A method for modeling and analyzing dynamics of micro-scale rotor systems based on multi-driving force decoupling

Abstract

The present application relates to a micro-scale rotor system dynamics modeling and analysis method based on multi-driving force decoupling. The present application discloses a micro-scale rotor system dynamics modeling and analysis method based on multi-driving force decoupling. For the multi-driving force coupling characteristics of micro friction, micro dynamic wear and adhesion of the micro-scale rotor system, the multi-driving force coupling dynamics model of the micro-scale rotor is obtained by analyzing the micro-scale characteristics of the micro motor rotor. Further, the multi-energy domain coupling model characteristics under the macro nonlinear characteristics, micro nonlinear characteristics, inherent nonlinear characteristics and mechanical nonlinear characteristics of the micro-scale rotor dynamics are comprehensively considered. The multi-driving force micro-scale effect model of electrostatic force, electromagnetic force, thermal dynamics and piezoelectric force is used. Through the multi-driving force decoupling strategy under the dynamics nonlinear feedback, the characteristic analysis of the multi-micro-scale effect coupling rotor system dynamics is realized. The present application can reduce the influence of micro-scale coupling interference on the rotor dynamics modeling and improve the model precision.

Description

Technical Field

[0001] This invention relates to the establishment of a multi-drive coupled dynamic model of a micro-scale rotor of a micro-motor, the establishment of a multi-energy domain coupled model with comprehensive nonlinear characteristics, and the decoupling of multiple driving forces under dynamic nonlinear feedback. Background Technology

[0002] The microscale rotor system modeling and analysis strategy of this invention plays a crucial role in ensuring the quantification and accurate representation of the microscale characteristics of micromotors, and is an important way to ensure the stable and efficient operation of micromotors in applications. Reference [P. Liu, H. Yu and S. Cang, "Modelling and dynamic analysis of underactuated capsule systems with friction-induced hysteresis," 2016 IEEE / RSJ International Conference on Intelligent Robots and Systems (IROS), Daejeon, South Korea, 2016, pp. 549-554] performs dynamic modeling and analysis of the microscale characteristics of microelectromechanical systems (MEMS) under the influence of frictional hysteresis, thereby suppressing friction-induced vibrations while meeting energy requirements. Further considering the mechanical performance model characteristics of micromotors, the literature [P. Zhang, J. Niu, X. Zhang, S. Mao, J. Liu and B. Yang, "Thick Film Ultrasonic Micromotor Based on Chemical Mechanical Thinning and Polishing Process," in IEEE Electron Device Letters, vol. 43, no. 9, pp. 1547-1550, Sept. 2022] proposes a millimeter-scale thick-film rotating traveling wave ultrasonic micromotor based on chemical mechanical thinning and polishing process. This achieves good compactness and high piezoelectric performance of the micromotor. The ultrasonic motor (USM) based on microelectromechanical system (MEMS) technology utilizes the inverse piezoelectric effect to drive the rotor through friction to achieve torque output.[B. Sun, F. Han, L. Li and Q. Wu, "Rotation Control and Characterization of High-Speed ​​Variable-Capacitance Micromotor Supported on Electrostatic Bearing," in IEEE Transactions on Industrial Electronics, vol. 63, no. 7, pp. 4336-4345, July 2016] This paper studies the rotation control design and experimental performance of microscale nonlinear dynamics in microelectromechanical systems (MEMS). The motor uses a non-contact electrostatic bearing to suspend the freely rotating rotor in a vacuum cavity, and a closed-loop phase commutation scheme is proposed. This invention is of great significance for modeling and analyzing the dynamic characteristics of micromotor rotor systems under microscale effects, and improving the dynamic stability and electrical efficiency of micromotors. Summary of the Invention

[0003] This invention addresses the multi-nonlinearity and multi-energy-domain coupling characteristics of micro-motor rotor systems under microscale effects. By using dynamic modeling and analysis of microscale rotor systems based on multi-driving force decoupling, it improves the efficiency and stability of micro-motor rotor system design.

[0004] This invention establishes a multi-drive coupled dynamic model of a microscale rotor, a multi-energy domain coupled model integrating nonlinear characteristics, and then obtains a microscale rotor system dynamic decoupling model by decoupling multiple driving forces under dynamic nonlinear feedback, thereby improving the working stability, operating efficiency and structural optimization of micromotors.

[0005] The microscale rotor dynamics modeling and analysis method based on multi-driving force decoupling includes the following steps:

[0006] First, considering a microscale rotor system of a micromotor characterized by miniaturization, intelligence, integration, and high reliability, the micro-friction d of the microscale rotor system is obtained using an analysis method based on the electro-thermal-mechanical microscale coupling characteristics. m Fretting wear d s and adhesion d n To investigate the multi-drive force coupling characteristics of the micro-motor rotor, a micro-model construction strategy based on finite element analysis is employed. By analyzing the micro-scale characteristics of the micro-motor rotor, a multi-drive force coupling dynamic model of the micro-scale rotor is obtained. Where ω is the rotor speed, F j ,F d ,F r ,F yLet f represent electrostatic force, electromagnetic force, thermodynamic force, and piezoelectric force, respectively; let f represent the multi-drive force coupling model; and let D represent the multi-energy domain coupling model under micro-friction, fretting wear, and adhesion. Then, the macroscopic nonlinear characteristics of the microscale rotor dynamics, including the material system and the geometric feature system, are comprehensively considered. Where C1 and C2 represent the material coefficients and geometric coefficients, respectively, and w1 represents the macroscopic kinematic parameters; including micro-friction d. m Fretting wear d s and adhesion d n micro-nonlinear properties w2 represents the microscopic motion characteristics; it includes the inherent nonlinear properties of initial stress, large displacement, and heat transfer effects. w3 = f g (F0,x l ,T c ), w3 are inherent parameters of the motor, F0,x l ,T c These represent the parameters of initial stress, large displacement, and heat transfer effect, respectively; and the mechanical nonlinear characteristics including damping effect and surface tension. Where w4 represents the geometric parameter. F f Let the damping coefficient and surface tension system be represented respectively, thus obtaining the characteristics of the electro-thermal-mechanical multi-domain coupled model. Through a coupling dynamic mapping strategy of nonlinear time-varying partial differential equations, a multi-domain coupled nonlinear model of the micro-scale rotor of the micro-motor is established. Finally, based on the micro-scale interaction mechanism of the forces, a micro-characteristic decoupling model of the multi-driving force micro-scale effect model (including electrostatic, electromagnetic, thermodynamic, and piezoelectric forces) is obtained by integrating a multi-driving force decoupling strategy under dynamic nonlinear feedback, thus obtaining the micro-characteristic decoupling model of the multi-micro-scale effect coupled rotor system dynamics. Attached Figure Description

[0007] Figure 1 This is a schematic diagram of the dynamic modeling and analysis structure of the microscale rotor system based on multi-driving force decoupling in this invention; Detailed Implementation

[0008] The technical solution of this invention is described in detail below with reference to the accompanying drawings, focusing on the dynamic modeling and analysis of microscale rotor systems based on multi-driving force decoupling.

[0009] like Figure 1 As shown, the dynamic modeling and analysis method for microscale rotor systems based on multi-driving force decoupling designed in this invention mainly includes the establishment of a multi-driving coupled dynamic model of a microscale rotor, the establishment of a multi-energy domain coupled model with comprehensive nonlinear characteristics, and the decoupling of multiple driving forces under dynamic nonlinear feedback. The implementation process includes:

[0010] Step 1: Considering a microscale rotor system of a micromotor with miniaturization, intelligence, integration, and high reliability, the micro-friction d of the microscale rotor system is obtained using an analysis method based on the electro-thermal-mechanical microscale coupling characteristics. m Fretting wear d s and adhesion d n To investigate the multi-drive force coupling characteristics of the micro-motor rotor, a micro-model construction strategy based on finite element analysis is employed. By analyzing the micro-scale characteristics of the micro-motor rotor, a multi-drive force coupling dynamic model of the micro-scale rotor is obtained. Where ω is the rotor speed, F j ,F d ,F r ,F y Let f represent electrostatic force, electromagnetic force, thermodynamic force, and piezoelectric force, respectively; f represents the multi-driving force coupling model; and D represents the multi-energy domain coupling model under micro-friction, fretting wear, and adhesion.

[0011] Step 2: Comprehensively consider the macroscopic nonlinear characteristics of microscale rotor dynamics, including material systems and geometric features. Where C1 and C2 represent the material coefficients and geometric coefficients, respectively, and w1 represents the macroscopic kinematic parameters; including micro-friction d. m Fretting wear d s and adhesion d n micro-nonlinear properties w2 represents the microscopic motion characteristics; it includes the inherent nonlinear properties of initial stress, large displacement, and heat transfer effects. w3 = f g (F0,x l ,T c ), w3 are inherent parameters of the motor, F0,x l ,T c These represent the parameters of initial stress, large displacement, and heat transfer effect, respectively; and the mechanical nonlinear characteristics including damping effect and surface tension. Where w4 represents the geometric parameter. F f Representing the damping coefficient and surface tension system respectively, the characteristics of the electro-thermal-mechanical multi-domain coupled model can be obtained. Where P we To represent the operating power characteristics of a multi-energy-domain microscale rotor, a coupled nonlinear model of the microscale rotor of a micromotor is established through a coupled dynamic mapping strategy using nonlinear time-varying partial differential equations. Where a, b, c, d, and e represent multi-domain coupling parameters.

[0012] Step 3: Based on the microscale interaction mechanism of the interaction forces, a multi-driving force microscale effect model is established using electrostatic force, electromagnetic force, thermodynamic force, and piezoelectric force. Where θ = [ω, w1, w2, w3, w4]T , u is a set undetermined decoupling parameter, and the multi-driving force decoupling strategy under nonlinear dynamic feedback is used. Where ρ z -1 As an inverse function, obtain the micro-characteristic decoupling model of the dynamics of a rotor system coupled with multi-microscale effects. Where A is the decoupling matrix, and satisfies:

[0013]

Claims

1. A method for dynamic modeling and analysis of microscale rotor systems based on multi-driving force decoupling, characterized in that, Includes the following steps: Step 1: Establishment of a multi-drive coupled dynamic model for a microscale rotor; Considering a microscale rotor system with miniaturization, intelligence, integration, and high reliability of a micro-motor, the micro-friction of the microscale rotor system is obtained using an analysis method based on the electro-thermal-mechanical microscale coupling characteristics. Fretting wear and adhesion To investigate the multi-drive force coupling characteristics of the micro-motor rotor, a micro-model construction strategy based on finite element analysis is employed. By analyzing the micro-scale characteristics of the micro-motor rotor, a multi-drive force coupling dynamic model of the micro-scale rotor is obtained. ,in The rotor speed, These represent electrostatic force, electromagnetic force, thermodynamic force, and piezoelectric force, respectively. This represents a multi-drive force coupling model. A multi-energy-domain coupled model representing micro-friction, fretting wear, and adhesion; Step 2: Establish a multi-domain coupling model integrating nonlinear characteristics; comprehensively consider the macroscopic nonlinear characteristics of microscale rotor dynamics, including material systems and geometric features. ,in Represents the material coefficient characteristic and geometric characteristic coefficients. Macroscopic motion parameters; including micro-friction Fretting wear and adhesion micro-nonlinear properties , It is characterized by microscopic motion; it includes inherent nonlinear properties such as initial stress, large displacement, and heat transfer effects. , These are inherent parameters of the motor. These represent the parameters of initial stress, large displacement, and heat transfer effect, respectively; and the mechanical nonlinear characteristics including damping effect and surface tension. ,in Represents geometric parameters, Representing the damping coefficient and surface tension system respectively, the characteristics of the electro-thermal-mechanical multi-domain coupled model can be obtained. ,in To represent the operating power characteristics of a multi-energy-domain microscale rotor, a coupled nonlinear model of the microscale rotor of a micromotor is established through a coupled dynamic mapping strategy using nonlinear time-varying partial differential equations. ,in , , , , represents the multi-domain coupling parameter, and t represents time; Step 3: Decoupling of multiple driving forces under nonlinear dynamic feedback; based on the microscale interaction mechanism of the interaction forces, a microscale effect model of multiple driving forces including electrostatic force, electromagnetic force, thermodynamic force, and piezoelectric force is used. ,in , Given the undetermined decoupling parameters, a multi-drive force decoupling strategy under nonlinear dynamic feedback is proposed. ,in As an inverse function, obtain the micro-characteristic decoupling model of the dynamics of a rotor system coupled with multi-microscale effects. ,in Let be the decoupling matrix, and satisfy: .

2. The method for dynamic modeling and analysis of microscale rotor systems based on multi-driving force decoupling according to claim 1, characterized in that, Based on the microscale interaction mechanism of the interaction forces, a micro-characteristic decoupling model of the multi-drive force microscale effect model of electrostatic force, electromagnetic force, thermodynamic force and piezoelectric force is obtained by integrating the multi-drive force decoupling strategy under dynamic nonlinear feedback.

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