Angle adjustment device and angle adjustment method

Abstract

The application provides an angle adjusting device and an angle adjusting method. The device comprises a base, a first adjusting base plate, a second adjusting base plate, a third adjusting base plate, a first adjusting mechanism, a second adjusting mechanism, a third adjusting mechanism, a first eccentric element, a second eccentric element, a third eccentric element, a first fixed rotation axis, a second fixed rotation axis, and a third fixed rotation axis. The adjusting plate and the extension plate of the first adjusting base plate are arranged vertically. The first adjusting mechanism is arranged between the adjusting plate and the base. The first eccentric element is used to make the first adjusting base plate rotate relative to the first fixed rotation axis. The second adjusting mechanism is arranged between the second adjusting base plate and the base. The second eccentric element is used to make the second adjusting base plate rotate relative to the second fixed rotation axis. The fixed plate is arranged vertically and fixedly with the second adjusting base plate. The third adjusting mechanism is arranged between the third adjusting base plate and the fixed plate. The third eccentric element is used to make the third adjusting base plate rotate relative to the third fixed rotation axis. The application can realize accurate adjustment of corresponding three-dimensional angles through the adjustment of two-dimensional plane angles in each plane, and does not cause the translation of optical elements, so that the optical path change is avoided.

Description

Technical Field

[0001] This invention belongs to the field of optical and semiconductor manufacturing equipment, and in particular relates to an angle adjustment device and angle adjustment method for optical elements. Background Technology

[0002] Optical equipment and instruments utilize a wide variety of lenses and components. Due to inherent manufacturing limitations and machining errors in the mounting mechanisms, these components cannot be positioned perfectly. This necessitates precise fine-tuning of their position and angle. This has led to the development of two-dimensional and three-dimensional translational and angle adjustment structures, or multi-dimensional adjustment mechanisms that combine translational and angle adjustments. This paper will only briefly discuss the angle adjustment aspect.

[0003] Common optical angle adjustments are primarily based on the Cartesian coordinate system. Common optical angle adjustment devices include a two-pronged, two-pull structure (such as...). Figure 1 (as shown) and right-angle top-pull structure (such as) Figure 2 (As shown).

[0004] like Figure 1 As shown, the two-top, two-pull structure includes a base 101, an adjustable base surface 102, two diagonal pulls 103, and two diagonal tops 104. The optical element 105 is fixed to the adjustable base surface 102. The angle of the optical element 105 can be adjusted by adjusting the two diagonal pulls 103 and the two diagonal tops 104.

[0005] like Figure 2 As shown, the right-angle top-pull structure includes a base 201, an adjustable base surface 202, a tightening screw 203, a steel ball 204, and a spring 205. The optical element 206 is fixed to the adjustable base surface 202, and the angle of the optical element can be adjusted by adjusting the tightening screw 203.

[0006] However, although the two structures mentioned above are relatively simple to implement and can adjust the angle of the optical element, the center point of the two structures also moves along the optical axis during the adjustment process and is uncontrollable, making it difficult to control the optical path.

[0007] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Summary of the Invention

[0008] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide an angle adjustment device and an angle adjustment method to solve the problem that the center point of the angle adjustment device moves along the optical axis and is uncontrollable during the angle adjustment process in the prior art.

[0009] To achieve the above and other related objectives, the present invention provides an angle adjustment device, comprising: a base; a first adjustment base plate, including a vertically arranged adjustment plate and an extension plate, wherein a first adjustment mechanism is provided between the adjustment plate and the base, the first adjustment mechanism including a first fixed rotation shaft passing through the adjustment plate and a first eccentric element, wherein rotating the first eccentric element causes the first adjustment base plate to rotate relative to the first fixed rotation shaft; a second adjustment base plate, wherein a second adjustment mechanism is provided between the second adjustment base plate and the extension plate of the first adjustment base plate, the second adjustment mechanism including a second fixed rotation shaft passing through the second adjustment base plate and a second eccentric element, wherein rotating the second eccentric element causes the second adjustment base plate to rotate relative to the second fixed rotation shaft; a fixed plate, wherein the fixed plate is perpendicular to and fixedly arranged with respect to the second adjustment base plate; and a third adjustment base plate, wherein a third adjustment mechanism is provided between the third adjustment base plate and the fixed plate, the third adjustment mechanism including a third fixed rotation shaft passing through the third adjustment base plate and a third eccentric element, wherein rotating the third eccentric element causes the third adjustment base plate to rotate relative to the third fixed rotation shaft.

[0010] Optionally, the extension lines of the first fixed rotation axis, the second fixed rotation axis, and the third fixed rotation axis intersect at the same intersection point.

[0011] Optionally, an optical element is fixedly disposed on the third adjustment substrate, and the center point and intersection point of the light beam are projected onto the optical element.

[0012] Optionally, the first eccentric element includes a first wheel shaft and a first eccentric wheel. The first wheel shaft is offset from the axis of the first eccentric wheel. The first eccentric wheel is connected to the base through the first wheel shaft. The side of the first eccentric wheel is connected to a first sliding groove provided in the first adjusting base plate. By rotating the first eccentric wheel, the first eccentric wheel slides relative to the first sliding groove, thereby realizing the rotational movement of the first adjusting base plate relative to the first fixed rotating axis.

[0013] The second eccentric element includes a second wheel shaft and a second eccentric wheel. The second wheel shaft is offset from the axis of the second eccentric wheel. The second eccentric wheel is connected to the extension plate of the first adjusting base plate through the second wheel shaft. The side of the second eccentric wheel is connected to the second sliding groove provided in the second adjusting base plate. By rotating the second eccentric wheel, the second eccentric wheel slides relative to the second sliding groove, thereby realizing the rotational movement of the second adjusting base plate relative to the second fixed rotating axis.

[0014] The third eccentric element includes a third wheel shaft and a third eccentric wheel. The third wheel shaft is offset from the axis of the third eccentric wheel. The third eccentric wheel is connected to the fixed plate through the third wheel shaft. The side of the third eccentric wheel is connected to the third sliding groove provided in the third adjusting base plate. By rotating the third eccentric wheel, the third eccentric wheel slides relative to the third sliding groove, thereby realizing the rotational movement of the third adjusting base plate relative to the third fixed rotating shaft.

[0015] Optionally, the first, second, and third slides are configured as U-shaped grooves.

[0016] Optionally, the first distance between the first eccentric element and the first fixed rotation axis is L1, and the required rotation angle of the first adjustment substrate in its first surface is A1. Then, the offset D1 caused by rotating the first eccentric element is obtained by the following formula: D1=L1*TAN(A1).

[0017] The second distance between the second eccentric element and the second fixed rotation axis is L2, and the required rotation angle of the second adjustment substrate in its second surface is A2. Then, the offset D2 caused by rotating the second eccentric element to the second adjustment substrate is obtained by the following formula: D2=L2*TAN(A2).

[0018] The third distance between the third eccentric element and the third fixed rotation axis is L3, and the required rotation angle of the third adjustment plate in its third surface is A3. Then, the offset D3 caused by rotating the third eccentric element to the third adjustment plate is obtained by the following formula: D3=L3*TAN(A3).

[0019] Optionally, a first locking screw is provided between the first adjusting base and the base for fixing the first adjusting base to the base, and a first spring washer is provided between the first locking screw and the first adjusting base; a second locking screw is provided between the second adjusting base and the first adjusting base for fixing the second adjusting base to the first adjusting base, and a second spring washer is provided between the second locking screw and the second adjusting base; a third locking screw is provided between the third adjusting base and the fixing plate for fixing the third adjusting base to the fixing plate, and a third spring washer is provided between the third locking screw and the fixing plate.

[0020] Optionally, the first adjusting plate has a first hole through which a first locking screw passes, and a first gap between the first hole and the first locking screw to provide space required for the first adjusting plate to rotate; the second adjusting plate has a second hole through which a second locking screw passes, and a second gap between the second hole and the second locking screw to provide space required for the second adjusting plate to rotate; the third adjusting plate has a third hole through which a third locking screw passes, and a third gap between the third hole and the third locking screw to provide space required for the third adjusting plate to rotate.

[0021] Optionally, a first initial positioning pin is provided between the first adjusting substrate and the base for initially positioning the first adjusting substrate on the base; a second initial positioning pin is provided between the second adjusting substrate and the first adjusting substrate for initially positioning the second adjusting substrate on the first adjusting substrate; and a third initial positioning pin is provided between the third adjusting substrate and the fixing plate for initially positioning the third adjusting substrate on the fixing plate.

[0022] Optionally, a fourth spacing is provided between the second adjusting substrate and the adjusting plate of the first adjusting substrate to provide the space required for the first adjusting substrate to rotate, and a fifth spacing and a sixth spacing are provided between the third adjusting substrate and the second adjusting substrate and the adjusting plate of the first adjusting substrate, respectively, to provide the space required for the third adjusting substrate to rotate.

[0023] The present invention also provides an angle adjustment method, which includes the steps of: providing an angle adjustment device according to any of the above schemes; calculating the required two-dimensional angle of rotation of each adjustment plate according to the required three-dimensional angle; calculating the required rotation angle of the corresponding eccentric element according to the two-dimensional angle; and rotating the corresponding eccentric element to achieve the adjustment of the three-dimensional angle.

[0024] As described above, the angle adjustment device and angle adjustment method of the present invention have the following beneficial effects:

[0025] This invention provides an angle adjustment device. By setting an eccentric wheel and axle in a two-dimensional plane, and having the axles in each plane intersect perpendicularly at the same intersection point, the angle in the two-dimensional plane can be adjusted by the eccentric wheel. By adjusting the angle in each two-dimensional plane, the corresponding three-dimensional angle can be precisely adjusted without causing translation of the optical elements, thus avoiding changes in the optical path.

[0026] This invention is low in cost and small in size, and can be freely combined and installed to a certain extent in a limited space. It has broad application prospects in the fields of optical and semiconductor manufacturing equipment. Attached Figure Description

[0027] The accompanying drawings, which form part of this specification, are used to provide a further understanding of the embodiments of this application and to illustrate the implementation of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application.

[0028] Figure 1 The diagram shows a schematic of an angle adjustment device with a two-top, two-pull structure.

[0029] Figure 2 The diagram shows the structure of the angle adjustment device, which is a right-angle top-pull structure.

[0030] Figure 3 and Figure 4 The diagram shown is a structural schematic of the angle adjustment device according to an embodiment of the present invention.

[0031] Figure 5 The diagram shown is a structural schematic of the eccentric wheel of the angle adjustment device according to an embodiment of the present invention.

[0032] Figure 6 This diagram illustrates the principle of the fixed rotation axis of the angle adjustment device of the present invention.

[0033] Figure 7 The diagram shows the relationship between the distance between the eccentric element and the fixed rotation axis, the required rotation angle of the substrate in its plane, and the offset of the substrate caused by the rotation of the eccentric element when adjusting the angle of the substrate according to the present invention.

[0034] Component designation explanation

[0035] 30 bases

[0036] 31 First Adjustment Board

[0037] 311 Adjustment plate

[0038] 312 Extension Plate

[0039] 32 First fixed rotation axis

[0040] 33 First eccentric element

[0041] 331 First Axle

[0042] 332 First Eccentric Wheel

[0043] 34 First initial positioning pin

[0044] 35 First locking screw

[0045] 41 Second Adjustment Board

[0046] 42 Second fixed rotation axis

[0047] 43 Second eccentric element

[0048] 44 Second initial positioning pin

[0049] 45 Second locking screw

[0050] 50 Fixed Plate

[0051] 51 Third Adjustment Board

[0052] 52 Third fixed rotation axis

[0053] 53 Third eccentric element

[0054] 54 Third initial positioning pin

[0055] 55 Third locking screw

[0056] 60 Optical Components

[0057] 70 intersection Detailed Implementation

[0058] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0059] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components.

[0060] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0061] In the detailed description of embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0062] For ease of description, spatial relation terms such as “below,” “under,” “lower than,” “below,” “above,” and “upper” may be used herein to describe the relationship between one element or feature shown in the accompanying drawings and other elements or features. It will be understood that these spatial relation terms are intended to include directions other than those depicted in the drawings for devices in use or operation. Furthermore, when a layer is referred to as being “between” two layers, it may be the only layer between the two layers, or there may be one or more layers in between.

[0063] In the context of this application, the structure described above the first feature may include embodiments in which the first and second features are formed in direct contact, or embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0064] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0065] While existing optical angle adjustment devices are relatively simple to implement and can adjust the angle of optical elements, their center point moves uncontrollably along the optical axis during the adjustment process, making it difficult to control the optical path.

[0066] To solve the above problems, such as Figure 3 and Figure 4 As shown, where, Figure 4 for Figure 3 This embodiment provides an angle adjustment device, which includes: a base 30; a first adjustment base plate 31, including a vertically arranged adjustment plate 311 and an extension plate 312, with a first adjustment mechanism between the adjustment plate 311 and the base 30. The first adjustment mechanism includes a first fixed rotation shaft 32 passing through the adjustment plate 311 and a first eccentric element 33, and the first adjustment base plate 31 rotates relative to the first fixed rotation shaft 32 by rotating the first eccentric element 33; and a second adjustment base plate 41, with a second adjustment mechanism between the second adjustment base plate 41 and the extension plate 312 of the first adjustment base plate 31. The mechanism includes a second adjusting mechanism comprising a second fixed rotating shaft 42 and a second eccentric element 43 passing through the second adjusting base plate 41, wherein rotating the second eccentric element 43 causes the second adjusting base plate 41 to rotate relative to the second fixed rotating shaft 42; a fixed plate 50, which is perpendicular to and fixedly disposed with respect to the second adjusting base plate 41; and a third adjusting base plate 51, wherein a third adjusting mechanism is provided between the third adjusting base plate 51 and the fixed plate 50, the third adjusting mechanism comprising a third fixed rotating shaft 52 and a third eccentric element 53 passing through the third adjusting base plate 51, wherein rotating the third eccentric element 53 causes the third adjusting base plate 51 to rotate relative to the third fixed rotating shaft 52.

[0067] In one embodiment, the first adjustment substrate 31 and the second adjustment substrate 41 may be configured as rectangles, for example, with chamfers, and the third adjustment substrate 51 may be configured as a circle, for example, to facilitate angle adjustment of the third adjustment substrate 51 and mounting of the optical element 60.

[0068] In one embodiment, such as Figure 3As shown, the first eccentric element 33 includes a first wheel shaft 331 and a first eccentric wheel 332. The first wheel shaft 331 is offset from the axis of the first eccentric wheel 332. The first eccentric wheel 332 is connected to the base 30 through the first wheel shaft 331. The side of the first eccentric wheel 332 is connected to the first sliding groove provided in the first adjusting base plate 31. By rotating the first eccentric wheel 332, the first eccentric wheel 332 slides relative to the first sliding groove, thereby realizing the rotational movement of the first adjusting base plate 31 relative to the first fixed rotating shaft 32.

[0069] like Figure 3 As shown, the second eccentric element 43 includes a second wheel shaft and a second eccentric wheel. The second wheel shaft is offset from the axis of the second eccentric wheel. The second eccentric wheel is connected to the extension plate 312 of the first adjusting base plate 31 through the second wheel shaft. The side of the second eccentric wheel is connected to the second sliding groove provided in the second adjusting base plate 41. By rotating the second eccentric wheel, the second eccentric wheel slides relative to the second sliding groove, thereby realizing the rotational movement of the second adjusting base plate 41 relative to the second fixed rotating shaft 42.

[0070] like Figure 4 As shown, the third eccentric element 53 includes a third wheel shaft and a third eccentric wheel. The third wheel shaft is offset from the axis of the third eccentric wheel. The third eccentric wheel is connected to the fixed plate 50 through the third wheel shaft. The side of the third eccentric wheel is connected to the third sliding groove provided in the third adjusting base plate 51. By rotating the third eccentric wheel, the third eccentric wheel slides relative to the third sliding groove, thereby realizing the rotational movement of the third adjusting base plate 51 relative to the third fixed rotating shaft 52.

[0071] The angle adjustment of the adjustment base plate is achieved by using an eccentric wheel. Compared with the traditional two-pull or / two-top structure, the accuracy of controlling the displacement of the adjustment base plate can be greatly improved. At the same time, the present invention decomposes the traditional three-dimensional angle adjustment into multiple two-dimensional angle adjustments, which can also effectively improve the accuracy of the three-dimensional angle adjustment.

[0072] In one embodiment, the first groove, the second groove, and the third groove are configured as U-shaped grooves.

[0073] In one embodiment, such as Figure 3As shown, a first locking screw 35 is also provided between the first adjusting base plate 31 and the base 30. For example, there can be four first locking screws, respectively located at the four corners of the first adjusting base plate 31, used to fix and lock the first adjusting base plate 31 onto the base 30. A first spring washer is also provided between the first locking screw 35 and the first adjusting base plate 31. The first spring washer provides a pre-tightening force to the first locking screw 35 when it is loosened. Similarly, a second locking screw 45 is also provided between the second adjusting base plate 41 and the first adjusting base plate 31. For example, there can be four second locking screws, respectively located at the four corners of the second adjusting base plate 41, used to fix and lock the second adjusting base plate 41 onto the first adjusting base plate 31. A second spring washer is also provided between the second locking screw 45 and the second adjusting base plate 41. The second spring washer provides a pre-tightening force to the second locking screw 45 when it is loosened. Figure 4 As shown, a third locking screw 55 is also provided between the third adjusting base plate 51 and the fixing plate 50. For example, there can be 3 third locking screws 55, which are used to fix and lock the third adjusting base plate 51 onto the fixing plate 50. A third spring washer is also provided between the third locking screw 55 and the fixing plate 50. The third spring washer is used to provide a pre-tightening force for the third locking screw 55 when it is loosened.

[0074] In one embodiment, such as Figure 3 As shown, the first adjustment substrate 31 has a first hole through which the first locking screw 35 passes, and there is a first gap between the first hole and the first locking screw 35 to provide the space required for the first adjustment substrate 31 to rotate; the second adjustment substrate 41 has a second hole through which the second locking screw 45 passes, and there is a second gap between the second hole and the second locking screw 45 to provide the space required for the second adjustment substrate 41 to rotate; the third adjustment substrate 51 has a third hole through which the third locking screw 55 passes, and there is a third gap between the third hole and the third locking screw 55 to provide the space required for the third adjustment substrate 51 to rotate.

[0075] In one embodiment, a first initial positioning pin 34 is further provided between the first adjusting substrate 31 and the base 30 for initially positioning the first adjusting substrate 31 on the base 30; a second initial positioning pin 44 is further provided between the second adjusting substrate 41 and the first adjusting substrate 31 for initially positioning the second adjusting substrate 41 on the first adjusting substrate 31; and a third initial positioning pin 54 is further provided between the third adjusting substrate 51 and the fixing plate 50 for initially positioning the third adjusting substrate 51 on the fixing plate 50.

[0076] In one embodiment, a fourth spacing is provided between the second adjusting substrate 41 and the adjusting plate 311 of the first adjusting substrate 31 to provide space required for the first adjusting substrate 31 to rotate. A fifth spacing and a sixth spacing are provided between the third adjusting substrate 51 and the second adjusting substrate 41 and the third adjusting substrate 51 and the adjusting plate 311 of the first adjusting substrate 31, respectively, to provide space required for the third adjusting substrate 51 to rotate.

[0077] One embodiment of the first eccentric element 33 is as follows: Figure 5 As shown, it includes a first eccentric wheel 332 and a first wheel shaft 331 disposed on one surface of the first eccentric wheel 332. The first wheel shaft 331 is offset from the axis of the first eccentric wheel 332. The other surface of the first eccentric wheel 332 may be provided with a groove, through which the first eccentric wheel 332 can be rotated to achieve rotational movement. When the first eccentric wheel 332 is rotated along the first wheel shaft 331, it undergoes a displacement relative to the first sliding groove, deviating from its axis. This displacement, in turn, drives the first adjusting base plate 31 to rotate along the first fixed rotating shaft 32 via the side of the first eccentric wheel 332. The first eccentric element 33 is used as an example here. The principles of the second eccentric element 43 and the third eccentric element 53 are basically the same as those of the first eccentric element 33. Of course, the dimensions of the second eccentric element 43 and the distance of their wheel shafts from the axis of the eccentric wheel can be varied according to actual adjustment requirements to meet different angle adjustment needs, and are not necessarily completely identical to those of the first eccentric element 33.

[0078] In one embodiment, such as Figure 6 As shown, the extension lines of the first fixed rotation axis 32, the second fixed rotation axis 42, and the third fixed rotation axis 52 intersect at the same intersection point 70. In this embodiment, having the extension lines of the first fixed rotation axis 32, the second fixed rotation axis 42, and the third fixed rotation axis 52 intersect at the same intersection point 70 simplifies the subsequent calculation of the two-dimensional angles required for adjustment based on the three-dimensional angle decomposition to each adjustment substrate. Furthermore, it ensures that the optical element 60 will not be translated during the three-dimensional angle adjustment process, thus preventing changes in the optical path.

[0079] In one embodiment, an optical element 60 is fixedly disposed on the third adjustment substrate 51, and the center point of the light beam projected onto the optical element 60 coincides with the intersection point 70.

[0080] In one embodiment, such as Figure 7As shown, the first adjustment mechanism is used as an example for explanation. The first distance between the first eccentric element 33 and the first fixed rotating shaft 32 is set as L1, and the required rotation angle of the first adjustment plate 31 in its first surface is A1. Then, the offset D1 of the first adjustment plate 31 caused by rotating the first eccentric element 33 is obtained by the following formula: D1=L1*TAN(A1). The offset D1 can be precisely controlled by rotating the first eccentric wheel 332.

[0081] Similarly, the second distance between the second eccentric element 43 and the second fixed rotation axis 42 is L2, and the required rotation angle of the second adjustment substrate 41 in its second surface is A2. Then, the offset D2 of the second adjustment substrate 41 caused by rotating the second eccentric element 43 is obtained by the following formula: D2=L2*TAN(A2).

[0082] Similarly, the third distance between the third eccentric element 53 and the third fixed rotation axis 52 is L3, and the required rotation angle of the third adjustment plate 51 in its third surface is A3. Then, the offset D3 of the third adjustment plate 51 caused by rotating the third eccentric element 53 is obtained by the following formula: D3=L3*TAN(A3).

[0083] When designing an angle adjustment device, the following steps can be taken:

[0084] First, the center point of the beam projection onto the optical element 60 is located. Then, this spatial center point is projected onto the first, second, and third planes (such as mutually perpendicular xyz planes), thereby obtaining the positions of the corresponding fixed rotation axes for angle adjustment within the first, second, and third planes. Through the above decomposition, the adjustment of a three-dimensional angle can be decoupled to the corresponding two-dimensional angles within the planes, and single-micro-angle adjustment can be achieved within each plane using a simple one-dimensional adjustment mechanism. This invention uses an eccentric wheel as the adjustment mechanism, which has the advantages of structural stability and reliability, small backlash error, and ease of subsequent adjustment and locking operations.

[0085] Then, based on the installation space size requirements and the fine-tuning angle requirements of each shaft, the eccentricity of the wheel axle and the eccentric wheel in the eccentric element is calculated, and the interval distance between each component is obtained accordingly, such as the size of the corresponding hole on the adjustment plate of the locking screw, etc.

[0086] Specifically, assuming the angle that the optical device needs to be adjusted is A, and the distance between the rotation center of the fixed rotating shaft and the eccentric wheel is L, the offset of the eccentric rotating shaft D = L1 * TAN(A) can be obtained. At this time, the surrounding components can be given sufficient margin based on the offset D so that there are no problems such as interference or obstruction in the adjustment.

[0087] This embodiment also provides an angle adjustment method, which includes the following steps: providing an angle adjustment device as described in any of the above schemes; calculating the required two-dimensional angle of rotation for each adjustment substrate based on the required three-dimensional angle; calculating the required rotation angle of the corresponding eccentric element based on the two-dimensional angle; and rotating the corresponding eccentric element to achieve the adjustment of the three-dimensional angle.

[0088] In a specific implementation process, when it is necessary to adjust the rotation angle of a certain adjustment plate, the corresponding locking screw is loosened. At this time, the spring washer of the locking screw can provide a preload force and pull out the initial positioning pin of the corresponding adjustment plate. Then, by rotating the eccentric wheel, the angle adjustment device can be rotated on the surface of the corresponding adjustment plate.

[0089] As described above, the angle adjustment device and angle adjustment method of the present invention have the following beneficial effects:

[0090] This invention provides an angle adjustment device. By setting an eccentric wheel and axle in a two-dimensional plane, and having the axles in each plane intersect perpendicularly at the same intersection point, the angle in the two-dimensional plane can be adjusted by the eccentric wheel. By adjusting the angle in each two-dimensional plane, the corresponding three-dimensional angle can be precisely adjusted without causing translation of the optical elements, thus avoiding changes in the optical path.

[0091] This invention is low in cost and small in size, and can be freely combined and installed to a certain extent in a limited space. It has broad application prospects in the fields of optical and semiconductor manufacturing equipment.

[0092] Therefore, this invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0093] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. An angle adjustment device, characterized in that, The angle adjustment device includes: Base; The first adjustment base plate includes a vertically arranged adjustment plate and an extension plate. A first adjustment mechanism is provided between the adjustment plate and the base. The first adjustment mechanism includes a first fixed rotation axis passing through the adjustment plate and a first eccentric element. By rotating the first eccentric element, the first adjustment base plate rotates relative to the first fixed rotation axis. A second adjustment base plate is provided between the second adjustment base plate and the extension plate of the first adjustment base plate. The second adjustment mechanism includes a second fixed rotation axis passing through the second adjustment base plate and a second eccentric element. By rotating the second eccentric element, the second adjustment base plate rotates relative to the second fixed rotation axis. A fixing plate, which is perpendicular to and fixedly disposed with respect to the second adjusting base plate; A third adjustment base plate is provided with a third adjustment mechanism between the third adjustment base plate and the fixed plate. The third adjustment mechanism includes a third fixed rotation axis passing through the third adjustment base plate and a third eccentric element. By rotating the third eccentric element, the third adjustment base plate rotates relative to the third fixed rotation axis. The first eccentric element includes a first axle and a first eccentric wheel. The first axle is offset from the axis of the first eccentric wheel. The first eccentric wheel is connected to the base through the first axle. The side of the first eccentric wheel is connected to a first groove in the first adjusting base plate. By rotating the first eccentric wheel, the first eccentric wheel slides relative to the first groove, thereby realizing the rotational movement of the first adjusting base plate relative to the first fixed rotating axis. The second eccentric element includes a second wheel shaft and a second eccentric wheel. The second wheel shaft is offset from the axis of the second eccentric wheel. The second eccentric wheel is connected to the extension plate of the first adjusting base plate through the second wheel shaft. The side of the second eccentric wheel is connected to the second sliding groove provided in the second adjusting base plate. By rotating the second eccentric wheel, the second eccentric wheel slides relative to the second sliding groove, thereby realizing the rotational movement of the second adjusting base plate relative to the second fixed rotating axis. The third eccentric element includes a third wheel shaft and a third eccentric wheel. The third wheel shaft is offset from the axis of the third eccentric wheel. The third eccentric wheel is connected to the fixed plate through the third wheel shaft. The side of the third eccentric wheel is connected to a third sliding groove provided in the third adjusting base plate. By rotating the third eccentric wheel, the third eccentric wheel slides relative to the third sliding groove, thereby realizing the rotational movement of the third adjusting base plate relative to the third fixed rotating shaft.

2. The angle adjustment device according to claim 1, characterized in that: The extension lines of the first fixed rotation axis, the second fixed rotation axis, and the third fixed rotation axis intersect at the same intersection point.

3. The angle adjustment device according to claim 2, characterized in that: An optical element is fixedly disposed on the third adjustment substrate, and the center point of the light beam projected onto the optical element coincides with the intersection point.

4. The angle adjustment device according to claim 1, characterized in that: The first slide, the second slide, and the third slide are configured as U-shaped grooves.

5. The angle adjustment device according to claim 1, characterized in that: The first distance between the first eccentric element and the first fixed rotation axis is L1, and the required rotation angle of the first adjustment substrate in its first surface is A1. Then, the offset D1 caused by rotating the first eccentric element is obtained by the following formula: D1=L1*TAN(A1). The second distance between the second eccentric element and the second fixed rotation axis is L2, and the required rotation angle of the second adjustment substrate in its second surface is A2. Then, the offset D2 of the second adjustment substrate caused by rotating the second eccentric element is obtained by the following formula: D2=L2*TAN(A2); The third distance between the third eccentric element and the third fixed rotation axis is L3, and the required rotation angle of the third adjustment substrate in its third surface is A3. Then, the offset D3 caused by rotating the third eccentric element to the third adjustment substrate is obtained by the following formula: D3=L3*TAN(A3).

6. The angle adjustment device according to claim 1, characterized in that: A first locking screw is provided between the first adjusting base and the base for fixing the first adjusting base to the base. A first spring washer is also provided between the first locking screw and the first adjusting base. A second locking screw is provided between the second adjusting base and the first adjusting base for fixing the second adjusting base to the first adjusting base. A second spring washer is also provided between the second locking screw and the second adjusting base. A third locking screw is provided between the third adjusting base and the fixing plate for fixing the third adjusting base to the fixing plate. A third spring washer is also provided between the third locking screw and the fixing plate.

7. The angle adjustment device according to claim 6, characterized in that: The first adjusting plate has a first hole through which the first locking screw passes, and a first distance between the first hole and the first locking screw to provide space required for the first adjusting plate to rotate; the second adjusting plate has a second hole through which the second locking screw passes, and a second distance between the second hole and the second locking screw to provide space required for the second adjusting plate to rotate; the third adjusting plate has a third hole through which the third locking screw passes, and a third distance between the third hole and the third locking screw to provide space required for the third adjusting plate to rotate.

8. The angle adjustment device according to claim 1, characterized in that: A first initial positioning pin is also provided between the first adjustment substrate and the base for initially positioning the first adjustment substrate on the base; a second initial positioning pin is also provided between the second adjustment substrate and the first adjustment substrate for initially positioning the second adjustment substrate on the first adjustment substrate. A third initial positioning pin is also provided between the third adjustment base plate and the fixed plate, for initially positioning the third adjustment base plate on the fixed plate.

9. The angle adjustment device according to claim 1, characterized in that: The second adjustment substrate has a fourth spacing between itself and the adjustment plate of the first adjustment substrate to provide space required for the first adjustment substrate to rotate. The third adjustment substrate has a fifth spacing and a sixth spacing between itself and the second adjustment substrate and the adjustment plate of the first adjustment substrate, respectively, to provide space required for the third adjustment substrate to rotate.

10. An angle adjustment method, characterized in that, Including the following steps: Provide an angle adjustment device as described in any one of claims 1 to 9; Based on the required three-dimensional angle adjustment, calculate the required two-dimensional angle of rotation for each adjustment plate. Based on the two-dimensional angle, the required rotation angle of the corresponding eccentric element is calculated; Rotate the corresponding eccentric element to achieve adjustment of the three-dimensional angle.

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