Flow control tee valve and temperature control device

Abstract

The present application provides a flow control tee valve and a temperature control device, which improves the sealability of the seal portion of the valve core relative to a low-temperature fluid of about -85°C compared to a case where the end portion of the driving member side of the valve core is rotatably sealed relative to the valve body, the seal member is formed of a metal spring member, is forced in the opening direction, has a substantially U-shaped cross section, and is composed of synthetic resin. The flow control tee valve has: a cylindrical valve core rotatably disposed in the valve seat of the body, which switches the first valve port from the closed state to the open state while switching the second valve port from the open state to the closed state, the cylindrical valve core being formed with an opening portion; a driving member that drives the valve core to rotate; and a seal member that rotatably seals the end portion of the driving member side of the valve core relative to the valve body, is forced in the opening direction by a metal spring member, has a substantially U-shaped cross section, and is composed of synthetic resin.

Description

Technical Field

[0001] This invention relates to a three-way valve for flow control and a temperature control device. Background Technology

[0002] Previously, the applicant had proposed the technology disclosed in Patent Document 1, etc., as related to the technology of three-way valves for flow control.

[0003] Patent Document 1 comprises: a valve body having a valve seat formed by a cylindrical space, the valve seat having a first valve port with a rectangular cross-section for the inflow of a first fluid and a second valve port with a rectangular cross-section for the inflow of a second fluid; a valve core rotatably disposed within the valve seat of the valve body so as to switch the second valve port from an open state to a closed state while simultaneously switching the first valve port from a closed state to an open state, the valve core being formed as a semi-cylindrical shape having a predetermined central angle and having curved surfaces at both end faces along the circumferential direction; and a drive member driving the valve core to rotate.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent No. 6104443 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] The purpose of this invention is to provide a three-way valve for flow control and a temperature control device, which improves the sealing performance of the sealing part of the valve core that can rotatably seal the end of the valve core relative to the valve body, and is made of synthetic resin with a cross section that is approximately U-shaped and applies force in the opening direction by a metal spring member, compared to the case where the valve core does not have a sealing member that can rotatably seal the end of the valve core relative to the valve body, and is made of synthetic resin.

[0009] Methods for solving problems

[0010] The invention described in technical solution 1 is a three-way valve for flow control, characterized in that it comprises:

[0011] The valve body has a valve seat formed by a cylindrical space. The valve seat has a first valve port with a rectangular cross-section for fluid to flow out and a second valve port with a rectangular cross-section for fluid to flow out. It also has a first outlet and a second outlet that connect the first valve port and the second valve port to the outside, respectively.

[0012] A cylindrical valve core is rotatably disposed within a valve seat of the valve body. The valve core switches the second valve port from the open state to the closed state while simultaneously switching the first valve port from the closed state to the open state. The cylindrical valve core has an opening.

[0013] A driving member that drives the valve core to rotate; and

[0014] The sealing member is a component that rotatably seals the end of the valve core on the drive member side relative to the valve body. It is made of synthetic resin and is subjected to force in the opening direction by a metal spring component.

[0015] The invention described in technical solution 2 is a three-way valve for flow control, characterized in that it comprises:

[0016] The valve body has a valve seat formed by a cylindrical space. The valve seat has a first valve port with a rectangular cross-section for the inflow of a first fluid and a second valve port with a rectangular cross-section for the inflow of a second fluid. It also has a first inlet and a second inlet that connect the first valve port and the second valve port to the outside, respectively.

[0017] A cylindrical valve core is rotatably disposed within a valve seat of the valve body. The valve core switches the second valve port from the open state to the closed state while simultaneously switching the first valve port from the closed state to the open state. The cylindrical valve core has an opening.

[0018] A driving member that drives the valve core to rotate; and

[0019] The sealing member is a component that rotatably seals the end of the valve core on the drive member side relative to the valve body. It is made of synthetic resin and is subjected to force in the opening direction by a metal spring component.

[0020] In the invention described in technical solution 3, the three-way valve for flow control described in technical solution 1 or 2 has a sealing member consisting of an omnidirectional seal.

[0021] In the three-way valve for flow control described in technical solution 3, the invention described in technical solution 4 has a plurality of sealing members arranged axially at the end of the valve core on the side of the drive member.

[0022] In the three-way valve for flow control described in technical solution 4, the invention described in technical solution 5 includes a bearing component arranged between the plurality of sealing components to support the end of the valve core on the drive component side so that it can rotate.

[0023] In the invention described in technical solution 6, in the three-way valve for flow control described in technical solution 4, the bearing component is arranged in close contact with the plurality of sealing components.

[0024] The invention described in technical solution 7 is a temperature control device, characterized in that it comprises:

[0025] A temperature control component having a temperature control flow path for a temperature control fluid to flow through, the temperature control fluid being composed of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio;

[0026] A first supply member supplies the cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side.

[0027] A second supply component supplies the high-temperature side fluid at a predetermined second temperature that is adjusted to the high-temperature side.

[0028] A mixing component, connected to the first supply component and the second supply component, mixes the low-temperature fluid supplied from the first supply component and the high-temperature fluid supplied from the second supply component and supplies them to the temperature control flow path; and

[0029] A flow control valve controls the flow rate of the temperature control fluid flowing in the temperature control flow path and distributes it to the first supply member and the second supply member.

[0030] The flow control valve is a three-way valve for flow control as described in any one of technical solutions 1, 3 to 6.

[0031] The invention described in technical solution 8 is a temperature control device, characterized in that it comprises:

[0032] A temperature control component having a temperature control flow path for a temperature control fluid to flow through, the temperature control fluid being composed of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio;

[0033] A first supply member supplies the cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side.

[0034] A second supply member supplies the high-temperature side fluid adjusted to a predetermined second temperature on the high-temperature side; and

[0035] A flow control valve, connected to the first supply member and the second supply member, adjusts the mixing ratio of the low-temperature fluid supplied from the first supply member and the high-temperature fluid supplied from the second supply member, and directs them into the temperature control flow path.

[0036] The flow control valve is a three-way valve for flow control as described in any one of technical solutions 2 to 6.

[0037] The effects of the invention

[0038] According to the present invention, a three-way valve for flow control and a temperature control device can be provided, which improves the sealing performance of the sealing portion of the valve core that can rotatably seal the end of the valve core relative to the valve body, and is made of synthetic resin with a cross section that is approximately U-shaped and applies force in the opening direction by a metal spring member, compared to the case where the valve core does not have a sealing member that can rotatably seal the end of the valve core relative to the valve body, and which is made of synthetic resin. Attached Figure Description

[0039] Figure 1(a) is a front view of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 1 of the present invention.

[0040] Figure 1(b) is a right view of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 1 of the present invention.

[0041] Figure 1(c) is a bottom view of the actuator section of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 1 of the present invention.

[0042] Figure 2 Figure 1(b) is a sectional view along line AA of a three-way valve type electric valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0043] Figure 3 Figure 1(a) is a BB-line cross-sectional view of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 1 of the present invention.

[0044] Figure 4 This is a perspective cross-sectional view showing the main part of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 1 of the present invention.

[0045] Figure 5(a) is a three-dimensional structural diagram of the valve seat element.

[0046] Figure 5(b) is a planar structural diagram of the valve seat element.

[0047] Figure 6 It is a structural diagram showing the relationship between the valve seat element and the valve shaft.

[0048] Figure 7(a) is a three-dimensional structural diagram of a wave washer.

[0049] Figure 7(b) is a front view showing the wave washer.

[0050] Figure 7(c) is a side view showing a partial cross-section of the wave washer.

[0051] Figure 8 This is a three-dimensional structural diagram representing the adjustment ring.

[0052] Figure 9(a) is a three-dimensional structural diagram of the valve shaft.

[0053] Figure 9(b) is a front view structural diagram of the valve shaft.

[0054] Figure 10(a) is a structural diagram showing the operation of the valve shaft with one valve port fully open.

[0055] Figure 10(b) is a structural diagram showing the state in which the valve shaft is in motion with both valve ports partially open.

[0056] Figure 11(a) is a three-dimensional structural diagram showing a partial cross-section of the omnidirectional seal.

[0057] Figure 11(b) is a cross-sectional view of the omnidirectional seal.

[0058] Figure 12 This is a cross-sectional view showing the installation status of the omnidirectional seal.

[0059] Figure 13 This is a structural diagram showing a modified example of an omnidirectional seal.

[0060] Figure 14(a) is a structural diagram showing the operation of the valve shaft.

[0061] Figure 14(b) is also a structural diagram showing the operation of the valve shaft.

[0062] Figure 15 This is a cross-sectional structural diagram showing the operation of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 1 of the present invention.

[0063] Figure 16 This is a cross-sectional view of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 2 of the present invention.

[0064] Figure 17 This is a cross-sectional view of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 3 of the present invention.

[0065] Figure 18This is a conceptual diagram showing a temperature maintenance device (cooling device) for a three-way valve type electric valve that uses an example of a flow control three-way valve as an embodiment 1 of the present invention.

[0066] Figure 19 This is a conceptual diagram showing a temperature maintenance device (cooling device) for a three-way valve type electric valve that uses an example of the three-way valve for flow control as an embodiment 2 of the present invention. Detailed Implementation

[0067] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0068] [Implementation Method 1]

[0069] Figures 1(a), (b), and (c) are front views, left views, and bottom views of a three-way valve type electric valve, which is an example of a flow control three-way valve according to Embodiment 1 of the present invention. Figure 2 This is a sectional view along line AA in Figure 1(b). Figure 3 This is a sectional view along line BB of Figure 1(a). Figure 4 This is a sectional perspective view showing the main parts of a three-way electric valve.

[0070] The three-way valve type electric valve 1 is configured as a rotary three-way valve. As shown in Figure 1, the three-way valve type electric valve 1 is generally composed of a valve part 2 disposed at the lower part, an actuator part 3 disposed at the upper part, a sealing part 4 disposed between the valve part 2 and the actuator part 3, and a connecting part 5.

[0071] like Figures 2 to 4 As shown, the valve section 2 includes a valve body 6 formed of a metal such as SUS in a generally rectangular parallelepiped shape. Figure 3 As shown, on one side of the valve body 6 (the left side in the example figure), there is a first outlet 7 for fluid to flow out and a first valve port 9 with a rectangular cross-section, which is connected to a valve seat 8 formed by a cylindrical space as an example of a flow port.

[0072] In this embodiment 1, the first outlet 7 and the first valve port 9 are not directly disposed on the valve body 6. Instead, the first valve seat element 70, which forms the first valve port 9 as an example of the first valve port forming component, and the first flow path forming component 15, which forms the first outlet 7, are installed on the valve body 6, thereby disposing of the first outlet 7 and the first valve port 9.

[0073] As shown in Figure 5, the first valve seat element 70 integrally comprises: a cylindrical portion 71 disposed on the outer side of the valve body 6 and formed into a cylindrical shape; and a tapered portion 72 formed into a tapered shape with its outer diameter decreasing towards the inner side of the valve body 6. Inside the tapered portion 72 of the first valve seat element 70, a first valve port 9 with a rectangular (square in this embodiment 1) cross-section is formed. Furthermore, as described later, one end of the first flow path forming member 15 forming the first outlet 7 is inserted into the interior of the cylindrical portion 71 of the first valve seat element 70 in a sealed (closed) state.

[0074] For example, polyimide (PI) resin can be used as the material for the first valve seat element 70. Alternatively, so-called "super engineering plastics" can be used as the material for the first valve seat element 70. Super engineering plastics possess heat resistance and mechanical strength at high temperatures exceeding those of ordinary engineering plastics. Examples of super engineering plastics include polyetheretherketone (PEEK), polyphenylene sulfide (PPS), polyethersulfone (PES), polyamide-imide (PAI), liquid crystal polymer (LCP), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), or composites thereof. Furthermore, for example, "TECAPEEK" (registered trademark), manufactured by Ensinger Japan Co., Ltd., which is a PEEK resin raw material for machining, and especially "TECAPEEK TF 10blue" (trade name), which exhibits excellent lubrication when combined with 10% PTFE, can also be used as the material for the first valve seat element 70.

[0075] like Figure 3 As shown, a recess 75 corresponding to and similar in shape to the first valve seat element 70 is formed on the valve body 6 through machining or the like. The recess 75 has a cylindrical portion 75a corresponding to the cylindrical portion 71 of the first valve seat element 70 and a tapered portion 75b corresponding to the tapered portion 72. The length of the cylindrical portion 75a of the valve body 6 is set to be longer than the cylindrical portion 71 of the first valve seat element 70. As will be described later, the cylindrical portion 75a of the valve body 6 forms part of the first pressure actuating portion 94. The first valve seat element 70 is movably mounted in the recess 75 of the valve body 6 in a direction approaching or away from the valve shaft 34, which serves as the valve core.

[0076] When the first valve seat element 70 is mounted in the recess 75 of the valve body 6, a small gap is formed between the outer peripheral surface of the first valve seat element 70 and the inner peripheral surface of the recess 75 of the valve body 6. Fluid flowing into the interior of the valve seat 8 can leak through the small gap and flow into the outer peripheral region of the first valve seat element 70. In addition, the fluid leaking into the outer peripheral region of the first valve seat element 70 is introduced into the first pressure actuation section 94, which is formed by the space located outside the cylindrical portion 71 of the first valve seat element 70. The first pressure actuation section 94 causes the pressure of the fluid to act on the surface 70a of the first valve seat element 70 opposite to the valve shaft 34. The fluid flowing into the interior of the valve seat 8, in addition to the fluid flowing out through the first valve port 9, also flows out through the second valve port 18, as will be described later. The first pressure actuation section 94 is divided in a state where it is sealed with the first flow path forming member 15 between itself and the first outlet 7.

[0077] The pressure of the fluid acting on the valve shaft 34 disposed inside the valve seat 8 depends on the flow rate of the fluid determined by the opening and closing degree of the valve shaft 34. The fluid flowing into the interior of the valve seat 8 also flows (leaks) into the minute gap formed between the outer peripheral surfaces of the valve seat 8 and the valve shaft 34 via the first valve port 9 and the second valve port 18. Therefore, in addition to the fluid flowing out from the first valve port 9, the fluid flowing into the minute gap formed between the outer peripheral surfaces of the valve seat 8 and the valve shaft 34 and flowing out from the second valve port 18 also flows (leaks) into the first pressure-acting portion 94 corresponding to the first valve seat element 70.

[0078] As shown in Figure 5(b), a recess 74, which is an example of a planar arc-shaped gap-reducing portion, is provided at the front end of the tapered portion 72 of the first valve seat element 70. This recess 74 constitutes part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed in the valve body 6. The radius of curvature R of the recess 74 is set to be approximately equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve shaft 34. To prevent the valve shaft 34, which rotates inside the valve seat 8, from engaging, a small gap is formed between the valve seat 8 of the valve body 6 and the outer peripheral surface of the valve shaft 34. Figure 6As shown, the recess 74 of the first valve seat element 70 is mounted such that, when the first valve seat element 70 is attached to the valve main body 6, it protrudes further toward the valve shaft 34 side than the valve seat 8 of the valve main body 6, or is mounted in a manner that it contacts the outer peripheral surface of the valve shaft 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve main body 6, which is a member facing the valve shaft 34, becomes a value that is partially reduced by the protruding amount of the recess 74 of the first valve seat element 70 compared with other portions of the valve seat 8. In this way, the gap G1 between the recess 74 of the first valve seat element 70 and the valve shaft 34 is set to a required value that is narrower (smaller) than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8 (G1<G2). It should be noted that the gap G1 between the recess 74 of the first valve seat element 70 and the valve shaft 34 may also be a state where the recess 74 of the valve seat element 70 is in contact with the valve shaft 34, that is, a state with no gap (gap G1=0).

[0079] However, when the recess 74 of the first valve seat element 70 is in contact with the valve shaft 34, when the valve shaft 34 is driven to rotate, the driving torque of the valve shaft 34 may increase due to the contact resistance of the recess 74. Therefore, the degree of contact between the recess 74 of the first valve seat element 70 and the valve shaft 34 is adjusted in consideration of the torque of the valve shaft 34. That is, the adjustment is made to such a degree that the driving torque of the valve shaft 34 does not increase, or even if it increases, the increase amount is small and does not hinder the rotation of the valve shaft 34.

[0080] As shown in Figure 3 and Figure 4 , the first flow path forming member 15 is formed into a cylindrical shape from a metal such as SUS or a synthetic resin such as polyimide (PI) resin. Regardless of the positional variation of the first valve seat element 70, the first flow path forming member 15 internally defines a first outflow port 7 that communicates with the first valve port 9. The approximately 1 / 2 portion of the first flow path forming member 15 on the side of the first valve seat element 70 is formed as a thin-walled cylindrical portion 15a having a relatively thin-walled cylindrical shape. In addition, the approximately 1 / 2 portion of the first flow path forming member 15 on the side opposite to the first valve seat element 70 is formed as a thick-walled cylindrical portion 15b having a thick-walled cylindrical shape compared with the thin-walled cylindrical portion. The inner surface of the first flow path forming member 15 is formed to penetrate in a cylindrical shape. On the outer periphery of the first flow path forming member 15, between the thin-walled cylindrical portion 15a and the thick-walled cylindrical portion 15b, there is provided a flange portion 15c which is formed as a relatively thick ring toward the radially outer side. The outer peripheral end of the flange portion 15c is arranged to be movably in contact with the inner peripheral surface of the recess 75.

[0081] A first wave-shaped washer (corrugated washer) 16, serving as an example of an elastic member, is provided on the outer side of the cylindrical portion 71 of the first valve seat element 70 along the axial direction. This first wave-shaped washer (corrugated washer) 16 allows the first valve seat element 70 to move towards or away from the valve shaft 34, and elastically deforms in the direction that causes the first valve seat element 70 to move towards or away from the valve shaft 34. As shown in FIG. 7, the first wave-shaped washer 16 is made of stainless steel, iron, or phosphor bronze, and its front projection shape is formed as a ring with a desired width. Furthermore, the side surface shape of the first wave-shaped washer 16 is formed as a wave (corrugated), enabling elastic deformation along its thickness direction. The elastic modulus of the first wave-shaped washer 16 is determined by its thickness, material, or the number of waves. The first wave-shaped washer 16 is housed in the first pressure-acting portion 94.

[0082] Furthermore, a first adjusting ring 77, as an example of an annular adjusting member, is disposed on the outer side of the first waveform washer 16. This first adjusting ring 77 adjusts the gap G1 between the valve shaft 34 and the recess 74 of the first valve seat element 70 via the first waveform washer 16. Figure 8 As shown, the first adjusting ring 77 is formed of a metal such as SUS or a synthetic resin such as heat-resistant polyimide (PI) resin, and is composed of a cylindrical component with an external thread 77a formed on its outer peripheral surface and a relatively short length. On the outer end face of the first adjusting ring 77, grooves 77b are respectively provided at 180-degree opposite positions. These grooves 77b are used to engage a clamp (not shown) for adjusting the tightening amount when the first adjusting ring 77 is fastened to the internal thread 78 provided in the valve body 6, thereby causing the first adjusting ring 77 to rotate.

[0083] like Figure 4 As shown, a first internal thread portion 78 for mounting a first adjusting ring 77 is provided in the valve body 6. A short cylindrical portion 79 with an outer diameter approximately equal to that of the first adjusting ring 77 is provided at the open end of the valve body 6. Furthermore, a machining cylindrical portion 75d with an inner diameter larger than the first internal thread portion 78 is provided between the first internal thread portion 78 and the cylindrical portion 75c in order to machine the first internal thread portion 78 within the required length range.

[0084] The first adjusting ring 77 adjusts the amount by which it pushes the first valve seat element 70 inward via the first wave washer 16 by adjusting the amount of screwing in relative to the internal thread 78 of the valve body 6. When the screwing in amount of the first adjusting ring 77 is increased, such as... Figure 6As shown, the first valve seat element 70 is pressed by the first adjusting ring 77 through the first wave washer 16 and the first pressure plate 76. The recess 74 protrudes from the inner circumferential surface of the valve seat 8 and moves towards the valve shaft 34, reducing the gap G1 between the recess 74 and the valve shaft 34. Furthermore, if the screw-in amount of the first adjusting ring 77 is preset to a smaller amount, the distance the first valve seat element 70 is pushed by the first adjusting ring 77 is reduced, and when positioned away from the valve shaft 34, the gap G1 between the recess 74 of the first valve seat element 70 and the valve shaft 34 relatively increases. The pitch of the external thread 77a of the first adjusting ring 77 and the internal thread 78 of the valve body 6 are set to be small, enabling fine adjustment of the protrusion amount of the first valve seat element 70.

[0085] In addition, such as Figure 2 As shown, on one side (left side) of the valve body 6, a first flange member 10, serving as an example of a connecting component, is installed via four hexagon socket head cap screws 11 for connecting to a pipe (not shown) that allows fluid to flow out. In Figure 1(b), reference numeral 11a indicates the threaded hole for fastening the hexagon socket head cap screws 11. The first flange member 10 is formed of a metal such as SUS, similar to the valve body 6. The first flange member 10 has: a flange portion 12 formed into a side rectangle with a shape substantially the same as the side of the valve body 6; an insertion portion 13 protruding shortly into a cylindrical shape on the inner side of the flange portion 12; and a pipe connection portion 14 protruding from the outer side of the flange portion 12, forming a substantially cylindrical shape with a thick wall, for connecting to a pipe (not shown). Figure 2 As shown, the flange portion 12 of the first flange member 10 is sealed to the valve body 6 by an O-ring seal 13a. A groove 13b for receiving the O-ring seal 13a is provided on the inner circumferential surface of the flange portion 12 of the first flange member 10. The inner circumference of the pipe connection portion 14 is, for example, configured to have a tapered internal thread (Rc1 / 2) with a diameter of approximately 21 mm or an internal thread with a diameter of approximately 0.58 inches. It should be noted that the shape of the pipe connection portion 14 is not limited to a tapered internal thread or a regular internal thread; it can also be a pipe fitting for mounting a pipe, as long as fluid can flow out from the first outlet 7.

[0086] Here, the O-ring seal 13a is an O-ring shaped sealing component comprising a spring component and an elastically deformable synthetic resin. The spring component is formed into a spiral shape with a circular or elliptical cross-section and is made of a metal such as stainless steel. The outer periphery of the spring component is completely covered with an elastically deformable synthetic resin such as FEP (a copolymer of tetrafluoroethylene and hexafluoropropylene) or PFA (a copolymer of tetrafluoroethylene and perfluoroalkoxyethylene). The O-ring seal 13a can maintain its sealing performance in extremely low temperature regions.

[0087] like Figure 2As shown, on the other side of the valve body 6 (the right side in the figure), there are a second outlet 17 for fluid to flow out and a second valve port 18 with a rectangular cross-section, which is connected to the valve seat 8, which is a cylindrical space, as an example of a flow port.

[0088] In this embodiment 1, the second outlet 17 and the second valve port 18 are not directly provided on the valve body 6. Instead, the second valve seat element 80, which is an example of a valve port forming member and has the second valve port 18, and the second flow path forming member 25, which has the second outlet 17, are installed on the valve body 6, thereby providing the second outlet 17 and the second valve port 18.

[0089] As shown by the parenthetical reference numerals in Figure 5, the second valve seat element 80 is constructed in the same manner as the first valve seat element 70. Specifically, the second valve seat element 80 integrally comprises a cylindrical portion 81 formed in a cylindrical shape and disposed on the outer side of the valve body 6, and a tapered portion 82 formed such that its outer diameter decreases towards the inner side of the valve body 6. Inside the tapered portion 82 of the second valve seat element 80, a second valve port 18 with a rectangular (square in this embodiment 1) prism shape is formed. Furthermore, inside the cylindrical portion 81 of the second valve seat element 80, one end of a second flow path forming member 25, which forms the second flow outlet 17, is inserted in a sealed state.

[0090] like Figure 3 As shown, a recess 85 corresponding to and similar in shape to the second valve seat element 80 is formed in the valve body 6 through machining or the like. The recess 85 has a cylindrical portion 85a corresponding to the cylindrical portion 81 of the second valve seat element 80 and a tapered portion 85b corresponding to the tapered portion 82. The length of the cylindrical portion 85a of the valve body 6 is set to be longer than the cylindrical portion 81 of the second valve seat element 80. As will be described later, the cylindrical portion 85a of the valve body 6 forms a second pressure actuating portion 96. The second valve seat element 80 is movably mounted in the recess 85 of the valve body 6 in a direction approaching or away from the valve shaft 34, which serves as the valve core.

[0091] When the second valve seat element 80 is installed in the recess 85 of the valve body 6, a small gap is formed between the second valve seat element 80 and the recess 85 of the valve body 6. Fluid flowing into the interior of the valve seat 8 can flow into the outer peripheral region of the second valve seat element 80 through the small gap. In addition, the fluid flowing into the outer peripheral region of the second valve seat element 80 is introduced into the second pressure actuation section 96, which is formed by the space located outside the cylindrical portion 81 of the second valve seat element 80. The second pressure actuation section 96 causes the pressure of the fluid to act on the surface 80a of the second valve seat element 80 opposite to the valve shaft 34. The fluid flowing into the interior of the valve seat 8 includes the fluid flowing out through the second valve port 18 and the fluid flowing out through the first valve port 9. The second pressure actuation section 96 is divided by the second flow path forming member 25, which seals it from the second outlet 17.

[0092] The pressure of the fluid acting on the valve shaft 34 disposed inside the valve seat 8 depends on the flow rate of the fluid determined by the opening and closing degree of the valve shaft 34. The fluid flowing into the interior of the valve seat 8 also flows (leaks) into the minute gap formed between the outer peripheral surfaces of the valve seat 8 and the valve shaft 34 via the first valve port 9 and the second valve port 18. Therefore, in addition to the fluid flowing out from the second valve port 18, the fluid flowing out from the first valve port 9 into the minute gap formed between the outer peripheral surfaces of the valve seat 8 and the valve shaft 34 also flows into the second pressure-acting part 96 corresponding to the second valve seat element 80. It should be noted that the second valve seat element 80 is formed of the same material as the first valve seat element 70.

[0093] As shown in Fig. 5(b), a concave portion 84, which is an example of the gap reducing portion having a planar arc shape, is provided at the front end of the tapered portion 82 of the second valve seat element 80, and the concave portion 84 constitutes a part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed in the valve main body 6. The curvature radius R of the concave portion 84 is set to a value substantially equal to the curvature radius of the valve seat 8 or the curvature radius of the valve shaft 34. As will be described later, a minute gap is formed between the valve seat 8 of the valve main body 6 and the outer peripheral surface of the valve shaft 34 in order to prevent seizing of the valve shaft 34 rotating inside the valve seat 8. The concave portion 84 of the second valve seat element 80 is mounted so as to protrude toward the valve shaft 34 side beyond the valve seat 8 of the valve main body 6 in a state where the second valve seat element 80 is attached to the valve main body 6, or is mounted so as to be in contact with the outer peripheral surface of the valve shaft 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve main body 6, which is a member facing the valve shaft 34, is set to a value that is partially reduced by the protruding amount of the concave portion 84 of the second valve seat element 80 compared with the rest of the valve seat 8. In this way, the gap G3 between the concave portion 84 of the second valve seat element 80 and the valve shaft 34 is set to a required value that is narrower (smaller) than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8 (G3<G2). It should be noted that the gap G3 between the concave portion 84 of the second valve seat element 80 and the valve shaft 34 may also be a state where the concave portion 84 of the valve seat element 80 is in contact with the valve shaft 34, that is, a state with no gap (gap G3=0).

[0094] However, when the concave portion 84 of the second valve seat element 80 is in contact with the valve shaft 34, when the valve shaft 34 is driven to rotate, the driving torque of the valve shaft 34 may increase due to the contact resistance of the concave portion 84. Therefore, the degree of contact between the concave portion 84 of the second valve seat element 70 and the valve shaft 34 is adjusted in consideration of the torque of the valve shaft 34 at the initial stage. That is, the adjustment is made to such a degree that the driving torque of the valve shaft 34 does not increase, or even if it increases, the increase amount is small and does not hinder the rotation of the valve shaft 34.

[0095] As Figure 3 and Figure 4As shown, the second flow path forming member 25 is formed into a cylindrical shape from a metal such as SUS or a synthetic resin such as polyimide (PI) resin. Regardless of the positional change of the second valve seat element 80, the second flow path forming member 25 has a second flow outlet 17 internally formed, communicating with the second valve port 18. Approximately half of the second flow path forming member 25 located on the side of the second valve seat element 80 is formed into a thin-walled cylindrical portion 25a with a relatively thin-walled cylindrical shape. In addition, approximately half of the second flow path forming member 25 located on the side opposite to the second valve seat element 80 is formed into a thick-walled cylindrical portion 25b with a thicker cylindrical shape compared to the thin-walled cylindrical portion. The inner surface of the second flow path forming member 25 is formed into a cylindrical shape. On the outer periphery of the second flow path forming member 25, between the thin-walled cylindrical portion 25a and the thick-walled cylindrical portion 25b, an annular flange portion 25c that is formed to be relatively thick towards the radial direction outward is provided. The outer peripheral end of the flange 25c is configured to movably contact the inner peripheral surface of the recess 85.

[0096] A second wave-shaped washer (wave-shaped washer) 26, serving as an example of an elastic member, is provided on the outer side of the cylindrical portion 81 of the second valve seat element 80. This second wave-shaped washer (wave-shaped washer) 26 allows the second valve seat element 80 to move in directions approaching or away from the valve shaft 34, and pushes the second valve seat element 80 in the direction of contact with the valve shaft 34. As shown in FIG. 7, the second wave-shaped washer 26 is made of stainless steel, iron, or phosphor bronze, and its front projection shape is formed as an annular shape with a desired width. Furthermore, the side surface shape of the second wave-shaped washer 26 is formed as a wave shape, allowing it to elastically deform along its thickness direction. The elastic modulus of the second wave-shaped washer 26 is determined by its thickness, material, or the number of waves. The same wave-shaped washer as the first wave-shaped washer 16 is used as the second wave-shaped washer 26.

[0097] Furthermore, a second adjusting ring 87, serving as an example of an adjusting component, is disposed on the outer side of the second waveform washer 26. This second adjusting ring 87 adjusts the gap G3 between the valve shaft 34 and the recess 84 of the second valve seat element 80 via the second waveform washer 26. Figure 8 As shown, the second adjusting ring 87 is made of heat-resistant synthetic resin or metal, and is a cylindrical component with an external thread 87a formed on its outer circumferential surface and a relatively short length. On the outer end face of the second adjusting ring 87, grooves 87b are provided at 180-degree opposite positions. These grooves 87b are used to engage a clamp (not shown) for adjusting the tightening amount when the second adjusting ring 87 is fastened to the internal thread 88 provided in the valve body 6, thereby causing the second adjusting ring 87 to rotate.

[0098] like Figure 3As shown, a second internal thread portion 88 for mounting the second adjusting ring 87 is provided in the valve body 6. A short cylindrical portion 89 with an outer diameter approximately equal to that of the second adjusting ring 87 is provided at the open end of the valve body 6. Furthermore, a machining cylindrical portion 85d with an inner diameter larger than the second internal thread portion 88 is provided between the second internal thread portion 88 and the cylindrical portion 85c of the valve body 6, in order to enable machining of the second internal thread portion 88 within the required length range.

[0099] The second adjusting ring 87 adjusts the amount by which it pushes the second valve seat element 80 inward via the second wave washer 26 by adjusting the amount of screwing in relative to the internal thread 88 of the valve body 6. When the screwing in amount of the second adjusting ring 87 is increased, such as... Figure 6 As shown, the second valve seat element 80 is pressed by the second adjusting ring 87 across the second wave washer 26, and the recess 84 protrudes from the inner circumferential surface of the valve seat 8 and moves towards the valve shaft 34, reducing the gap G3 between the recess 84 and the valve shaft 34. Furthermore, if the screwing amount of the second adjusting ring 87 is preset to a smaller amount, the distance the second valve seat element 80 is pushed by the second adjusting ring 87 is reduced, and when positioned away from the valve shaft 34, the gap G3 between the recess 84 of the second valve seat element 80 and the valve shaft 34 relatively increases. The pitch of the external thread 87a of the second adjusting ring 87 and the internal thread 88 of the valve body 6 are set to be small, enabling fine adjustment of the protrusion amount of the second valve seat element 80.

[0100] like Figure 2 As shown, on another side of the valve body 6, a second flange member 19, as an example of a connecting component, is installed via four hexagon socket head cap screws 20 for connecting to a piping (not shown) that allows fluid to flow out. The second flange member 19 is formed of a metal such as SUS, similar to the first flange member 10. The second flange member 19 has: a flange portion 21 with a side rectangular shape identical to the side shape of the valve body 6; an insertion portion 22 protruding from the inner side of the flange portion 21 in a cylindrical shape; and a piping connection portion 23 protruding from the outer side of the flange portion 21 in a generally cylindrical shape with thick walls, for connecting to a piping (not shown). Figure 2As shown, the flange portion 21 of the second flange member 19 is sealed to the valve body 6 by an O-ring seal 21a. An annular groove 21b for receiving the O-ring seal 21a is provided on the inner circumferential surface of the flange portion 21 of the second flange member 19. The inner circumference of the pipe connection portion 23 is, for example, configured to have a tapered internal thread (Rc1 / 2) with a diameter of approximately 21 mm or an internal thread with a diameter of approximately 0.58 inches. It should be noted that the shape of the pipe connection portion 23 is similar to that of the pipe connection portion 14, and is not limited to a tapered internal thread or a threaded internal thread; it can also be a pipe fitting for mounting a pipe, as long as fluid can flow out from the second outlet 17. The O-ring seal 21a is the same as the O-ring seal 13a.

[0101] Here, as a fluid (coolant), for example, fluorine-based inactive liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) and Novec (registered trademark) (manufactured by 3M) are used, which are applicable in a temperature range of approximately -85 to +120°C and a pressure of 0 to 1 MPa.

[0102] In addition, such as Figure 2 As shown, a circular inlet 26 is provided on the lower end face of the valve body 6, serving as a third valve port for fluid inflow. On the lower end face of the valve body 6, a third flange member 27, as an example of a connecting component, is installed via four hexagon socket head cap screws 28 for connecting to a pipe (not shown) for fluid inflow. At the lower end of the inlet 26, a cylindrical portion 26a with an inner diameter larger than that of the inlet 26 is provided for mounting the third flange member 27. The third flange member 27 has: a flange portion 29 formed with a rectangular bottom surface; and an insertion portion 30 (see reference) that protrudes shortly from the inner surface of the flange portion 29 and is cylindrical in shape. Figure 2 The valve body 6 is sealed by an O-ring 29a between the flange portion 29 and the valve body 6. A groove 29b for receiving the O-ring 29a is provided on the inner circumferential surface of the flange portion 29 of the third flange member 27. The inner circumference of the pipe connection portion 31 is, for example, a tapered internal thread (Rc1 / 2) or an internal thread with a diameter of approximately 0.58 inches. It should be noted that the shape of the pipe connection portion 31 is not limited to a tapered internal thread or a regular internal thread; it can also be a pipe fitting for mounting pipes, as long as fluid can flow in from the inlet 26. The O-ring 29a is the same as the O-ring 13a.

[0103] like Figure 3As shown, a valve seat 8 is provided at the center of the valve body 6. This valve seat 8 is provided with a first valve port 9 and a second valve port 18 with a rectangular cross-section by mounting a first valve seat element 70 and a second valve seat element 80. The valve seat 8 is formed by a space that is cylindrical in shape corresponding to the shape of the valve core described later. In addition, a part of the valve seat 8 is formed by the first valve seat element 70 and the second valve seat element 80. The cylindrical valve seat 8 is provided to penetrate the upper end face of the valve body 6. As shown in FIG9, the first valve port 9 and the second valve port 18 provided on the valve body 6 are symmetrically arranged with respect to the central axis (rotation axis) C of the cylindrical valve seat 8. To further explain, the first valve port 9 and the second valve port 18 are arranged orthogonally to the cylindrical valve seat 8, and one end edge of the first valve port 9 is open at a position facing the other end edge of the second valve port 18 across the central axis C (a position 180 degrees apart). Additionally, the other end edge of the first valve port 9 opens at a position facing the end edge of the second valve port 18 across the central axis C (a position 180 degrees apart). It should be noted that, for ease of explanation, the illustration of the gap between the valve seat 8 and the valve shaft 34 is omitted in Figure 9.

[0104] In addition, such as Figure 2 As shown, the first valve port 9 and the second valve port 18, as described above, are formed by mounting the first valve seat element 70 and the second valve seat element 80 on the valve body 6, and are formed with a rectangular cross-section or a square cross-section. The length of one side of the first valve port 9 and the second valve port 18 is set to be smaller than the diameter of the first outlet 7 and the second outlet 17, and are formed into a rectangular cylindrical shape with a rectangular cross-section that is inscribed inside the first outlet 7 and the second outlet 17.

[0105] As shown in Figure 9, the valve shaft 34, which is an example of a valve core, is formed from a metal such as SUS and has a generally cylindrical shape. The valve shaft 34 generally integrally includes: a valve core portion 35 that functions as a valve core; shaft support portions 36 and 37 respectively provided above and below the valve core portion 35 and supporting the valve shaft 34 to rotate freely; a sealing portion 38 composed of the same part as the upper shaft support portion 36; and a connecting portion 39 provided on the upper part of the sealing portion 38.

[0106] The upper and lower shaft support portions 36 and 37 are each formed into a cylindrical shape with an outer diameter smaller than that of the valve core portion 35. The outer diameters of the upper and lower shaft support portions 36 and 37 are set to the same or different values. Figure 2As shown, the lower shaft support 37 is rotatably supported on the lower end of the valve seat 8 provided on the valve body 6 via a bearing 41, which is a bearing component. An annular support 42 is provided on the lower part of the valve seat 8 to support the bearing 41. The bearing 41, the support 42, and the inlet 26 are set to have approximately the same inner diameter, which is configured so that the temperature control fluid flows into the interior of the valve core 35 with almost no resistance.

[0107] In addition, such as Figure 2 As shown in Figure 9(b), the valve core 35 is formed into a cylindrical shape with an opening 44 that is approximately semi-cylindrical in shape. The opening 44 has an opening height H2 that is lower than the opening height H1 of the first valve port 9 and the second valve port 18. The valve actuation part 45, which has the opening 44 of the valve core 35, is formed into a semi-cylindrical shape (approximately semi-cylindrical in the cylindrical part excluding the opening 44) with a predetermined central angle α (e.g., 180 degrees). The valve actuation part 45 is rotatably configured within the valve seat 8 and with a small gap on the inner circumferential surface of the valve seat 8 to prevent metal from seizing together, so that while switching the first valve port 9 from a closed state to an open state, including the valve core 35 located above and below the opening 44, the second valve port 18 is switched from an open state to a closed state in the opposite direction. As shown in Figure 9, the upper and lower valve shaft portions 46 and 47, which are arranged above and below the valve actuation part 45, are formed into cylindrical shapes with the same outer diameter as the valve actuation part 45, and can rotate freely with a small gap between them and the inner circumferential surface of the valve seat 8. Inside the valve actuation part 45 and the upper and lower valve shaft portions 46 and 47, a cylindrical space 48 is provided with a through-hole extending towards the lower end.

[0108] Furthermore, the cross-sectional shape of the two end faces 45a and 45b of the valve actuating part 45 along the circumferential direction (rotation direction) in the direction intersecting (orthogonal) with its central axis C is formed into a planar shape. To further explain, as shown in FIG9, the cross-sectional shape of the two end faces 45a and 45b of the valve actuating part 45 along the circumferential direction, intersecting with the rotation axis C, is formed into a planar shape facing the opening 44. The wall thickness of the two end faces 45a and 45b is, for example, set to a value equal to the thickness T of the valve actuating part 45.

[0109] The cross-sectional shape of the two ends 45a and 45b of the valve actuating part 45 along the circumferential direction, which intersect the rotation axis C, is not limited to a planar shape. The two end faces 45a and 45b along the circumferential direction (rotation direction) can also be formed into curved shapes.

[0110] As shown in Figure 10, when the valve shaft 34 is rotated to open and close the first valve port 9 and the second valve port 18, the two circumferential ends 45a and 45b of the valve actuating part 45 move (rotate) in the flow of fluid by protruding or retracting from the circumferential ends of the first valve port 9 and the second valve port 18, causing the first valve port 9 and the second valve port 18 to shift from an open state to a closed state or from a closed state to an open state. At this time, in order to make the opening area of ​​the first valve port 9 and the second valve port 18 change linearly (straight-line) with respect to the rotation angle of the valve shaft 34, the two circumferential ends 45a and 45b of the valve actuating part 45 are preferably formed into a planar shape.

[0111] like Figure 2 As shown, the sealing part 4 seals (closes) the valve shaft 34 in a liquid-tight state, allowing the valve shaft 34 to rotate relative to the valve body 6. The sealing part 4 includes: the valve body 6; the valve shaft 34; an omnidirectional seal 160, 170, which is an example of a sealing member, disposed between the valve body 6 and the valve shaft 34 and sealing the two in a liquid-tight manner, exerting force in the opening direction by a metal spring member, having a generally U-shaped cross section and being made of synthetic resin; and a bearing member 180 that supports the valve shaft 34 so that it can rotate relative to the valve body 6.

[0112] like Figure 2 As shown, a cylindrical support recess 51 is provided at the upper end of the valve body 6 to support the upper end of the valve shaft 34 so that it can rotate. At the upper end of the support recess 51, a cylindrical portion 51b with a large inner diameter is formed via a tapered portion 51a. As described above, the upper shaft support portion 36 and the sealing portion 38 above the valve shaft 34 are rotatably and liquid-tightly supported in the support recess 51 via a bearing 180, which is an example of a bearing component, and omnidirectional seals 160 and 170.

[0113] To further explain, in this embodiment 1, as follows: Figure 2 As shown, a bearing 180, a first omnidirectional seal 160, and a second omnidirectional seal 170 are disposed in the gap formed between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51.

[0114] The first omnidirectional seal 160 and the second omnidirectional seal 170 are constructed in the same manner. Here, the first omnidirectional seal 160 will be used as an example for explanation.

[0115] As shown in Figure 11, the first omnidirectional seal 160 is an annular (ring-shaped) component arranged throughout the entire circumference of a cylindrical gap, which is formed between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51. The omnidirectional seal 160 includes: a spring component 161 made of a metal such as stainless steel with a generally circular or elliptical cross-section; and a sealing component 162 made of a synthetic resin such as polytetrafluoroethylene (PTFE) with a generally U-shaped cross-section, which is subjected to force by the spring component 161 in the opening direction. The spring component 161 is formed from a metal such as stainless steel in a helical shape with a generally circular or elliptical cross-section. The elastic modulus of the spring component 161 is adjusted by appropriately setting its width, wall thickness, etc. Figure 12 As shown, the sealing member 162 includes: a base end portion 162a disposed along the sealing direction between the upper shaft support portion 36 and the sealing portion 38 and the support recess 51 of the valve shaft 34 to be sealed; and two lips 162b and 162c disposed parallel to each other from both ends of the base end portion 162a toward each other in the same direction along the circumferential surfaces of the two members to be sealed (outer axial direction of the first valve seat element 70). The opening of the omnidirectional seal 160 opens toward the interior of the valve seat 8 and is subjected to the pressure of the fluid present in the valve seat 8. The middle portions 162b' and 162c' of the lips 162b and 162c are formed into a curved shape in which their outer circumferential surfaces protrude outward in a radial direction from the middle toward the front end. The middle portions 162b' and 162c' of the lips 162b and 162c are in close contact with the outer peripheral surface of the upper shaft support portion 36 of the valve shaft 34 and the inner peripheral surface of the sealing portion 38 and the support recess 51 to improve the sealing degree.

[0116] It should be noted that the spring component 161 of the omnidirectional seal 160 is not limited to having a generally circular or generally elliptical cross-section, such as... Figure 13 As shown, it can also be formed with a cross-section that is approximately U-shaped. However, when the spring component 161 of the omnidirectional seal 160 is formed with a cross-section that is approximately circular or approximately elliptical, the rebound force during compression deformation is large, resulting in improved sealing performance. Therefore, it is preferable to form it with a cross-section that is approximately circular or approximately elliptical.

[0117] When the fluid pressure is not applied or the fluid pressure is relatively low, the omnidirectional seal 160 seals the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51 by the elastic restoring force of the spring member 161. On the other hand, when the fluid pressure is relatively high, the omnidirectional seal 160 seals the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51 by the elastic restoring force of the spring member 161 and the fluid pressure. Therefore, even if fluid flows in from the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51, the fluid is sealed by the omnidirectional seal 160 and will not leak to the outside from the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51.

[0118] The omnidirectional seal 160 is composed of a metal spring component 161 and a synthetic resin sealing component 162. The metal spring component 161 is self-evident, and the polytetrafluoroethylene (PTFE) resin constituting the sealing component 162 has excellent heat resistance, enabling it to be used for extended periods in extremely low temperature regions.

[0119] In this embodiment 1, the omnidirectional seal that seals the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51 is composed of a first omnidirectional seal 160 and a second omnidirectional seal 170, which are configured in a dual configuration with the bearing component sandwiched between them. Therefore, even if the lower first omnidirectional seal 160 wears over time, the upper second omnidirectional seal 170 can reliably provide a seal, thus reliably preventing fluid leakage to the outside.

[0120] The bearing component 180 is made of a synthetic resin such as polyimide (PI) resin, which has an elliptical or rectangular cross-section. The bearing component made of synthetic resin such as polyimide (PI) resin can maintain good sliding properties even at low temperatures of around -60°C.

[0121] It should be noted that the bearing component 180 is not limited to being disposed between the first omnidirectional seal 160 and the second omnidirectional seal 170, but may also be disposed on the outer side of the second omnidirectional seal 170 along the axial direction.

[0122] In addition, Figure 2 In the figure, reference numeral 181 indicates a thrust washer made of synthetic resins such as polyimide (PI).

[0123] In addition, Figure 2 as well as Figure 3In this configuration, the gaps between the first valve seat element 70 and the second valve seat element 80 and the first flow path forming member 15 and the second flow path forming member 25, as well as the gaps between the first flow path forming member 15 and the second flow path forming member 25 and the valve body 6, are sealed by omnidirectional seals 110 to 150. It should be noted that the omnidirectional seals 110 to 150 are formed using spring members with a generally U-shaped cross-section. Stepped portions 73 and 83 for accommodating the omnidirectional seals are provided in the first valve seat element 70 and the second valve seat element 80. Furthermore, the stepped portions 73 and 83 of the first valve seat element 70 and the second valve seat element 80 are closed by the first pressure plate 76 and the second pressure plate 86.

[0124] As shown in Figure 1, the connecting part 5 is disposed between the valve body 6, which has a built-in sealing part 4, and the actuator part 3. The connecting part 5 is used to connect the valve shaft 34 and a rotating shaft (not shown) that rotates the valve shaft 34 integrally.

[0125] As shown in Figure 1, the connecting part 5 includes: a spacer member 59 disposed between the sealing part 4 and the actuator part 3; a transition plate 60 fixed to the upper part of the spacer member 59; and a connecting part 62 that is housed in a cylindrical space 61 formed in a through state inside the spacer member 59 and the transition plate 60, and connects the valve shaft 34 to a rotation shaft (not shown). The spacer member 59 is formed from a synthetic resin such as polyimide (PI) resin and is a square tube with a planar shape approximately the same as a part of the valve body 6 and a relatively high height. The flange 59a of the spacer member 59 at its lower end is fixed to both the valve body 6 and the transition plate 60 by means of screws 59b or the like. In addition, as shown in Figure 1(c), the transition plate 60 is formed from a metal such as SUS into a planar polygonal plate. The transition plate 60 is fixedly mounted to the base 64 of the actuator part 3 by hexagonal socket head cap screws 63.

[0126] As shown in Figure 9(a), a groove 65 is provided at the upper end of the valve shaft 34, extending horizontally. The valve shaft 34 is connected and fixed to the connecting member 62 by engaging the protrusion 66 provided on the connecting member 62 with the groove 65. On the other hand, a groove 67 is provided at the upper end of the connecting member 62, extending horizontally. A rotating shaft (not shown) is connected and fixed to the connecting member 62 by engaging a protrusion (not shown) with the groove 67 provided on the connecting member 62. The spacer member 59 has an O-ring seal 190 at its upper end, which prevents liquid from reaching the actuator section 3 when liquid leaks from the sealing section 4.

[0127] As shown in Figure 1, the actuator unit 3 includes a base 64 formed as a planar rectangle. A housing 90, which is a cuboid-shaped box housing a drive member consisting of a stepper motor, encoder, etc., is fastened to the upper part of the base 64 by screws 91. The structure of the drive member of the actuator unit 3 is not limited as long as it can rotate a rotation axis (not shown) in a desired direction with a specified accuracy based on a control signal. The drive member consists of a stepper motor, a drive force transmission mechanism that transmits the rotational driving force of the stepper motor to the rotation axis via a drive force transmission member such as gears, and an angle sensor such as an encoder that detects the rotation angle of the rotation axis.

[0128] It should be noted that in Figure 1, reference numeral 92 indicates the stepper motor side cable, and 93 indicates the angle sensor side cable. These stepper motor side cables 92 and angle sensor side cables 93 are respectively connected to a control device (not shown) that controls the three-way valve type electric valve 1.

[0129] <Environmental Conditions>

[0130] As described above, the three-way electric valve 1 of this embodiment 1 is configured to handle fluids with temperatures, for example, around -85°C to +120°C, particularly around -85°C. Therefore, the ambient conditions surrounding the use of the three-way electric valve 1 preferably correspond to a temperature range of around -85°C to +120°C. That is, when a fluid at around -85°C flows through the three-way electric valve 1, the valve body 6 itself reaches the same temperature as the fluid at around -85°C. As a result, in environments where the conditions for using the three-way electric valve 1 include moisture in the air (i.e., humidity), it can be assumed that moisture in the air will adhere to the three-way electric valve 1 and freeze, becoming a major cause of malfunction in the three-way electric valve 1.

[0131] Therefore, in this embodiment 1, as the environmental conditions for using the three-way valve type electric valve 1, the nitrogen (N) 2- In an environment with air exchange, the ambient humidity (relative humidity) is preferably below 0.10%, and more preferably around 0.01%.

[0132] <Action of a three-way electric valve>

[0133] In the three-way valve type electric valve 1 of this embodiment 1, when a low-temperature fluid of about -85°C is passed through, the flow rate of the fluid is controlled as follows.

[0134] like Figure 4As shown, during assembly or adjustment of the three-way electric valve 1, the first flange component 10 and the second flange component 19 are temporarily removed from the valve body 6, leaving the adjusting rings 77 and 87 exposed externally. In this state, the tightness of the adjusting rings 77 and 87 relative to the valve body 6 is adjusted using a clamp (not shown), as follows: Figure 6 As shown, the amount of protrusion of the first valve seat element 70 and the second valve seat element 80 relative to the valve seat 8 of the valve body 6 is changed. When the tightening amount of the adjusting rings 77 and 87 relative to the valve body 6 is increased, the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 protrude from the inner peripheral surface of the valve seat 8 of the valve body 6, and the gap G1 between the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 and the outer peripheral surface of the valve shaft 34 decreases until the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 contact the outer peripheral surface of the valve shaft 34. On the other hand, when the tightening amount of the adjusting rings 77 and 87 relative to the valve body 6 is reduced, the length of the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 protruding from the inner peripheral surface of the valve seat 8 of the valve body 6 is reduced, and the gap G1 between the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 and the outer peripheral surface of the valve shaft 34 is increased.

[0135] In this embodiment 1, for example, the gap G1 between the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 and the outer peripheral surface of the valve shaft 34 is set to be less than 10 μm. However, the gap G1 between the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 and the outer peripheral surface of the valve shaft 34 is not limited to this value. It can also be a value smaller than this value, for example, gap G1 = 0 μm (contact state), or it can be set to 10 μm or more.

[0136] As shown in Figure 1, in the three-way valve type electric valve 1, fluid flows in through the third flange member 27 and through a pipe (not shown), and flows out through the first flange member 10 and the second flange member 19 and through a pipe (not shown). Furthermore, as shown in Figure 10(a), the three-way valve type electric valve 1, for example, in its initial state before operation, is in a state where the valve actuation part 45 of the valve shaft 34 closes the first valve port 9 (fully closed) while simultaneously opening the second valve port 18 (fully open).

[0137] like Figure 2As shown, if the stepper motor (not shown) provided in the actuator section 3 is rotated by a predetermined amount in the three-way valve type electric valve 1, then the rotating shaft (not shown) is rotated in accordance with the rotation amount of the stepper motor. In the three-way valve type electric valve 1, if the rotating shaft is rotated, the valve shaft 34, which is connected to and fixed to the rotating shaft, rotates by the same angle as the rotation amount (rotation angle) of the rotating shaft. Along with the rotation of the valve shaft 34, the valve actuation section 45 rotates inside the valve seat 8. As shown in FIG14(a), the circumferential end 45a of the valve actuation section 45 gradually opens the first valve port 9, and the fluid flowing in from the inlet 26 flows into the interior of the valve seat 8 and flows out from the first housing component 10 via the first outlet 7.

[0138] At this time, as shown in FIG14(a), the other end 45b of the valve actuation part 45 along the circumferential direction opens the second valve port 18. Therefore, the fluid flowing in from the inlet 27 flows into the interior of the valve seat 8, is distributed according to the amount of rotation of the valve shaft 34, and flows out from the second housing part 19 to the outside via the second outlet 17.

[0139] As shown in Figure 14(a), in the three-way valve type electric valve 1, when the valve shaft 34 is rotated and the circumferential end 45a of the valve actuation part 45 gradually opens the first valve port 9, the fluid is supplied to the outside through the valve seat 8 and the interior of the valve shaft 34 via the first valve port 9 and the second valve port 18 and via the first flow outlet 9 and the second flow outlet 18.

[0140] Furthermore, since the two ends 45a and 45b of the valve actuation unit 45 along the circumferential direction are formed with curved or planar cross-sections, the three-way valve type electric valve 1 can linearly (straight-line) change the opening area of ​​the first valve port 9 and the second valve port 18 relative to the rotation angle of the valve shaft 34. Additionally, it can be assumed that the fluid flow restricted by the two ends 45a and 45b of the valve actuation unit 45 flows in a near-laminar state, and the fluid distribution ratio (flow rate) can be controlled with high precision based on the opening area of ​​the first valve port 9 and the second valve port 18.

[0141] In the three-way valve type electric valve 1 of this embodiment, as described above, initially, the valve actuation part 45, which becomes the valve shaft 34, closes the first valve port 9 (fully closed) while opening the second valve port 18 (fully open).

[0142] At this time, when the valve actuation part 45 of the valve shaft 34 closes (fully closes) the first valve port 9 of the three-way valve type electric valve 1, the fluid flow rate should ideally be zero.

[0143] However, as Figure 6As shown, in the three-way electric valve 1, the valve shaft 34 is rotatably configured relative to the inner circumferential surface of the valve seat 8 to prevent metal-to-metal seizing, such that there is a small gap between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8, creating a non-contact state. As a result, a small gap G2 is formed between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8. Therefore, even when the valve actuation part 45 of the valve shaft 34 closes (fully closes) the first valve port 9, the fluid flow rate does not become zero; the fluid flows in a small amount towards the second valve port 18 through the small gap G2 between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8.

[0144] However, as Figure 6 As shown, in the three-way valve type electric valve 1 of this embodiment, the first valve seat element 70 and the second valve seat element 80 are provided with recesses 74 and 84. The recesses 74 and 84 protrude from the inner circumferential surface of the valve seat 8 to the valve shaft 34 side, partially reducing the gap G1 between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8.

[0145] Therefore, in the three-way electric valve 1, even if the valve shaft 34 is rotatably configured relative to the inner circumferential surface of the valve seat 8 to prevent metal from seizing each other, so that there is a small gap between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8 to achieve a non-contact state, the flow of fluid from the first valve port 9 into the small gap G2 between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8 will be greatly restricted and suppressed by the area where the gap between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8 is partially reduced, i.e., the gap G1.

[0146] Therefore, in the three-way valve type electric valve 1, compared with a three-way valve type electric valve that does not have recesses 74, 84 provided in a manner that partially reduces the gap between the valve shaft 34 and the first valve seat element 70 and the second valve seat element 80 facing the valve shaft 34, the leakage of fluid when the three-way valve type electric valve 1 is fully closed can be significantly suppressed.

[0147] Preferably, the three-way valve type electric valve 1 of this embodiment can significantly reduce the gaps G1 and G2 by making the recesses 74 and 84 of the first valve seat element 70 and the second valve seat element 80 contact the outer peripheral surface of the valve shaft 34, and the leakage of fluid when the three-way valve type electric valve 1 is fully closed is greatly suppressed.

[0148] Similarly, when the valve actuation part 45 of the valve shaft 34 closes (fully closes) the second valve port 18, the three-way valve type electric valve 1 can also significantly suppress the leakage of fluid from the second valve port 18 to the other side, the first valve port 9.

[0149] Furthermore, in this embodiment 1, as Figure 3As shown, on the surfaces 70a and 80a of the first valve seat element 70 and the second valve seat element 80 opposite to the valve shaft 34, a first pressure-acting part 94 and a second pressure-acting part 96 are provided, which exert fluid pressure through a small gap between the outer peripheral surface of the valve shaft 34 and the inner peripheral surface of the valve seat 8. Therefore, as shown in FIG10(a), in the three-way valve type electric valve 1, near the opening degree of 0% (i.e., when the first valve port 9 is fully closed) and near the opening degree of 100% (i.e., when the first valve port 9 is fully open), if the first valve port 9 and the second valve port 18 are close to being fully closed, the amount of fluid flowing out from the first valve port 9 and the second valve port 18 is greatly reduced. Accompanyingly, the pressure of the fluid flowing out of the valve ports of the three-way valve type electric valve 1 in the near-fully closed state decreases. Therefore, for example, when the opening degree of 0% (i.e., when the first valve port 9 is fully closed), fluid with a pressure of about 700 kPa flows in from the inlet 26 and flows out from the second valve port 18 at a pressure of approximately 700 kPa. At this point, on the first valve port 9 side, which is in a near-fully closed state, the pressure on the outlet side drops to approximately 100 kPa. As a result, a pressure difference of approximately 600 kPa is generated between the second valve port 18 and the first valve port 9.

[0150] Therefore, in the three-way electric valve 1 without any countermeasures, due to the pressure difference between the second valve port 18 and the first valve port 9, the valve shaft 34 moves (displaces) towards the first valve port 9, where the pressure is relatively lower, and the valve shaft 34 becomes contacted with the bearing 41 on only one side. Therefore, the driving torque increases when rotating the valve shaft 34 in the direction of closing it, which may lead to malfunction.

[0151] In contrast, in the three-way valve type electric valve 1 of this embodiment, such as Figure 15As shown, on the side of the first valve seat element 70 and the second valve seat element 80 opposite to the valve shaft 34, a first pressure-acting part 94 and a second pressure-acting part 96 are provided, so that the pressure of the fluid leaking through a small gap between the outer peripheral surface of the valve shaft 34 and the inner peripheral surface of the valve seat 8 acts on the first valve seat element 70 and the second valve seat element 80. Therefore, in the three-way valve type electric valve 1 of this embodiment, even when a pressure difference is generated between the second valve port 18 and the first valve port 9, the pressure of the fluid on the side with relatively higher pressure acts on the first pressure-acting part 94 and the second pressure-acting part 96 through the small gap between the outer peripheral surface of the valve shaft 34 and the inner peripheral surface of the valve seat 8. As a result, the first valve seat element 70, on the side with relatively lower pressure of about 100 kPa, acts to return the valve shaft 34 to the appropriate position by the pressure of the fluid on the side with relatively higher pressure of about 100 kPa acting on the first pressure-acting part 94. Therefore, in the three-way valve type electric valve 1 of this embodiment, it is possible to prevent or suppress the movement (displacement) of the valve shaft 34 toward the first valve port 9 where the pressure is relatively low due to the pressure difference between the second valve port 18 and the first valve port 9, to maintain the state in which the valve shaft 34 is smoothly supported by the bearing 41, and to prevent or suppress the increase of the driving torque when rotating the valve shaft 34 in the direction of closing the valve shaft 34.

[0152] In addition, in the three-way valve type electric valve 1 of this embodiment, the same action is performed when the first valve port 9 is fully open, that is, when the second valve port 18 is close to the fully closed state, so as to prevent or suppress the increase of driving torque when rotating the valve shaft 34.

[0153] In the three-way valve type electric valve 1 of this embodiment 1, the fluid (coolant) is, for example, a fluorine-based non-active liquid such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) that is applicable in a temperature range of approximately -85 to +120°C and a pressure of 0 to 1 MPa.

[0154] When the three-way electric valve 1 switches the outflow of fluid at around -85°C, the valve body 6, which supplies fluid flow, becomes at around -85°C.

[0155] To seal (tighten) the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51, the three-way electric valve 1 uses a first omnidirectional seal 160 and a second omnidirectional seal 170. Furthermore, the first omnidirectional seal 160 and the second omnidirectional seal 170 are each configured to open towards the interior of the valve seat 8. The first omnidirectional seal 160 is composed of a metal spring member 161 and a synthetic resin sealing member 162. The metal spring member 161 is self-explanatory, and the polytetrafluoroethylene (PTFE) synthetic resin constituting the sealing member 162 has excellent heat resistance, allowing for long-term use in extremely low temperature regions. It should be noted that the second omnidirectional seal 170 is the same.

[0156] Therefore, in order to seal (tighten) the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51, the three-way valve type electric valve 1 of this embodiment uses a first omnidirectional seal 160 and a second omnidirectional seal 170, which are made of synthetic resin and have a roughly U-shaped cross section that applies force in the opening direction by a metal spring member. Therefore, compared to the case where an O-ring is used to seal the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51, the sealing performance relative to cryogenic fluids at approximately -85°C can be improved.

[0157] That is, by using the first omnidirectional seal 160 and the second omnidirectional seal 170 to seal the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51, high sealing performance can be achieved even for cryogenic fluids at around -85°C. Furthermore, the first omnidirectional seal 160 and the second omnidirectional seal 170 have a relatively large contact area in the gap between the upper shaft support portion 36 and the sealing portion 38 of the valve shaft 34 and the support recess 51, which also contributes to high sealing performance.

[0158] [Implementation Method 2]

[0159] Figure 16 This refers to a three-way valve-type electric valve, which is an example of a flow control valve according to Embodiment 2 of the present invention.

[0160] The three-way valve type electric valve 1 of this embodiment 2 is not configured to divide the same fluid into two parts, but rather to be a three-way valve type electric valve 1 used for mixing two different fluids.

[0161] like Figure 16As shown, the three-way electric valve 1 has a first inlet 7 for a cryogenic fluid to flow into it and a first valve port 9 with a rectangular cross-section that communicates with a valve seat 8 formed by a cylindrical space on one side of the valve body 6. In this embodiment, the first outlet 7 and the first valve port 9 are not directly provided on the valve body 6, but rather the first inlet 17 and the first valve port 9 are provided by installing a first valve seat element 70, which is an example of a valve port forming member, and a first flow path forming member 15, which is formed with the first inlet 7, on the valve body 6.

[0162] Furthermore, the three-way electric valve 1 has a second inlet 17 for the inflow of a high-temperature side fluid (which is the second fluid) and a second valve port 18 with a rectangular cross-section that communicates with a valve seat 8, which is a cylindrical space, on the other side of the valve body 6. In this embodiment, the second outlet 17 and the second valve port 18 are not directly provided on the valve body 6. Instead, the second valve seat element 80, which forms the second valve port 18, and the second flow path forming member 25, which forms the second outlet 17, are installed on the valve body 6, thereby providing the second outlet 17 and the second valve port 18.

[0163] In addition, the three-way valve type electric valve 1 has an outlet 26 on the bottom surface of the valve body 6 for the flow of temperature control fluid, which is a mixture of the first fluid and the second fluid mixed inside the valve body 6.

[0164] Here, the cryogenic fluid (first fluid) and the high-temperature fluid (second fluid) are fluids used for temperature control. The fluid with the relatively lower temperature is called the cryogenic fluid, and the fluid with the relatively higher temperature is called the high-temperature fluid. Therefore, cryogenic fluid and high-temperature fluid are relative terms, and do not refer to cryogenic fluids with absolutely low temperatures and high-temperature fluids with absolutely high temperatures. Examples of cryogenic and high-temperature fluids include, for example, fluorine-based inactive liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) and Novec (registered trademark) (manufactured by 3M) used in a temperature range of approximately -85 to +120°C and a pressure of 0–1 MPa.

[0165] The other structures and functions are the same as in Embodiment 1 above, therefore, their descriptions are omitted.

[0166] [Implementation Method 3]

[0167] Figure 17 This refers to a three-way valve-type electric valve, which is an example of a flow control valve according to Embodiment 3 of the present invention.

[0168] like Figure 17As shown, in this embodiment 3, the three-way valve type electric valve 1 does not place the bearing component 180 between the first omnidirectional seal 160 and the second omnidirectional seal 170 in the gap between the upper shaft support portion 36 and the sealing portion 38 and the support recess 51 of the valve shaft 34, but instead places the bearing component 180 on the upper part of the first omnidirectional seal 160 and the second omnidirectional seal 170 along the axial direction.

[0169] In this embodiment 3, the three-way valve type electric valve 1 is configured with the first omnidirectional seal 160 and the second omnidirectional seal 170 connected in series, thus achieving a higher sealing effect.

[0170] The other structures and functions are the same as in Embodiment 1 above, therefore, their descriptions are omitted.

[0171] [Example 1]

[0172] Figure 18 This is a conceptual diagram showing a constant temperature maintaining device (cooling device) for a flow control three-way valve applied according to Embodiment 1 of the present invention.

[0173] This cooling device 100 is used, for example, in a semiconductor manufacturing apparatus that includes plasma etching processes, to maintain the temperature of a semiconductor wafer or similar object, which is a temperature-controlled object W, at a certain temperature. If the semiconductor wafer or similar temperature-controlled object W is subjected to plasma etching processes, its temperature may rise due to plasma generation, discharge, or other similar events.

[0174] The cooling device 100 includes a platform-shaped temperature control unit 101, which is configured to contact the temperature control object W as an example of a temperature control component. The temperature control unit 101 has a temperature control flow path 102 inside, which is supplied with a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio.

[0175] A mixing component 111 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on / off valve 103. A low-temperature side thermostatic tank 104 is connected to one side of the mixing component 111. This low-temperature side thermostatic tank 104 stores a low-temperature fluid adjusted to a predetermined low-temperature side set temperature. Low-temperature side fluid is supplied from the low-temperature side thermostatic tank 104 to the three-way valve type electric valve 1 via a first pump 105. A high-temperature side thermostatic tank 106 is connected to the other side of the mixing component 111. This high-temperature side thermostatic tank 106 stores a high-temperature fluid adjusted to a predetermined high-temperature side set temperature. High-temperature side fluid is supplied from the high-temperature side thermostatic tank 106 to the three-way valve type electric valve 1 via a second pump 107. The mixing component 111 is connected to the temperature control flow path 102 of the temperature control unit 101 via the on / off valve 103.

[0176] In addition, a return pipe is provided on the outflow side of the temperature control flow path 102 of the temperature control unit 101, and is connected to the low-temperature side constant temperature bath 104 and the high-temperature side constant temperature bath 106 respectively via the flow control three-way valve 1 for distribution.

[0177] The cooling device 100 uses a three-way electric valve 1 to distribute the control fluid flowing through the temperature control flow path 102 of the temperature control unit 101 to the low-temperature side thermostatic bath 104 and the high-temperature side thermostatic bath 106 respectively. The three-way electric valve 1 controls the flow rate of the control fluid distributed to the low-temperature side thermostatic bath 104 and the high-temperature side thermostatic bath 106 by rotating the valve shaft 34 driven by the stepper motor 110.

[0178] As low-temperature and high-temperature fluids, for example, in a temperature range of approximately 0–1 MPa and -85–+120°C, fluorine-based inactive liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) and Novec (registered trademark) (manufactured by 3M) are used.

[0179] It should be noted that the mixing section 111, which mixes the low-temperature fluid supplied from the low-temperature thermostatic bath 104 by the first pump 105 and the high-temperature fluid supplied from the high-temperature thermostatic bath 106 by the second pump 107, uses a mixing component that appropriately mixes the flow rates of each low-temperature fluid and the high-temperature fluid after control. As described above, a three-way electric valve 1 for mixing can also be used as the mixing component.

[0180] [Example 2]

[0181] Figure 19 This is a conceptual diagram showing a temperature-maintaining device (cooling device) for a flow control three-way valve that applies Embodiment 2 of the present invention.

[0182] A three-way electric valve 1 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on / off valve 103. A low-temperature side thermostatic tank 104 is connected to the first flange 10 of the three-way electric valve 1, which stores a low-temperature fluid adjusted to a predetermined low-temperature side set temperature. Low-temperature side fluid is supplied to the three-way electric valve 1 from the low-temperature side thermostatic tank 104 via a first pump 105. A high-temperature side thermostatic tank 106 is connected to the second flange 19 of the three-way electric valve 1, which stores a high-temperature fluid adjusted to a predetermined high-temperature side set temperature. High-temperature side fluid is supplied to the three-way electric valve 1 from the high-temperature side thermostatic tank 106 via a second pump 107. The third flange 27 of the three-way electric valve 1 is connected to the temperature control flow path 102 of the temperature control unit 101 via the on / off valve 103.

[0183] In addition, a return pipe is provided on the outflow side of the temperature control flow path 102 of the temperature control unit 101, and is connected to the low-temperature side constant temperature bath 104 and the high-temperature side constant temperature bath 106 respectively.

[0184] The three-way electric valve 1 includes a stepper motor 108 that rotates and drives the valve shaft 34. Additionally, a temperature sensor 109 is provided in the temperature control unit 101 to detect the temperature of the temperature control unit 101. The temperature sensor 109 is connected to a control device (not shown), which controls the driving of the stepper motor 108 of the three-way electric valve 1.

[0185] like Figure 19 As shown, the cooling device 100 detects the temperature of the temperature control object W through the temperature sensor 109. Based on the detection result of the temperature sensor 109, the control device controls the rotation of the stepper motor 108 of the three-way valve type electric valve 1, thereby controlling the temperature of the temperature control object W to be equal to the predetermined set temperature.

[0186] The three-way electric valve 1 controls the mixing ratio of the low-temperature fluid supplied from the low-temperature side thermostat 104 by the first pump 105 and the high-temperature side fluid supplied from the high-temperature side thermostat 106 by the second pump 107 by the valve shaft 34 driven by the stepper motor 108. It also controls the temperature of the temperature control fluid, which is a mixture of the low-temperature side fluid and the high-temperature side fluid, supplied from the three-way electric valve 1 to the temperature control flow path 102 of the temperature control unit 101 via the on / off valve 103.

[0187] At this time, the three-way valve type electric valve 1 can control the mixing ratio of the low-temperature side fluid and the high-temperature side fluid with high precision according to the rotation angle of the valve shaft 34, and can fine-tune the temperature of the temperature control fluid. Therefore, the cooling device 100 using the three-way valve type electric valve 1 of this embodiment can control the temperature of the temperature control object W contacted by the temperature control unit 101 to the desired temperature by making the temperature control fluid, whose mixing ratio of the low-temperature side fluid and the high-temperature side fluid is adjusted to a specified temperature, flow in the temperature control flow path 102 of the temperature control unit 101.

[0188] As low-temperature and high-temperature fluids, for example, in a temperature range of approximately 0–1 MPa and -85–+120°C, fluorine-based inactive liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) and Novec (registered trademark) (manufactured by 3M) are used.

[0189] Industrial applicability

[0190] Three-way valves for flow control and temperature control devices that can improve the sealing performance of cryogenic fluids at around -85°C.

[0191] Explanation of reference numerals in the attached figures

[0192] 1. Three-way valve type electric valve

[0193] 2 valve parts

[0194] 3 Actuator Section

[0195] 4 Sealing section

[0196] 5 Connecting parts

[0197] 6 valve body

[0198] 7 First-class entrance

[0199] 8 valve seats

[0200] 9 First valve port

[0201] 10 First flange component

[0202] 11mm socket head cap screw

[0203] 12 flanges

[0204] 13 Insertion Section

[0205] 14 Piping Connections

[0206] 15 First flow path forming component

[0207] 16 First Wave Washer

[0208] 17 Second Stream Entrance

[0209] 18 Second valve port

[0210] 19 Second flange component

[0211] 20mm socket head cap screw

[0212] 21 Flange portion

[0213] 22 Insertion section

[0214] 23 Piping Connections

[0215] 25 Second flow path forming component

[0216] 34 valve shaft

[0217] 35 Valve Core

[0218] 45 valve actuation section

[0219] The two ends of 45a and 45b

[0220] 70, 80 First valve seat element and second valve seat element

[0221] 74, 84 concave parts

[0222] 160, 170 omnidirectional seals

Claims

1. A three-way valve for flow control, characterized in that, have: The valve body has a valve seat formed by a cylindrical space. The valve seat has a first valve port with a rectangular cross-section for fluid to flow out and a second valve port with a rectangular cross-section for fluid to flow out. It also has a first outlet and a second outlet that connect the first valve port and the second valve port to the outside, respectively. A cylindrical valve core is rotatably disposed within a valve seat of the valve body. The valve core switches the second valve port from the open state to the closed state while simultaneously switching the first valve port from the closed state to the open state. The cylindrical valve core has an opening. A driving component that drives the valve core to rotate; as well as A sealing member, which rotatably seals the end of the valve core on the drive member side relative to the valve body, is disposed in a cylindrical support recess, is subjected to force in the opening direction by a metal spring member, has a U-shaped cross-section, and is made of synthetic resin. The support recess supports the rotatable end of the valve core on the drive member side of the valve body. Multiple sealing members are arranged at the end of the valve core on the drive member side with an axial opening toward the interior of the valve seat, and a bearing member is arranged between the multiple sealing members to support the end of the valve core on the drive member side as a rotatable component.

2. A three-way valve for flow control, characterized in that, have: The valve body has a valve seat formed by a cylindrical space. The valve seat has a first valve port with a rectangular cross-section for the inflow of a first fluid and a second valve port with a rectangular cross-section for the inflow of a second fluid. It also has a first inlet and a second inlet that connect the first valve port and the second valve port to the outside, respectively. A cylindrical valve core is rotatably disposed within a valve seat of the valve body. The valve core switches the second valve port from the open state to the closed state while simultaneously switching the first valve port from the closed state to the open state. The cylindrical valve core has an opening. A driving component that drives the valve core to rotate; as well as A sealing member, which rotatably seals the end of the valve core on the drive member side relative to the valve body, is disposed in a cylindrical support recess, is subjected to force in the opening direction by a metal spring member, has a U-shaped cross-section, and is made of synthetic resin. The support recess supports the rotatable end of the valve core on the drive member side of the valve body. Multiple sealing members are arranged at the end of the valve core on the drive member side with an axial opening toward the interior of the valve seat, and a bearing member is arranged between the multiple sealing members to support the end of the valve core on the drive member side as a rotatable component.

3. The three-way valve for flow control as described in claim 1 or 2, characterized in that, The bearing components are configured to be in close contact with the plurality of sealing members.

4. A temperature control device, characterized in that, have: A temperature control component having a temperature control flow path for a temperature control fluid to flow through, the temperature control fluid being composed of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio; A first supply member supplies the cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side. A second supply component supplies the high-temperature side fluid at a predetermined second temperature that is adjusted to the high-temperature side. A mixing component, connected to the first supply component and the second supply component, mixes the low-temperature side fluid supplied from the first supply component and the high-temperature side fluid supplied from the second supply component and supplies them to the temperature control flow path; as well as A flow control valve controls the flow rate of the temperature control fluid flowing in the temperature control flow path and distributes it to the first supply member and the second supply member. The flow control valve is the three-way valve for flow control as described in claim 1 or 3.

5. A temperature control device, characterized in that, have: A temperature control component having a temperature control flow path for a temperature control fluid to flow through, the temperature control fluid being composed of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio; A first supply member supplies the cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side. A second supply component supplies the high-temperature side fluid at a predetermined second temperature that is adjusted to the high-temperature side. as well as A flow control valve, connected to the first supply member and the second supply member, adjusts the mixing ratio of the low-temperature fluid supplied from the first supply member and the high-temperature fluid supplied from the second supply member, and directs them into the temperature control flow path. The flow control valve is the three-way valve for flow control as described in claim 2 or 3.

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