一种硅片包装方法

By inspecting the side and exterior surfaces of silicon wafer assemblies and using an automated packaging method that wraps them with dust-free paper and plastic film, the problems of missed detection, false detection, and secondary damage in the silicon wafer packaging process have been solved, achieving an efficient and stable silicon wafer packaging process.

CN116461798BActive Publication Date: 2026-07-17TIANJIN HUANBO SCI & TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
TIANJIN HUANBO SCI & TECH CO LTD
Filing Date
2023-04-26
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Silicon wafer packaging is prone to missed or incorrect inspections, resulting in low yield and low production efficiency. It also causes secondary damage and contamination, affecting equipment grafting rate and production costs.

Method used

Automated inspection and packaging methods are adopted, including inspection of the side and appearance of the silicon wafer assembly, wrapping the top and bottom surfaces with dust-free paper, and forming a cross-shaped packaging film by wrapping with plastic film. A six-axis robot is used to roll the packaging film and apply labels to ensure the quality and efficiency of the silicon wafer assembly.

Benefits of technology

It improves the quality and efficiency of silicon wafer packaging, reduces the risk of secondary damage and contamination, ensures the stability of product quality and packaging quality, and enhances production efficiency.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN116461798B_ABST
    Figure CN116461798B_ABST
Patent Text Reader

Abstract

一种硅片包装方法,步骤包括:对一沓硅片进行对齐整理,以形成叠置的硅片组;再对硅片组的外观进行检测,以判断有无缺陷;再对硅片组的上下端面进行无尘纸包装;对包裹有无尘纸的硅片组进行塑膜包装,以获得下端面相互交叉设置的包装膜。本发明先对硅片组的侧立面和水平面进行外观检查,确认是否有不良品;再对合格的硅片组的上下面放置无尘纸包裹,避免硅片组被二次污染,再经塑料薄膜包裹后热塑成型,获得合格的包装膜;全程自动化控制,硅片组包装质量好且效率高,降低被二次损伤或脏污的风险,可获得产品质量稳定、包装质量好的硅片组包装膜。
Need to check novelty before this filing date? Find Prior Art