Substrate support member, substrate transport apparatus, and method for manufacturing substrate support member

Abstract

Provided is a substrate support member that can achieve both light weight and high rigidity, a substrate transport apparatus, and a method for manufacturing a substrate support member. A substrate support member according to an embodiment is a long, strip-shaped substrate support member that can be provided in a plurality of numbers in a substrate transport apparatus for transporting a substrate to support the substrate, and is characterized in that: a first portion, a second portion, and a third portion are sequentially provided from a root end side to a tip end side in a length direction; when cross sections of the first portion, the second portion, and the third portion orthogonal to the length direction are a first cross section, a second cross section, and a third cross section, respectively, the first cross section, the second cross section, and the third cross section have mutually different shapes; the second cross section has a smaller cross-sectional area than the first cross section; and the third cross section has a smaller cross-sectional area than the second cross section.

Description

Technical Field

[0001] This invention relates to a substrate support component, a substrate conveying device, and a method for manufacturing the substrate support component. Background Technology

[0002] A substrate transport device is known to transport a substrate by placing it on multiple pickups. As a pickup, hollow, square-cylindrical components or long strips with an inverted U-shaped cross-section are used (see, for example, Patent Documents 1-3).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2009-141091

[0006] Patent Document 2: Japanese Patent Application Publication No. 2011-119327

[0007] Patent Document 3: Japanese Patent Application Publication No. 2007-266221 Summary of the Invention

[0008] The technical problem that the invention aims to solve

[0009] This invention provides a technology that enables both lightweight and high rigidity of substrate support components.

[0010] Means for solving technical problems

[0011] One embodiment of the present invention provides a substrate support member that is capable of being provided in a substrate transport device for transporting a substrate, comprising a plurality of elongated substrate support members for supporting the substrate, characterized in that: it has a first portion, a second portion, and a third portion sequentially from the root end to the front end in the length direction; when the cross sections of the first portion, the second portion, and the third portion orthogonal to the length direction are respectively a first cross section, a second cross section, and a third cross section, the first cross section, the second cross section, and the third cross section have different shapes from each other; the cross-sectional area of ​​the second cross section is smaller than the cross-sectional area of ​​the first cross section, and the cross-sectional area of ​​the third cross section is smaller than the cross-sectional area of ​​the second cross section.

[0012] Invention Effects

[0013] By employing this invention, both lightweight and high rigidity of the substrate support component can be achieved. Attached Figure Description

[0014] Figure 1 This is a perspective view of the substrate processing system according to the embodiment.

[0015] Figure 2This is a plan view showing the substrate processing system of the embodiment.

[0016] Figure 3 This is a three-dimensional diagram representing the fork-shaped component.

[0017] Figure 4 This is a 3D diagram representing the pickup in the first example.

[0018] Figure 5 This is a stereoscopic view of the first example pickup from another angle.

[0019] Figure 6 yes Figure 5 A magnified view of region B1 in the image.

[0020] Figure 7 This is a cross-sectional view of the pickup in the first example.

[0021] Figure 8 This is a 3D diagram representing the pickup in the second example.

[0022] Figure 9 This is a stereoscopic view showing the pickup in the second example from another angle.

[0023] Figure 10 This is a cross-sectional view of the pickup in the second example.

[0024] Explanation of reference numerals in the attached figures

[0025] 23. Substrate transport device; 220, 220A, 220B pickups; 221, 226 root ends; 222, 227 middle parts; 223, 228 front ends; G substrate. Detailed Implementation

[0026] Hereinafter, non-limiting illustrative embodiments of the present invention will be described with reference to the accompanying drawings. In all the drawings, the same or corresponding parts are labeled with the same or corresponding reference numerals, and repeated descriptions are omitted.

[0027] [Substrate Processing System]

[0028] Reference Figures 1-3 The substrate processing system of the embodiment will be described. Figure 1 This is a perspective view of the substrate processing system according to the embodiment. Figure 2 This is a plan view showing the substrate processing system of the embodiment. Figure 3 This is a three-dimensional diagram representing the fork-shaped component.

[0029] The substrate processing system 100 of the embodiment has a multi-chamber structure including multiple processing chambers 1a, 1b, and 1c. The substrate processing system 100 is configured, for example, as a vacuum processing system for plasma processing of a glass substrate (hereinafter simply referred to as "substrate") G for a flat panel display (FPD). Examples of FPDs include liquid crystal displays (LCDs), electroluminescent displays (ELs), and plasma display panels (PDPs).

[0030] In the substrate processing system 100, multiple large chambers are connected in a cross shape when viewed from above. A transport chamber 3 is arranged in the central part. Three processing chambers 1a, 1b, and 1c for plasma processing of the substrate G are arranged adjacent to three sides of the transport chamber 3. A load locking chamber 5 is arranged adjacent to the remaining side of the transport chamber 3. The three processing chambers 1a, 1b, and 1c, the transport chamber 3, and the load locking chamber 5 all constitute a vacuum chamber. An opening (not shown) is provided between the transport chamber 3 and each of the processing chambers 1a, 1b, and 1c. A gate valve 7a with opening and closing function is arranged in each opening. A gate valve 7b is arranged between the transport chamber 3 and the load locking chamber 5. When closed, the gate valves 7a and 7b can airtightly seal the chambers, and when open, they can connect the chambers for transporting the substrate G. A gate valve 7c is also provided between the load locking chamber 5 and the external atmosphere. When closed, it can maintain the airtightness of the load locking chamber 5, and when open, it can transport the substrate G between the load locking chamber 5 and the outside. In addition, the processing chambers 1a, 1b, 1c, the transport chamber 3, the gate valves 7a, 7b, 7c and the load locking chamber 5 constitute a substrate processing apparatus, which is part of the substrate processing system 100.

[0031] Two cassette indexers 9a and 9b are provided on the outside of the load locking chamber 5. Each cassette indexer 9a and 9b has a cassette 11a and 11b for holding the substrate G. The substrate G is arranged in multiple layers, spaced apart vertically, within each cassette 11a and 11b. Each cassette 11a and 11b can be raised and lowered by lifting mechanisms 13a and 13b respectively. In this embodiment, for example, an unprocessed substrate can be stored in cassette 11a, and a processed substrate can be stored in another cassette 11b.

[0032] A substrate transport device 15 for transporting substrate G is provided between the two boxes 11a and 11b. The substrate transport device 15 includes: fork-shaped members 17a and 17b provided on the upper and lower layers; a drive unit 19 capable of supporting the fork-shaped members 17a and 17b in a way that allows them to move in, out, retract, and rotate; and a support platform 21 for supporting the drive unit 19.

[0033] Processing chambers 1a, 1b, and 1c are capable of maintaining their internal spaces at a specified reduced pressure atmosphere (vacuum state). For example... Figure 2 As shown, a base 2 for mounting a substrate G is provided in each of the processing chambers 1a, 1b, and 1c. In each of the processing chambers 1a, 1b, and 1c, plasma treatments such as etching, ashing, and film formation under vacuum conditions can be performed on the substrate G while it is mounted on the base 2.

[0034] In this embodiment, the same type of treatment can be performed in three processing chambers 1a, 1b, and 1c, or different types of treatment can be performed in each processing chamber. The number of processing chambers is not limited to three; it can also be four or more.

[0035] The transport chamber 3 can be maintained at a prescribed reduced pressure atmosphere, similar to the processing chambers 1a to 1c, which serve as vacuum processing chambers. For example... Figure 2 As shown, a substrate transport device 23 is provided in the transport chamber 3. The substrate transport device 23 is capable of transporting substrate G between the three processing chambers 1a, 1b, 1c and the load locking chamber 5.

[0036] The substrate conveying device 23 includes fork-shaped components 200 disposed on upper and lower layers, capable of independently removing and placing the substrate G. For example... Figure 3 As shown, the fork-shaped component 200 has a pickup base 210 and a plurality of (e.g., four) pickups 220. The pickup base 210 is used to fix the plurality of pickups 220. The plurality of pickups 220 are fixed to the pickup base 210 in parallel with a gap between them. The detailed structure of the pickups 220 will be described later.

[0037] The load locking chamber 5 can maintain a predetermined reduced-pressure atmosphere, similar to the processing chambers 1a-1c and the transport chamber 3. The load locking chamber 5 is used for transferring substrate G between the boxes 11a and 11b in atmospheric atmosphere and the transport chamber 3 in reduced-pressure atmosphere. The load locking chamber 5 needs to switch between atmospheric and reduced-pressure atmospheres quickly, therefore its internal volume is small. In the load locking chamber 5, substrate storage sections 27 are provided on both the upper and lower layers. Figure 2(Only the upper layer is shown in the diagram). Each substrate receiving section 27 has multiple elongated prism-shaped or cylindrical components for supporting the substrate G, arranged at intervals. The intervals of the buffers 28 form recesses for the retraction of comb-shaped pickups (e.g., the pickup 220 of the fork-shaped component 200). A locator 29 is provided in the load locking chamber 5, capable of abutting against the vicinity of the opposite corners of the rectangular substrate G for alignment.

[0038] like Figure 2 As shown, each component of the substrate processing system 100 can be connected to the control unit 30 and controlled (in... Figure 1 (Illustrations omitted). The control unit 30 includes a controller 31 with a CPU (Central Processing Unit), a user interface 32, and a storage unit 33. The controller 31 can comprehensively control various components such as processing chambers 1a-1c, substrate transport device 15, and substrate transport device 23 within the substrate processing system 100. The user interface 32 consists of a keyboard for inputting commands for process managers to manage the substrate processing system 100, and a display that visually displays the operating status of the substrate processing system 100. The storage unit 33 stores a scheme containing control programs (software) and processing condition data for implementing various processes in the substrate processing system 100 under the control of the controller 31. The user interface 32 and the storage unit 33 are connected to the controller 31.

[0039] By reading any scheme from the storage unit 33 as needed, according to instructions from the user interface 32, and executing it with the controller 31, the desired processing can be performed in the board processing system 100 under the control of the controller 31.

[0040] The aforementioned control program and processing condition data can be implemented using a state stored on a computer-readable storage medium, such as a CD-ROM, hard disk, floppy disk, or flash memory. Alternatively, it can be used online by transmitting data from other devices via, for example, a dedicated line.

[0041] [Operation of the substrate processing system]

[0042] Next, the operation of the substrate processing system 100 will be explained.

[0043] First, the two fork-shaped components 17a and 17b of the substrate conveying device 15 are driven to move forward and backward to receive the substrate G from the box 11a containing the unprocessed substrate, and place it in the buffers 28 of the upper and lower substrate storage sections 27 of the load locking chamber 5 respectively.

[0044] After the fork-shaped components 17a and 17b are retracted, the atmospheric gate valve 7c of the load locking chamber 5 is closed. Then, the load locking chamber 5 is vented to reduce the internal pressure to a predetermined vacuum level. Next, the gate valve 7b between the transport chamber 3 and the load locking chamber 5 is opened, and the substrate G stored in the substrate receiving section 27 of the load locking chamber 5 is received by the fork-shaped component 200 of the substrate transport device 23.

[0045] Next, the substrate G is fed into any one of the processing chambers 1a, 1b, and 1c using the fork-shaped member 200 of the substrate transport device 23, and then transferred to the base 2. Then, the substrate G undergoes predetermined processes such as etching within the processing chambers 1a, 1b, and 1c. Next, the processed substrate G is transferred from the base 2 to the fork-shaped member 200 of the substrate transport device 23, and then discharged from the processing chambers 1a, 1b, and 1c.

[0046] Then, the substrate G is transported via the load locking chamber 5 through the reverse path described above and stored in the box 11b by the substrate transport device 15. Alternatively, the processed substrate G may be returned to its original box 11a.

[0047] [Pickup Tool]

[0048] Reference Figures 4-7 The pickup 220A of the first embodiment will be described. The pickup 220A can be used as the pickup 220 of the fork-shaped member 200. Figure 4 This is a 3D view of the pickup 220A in the first example. Figure 5 This is a stereoscopic view of the pickup 220A from another angle, representing the first example. Figure 4 The direction of arrow A1 in the image indicates the direction of the pickup 220A. Figure 6 yes Figure 5 A magnified view of region B1 in the image. Figure 7 This is a cross-sectional view of the pickup 220A in the first example. Figure 7 (a) is Figure 4 The 7A-7A line view section diagram shows the section of the root end 221 that is orthogonal to the length direction. Figure 7 (b) is Figure 4 The 7B-7B line view section diagram shows the section of the middle part 222 that is orthogonal to the length direction. Figure 7 (c) is Figure 4 The 7C-7C line view section diagram shows the section of the front end 223 that is orthogonal to the length direction.

[0049] The pickup 220A has an elongated shape. The overall length L10 of the pickup 220A is, for example, 4000 mm to 4500 mm. Along its length, the pickup 220A has a root end portion 221, a middle portion 222, and a front end portion 223, sequentially arranged from the root end side to the front end side. The root end side of the pickup 220A is the side fixed to the pickup base 210. The front end side of the pickup 220A is the side opposite to the root end side. The root end portion 221, the middle portion 222, and the front end portion 223 are, for example, made of ceramic.

[0050] The root tip 221 is fixed to the pickup base 210. The root tip 221 has a support surface 221s for supporting the substrate G and a non-support surface 221t for not supporting the substrate G. The support surface 221s is located at a position closer to the front end than the non-support surface 221t. A step is formed between the support surface 221s and the non-support surface 221t. Alternatively, the root tip 221 may not have a non-support surface 221t. A cross-section of the root tip 221 orthogonal to the length direction (hereinafter referred to as the "first cross-section"), for example, is shown below. Figure 7 As shown in (a), it has a solid quadrilateral shape with the support surface 221s as one side. The first cross-section can be any solid polygonal shape with the support surface 221s as one side, or it can be a triangular shape, a pentagonal shape, a hexagonal shape, etc. The width W11 of the root end 221 is, for example, fixed in the length direction. The width W11 of the root end 221 can also be configured to vary in the length direction. The length L11 of the root end 221 is, for example, 300 mm or more and 1500 mm or less.

[0051] The intermediate portion 222 is located between the root end portion 221 and the front end portion 223. The intermediate portion 222 has a support surface 222s for supporting the substrate G. The support surface 222s is coplanar with the support surface 221s. The cross-sectional area of ​​the intermediate portion 222, orthogonal to the length direction (hereinafter referred to as the "second cross-section"), is smaller than the cross-sectional area of ​​the first cross-section. In this embodiment, the second cross-section has an inverted U-shape, with the support surface 222s as one side and including two other sides that are orthogonal to and extend downwards from the two ends of that side. That is, as shown... Figure 7As shown in (b), the intermediate portion 222 has a first plate-shaped portion 222a, a second plate-shaped portion 222b, and a third plate-shaped portion 222c. The upper surface of the first plate-shaped portion 222a is a support surface 222s. The second plate-shaped portion 222b and the third plate-shaped portion 222c extend downward from both ends of the lower surface of the first plate-shaped portion 222a. The first plate-shaped portion 222a, the second plate-shaped portion 222b, and the third plate-shaped portion 222c are formed integrally, for example. The second plate-shaped portion 222b and the third plate-shaped portion 222c are parallel to each other. However, the second plate-shaped portion 222b and the third plate-shaped portion 222c may be configured such that the spacing between them increases from top to bottom, or the spacing between them decreases from top to bottom. As described above, the second cross-section has a different shape than the first cross-section. The width W12 of the intermediate portion 222 is, for example, fixed in the length direction. The width W12 of the intermediate portion 222 may also be configured to vary in the length direction. The length L12 of the middle part 222 is, for example, more than 300mm and less than 1200mm.

[0052] The front end portion 223 has a support surface 223s for supporting the substrate G. The support surface 223s is coplanar with the support surface 222s. That is, the support surfaces 221s, 222s, and 223s are coplanar. Therefore, the pickup 220A can support the substrate G in a horizontal position using the support surfaces 221s, 222s, and 223s. The cross-sectional area of ​​the front end portion 223, orthogonal to the length direction (hereinafter referred to as the "third cross-section"), is smaller than the cross-sectional area of ​​the second cross-section. In this embodiment, the third cross-section has a T-shape, with the support surface 223s as one side and including another side orthogonal to that side and extending downwards. That is, as shown... Figure 7As shown in (c), the front end portion 223 has a first plate-shaped portion 223a and a second plate-shaped portion 223b. The upper surface of the first plate-shaped portion 223a is a support surface 223s. The second plate-shaped portion 223b extends downward from the center of the lower surface of the first plate-shaped portion 223a. The first plate-shaped portion 223a and the second plate-shaped portion 223b are formed integrally, for example. As described above, the third section has a different shape from the first section and the second section. The width W13 of the front end portion 223 is defined by the width between the two ends of the first plate-shaped portion 223a, for example, it is fixed in the length direction. The width W13 of the front end portion 223 can also be configured to vary in the length direction. From the viewpoint of lightweighting, the length L13 of the front end portion 223 is preferably 0.3 times or more than the total length L10 of the pickup 220A, more preferably 0.4 times or more. From the viewpoint of high rigidity, the length L13 of the front end portion 223 is preferably 0.6 times or less than the total length L10 of the pickup 220A, more preferably 0.5 times or less. The length L13 of the front end portion 223 is, for example, 1800 mm or more and 2600 mm or less. By fixing the length L11 of the root end portion 221, lengthening the length L12 of the middle portion 222, and shortening the length L13 of the front end portion 223, it is easier to suppress the deflection of the pickup 220A caused by its own weight, and the deflection of the pickup 220A caused by its own weight and the load of the substrate G. Preferably, the front end portion 223 is formed in a shape that tapers towards the front end in the length direction from the root end side. For example, it is preferable that the height H13 of the T-shape (the height of the second plate-shaped portion 223b) is lower as the front end portion 223 extends towards the front end in the length direction. In this case, the pickup 220A can be made lightweight, and the deflection of the pickup 220A caused by its own weight can be easily suppressed.

[0053] As explained above, the pickup 220A of the first embodiment has a root end portion 221, a middle portion 222, and a front end portion 223 sequentially from the root end side to the front end side in the length direction. Furthermore, the cross-sectional area of ​​the middle portion 222 is smaller than the cross-sectional area of ​​the root end portion 221, and the cross-sectional area of ​​the front end portion 223 is smaller than the cross-sectional area of ​​the middle portion 222. Therefore, both lightweight and high rigidity of the pickup 220A can be achieved.

[0054] Reference Figures 8-10 The pickup 220B of the second embodiment will be described. The pickup 220B can be used as the pickup 220 of the fork-shaped member 200. Figure 8 This is a perspective view of the pickup 220B in the second example. Figure 9 This is a stereoscopic view of the pickup 220B in the second example, viewed from another angle. Figure 8 The direction of arrow A2 in the image indicates the direction of the pickup 220B. Figure 10 This is a cross-sectional view of the pickup 220B in the second example. Figure 10 (a) is Figure 8 The 10A-10A line view section diagram shows the section of the root end 226 that is orthogonal to the length direction. Figure 10 (b) is Figure 8 The 10B-10B line view section diagram shows the section of the middle part 227 that is orthogonal to the length direction. Figure 10 (c) is Figure 8 The 10C-10C line view in the diagram shows the section of the front end 228 that is orthogonal to the length direction.

[0055] The pickup 220B has an elongated shape. The overall length L20 of the pickup 220B is, for example, 4000 mm to 4500 mm. Along its length, from the root end side to the front end side, the pickup 220B has a root end portion 226, a middle portion 227, and a front end portion 228. The root end side of the pickup 220B is the side fixed to the pickup base 210. The front end side of the pickup 220B is the side opposite to the root end side. The root end portion 226, the middle portion 227, and the front end portion 228 are, for example, made of ceramic.

[0056] The root tip 226 is fixed to the pickup base 210. The root tip 226 has an upper surface 226s. The cross section of the root tip 226 orthogonal to the length direction (hereinafter referred to as the "first cross section"), for example, is as follows: Figure 10 As shown in (a), it has a solid quadrilateral shape with surface 226s as one side. The first cross-section can be any solid polygonal shape with surface 226s as one side, or it can be a triangle, pentagon, hexagon, etc. The width W21 of the root end 226 is, for example, fixed in the length direction. The width W21 of the root end 226 can also be configured to vary in the length direction. The length L21 of the root end 226 is, for example, 300 mm or more and 500 mm or less.

[0057] The intermediate portion 227 is located between the root end portion 226 and the front end portion 228. The intermediate portion 227 has a support surface 227s for supporting the substrate G and a non-support surface 227t for not supporting the substrate G. The support surface 227s is located at a position closer to the front end than the non-support surface 227t. A step is formed between the support surface 227s and the non-support surface 227t. Alternatively, the intermediate portion 227 may not have a non-support surface 227t. The non-support surface 227t is coplanar with the upper surface 226s. The cross-sectional area of ​​the intermediate portion 227, orthogonal to the length direction (hereinafter referred to as the "second cross-section"), is smaller than the cross-sectional area of ​​the first cross-section. In this embodiment, the second cross-section has an I-shape, with either the support surface 227s or the non-support surface 227t as one side and including an opposite side opposite to that side and a connecting side connecting the one side and the opposite side. That is, as shown... Figure 10As shown in (b), the intermediate portion 227 has a first plate-shaped portion 227a, a second plate-shaped portion 227b, and a third plate-shaped portion 227c. In serving as... Figure 8 10B-10B line view section diagram Figure 10 In (b), the upper surface of the first plate-shaped portion 227a is the support surface 227s. The second plate-shaped portion 227b is opposite to the first plate-shaped portion 227a. The third plate-shaped portion 227c connects the center position of the lower surface of the first plate-shaped portion 227a to the center position of the upper surface of the second plate-shaped portion 227b. In the second cross-section with the non-support surface 227t as one side, except for the amount of step lengthening of the third plate-shaped portion 227c, it is similar to... Figure 10 (b) is the same. The first plate-shaped portion 227a, the second plate-shaped portion 227b, and the third plate-shaped portion 227c are formed integrally, for example. As described above, the second cross-section has a different shape than the first cross-section. The width W22 of the middle portion 227 is configured to vary in the length direction, for example. In this embodiment, the width W22 of the middle portion 227 is configured such that the central portion in the length direction is wider than the width W21 of the root end portion 226 and the width W23 of the front end portion 228. In this case, the rigidity of the middle portion 227 is easily improved. The width W22 of the middle portion 227 gradually narrows at the connection with the root end portion 226 on the root end side in the length direction of the middle portion 227, becoming the same as the width W21 of the root end portion 226, and at the connection with the front end portion 228 on the front end side in the length direction, becoming the same as the width W23 of the front end portion 228. Alternatively, the width W22 of the middle portion 227 may be constant in the length direction. The length L22 of the middle part 227 is, for example, more than 2000mm and less than 2600mm.

[0058] The front end portion 228 has a support surface 228s for supporting the substrate G. The support surface 228s is coplanar with the support surface 227s. Therefore, the pickup 220B can support the substrate G in a horizontal position using the support surfaces 227s and 228s. The cross-sectional area of ​​the section orthogonal to the length direction of the front end portion 228 (hereinafter referred to as the "third section") is smaller than the cross-sectional area of ​​the second section. In this embodiment, the third section has a T-shape, with the support surface 228s as one side and including another side orthogonal to that side and extending downwards. That is, as shown... Figure 10As shown in (c), the front end portion 228 has a first plate-shaped portion 228a and a second plate-shaped portion 228b. The upper surface of the first plate-shaped portion 228a is a support surface 228s. The second plate-shaped portion 228b extends downward from the center of the lower surface of the first plate-shaped portion 228a. The first plate-shaped portion 228a and the second plate-shaped portion 228b are formed integrally, for example. As described above, the third section has a different shape from the first section and the second section. The width W23 of the front end portion 228 is defined by the width between the two ends of the first plate-shaped portion 228a, for example, it is fixed in the length direction. The width W23 of the front end portion 228 can also be configured to vary in the length direction. From the viewpoint of lightweighting, the length L23 of the front end portion 228 is preferably at least 0.3 times the total length L20 of the pickup 220B, more preferably at least 0.4 times. From the viewpoint of high rigidity, the length L23 of the front end portion 228 is preferably 0.6 times or less than the total length L20 of the pickup 220B, more preferably 0.5 times or less. The length L23 of the front end portion 228 is, for example, 1300 mm or more and 1800 mm or less. By fixing the length L21 of the root end portion 226, lengthening the length L22 of the middle portion 227, and shortening the length L23 of the front end portion 228, it is easier to suppress the deflection of the pickup 220B caused by its own weight and the deflection of the pickup 220B caused by its own weight and the load of the substrate G. Preferably, the front end portion 228 is formed in a shape that tapers towards the front end in the length direction from the root end side. For example, it is preferable that the height H23 of the T-shape (the height of the second plate-shaped portion 228b) is lower as the front end portion 228 extends towards the front end in the length direction. In this case, the pickup 220B can be made lightweight, and the deflection of the pickup 220B caused by its own weight can be easily suppressed.

[0059] As explained above, the pickup 220B of the second embodiment has a root end portion 226, a middle portion 227, and a front end portion 228 sequentially from the root end side to the front end side in the length direction. Furthermore, the cross-sectional area of ​​the middle portion 227 is smaller than the cross-sectional area of ​​the root end portion 226, and the cross-sectional area of ​​the front end portion 228 is smaller than the cross-sectional area of ​​the middle portion 227. Therefore, both lightweight and high rigidity of the pickup 220B can be achieved.

[0060] [Measurement results of pickup deflection and natural vibration frequency]

[0061] Referring to Tables 1 and 2, the weight, flexure, and natural vibration frequency of the pickup 220A in the first embodiment were measured by changing the length L12 of the middle portion 222 and the length L13 of the front portion 223. The weight of the pickup 220A is the weight of one pickup 220A. The flexure of the pickup 220A includes the flexure of the pickup 220A caused by its own weight (hereinafter referred to as "self-weight sag") and the flexure of the pickup 220A caused by its own weight and the load of the substrate G (hereinafter referred to as "self-weight + load sag").

[0062] [Table 1]

[0063]

[0064] Table 1 is a graph showing the measurement results of the deflection and natural vibration frequency of pickup 220A. In Table 1, starting from the left column, the following values ​​are represented in sequence: total length L10 [mm], length L11 [mm] of the root end 221, length L12 [mm] of the middle part 222, length L13 [mm] of the front end 223, weight [kg], self-weight sag [mm], self-weight + load sag [mm], and natural vibration frequency [Hz]. In Table 1, a positive value for both self-weight sag and self-weight + load sag indicates that pickup 220A deflects upwards, while a negative value indicates that pickup 220A deflects downwards.

[0065] As shown in Table 1, the total length L10 of pickup 220A is fixed at 4100mm, the length L11 of root end 221 is fixed at 1150mm, and the ratio of the length L12 of middle part 222 to the length L13 of front end 223 is changed.

[0066] As shown in Table 1, it can be seen that by increasing the length L12 of the middle portion 222 and shortening the length L13 of the front portion 223, the self-weight sag and the self-weight + load sag are reduced. This result shows that the longer the length L12 of the middle portion 222 and the shorter the length L13 of the front portion 223, the more effectively the deflection of the pickup 220A can be suppressed. Furthermore, as shown in Table 1, it can be seen that under any condition, the natural frequency is above 10Hz, exhibiting a high natural frequency. Therefore, it is possible to suppress the pickup 220A from resonating with surrounding vibrations and thus suppressing its own vibration. Additionally, it can be seen that by increasing the length L12 of the middle portion 222 and shortening the length L13 of the front portion 223, the natural vibration frequency increases. This result shows that by increasing the length L12 of the middle portion 222 and shortening the length L13 of the front portion 223, the vibration of the pickup 220A can be particularly suppressed.

[0067] [Table 2]

[0068]

[0069] Table 2 is a graph showing the measurement results of the deflection and natural vibration frequency of pickup 220A, which differs from those in Table 1 in terms of total length L10. In Table 2, starting from the left column, the following values ​​are listed sequentially: total length L10 [mm], length L11 [mm] of the root end 221, length L12 [mm] of the middle section 222, length L13 [mm] of the front end 223, weight [kg], self-weight sag [mm], self-weight + load sag [mm], and natural vibration frequency [Hz]. In Table 2, positive values ​​for self-weight sag and self-weight + load sag indicate upward deflection of pickup 220A, while negative values ​​indicate downward deflection of pickup 220A.

[0070] As shown in Table 2, the total length L10 of pickup 220A is fixed at 4250mm, the length L11 of root end 221 is fixed at 1150mm, and the ratio of the length L12 of middle part 222 to the length L13 of front end 223 is changed.

[0071] As shown in Table 2, it can be seen that by increasing the length L12 of the middle portion 222 and shortening the length L13 of the front portion 223, the self-weight sag and the self-weight plus load sag are reduced. This result shows that the longer the length L12 of the middle portion 222 and the shorter the length L13 of the front portion 223, the better the deflection of the pickup 220A can be suppressed. Furthermore, as shown in Table 2, it can be seen that regardless of the ratio of the length L12 of the middle portion 222 to the length L13 of the front portion 223, the natural frequency is above 9Hz, indicating a high natural frequency. Therefore, it is possible to suppress the pickup 220A from resonating with its surroundings and vibrating on its own.

[0072] Referring to Table 3, the weight, flexure, and natural vibration frequency of the pickup 220B in the second embodiment were measured by changing the length L22 of the middle portion 227 and the length L23 of the front portion 223. The weight of the pickup 220B is the weight of one pickup 220B. The flexure of the pickup 220B includes sag due to its own weight and sag due to its own weight plus load.

[0073] [Table 3]

[0074]

[0075] Table 3 is a graph showing the measurement results of the deflection and natural vibration frequency of pickup 220B. In Table 3, starting from the left column, the following values ​​are represented sequentially: total length L20 [mm], root end length L21 [mm], middle section length L22 [mm], front end length L23 [mm], weight [kg], self-weight sag [mm], self-weight + load sag [mm], and natural vibration frequency [Hz]. In Table 3, positive values ​​for self-weight sag and self-weight + load sag indicate upward deflection of pickup 220B, while negative values ​​indicate downward deflection of pickup 220B.

[0076] As shown in Table 3, the total length L20 of pickup 220B is fixed at 4250mm, the length L21 of root end 226 is fixed at 360mm, and the ratio of the length L22 of middle part 227 to the length L23 of front end 228 is changed.

[0077] As shown in Table 3, it can be seen that by increasing the length L22 of the middle portion 227 and shortening the length L23 of the front portion 228, the self-weight sag and the self-weight plus load sag are reduced. This result indicates that the longer the length L22 of the middle portion 227 and the shorter the length L23 of the front portion 228, the more effectively the deflection of the pickup 220B can be suppressed. Furthermore, as shown in Table 3, it can be seen that regardless of the ratio of the length L22 of the middle portion 227 to the length L23 of the front portion 228, the natural frequency is above 10Hz, exhibiting a high natural frequency. Therefore, it is possible to suppress the pickup 220B from resonating with its surroundings and vibrating on its own.

[0078] Furthermore, in the above embodiments, pickups 220, 220A, and 220B are examples of substrate support members. Additionally, root ends 221 and 226 are examples of a first portion, middle portions 222 and 227 are examples of a second portion, and front ends 223 and 228 are examples of a third portion.

[0079] The embodiments disclosed herein should be considered illustrative rather than limiting in all respects. The above embodiments may be omitted, substituted, or modified in various ways without departing from the appended claims and their spirit.

[0080] In the above embodiments, the case where the pickup has three parts (root end, middle part, and front end) with different cross-sectional shapes has been described, but the present invention is not limited thereto. For example, the pickup may have four or more parts with different cross-sectional shapes. In this case, it is sufficient to form four or more parts in such a way that the cross-sectional area decreases from the root end side to the front end side of the pickup. For example, the pickup may have a root end 221 (first example), a middle part 227 (second example), a middle part 222 (first example), and a front end 223 (first example) in sequence from the root end side to the front end side.

Claims

1. A substrate support member, comprising a plurality of elongated substrate support members for supporting the substrate in a substrate conveying device for conveying a substrate, characterized in that: Along its length, from the root end to the front end, it has a first part, a second part, and a third part in sequence. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The third part has a third support surface for supporting the substrate. The third cross section has a T-shape, with the third support surface as one side and including another side that is orthogonal to the first side and extends downward.

2. The substrate support component as described in claim 1, characterized in that: The first cross section has a solid polygonal shape.

3. The substrate support component as described in claim 2, characterized in that: The polygon shape is a quadrilateral shape.

4. The substrate support member as described in any one of claims 1 to 3, characterized in that: The third part extends from the root end to the front end in the length direction, and the height of the T-shape decreases.

5. The substrate support member as described in any one of claims 1 to 3, characterized in that: The second part has a second support surface for supporting the substrate. The second cross section has an inverted U-shape, which has the second support surface as one side and includes two other sides that are orthogonal to the one side and extend downward, connected to both ends of the one side.

6. The substrate support member as described in any one of claims 1 to 3, characterized in that: The second part has a second support surface that supports the substrate. The second cross section has an I-shape, which has the second supporting surface as one side and includes an opposite side and a connecting side that connects the one side and the opposite side.

7. The substrate support member as described in any one of claims 1 to 3, characterized in that: The substrate is a glass substrate used in flat panel displays.

8. The substrate support member as described in any one of claims 1 to 3, characterized in that: The length of the third part is more than 0.3 times and less than 0.6 times the total length of the substrate support member.

9. A substrate support member, comprising a plurality of elongated substrate support members for supporting the substrate in a substrate conveying device for conveying a substrate, characterized in that: Along its length, from the root end to the front end, it has a first part, a second part, and a third part in sequence. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The second part has a second support surface for supporting the substrate. The second cross section has an inverted U-shape, which has the second support surface as one side and includes two other sides that are orthogonal to the one side and extend downward, connected to both ends of the one side.

10. The substrate support member as claimed in claim 9, characterized in that: The first cross section has a solid polygonal shape.

11. The substrate support member as claimed in claim 10, characterized in that: The polygon shape is a quadrilateral shape.

12. The substrate support member as claimed in any one of claims 9 to 11, characterized in that: The substrate is a glass substrate used in flat panel displays.

13. The substrate support member as claimed in any one of claims 9 to 11, characterized in that: The length of the third part is more than 0.3 times and less than 0.6 times the total length of the substrate support member.

14. A substrate support member, comprising a plurality of elongated substrate support members for supporting the substrate in a substrate conveying device for conveying the substrate, characterized in that: Along its length, from the root end to the front end, it has a first part, a second part, and a third part in sequence. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The second part has a second support surface that supports the substrate. The second cross section has an I-shape, which has the second supporting surface as one side and includes an opposite side and a connecting side that connects the one side and the opposite side.

15. The substrate support member as claimed in claim 14, characterized in that: The first cross section has a solid polygonal shape.

16. The substrate support member as claimed in claim 15, characterized in that: The polygon shape is a quadrilateral shape.

17. The substrate support member as claimed in any one of claims 14 to 16, characterized in that: The substrate is a glass substrate used in flat panel displays.

18. The substrate support member as claimed in any one of claims 14 to 16, characterized in that: The length of the third part is more than 0.3 times and less than 0.6 times the total length of the substrate support member.

19. A substrate conveying device for conveying substrates, characterized in that: It includes multiple elongated substrate support components for supporting the substrate. The substrate support member has a first part, a second part, and a third part in sequence from the root end to the front end along its length. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The third part has a third support surface for supporting the substrate. The third cross section has a T-shape, with the third support surface as one side and including another side that is orthogonal to the first side and extends downward.

20. The substrate conveying device as claimed in claim 19, characterized in that: The substrate is a glass substrate used in flat panel displays.

21. A substrate conveying device for conveying substrates, characterized in that: It includes multiple elongated substrate support components for supporting the substrate. The substrate support member has a first part, a second part, and a third part in sequence from the root end to the front end along its length. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The second part has a second support surface for supporting the substrate. The second cross section has an inverted U-shape, which has the second support surface as one side and includes two other sides that are orthogonal to the one side and extend downward, connected to both ends of the one side.

22. The substrate conveying device as claimed in claim 21, characterized in that: The substrate is a glass substrate used in flat panel displays.

23. A substrate conveying device for conveying substrates, characterized in that: It includes multiple elongated substrate support components for supporting the substrate. The substrate support member has a first part, a second part, and a third part in sequence from the root end to the front end along its length. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The second part has a second support surface that supports the substrate. The second cross section has an I-shape, which has the second supporting surface as one side and includes an opposite side and a connecting side that connects the one side and the opposite side.

24. The substrate conveying device as claimed in claim 23, characterized in that: The substrate is a glass substrate used in flat panel displays.

25. A method for manufacturing a substrate support member, wherein the substrate support member is a plurality of elongated substrate support members that can be provided in a substrate conveying device for conveying a substrate to support the substrate, and the method for manufacturing the substrate support member is characterized in that: This includes the steps of sequentially configuring the first part, the second part, and the third part along the length direction from the root end to the front end. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The third part has a third support surface for supporting the substrate. The third cross section has a T-shape, with the third support surface as one side and including another side that is orthogonal to the first side and extends downward.

26. A method for manufacturing a substrate support member, wherein the substrate support member is a long strip-shaped substrate support member that can be provided in a substrate conveying device for conveying a substrate to support the substrate, and the method for manufacturing the substrate support member is characterized in that: This includes the steps of sequentially configuring the first part, the second part, and the third part along the length direction from the root end to the front end. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The second part has a second support surface for supporting the substrate. The second cross section has an inverted U-shape, which has the second support surface as one side and includes two other sides that are orthogonal to the one side and extend downward, connected to both ends of the one side.

27. A method for manufacturing a substrate support member, wherein the substrate support member is a plurality of elongated substrate support members that can be provided in a substrate conveying device for conveying a substrate to support the substrate, and the method for manufacturing the substrate support member is characterized in that: This includes the steps of sequentially configuring the first part, the second part, and the third part along the length direction from the root end to the front end. When the cross-sections orthogonal to the length direction of the first part, the second part, and the third part are respectively the first cross-section, the second cross-section, and the third cross-section, The first cross-section, the second cross-section, and the third cross-section have different shapes from each other. The cross-sectional area of ​​the second section is smaller than the cross-sectional area of ​​the first section, and the cross-sectional area of ​​the third section is smaller than the cross-sectional area of ​​the second section. The second part has a second support surface that supports the substrate. The second cross section has an I-shape, which has the second supporting surface as one side and includes an opposite side and a connecting side that connects the one side and the opposite side.

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