Intelligent re-feeding device for silicon production of czochralski single crystal furnace

Abstract

The application relates to the technical field of silicon material recharging of a single crystal furnace, and particularly discloses an intelligent recharging device for silicon material production of a Czochralski single crystal furnace, which comprises a base, a heating bottom disc is fixedly connected to the upper side of the base, a furnace main shell is arranged on the upper side of the heating bottom disc, a quartz crucible is placed in the middle of the upper side of the heating bottom disc, the quartz crucible is located in the furnace main shell, a recharging box is fixedly connected to the outer wall of the furnace main shell, and a conveying pipe is fixedly connected to the lower end of the recharging box. The funnel type baffle arranged in the application can be docked with the upper port of the quartz crucible, the funnel type baffle of the docking port can place the scattered powder dust to the outside of the quartz crucible, so that the waste of the powder is avoided, and the cleaning work in the later period is avoided; meanwhile, the funnel type baffle can be slid upward by a distance, so that the funnel type baffle is separated from the quartz crucible, so that the heat on the quartz crucible is prevented from being conducted to the furnace main shell through the funnel type baffle, and the heat loss is avoided.

Description

Technical Field

[0001] This invention relates to the field of silicon material refeeding technology in single crystal furnaces, specifically to an intelligent refeeding device for silicon material production in Czochralski single crystal furnaces. Background Technology

[0002] Monocrystalline silicon has a wide range of applications but is costly to produce. The Czochralski (CZ) method for preparing monocrystalline silicon is one of the most widely used methods. The quartz crucibles used to prepare monocrystalline silicon are disposable. Due to the gaps between the granular raw materials, after the raw material melts, the quartz crucible will have at least one-third more volume. To avoid waste, a refilling device is needed to replenish the raw material in the crucible and melt it again until the melt almost fills the crucible, thereby improving the utilization rate of the crucible's internal space.

[0003] Currently, in the process of preparing monocrystalline silicon, in order to reduce the number of refeeding times, most raw materials are powdered particles with small particle size. However, when refeeding powder into the crucible, some powder will be scattered around under the impact of feeding. The scattered powder will fall to the bottom of the heating furnace outside the crucible, which not only wastes materials, but also requires cleaning of the heating furnace later.

[0004] Based on this, the present invention designs an intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide an intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an intelligent refeeding device for silicon material production in a Czochralski single crystal furnace, comprising a base, a heating plate fixedly connected to the upper side of the base, a furnace main shell disposed on the upper side of the heating plate, a quartz crucible placed in the middle of the upper side of the heating plate, the quartz crucible being located inside the furnace main shell, a refeeding box fixedly connected to the outer wall of the furnace main shell, a conveying pipe fixedly connected to the lower end of the refeeding box, the end of the conveying pipe away from the refeeding box extending into the furnace main shell and located above the quartz crucible, and a hollow auger rotatably connected inside the conveying pipe. The hollow auger is fitted with a drive shaft, and a first one-way bearing is provided between the hollow auger and the drive shaft. A motor is fixedly connected to one end of the conveying pipe near the re-feeding box. The output end of the motor is fixedly connected to one end of the drive shaft. The end of the drive shaft away from the motor can extend into the furnace shell. A funnel-shaped baffle is slidably connected between the conveying pipe and the quartz crucible on the inner wall of the furnace shell. A lifting adjustment mechanism is provided between the funnel-shaped baffle and the drive shaft. The drive shaft can drive the funnel-shaped baffle to slide up and down along the inner wall of the furnace shell through the lifting adjustment mechanism.

[0007] As a further embodiment of the present invention, the lifting and adjusting mechanism includes a housing, which is fixedly connected to the inner wall of the furnace main shell. A vertical reciprocating screw is rotatably connected inside the housing. The reciprocating screw is threadedly connected to a movable base, which is slidably connected to the inner wall of the housing. A first connecting frame is fixedly connected to the movable base. The first connecting frame can extend outside the housing and is fixedly connected to a funnel-shaped baffle. The rotation shaft of the reciprocating screw extends outside the housing and is provided with a one-way transmission mechanism between it and the transmission shaft. The transmission shaft can drive the reciprocating screw to rotate through the one-way transmission mechanism.

[0008] As a further embodiment of the present invention, the one-way transmission mechanism includes a second one-way bearing, the inner ring of the second one-way bearing is fixedly connected to the end of the transmission shaft away from the motor, the outer ring of the second one-way bearing is fixedly connected to a first bevel gear, the first bevel gear meshes with a second bevel gear, and the second bevel gear is fixedly connected to the rotating shaft of the reciprocating lead screw.

[0009] As a further embodiment of the present invention, the conveying pipe is slidably connected to a second connecting frame in the vertical direction. The second connecting frame is located inside the furnace shell. An annular baffle is fixedly connected between the second connecting frame and the quartz crucible. The outer diameter of the annular baffle is smaller than the minimum inner diameter of the funnel-shaped baffle. A conical sieve plate is fixedly connected to the inner side of the annular baffle. The tip of the conical sieve plate is aligned with the discharge port of the conveying pipe. An up-and-down vibration mechanism is provided between the second connecting frame and the drive shaft. The drive shaft can drive the annular baffle and the conical sieve plate to reciprocate up and down through the up-and-down vibration mechanism.

[0010] As a further embodiment of the present invention, the upper and lower vibration mechanism includes a third one-way bearing, a rotating wheel, and a vertical sliding rod. The inner ring of the third one-way bearing is fixedly connected to the transmission shaft, and the outer ring of the third one-way bearing is fixedly connected to a wave-shaped turntable. The rotating wheel is located on the upper side of the wave-shaped turntable and is rotatably connected to the second connecting frame. The rim of the rotating wheel can contact the upper side of the wave-shaped turntable. The sliding rod is fixedly connected to the outer wall of the conveying pipe and slidably connected to the second connecting frame. A spring is sleeved on the outer side of the sliding rod, and the upper and lower ends of the spring are fixedly connected to the sliding rod and the second connecting frame, respectively.

[0011] As a further embodiment of the present invention, a column is fixedly connected to the upper side of the base, a lifting cylinder is fixedly connected to the bottom of one side of the column, a sliding sleeve is fixedly connected to the free end of the top of the lifting cylinder, the sliding sleeve is fixedly connected to the outer wall of the furnace shell, a guide rod is slidably connected to the upper end of the sliding sleeve, and the upper end of the guide rod is fixedly connected to the column.

[0012] As a further embodiment of the present invention, a ceramic sealing ring is provided between the heating base and the furnace shell, and a plurality of limiting buttons arranged in a circumferential array are rotatably connected to the outer side of the heating base, and the lower side of the limiting buttons can contact the upper surface of the outer edge of the lower port of the furnace shell.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] 1. The funnel-shaped baffle provided in this invention can be connected to the upper port of the quartz crucible. The funnel-shaped baffle at the interface can place the scattered powder and dust outside the quartz crucible, thereby avoiding powder waste and subsequent cleaning work. This invention can slide the funnel-shaped baffle upward a certain distance to separate the funnel-shaped baffle from the quartz crucible, thereby preventing the heat on the quartz crucible from being conducted to the furnace shell through the funnel-shaped baffle, thus preventing heat loss, and making it easier to remove the quartz crucible later.

[0015] 2. In this invention, when re-feeding powder, the drive shaft can drive the conical screen plate to vibrate up and down through the upper and lower vibration mechanism. The vibrating conical screen plate can evenly sprinkle the powder discharged from the conveying pipe into the quartz crucible, avoiding the accumulation of powder in the quartz crucible. This allows the powder evenly sprinkled in the quartz crucible to be quickly dissolved when the quartz crucible is heated, thereby reducing the energy consumption for dissolving the powder. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0017] Figure 2 A cross-sectional view of the main shell and internal structure of the heating furnace;

[0018] Figure 3 This is a cross-sectional view of the delivery pipe and its internal structure.

[0019] Figure 4 for Figure 3 A partial view of point A in the middle;

[0020] Figure 5 This is a cross-sectional view of the casing and its internal structure.

[0021] Figure 6 This is a three-dimensional structural diagram of the upper and lower vibration mechanism.

[0022] The attached diagram lists the components represented by each number as follows:

[0023] 1. Base; 2. Heating base; 3. Furnace shell; 4. Quartz crucible; 5. Refill box; 6. Conveying pipe; 7. Hollow auger; 8. Drive shaft; 9. First one-way bearing; 10. Motor; 11. Funnel-shaped baffle; 12. Sleeve; 13. Reciprocating screw; 14. Moving base; 15. First connecting frame; 16. Second one-way bearing; 17. First bevel gear; 18. Second bevel gear; 19. Second connecting frame; 20. Annular baffle; 21. Conical sieve plate; 22. Third one-way bearing; 23. Wave-shaped turntable; 24. Rotary wheel; 25. Slide rod; 26. Spring; 27. Column; 28. Lifting cylinder; 29. ​​Sliding sleeve; 30. Guide rod; 31. Ceramic sealing ring; 32. Limit button. Detailed Implementation

[0024] Please see Figure 1-6 This invention provides a technical solution: an intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace, comprising a base 1, a heating base 2 fixedly connected to the upper side of the base 1, a furnace main shell 3 provided on the upper side of the heating base 2, a quartz crucible 4 placed in the middle of the upper side of the heating base 2, the quartz crucible 4 located inside the furnace main shell 3, a re-feeding box 5 fixedly connected to the outer wall of the furnace main shell 3, a conveying pipe 6 fixedly connected to the lower end of the re-feeding box 5, the end of the conveying pipe 6 away from the re-feeding box 5 extending into the furnace main shell 3 and located above the quartz crucible 4, a hollow auger 7 rotatably connected inside the conveying pipe 6, and the hollow auger 7 containing... A drive shaft 8 is fitted, and a first one-way bearing 9 is provided between the hollow auger 7 and the drive shaft 8. A motor 10 is fixedly connected to one end of the conveying pipe 6 near the re-feeding box 5. The output end of the motor 10 is fixedly connected to one end of the drive shaft 8. The end of the drive shaft 8 away from the motor 10 can extend into the furnace main shell 3. A funnel-shaped baffle 11 is slidably connected between the conveying pipe 6 and the quartz crucible 4 on the inner wall of the furnace main shell 3. A lifting adjustment mechanism is provided between the funnel-shaped baffle 11 and the drive shaft 8. The drive shaft 8 can drive the funnel-shaped baffle 11 to slide up and down along the inner wall of the furnace main shell 3 through the lifting adjustment mechanism.

[0025] When the above scheme is put into actual use, when the motor 10 drives the transmission shaft 8 to rotate in one direction, the transmission shaft 8 can drive the hollow auger 7 to rotate through the first one-way bearing 9, so that the powder in the re-feeding box 5 can be discharged into the quartz crucible 4 through the conveying pipe 6. At the same time, the lifting and adjusting mechanism does not operate.

[0026] When the motor 10 drives the transmission shaft 8 to rotate in another direction, the hollow auger 7 does not rotate under the unidirectional transmission action of the transmission shaft 8. At the same time, the lifting and adjusting mechanism starts to operate and drives the funnel-shaped baffle 11 to slide up or down. Before the refeeding of powder begins, the funnel-shaped baffle 11 is lowered to contact the upper end of the quartz crucible 4 through the cooperation of the motor 10, drive shaft 8, and lifting adjustment mechanism. Then, through the cooperation of the motor 10, drive shaft 8, and first one-way bearing 9, the powder in the refeeding box 5 is discharged into the quartz crucible 4 through the conveying pipe 6. Under the impact force of the discharge, some powder disperses within the furnace shell 3. This dispersed powder settles into the quartz crucible 4 or slides down through the funnel-shaped baffle 11. After sufficient powder has been refeeded into the quartz crucible 4, the motor 10 stops rotating. Once all the dispersed powder in the furnace shell 3 has settled, the motor 10 rotates in the reverse direction. At this time, the motor 10 can drive the lifting adjustment mechanism through the drive shaft 8. When the mechanism operates, the lifting and adjusting mechanism slides the funnel-shaped baffle 11 upwards a certain distance, thereby separating the funnel-shaped baffle 11 from the quartz crucible 4. In this way, the funnel-shaped baffle 11 in the device can connect with the upper port of the quartz crucible 4. The funnel-shaped baffle 11 at the interface can prevent the scattered powder from being discharged outside the quartz crucible 4, thus avoiding the waste of powder and the need for subsequent cleaning. Before heating the quartz crucible 4 after the re-feeding is completed, the device can slide the funnel-shaped baffle 11 upwards a certain distance, separating the funnel-shaped baffle 11 from the quartz crucible 4, thereby preventing the heat on the quartz crucible 4 from being conducted to the furnace shell 3 through the funnel-shaped baffle 11, thus preventing heat loss and facilitating the removal of the quartz crucible 4 later.

[0027] As a further embodiment of the present invention, the lifting and adjusting mechanism includes a housing 12, which is fixedly connected to the inner wall of the furnace main shell 3. A vertical reciprocating screw 13 is rotatably connected inside the housing 12. The reciprocating screw 13 is threadedly connected to a movable base 14, which is slidably connected to the inner wall of the housing 12. A first connecting frame 15 is fixedly connected to the movable base 14. The first connecting frame 15 can extend outside the housing 12 and is fixedly connected to a funnel-shaped baffle 11. The rotation shaft of the reciprocating screw 13 extends outside the housing 12 and is provided with a one-way transmission mechanism between it and the transmission shaft 8. The transmission shaft 8 can drive the reciprocating screw 13 to rotate through the one-way transmission mechanism.

[0028] When the above scheme is put into actual use, when the motor 10 drives the transmission shaft 8 to rotate in another direction (at this time the hollow auger 7 does not rotate), the transmission shaft 8 can drive the reciprocating screw 13 to rotate through the one-way transmission mechanism, and vice versa. When the reciprocating screw 13 rotates, the reciprocating screw 13 can drive the moving base 14 to slide up and down. The moving base 14 drives the funnel-shaped baffle 11 to slide up and down along the inner wall of the furnace shell 3 through the first connecting frame 15. When the moving base 14 slides down to the lowest point, the first connecting frame 15 just drives the funnel-shaped baffle 11 to slide down to contact the upper port of the quartz crucible 4. In this way, the separation and reunification of the funnel-shaped baffle 11 and the quartz crucible 4 can be freely controlled.

[0029] The one-way transmission mechanism includes a second one-way bearing 16. The inner ring of the second one-way bearing 16 is fixedly connected to the end of the transmission shaft 8 away from the motor 10. The outer ring of the second one-way bearing 16 is fixedly connected to a first bevel gear 17. The first bevel gear 17 meshes with a second bevel gear 18. The second bevel gear 18 is fixedly connected to the rotating shaft of the reciprocating lead screw 13.

[0030] When the above scheme is put into actual use, when the motor 10 drives the transmission shaft 8 to rotate in another direction (at this time the hollow auger 7 does not rotate), the transmission shaft 8 can drive the first bevel gear 17 to rotate through the second one-way bearing 16, the first bevel gear 17 drives the second bevel gear 18 to rotate, and the second bevel gear 18 drives the reciprocating screw 13 to rotate, thereby making the lifting adjustment mechanism start to operate. Conversely, the second one-way bearing 16 slips on the transmission shaft 8, the first bevel gear 17 does not rotate, thereby making the reciprocating screw 13 not rotate.

[0031] The conveying pipe 6 is slidably connected to a second connecting frame 19 in the vertical direction. The second connecting frame 19 is located inside the furnace shell 3. An annular baffle 20 is fixedly connected between the second connecting frame 19 and the quartz crucible 4. The outer diameter of the annular baffle 20 is smaller than the minimum inner diameter of the funnel-shaped baffle 11. A conical sieve plate 21 is fixedly connected to the inner side of the annular baffle 20. The tip of the conical sieve plate 21 is aligned with the discharge port of the conveying pipe 6. An up-and-down vibration mechanism is provided between the second connecting frame 19 and the drive shaft 8. The drive shaft 8 can drive the annular baffle 20 and the conical sieve plate 21 to reciprocate up and down through the up-and-down vibration mechanism.

[0032] The powder discharged from the conveying pipe 6 first rushes towards the upper center of the conical sieve plate 21, and then spreads outwards through the slope on the conical sieve plate 21. At the same time as the powder is discharged from the conveying pipe 6, the drive shaft 8 can drive the annular baffle 20 and the conical sieve plate 21 to vibrate up and down through the up and down vibration mechanism, so that the powder is evenly sprinkled into the quartz crucible 4 through the sieve holes on the conical sieve plate 21. When the powder is stopped from being added again, the up and down vibration mechanism stops running, and the annular baffle 20 and the conical sieve plate 21 remain stationary. In this way, when the powder is added again, the drive shaft 8 can drive the conical sieve plate 21 to vibrate up and down through the up and down vibration mechanism. The vibrating conical sieve plate 21 can make the powder discharged from the conveying pipe 6 evenly sprinkled into the quartz crucible 4, avoiding the accumulation of powder in the quartz crucible 4. This allows the powder evenly sprinkled in the quartz crucible 4 to be quickly dissolved when the quartz crucible 4 is heated, thereby reducing the energy consumption of dissolving the powder.

[0033] As a further embodiment of the present invention, the upper and lower vibration mechanism includes a third one-way bearing 22, a rotating wheel 24, and a vertical sliding rod 25. The inner ring of the third one-way bearing 22 is fixedly connected to the transmission shaft 8, and the outer ring of the third one-way bearing 22 is fixedly connected to a wave-shaped turntable 23. The rotating wheel 24 is located on the upper side of the wave-shaped turntable 23 and is rotatably connected to the second connecting frame 19. The rim of the rotating wheel 24 can contact the upper side of the wave-shaped turntable 23. The sliding rod 25 is fixedly connected to the outer wall of the conveying pipe 6 and slidably connected to the second connecting frame 19. A spring 26 is sleeved on the outer side of the sliding rod 25, and the upper and lower ends of the spring 26 are fixedly connected to the sliding rod 25 and the second connecting frame 19, respectively.

[0034] When the conveying pipe 6 discharges material, the drive shaft 8 can drive the wave-shaped turntable 23 to rotate through the third one-way bearing 22. Under the elastic force of the spring 26, the turntable 24 always keeps close to the outer side of the wave-shaped turntable 23. The rotating wave-shaped turntable 23 can drive the second connecting frame 19 to move up and down quickly through the turntable 24, thereby causing the annular baffle 20 and the conical screen plate 21 to vibrate up and down. When the conveying pipe 6 stops discharging material, or when the drive shaft 8 rotates in another direction, the third one-way bearing 22 slips on the outside of the drive shaft 8, and the wave-shaped turntable 23 does not rotate, thereby stopping the annular baffle 20 and the conical screen plate 21.

[0035] As a further embodiment of the present invention, a column 27 is fixedly connected to the upper side of the base 1, a lifting cylinder 28 is fixedly connected to the bottom of one side of the column 27, a sliding sleeve 29 is fixedly connected to the free end of the top of the lifting cylinder 28, the sliding sleeve 29 is fixedly connected to the outer wall of the furnace main shell 3, a guide rod 30 is slidably connected to the upper end of the sliding sleeve 29, and the upper end of the guide rod 30 is fixedly connected to the column 27.

[0036] When it is necessary to open the furnace main shell 3, the lifting cylinder 28 extends and pushes the sliding sleeve 29 to slide up along the guide rod 30. The sliding sleeve 29 drives the furnace main shell 3 to move up, thereby separating the furnace main shell 3 from the heating base 2, which makes it easier to take out the quartz crucible 4. When it is necessary to close the furnace main shell 3, the lifting cylinder 28 retracts until the furnace main shell 3 descends to close with the heating base 2.

[0037] As a further embodiment of the present invention, a ceramic sealing ring 31 is provided between the heating base 2 and the furnace shell 3, and a plurality of limiting buttons 32 arranged in a circumferential array are rotatably connected to the outer side of the heating base 2, and the lower side of the limiting buttons 32 can contact the upper surface of the outer edge of the lower port of the furnace shell 3.

[0038] After the furnace main shell 3 and the heating base plate 2 are closed, rotate the limiting button 32 so that the lower side of the limiting button 32 tightly abuts against the upper side of the bottom outer edge of the furnace main shell 3, thereby fixing the furnace main shell 3 and the heating base plate 2; the setting of the ceramic sealing ring 31 can improve the sealing between the heating base plate 2 and the furnace main shell 3.

[0039] As a further embodiment of the present invention, the motor 10 is model Y250M-2.

Claims

1. An intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace, characterized in that: Includes a base (1), a heating base (2) is fixedly connected to the upper side of the base (1), a furnace main shell (3) is provided on the upper side of the heating base (2), a quartz crucible (4) is placed in the middle of the upper side of the heating base (2), the quartz crucible (4) is located inside the furnace main shell (3), a refill box (5) is fixedly connected to the outer wall of the furnace main shell (3), a conveying pipe (6) is fixedly connected to the lower end of the refill box (5), one end of the conveying pipe (6) away from the refill box (5) extends into the furnace main shell (3) and is located above the quartz crucible (4), a hollow auger (7) is rotatably connected inside the conveying pipe (6), a drive shaft (8) is sleeved inside the hollow auger (7), the hollow auger (7) A first one-way bearing (9) is provided between the conveying pipe (6) and the drive shaft (8). A motor (10) is fixedly connected to one end of the conveying pipe (6) near the re-feeding box (5). The output end of the motor (10) is fixedly connected to one end of the drive shaft (8). The end of the drive shaft (8) away from the motor (10) can extend into the furnace shell (3). A funnel-shaped baffle (11) is slidably connected between the conveying pipe (6) and the quartz crucible (4) on the inner wall of the furnace shell (3). A lifting adjustment mechanism is provided between the funnel-shaped baffle (11) and the drive shaft (8). The drive shaft (8) can drive the funnel-shaped baffle (11) to slide up and down along the inner wall of the furnace shell (3) through the lifting adjustment mechanism. The lifting and adjusting mechanism includes a housing (12), which is fixedly connected to the inner wall of the furnace main shell (3). A vertical reciprocating screw (13) is rotatably connected inside the housing (12). The reciprocating screw (13) is threadedly connected to a movable base (14). The movable base (14) is slidably connected to the inner wall of the housing (12). The movable base (14) is fixedly connected to a first connecting frame (15). The first connecting frame (15) can extend to the outside of the housing (12) and is fixedly connected to a funnel-shaped baffle (11). The rotation shaft of the reciprocating screw (13) extends to the outside of the housing (12) and is provided with a one-way transmission mechanism between it and the transmission shaft (8). The transmission shaft (8) can drive the reciprocating screw (13) to rotate through the one-way transmission mechanism. The one-way transmission mechanism includes a second one-way bearing (16), the inner ring of the second one-way bearing (16) is fixedly connected to the end of the transmission shaft (8) away from the motor (10), the outer ring of the second one-way bearing (16) is fixedly connected to a first bevel gear (17), the first bevel gear (17) meshes with a second bevel gear (18), and the second bevel gear (18) is fixedly connected to the rotating shaft of the reciprocating lead screw (13).

2. The intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace according to claim 1, characterized in that: The conveying pipe (6) is slidably connected to a second connecting frame (19) in the vertical direction. The second connecting frame (19) is located inside the furnace shell (3). The second connecting frame (19) is fixedly connected to an annular baffle (20) between the conveying pipe (6) and the quartz crucible (4). The outer diameter of the annular baffle (20) is smaller than the minimum inner diameter of the funnel-shaped baffle (11). A conical sieve plate (21) is fixedly connected to the inner side of the annular baffle (20). The tip of the conical sieve plate (21) is aligned with the discharge port of the conveying pipe (6). An up-and-down vibration mechanism is provided between the second connecting frame (19) and the drive shaft (8). The drive shaft (8) can drive the annular baffle (20) and the conical sieve plate (21) to reciprocate up and down through the up-and-down vibration mechanism.

3. The intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace according to claim 2, characterized in that: The up-and-down vibration mechanism includes a third one-way bearing (22), a rotating wheel (24), and a vertical sliding rod (25). The inner ring of the third one-way bearing (22) is fixedly connected to the transmission shaft (8), and the outer ring of the third one-way bearing (22) is fixedly connected to a wave-shaped turntable (23). The rotating wheel (24) is located on the upper side of the wave-shaped turntable (23) and is rotatably connected to the second connecting frame (19). The rim of the rotating wheel (24) can contact the upper side of the wave-shaped turntable (23). The sliding rod (25) is fixedly connected to the outer wall of the conveying pipe (6), and the sliding rod (25) is slidably connected to the second connecting frame (19). A spring (26) is sleeved on the outer side of the sliding rod (25), and the upper and lower ends of the spring (26) are fixedly connected to the sliding rod (25) and the second connecting frame (19) respectively.

4. The intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace according to claim 1, characterized in that: A column (27) is fixedly connected to the upper side of the base (1). A lifting cylinder (28) is fixedly connected to the bottom of one side of the column (27). A sliding sleeve (29) is fixedly connected to the free end of the top of the lifting cylinder (28). The sliding sleeve (29) is fixedly connected to the outer wall of the furnace shell (3). A guide rod (30) is slidably connected to the upper end of the sliding sleeve (29). The upper end of the guide rod (30) is fixedly connected to the column (27).

5. The intelligent re-feeding device for silicon material production in a Czochralski single crystal furnace according to claim 1, characterized in that: A ceramic sealing ring (31) is provided between the heating base (2) and the furnace shell (3). A number of limiting buttons (32) arranged in a circular array are rotatably connected to the outside of the heating base (2). The lower side of the limiting button (32) can contact the upper surface of the outer edge of the lower port of the furnace shell (3).

Images