Storage rack

Abstract

A storage rack has two base frames suspended from a ceiling, and two beam members erected on the base frames and constituting a placement portion of a container. An activity pin for positioning the container, a nozzle for supplying fluid into the container, a distribution pipe for delivering the fluid to the nozzle, and an adjusting device provided to the distribution pipe and adjusting the fluid are installed in one of the beam members.

Description

Technical Field

[0001] This disclosure relates to storage racks for storing containers and having a purification function for the containers. Background Technology

[0002] Conventionally, storage racks are known for receiving and storing containers from vehicles (driving vehicles) that travel along guide rails provided on the roof. For example, the storage rack described in Patent Document 1 includes a purification component configured to purify the wafers housed inside the container using gas.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Publication No. 2015-533026 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] In the aforementioned conventional storage racks, a base frame and side wall frames form the skeleton, with multiple racks mounted on the base frame. The purification assembly includes main piping for supplying and recovering gases, secondary piping connecting to nozzles on each storage rack, supply valves, supply flow meters, discharge valves, and discharge flow meters. These various devices are mounted relative to guide rails or any of the frames. Assembling (constructing) a storage rack with such a purification assembly on-site requires considerable time.

[0008] This disclosure relates to storage racks with purification functions, and describes storage racks that can be easily installed on-site.

[0009] Methods for solving problems

[0010] One aspect of the storage rack disclosed herein includes: at least two base frames suspended from the ceiling; and at least two beams mounted on the base frames to form a container holding section, wherein at least one of the beams is equipped with a positioning pin for positioning the container, a nozzle for supplying fluid into the container, a pipe for conveying fluid to the nozzle, and an adjustment device provided on the pipe for adjusting the fluid.

[0011] According to this storage rack, positioning pins, nozzles, piping, and adjustment devices can be pre-installed on at least one beam. Therefore, on-site construction of storage racks with purification functions is easily possible. Such beams have the advantage that the main equipment required for the added purification function has been modularized and integrated with the beam. For example, when adding purification functionality to an existing storage rack that does not already possess it, construction can be carried out simply by replacing the beam on-site.

[0012] Alternatively, at least one beam may be a component with a C-shaped or L-shaped cross-section, and the nozzle may be mounted on the inner surface of at least one beam. In this case, the nozzle can be configured compactly and easily. The configuration accuracy of the nozzle can also be improved by pre-determining the positional relationship between the nozzle and the locating pin.

[0013] Alternatively, one or two of the three positioning pins located on the mounting section can be placed on a different beam than the aforementioned at least one beam. In this case, the beam on which the equipment related to the purification function is installed can be easily positioned using one or two positioning pins placed on the other beam.

[0014] Alternatively, at least one beam may have three flat sections forming a C-shaped cross-section or two flat sections forming an L-shaped cross-section, with the surface of one of these flat sections constituting a mounting portion. In this case, the top surface of the beam constitutes the mounting portion, eliminating the need to add additional plates or similar materials to the top surface of the beam. Consequently, it is easy to ensure that the height of the mounting portions is uniform.

[0015] Invention Effects

[0016] According to this disclosure, storage racks with purification functions can be easily installed on-site. Attached Figure Description

[0017] Figure 1 This is a diagram that schematically illustrates the overall configuration of a storage rack according to one embodiment of the present disclosure.

[0018] Figure 2 It means Figure 1 A three-dimensional diagram of the storage rack, elevated traveling vehicle, and guide rails.

[0019] Figure 3 This is a top view of the storage rack.

[0020] Figure 4 This is the front view of the storage rack.

[0021] Figure 5 This is a side view of the storage rack.

[0022] Figure 6 This is a top view showing the replacement beams used when adding purification functions.

[0023] Figure 7 (a) is an enlarged representation. Figure 6 A partial top view, Figure 7 (b) is Figure 7 The side view of (a).

[0024] Figure 8 This is a top view showing the storage rack after it has been aligned using clamps.

[0025] Figure 9 This is a top view showing the alignment process using fixtures during assembly. Detailed Implementation

[0026] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Furthermore, in the description of the drawings, the same elements are labeled with the same symbols, and repeated descriptions are omitted. "X direction," "Y direction," and "Z direction" are convenient terms based on the directions shown in the drawings.

[0027] like Figure 1 as well as Figure 2 As shown, the storage rack 1 is configured, for example, along the track 5 of the overhead traveling vehicle 3 that constitutes the semiconductor transport system S in a semiconductor manufacturing workshop. The storage rack 1 temporarily stores containers F such as FOUPs or intermediate mask boxes. The storage rack 1 is configured to purify the interior of the containers F using a purifying gas (fluid) such as nitrogen.

[0028] like Figure 1 As shown, the semiconductor delivery system S includes multiple storage racks 1 suspended from the ceiling 100, a distribution panel 2 supplying power to the storage racks 1 via power supply wiring 6, a monitoring bracket 4 for monitoring the oxygen concentration in the workshop, and gas supply piping 8 laid on the ceiling 100 and supplying purified gas to each storage rack 1. Purified gas, adjusted to a desired pressure, is supplied to the gas supply piping 8. The distribution panel 2 and the monitoring bracket 4 are, for example, mounted on the floor 9. An emergency stop button 2a may also be provided on the distribution panel 2 for stopping the supply of purified gas to the storage racks 1 in an emergency. Furthermore, an oxygen concentration sensor 4a is provided on the monitoring bracket 4. An emergency stop button 4b may also be provided on the monitoring bracket 4 for stopping the supply of purified gas when the oxygen concentration decreases.

[0029] like Figure 1 as well as Figure 2 As shown, each storage rack 1 includes, for example, two base frames 10, 10 suspended from the ceiling 100, and two beams 20A, 20B supported on the two base frames 10, 10. Each base frame 10 has, for example, two suspension members 11 suspended from the ceiling 100 and extending in the vertical direction (Z direction); and a support member 12 supported at the lower end of the suspension members 11 and extending in the horizontal direction (Y direction). The beams 20A, 20B are supported on the two base frames 10, 10, for example, by being mounted on the lower surfaces of the two support members 12, 12 separated in the X direction.

[0030] Beams 20A and 20B are, for example, components made of channel steel with a C-shaped cross-section. Beams 20A and 20B extend parallel to the horizontal direction (X-direction) and separate in the Y-direction. Beams 20A and 20B are positioned at the same height suitable for the location of the elevated traveling vehicle 3. In each storage rack 1, beams 20A and 20B constitute multiple ( ) containers F. Figure 1 , 2 There are four mounting sections 7. Beams 20A and 20B constitute mounting sections 7, therefore, their separation distance is less than the length of the bottom surface of container F in the Y direction. Mounting section 7 includes a horizontal mounting surface 7a formed parallel to the XY plane, so that container F can be horizontally mounted on mounting section 7.

[0031] Beams 20A and 20B can be steel of the same size, or they can be steel of different sizes. In this embodiment, a purification unit 30 capable of purifying the container F is installed on one of the two beams 20A and 20B. Hereinafter, refer to... Figures 3-5 , Figure 7 (a) and Figure 7 Section (b) describes the composition of beam 20B and purification unit 30. Additionally, in Figure 2 The illustration of the purification unit 30 installed on beam 20B is omitted.

[0032] like Figures 3-5 As shown, a container F is placed on a mounting section 7 formed by beams 20A and 20B. In the storage rack 1, for each section of the mounting section 7, three movable pins 26 are provided for positioning the container F. Figure 3 As shown, two movable pins 26 are provided on beam 20A, and one movable pin 26 is provided on beam 20B. The three movable pins 26 are positioned corresponding to the vertices of a triangle (e.g., an equilateral triangle) and are configured to protrude upwards from the mounting surface 7a (see reference). Figure 5 In this embodiment, no purification unit is provided on beam 20A. Beam 20A only supports container F. On the other hand, a purification unit 30 is installed on beam 20B. Beam 20B supports container F and holds purification unit 30.

[0033] The bottom surface of container F has, for example, a recess or opening for receiving movable pin 26 (not shown). Container F is positioned at a predetermined location on the mounting surface 7a of storage rack 1 by such an alignment mechanism. By positioning container F at the predetermined location, the nozzle 31 of purification unit 30 is connected to a gas injection port (not shown) formed on the bottom surface of container F, so that purified gas can be supplied to container F.

[0034] like Figure 3As shown, four purification units 30 are provided on the storage rack 1 at positions corresponding to the four placement parts 7. Figure 7 (a) is a top view showing part 30 of the purification unit. Figure 7 (b) is Figure 7 The side view of (a). Figure 7 (a) and Figure 7 As shown in (b), beam 20B includes a first flat plate portion 21 arranged along the XY plane, and a second flat plate portion 22 and a third flat plate portion 23 connected to both ends of the first flat plate portion 21 in the Y direction and hanging down. The lower ends of the second flat plate portion 22 and the third flat plate portion 23 are bent into an L-shape, for example. Beam 20A also has the same configuration as beam 20B. Thus, beam 20A and beam 20B are arranged with a C-shaped cross-section facing downwards. The upper surface (surface) 21a of the first flat plate portion 21 constitutes the mounting surface 7a of the mounting portion 7. That is, the horizontal upper surface 21a of the first flat plate portion 21, which constitutes the C-shaped cross-section of the first flat plate portion 21, the second flat plate portion 22, and the third flat plate portion 23, constitutes the mounting surface 7a of the mounting portion 7. The aforementioned movable pin 26 is erected on the first flat plate portion 21.

[0035] exist Figure 7 Image (a) shows the purification unit 30 as viewed from the vertical direction, i.e., the Z-direction. The second plate portion 22 and the third plate portion 23 are broken, allowing the internal purification unit 30 (the first plate portion 21 is not shown) to be visible. Figure 7 (b) shows the purification unit 30 as viewed from the extension direction of beam 20B. Figure 3 as well as Figure 7 As shown in (b), a nozzle 31 for supplying purified gas to the container F, a distribution pipe 33 for conveying purified gas to the nozzle 31, a solenoid valve 36 for opening and closing the flow path of the purified gas, and a flow regulating valve 37 for adjusting the flow rate of the purified gas are installed on the inner surface of the beam 20B. A filter 38 for removing impurities from the purified gas and a load sensor 39 for detecting the condition of the container F on the mounting section 7 are also installed on the inner surface of the beam 20B. The purification unit 30 of this embodiment includes the aforementioned nozzle 31, distribution pipe 33, solenoid valve 36, flow regulating valve 37, filter 38, and load sensor 39. The solenoid valve 36 and flow regulating valve 37 are installed on the distribution pipe 33, constituting an adjusting device 34 for adjusting the purified gas. These devices are fixed to any one of the first plate section 21, the second plate section 22, and the third plate section 23 using a support frame and fastening components.

[0036] like Figure 5 as well as Figure 7As shown in (b), all equipment in the purification unit 30 except for the nozzle 31 and the adjustment device 34, namely the distribution piping 33, the filter 38, and the load sensor 39, are housed on the inner surface of the beam 20B. The nozzle 31 is mounted via a base component 31a (see reference). Figure 7 (a) is fixed to the back of the first plate portion 21 and mounted on the first plate portion 21. The front end portion 31b, which is only connected to the container F, passes through the first plate portion 21 and protrudes onto the first plate portion 21. The nozzle 31 is positioned relative to the movable pin 26 in a predetermined positional relationship. Thus, the nozzle 31 is mounted on the inner surface side of the beam 20B. The adjusting device 34 is not housed on the inner surface side of the beam 20B, but protrudes downward (see reference). Figure 4 as well as Figure 5 ).

[0037] like Figure 6 as well as Figure 7 As shown in (a), the nozzle 31, filter 38, adjusting device 34 (solenoid valve 36 and flow regulating valve 37), and distribution piping 33 are arranged in the extension direction of beam 20B. These devices are, for example, provided in a mounting section 7 in the X direction (see Figure 7). Figure 3 Within the required space.

[0038] A gas supply pipe 8 (see reference) is disposed on the lower side of the second flat plate portion 22 of beam 20B. Figure 1 A main pipe 32 is installed on the storage rack 1, for example, along the second flat plate 22, to supply gas to the four purification units 30 located in the four mounting sections 7. The aforementioned distribution pipe 33 branches off from the main pipe 32 to receive the purified gas introduced by the main pipe 32.

[0039] Reflectors 40 for detecting the transfer (movement) of container F from elevated vehicle 3 are installed on beams 20A and 20B, extending obliquely to the outer sides in the Y direction.

[0040] Next, refer to Figure 6 , Figure 8 as well as Figure 9 The assembly operation of the storage rack 1 of this embodiment in the workshop will be described. In the following description, an example will be given of adding a purification function to an existing storage rack that does not have a purification function by using a beam 45 with a purification unit (by replacing it with a beam 45 with a purification unit). Figure 6 As shown, the beam 20B of the purification unit 30 is moved in as a beam 45 carrying the purification unit, with the various equipment types of the purification unit 30 pre-installed on the inner surface. That is, within the workshop, the hassle of installing the various equipment types of the purification unit 30 onto the beam 20B is eliminated. Furthermore, in Figure 6In the beam 45 with purification unit shown, the main pipe 32 and the reflector 40 are also pre-installed on the beam 20B.

[0041] like Figure 9 As shown, when positioning beam 20B relative to beam 20A, a T-shaped mounting clamp 50 is used. Two circular holes 51A and 51B are formed on the mounting clamp 50, corresponding to one movable pin 26 on beam 20A. The circular holes 51A and 51B are arranged in the extending direction of beam 20A and are slightly separated in that direction. Two elongated holes 52A and 52B are formed corresponding to another movable pin 26 on beam 20A. The elongated holes 52A and 52B are arranged in the extending direction of beam 20A and are slightly separated in that direction. Furthermore, a circular hole 53A and an elongated hole 53B are formed on the mounting clamp 50, corresponding to one movable pin 26 on beam 20B. The circular hole 53A and the elongated hole 53B are arranged in the extending direction of beam 20B and are slightly separated in that direction.

[0042] By inserting three movable pins 26 into the round holes 51A, elongated holes 52A, and round holes 53A of the mounting fixture 50, or by inserting three movable pins 26 into the round holes 51B, elongated holes 52B, and elongated holes 53B of the mounting fixture 50, the beam 20B is positioned relative to the beam 20A at the desired location. Figure 9 In the example shown, three movable pins 26 are inserted through the round hole 51B, the elongated hole 52B, and the elongated hole 53B. Then, as... Figure 8 As shown, beams 20A and 20B are fastened and fixed relative to the support portion 12 of the base frame 10. Figure 8 As shown, in one mounting fixture 50 (the mounting fixture 50 on the left side of the figure), three movable pins 26 are inserted through the round hole 51B, the elongated hole 52B and the elongated hole 53B. In the other mounting fixture 50 (the mounting fixture 50 on the right side of the figure), three movable pins 26 are inserted through the round hole 51A, the elongated hole 52A and the round hole 53A.

[0043] After assembling beams 20A and 20B (beam 45 with a purification unit) relative to the base frame 10, the gas supply piping 8 of the workshop is connected to the distribution piping 33 of the purification unit 30, and the power supply wiring 6 is connected to the necessary parts of the purification unit 30. The construction of the storage rack 1 with purification function is completed through these connection operations alone. Furthermore, after assembling the storage rack 1, the mounting clamps 50 are removed.

[0044] The operation of the storage rack 1 of this disclosure will be explained. When the container F is placed on the placement section 7 and the load sensor 39 is turned on, the solenoid valve 36 opens, and the purified gas flows from the main pipe 32 to the distribution pipe 33. At this time, the flow regulating valve 37 is adjusted to an appropriate opening.

[0045] According to the storage rack 1 of this embodiment, a movable pin 26, a nozzle 31, a distribution pipe 33, and an adjustment device 34 can be pre-installed on one of the beams 20A and 20B. Therefore, the storage rack 1 with purification function can be easily installed on-site. Such a beam 20B has the advantage that the main equipment required for the additional purification function has been modularized into a purification unit 30 and integrated with the beam 20B (see reference). Figure 6 (Beam 45 with purification unit shown). For example, when adding purification function to an existing storage rack that does not have purification function, construction can be carried out easily, quickly and at low cost simply by replacing beam 20B (beam 45 with purification unit) on site.

[0046] Beam 20B is a component with a C-shaped cross-section, and nozzle 31 is mounted on the inner surface of beam 20B. This allows for a compact and easy configuration of nozzle 31. Furthermore, the configuration accuracy of nozzle 31 can be improved by pre-determining the positional relationship between nozzle 31 and movable pin 26.

[0047] Two of the three movable pins 26 disposed in the mounting section 7 are located on other beams 20A, which are different from beam 20B. Using the two positioning pins located on the other beams 20A, the beam 20B on which equipment related to the purification function is mounted can be easily positioned. In particular, as described in the above embodiment, by using the mounting clamp 50 during assembly, the effect of not requiring re-teaching after assembly can be achieved.

[0048] The upper surface 21a of the first flat plate portion 21, the second flat plate portion 22, and the third flat plate portion 23 of the beam member 20 constitutes the mounting portion 7. Since the upper surface 21a of the beam member 20B also constitutes the mounting portion 7, it is not necessary to add additional plates or the like to the upper surface 21a of the beam member 20B. Therefore, it is easy to make the height of the mounting portion 7 uniform.

[0049] According to the construction method described above, the storage rack 1 with purification function can be easily constructed. This is highly advantageous from the perspective of cost reduction. Furthermore, in recent years, there have been many upgrade projects to add purification functions to storage racks that do not already have them. According to this construction method, the construction of the storage rack 1 is completed simply by moving in a beam 45 with a pre-assembled purification unit 30 and assembling it, which is also highly advantageous for such upgrade projects.

[0050] The embodiments of this disclosure have been described above, but the present invention is not limited to the above embodiments. For example, the beam 20B may also be an angle steel with an L-shaped cross-section. The horizontal upper surface of the horizontally arranged plate portion in the first plate portion and the second plate portion constituting the L-shaped cross-section constitutes a mounting portion. A positioning pin and a nozzle are provided on this horizontal plane portion. In this case, most of the equipment of the purification unit 30 may also be installed on the inner surface side of the L-shape.

[0051] The base frame 10 of the storage rack 1 is not limited to two. One or more base frames 10 can also be set in the middle of the base frames 10 at both ends in the X direction. The number of containers F stored by one storage rack 1 is not limited to 4, but can be more than 5 or less than 3.

[0052] Alternatively, one movable pin 26 can be provided on beam 20A, and two movable pins 26 can be provided on beam 20B. In this case, beam 20B, on which equipment related to the purification function is installed, can be easily positioned using a positioning pin provided on the other beam 20A.

[0053] The distribution piping 33 and solenoid valve 36 in the purification unit 30 can also be configured on the outside of the beam 20B. In this case, the distribution piping 33 and solenoid valve 36 are installed on the beam 20B. The adjustment device 34 may only include either the solenoid valve 36 or the flow regulating valve 37, or it may include a known adjustment device different from the solenoid valve 36 and the flow regulating valve 37. The types of equipment constituting the purification unit 30 and their layout can be appropriately changed.

[0054] In the above embodiments, an example was described of updating an existing storage rack without a purification function by introducing a beam 45 with a purification unit, but the present invention is not limited to this example. The beam 45 with the purification unit can also be used when a new storage rack 1 with a purification function is installed from scratch.

[0055] The purifying gas is not limited to nitrogen; it can be air or other inert gases.

[0056] Explanation of symbols

[0057] 1: Storage rack; 3: Overhead traveling vehicle; 5: Track; 7: Loading section; 7a: Loading surface; 10: Base frame; 20A, 20B: Beams; 21: First plate section; 21a: Upper surface; 22: Second plate section; 23: Third plate section; 26: Movable pin (positioning pin); 30: Purification unit; 31: Nozzle; 32: Main piping; 33: Distribution piping; 34: Adjustment device; 36: Solenoid valve; 37: Flow regulating valve; 38: Filter; 39: Load sensor; 40: Reflector; 100: Canopy; S: Semiconductor delivery system.

Claims

1. A storage rack, comprising: At least two base frames, suspended from the ceiling; and At least two beams, supported by the base frame, constitute the mounting section for the container. At least one of the beams is equipped with a positioning pin for positioning the container, a nozzle for supplying fluid into the container, a pipe for conveying the fluid to the nozzle, and an adjustment device provided on the pipe for adjusting the fluid.

2. The storage rack according to claim 1, wherein, The aforementioned at least one beam is a component with a C-shaped or L-shaped cross-section, and the aforementioned nozzle is installed on the inner surface side of the aforementioned at least one beam.

3. The storage rack according to claim 1 or 2, wherein, One or two of the three locating pins configured in the aforementioned mounting portion are located on other beams that are different from the aforementioned at least one beam.

4. The storage rack according to any one of claims 1 to 3, wherein, The aforementioned at least one beam has three flat plates forming a C-shaped cross section or two flat plates forming an L-shaped cross section, wherein the surface of one of the flat plates forms the aforementioned mounting portion.

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