Angle turning device and vacuum chuck

Abstract

This invention relates to an angle rotation device and a vacuum suction cup clamp. The angle rotation device includes: a sleeve with a spherical connecting cavity inside; an end cap located at one end of the sleeve and sealed to it, the end cap having a first air passage connecting the inside and outside of the sleeve; a connecting shaft including a connecting ball end and a connecting end, the connecting ball end being located within the connecting cavity and forming a ball hinge with the sleeve, the connecting end extending outside the sleeve for connecting a suction cup, the connecting shaft having a second air passage connecting the inside and outside of the sleeve; and a locking member movably located within the sleeve, the locking member being movable to abut against the connecting ball end, and causing the connecting ball end to abut against the sleeve to form a sealed connection with the sleeve. This application enables the adjustment of the suction cup angle, thereby allowing the suction cup angle to be adjusted when the vacuum suction cup clamp is handling irregularly shaped workpieces, so that the suction cup fully contacts the workpiece, enabling the vacuum suction cup clamp to smoothly grasp the workpiece and complete the handling work, while reducing wear caused by the contact between the suction cup and the workpiece.

Description

Technical Field

[0001] This invention relates to the technical field of vacuum suction cup clamps, specifically to an angle rotation device and a vacuum suction cup clamp. Background Technology

[0002] In the field of industrial automation equipment, vacuum suction cup clamps are widely used in workpiece handling. They are usually set at the end of the execution of automated equipment, and the workpiece is moved by grabbing it with a vacuum suction cup.

[0003] In current vacuum chuck fixtures, the angle of the chuck is usually fixed. When using a vacuum chuck fixture to handle curved or irregularly shaped workpieces with inclined surfaces, multiple chucks cannot fully fit the workpiece, causing the vacuum chuck fixture to fail to grip the workpiece and increasing wear when the chucks and workpieces come into contact. Summary of the Invention

[0004] Based on the above description, the present invention provides an angle rotation device and a vacuum suction cup clamp to solve the problem that when the current vacuum suction cup clamp handles curved or irregularly shaped workpieces with inclined surfaces, multiple suction cups cannot fully adhere to the workpiece, resulting in the vacuum suction cup clamp being unable to grasp the workpiece and causing increased wear when the suction cups and the workpiece come into contact.

[0005] The technical solution of the present invention to solve the above-mentioned technical problems is as follows:

[0006] Firstly, this application provides an angle rotation device, the technical solution of which is as follows:

[0007] An angle rotation device, comprising:

[0008] A sleeve with a spherical connecting cavity inside;

[0009] An end cap is provided at one end of the sleeve and is sealed to the sleeve. The end cap is provided with a first air passage that connects the inside and outside of the sleeve.

[0010] A connecting shaft includes a connecting ball end and a connecting end. The connecting ball end is located in the connecting cavity and forms a ball hinge with the sleeve. The connecting end extends to the outside of the sleeve for connecting a suction cup. A second air passage is provided on the connecting shaft to communicate with the inside and outside of the sleeve.

[0011] A locking element is movably disposed within the sleeve, the locking element being movable to abut against the connecting ball end, thereby abutting the connecting ball end against the sleeve to form a sealed connection with the sleeve.

[0012] Based on the above technical solution, the present invention can be further improved as follows.

[0013] Furthermore, the connecting cavity is located at the end of the sleeve away from the end cap, the connecting end passes through the end of the sleeve away from the end cap and extends outside the sleeve, and the locking member is disposed between the end cap and the connecting shaft and is movably disposed along the axial direction of the sleeve.

[0014] Furthermore, the locking member has a locking groove adapted to the connecting ball end. When the locking member abuts against the connecting ball end, the connecting ball end protrudes into the locking groove and abuts against the inner wall of the locking groove. The locking member also has a third air passage connecting the locking groove and the sleeve.

[0015] Furthermore, an elastic element is provided between the locking member and the end cap, the elastic element being used to keep the locking member in a state of abutting against the connecting ball end.

[0016] Furthermore, an elastic sealing ring is provided on the side wall of the connecting cavity and is arranged around the connecting ball end. When the connecting ball end abuts against the sleeve, the elastic sealing ring is deformed by pressure, so as to form a sealed connection between the connecting ball end and the sleeve through the elastic sealing ring.

[0017] Furthermore, the sleeve is provided with a driving assembly, which is connected to the locking member and is used to drive the locking member to move to abut against or disengage from the connecting ball end, and the driving assembly is sealed to the sleeve.

[0018] Furthermore, the driving component includes:

[0019] An outer cylinder is encircled outside the sleeve and sealed to the sleeve, and the outer cylinder can move along the axial direction of the sleeve;

[0020] A connector passes through a through hole in the side wall of the sleeve and connects the outer cylinder and the locking member, so that when the outer cylinder moves axially along the sleeve, the locking member moves axially along the sleeve via the connector.

[0021] Furthermore, the diameter of the locking element is the same as the inner diameter of the sleeve, and the third air passage connects the locking groove and the first air passage.

[0022] Secondly, this application provides a vacuum suction cup clamp, including the angle rotation device described above.

[0023] Compared with the prior art, the technical solution of this application has the following beneficial technical effects:

[0024] 1. This application utilizes a sleeve, end cap, connecting shaft, and locking element. The end cap connects to the connecting hardware of the vacuum suction cup clamp, and the connecting end of the connecting shaft connects to the suction cup to mount the suction cup onto the connecting hardware. The connecting ball end of the connecting shaft engages with the connecting cavity within the sleeve, forming a ball joint between the connecting shaft and the sleeve. The connecting shaft can rotate relative to the sleeve within a certain spatial range, allowing the suction cup to rotate relative to the sleeve and the connecting hardware, thus adjusting the suction cup angle. The locking element, movably located within the locking element, minimizes the rotational resistance of the connecting ball end when it moves to a position where it is not in contact with the connecting ball end, facilitating adjustment of the connecting shaft angle. Once the connecting shaft angle is determined, the locking element moves to abut against the connecting ball end, thus preventing the connecting ball from contacting the connecting ball. The end abuts against the sleeve, thereby increasing the rotational resistance of the connecting ball end and making it difficult for the connecting ball end to rotate, thus keeping the connecting shaft and suction cup at a set angle; when the locking member abuts against the connecting ball end, the connecting ball end abuts against the sleeve and forms a sealed connection with the sleeve. At this time, the first air passage, the second air passage, and the inside of the sleeve form a sealed vacuum channel. The vacuum channel can be evacuated by a vacuum pumping device to generate suction force in the suction cup to grip the workpiece; therefore, the angle rotation device of this application can realize the function of adjusting the angle of the suction cup, so that when the vacuum suction cup clamp is transporting irregular workpieces, the angle of the suction cup can be adjusted to make the suction cup fully fit the workpiece, so that the vacuum suction cup clamp can smoothly grip the workpiece and complete the transport work, while reducing the wear generated when the suction cup contacts the workpiece;

[0025] 2. This application, through the arrangement of the drive assembly and the elastic element, has an outer cylinder surrounding the sleeve and sealingly connected to it, so that when the locking element abuts against the connecting ball end, the vacuum channel formed by the first air passage, the second air passage, and the interior of the sleeve remains sealed; when the outer cylinder moves along the sleeve axis, the locking element moves along the sleeve axis through the connecting element, thereby realizing the function of driving the locking element to move. When it is necessary to adjust the suction cup angle, it is only necessary to move the outer cylinder to disengage the locking element from the connecting ball end, making the suction cup angle adjustment operation simple and convenient. After the suction cup angle is determined, under the elastic force of the elastic element, the locking element remains abutting against the connecting ball end, so that the suction cup is maintained at the set angle. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the angle rotation device provided in an embodiment of the present invention;

[0027] Figure 2 A cross-sectional schematic diagram of the adjustable angle state of the connecting shaft in the angle rotation device provided in an embodiment of the present invention;

[0028] Figure 3 A cross-sectional schematic diagram of the locking state of the connecting shaft in the angle rotation device provided in an embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the connecting shaft locked state in the angle rotation device provided in an embodiment of the present invention.

[0030] The attached diagram lists the components represented by each number as follows:

[0031] 1. Sleeve; 11. Connecting cavity; 12. Sealing groove; 13. Through hole; 14. Mounting groove; 2. End cap; 21. First air passage; 3. Connecting shaft; 31. Connecting ball end; 32. Connecting end; 33. Second air passage; 4. Locking element; 41. Locking groove; 42. Third air passage; 43. Sealing connector; 5. Spring; 6. Elastic sealing ring; 7. Drive assembly; 71. Outer cylinder; 72. Connecting bolt. Detailed Implementation

[0032] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0034] It is understood that spatial relation terms such as "below," "under," "below," "below," "above," "above," etc., can be used here to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as "below" or "below" of the other element or feature will be oriented "above" the other element or feature. Therefore, the exemplary terms "below" and "below" can include both upper and lower orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0035] It should be noted that when one element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediary element. In the following embodiments, "connection" should be understood as "electrical connection," "communication connection," etc., if the connected circuits, modules, units, etc., have the transmission of electrical signals or data between them.

[0036] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0037] Reference Figure 1-4 As shown in the figure, an angle rotation device provided in this application embodiment includes a sleeve 1, an end cap 2, a connecting shaft 3, and a locking member 4. The sleeve 1 has a spherical connecting cavity 11 inside. The end cap 2 is located at one end of the sleeve 1 and is sealed to the sleeve 1. The end cap 2 has a first air passage 21 connecting the inside and outside of the sleeve 1. The end cap 2 is used to connect with the connecting hardware of the vacuum suction cup clamp. The connecting shaft 3 includes a connecting ball end 31 and a connecting end 32. The connecting ball end 31 is located in the connecting cavity 11 and forms a ball hinge with the sleeve 1. The connecting end 32 extends to the outside of the sleeve 1 for connecting the suction cup. The connecting shaft 3 has a second air passage 33 connecting the inside and outside of the sleeve 1. The locking member 4 is movably located in the sleeve 1 and can be moved to abut against the connecting ball end 31, so that the connecting ball end 31 abuts against the sleeve 1 to form a sealed connection with the sleeve 1.

[0038] Reference Figure 1-4 As shown, the shape of the sleeve 1 can be designed according to the needs, such as a prism or a cylinder. In this embodiment, the sleeve 1 is shown as a cylinder. One end of the sleeve 1 is open, and the end cap 2 is provided at the open end of the sleeve 1. The end cap 2 includes a plug extending into the sleeve 1 and a cover plate that fits against the end face of the sleeve 1. The plug and the sleeve 1 are threaded together. At the same time, a sealing ring is provided between the end cap 2 and the sleeve 1 to achieve a sealed connection.

[0039] Reference Figure 1-4 As shown, the connecting cavity 11 is located at the end of the sleeve 1 away from the end cover 2, the connecting end 32 passes through the end of the sleeve 1 away from the end cover 2 and extends to the outside of the sleeve 1, and the locking member 4 is provided between the end cover 2 and the connecting shaft 3 and is movably disposed along the axial direction of the sleeve 1.

[0040] Reference Figure 1-4 As shown, specifically, the end of the sleeve 1 away from the end cap 2 is closed. A spherical connecting cavity 11 is opened on the inner wall of the closed end of the sleeve 1. At the same time, a through hole communicating with the connecting cavity 11 is opened on the outer wall of the closed end of the sleeve 1. The connecting ball end 31 of the connecting shaft 3 is located in the connecting cavity 11 and forms a ball hinge with the sleeve 1. Meanwhile, the connecting end 32 of the connecting shaft 3 passes through the through hole and extends to the outside of the sleeve 1, realizing the ball hinge between the connecting shaft 3 and the sleeve 1, so that the connecting shaft 3 can rotate relative to the sleeve 1.

[0041] Reference Figure 1-4 As shown, further, in order to increase the contact area between the locking member 4 and the connecting ball end 31, the connecting ball end 31 protrudes from the sleeve 1 when it is located in the connecting cavity 11. At the same time, a locking groove 41 is provided on the locking member 4. When the locking member 4 abuts against the connecting ball end 31, the connecting ball end 31 protrudes from the locking groove 41 and abuts against the inner wall of the locking groove 41, thereby increasing the contact area between the locking member 4 and the connecting ball end 31 and further increasing the rotational resistance of the connecting ball end 31. In order to keep the second air passage 33 of the connecting shaft 3 connected to the sleeve 1, a third air passage 42 is provided on the locking member 4. The third air passage 42 connects the locking groove 41 and the sleeve 1.

[0042] Reference Figure 1-4 As shown, a conical sealing connector 43 is further provided in the locking groove 41, which fits against the inner wall of the locking groove 41 and is connected to the third air passage 42. When the locking member 4 abuts against the connecting ball end 31, the connecting ball end 31 is embedded in the locking groove 41 and abuts against the sealing connector 43. The sealing connector 43 is made of rubber. The sealing connector 43 seals the contact surface between the locking member 4 and the connecting ball end 31, while connecting the second air passage 33 and the third air passage 42, and increases the frictional resistance between the locking member 4 and the connecting ball end 31, and increases the rotational resistance of the connecting ball end 31, so as to improve the fixing effect of the connecting shaft 3.

[0043] Reference Figure 1-4 As shown, furthermore, an elastic element is provided between the locking member 4 and the end cap 2. The elastic element is used to keep the locking member 4 in a state of abutting against the connecting ball end 31. In this embodiment, the elastic element is a spring 5, which is coaxial with the sleeve 1. The two ends of the spring 5 abut against the end cap 2 and the locking member 4, respectively. In order to improve the stability of the spring 5, mounting grooves 14 are provided on both the plug of the end cap 2 and the locking member 4. One end of the spring 5 is located in the mounting groove 14 on the plug, and the other end is located in the mounting groove 14 on the locking member 4. The spring 5 can keep the locking member 4 in a state of abutting against the connecting ball end 31, thereby keeping the connecting shaft 3 and the suction cup at a set angle.

[0044] Reference Figure 1-4 As shown, in this embodiment, the locking element 4 is a locking block. To ensure stable movement of the locking block within the sleeve 1 along the axial direction of the sleeve 1, the locking block is cylindrical with a diameter consistent with the inner diameter of the sleeve 1. The sidewall of the locking block fits against the inner wall of the sleeve 1, thereby restricting the axial movement of the locking block along the sleeve 1. Correspondingly, the third air passage 42 connects the locking groove 41 and the first air passage 21, allowing the first air passage 21, the interior of the sleeve 1, the third air passage 42, the locking groove 41, and the second air passage 33 to communicate and form a sealed vacuum channel.

[0045] Reference Figure 1-4As shown, further, in order to make the ball end 31 and the sleeve 1 form a sealed connection when the ball end 31 abuts against the sleeve 1, an elastic sealing ring 6 is provided on the side wall of the connecting cavity 11 and is arranged around the ball end 31. The ball end 31 abuts against the sleeve 1, causing the elastic sealing ring 6 to be deformed by pressure, so that a sealed connection is formed between the ball end 31 and the sleeve 1 through the elastic sealing ring 6. Specifically, a sealing groove 12 is formed on the side wall of the connecting cavity 11 along the circumference of the sleeve 1. The elastic sealing ring 6 is embedded in the sealing groove 12 and encircles the connecting ball end 31. When the locking member 4 abuts against the connecting ball end 31 and the connecting ball end 31 abuts against the sleeve 1, the connecting ball end 31 abuts against the side wall of the connecting cavity 11 and the elastic sealing ring 6 is squeezed and deformed, so that the connecting ball end 31 and the side wall of the connecting cavity 11 are sealed, that is, the connecting ball end 31 and the sleeve 1 are sealed and connected, so that the first air passage 21, the interior of the sleeve 1, the third air passage 42, the locking groove 41 and the second air passage 33 form a sealed vacuum channel.

[0046] Reference Figure 1-4 As shown, further, in order to facilitate the control of the movement of the locking member 4 so that the locking member 4 can disengage from the connecting ball end 31 when the angle of the connecting shaft 3 needs to be adjusted, a drive assembly 7 is provided outside the sleeve 1. The drive assembly 7 is connected to the locking member 4 to drive the locking member 4 to move to abut or disengage from the connecting ball end 31, and the drive assembly 7 is sealed to the sleeve 1.

[0047] Reference Figure 1-4 As shown, specifically, the drive assembly 7 includes an outer cylinder 71 and a connector. The outer cylinder 71 is encircled outside the sleeve 1 and is sealed to the sleeve 1. The outer cylinder 71 can move axially along the sleeve 1. The connector passes through a through hole 13 opened on the side wall of the sleeve 1 and connects the outer cylinder 71 and the locking member 4, so that when the outer cylinder 71 moves axially along the sleeve 1, the locking member 4 can move axially along the sleeve 1 through the connector.

[0048] Reference Figure 1-4 As shown, in this embodiment, the inner diameter of the outer cylinder 71 is the same as the outer diameter of the sleeve 1, the inner wall of the outer cylinder 71 fits against the outer wall of the sleeve 1, and the sleeve 1 and the outer cylinder 71 are sealed together by a sealing ring. Specifically, two mounting grooves 14 are provided on the outer wall of the sleeve 1, the mounting grooves 14 are opened around the circumference of the sleeve 1, the sealing ring is placed around the outside of the sleeve 1 and embedded in the mounting groove 14, the outer cylinder 71 is sleeved on the outside of the sleeve 1 and the sealing ring is squeezed and deformed.

[0049] Reference Figure 1-4As shown, further, the through hole 13 on the sleeve 1 is opened along the axial direction of the sleeve 1 so that the connecting member can move along the axial direction of the sleeve 1; the connecting member is a connecting bolt 72, and a through hole is opened on the outer cylinder 71. The connecting bolt 72 passes through the through hole and the through hole 13 and is threadedly connected to the locking member 4, and the connection between the connecting bolt 72 and the outer cylinder 71 is sealed by a sealing ring. In this embodiment, in order to improve the connection stability between the connecting outer cylinder 71 and the locking member 4, two connecting bolts 72 are provided. The two connecting bolts 72 are located on opposite sides of the outer cylinder 71, and correspondingly, two through holes 13 are opened on the side wall of the sleeve 1. When it is necessary to adjust the angle of the connecting shaft 3, the outer cylinder 71 can be manually moved along the axial direction of the sleeve 1, causing the locking member 4 to move away from the connecting ball end 31 until it is no longer in contact with the connecting ball end 31. At this time, the connecting shaft 3 can be rotated to adjust its angle, making the angle adjustment operation of the connecting shaft 3 simple and convenient. After the angle of the connecting shaft 3 is determined, when the locking member 4 abuts against the connecting ball end 31 under the action of the elastic member, due to the sealed connection between the outer cylinder 71 and the sleeve 1, the first air passage 21, the interior of the sleeve 1, the third air passage 42, the locking groove 41 and the second air passage 33 can form a sealed vacuum channel, so that the suction cup connected to the connecting shaft 3 can adsorb the workpiece.

[0050] The implementation principle of this embodiment is as follows: When the relative angle between the connecting shaft 3 and the sleeve 1 is fixed, the locking block is kept against the connecting ball end 31 under the elastic force of the spring 5. At this time, the connecting ball end 31 abuts against the side wall of the connecting cavity 11 and the elastic sealing ring 6 is squeezed and deformed, so that the connecting ball end 31 and the sleeve 1 are sealed together, and the outer cylinder 71 and the sleeve 1 are sealed together. Therefore, the first air passage 21, the inside of the sleeve 1, the third air passage 42, the locking groove 41 and the second air passage 33 form a sealed vacuum channel, which can make the suction cup generate suction when the connecting shaft 3 is connected to the suction cup. When it is necessary to adjust the angle of the connecting shaft 3, the outer cylinder 71 is manually moved along the axial direction of the sleeve 1, which drives the locking block away from the connecting ball end 31 until it is no longer in contact with the connecting ball end 31. At this time, the connecting shaft 3 can be rotated to adjust its angle. After the angle of the connecting shaft 3 is adjusted, the outer cylinder 71 is released, and the locking block returns to the state of abutting against the connecting ball end 31 under the elastic force of the spring 5, so that the angle adjustment operation of the connecting shaft 3 is simple and convenient.

[0051] The angle rotation device in this application solves the problem that the combination of high-quality steel and vulcanized rubber cannot be fixed automatically upon reset, and realizes the function of ultra-wide angle adjustment of the suction cup and quick locking at any position; the structure is simple and has few parts, which reduces the overall cost of the automation device and improves the efficiency of adjustment and clamping.

[0052] On the other hand, this application also provides a vacuum suction cup clamp, which includes the angle rotation device described above.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An angle rotation device, characterized in that, include: Sleeve (1), which has a spherical connecting cavity (11) inside; End cap (2), which is located at one end of sleeve (1) and is sealed to sleeve (1), and the end cap (2) is provided with a first air passage (21) connecting the inside and outside of sleeve (1); The connecting shaft (3) includes a connecting ball end (31) and a connecting end (32). The connecting ball end (31) is located in the connecting cavity (11) and forms a ball hinge with the sleeve (1). The connecting end (32) extends to the outside of the sleeve (1) for connecting a suction cup. The connecting shaft (3) is provided with a second air passage (33) that connects the inside and outside of the sleeve (1). A locking member (4) is movably disposed within the sleeve (1). The locking member (4) is movable to abut against the connecting ball end (31) and to make the connecting ball end (31) abut against the sleeve (1) to form a sealed connection with the sleeve (1). The locking member (4) is disposed between the end cap (2) and the connecting shaft (3) and is movably disposed along the axial direction of the sleeve (1). An elastic element is provided between the locking member (4) and the end cap (2), and the elastic element is used to keep the locking member (4) in a state of abutting against the connecting ball end (31); The sleeve (1) is provided with a drive assembly (7), which is connected to the locking member (4) and is used to drive the locking member (4) to move to abut or disengage from the connecting ball end (31), and the drive assembly (7) is sealed to the sleeve (1).

2. The angle swivel of claim 1, wherein: The connecting cavity (11) is located at the end of the sleeve (1) away from the end cap (2), and the connecting end (32) passes through the end of the sleeve (1) away from the end cap (2) and extends outside the sleeve (1).

3. The angle swivel of claim 2, wherein: The locking member (4) has a locking groove (41) adapted to the connecting ball end (31). When the locking member (4) abuts against the connecting ball end, the connecting ball end (31) protrudes into the locking groove (41) and abuts against the inner wall of the locking groove (41). The locking member (4) has a third air passage (42) connecting the locking groove (41) and the sleeve (1).

4. The angle of rotation device of claim 1, wherein: An elastic sealing ring (6) is provided on the side wall of the connecting cavity (11) and is arranged around the connecting ball end (31). When the connecting ball end (31) abuts against the sleeve (1), the elastic sealing ring (6) is deformed by pressure, so that a sealed connection is formed between the connecting ball end (31) and the sleeve (1) through the elastic sealing ring (6).

5. The angular rotation device of claim 1, wherein The driving component (7) includes: The outer cylinder (71) is encircled outside the sleeve (1) and sealed to the sleeve (1), and the outer cylinder (71) can move along the axial direction of the sleeve (1); A connector passes through a through hole (13) on the side wall of the sleeve (1) and connects the outer cylinder (71) and the locking member (4) so ​​that when the outer cylinder (71) moves axially along the sleeve (1), the locking member (4) moves axially along the sleeve (1) via the connector.

6. The angle of rotation device of claim 3, wherein: The diameter of the locking member (4) is the same as the inner diameter of the sleeve (1), and the third air passage (42) connects the locking groove (41) and the first air passage (21).

7. A vacuum chuck comprising: Includes the angle rotation device as described in any one of claims 1-6.

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