applying wedge applying pressure in the thickness direction to a plurality of first piezoelectric elements.

[0023] In this way, a longitudinal vibration generator can be formed using a simple structure.

[0024] In the ultrasonic welding head disclosed herein, in the first stack, other electrode plates can be stacked at both ends and between each first piezoelectric element, and multiple other electrode plates can be alternately connected to the output terminal and ground terminal of another high-frequency power supply in the stacking direction, and each first piezoelectric element can be stacked in a manner in which the polarization direction is alternately reversed.

[0025] When the first piezoelectric element is connected to the high-frequency power supply as described above, the current flow directions of the high-frequency power applied to the two adjacent first piezoelectric elements clamping the electrode plate are opposite to each other. Furthermore, the polarization directions of the two adjacent first piezoelectric elements are opposite to each other. Therefore, the two first piezoelectric elements deform in a similar manner in the thickness direction. Using this configuration, the longitudinal vibration generating section generates vibration in the front-to-back direction.

[0026] The bonding device disclosed herein is characterized by comprising: an ultrasonic welding head, a front tip extending from the rear to the front in a front-rear direction along the Y-axis, to which a bonding tool is attached; and a torsional vibration generating portion positioned along the ultrasonic welding head for generating torsional vibration to induce torque about the Y-axis in the ultrasonic welding head, the torsional vibration generating portion comprising: a body having at least one side surface located at a predetermined distance from the Y-axis in a width direction along an X-axis perpendicular to the Y-axis; and at least one second laminate positioned adjacent to the side surface and having at least one pair of second piezoelectric elements for shear deformation to generate reciprocating rotational motion of torque.

[0027] In the combined apparatus disclosed herein, the torsional vibration generating part may further include: a polygonal support portion located in the body for providing a side surface for the second laminate; and a weight located near the second laminate to amplify the torque about the Y-axis in the ultrasonic welding head when the second laminate undergoes shear deformation.

[0028] In the combined device disclosed herein, the torsional vibration generating unit may further include a pressure applying ring surrounding the weight, the second laminate, and the polygonal support portion, for pressing the second piezoelectric element onto the polygonal support portion via the weight, thereby applying pressure to the second piezoelectric element along the thickness direction.

[0029] In the combined apparatus of this disclosure, the pressure application ring may be formed of a shape storage alloy that contracts when heat is applied.

[0030] In the assembly device disclosed herein, the pressure applying ring may be a clamp-type pressure applying ring.

[0031] In the bonding apparatus disclosed herein, the ultrasonic welding head may include a longitudinal vibration generating portion positioned along the ultrasonic welding head to generate ultrasonic vibrations toward the ultrasonic welding head in a front-to-back direction. The longitudinal vibration generating portion includes at least a first laminate having a plurality of first piezoelectric elements for deforming in the thickness direction when a voltage is applied.

[0032] In the combined device disclosed herein, the longitudinal vibration generating part may include a pressure applying wedge having a skewed surface and located at the end surface of the first laminate for applying pressure to a plurality of first piezoelectric elements along the thickness direction.

[0033] The bonding device disclosed herein is characterized by comprising: an ultrasonic welding head, with a front tip extending from the rear to the front in a front-rear direction along the Y-axis, to which a bonding tool is attached; a longitudinal vibration generating portion positioned along the ultrasonic welding head, the longitudinal vibration generating portion comprising at least a first laminate having a first piezoelectric element for shear deformation to generate ultrasonic vibration in the front-rear direction; and a torsional vibration generating portion positioned along the ultrasonic welding head for generating torsional vibration to induce torque about the Y-axis in the ultrasonic welding head, the torsional vibration generating portion comprising: a body having at least one side surface located at a predetermined distance from the Y-axis in a width direction along an X-axis perpendicular to the Y-axis; and at least one second laminate positioned adjacent to the side surface and having at least a pair of second piezoelectric elements for shear deformation to generate reciprocating rotational motion of torque.

[0034] The effects of the invention

[0035] This disclosure provides an ultrasonic welding head with a simple structure that causes a bonding tool attached to a tip to vibrate in multiple directions. Attached Figure Description

[0036] Figure 1 This is a plan view illustrating an embodiment of the ultrasonic welding head.

[0037] Figure 2 This is a perspective view of the ultrasonic welding head as seen from the front end side according to this embodiment.

[0038] Figure 3 It is shown Figure 1 The diagram shows the cross-section AA and the cross-section of the longitudinal vibration generating part of the ultrasonic welding head.

[0039] Figure 4 It is shown Figure 1 The diagram shows the cross-section of BB and the cross-section of the torsional vibration generating part of the ultrasonic welding head.

[0040] Figure 5 This is an explanatory diagram showing the operation of the longitudinal vibration generating unit.

[0041] Figure 6 This is an explanatory diagram showing the operation of the torsional vibration generating unit.

[0042] Figure 7 This is a cross-sectional view showing the torsional vibration generating portion of an ultrasonic welding head according to another embodiment.

[0043] Figure 8 It is shown Figure 7 The diagram illustrates the operation of the torsional vibration generator shown.

[0044] Figure 9This is a cross-sectional view showing the torsional vibration generating portion of an ultrasonic welding head according to another embodiment.

[0045] [Explanation of Symbols]

[0046] 10: Longitudinal vibration generating part

[0047] 11: Shell

[0048] 12: Opening

[0049] 12f: Front surface

[0050] 12r: Back end surface

[0051] 13, 131, 132: First piezoelectric element

[0052] 14, 14a, 14b, 361-366: Electrode plates

[0053] 15: First layer of stacked body

[0054] 16: Pressure Application Wedge

[0055] 17: Install flange

[0056] 17a: Bolt hole

[0057] 20: Welding head

[0058] 21: Front end

[0059] 30: Torsional vibration generating part

[0060] 31: Ontology

[0061] 32: Connecting part

[0062] 33: Polygonal support section

[0063] 33a: Upper surface

[0064] 33c: Lower surface

[0065] 34: Rear end

[0066] 39: Pressure Application Ring

[0067] 39a: Clamp-type pressure application ring

[0068] 39b: Ring section

[0069] 39c: Flange portion

[0070] 39d: Bolt

[0071] 39e: Nut

[0072] 41: First High-Frequency Power Supply

[0073] 41G, 42G: Grounding terminals

[0074] 41P, 42P: Output terminals

[0075] 42: Second high-frequency power supply

[0076] 51: Capillary

[0077] 100, 200, 300: Ultrasonic welding head

[0078] 101: Central Axis

[0079] 131f, 132f: Front surface

[0080] 131r, 132r: Rear surface

[0081] 331: Left side surface

[0082] 332: Right side surface

[0083] 351~354: Second piezoelectric element

[0084] 371, 372: Second layer of stacked bodies

[0085] 381, 382: Heavy objects Detailed Implementation

[0086] The ultrasonic welding head 100 of the embodiment will now be described with reference to the accompanying drawings. Figure 1 The ultrasonic welding head 100 shown is a device provided to a wiring connection device and used to perform wiring connection.

[0087] like Figure 1 As shown, the ultrasonic welding head 100 of the embodiment includes a longitudinal vibration generating section 10, a welding head 20, and a torsional vibration generating section 30. Furthermore, in the following description, the direction in which the central axis 101 extends in the longitudinal direction of the ultrasonic welding head 100 will be referred to as the Y direction or the front-to-back direction; the direction perpendicular to the Y direction in the horizontal plane will be referred to as the X direction or the width direction; and the vertical direction will be referred to as the Z direction. Additionally, the side of the welding head 20 will be referred to as the front side or the positive side in the Y direction, and the side of the torsional vibration generating section 30 will be referred to as the rear side or the opposite side in the Y direction. Furthermore, the central axis 101 is a dummy axis, and a circumferential direction 93 is formed around the central axis 101. Additionally, the right side relative to the positive side in the Y direction will be referred to as the right side of the ultrasonic welding head 100, and the side opposite to the right side will be referred to as the left side.

[0088] The longitudinal vibration generating part 10 includes a housing 11, a first laminate 15, and a pressure applying wedge 16.

[0089] like Figure 1 and Figure 2As shown, the housing 11 is a quadrilateral frame element made of a metal such as titanium, extending in the front-to-back direction, and has an opening 12 formed at its center, penetrating in the vertical direction and extending in the front-to-back direction. Mounting flanges 17 are provided on the left and right outer surfaces of the housing 11, extending on the positive and negative sides in the X direction, respectively. Bolt holes 17a are provided on the mounting flanges 17 for fixing the ultrasonic welding head 100 to a wiring connection device. A first laminate 15 is attached to the opening 12, in which multiple first piezoelectric elements 13 are stacked. Electrode plates 14 are stacked at both ends of the first laminate 15 and between the first piezoelectric elements 13. A pressure application wedge 16 is attached between the rear end surface 12r of the opening 12 and the rear surface of the first laminate 15 to apply pressure in the thickness direction to the multiple first piezoelectric elements 13.

[0090] The welding head 20 is a portion extending forward from the housing 11 of the longitudinal vibration generating section 10, and amplifies the ultrasonic vibrations generated by the longitudinal vibration generating section 10 in the front-rear direction. The welding head 20 is integrally formed with the housing 11 of the longitudinal vibration generating section 10 and is made of metal, and has a width or diameter that narrows from the root portion connected to the front end of the housing 11 towards the front end portion 21. Figure 2 As shown, a capillary tube 51 serving as a bonding tool is attached to the front end 21 of the welding head 20, and the capillary tube 51 has a front end 52.

[0091] The torsional vibration generating unit 30 includes: a body 31, formed by a connecting portion 32 connected to the rear end of the housing 11 of the longitudinal vibration generating unit 10, a rear end portion 34, and a polygonal support portion 33 having a quadrilateral cross-section disposed between the connecting portion 32 and the rear end portion 34; second laminates 371 and 372, attached to the left side surface 331 and the right side surface 332 of the polygonal support portion 33 of the body 31; weights 381 and 382, ​​attached to the outer side of the second laminates 371 and 372 in the width direction; and a pressure applying ring 39. Here, the left side surface 331 and the right side surface 332 are surfaces placed at symmetrical positions in the width direction.

[0092] Next, refer to Figure 3 The detailed structure of the longitudinal vibration generating unit 10 will be described below. (Refer to the above...) Figure 1 The first laminate 15 is attached to the opening 12 of the housing 11, and a pressure wedge 16 is attached between the rear end surface 12r of the opening 12 and the rear end surface of the first laminate 15.

[0093] The first laminate 15 includes a plate-shaped first piezoelectric element 13 that deforms in the thickness direction when a voltage is applied, and electrode plates 14a and 14b laminated between the first piezoelectric elements and at both ends.

[0094] The first piezoelectric element 13 of the first stack 15 is stacked in a manner that alternately reverses the polarization direction P1 indicated by the solid white arrow in the figure. Here, the polarization direction P1 is the direction from the reverse potential to the positive potential inside the first piezoelectric element 13. Figure 3 As shown, the first piezoelectric element 13 at the foremost position and the first piezoelectric element 13 at the second position from the front are stacked together, sandwiching the electrode plate 14a. The first piezoelectric element 13 at the foremost position has a positive polarization direction P1 in the Y direction, and the first piezoelectric element 13 at the second position has a negative polarization direction P1 in the Y direction. Similarly, the first piezoelectric element 13 at the second position and the first piezoelectric element 13 at the third position from the front are stacked together, sandwiching the electrode plate 14a. The first piezoelectric element 13 at the third position has a positive polarization direction P1 in the Y direction, which is opposite to the polarization direction P1 of the first piezoelectric element 13 at the second position. In this way, the first piezoelectric elements 13 are stacked together, sandwiching the electrode plates 14a and 14b, with their polarization directions P1 alternately reversed.

[0095] Electrode plates 14b stacked on the side of the first piezoelectric element 13 in the polarization direction P1 are connected to the ground terminal 41G of the first high-frequency power supply 41 via wire 48g, and electrode plates 14a stacked on the opposite side of the first piezoelectric element 13 in the polarization direction P1 are connected to the output terminal 41P of the first high-frequency power supply 41 via wire 48p. In this manner, multiple electrode plates 14a and 14b are alternately connected to the output terminal 41P and the ground terminal 41G of the first high-frequency power supply 41 in the stacking direction. When the voltage of the output terminal 41P is positive, the potential of electrode plate 14a becomes higher than the potential of electrode plate 14b, and when the voltage of the output terminal 41P is negative, the potential of electrode plate 14a becomes lower than the potential of electrode plate 14b.

[0096] like Figure 3 As shown, the rear end surface 12r of the opening 12 slopes forward from the upper position toward the lower position. The rear surface of the pressure applying wedge 16 has the same slope as the rear end surface 12r. When the pressure applying wedge 16 is inserted between the rear end surface 12r of the opening 12 and the rear end surface of the first laminate 15, the pressure applying wedge 16 presses the first laminate 15 against the front surface 12f of the opening 12 and applies pressure to the first piezoelectric element 13 in the thickness direction.

[0097] Next, refer to Figure 4The details of the torsional vibration generating unit 30 will be explained. As described above, the torsional vibration generating unit 30 includes a body 31, which includes a polygonal support 33, second stacked bodies 371 and 372, weights 381 and 382, ​​and a pressure application ring 39.

[0098] The polygonal support portion 33 of the main body 31 is a portion with a quadrilateral cylindrical cross-section placed at the center of the main body 31 in the front-rear direction, and includes an upper surface 33a, a lower surface 33c, a left side surface 331, and a right side surface 332. A second stacked body 371 is attached to the left side surface 331 of the polygonal support portion 33, in which second piezoelectric elements 351 and 352 are stacked. In addition, a second stacked body 372 is attached to the right side surface 332 of the polygonal support portion 33, in which second piezoelectric elements 353 and 354 are stacked.

[0099] The second stack 371 on the left is formed by a plurality of plate-shaped second piezoelectric elements 351 and 352 that are sheared in the vertical direction when a voltage is applied, and electrode plates 361 and 363 stacked between the second piezoelectric elements 351 and 352 and at both ends. Similarly, the second stack 372 on the right is formed by a plurality of plate-shaped second piezoelectric elements 353 and 354 that are sheared in the vertical direction when a voltage is applied, and electrode plates 364 to 366 stacked between the second piezoelectric elements 353 and 354 and at both ends.

[0100] The second piezoelectric elements 351 and 352 of the second stack 371 on the left are stacked in a manner opposite in the vertical direction, as indicated by the solid white arrow in the figure, with respect to the polarization direction P2. Here, the polarization direction P2 is the direction from the reverse potential to the positive potential inside the second piezoelectric elements 351 and 352, similar to the polarization direction P1. Figure 4 As shown, in the second stack 371 on the left, the inner second piezoelectric element 351 and the outer second piezoelectric element 352 are stacked such that the polarization direction P2 of the second piezoelectric element 351 is downward and the polarization direction P2 of the second piezoelectric element 352 is upward. Similarly, in the second stack 372 on the right, the inner second piezoelectric element 353 and the outer second piezoelectric element 354 are stacked such that the polarization direction P2 of the second piezoelectric element 353 is upward and the polarization direction P2 of the second piezoelectric element 354 is downward.

[0101] Therefore, the polarization directions of the second piezoelectric elements 351 and 353 on the inner side are opposite in the vertical direction, downward for the left side and upward for the right side, and the second piezoelectric elements 351 and 353 are placed symmetrically with respect to the polygonal support portion 33 in the width direction. Similarly, the polarization directions of the second piezoelectric elements 352 and 354 on the outer side are opposite in the vertical direction, for example, upward for the left side and downward for the right side. Therefore, the second laminates 371 and 372 on the left and right sides are attached to the two side surfaces 331 and 332 of the polygonal support portion 33 in this manner: the polarization directions of the second piezoelectric elements 351 to 354, which are placed symmetrically with respect to the polygonal support portion 33 in the width direction, are opposite in the vertical direction.

[0102] Alternatively, the second stack 371 and 372 can be stacked after reversing the same piezoelectric element so that the polarization direction P2 is opposite, or the second stack 371 and 372 can be stacked by stacking two types of piezoelectric elements with different polarization directions P2 so that the polarization direction P2 is opposite.

[0103] Between the second piezoelectric elements 351 and 352 of the second stack 371 on the left side, an electrode plate 362 connected to the output terminal 42P of the second high-frequency power supply 42 is stacked. Here, the second high-frequency power supply 42 is a high-frequency power supply separated from the first high-frequency power supply 41 already described. In addition, electrode plates 361 and 363 connected to the ground terminal 42G of the second high-frequency power supply 42 are stacked at both ends. In this way, electrode plates 361 and 363 and electrode plate 362 are stacked at both ends of the second stack 371 on the left side and between the second piezoelectric elements 351 and 352, respectively, and are alternately connected to the output terminal 42P and the ground terminal 42G of the second high-frequency power supply 42 in the stacking direction.

[0104] Similarly, electrode plate 365, connected to the output terminal 42P of the second high-frequency power supply 42, is stacked between the second piezoelectric elements 353 and 354 of the second stack 372 on the right side. Additionally, electrode plates 364 and 366, connected to the ground terminal 42G of the second high-frequency power supply 42, are stacked at both ends. In this manner, electrode plates 364 and 366 are stacked with electrode plate 365 at both ends of the second stack 372 on the right side and between the second piezoelectric elements 353 and 354, and are alternately connected to the output terminal 42P and the ground terminal 42G of the second high-frequency power supply 42 in the stacking direction.

[0105] In this manner, electrode plates 362 and 365, which are symmetrically positioned relative to the polygonal support portion 33 in the width direction, are both connected to the output terminal 42P of the second high-frequency power supply 42. Furthermore, electrode plates 361 and 364, as well as electrode plates 363 and 366, which are symmetrically positioned relative to the polygonal support portion 33 in the width direction, are both connected to the ground terminal 42G of the second high-frequency power supply 42. In other words, electrode plates 362 and 365, 361 and 364, and 363 and 366, which are symmetrically positioned relative to the polygonal support portion 33 in the width direction, are respectively connected to the same terminal of the second high-frequency power supply 42.

[0106] Weights 381 and 382 are attached to the outer sides of the second stacks 371 and 372 on the left and right sides, respectively, in the width direction. A pressure application ring 39 is attached around the outer circumference of the weights 381 and 382 on the left and right sides, the outer circumference of the second stacks 371 and 372 on the left and right sides, and the outer circumference of the upper surface 33a and lower surface 33c of the polygonal support portion 33. The pressure application ring 39 is formed of a shape storage alloy that contracts when heat is applied. The pressure application ring 39 may be, for example, a shape storage alloy having nickel and titanium as main components. Before being heated, the pressure application ring 39 has a circumference longer than the outer circumference of the weights 381 and 382 on the left and right sides, the outer circumference of the second stacks 371 and 372 on the left and right sides, and the outer circumference of the upper surface 33a and lower surface 33c of the polygonal support portion 33. A pressure-applying ring 39 is assembled from the rear end side to surround the outer circumference of these portions. Moreover, when the ring is heated, the ring contracts, causing the ring to press the second piezoelectric elements 351 to 354 on the left and right sides against the left and right surfaces 331 and 332 of the polygonal support portion 33 via the weights 381 and 382, ​​and applying pressure in the thickness direction to the second piezoelectric elements 351 to 354 stacked on the left and right surfaces 331 and 332, respectively.

[0107] Next, we will refer to Figure 5 and Figure 6 The operation when high-frequency power is applied to the ultrasonic welding head 100 configured as described above is explained. Furthermore, in Figure 5 and Figure 6 In the diagram, the dashed lines show the longitudinal vibration generating unit 10 and the torsional vibration generating unit 30 when no high-frequency power is applied. First, refer to... Figure 5 The operation of the longitudinal vibration generating unit 10 will be explained. Figure 5 This is a diagram of a portion of a first stack 15 consisting of two first piezoelectric elements 131 and 132, electrode plate 14a, and two electrode plates 14b.

[0108] like Figure 5 As shown, when the potential of the output terminal 41P of the first high-frequency power supply 41 is positive, current flows from the electrode plate 14a connected to the output terminal 41P to the electrode plate 14b connected to the ground terminal 41G. Therefore, the current flows in the polarization direction indicated by solid arrow 71 from the rear surface 131r of the first piezoelectric element 131 at the front side towards the front surface 131f. Thus, the first piezoelectric element 131 at the front side deforms in a manner that increases in thickness, as shown by arrow 95. Similarly, in the first piezoelectric element 132 at the rear side, current flows in the polarization direction indicated by solid arrow 72 from the front surface 132f in contact with the electrode plate 14a towards the rear surface 132r. Using this process, the first piezoelectric element 132 at the rear side also deforms in a manner that increases in thickness, as shown by arrow 95. When the potential of the output terminal 41P of the first high-frequency power supply 41 becomes negative, a reversal process occurs, and both the first piezoelectric element 131 at the front side and the first piezoelectric element 132 at the rear side deform in a manner that decreases in thickness.

[0109] In this manner, when high-frequency power is applied from the first high-frequency power source 41 to the longitudinal vibration generating section 10, the plurality of first piezoelectric elements 13 of the first laminate 15 repeatedly deform to simultaneously increase or decrease their thickness. This fluctuation in thickness generates ultrasonic vibrations in the front-to-back direction. These ultrasonic vibrations are amplified by the welding head 20, causing the tip of the capillary 51 attached to the tip of the welding head 20 to vibrate in the Y direction or in the front-to-back direction, such as... Figure 1 As shown by arrow 92 in the image.

[0110] Next, refer to Figure 6The operation of the torsional vibration generating unit 30 will be described. Similar to the longitudinal vibration generating unit 10 described above, the case where the potential of the output terminal 42P of the second high-frequency power supply 42 is positive will be described. In the second piezoelectric element 351 located inside the second laminate 371 attached to the left side of the polygonal support 33, current flows in the right direction from the electrode plate 362 connected to the output terminal 42P toward the electrode plate 361 placed inside and connected to the ground terminal 42G. At this time, the second piezoelectric element 351 inside is sheared and deformed in such a way that the right side deforms in the downward direction, as shown by arrow 98a, and the left side deforms in the upward direction, as shown by arrow 98b. Conversely, in the second piezoelectric element 352 placed outside, current flows in the left direction, opposite to the direction of the current in the second piezoelectric element 351, from the electrode plate 362 toward the electrode plate 363 placed outside and connected to the ground terminal 42G. The polarization direction of the outer second piezoelectric element 352, as shown by the solid white arrow 82, is opposite to that of the inner second piezoelectric element 351, as shown by the solid white arrow 81. Therefore, similar to the second piezoelectric element 351, the outer second piezoelectric element 352 is shear-deformed in the following manner: the right side, which contacts the inner electrode plate 361, deforms downwards as shown by arrow 98c, and the left side, which contacts the outer electrode plate 363, deforms upwards as shown by arrow 98d. In this way, since the polarization direction of the outer second piezoelectric element 352 is opposite to that of the inner second piezoelectric element 351, and the current flow directions are also opposite, the outer second piezoelectric element 352 is shear-deformed in a direction similar to that of the inner second piezoelectric element 351. Therefore, when the potential of the output terminal 42P of the second high-frequency power supply 42 is positive, both the inner second piezoelectric element 351 and the outer second piezoelectric element 352 are shear-deformed in a manner where the left side deforms upwards. Furthermore, by utilizing shear deformation, the second piezoelectric elements 351 and 352 move the weight 381 on the left side in the upward direction.

[0111] Incidentally, in the second piezoelectric element 353 located on the inner side of the second laminate 372 attached to the right inner side of the polygonal support portion 33, similar to the second piezoelectric elements 352 on the outer and left sides, current flows from the electrode plate 365 toward the electrode plate 364 in a leftward direction. At this time, similar to the second piezoelectric elements 352 on the outer and left sides, since the polarization direction of the second piezoelectric element 353 on the inner side, indicated by the solid white arrow 83, is upward, the second piezoelectric element 353, similar to the second piezoelectric element 352 on the left side, is sheared and deformed in the following manner: the left side deforms upward as shown by arrow 98e, and the right side deforms downward as shown by arrow 98f. In the second piezoelectric element 354 on the outer side, similar to the second piezoelectric element 351 on the left inner side, current flows from the electrode plate 365 toward the electrode plate 366 in a rightward direction. In the second piezoelectric element 354 located on the outer right side, similar to the second piezoelectric element 351 located on the inner left side, since the polarization direction indicated by the solid white arrow 84 is downward, the second piezoelectric element 354, similar to the second piezoelectric element 351 located on the left side, undergoes shear deformation in the following manner: the left side deforms upward as shown by arrow 98g, and the right side deforms downward as shown by arrow 98h. Therefore, when the potential of the output terminal 42P of the second high-frequency power supply 42 is positive, both the inner second piezoelectric element 353 and the outer second piezoelectric element 354 undergo shear deformation in a manner where the right side of both the inner and outer sides deforms downward. Moreover, by utilizing shear deformation, the second piezoelectric elements 353 and 354 move the weight 382 on the right side downward.

[0112] As described above, when the potential of the output terminal 42P of the second high-frequency power supply 42 is positive, the second piezoelectric elements 351 and 352 on the left side are sheared and deformed by deforming upwards from the left, and the weight 381 on the left side is moved upwards. Conversely, when the potential of the output terminal 42P of the second high-frequency power supply 42 is positive, the second piezoelectric elements 353 and 354 on the right side are sheared and deformed by deforming downwards from the right, and the weight 382 on the right side is moved downwards. Using this process, a clockwise torque is generated in the polygonal support portion 33 of the body 31. When the potential of the output terminal 42P of the second high-frequency power supply 42 becomes negative, a reverse process occurs. The second piezoelectric elements 351 and 352 on the left side are sheared and deformed by deforming downwards from the left, and the weight 381 on the left side is moved downwards. The second piezoelectric elements 353 and 354 on the right side are sheared and deformed by deforming upwards from the right, and the weight 382 on the right side is moved upwards. Using this process, a counterclockwise torque is generated in the polygonal support portion 33 of the body 31. Furthermore, the torsional vibration generating unit 30 thus generates torsional vibration about the central axis 101 in the longitudinal direction of the ultrasonic welding head 100, such as Figure 2As indicated by arrow 94. Using this torsional vibration, the tip of the capillary 51 attached to the tip of the welding head 20 vibrates in the X direction or the width direction.

[0113] When the second piezoelectric elements 351 and 352 on the left are connected to the second high-frequency power supply 42 in the manner described above, the current flowing in the width direction of the high-frequency power applied to the two adjacent second piezoelectric elements 351 and 352 sandwiching the electrode plate 362 is set to be in opposite directions. Conversely, the polarization directions of the two adjacent second piezoelectric elements 351 and 352 are opposite to each other in the vertical direction. Therefore, currents in opposite directions flow in the two second piezoelectric elements 351 and 352 with opposite polarization directions. As a result, the two second piezoelectric elements 351 and 352 are integrally sheared and deformed in the same direction in the vertical direction. This also applies to the second piezoelectric elements 353 and 354 on the right and the second laminate 372.

[0114] Furthermore, the second stack 371 on the left and the second stack 372 on the right are respectively attached to the left surface 331 and the right surface 332 of the polygonal support portion 33 in this manner: the polarization directions of the second piezoelectric elements 351 and 353 and the second piezoelectric elements 352 and 354, which are placed symmetrically with respect to the polygonal support portion 33 in the width direction, are opposite in the vertical direction. Conversely, the electrode plates 362 and 365, the electrode plates 361 and 364, and the electrode plates 363 and 366 are connected to the second high-frequency power supply 42 in this manner: the current flow directions of the second stacks 371 and 372 on the left and right are symmetrical with respect to the polygonal support portion 33. As explained, the polarization directions of the second piezoelectric elements 351 and 353 and the second piezoelectric elements 352 and 354, which are placed symmetrically with respect to the polygonal support portion 33 in the width direction, are opposite in the vertical direction. Therefore, the shear deformation directions of the second piezoelectric elements 351 and 353, and the second piezoelectric elements 352 and 354, which are symmetrically positioned in the width direction relative to the polygonal support portion 33, are opposite in the vertical direction. With this configuration, when high-frequency power is applied to the second laminates 371 and 372, the second laminates 371 and 372 on the left and right sides of the polygonal support portion 33 undergo shear deformation in opposite vertical directions, and the weights 381 and 382 move in opposite vertical directions respectively. Therefore, torque can be applied to the polygonal support portion 33, causing it to vibrate torsionally.

[0115] As described above, the ultrasonic welding head 100 has a simple structure that causes the capillary 51 attached to the tip to vibrate in the XY direction.

[0116] Next, refer to Figure 7 and Figure 8 Another embodiment of the ultrasonic welding head 200 will be described below. Referring to the above... Figures 1 to 6 The components of the ultrasonic welding head 100 described herein are similar to those of other components and will not be described again.

[0117] like Figure 7 As shown, in the ultrasonic welding head 200, the polarization direction of the second piezoelectric element 353 on the inner side of the second stack 372 on the right side is set downward, and the polarization direction of the second piezoelectric element 354 on the outer side is set upward. The electrode plate 365 stacked between the second piezoelectric elements 353 and 354 is connected to the ground terminal 42G of the second high-frequency power supply 42, and the electrode plates 364 and 366 stacked at both ends of the second stack 372 are connected to the output terminal 42P of the second high-frequency power supply 42.

[0118] Therefore, in the ultrasonic welding head 200, the second laminates 371 and 372 are respectively attached to the left surface 331 and right surface 332 of the polygonal support portion 33, such that the polarization directions of the second piezoelectric elements 351 and 353, and the second piezoelectric elements 352 and 354, which are placed symmetrically with respect to the polygonal support portion 33 in the width direction, are in the same direction. The electrode plates 361 and 364, 362 and 365, and 363 and 366, which are placed symmetrically with respect to the polygonal support portion 33 in the width direction, are connected to different terminals of the second high-frequency power supply 42; that is, one is connected to the output terminal 42P and the other is connected to the ground terminal 42G. Other structures are the same as those of the ultrasonic welding head 100 already described.

[0119] Reference Figure 8 The operation of the ultrasonic welding head 200 when the potential of the output terminal 42P of the second high-frequency power supply 42 is positive will be described. Since the displacement of the second stack 371 on the left is the same as the displacement in the ultrasonic welding head 100 described above, this displacement will not be described again.

[0120] like Figure 8As shown, when the potential of the output terminal 42P of the second high-frequency power supply 42 is positive, in the second piezoelectric element 353 on the right inner side, the current flows from the electrode plate 364 to the electrode plate 365 in a rightward direction, and the polarization direction is downward. The flow direction and polarization direction of the current are similar to the flow direction and polarization direction of the current in the second piezoelectric element 351 on the left. Therefore, similar to the second piezoelectric element 351 on the left, the second piezoelectric element 353 on the right inner side is sheared and deformed in this way: the right side deforms in a downward direction and the left side deforms in an upward direction, as shown by arrows 98e and 98f. Similarly, since the direction and polarization direction of the current flowing in the second piezoelectric element 354 on the right are similar to the direction and polarization direction of the current flowing in the second piezoelectric element 352 on the left, the second piezoelectric element 354 on the right is sheared and deformed in this way: the right side deforms in a downward direction and the left side deforms in an upward direction, as shown by arrows 98g and 98h.

[0121] In this manner, in the ultrasonic welding head 200, similar to the ultrasonic welding head 100, when the potential of the output terminal 42P of the second high-frequency power supply 42 is positive, the second piezoelectric element 353 on the inner side and the second piezoelectric element 354 on the outer side undergo shear deformation, with the right side of the outer side deforming downwards. Moreover, by utilizing the shear deformation, the second piezoelectric elements 353 and 354 move the weight 382 on the right side downwards.

[0122] Using this process, similar to the ultrasonic welding head 100, when high-frequency power is applied to the second stack 371 and 372, the second stack 371 and 372 at the left and right sides of the polygonal support portion 33 undergo shear deformation in opposite directions in the vertical direction, and the weights 381 and 382 move in opposite directions in the vertical direction, respectively. Therefore, torque can be applied to the polygonal support portion 33, and the polygonal support portion 33 can be made torsionally vibrate.

[0123] The ultrasonic welding head 200 has a similar effect to the ultrasonic welding head 100.

[0124] Next, refer to Figure 9 Another embodiment of the ultrasonic welding head 300 will be described below. Referring to the above... Figures 1 to 8 The same components of the ultrasonic welding head 100 and ultrasonic welding head 200 described herein are given the same symbols and will not be described again.

[0125] exist Figure 9In the ultrasonic welding head 300 shown, instead of the pressure application ring 39 formed by the shape storage alloy of the ultrasonic welding heads 100 and 200, the clamp-type pressure application ring 39a applies pressure in the thickness direction to the second piezoelectric elements 351 to 354 stacked on the left side surface 331 and right side surface 332 of the polygonal support portion 33, respectively.

[0126] The clamp-type pressure application ring 39a includes a ring portion 39b having a ring shape or a C-shape with a gap, two flange portions 39c protruding outward from the ring portion 39b in the radial direction on both sides of the gap, and a bolt 39d inserted into a hole formed in the two flange portions 39c and cooperating with a nut 39e to fasten the two flange portions 39c in the circumferential direction.

[0127] In the clamp-type pressure application ring 39a, with the bolts 39d and nut 39e removed, the length of the inner circumference of the ring portion 39b is longer than the length of the outer circumference of the weights 381 and 382 on the left and right sides, the outer circumference of the second stacked bodies 371 and 372 on the left and right sides, and the outer circumference of the upper surface 33a and lower surface 33c of the polygonal support portion 33. When pressure is applied to the second piezoelectric elements 351 to 354 using the clamp-type pressure application ring 39a, the bolts 39d and nut 39e are removed, such that the length of the inner circumference of the ring portion 39b is longer than the length of the outer circumference of the weights 381 and 382 on the left and right sides, the outer circumference of the second stacked bodies 371 and 372 on the left and right sides, and the outer circumference of the upper surface 33a and lower surface 33c of the polygonal support portion 33, and the ring portion 39b is fitted from the rear end side to surround the outer circumference of these portions. Furthermore, bolt 39d passes through the holes in the two flanges 39c and tightens nuts 39e from opposite sides to reduce the gap between the two flanges 39c. Using this configuration, the inner surface of the ring 39b presses the second piezoelectric elements 351 to 354 on the left and right sides onto the left and right surfaces 331 and 332 of the polygonal support portion 33 via weights 381 and 382. In this way, the inner surface of the ring 39b applies pressure in the thickness direction to the second piezoelectric elements 351 to 354 stacked on the left and right surfaces 331 and 332.

[0128] The ultrasonic welding head 300 applies pressure in the thickness direction to the second piezoelectric elements 351 to 354 with a simple structure.

[0129] In the aforementioned ultrasonic welding heads 100, 200, and 300, the structure in which the second laminates 371 and 372 are attached to the left surface 331 and right surface 332 of the polygonal support portion 33 having a quadrilateral cross-section is described. However, the polygonal support portion 33 is not limited to a quadrilateral cross-section. As long as the cross-section has a left surface 331 and a right surface 332, the cross-section can be, for example, hexagonal or octagonal.

[0130] In this regard, although the ultrasonic welding heads 100, 200 and 300 illustrate a structure having a pair of second stacked bodies 371 and 372, the number of second stacked bodies 371 and 372 is not limited to two, and as shown in other alternative embodiments as described in the claims, the number of second stacked bodies may be one or more than three, in order to generate a reciprocating rotational motion about the Y-axis for torque in the ultrasonic welding head.

[0131] Furthermore, weights 381 and 382 are respectively attached to the outer sides of the second laminates 371 and 372 in the width direction within the ultrasonic welding heads 100, 200, and 300, to amplify the torque generated by shear deformation of the second laminates 371 and 372. Since weights 381 and 382 are made of heavy metals such as lead and tungsten to facilitate amplification, the torque is efficiently amplified.

[0132] On the other hand, in a particular embodiment, the polygonal support portion 33 extends laterally for a long distance like a long rod, and the second stacks 371 and 372 are placed near the distal end of the long rod-shaped polygonal support portion 33, with the weights 381 and 382 having arbitrary structures. Depending on the structural configuration of the polygonal support portion 33, the weights 381 and 382 are placed on the outside or inside of the second stacks 371 and 372 along the width direction of the ultrasonic welding heads 100, 200, and 300.

[0133] In the disclosed embodiments, ultrasonic welding heads 100, 200, and 300 illustrate a structure in which the torsional vibration generating portion 30 is located behind the longitudinal vibration generating portion 10 along the front-back direction. In other potential applications described in the claims, the relative position of the torsional vibration generating portion 30 to the longitudinal vibration generating portion 10 is not limited to this positional relationship.

Claims

1. An ultrasonic welding head for bonding equipment, characterized in that it comprises: A longitudinal vibration generating part has a first laminate attached inside it. In the first laminate, a plurality of plate-shaped first piezoelectric elements that deform in the thickness direction when a voltage is applied are stacked, and the longitudinal vibration generating part generates ultrasonic vibration in the front-back direction. A welding head extends forward from the longitudinal vibration generating part and a joining tool is attached to the tip of the welding head. as well as A torsional vibration generating part extends rearward from the longitudinal vibration generating part, wherein... The torsional vibration generating unit includes: The body extends rearward from the longitudinal vibration generating part and includes a polygonal support portion; Two second stacked bodies, in which a plurality of plate-shaped second piezoelectric elements that are shear-deformed when a voltage is applied are stacked, and the two second stacked bodies are respectively attached to the two side surfaces of the polygonal pillar portion in such a way that the stacking direction is orthogonal to the width direction. The weights are stacked on the outer side of each of the two second stacked bodies in the width direction; and A pressure application ring surrounds each of the weights, each of the two second stacks, and the polygonal support portion, and presses the plurality of second piezoelectric elements onto the polygonal support portion via each of the weights, thereby applying pressure in the thickness direction to each of the plurality of second piezoelectric elements.

2. The ultrasonic welding head according to claim 1, characterized in that... Each of the two second stacked bodies is attached to the two side surfaces of the polygonal support in such a manner that when high-frequency power is applied from the high-frequency power source, each of the two second stacked bodies undergoes shear deformation in the up-down direction orthogonal to the front-back direction and the width direction, and the directions of shear deformation are opposite to each other, and each of the two second stacked bodies is also connected to the high-frequency power source.

3. The ultrasonic welding head according to claim 2, characterized in that... In each of the two second stacked bodies, electrode plates are stacked at both ends and between each of the plurality of second piezoelectric elements. The plurality of electrode plates are alternately connected to the output terminal and ground terminal of the high-frequency power supply, oriented in the stacking direction. The plurality of second piezoelectric elements are stacked in a manner in which their polarization directions are alternately reversed, and Each of the two second stacked bodies is attached to the two side surfaces of the polygonal pillar in such a manner that the polarization directions of each of the plurality of second piezoelectric elements placed symmetrically with respect to the polygonal pillar in the width direction are opposite in the vertical direction, and each of the electrode plates placed symmetrically with respect to the polygonal pillar in the width direction is connected to the same terminal of the high-frequency power supply.

4. The ultrasonic welding head according to claim 2, characterized in that... In each of the two second stacked bodies, electrode plates are stacked at both ends and between each of the plurality of second piezoelectric elements. The plurality of electrode plates are alternately connected to the output terminal and ground terminal of the high-frequency power supply, oriented in the stacking direction. The plurality of second piezoelectric elements are stacked in a manner in which their polarization directions are alternately reversed, and Each of the two second stacked bodies is attached to the two side surfaces of the polygonal support in such a manner that the polarization directions of each of the plurality of second piezoelectric elements placed symmetrically with respect to the polygonal support in the width direction are the same, and each of the electrode plates placed symmetrically with respect to the polygonal support in the width direction is connected to different terminals of the high-frequency power supply.

5. The ultrasonic welding head according to claim 1, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

6. The ultrasonic welding head according to claim 2, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

7. The ultrasonic welding head according to claim 3, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

8. The ultrasonic welding head according to claim 4, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

9. The ultrasonic welding head according to claim 1, characterized in that... The longitudinal vibration generating unit includes: A housing, the housing being a quadrilateral frame element extending in a front-rear direction, and the housing having an opening penetrating in a vertical direction and extending in a front-rear direction, and the first laminate being attached to the opening such that the lamination direction is along the front-rear direction; and A pressure-applying wedge is attached between the front-to-back end surface of the opening and the first laminate, and the pressure-applying wedge applies pressure in the thickness direction to the plurality of first piezoelectric elements.

10. The ultrasonic welding head according to claim 9, characterized in that... In the first stack, other electrode plates are stacked at both ends and between each of the plurality of first piezoelectric elements. Multiple other electrode plates are alternately connected to the output terminal and ground terminal of another high-frequency power supply, oriented towards the stacking direction, and The plurality of first piezoelectric elements are stacked in a manner in which the polarization directions are alternately reversed.

11. The ultrasonic welding head according to claim 9, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

12. The ultrasonic welding head according to claim 10, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

13. The ultrasonic welding head according to claim 2, characterized in that... The longitudinal vibration generating unit includes: A housing, the housing being a quadrilateral frame element extending in a front-rear direction, and the housing having an opening penetrating in a vertical direction and extending in a front-rear direction, and the first laminate being attached to the opening such that the lamination direction is along the front-rear direction; and A pressure-applying wedge is attached between the front-to-back end surface of the opening and the first laminate, and the pressure-applying wedge applies pressure in the thickness direction to the plurality of first piezoelectric elements. In the first stack, other electrode plates are stacked at both ends and between each of the plurality of first piezoelectric elements. Multiple other electrode plates are alternately connected to the output terminal and ground terminal of another high-frequency power supply, oriented towards the stacking direction, and The plurality of first piezoelectric elements are stacked in a manner in which the polarization directions are alternately reversed.

14. The ultrasonic welding head according to claim 3, characterized in that... The longitudinal vibration generating unit includes: A housing, the housing being a quadrilateral frame element extending in a front-rear direction, and the housing having an opening penetrating in a vertical direction and extending in a front-rear direction, and the first laminate being attached to the opening such that the lamination direction is along the front-rear direction; and A pressure-applying wedge is attached between the front-to-back end surface of the opening and the first laminate, and the pressure-applying wedge applies pressure in the thickness direction to the plurality of first piezoelectric elements. In the first stack, other electrode plates are stacked at both ends and between each of the plurality of first piezoelectric elements. Multiple other electrode plates are alternately connected to the output terminal and ground terminal of another high-frequency power supply, oriented towards the stacking direction, and The plurality of first piezoelectric elements are stacked in a manner in which the polarization directions are alternately reversed.

15. The ultrasonic welding head according to claim 4, characterized in that... The longitudinal vibration generating unit includes: A housing, the housing being a quadrilateral frame element extending in a front-rear direction, and the housing having an opening penetrating in a vertical direction and extending in a front-rear direction, and the first laminate being attached to the opening such that the lamination direction is along the front-rear direction; and A pressure-applying wedge is attached between the front-to-back end surface of the opening and the first laminate, and the pressure-applying wedge applies pressure in the thickness direction to the plurality of first piezoelectric elements. In the first stack, other electrode plates are stacked at both ends and between each of the plurality of first piezoelectric elements. Multiple other electrode plates are alternately connected to the output terminal and ground terminal of another high-frequency power supply, oriented towards the stacking direction, and The plurality of first piezoelectric elements are stacked in a manner in which the polarization directions are alternately reversed.

16. The ultrasonic welding head according to claim 13, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

17. The ultrasonic welding head according to claim 14, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

18. The ultrasonic welding head according to claim 15, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

19. A combining device, characterized in that... include: An ultrasonic welding head extends from the rear side to the front side along the Y-axis in the front-back direction, with a tool attached to the front tip. as well as A torsional vibration generating unit, positioned along the ultrasonic welding head, is used to generate torsional vibration to induce a torque about the Y-axis within the ultrasonic welding head. The torsional vibration generating unit includes: The body has at least one side surface, said side surface being located at a predetermined distance from the Y-axis in a width direction along an X-axis perpendicular to the Y-axis; and At least one second laminate, positioned adjacent to the side surface and having at least one pair of second piezoelectric elements, is used for reciprocating rotational motion of shear deformation to generate torque. The torsional vibration generating unit further includes: A polygonal support portion, located within the body, serves to provide the side surface for the at least one second laminate; and A weight is placed near the at least one second stack to thereby amplify the torque about the Y-axis in the ultrasonic welding head when the at least one second stack undergoes shear deformation.

20. The combining device according to claim 19, characterized in that... The torsional vibration generating unit further includes a pressure applying ring surrounding the weight, the at least one second laminate, and the polygonal support portion, for pressing the at least one pair of second piezoelectric elements onto the polygonal support portion via the weight, thereby applying pressure in the thickness direction to the at least one pair of second piezoelectric elements.

21. The combining device according to claim 20, characterized in that... The pressure application ring is formed of a shape storage alloy that contracts when heat is applied.

22. The combining device according to claim 20, characterized in that... The pressure application ring is a clamp-type pressure application ring.

23. A combining device, characterized in that... include: An ultrasonic welding head extends from the rear side to the front side along the Y-axis in the front-back direction, with a tool attached to the front tip. as well as A torsional vibration generating unit, positioned along the ultrasonic welding head, is used to generate torsional vibration to induce a torque about the Y-axis within the ultrasonic welding head. The torsional vibration generating unit includes: The body has at least one side surface, which is located at a predetermined distance from the Y-axis in the width direction along the X-axis perpendicular to the Y-axis; as well as At least one second laminate, positioned adjacent to the side surface and having at least one pair of second piezoelectric elements, is used for reciprocating rotational motion of shear deformation to generate torque. The ultrasonic welding head includes a longitudinal vibration generating portion positioned along the ultrasonic welding head to generate ultrasonic vibrations toward the ultrasonic welding head in the front-back direction. The longitudinal vibration generating portion includes at least a first laminate having a plurality of first piezoelectric elements for deformation in the thickness direction upon application of voltage. The longitudinal vibration generating part includes a pressure applying wedge having a skewed surface and located at the end surface of the first laminate, for applying pressure in the thickness direction to the plurality of first piezoelectric elements.

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