Method for producing a pressure sensor with a pressure-sensitive medium and pressure sensor

Abstract

A method (100) for producing a pressure sensor (200) with a pressure-sensitive medium (207), comprising: providing (101) a pressure sensor (200) with a pressure sensor element (201) arranged in a receiving space (205) of a housing (203) of the pressure sensor (200); filling (103) the receiving space (205) with the pressure-sensitive medium (207); applying (105) a second medium (209) that cannot be mixed with the pressure-sensitive medium (207) onto a surface (211) of the pressure-sensitive medium (207); forming (107) a membrane (213) in a boundary region (215) between the pressure-sensitive medium (207) and the second medium (209) by a phase transfer reaction between a first reactant (217) and a second reactant (219), at least the first reactant (217) or the second reactant (219) being dissolved in the pressure-sensitive medium (207) or in the second medium (209). A pressure sensor (200) produced by the method (100) is also described.

Description

Technical Field

[0001] This invention relates to a method for producing a pressure sensor having a pressure-sensitive medium. Furthermore, this invention relates to a pressure sensor produced by this method. Background Technology

[0002] Pressure sensors are widely used in smartphones and smartwatches. Driven by new applications such as indoor navigation and fitness tracking, the demand for higher measurement accuracy in pressure sensors continues to increase. Simultaneously, next-generation technologies and devices feature pressure sensors with media-sealed and contamination-resistant designs. Therefore, structural and connection designs are crucial differentiating characteristics for high-precision, media-sealed consumer-grade pressure sensors. It is also essential that pressure sensors be contaminated as little as possible throughout their lifespan to ensure uninterrupted function. Therefore, the exposed surfaces of the sensing device should have the lowest possible tendency to contaminate. Currently, various configurations for pressure sensors exist.

[0003] One approach involves covering the sensitive components of a pressure sensor, particularly a MEMS sensor element, with a pressure-sensitive medium. The pressure-sensitive medium is responsible for transmitting pressure from the surface to the sensor and therefore should be as incompressible as possible. Furthermore, this medium serves to protect the MEMS, for example, from corrosion or contamination. Here, according to existing technology, gels are particularly used as the medium, wherein the surface of the gel medium serves as contact with the sensor's external world and is exposed to very different influences.

[0004] However, most gel-based sensors lack sufficient sensitivity or tend to contaminate the surface. For this reason, new designs for encapsulating and sealing pressure sensors must be developed to improve sensor functionality. Summary of the Invention

[0005] Therefore, the object of the present invention is to provide a method for producing a pressure sensor having a pressure-sensitive medium, which eliminates the disadvantages of the prior art. Furthermore, the object of the present invention is to provide an improved pressure sensor having a pressure-sensitive medium.

[0006] This task is accomplished using the method of the independent claim and a pressure sensor. The advantageous configuration is the subject of the dependent claim.

[0007] According to one aspect of the present invention, a method for producing a pressure sensor having a pressure-sensitive medium is provided, wherein the method comprises: A pressure sensor with a pressure sensor element is provided, the pressure sensor element being arranged in the receiving space of the housing of the pressure sensor; The receiving space is filled with a pressure-sensitive medium; A second medium that cannot be mixed with the pressure-sensitive medium is applied to the surface of the pressure-sensitive medium; A film is formed in the boundary region between the pressure-sensitive medium and the second medium by a phase transfer reaction between the first reactant and the second reactant, wherein at least the first reactant or the second reactant is dissolved in the pressure-sensitive medium or the second medium.

[0008] This provides the following technical advantages: an improved method for producing a pressure sensor with a pressure-sensitive medium, wherein the medium is sealed with a membrane. On the one hand, the membrane prevents contamination or damage to the pressure-sensitive medium, thus increasing the lifespan of the pressure sensor. Furthermore, the membrane allows the pressure-sensitive medium to leak out from the receiving space of the pressure sensor housing. The pressure-sensitive medium protects the pressure sensor element. Because the receiving space is sealed by the formed membrane, a liquid pressure-sensitive medium can be used, thereby improving the sensitivity and measurement accuracy of the pressure sensor.

[0009] To form the film, the receiving space of the pressure sensor housing is first filled with a corresponding pressure-sensitive medium. Then, a second medium is applied to the surface of the pressure-sensitive medium, wherein the two media are immiscible, thereby creating two separated phases composed of the pressure-sensitive medium and the second medium. In either the pressure-sensitive medium or the second medium, at least one of the first or second reactants of the chemical reaction is formed by dissolution. Thus, applying the second medium to the surface of the pressure-sensitive medium triggers a phase transfer reaction of the first and second reactants. Here, the phase transfer reaction is formed such that a film is formed on the surface of the pressure-sensitive medium as a reaction product of the phase transfer reaction.

[0010] Here, the phase transfer reaction can be formed such that a film is formed on the entire surface of the pressure-sensitive medium.

[0011] In the context of this application, the first and second reactants can be organic chemical compounds.

[0012] Therefore, the resulting membrane can also be an organic chemical compound. The resulting membrane can have different mechanical, electrical, and / or chemical properties.

[0013] According to one embodiment, a first reactant is dissolved in a pressure-sensitive medium, while a second reactant is dissolved in a second medium, wherein the formation of the membrane includes the diffusion of molecules of the first reactant into the second medium and / or the diffusion of molecules of the second reactant into the pressure-sensitive medium.

[0014] This enables the following technical advantages, such as providing an improved method for producing a pressure sensor with a pressure-sensitive medium. By dissolving the first reactant in the pressure-sensitive medium and the second reactant in the second medium, undesirable reactions of the first and second reactants in either medium can be prevented. Therefore, the phase transfer reaction is initiated simply by applying the second medium to the surface of the pressure-sensitive medium. By diffusing the first reactant into the second medium or the second reactant into the pressure-sensitive medium, a phase transfer reaction between the first and second reactants can be achieved over the widest possible area, and consequently, a substantial film is formed as a product of the phase transfer reaction. According to one embodiment, the pressure-sensitive medium or the second medium includes a reaction catalyst, wherein the phase transfer reaction is formed as a phase transfer catalysis, wherein the reaction catalyst is formed to initiate a chemical reaction between the first and second reactants.

[0015] This enables the following technical advantages: by adding a reaction catalyst, a phase transfer reaction in the form of phase transfer catalysis can be achieved with the highest possible yield. Therefore, by mixing reaction catalysts, the phase transfer reaction between the first and second reactants can be controlled, thereby enabling precise control over the phase transfer reaction and (in connection with) the properties of the membrane formed as a product of the phase transfer reaction by changing the amount or type of the corresponding reaction catalyst.

[0016] According to one embodiment, a first reactant and a second reactant are dissolved in a second medium, wherein a reaction catalyst is dissolved in a pressure-sensitive medium, and wherein phase transfer catalysis includes the diffusion of molecules of the first and second reactants into the pressure-sensitive medium and / or the diffusion of molecules of the reaction catalyst into the second medium.

[0017] This achieves the following technical advantages: enabling the most precise possible phase transfer catalysis between the first and second reactants. By dissolving only the phase transfer catalyst in the pressure-sensitive medium, it avoids the additional dissolution of either the first or second reactant in the pressure-sensitive medium, which could potentially affect the behavior of the pressure-sensitive medium after membrane formation. When the first or second reactant is dissolved in the pressure-sensitive medium, and when the membrane forms as a product of the phase transfer reaction between the first and second reactants, the pressure-sensitive medium has different concentrations of the first or second reactant dissolved in it before and after membrane formation. The concentration difference of the reactant dissolved in the pressure-sensitive medium can affect its properties, thereby interfering with the measurement behavior of the pressure sensor. Here, the catalyst can be configured such that it only triggers the reaction between the first and second reactants, while remaining unconsumed by the reaction itself. Therefore, the concentration of the catalyst remains constant in the pressure-sensitive medium, and thus, the properties of the pressure-sensitive medium remain unchanged before and after membrane formation.

[0018] In this configuration, the first reactant and the second reactant are formed such that the chemical reaction between the two reactants is triggered only by the presence of a reaction catalyst, thus preventing the reaction between the first reactant and the second reactant in the second medium.

[0019] According to one embodiment, a first reactant and a second reactant are dissolved in a pressure-sensitive medium, wherein a reaction catalyst is dissolved in the second medium, and wherein phase transfer catalysis includes the diffusion of molecules of the first and second reactants into the second medium and / or the diffusion of molecules of the reaction catalyst into the pressure-sensitive medium.

[0020] This enables the following technical advantages: providing a reaction catalyst in a solution in a second medium as simply as possible.

[0021] According to one embodiment, the reaction catalyst is suitable for reducing the reaction energy of a chemical reaction between the first and second reactants, and / or, the reaction catalyst is suitable for causing the reactants to diffuse from one medium to a corresponding other medium.

[0022] This enables the following technical advantages: in the presence of a reaction catalyst of a corresponding configuration, a phase transfer reaction can be provided that is as efficient as possible between the first and second reactants. Different phase transfer reactions of different reactants can be triggered by different properties of the reaction catalyst, thereby enabling the coverage of a wide range of possible films.

[0023] According to one embodiment, the membrane is a polymer membrane.

[0024] This enables the production of durable and lightweight membranes that provide favorable mechanical properties for covering and protecting pressure-sensitive media from external influences without damaging the sensitivity of the pressure sensor.

[0025] According to one embodiment, the pressure-sensitive medium includes a liquid organic medium, particularly an oil-containing medium, wherein the second medium includes an aqueous medium having at least one liquid, gaseous, or aerosol-containing phase.

[0026] This enables the following technical advantages: Since the pressure-sensitive medium is formed as a liquid organic medium, such as an oil-containing medium, a pressure-sensitive medium with high pressure sensitivity can be provided, which has improved response behavior and, consequently, improved transfer of pressure acting on the surface of the pressure-sensitive medium to the pressure sensor element surrounded by the pressure-sensitive medium. This provides a pressure sensor with improved measurement accuracy and improved measurement sensitivity. Forming the second medium as an aqueous medium prevents mixing of the two media. Furthermore, a medium that is as inexpensive as possible is provided, which, in the sense of the invention, is used only as a transport medium for the corresponding reactants or reaction catalysts. Forming an aqueous medium in a liquid phase allows for the simplest possible application of the second medium in the form of a water film or droplets covering the surface of the pressure-sensitive medium. This enables a film formation process that is as constant as possible. Furthermore, a large amount of the first or second reactant can be dissolved in the liquid phase. Forming a gaseous or aerosol-containing phase of the second medium allows for a as uniform formation process as possible by spraying the surface with the corresponding gaseous or aerosol-containing phase of the second medium. This allows for the formation of membranes that are as uniform as possible or for the thinnest possible membranes.

[0027] According to one embodiment, the membrane has a connection with the housing and seals the receiving space.

[0028] This achieves the following technical advantages: the membrane connected to the housing prevents the pressure-sensitive medium from leaking out of the receiving space of the pressure sensor housing. Furthermore, it prevents contaminants from entering the receiving space.

[0029] According to one embodiment, the phase transfer reaction between the first and second reactants can be terminated after a predetermined reaction period, when the mechanical properties of the membrane are reached, or after the first and / or second reactants are consumed.

[0030] This enables precise control over the phase transfer reaction between the first and second reactants, and consequently, precise control over the formation of the membrane and its associated properties. Here, the membrane formation process can be regulated by controlling the reaction time period, in which the phase transfer reaction can be terminated by removing the second medium after a predetermined time period has elapsed. Alternatively, the phase transfer reaction may terminate due to the depletion of one of the two reactants. Thus, precise control over the phase transfer reaction and (correspondingly) the properties of the formed membrane can be achieved by appropriately selecting the amount of dissolved reactants.

[0031] According to one embodiment, the formation of the membrane further includes introducing external excitation energy into the boundary region between the pressure-sensitive medium and the second medium, wherein the excitation energy is configured to promote a phase transfer reaction, and wherein the excitation energy includes thermal energy and / or electromagnetic radiation energy.

[0032] This enables the following technical advantages: precise control of the phase transfer reaction can be achieved through the application of additional excitation energy. By introducing thermal or electromagnetic radiation energy into the boundary region between the two media, the reaction energy of the phase transfer reaction and, consequently, the process of the phase transfer reaction can be precisely controlled. This allows for the independent regulation of film formation.

[0033] According to a second aspect, a pressure sensor manufactured according to the method of the present invention is provided. Attached Figure Description

[0034] Embodiments of the present invention are explained with reference to the following accompanying drawings. In the schematic drawings: Figure 1 A flowchart of a method for producing a pressure sensor having a pressure-sensitive medium, according to one embodiment; and Figure 2 is a schematic diagram of a method for producing a pressure sensor having a pressure-sensitive medium according to one embodiment. Detailed Implementation

[0035] Figure 1 A flowchart is shown of a method 100 for producing a pressure sensor 200 having a pressure-sensitive medium 207 according to one embodiment.

[0036] exist Figure 1 The method described herein is illustrated in Figure 2.

[0037] In order to produce a pressure sensor 200 having a pressure-sensitive medium 207, in the first method step 101, a pressure sensor 200 having a pressure sensor element 201 is provided, the pressure sensor element being arranged in the receiving space 205 of the housing 203 of the pressure sensor 200.

[0038] The pressure sensor element 201 can be, for example, a microelectromechanical system (MEMS).

[0039] The pressure sensor 200 can be, for example, an atmospheric pressure sensor.

[0040] Subsequently, in method step 103, the receiving space 205 is filled with pressure-sensitive medium 200.

[0041] Subsequently, in method step 105, the second medium 209 is applied to the surface 211 of the pressure-sensitive medium 207.

[0042] Subsequently, in method step 105, a membrane 213 is formed in the boundary region 215 between the pressure-sensitive medium 207 and the second medium 209 via a phase transfer reaction between the first reactant 217 and the second reactant 219. Here, at least the first reactant 217 or the second reactant 219 is dissolved in the pressure-sensitive medium 207 or the second medium 209.

[0043] Furthermore, the formation of the membrane in method step 107 can include introducing external excitation energy 223 in method step 109 into the boundary region 217 between the pressure-sensitive medium 207 and the second medium 209. Here, the excitation energy 223 is configured to promote a phase transfer reaction between the first and second reactants 217, 219, and can include energy such as thermal energy or electromagnetic radiation.

[0044] Figure 2 shows a schematic diagram of a method 100 for producing a pressure sensor 200 having a pressure-sensitive medium 207 according to one embodiment.

[0045] Figure 2 graphically illustrates a single step of a method 100 for producing a pressure sensor 200 having a pressure-sensitive medium 207. Figure 2a The diagram shows a pressure sensor 200 with a pressure sensor element 201, wherein the pressure sensor element 201 is arranged in a receiving space 205 of the housing 203 of the pressure sensor 200. Furthermore, in Figure 2a In the embodiment shown, a pressure-sensitive medium 207 is arranged in a receiving space 205, which is filled into the receiving space 205 according to method step 103. In the illustrated embodiment, the first reactant 217 and the reaction catalyst 221 are dissolved in the pressure-sensitive medium 207. Furthermore, the pressure-sensitive medium has a surface 211.

[0046] The pressure-sensitive medium can be, for example, a liquid medium, particularly a liquid organic medium, such as an oil medium. The first reactant 217 can be an organic chemical compound suitable for the phase transfer reaction in the sense of this invention. Furthermore, the first reactant 217 can be dissolved in the organic liquid or oil-containing medium of the pressure-sensitive medium 207. The reaction catalyst 221 can be a suitable reaction catalyst for the phase transfer reaction in the sense of this invention. Here, the phase transfer catalyst 221 is configured to trigger a corresponding phase transfer reaction between the first reactant 217 and the second reactant 219. Here, the reaction catalyst 221 can be configured to reduce the reaction energy required to perform the phase transfer reaction. Alternatively, the reaction catalyst 221 can be configured to promote the diffusion of the first and second reactants 217, 219 between the pressure-sensitive medium 207 and the second medium 209.

[0047] exist Figure 2b In step 105, a second medium 209 is applied to the surface 211 of the pressure-sensitive medium 207. A second reactant 219 is dissolved in the second medium 209. Figure 2b In the diagram, upward-pointing arrows indicate the diffusion of the first reactant 217 from the pressure-sensitive medium 207 to the boundary region 215 between the pressure-sensitive medium 207 and the second medium 209. Similarly, downward-pointing arrows indicate the diffusion of the second reactant 209 from the second medium 209 to the boundary region 215. Furthermore, the diffusion of the first reactant 217 can include diffusion from the pressure-sensitive medium 207 to the second medium 209. Likewise, diffusion can include the diffusion of the second reactant 219 from the second medium 209 to the pressure-sensitive medium 207.

[0048] Due to the diffusion of the first and second reactants 217, 219, a phase transfer reaction occurs between the first and second reactants 217, 219 in the boundary region 215. Here, the reaction catalyst 221 dissolved in the pressure-sensitive medium 207 can promote the reaction between the first and second reactants 217, 219. Thus, the reaction catalyst 221 can reduce the reaction energy required for the chemical reaction process between the first and second reactants 217, 219. Alternatively, the reaction catalyst 221 can promote the diffusion of reactants 217, 219 into the boundary region 215 or into separate media 207, 209. Due to the phase transfer reaction of the first and second reactants 217, 219 in the boundary region 215, a corresponding film 209 is formed as a product of the phase transfer reaction. By forming the film 209, the concentration of the first reactant 217 in the pressure-sensitive medium 207 or the corresponding concentration of the second reactant 219 in the second medium 209 is reduced. This creates a depletion zone, which is mainly disposed in the boundary region 215. The decrease in the concentrations of the first and second reactants 217 and 219 in the boundary region 215 results in further diffusion of the first and second reactants 217 and 219 toward the boundary region 215. This sustains the phase transfer reaction. Alternatively, the diffusion of the first and second reactants 217 and 219 toward the boundary region 215 can be generated by the mutual electrostatic attraction between the first and second reactants 217 and 219. The concentrations of the first and second reactants 217 and 219, or the reaction catalyst 221, in... Figure 2a )to Figure 2d The molecules shown can be complex molecules of the corresponding chemical compounds. Alternatively, the molecules of the first and second reactants 217, 219 or the reaction catalyst 221 can be single ions of the corresponding chemical compounds.

[0049] In addition, Figure 2bThe diagram shows an excitation energy 223, which is introduced into the boundary region 215 between the pressure-sensitive medium 207 and the second medium 209 according to method step 109. In the illustrated embodiment, the excitation energy 223 is formed as electromagnetic radiation, such as UV radiation or infrared radiation, which is incident on the boundary region 215 by means of a corresponding radiation source. Alternatively or additionally, the excitation energy 223 can also be formed as thermal energy, which is introduced into the boundary region 215, for example, through a corresponding heater. The excitation energy 223 promotes the phase transfer reaction and enables control of the phase transfer reaction process.

[0050] exist Figure 2c The diagram shows the complete formation of membrane 213 as a product of the phase transfer reaction between the first and second reactants 217. Here, membrane 213 extends over the entire surface of the pressure-sensitive medium 207 and has a connection to the housing 203 of the pressure sensor 200. This achieves a sealed closure of the receiving space 205 of the housing 203, thereby preventing the pressure-sensitive medium 207 from escaping from the receiving space 205 or impurities from entering the receiving space 205.

[0051] The membrane 213 shown can be, for example, a polymer membrane. The housing 203 of the pressure sensor 200 can be made of, for example, plastic, thereby achieving a connection between the polymer membrane and the plastic housing. Alternatively, the housing 203 can be treated in method step 107 prior to membrane formation, which facilitates the connection between the membrane 213 to be formed and the housing 203. The connection between the membrane 213 and the housing 203 can be achieved, for example, by adhesive bonding.

[0052] In addition to adhesive bonding, the connection between the shell and the formed membrane can be a chemical bond, in which the shell and the formed membrane react directly and a mechanical fixation is achieved based on the adhesive interaction between the membrane and the shell. Alternatively, the connection between the formed membrane 213 and the shell 203 can be achieved by introducing excitation energy 223.

[0053] In the illustrated implementation, Figure 2c In the pressure-sensitive medium 207, the first reactant 217 is completely depleted due to the phase transfer reaction and the corresponding formation of the film 213. In the illustrated embodiment, the second reactant 219 is similarly reduced from the volume content; however, individual molecules continue to exist in the second medium 209.

[0054] As the first reactant 219 is completely depleted, the phase transfer reaction between the two reactants 217 and 219 ends, thereby ending the formation of film 213.

[0055] Alternatively, in the illustrated embodiment, during the phase transfer reaction and the formation of membrane 213, the second reactant 219 of the second medium 209 can be completely depleted, while the first reactant 217 remains in the remaining volume of the pressure-sensitive medium 207. Alternatively, during the phase transfer reaction, both reactants 217 and 219 can be completely depleted.

[0056] In the illustrated embodiment, the reaction catalyst 221 remains present at a constant volume content after the phase transfer reaction is complete. Alternatively, a reaction catalyst that is at least partially consumed during the phase transfer reaction can be used.

[0057] Alternatively, the phase transfer reaction and (in connection with) the formation of film 213 can be terminated upon the expiration of a predetermined reaction period. Alternatively, the phase transfer reaction can be terminated when film 213 with predetermined characteristics (e.g., predetermined thickness or predetermined mechanical rigidity) is formed.

[0058] The thickness of membrane 213 and (in connection with it) the mechanical properties of the membrane can be controlled by the amounts of the first and second reactants 217, 219 in the pressure-sensitive medium 207 or in the second medium 209. Simultaneously, the thickness of the membrane to be formed can be controlled by the duration of the phase transfer reaction between reactants 217, 219.

[0059] The phase transfer reaction can be controlled by the excitation energy 223, thereby achieving a membrane with the desired properties.

[0060] In addition to the complete consumption of one of reactants 217 and 219, or after the expiration of a predetermined duration, or after the achievement of predetermined properties of membrane 213, the phase transfer reaction can also be terminated by adding additional reactants to the second medium 209, wherein the additional reactants are configured to interfere with the phase transfer reaction. Alternatively, the phase transfer reaction between reactants 217 and 219 can be terminated by the diffusion of the first reactant 217 dissolved in the pressure-sensitive medium 207 via membrane 213 or the diffusion of the second reactant 219 dissolved in the second medium 209 via membrane 213 being prevented due to the properties of membrane 213.

[0061] Alternatively, reactants 217 and 219 can be configured such that diffusion of reactants 217 and 219 via membrane 213 is interrupted when the desired properties of membrane 213 are achieved. Alternatively, diffusion can be achieved for the entire phase transfer reaction process.

[0062] According to one embodiment, the advantageous polymer film can have a thickness, for example, between 1 μm and 100 μm. The typical reaction time for the illustrated phase transfer reaction can range from microseconds to several hours.

[0063] exist Figure 2d The diagram shows the completed phase transfer reaction and the fully formed membrane 213. The second medium 209 is removed from the membrane 213. This second medium can be actively removed or automatically evaporated, for example, by an evaporation process. In the illustrated embodiment, the unconsumed reaction catalyst 221 remains dissolved in the pressure-sensitive medium 207. The method according to the invention for producing a pressure sensor 200 having the pressure-sensitive medium 207 ends upon the complete formation of the membrane 213 with the desired properties.

[0064] Alternatively, in the embodiment shown in Figure 2, during the phase transfer reaction, only the reaction catalyst 221 is soluble in the pressure-sensitive medium 207, while the first and second reactants 217, 219 are soluble in the second medium 209. When the second medium 209 is applied, the reaction catalyst 221 facilitates the diffusion of reactants 217, 219 from the second medium 207 to the boundary region 215 and the diffusion of reaction catalyst 221 from the pressure-sensitive medium 207 to the boundary region 215, thereby achieving phase transfer catalysis between the first and second reactants 217, 219 and the corresponding formation of the film 213.

[0065] Alternatively, the first and second reactants 217, 219 can be dissolved in pressure-sensitive medium 207, while the reaction catalyst 221 is dissolved in second medium 209. The diffusion and phase transfer reactions of the individual components can be carried out in a manner similar to that described above.

[0066] In the case where the first and second reactants 217 and 219 are either dissolved in the pressure-sensitive medium 207 or dissolved in the second medium 209, the first and second reactants 217 and 219 are selected such that no corresponding chemical reaction occurs between the first and second reactants 217 and 219 in the absence of the corresponding reaction catalyst 221.

[0067] Alternatively, in the illustrated embodiment, only the first reactant 217 can dissolve in the pressure-sensitive medium 207, while only the second reactant 219 dissolves in the second medium 209. Here, the phase transfer reaction between the first and second reactants 217 and 219 can be achieved simply by applying the second medium 209 to the surface 211 of the pressure-sensitive medium 207, without requiring an additional reaction catalyst 221. The phase transfer reaction process can also be carried out in a manner similar to that described above.

[0068] Alternatively, in the illustrated embodiment, multiple different reactants can be dissolved not only in the pressure-sensitive medium 207 but also in the second medium 209, and phase transfer reactions can occur between the multiple different reactants. Alternatively, a single reaction catalyst or multiple different reaction catalysts can be dissolved in the pressure-sensitive medium 207 and / or the second medium 209. Alternatively, the phase transfer reaction can include multiple different sub-reactions in which different reactants react with each other, thereby forming a film based on multiple sequential or parallel phase transfer sub-reactions, each of which combines into a complete phase transfer reaction.

[0069] Alternatively, in the illustrated embodiment, the second medium 209 can be applied to the surface 211 of the pressure-sensitive medium 207 in a gaseous phase. Here, reactants 217, 219 or catalyst 221 can dissolve in the gaseous second medium 209. Alternatively, the second medium 209 can be applied to the surface 211 of the pressure-sensitive medium 207 in an aerosol-containing phase. Here, reactants 217, 219 or catalyst 221 can dissolve in aerosol droplets. Alternatively, reactants 217, 219 or catalyst 221 can be contained as suspended particles in the aerosol-containing phase of the second medium 209 in a solid phase. In order to perform the phase transfer reaction, the gaseous or aerosol-containing second medium 209, together with the dissolved or suspended molecules of the first and / or second reactants 217, 219 or reaction catalyst 221, can be applied to the surface 211 of the pressure-sensitive medium 207 at a corresponding concentration of the first and / or second reactants 217, 219 or reaction catalyst 221, for example by aeration with a corresponding airflow or by forming a corresponding atmosphere containing the second medium and surrounding the pressure sensor 200.

[0070] Alternatively, in the embodiment shown, a phase transfer reaction can be performed without introducing excitation energy 223.

[0071] The dimensional proportions shown in Figure 2 are merely exemplary and do not correspond to the actual dimensions of the pressure sensor 200 with the components shown.

Claims

1. A method (100) for producing a pressure sensor (200) having a pressure-sensitive medium (207), comprising: A pressure sensor (200) with a pressure sensor element (201) is provided (101), the pressure sensor element being arranged in a receiving space (205) of a housing (203) of the pressure sensor (200); The receiving space (205) of (103) is filled with a pressure-sensitive medium (207); A second medium (209) that cannot be mixed with the pressure-sensitive medium (207) is applied (105) to the surface (211) of the pressure-sensitive medium (207); A film (213) is formed (107) in the boundary region (215) between the pressure-sensitive medium (207) and the second medium (209) by a phase transfer reaction between the first reactant (217) and the second reactant (219), wherein at least the first reactant (217) or the second reactant (219) is dissolved in the pressure-sensitive medium (207) or the second medium (209), wherein the first reactant (217) is dissolved in the pressure-sensitive medium (207) and the second reactant (219) is dissolved in the second medium (209), wherein the formation (107) of the film (213) includes the diffusion of molecules of the first reactant (217) into the second medium (209) and / or the diffusion of molecules of the second reactant (219) into the pressure-sensitive medium (207).

2. The method (100) according to claim 1, wherein, The pressure-sensitive medium (207) and / or the second medium (209) include a reaction catalyst (221), wherein the phase transfer reaction is formed as a phase transfer catalysis, wherein the reaction catalyst (221) is configured to initiate a chemical reaction between the first reactant and the second reactant (217, 219).

3. The method (100) according to claim 2, wherein, The first reactant (217) and the second reactant (219) are dissolved in the second medium (209), wherein the reaction catalyst (221) is dissolved in the pressure-sensitive medium (207), wherein the phase transfer catalysis includes the diffusion of molecules of the first reactant and the second reactant (217, 219) into the pressure-sensitive medium (207) and / or the diffusion of molecules of the reaction catalyst (221) into the second medium (209).

4. The method (100) according to claim 2, wherein, The first reactant (217) and the second reactant (219) are dissolved in the pressure-sensitive medium (207), wherein the reaction catalyst (221) is dissolved in the second medium, wherein the phase transfer catalysis includes the diffusion of molecules of the first reactant and the second reactant (217, 219) into the second medium (209) and / or the diffusion of molecules of the reaction catalyst (221) into the pressure-sensitive medium (207).

5. The method (100) according to any one of claims 2 to 4, wherein, The reaction catalyst (221) is adapted to reduce the reaction energy of the chemical reaction between the first reactant and the second reactant (217, 219), and / or, wherein the reaction catalyst (221) is adapted to enable the reactant (217, 219) to diffuse from one medium (207, 209) to the corresponding other medium (207, 209).

6. The method (100) according to any one of claims 1 to 4, wherein, The membrane (213) is a polymer membrane.

7. The method (100) according to any one of claims 1 to 4, wherein, The pressure-sensitive medium (207) includes a liquid organic medium, wherein the second medium (209) includes an aqueous medium having at least one liquid, gaseous, or aerosol-containing phase.

8. The method (100) according to any one of claims 1 to 4, wherein, The membrane (213) has a connection with the housing (203) and seals the receiving space (205).

9. The method (100) according to claim 8, wherein, The phase transfer reaction between the first reactant and the second reactant (217, 219) can end after a predetermined reaction period expires, when the mechanical properties of the membrane (213) are reached, or after the first reactant and / or the second reactant are consumed.

10. The method (100) according to any one of claims 1 to 4, wherein, The formation of the membrane (107) further includes introducing (109) external excitation energy (223) into the boundary region (215) between the pressure-sensitive medium (207) and the second medium (209), wherein the excitation energy (223) is configured to promote the phase transfer reaction, wherein the excitation energy (223) includes thermal energy and / or electromagnetic radiation energy.

11. The method (100) according to claim 7, wherein, The liquid organic medium is an oil-containing medium.

12. A pressure sensor (200), wherein, The pressure sensor (200) is manufactured by the method (100) according to any one of claims 1 to 11.

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