Compact multipurpose cavity system for hard x-ray detector data acquisition

CN116482744BActive Publication Date: 2026-09-18SHANGHAI TECH UNIV
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Patent Information

Application Number
CN202310651442.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-06-02
Publication Date
2026-09-18
Estimated Expiration
2043-06-02

AI Technical Summary

Technical Problem

但是由于散射或者衍射信号的强度随着衍射角的增大呈指数衰减,实验中空气吸收会影响弱衍射信号采集,而空气的散射则会提高噪音水平,从而降低了衍射或者散射信号的信噪比,进而影响高分辨、高信噪比的实验数据的获取,造成无法解析出精细的物质结构

Benefits of technology

[0019] This application can simultaneously meet the diverse working environments of X-ray detectors, the high signal-to-noise ratio requirements of experimental data, and the need for water, electricity, and gas feed in multiple environmental atmospheres. It can solve the problems in the prior art by integrating multiple environmental atmospheres and water, electricity, and gas feed interfaces in X-ray heat dissipation and diffraction experiments.

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Abstract

The application discloses a compact multipurpose cavity system for hard X-ray detector data acquisition, comprising a multipurpose cavity, wherein an X-ray detector is arranged in the multipurpose cavity, a rough vacuum device and a high vacuum device are arranged on the side wall of the multipurpose cavity respectively, and an air charging interface and an air outlet interface are also arranged on the side wall of the multipurpose cavity respectively; the system further comprises a cooling device and an electrical device which are in communication with the X-ray detector respectively; and the system further comprises a cavity three-dimensional adjusting platform connected with the multipurpose cavity. The application can simultaneously meet the diversity of the working environment of the X-ray detector, the high signal-to-noise ratio requirement of experimental data and the requirement of water, electricity and gas feeding under multiple environmental atmospheres.
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Description

Technical Field

[0001] This application relates to the field of hard X-ray detector data acquisition technology, and in particular to a compact, multi-purpose cavity system for hard X-ray detector data acquisition. Background Technology

[0002] X-ray scattering and imaging are crucial experimental methods for resolving material structures. Hard X-rays, with their strong penetrating power and short wavelength, are essential light sources for achieving high spatiotemporal resolution structural analysis. Coherent X-ray diffraction imaging has become a vital method for analyzing nanostructures. However, because the intensity of scattering or diffraction signals decreases exponentially with increasing diffraction angle, air absorption in experiments can affect the acquisition of weak diffraction signals, while air scattering increases noise levels, thus reducing the signal-to-noise ratio (SNR) of the diffraction or scattering signals. This, in turn, affects the acquisition of high-resolution, high SNR experimental data, making it impossible to resolve fine material structures. Furthermore, the diversity of the samples being tested necessitates various environmental atmospheres. To match the sample's environmental atmosphere, the detector must also operate in the same atmosphere. Regardless of the detector's operating atmosphere, the acquisition of complete scattering or diffraction data, lossless transmission of detector data, access to the detector trigger signal, and connection of the detector cooling system must be ensured. This necessitates providing an X-ray detector with a cavity system capable of operating in multiple environmental atmospheres.

[0003] In summary, the diverse operating environments of X-ray detectors, the high signal-to-noise ratio requirements for experimental data, and the need for water, electricity, and gas feeds under various ambient atmospheres necessitate the design of a multi-purpose cavity system for X-ray detectors. This application addresses these issues by integrating multiple ambient atmospheres and water, electricity, and gas feed interfaces into X-ray scattering and diffraction experiments. Summary of the Invention

[0004] In view of the shortcomings of the prior art described above, the purpose of this application is to provide a compact, multi-purpose cavity system for data acquisition using a hard X-ray detector, which is used to solve the problem of acquiring high signal-to-noise ratio experimental data in scattering or diffraction experiments, and can be adapted to different atmospheric environments to ensure experimental success.

[0005] To achieve the above and other related objectives, this application provides a compact multi-purpose cavity system for data acquisition using a hard X-ray detector, comprising a multi-purpose cavity, an X-ray detector disposed within the multi-purpose cavity, a rough vacuum device and a high vacuum device respectively disposed on the side wall of the multi-purpose cavity, and an inflation port and an exhaust port respectively disposed on the side wall of the multi-purpose cavity; the system further includes a cooling device and an electrical device respectively connected to the X-ray detector; the system further includes a cavity three-dimensional adjustment platform connected to the multi-purpose cavity.

[0006] In some embodiments of this application, the system further includes a connecting hose and a tapered pipe, the connecting hose and the multipurpose cavity being connected through the tapered pipe, the diameter of the tapered pipe gradually increasing from the end connected to the connecting hose to the end connected to the multipurpose cavity.

[0007] In some embodiments of this application, the tapered pipe is connected to the multipurpose cavity via a first flange.

[0008] In some embodiments of this application, the rough vacuum device includes a vacuum flange for connecting a vacuum angle valve.

[0009] In some embodiments of this application, the high vacuum device includes a connected vacuum acquisition device and a vacuum interface, wherein the end of the vacuum interface away from the vacuum acquisition device is connected to the side wall of the multipurpose cavity.

[0010] In some embodiments of this application, a vacuum gauge is also provided on the side wall of the multipurpose cavity.

[0011] In some embodiments of this application, the sidewall of the multipurpose cavity is also provided with an observation window.

[0012] In some embodiments of this application, a pressure relief valve is also provided on the side wall of the multipurpose cavity.

[0013] In some embodiments of this application, the end of the multipurpose cavity is provided with a second flange, and it also includes a detachable flange, which is connected to the second flange.

[0014] In some embodiments of this application, the cooling device includes a chiller, the detachable flange is provided with a water feed interface, the chiller is also provided with an inlet pipe and an outlet pipe, and the inlet pipe and the outlet pipe are respectively connected to the X-ray detector through the water feed interface.

[0015] In some embodiments of this application, the electrical device includes power supply and control equipment. The detachable flange is provided with an electrical feedthrough interface. The power supply and control equipment are also connected to the X-ray detector via Lemo connector cables, fiber optic connector cables, and electrode cables, respectively. The X-ray detector includes a power line, a data acquisition line, and a trigger interface line. The Lemo connector cable is connected to the trigger interface line via the electrical feedthrough interface, the fiber optic connector cable is connected to the data acquisition line via the electrical feedthrough interface, and the power line is connected to the electrode cable via the electrical feedthrough interface.

[0016] In some embodiments of this application, the multipurpose cavity is provided with a detector mounting platform, and the X-ray detector is mounted on the detector mounting platform.

[0017] In some embodiments of this application, the cavity three-dimensional adjustment platform includes a support frame connected to a multi-purpose cavity, and also includes an X-axis adjustment mechanism for adjusting the X-axis travel, a Y-axis adjustment mechanism for adjusting the Y-axis travel, and a Z-axis adjustment mechanism for adjusting the Z-axis travel.

[0018] Compared with the prior art, the beneficial effects of this application are as follows:

[0019] This application can simultaneously meet the diverse working environments of X-ray detectors, the high signal-to-noise ratio requirements of experimental data, and the need for water, electricity, and gas feed in multiple environmental atmospheres. It can solve the problems in the prior art by integrating multiple environmental atmospheres and water, electricity, and gas feed interfaces in X-ray heat dissipation and diffraction experiments.

[0020] Furthermore, existing three-dimensional platforms connect to the X-ray detector within a cavity, requiring a large cavity size and offering limited adjustment range for the X-ray detector. This application, however, fixes the detector within a cavity three-dimensional adjustment platform located outside the cavity. The X, Y, and Z-axis travel of the cavity is adjusted via this platform, indirectly regulating the detector. This results in a wider adjustable range and achieves miniaturization and integration of a multi-purpose cavity. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the compact, multi-purpose cavity system for data acquisition using a hard X-ray detector, as described in this application.

[0022] Component designation explanation

[0023] 1. Connect the hose

[0024] 2. Conical pipe

[0025] 3 First flange

[0026] 4. Multipurpose cavity

[0027] 5 Vacuum Flange

[0028] 6 Vacuum Interface

[0029] 7 Vacuum Acquisition Equipment

[0030] 8. View Window

[0031] 9 Second flange

[0032] 10 Removable Flanges

[0033] 11 Electrical feedthrough interface

[0034] 12 Lemo connectors

[0035] 13 Fiber Optic Connectors

[0036] 14 electrodes

[0037] 15 Power supply equipment

[0038] 16 Waterway Feeder Interface

[0039] 17. Water inlet pipe

[0040] 18 Water outlet pipe

[0041] 19 Chiller

[0042] 20 Air outlet

[0043] 21 Vacuum gauge

[0044] 22 Pressure relief valve

[0045] 23 Inflation port

[0046] 24 X-ray detectors

[0047] 25 Detector mounting platform

[0048] 26 Support frame

[0049] 27 X-axis adjustment mechanism

[0050] 28 Y-axis adjustment mechanism

[0051] 29 Z-axis adjustment mechanism

[0052] 30 Vacuum inlet water cooling pipe

[0053] 31 Vacuum water cooling pipe

[0054] 32 Power cord

[0055] 33 Data Acquisition Line

[0056] 34 Trigger Interface Line Detailed Implementation

[0057] In the description of this application, it should be noted that the devices, proportions, sizes, etc., illustrated in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this application. Therefore, they have no substantial technical significance. Any modification to the device, change in proportion, or adjustment of size, without affecting the effects and purposes that this application can achieve, should still fall within the scope of the technical content disclosed in this application. Furthermore, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0058] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0059] Furthermore, in the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0060] like Figure 1 This application provides a compact multi-purpose cavity system for data acquisition of a hard X-ray detector 24, including a multi-purpose cavity 4, in which the X-ray detector 24 is housed. A rough vacuum device and a high vacuum device are respectively provided on the side walls of the multi-purpose cavity 4. An inflation port 23 and an exhaust port 20 are also respectively provided on the side walls of the multi-purpose cavity 4. The system further includes a cooling device and an electrical device respectively connected to the X-ray detector 24. The system also includes a cavity three-dimensional adjustment platform connected to the multi-purpose cavity 4.

[0061] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1The multi-purpose cavity 4 is cylindrical and can be made of materials such as stainless steel. In specific embodiments, the inner diameter of the multi-purpose cavity 4 can be, for example, 200mm-350mm, 200mm-250mm, 250mm-300mm, or 300mm-350mm. The length of the multi-purpose cavity 4 can be, for example, 300mm-600mm, 300mm-400mm, 400mm-500mm, or 500mm-600mm. The thickness of the multi-purpose cavity 4 can be, for example, 3mm-5mm, 3mm-4mm, or 4mm-5mm. The multi-purpose cavity 4 can provide various atmospheric environments for the X-ray detector 24.

[0062] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1 The system also includes a tapered pipe 2 and a connecting hose 1. The smaller diameter end of the tapered pipe 2 is connected to the connecting hose 1, and the larger diameter end of the tapered pipe 2 is connected to the multi-purpose cavity 4. The connecting hose 1 is used to connect to the experimental cavity. The experimental cavity is the cavity that generates signals, while the multi-purpose cavity 4 of this application is the cavity that collects signals. The diameter of the tapered pipe 2 gradually increases from the end connected to the connecting hose 1 to the end connected to the multi-purpose cavity 4, matching the requirement that diffraction or scattering signals gradually diverge from the sample to the detector. In a specific embodiment, the diameter of the tapered pipe 2 near the connecting hose 1 is 50 mm. The diameter of the tapered pipe 2 near the multi-purpose cavity 4 is equal to the diameter of the multi-purpose cavity 4. For example, it can be 200 mm-350 mm, 200 mm-250 mm, 250 mm-300 mm, or 300 mm-350 mm, etc. The diameter of the tapered pipe 2 can be, for example, 300mm-500mm, 300mm-400mm, or 400mm-500mm.

[0063] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1 The tapered pipe 2 is connected to the multipurpose cavity 4 via a first flange 3. The first flange 3 can be, for example, an ISO flange or a CF flange. The tapered pipe 2 is connected to the connecting hose 1 via a KF flange.

[0064] In the compact multi-purpose cavity system provided in this application embodiment, the connecting hose 1 is made of stainless steel and is a metal corrugated pipe. Preferably, the connecting hose 1 is 200mm long, with KF flanges on both sides, and is connected to the KF flange of the tapered pipe 2 by clamps and gaskets.

[0065] In the compact multi-purpose cavity system provided in this application embodiment, a rough vacuum device and a high vacuum device are respectively provided on the side wall of the multi-purpose cavity 4. Preferably, the rough vacuum device and the high vacuum device are respectively provided on the upper end of the side wall of the multi-purpose cavity 4. Figure 1The rough vacuum device includes a vacuum flange 5 for connecting a vacuum angle valve. Typically, the vacuum angle valve is connected via the vacuum flange 5, and atmospheric air is passed through the vacuum flange 5 to adjust the vacuum level to 10. -2 Torr-10 - 1 Torr. Then, a high vacuum is regulated using a high vacuum device. In a specific embodiment, the high vacuum device includes a connected vacuum acquisition device 7 and a vacuum interface 6, with the end of the vacuum interface 6 furthest from the vacuum acquisition device 7 connected to the upper wall of the multipurpose cavity 4. In a specific embodiment, the vacuum acquisition device 7 can be, for example, a Pfeiffer HiPace 300M molecular pump. The vacuum interface 6 is a CF100 or ISO100 flange, connected to the vacuum acquisition device 7. In a specific embodiment, the vacuum interface 6 can be, for example, located at the upper end of the multipurpose cavity 4. The vacuum flange 5 is, for example, located at the rear end of the multipurpose cavity 4. The vacuum flange 5 can be, for example, a CF63 flange, connected to a vacuum angle valve.

[0066] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1 The multipurpose cavity 4 is also provided with a vacuum gauge 21 on its side wall. In a specific embodiment, the vacuum gauge 21 is installed on the middle flange at the front end of the multipurpose cavity 4, which is a CF35 flange. The vacuum gauge 21 is used to measure the vacuum level of the cavity. In a specific embodiment, the vacuum gauge 21 can be an Edwards WRG full-range calibration gauge.

[0067] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1 The multipurpose cavity 4 is also provided with an observation window 8 on its side wall for observing the detector's vacuum wiring and detector operating indicator lights. In a specific embodiment, the vacuum window is located at the rear end of the multipurpose cavity 4 and is a CF63 window flange.

[0068] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1 The inflation port 23 is located on the left side of the front end of the multi-purpose cavity 4 and is used to connect the inflation valve to fill helium. The inflation port 23 can be, for example, a CF35 or KF25 flange.

[0069] In the compact multi-purpose cavity system provided in this embodiment, the air outlet 20 is located on the right side of the front end of the multi-purpose cavity 4, and is connected to a vent valve to discharge air. The air outlet 20 is a CF35 or KF25 flange.

[0070] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1The multipurpose cavity 4 is also equipped with a pressure relief valve 22 on its side wall to prevent the internal pressure of the multipurpose cavity 4 from exceeding 1.5 bar during inflation. In a specific embodiment, the pressure relief valve 22 is installed on the middle flange at the front end of the multipurpose cavity 4, which is a KF25 flange.

[0071] In the compact multi-purpose cavity system provided in this application embodiment, the end of the multi-purpose cavity 4 is provided with a second flange 9. The second flange 9 can be, for example, an ISO flange or a CF flange.

[0072] The compact multi-purpose cavity system provided in this application embodiment also includes a detachable flange 10, which is an ISO flange or a CF flange. The detachable flange 10 is connected to the second flange 9. It is made of stainless steel. The diameter of the detachable flange 10 is 225mm-375mm.

[0073] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1 The cooling device includes a chiller 19. A water feed interface 16 is provided on the detachable flange 10. The chiller 19 also has an inlet pipe 17 and an outlet pipe 18. The inlet pipe 17 and outlet pipe 18 are respectively connected to the X-ray detector 24 via the water feed interface 16. Specifically, a vacuum inlet water cooling pipe 30 and a vacuum outlet water cooling pipe 31 are provided between the water feed interface 16 and the X-ray detector 24. The chiller 19 pumps cooling water into the X-ray detector 24 through the water cooling interface of the X-ray detector 24 via the inlet pipe 17, the water feed interface 16, and the vacuum inlet water cooling pipe 30, and then returns the water to the chiller 19 via the vacuum outlet water cooling pipe 31, the water feed interface 16, and the outlet pipe 18. The water feed interface 16 is a KF40 flange with a diameter of, for example, 40 mm, used for connecting the water feed. The diameter of the water feed interface 16 can be, for example, 40 mm.

[0074] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1The electrical device includes a power supply and control unit 15. An electrical feedthrough interface 11 is provided on the detachable flange 10. The power supply unit 15 is also connected to the X-ray detector 24 via a Lemo connector cable 12, an optical fiber connector cable 13, and an electrode cable 14. In a specific embodiment, the detachable flange 10 has a 100mm diameter electrical feedthrough interface 11 (ISO100 or CF100 flange) for connecting the power supply line 32, data acquisition line 33, and trigger interface line 34 of the X-ray detector 24. The Lemo connector cable 12 is connected to the trigger interface line 34 via the electrical feedthrough interface 11, the optical fiber connector cable 13 is connected to the data acquisition line 33 via the electrical feedthrough interface 11, and the power supply line 32 is connected to the electrode cable 14 via the electrical feedthrough interface 11. This application uses the Lemo connector cable 12 to feed in the trigger signal, the optical fiber connector cable 13 to output detector data, and the electrode cable 14 to supply power to the detector.

[0075] Specifically, the power supply and control device 15 includes a power supply, a pulse signal delayer, and a server. An external power supply is connected to the power line 32 via the electrode cable 14 to power the X-ray detector 24, the pulse signal delayer in the power supply and control device 15, and the server. A communication connection is established between the pulse signal delayer and the X-ray detector 24 via the Lemo connector cable 12 and the trigger interface cable 34, enabling the pulse signal delayer to send a trigger signal to the X-ray detector 24 for detection. Finally, a communication connection is established between the X-ray detector 24 and the server via the data acquisition line 33 and the fiber optic connector cable 13, allowing the X-ray detector 24 to send detection signals to the server for processing.

[0076] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1 The multipurpose cavity 4 is provided with a detector mounting platform 25, and the X-ray detector 24 is mounted on the detector mounting platform 25.

[0077] In a specific embodiment, the detector mounting platform 25 is made of stainless steel. Preferably, the detector mounting platform 25 is fixed to four support columns welded to the inner wall of the multi-purpose cavity 4 by screws and spring washers. The overall levelness of the mounting platform can be adjusted by adjusting the pressing distance of the spring washers. The detector mounting platform 25 has M6 threaded holes spaced 25mm apart for fixing the detector.

[0078] Preferably, the X-ray detector 24 is mounted on the detector mounting platform 25.

[0079] The compact, multi-purpose cavity system provided in the embodiments of this application, such as Figure 1The cavity three-dimensional adjustment platform includes a support frame 26 connected to the multi-purpose cavity 4, and also includes an X-axis adjustment mechanism 27, a Y-axis adjustment mechanism 28, and a Z-axis adjustment mechanism 29. The cavity three-dimensional adjustment platform is a three-dimensional electric adjustment platform, and the cavity is fixed to the three-dimensional adjustment platform via the support frame 26. Preferably, the load of the three-dimensional adjustment platform is greater than 100 kg. The X-axis adjustment mechanism 27 adjusts the X-axis travel by ±25-±50 mm, the Z-axis adjustment mechanism 29 adjusts the Z-axis travel by ±10-±25 mm, and the Y-axis adjustment mechanism 28 adjusts the Y-axis travel by ±100-±250 mm. In a specific embodiment, the X-axis adjustment mechanism 27 can be purchased, for example, from KOHZU, XA16F-L2101. The Y-axis adjustment mechanism 28 can be purchased, for example, from KOHZU, XA20F-L2501. The Z-axis adjustment mechanism 29 can be purchased, for example, from KOHZU, ZA16A-32F01.

[0080] The working process of this application:

[0081] First, turn on the cooling device and the electrical circuit.

[0082] 1. When a vacuum is required, first use a rough vacuum device, such as connecting a vacuum angle valve through vacuum flange 5, to allow atmospheric air to pass through vacuum flange 5 and adjust the vacuum level to 10. -2 Torr-10 -1 Torr. Then, a high vacuum is established using a high vacuum device. The vacuum acquisition device 7 is connected to the vacuum interface 6 to adjust the cavity to a high vacuum. At this time, the gas filling interface 23 and the gas outlet interface 20 are closed. The signal generated by the experimental cavity is collected by the X-ray detector 24 after passing through the connecting hose 1 and the conical pipe 2. The detector's vacuum wiring and detector operation indicator lights are observed through the vacuum viewing window.

[0083] 2. When a helium atmosphere is required, helium is introduced through the filling port 23. During the filling process, the internal pressure of the chamber should not exceed 1.5 bar. If the pressure exceeds 1.5 bar, the pressure should be released through the pressure relief valve 22. At this time, no vacuum is applied. The signal generated by the experimental chamber is collected by the X-ray detector 24 after passing through the connecting hose 1 and the conical pipe 2.

[0084] In summary, this application can simultaneously meet the diverse working environments of X-ray detectors, the high signal-to-noise ratio requirements of experimental data, and the need for water, electricity, and gas feed in multiple environmental atmospheres. It can solve the problems in the prior art by integrating multiple environmental atmospheres and water, electricity, and gas feed interfaces in X-ray scattering and diffraction experiments.

[0085] Furthermore, existing three-dimensional platforms connect to the detector within a cavity, requiring a large cavity size and offering limited X-ray adjustment range for the detector. This application, however, fixes the X-ray detector 24 within a cavity three-dimensional adjustment platform. The platform, located outside the multi-purpose cavity 4, allows for adjustment of the cavity's X, Y, and Z-axis travel, thereby indirectly adjusting the X-ray detector 24. This provides a wider adjustable range, meeting the need for continuous adjustment of the detector-sample distance in various scattering and diffraction experiments. It also achieves miniaturization and integration of the multi-purpose cavity 4, reducing the risks and costs of adjusting the detector in a vacuum environment.

[0086] In summary, this application effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0087] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this application should still be covered by the claims of this application.

Claims

1. A compact, multi-purpose cavity system for data acquisition using a hard X-ray detector, characterized in that, The system includes a multi-purpose cavity (4), which houses an X-ray detector (24). The side walls of the multi-purpose cavity (4) are equipped with a rough vacuum device and a high vacuum device, and the side walls of the multi-purpose cavity (4) are also equipped with an inflation port (23) and an exhaust port (20). The system also includes a cooling device and an electrical device connected to the X-ray detector (24). Furthermore, the system includes a three-dimensional cavity adjustment platform located outside the multi-purpose cavity (4). The system also includes a connecting hose (1) and a tapered pipe (2), the connecting hose (1) and the multipurpose cavity (4) being connected through the tapered pipe (2), the tapered pipe (2) having a gradually increasing diameter from the end connected to the connecting hose (1) to the end connected to the multipurpose cavity (4); The rough vacuum device includes a vacuum flange (5) for connecting a vacuum angle valve; the high vacuum device includes a connected vacuum acquisition device (7) and a vacuum interface (6), the end of the vacuum interface (6) away from the vacuum acquisition device (7) being connected to the side wall of the multipurpose cavity (4); The multipurpose cavity (4) is provided with a second flange (9) at its end, and also includes a detachable flange (10), which is connected to the second flange (9); the cooling device includes a chiller (19), the detachable flange (10) is provided with a water feed interface (16), the chiller (19) is also provided with an inlet pipe (17) and an outlet pipe (18), the inlet pipe (17) and the outlet pipe (18) are respectively connected to the X-ray detector (24) through the water feed interface (16); The electrical device includes a power supply and control device (15). The detachable flange (10) is provided with an electrical feedthrough interface (11). The power supply and control device (15) is also connected to the X-ray detector (24) via a Lemo connector cable (12), an optical fiber connector cable (13), and an electrode cable (14). The X-ray detector (24) includes a power line (32), a data acquisition line (33), and a trigger interface line (34). The Lemo connector cable (12) is connected to the trigger interface line (34) via the electrical feedthrough interface (11), the optical fiber connector cable (13) is connected to the data acquisition line (33) via the electrical feedthrough interface (11), and the power line (32) is connected to the electrode cable (14) via the electrical feedthrough interface (11). The multipurpose cavity (4) is provided with a detector mounting platform (25), and the X-ray detector (24) is mounted on the detector mounting platform (25). The cavity three-dimensional adjustment platform includes a support frame (26) connected to the multipurpose cavity (4). The cavity three-dimensional adjustment platform also includes an X-axis adjustment mechanism (27) for adjusting the X-axis travel, a Y-axis adjustment mechanism (28) for adjusting the Y-axis travel, and a Z-axis adjustment mechanism (29) for adjusting the Z-axis travel.

2. The compact, multi-purpose cavity system for hard X-ray detector data acquisition as described in claim 1, characterized in that, The tapered pipe (2) is connected to the multipurpose cavity (4) via a first flange (3).

3. The compact, multi-purpose cavity system for hard X-ray detector data acquisition as described in claim 1, characterized in that, The side wall of the multipurpose cavity (4) is also provided with a vacuum gauge (21).

4. The compact, multi-purpose cavity system for hard X-ray detector data acquisition as described in claim 1, characterized in that, The multipurpose cavity (4) is also provided with an observation window (8) on its side wall.

5. The compact, multi-purpose cavity system for hard X-ray detector data acquisition as described in claim 1, characterized in that, The multipurpose cavity (4) is also provided with a pressure relief valve (22) on its side wall.

Citation Information

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