Support device and storage device

Abstract

The application provides a supporting device and a storage device, and relates to the technical field of semiconductor transportation packaging, which comprises a first supporting part, a first fixing mechanism and a second fixing mechanism, the first supporting part is used for supporting a wafer, the first fixing mechanism and the second fixing mechanism are connected to the two opposite sides of the first supporting part, and the connection position of the first fixing mechanism with the first supporting part is different from the connection position of the second fixing mechanism with the first supporting part. According to the supporting device provided by the application, when the first supporting part supports the wafer, the first fixing mechanism can disperse the force transmitted by the first supporting part in a different way from the second fixing mechanism. The asymmetric arrangement of the supporting device makes the stress on the first supporting part more dispersed, which further reduces the deformation amount of the first supporting part. According to the supporting device provided by the application, the wafer can be stably supported, and the wafer can be prevented from being damaged due to shaking.

Description

Technical Field

[0001] This application relates to the field of semiconductor transport packaging technology, and in particular to a support device and a storage device. Background Technology

[0002] A silicon wafer is a wafer used to manufacture silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, then slowly pulled out to form a cylindrical single-crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod is formed into a silicon wafer, or wafer.

[0003] Domestic wafer production lines primarily focus on 8-inch and 12-inch wafers. The main wafer processing methods are wafer fabrication and batch processing, which involve processing one wafer or multiple wafers simultaneously. As semiconductor feature sizes shrink and processing and measurement equipment becomes more advanced, new data characteristics have emerged in wafer processing. Simultaneously, the reduction in feature size increases the impact of airborne particles on the quality and reliability of the processed wafers, and with improved cleanliness, the particle count has also exhibited new data characteristics.

[0004] During the processing of large-size wafers, the requirements for surface cleanliness increase with the finer processing of the wafer surface. For large-size wafers using FOSB for off-site handling, it is necessary to ensure the safety of the wafers inside the container during transportation to prevent damage during transport, and to prevent internal rotational wear that could lead to particle contamination.

[0005] In existing technologies, the support components used in wafer containers are designed to support all wafers when the cover is attached to the main body. The support components have a generally symmetrical structure. When installed on the cover, the mounting structure on the cover compresses the middle portion of the support component, causing severe deformation. This makes it difficult to support and cushion all the wafers inside the container, potentially leading to some wafers experiencing significant movement and damage during transportation. Summary of the Invention

[0006] In view of this, this application provides a support device and a storage device, with the aim of solving the above-mentioned technical problems.

[0007] In a first aspect, this application provides a support device, the support device comprising:

[0008] A first support portion, which is used to provide support for the sheet body;

[0009] A first fixing mechanism and a second fixing mechanism are connected to opposite sides of the first support portion;

[0010] The connection position between the first fixing mechanism and the first support includes positions that are different from the connection position between the second fixing mechanism and the first support.

[0011] Preferably, there are multiple connection points between the first fixing mechanism and the first support portion, the first support portion has an extending direction, and the connection points between the first fixing mechanism and the first support portion and the connection points between the second fixing mechanism and the first support portion are staggered along the extending direction.

[0012] Preferably, the number of connection points between the second fixing mechanism and the first support portion is multiple.

[0013] Preferably, both the first fixing mechanism and the second fixing mechanism include a fixing member, which is used to connect with the first support portion;

[0014] The support device further includes a second support and a third support, which are spaced apart from the first support. The second support is connected to the fixing component of the first fixing mechanism, and the third support is connected to the fixing component of the second fixing mechanism.

[0015] Preferably, the fixing components of the first fixing mechanism and the connection positions of the first fixing mechanism with the first support part correspond one-to-one, and the fixing components of the second fixing mechanism and the connection positions of the second fixing mechanism with the second support part correspond one-to-one.

[0016] Preferably, the first support portion, the second support portion, and the third support portion all have an extending direction, with the two ends of the second support portion in the extending direction respectively connected to the two ends of the first support portion in the extending direction, and the two ends of the third support portion in the extending direction respectively connected to the two ends of the first support portion in the extending direction.

[0017] Preferably, the support device further includes a first limiting member and a second limiting member, the first limiting member and the second limiting member being located on opposite sides of the first support portion;

[0018] The first limiting member and the second limiting member are configured to support the sheet together with the first support portion, and the first limiting member and the second limiting member are also configured to prevent the sheet from flipping;

[0019] The first limiting member is connected to the fixing member of the first fixing mechanism in a one-to-one correspondence, and the second limiting member is connected to the fixing member of the second fixing mechanism in a one-to-one correspondence.

[0020] Preferably, the support device further includes a first limiting member and a second limiting member, the first limiting member and the second limiting member being located on opposite sides of the first support portion;

[0021] The first limiting member and the second limiting member are configured to support the sheet together with the first support portion, and the first limiting member and the second limiting member are also configured to prevent the sheet from flipping.

[0022] Preferably, the first support portion has an extending direction, and a plurality of first limiting members and a plurality of second limiting members are staggered along the extending direction.

[0023] Preferably, each of the first limiting members and each of the second limiting members includes a limiting body, a guide portion and a recessed portion disposed in the limiting body;

[0024] The recess is used to accommodate the edge of the sheet, and the guide is provided at the opening of the recess to guide the sheet into the recess.

[0025] Preferably, each of the first limiting member and each of the second limiting members includes a flexible member disposed within the recess, the flexible member serving to support the sheet body.

[0026] Preferably, the guide portion includes a guide surface disposed at the opening of the recess, the first support portion has an extending direction, and when the first support portion is arranged horizontally, the angle between the guide surface and the horizontal plane ranges from 10° to 30°.

[0027] Preferably, the support device includes a plurality of support components disposed on the first support portion, the plurality of support components being used to support the sheet body.

[0028] The first support portion has an extending direction, in which the plurality of support components alternately correspond to the first limiting member and the second limiting member.

[0029] Preferably, the support device includes a plurality of support components disposed on the first support portion, the plurality of support components being detachably disposed on the first support portion, and the support components being used to support the sheet body.

[0030] Preferably, the support device further includes a structural component, which is connected to the plurality of support components;

[0031] The structural component includes a first mating part for connecting with the first support portion, and the first support portion includes a second mating part for connecting with the first mating part. The first mating part and the second mating part are configured to connect with each other so that the structural component and the first support portion are detachably connected.

[0032] Secondly, this application provides a storage device, which includes the support device described above.

[0033] According to the support device provided in this application, when the first support portion supports a wafer, such as a chip, because the connection position between the first fixing mechanism and the first support portion includes a position different from the connection position between the second fixing mechanism and the first support portion, the first fixing mechanism can distribute the force transmitted from the first support portion in a manner different from that of the second fixing mechanism. Therefore, compared to the symmetrically arranged support members in the prior art, the support device provided in this application does not result in a significant weak point in the first support portion due to its symmetrical structure. On the contrary, the asymmetrical arrangement makes the force on the first support portion more dispersed, which in turn reduces the deformation of the first support portion. Thus, the support device provided in this application can ensure stable support of the entire wafer, preventing wafer wobbling and damage.

[0034] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0035] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 A schematic top view of the support device provided according to the first aspect of this application is shown;

[0037] Figure 2 A schematic diagram of an isometric view of the support device provided according to the first aspect of this application is shown;

[0038] Figure 3 A schematic diagram showing a partial enlarged view of the support device provided according to the first aspect of this application is shown;

[0039] Figure 4 A schematic diagram of a side view of the support device provided according to the first aspect of this application is shown;

[0040] Figure 5 A schematic diagram of the front view of the support device provided according to the first aspect of this application is shown;

[0041] Figure 6 A schematic diagram of the structure of the main body of the storage device provided according to the second aspect of this application is shown;

[0042] Figure 7 A schematic diagram showing a front view of the main body of the storage device provided according to the second aspect of this application;

[0043] Figure 8 A schematic bottom view of the cover of the storage device provided according to the second aspect of this application is shown.

[0044] Figure label:

[0045] 1-Container body; 11-Opening edge; 111-Stepped edge; 112-Edge groove; 113-Positioning element; 12-Bend; 13-Side support; 14-Gripping part; 141-Gripper; 142-Fixer; 143-Limiting protrusion; 15-Positioning body; 16-Handle; 161-Handle fixing element; 17-Bottom support; 2-Lid; 21-Latch; 22-Lid main plate; 221-Support device fixing element; 222-Support device positioning element; 223-Recessed support;

[0046] 3-Support device; 31-Frame; 311-Limiting component; 3111-Guide surface; 3112-Recessed part; 3113-Gasket; 312-First support part; 313-Fixing component; 32-Structural component; 321-First mating part; 322-Retaining component; 331-Second support part; 332-Third support part. Detailed Implementation

[0047] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0048] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0049] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0050] Furthermore, the technical solutions of the various embodiments can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0051] According to the first aspect of this application, a support device 3 is provided, which will be described below in conjunction with... Figures 1 to 5 The structure and working principle of the support device 3 are described in detail.

[0052] In this embodiment, the support device 3 includes a first support portion 312, a first fixing mechanism, and a second fixing mechanism. The first support portion 312 provides support for the sheet body. The first fixing mechanism and the second fixing mechanism are respectively connected to opposite sides of the first support portion 312. The connection positions of the first fixing mechanism with the first support portion 312 include positions different from the connection positions of the second fixing mechanism with the first support portion 312.

[0053] Thus, when the first support portion 312 supports the wafer, such as a chip, since the connection position between the first fixing mechanism and the first support portion 312 includes a position different from the connection position between the second fixing mechanism and the first support portion 312, the first fixing mechanism can distribute the force transmitted from the first support portion 312 in a manner different from that of the second fixing mechanism. Therefore, compared to the symmetrically arranged support members in the prior art, the support device 3 provided according to the embodiments of this application does not have a significant weak point in the first support portion 312 due to its symmetrical structure. On the contrary, the asymmetrical arrangement makes the force on the first support portion 312 more dispersed, which in turn reduces the deformation of the first support portion 312. Therefore, the support device 3 provided according to the embodiments of this application can ensure stable support of the entire wafer, preventing wafer wobbling and damage.

[0054] In an embodiment, the first support portion 312 may include a strip-shaped structure having an extending direction. If the support member is arranged as in the prior art, the fixing members symmetrically connected to both sides of the strip-shaped structure need to be arranged along the extending direction of the strip-shaped structure. This may cause the support member to have a "fishbone" shape, thereby creating the aforementioned weak position between two adjacent sets of fixing members in the extending direction of the first support portion 312. Such a weak position may cause the first support portion 312 to bend significantly at the weak position when subjected to force.

[0055] In this embodiment, there may be multiple connection points between the first fixing mechanism and the first support portion 312, and the connection points between the first fixing mechanism and the first support portion 312 and the second fixing mechanism and the first support portion 312 may be staggered along the extension direction.

[0056] That is, along the extending direction of the first support portion 312 (see reference here) Figure 1 In the vertical direction, the connection position of the first fixing mechanism to the first support 312 is provided on the opposite side of the gap between every two adjacent positions of the connection position of the first fixing mechanism and the first support 312. Because of this staggered arrangement, the force applied to the first support 312 by the wafer is more effectively distributed to the first fixing mechanism and the second fixing mechanism, thereby more effectively reducing the deformation of the first support 312.

[0057] As an example, the first fixing mechanism can be connected to the first support 312 at two locations, and correspondingly, the second fixing mechanism can be connected to the first support 312 at one location. These connection locations can be staggered according to the arrangement described above. In this example, the first fixing mechanism and the second fixing mechanism can have relatively larger dimensions, which helps to reduce the processing difficulty of the support device 3.

[0058] As another example, the number of connection points between the second fixing mechanism and the first support 312 can be multiple, meaning that the first fixing mechanism can have more than two connection points with the first support 312. Figure 1 As shown, in this example, the number of connection points between the first fixing mechanism and the first support 312 can be, for example, 13, and the number of connection points between the second fixing mechanism and the first support 312 can be, for example, 12. However, this is not a limitation; the number of connection points between the first fixing mechanism and the first support 312 can also be 3, 4, 5, ..., 12, or even 14, 15, or more. In this example, because the number of connection points is greater, the deformation of the first support 312 can be reduced particularly effectively.

[0059] In this embodiment, both the first fixing mechanism and the second fixing mechanism may include fixing members 313, which are used to connect with the first support portion 312. In this embodiment, the number of fixing members 313 may correspond to the number of connection positions as described above; that is, the number of connection positions between the first fixing mechanism and the first support portion 312 may be the number of fixing members 313 of the first fixing mechanism, and the number of connection positions between the second fixing mechanism and the first support portion 312 may be the number of fixing members 313 of the second fixing mechanism.

[0060] In other words, in the embodiments, as an example, the fixing member 313 of the first fixing mechanism can correspond one-to-one with the connection position of the first fixing mechanism with the first support 312, and the fixing member 313 of the second fixing mechanism can correspond one-to-one with the connection position of the second fixing mechanism with the second support 331. In this example, the fixing member 313 can be a horizontally arranged strip structure, preferably, the fixing member 313 extends along a direction perpendicular to the extension direction (i.e., Figure 1 (in the horizontal direction). In other examples, the fixing member 313 can be along the horizontal direction. Figure 1 It extends in a direction that is inclined towards the horizontal direction.

[0061] Furthermore, in an embodiment, the support device 3 may further include a second support portion 331 and a third support portion 332 spaced apart from the first support portion 312. The second support portion 331 is connected to the fixing member 313 of the first fixing mechanism, and the third support portion 332 is connected to the fixing member 313 of the second fixing mechanism. Thus, through the connection of the first and second fixing mechanisms, the second support portion 331 and the third support portion 332 can share the force exerted by the wafer on the first support portion 312, thereby enabling the support device 3 to provide more stable support to the wafer.

[0062] In this embodiment, both the second support portion 331 and the third support portion 332 may include strip-shaped structures. The strip-shaped structure of the second support portion 331 may be disposed on the side where the first fixing mechanism of the first support portion 312 is located, and the strip-shaped structure of the third support portion 332 may be disposed on the side where the second fixing mechanism of the first support portion 312 is located. In other words, the second support portion 331, the first support portion 312, and the third support portion 332 are arranged sequentially at intervals along a direction perpendicular to the extension direction.

[0063] As an example, the strip structures included in the second support portion 331, the first support portion 312, and the third support portion 332 each have the same length. See also Figure 1 Furthermore, the two ends of the second support portion 331 in the extending direction can be connected to the two ends of the first support portion 312 in the extending direction respectively (e.g., connected through a strip-shaped connecting portion), and the two ends of the third support portion 332 in the extending direction can be connected to the two ends of the first support portion 312 in the extending direction respectively (e.g., connected through a strip-shaped connecting portion).

[0064] Therefore, the second support portion 331, the first support portion 312, and the third support portion 332, together with the aforementioned strip-shaped connecting portion, can form a rectangular frame, which can be defined as the frame 31. Thus, the second support portion 331, the first support portion 312, and the third support portion 332 connected to form the frame 31 can provide more stable support for the wafer. More preferably, the frame 31 can be an integrally formed structure, and each fixing component 313 can also be integrally formed with the frame 31. This improves the overall integrity of the support device 3, thereby enhancing the stability of the wafer support.

[0065] To make the description clearer, it should also be noted that the extension direction of the first support part 312, the second support part 331 and the third support part 332 is the extension direction of the long side of the frame 31, and the arrangement direction of the first support part 312, the second support part 331 and the third support part 332 is the extension direction of the wide side of the frame 31, that is, the extension direction of the strip-shaped connecting part.

[0066] In an example not shown in the figure, the fixing members 313 can have other forms. For example, the number of first fixing members 313 may not correspond one-to-one with the connection positions of the first fixing mechanism and the first support 312. In this example, each fixing member 313 may have multiple protrusions, and all the protrusions included in all fixing members 313 may correspond one-to-one with the connection positions of the first fixing mechanism and the first support 312. Therefore, in this example, it is permissible to provide fixing members 313 with a larger footprint, which is beneficial for improving the rigidity of the support device 3.

[0067] Furthermore, in an embodiment, the support device 3 may further include a first limiting member and a limiting member (hereinafter referred to collectively as limiting member 311), the first limiting member and the limiting member being located on opposite sides of the first support portion 312, respectively. Figure 1 Specifically, the first limiting member and the first fixing mechanism are both located on the left side of the first support portion 312, and the limiting member and the second fixing mechanism are both located on the right side of the first support portion 312. In this embodiment, the first limiting member and the limiting member can be configured to support the wafer together with the first support portion 312. The first limiting member and the limiting member can also be configured to prevent the wafer from flipping, thereby avoiding the wafer from shaking and rubbing due to flipping, and improving the stability of the wafer support.

[0068] In this embodiment, the first limiting member can be connected one-to-one with the fixing member 313 of the first fixing mechanism, and the limiting member can be connected one-to-one with the fixing member 313 of the second fixing mechanism. For example... Figure 1 As shown, when the connection positions of the fixing members 313 of the first fixing mechanism and the first support 312 of the first fixing mechanism correspond one-to-one, and the connection positions of the fixing members 313 of the second fixing mechanism and the first support 312 of the second fixing mechanism correspond one-to-one, the first limiting member can be directly set on its corresponding fixing member 313, and the limiting member can be directly set on its corresponding fixing member 313. This saves space for the arrangement of the first limiting member and the limiting member, while reducing the overall processing difficulty of the support device 3. Preferably, the first limiting member and its corresponding fixing member 313 can be integrally formed, and the limiting member can also be integrally formed with its corresponding fixing member 313.

[0069] Therefore, based on the previous example, multiple first limiting members (equal in number to the fixing members 313 of the first fixing mechanism) and multiple limiting members (equal in number to the fixing members 313 of the second fixing mechanism) are staggered along the extension direction. Since both the first limiting members and the limiting members support their respective wafers, this staggered arrangement can further disperse the force applied to the wafer, thereby improving the stability of the wafer support. In other words, in this example, each fixing member 313 and the limiting member 311 connected to that fixing member 313 jointly support one wafer. The fixing member 313 serves both to disperse the force transmitted from the first support 312 and to directly support the wafer to disperse the force applied to it; therefore, the fixing member 313 has a high utilization rate.

[0070] In other examples, multiple first limiting members and multiple limiting members may be staggered along the extension direction without relying on the fixing member 313. For example, each limiting member 311 may be independently connected to the first support 312 without relying on the fixing member 313. In this example, the fixing member 313 serves to distribute the force transmitted from the first support 312, which can allow for a reduction in the stiffness requirement of the fixing member 313.

[0071] Furthermore, such as Figure 3 As shown, in the embodiment, each first limiting member and each limiting member may include a limiting body, a guide portion, and a recess 3112 disposed on the limiting body. The limiting body may be, for example, a cuboid structure, and the recess 3112 may be opened on the top surface of the cuboid structure and extend to one side of the cuboid structure.

[0072] In this embodiment, the recess 3112 can be used to accommodate the edge of the wafer, thereby clamping the edge of the wafer and preventing it from flipping. A guide portion can be provided at the opening of the recess 3112 to guide the wafer into the recess 3112. This ensures that the support device 3 and the wafer are quickly positioned when the limiting member 311 contacts the wafer, and also prevents wafer misalignment and damage.

[0073] In this embodiment, each first limiting member and each limiting member may further include a flexible member, which may be disposed within the recess 3112. The flexible member is used to support the wafer, thereby providing a buffering effect on the wafer and increasing the stability of the wafer support. In this embodiment, the flexible member may be, for example, a gasket 3113, which may be made of, for example, rubber.

[0074] As an example, in an embodiment, the guide portion may include a guide surface 3111 disposed at the opening of the recess 3112. When the first support portion 312 is arranged horizontally, that is, when the entire frame 31 is arranged horizontally, the angle between the guide surface 3111 and the horizontal plane can be in the range of 10° to 30°, specifically, for example, 15°, 20°, 25°, and any angle within this range. That is, the guide surface 3111 is formed as a substantially inclined surface, which can effectively guide the edge of the wafer.

[0075] Based on this, combined Figures 1 to 5 The support device 3 may further include a plurality of support components disposed on the first support portion 312, the plurality of support components being used to support the wafer. See, in particular, [the following text is incomplete and requires further context]. Figure 1In the extension direction, multiple support components alternately correspond to the first limiting member and the limiting member. That is, each support component, each limiting member 311 and the fixing member 313 connected to the limiting member 311 together correspond to one wafer.

[0076] In an embodiment, each support component may include two retaining members 322 located on the left and right sides of the first support portion 312, respectively. For example... Figure 5 As shown, the retaining member 322 includes an extension connected to the first support portion 312 and a lifting portion connected to the end of the extension portion above the limiting member 311. The extension portion and the lifting portion can be integrally formed. In an embodiment, the lifting portion may also have a recess for accommodating the edge of the wafer. The outer side of the opening of the recess may be provided with a guide surface for guiding the wafer into the recess. The guide surface may, for example, be a "V" shape that gradually narrows towards the recess. Furthermore, in an embodiment, the extension portion may be configured to be elastic, i.e., after the lifting portion supports the wafer, the extension portion will move downward, causing the lifting portion to move towards the side where the frame 31 is located. Based on this, the extension portion may be further configured so that when the force it bears is the weight of the wafer, the wafer is precisely supported by the corresponding limiting member 311, thereby preventing the wafer from rotating during the support process.

[0077] In this embodiment, the aforementioned multiple support components can be detachably disposed on the first support portion 312. Thus, when maintaining the support device 3, the multiple support components can be removed from the first support portion 312. This allows the multiple support components and the frame 31 to be cleaned separately, which is more conducive to improving the cleanliness of the support device 3 and thereby reducing the wear caused by the support device 3 when supporting the wafer.

[0078] As an example, the support device 3 may further include a structural member 32, which can be connected to multiple support components. Specifically, the structural member 32 may include a strip-shaped structure of the same length as the first support portion 312, wherein the structural member 32 may include a first mating portion 321 for connecting to the first support portion 312, and the first support portion 312 may include a second mating portion for connecting to the first mating portion 321. The first mating portion 321 and the second mating portion are configured to connect to each other so that the structural member 32 and the first support portion 312 are detachably connected. As an example, preferably, the first mating portion 321 may be a protrusion extending along the extension direction of the first support portion 312, and the second mating portion may be a groove extending along the extension direction of the first support portion 312, wherein the structural member 32 and the first support portion 312 are connected by embedding the protrusion into the groove.

[0079] However, this is not an limitation. The first mating part can be a groove as described above, and the second mating part can be a protrusion as described above. In other examples, the first and second mating parts are not limited to the form of grooves and protrusions, but can also be other types of protrusions and recesses.

[0080] According to a second aspect of the embodiments of this application, a storage device is provided, which includes the support device as described above, and also includes the beneficial effects described above, which will not be repeated here.

[0081] like Figures 6 to 8 As shown, the storage device of this application is formed as a substantially semiconductor storage container, and also includes a container body 1 and a cover 2. The container body 1 is an open container body with an opening, and the container body 1 may include a lower part, four sides, and an opening. The openings may be opposite to the lower part, and the sides may connect the openings and the lower part to each other.

[0082] In an embodiment, the opening may include an opening edge 11, which may be located at the junction of the opening and the side portion. Each side of the opening edge 11 may have two edge grooves 112, which can be used to engage with the latching structure in the cover structure mentioned later, thereby sealing the cover and the body together. In addition, an edge step 111 is provided on the inner side of the opening edge 11, which abuts against the cover 2 to limit the position of the cover 2.

[0083] In the embodiment, positioning members 113 can be installed on the left and right sides of the edge groove 112. The positioning members 113 can be used to fix the installation position of the cover when it is combined with the opening. The bottom of the cover 2 includes a positioning member set at the corresponding opening position.

[0084] In this embodiment, handle fixing members 161 can be installed on the outer positions of the left and right sides of the container body 1. Handles 16 can be fixed to the handle fixing members 161 for handling the container body 1. The lower side of the container body 1 may also include multiple positioning bodies 15, and curved portions 12 are provided on both the left and right sides of the lower side. The curved portions 12 can be integrally formed with the lower side of the container body 1. In practice, the curved portions 12 can be combined with the positioning bodies 15 to fix and horizontally place the container body 1 on the worktable. The positioning bodies 15 are integrated with the structure on the worktable to prevent shaking during the placement of the container body 1, thus avoiding friction between the wafer and the container.

[0085] Furthermore, side supports 13 can be installed on the left and right inner sides of the container body 1, respectively. Each side support has multiple curved grooves, with the grooves on the left and right sides corresponding to each other, for placing the wafers to be transported. The edge of the wafer can contact the grooves. A bottom support 17 can be installed on the inner side of the bottom of the container body 1. The bottom support 17 has grooves corresponding to the grooves on the side supports 13, and the bottom support 17 and the grooves on the side supports 13 together support the wafer. The bottom support 17 contacts the edge of the wafer, thereby reducing contact between the wafer and the interior of the container.

[0086] The upper outer surface of the container body 1 may include a defining protrusion 143, on which a gripping part 14 is mounted. The gripping part 14 may include a gripper 141 and a retainer 142. The retainer 142 can be used to fix the gripper 141 inside the defining protrusion 143.

[0087] The cover 2 may include a cover main board 22 and a latching part 21. A recessed part may be provided at the center of the inner surface of the cover main board 22. A plurality of suspended support device fixing members 221 may be installed inside the recessed part, and the base of the support device may be inserted between the support device fixing member 221 and the inner surface of the recessed part.

[0088] In this embodiment, two opposing support device positioning members 222 can be provided on the side surface of the recess to fix the support device in the position of the recess, preventing the support device from vibrating up and down in the recess and causing friction to the wafer. Furthermore, a recessed support body 223 can be evenly installed in the center of the recess to support the support device. When the wafer comes into contact with the support device, and the support device abuts against the recessed support body 223, the up and down elastic changes of the support member are reduced, preventing increased wear on the wafer.

[0089] The above are merely preferred embodiments of this application and do not limit the scope of protection of this application. Any equivalent structural transformations made based on the innovative concept of this application and the contents of the specification and drawings of this application, or direct / indirect applications in other related technical fields, are included within the scope of protection of this application.

Claims

1. A support device, characterized in that, The support device includes: A first support portion, which is used to provide support for the sheet body; A first fixing mechanism and a second fixing mechanism are connected to opposite sides of the first support portion; The connection position between the first fixing mechanism and the first support includes positions that are different from the connection position between the second fixing mechanism and the first support. The first fixing mechanism has multiple connection points with the first support portion, and the first support portion has an extending direction; the second fixing mechanism has multiple connection points with the first support portion; the connection points of the first fixing mechanism with the first support portion and the connection points of the second fixing mechanism with the first support portion are staggered along the extending direction.

2. The support device according to claim 1, characterized in that, Both the first fixing mechanism and the second fixing mechanism include a fixing member, which is used to connect with the first support portion; The support device further includes a second support and a third support, which are spaced apart from the first support. The second support is connected to the fixing component of the first fixing mechanism, and the third support is connected to the fixing component of the second fixing mechanism.

3. The support device according to claim 2, characterized in that, The fixing components of the first fixing mechanism and the connection positions of the first fixing mechanism with the first support part correspond one-to-one, and the fixing components of the second fixing mechanism and the connection positions of the second fixing mechanism with the second support part correspond one-to-one.

4. The support device according to claim 2, characterized in that, The first support portion, the second support portion, and the third support portion all have an extending direction. The two ends of the second support portion in the extending direction are respectively connected to the two ends of the first support portion in the extending direction, and the two ends of the third support portion in the extending direction are respectively connected to the two ends of the first support portion in the extending direction.

5. The support device according to claim 2, characterized in that, The support device further includes a first limiting member and a second limiting member, which are respectively located on opposite sides of the first support portion; The first limiting member and the second limiting member are configured to support the sheet together with the first support portion, and the first limiting member and the second limiting member are also configured to prevent the sheet from flipping; The first limiting member is connected to the fixing member of the first fixing mechanism in a one-to-one correspondence, and the second limiting member is connected to the fixing member of the second fixing mechanism in a one-to-one correspondence.

6. The support device according to claim 1, characterized in that, The support device further includes a first limiting member and a second limiting member, which are respectively located on opposite sides of the first support portion; The first limiting member and the second limiting member are configured to support the sheet together with the first support portion, and the first limiting member and the second limiting member are also configured to prevent the sheet from flipping.

7. The support device according to claim 6, characterized in that, The first support portion has an extending direction, and a plurality of first limiting members and a plurality of second limiting members are staggered along the extending direction.

8. The support device according to claim 6, characterized in that, Each of the first limiting members and each of the second limiting members includes a limiting body, a guide portion and a recessed portion disposed in the limiting body; The recess is used to accommodate the edge of the sheet, and the guide is provided at the opening of the recess to guide the sheet into the recess.

9. The support device according to claim 8, characterized in that, Each of the first limiting member and each of the second limiting members includes a flexible member disposed within the recessed portion, the flexible member serving to support the sheet body.

10. The support device according to claim 8, characterized in that, The guide portion includes a guide surface disposed at the opening of the recess, the first support portion has an extending direction, and when the first support portion is arranged horizontally, the angle between the guide surface and the horizontal plane ranges from 10° to 30°.

11. The support device according to claim 6, characterized in that, The support device includes a plurality of support components disposed on the first support portion, the plurality of support components being used to support the sheet body. The first support portion has an extending direction, in which the plurality of support components alternately correspond to the first limiting member and the second limiting member.

12. The support device according to claim 1, characterized in that, The support device includes a plurality of support components disposed on the first support portion. The plurality of support components are detachably disposed on the first support portion, and the support components are used to support the sheet body.

13. The support device according to claim 12, characterized in that, The support device further includes a structural component, which is connected to the plurality of support components; The structural component includes a first mating part for connecting with the first support portion, and the first support portion includes a second mating part for connecting with the first mating part. The first mating part and the second mating part are configured to connect with each other so that the structural component and the first support portion are detachably connected.

14. A storage device, characterized in that, The storage device includes the support device as described in any one of claims 1 to 13.

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