An inner supporting clamp for dismounting a heat field insulation cylinder of a single crystal furnace

Abstract

The application discloses an inner supporting clamp for dismounting a heat field heat preservation cylinder of a single crystal furnace, relates to the technical field of single crystal silicon manufacturing, and can solve the problems in manually dismounting the heat preservation cylinder. The inner supporting clamp for dismounting the heat field heat preservation cylinder of the single crystal furnace comprises a limiting frame, at least two limiting arms arranged in a radial manner, a center rod assembly arranged perpendicularly to the limiting frame and having a telescopic length, and an inner supporting unit distributed in a circumferential direction of the center rod assembly and having at least two units. The inner supporting unit comprises a connecting rod assembly, the connecting rod assembly is rotationally connected with the limiting arm, and two ends of the connecting rod assembly are movably connected with the top of the center rod assembly and a clamping jaw unit respectively; the clamping jaw unit is movably connected with the limiting arm in a radial direction; when the center rod assembly is lengthened, the connecting rod assembly pushes the clamping jaw unit to move in the radial direction to a side away from the radial center of the limiting frame; and when the center rod assembly is shortened, the connecting rod assembly pulls the clamping jaw unit to move in the radial direction to a side close to the radial center of the limiting frame.

Description

Technical Field

[0001] This invention relates to the field of monocrystalline silicon manufacturing technology, and more specifically to an inner support clamp for disassembling the heat insulation cylinder of a monocrystalline furnace. Background Technology

[0002] In the photovoltaic monocrystalline silicon manufacturing industry, the complete cycle of producing monocrystalline silicon rods in a monocrystalline furnace includes processes such as material preparation, crystal pulling, shoulder formation, shoulder rotation, constant diameter growth, finishing, and furnace shutdown. After each furnace shutdown, the furnace needs to be disassembled and the hot zone cleaned to prepare for the next monocrystalline silicon pulling cycle. Hot zone components include curing felt, graphite electrodes, gas guide tubes, support rods, heaters, crucible supports, carbon-carbon crucibles, quartz crucibles, and insulation cylinders.

[0003] For example, the current disassembly process of the insulation cylinder in the hot zone of a single crystal furnace has the following drawbacks:

[0004] (1) The disassembly of the existing single crystal furnace hot zone requires two operators to lift the insulation cylinder, which is labor-intensive.

[0005] (2) The temperature is high when dismantling the furnace in the hot zone. Manual lifting can easily burn the dismantling personnel and cause safety accidents.

[0006] (3) Due to the compact structure of the thermal field, two people are prone to eccentricity when lifting the insulation cylinder, which may damage other thermal field components.

[0007] Therefore, in order to facilitate the disassembly of cylindrical components in the hot zone, such as insulation cylinders, and reduce the labor intensity of personnel, it is necessary to design an internal support clamp for disassembling insulation cylinders in the hot zone of a single crystal furnace, so as to automatically and stably disassemble the insulation cylinders from the hot zone of the single crystal furnace and solve one or more of the above problems.

[0008] Therefore, this application is hereby submitted. Summary of the Invention

[0009] The purpose of this application is to provide an internal support clamp for disassembling the thermal insulation cylinder of a single crystal furnace, so as to solve the problems that manual disassembly is inefficient, prone to safety accidents, and prone to damage to other thermal components in the current disassembly process of cylindrical components in the thermal zone of a single crystal furnace.

[0010] To solve the above-mentioned technical problems, the present invention adopts the following solution:

[0011] An inner support clamp for disassembling the thermal insulation cylinder of a single crystal furnace includes:

[0012] The limiting frame includes at least two limiting arms arranged radially.

[0013] The center rod assembly is perpendicular to the limit frame and its length is extendable;

[0014] Internal bracing units, distributed circumferentially along the central rod assembly and numbering at least two, include:

[0015] The linkage assembly is rotatably connected to the limit arm, and both ends of the linkage assembly are movably connected to the top of the center rod assembly and the gripper unit, respectively.

[0016] The gripper unit is movably connected to the limiting arm along the radial direction;

[0017] When the center rod assembly extends, the connecting rod assembly pushes the gripper unit to move in the radial direction away from the radial center of the limit frame;

[0018] When the center rod assembly is shortened, the connecting rod assembly pulls the gripper unit to move along the radial direction toward the side closer to the radial center of the limit frame.

[0019] The design concept of this application is as follows: By setting up a cooperating limiting frame, a central rod assembly, and an inner support unit, the gripper units of the limiting frame and the inner support unit can drive the central rod assembly to extend under the action of gravity. The extension of the central rod assembly allows the gripper unit to move away from the radial center of the limiting frame under the push of the connecting rod assembly until the gripper unit contacts and clamps the inner wall of the cylinder. In particular, after the gripper unit clamps the cylinder, when the gripper unit is in a static friction state with the inner wall of the cylinder, the weight of the cylinder is applied to the limiting frame through the gripper unit, which increases the gravity of the extended central rod assembly. This, in turn, increases the pressure of the connecting rod assembly pushing the gripper unit, which in turn increases the pressure of the gripper unit on the inner wall of the cylinder. This increases the static friction force after the gripper unit contacts the inner wall of the cylinder, thereby forming a self-clamping locking state of the cylinder due to its own weight. Moreover, the greater the weight of the cylinder, the greater the static friction force after the gripper unit clamps the inner wall of the cylinder, which can ensure the clamping stability of the gripper unit.

[0020] Preferably, it also includes a self-unlocking component that unlocks via a shortened center rod assembly. The self-unlocking component includes a hook seat disposed on the limit frame and a hook hinged to the link assembly. The self-unlocking component has two states:

[0021] State 1, locked state, at which time the hook is tilted and hooked on the hook seat, and the center rod assembly restricts the extension;

[0022] State 2, unlocked state: at this time, the hook and hook seat are unfastened, and the center rod assembly can extend and retract freely.

[0023] Preferably, the central rod assembly includes an inner rod vertically fixed to the limiting frame, and an outer rod sleeved on the inner rod and slidably connected to the inner rod. The inner rod is located at the center of the limiting frame, and the end of the outer rod away from the limiting frame is hinged to the end of the connecting rod assembly.

[0024] Preferably, the linkage assembly includes an opening / closing rod and a bent rod with its angle facing away from the central rod assembly; one end of the opening / closing rod is hinged to the end of the central rod assembly away from the limiting frame, and the other end of the opening / closing rod is rotatably connected to the bent rod; the angle of the bent rod is rotatably connected to the limiting arm, and the end of the bent rod away from the opening / closing rod is slidably connected to the gripper unit.

[0025] Preferably, the limiting arm includes a limiting rod and a limiting structure disposed on the limiting rod, wherein the limiting structure is located on the side of the limiting rod away from the central rod assembly;

[0026] The limiting rod and the limiting structure are respectively provided with a first transverse limiting hole and a second transverse limiting hole parallel to the radial direction of the limiting arm. The gripper unit is slidably connected to the first transverse limiting hole and the second transverse limiting hole along the radial direction of the limiting arm.

[0027] Preferably, the gripper unit includes a gripper support rod perpendicular to the limiting frame and a vertical limiting hole provided on the gripper support rod. The gripper support rod and the limiting arm are slidably connected along their radial direction. The end of the connecting rod assembly away from the top of the central rod assembly is slidably connected to the vertical limiting hole of the gripper support rod.

[0028] The gripper unit also includes a movable gripper movably connected to the gripper support rod. The movable gripper is located at the bottom of the limit frame away from the center rod assembly, and the side of the movable gripper away from the center of the limit frame is rough.

[0029] Preferably, the gripper unit further includes two gripper mounting plates arranged parallel to the limiting frame. The top and bottom of the movable gripper are rotatably connected to the two gripper mounting plates, and the movable gripper is provided with an anti-slip structure for increasing roughness. The side of the anti-slip structure away from the center of the limiting frame is a rough surface.

[0030] Preferably, the gripper unit has at least two movable grippers, and the two or more movable grippers are movably connected to the gripper support rod along the circumferential direction of the limiting frame.

[0031] Preferably, the gripper unit has two gripper supports, which are arranged in parallel and located on both sides of the limiting arm. The two gripper supports are slidably connected to the limiting arm along the radial direction of the limiting arm. Each gripper support has a vertical limiting hole. The end of the connecting rod assembly away from the top of the central rod assembly is slidably connected between the two gripper supports.

[0032] Preferably, the included angles between the limiting arms of the limiting frame are equal, and the shape of the limiting frame includes any one of the following: trident type, cross type, and star type.

[0033] The beneficial effects of this invention are:

[0034] This application replaces the current manual lifting and disassembly of the insulation cylinder with mechanical gripper disassembly, which can effectively improve production efficiency, reduce manual labor intensity, and save labor costs.

[0035] This application achieves adaptive clamping through gravity, and has the functions of self-centering and the gripper unit adapting to the cylinder wall, which is safe, stable and reliable.

[0036] This application can be used not only for disassembling the heat insulation cylinder of the hot zone of a single crystal furnace, but also for clamping other cylindrical hot zone components such as carbon-carbon crucibles, thus achieving a multi-purpose function. Attached Figure Description

[0037] Figure 1 This is a three-dimensional structural diagram of an example embodiment of the present invention;

[0038] Figure 2 This is a schematic diagram of the main view structure of an example embodiment of the present invention;

[0039] Figure 3 This is a top view of an example embodiment of the present invention.

[0040] Figure 4 This is a schematic front view of the internal support clamp during the descent of an example embodiment of the present invention.

[0041] Figure 5 This is a three-dimensional structural diagram of the inner support clamp descending during the use of an example embodiment of the present invention;

[0042] Figure 6 This is a schematic diagram of the main structure when the inner support clamp contacts the upper end face of the cylinder during the use of an example embodiment of the present invention;

[0043] Figure 7 This is a three-dimensional structural diagram showing the inner support clamp contacting the upper end face of the cylinder during the use of an example embodiment of the present invention;

[0044] Figure 8 This is a schematic diagram of the main structure after the inner support clamp continues to descend and the limit hook disengages during the use of an example embodiment of the present invention.

[0045] Figure 9 This is a three-dimensional structural diagram of the inner support clamp continuing to descend and the limit hook disengaging during the use of an example embodiment of the present invention.

[0046] Figure 10 This is a schematic diagram of the main structure when the inner support clamp rises and the jaws contact and tighten the inner wall of the cylinder during the use of an example embodiment of the present invention.

[0047] Figure 11 This is a three-dimensional structural diagram showing the gripper contacting and tightening the inner wall of the cylinder when the inner support clamp rises during the use of an example embodiment of the present invention.

[0048] Figure 12 This is a schematic diagram of the main structure of the internal support clamp lifting the cylinder after it is tightened during use in an example embodiment of the present invention;

[0049] Figure 13 This is a three-dimensional structural diagram showing how the inner support clamp lifts the cylinder after it is tightened during use in an example embodiment of the present invention.

[0050] Explanation of reference numerals in the attached figures:

[0051] 1-Center rod assembly, 11-Outer rod, 12-Inner rod, 2-Limiting arm, 21-Limiting rod, 211-First transverse limiting hole, 22-Limiting structure, 221-Second transverse limiting hole, 31-Connecting rod assembly, 311-Opening and closing rod, 312-Bending rod, 32-Gripper unit, 320-Vertical limiting hole, 321-Gripper support rod, 323-Gripper mounting plate, 324-Movable gripper, 4-Self-unlocking assembly, 41-Hook, 42-Hook seat, 5-Cylinder body. Detailed Implementation

[0052] The present invention will be further described in detail below with reference to the embodiments and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0053] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "longitudinal," "lateral," "horizontal," "inner," "outer," "front," "rear," "top," and "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0054] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "have," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0055] The present invention will now be described in detail with reference to the accompanying drawings and embodiments:

[0056] Reference Figures 1 to 3As shown, this embodiment provides an inner support clamp for disassembling the thermal insulation cylinder of a single crystal furnace, comprising:

[0057] The limiting frame includes at least two limiting arms 2 arranged radially;

[0058] The center rod assembly 1 is set perpendicular to the limit frame and its length is extendable;

[0059] Internal bracing units, distributed circumferentially along the central rod assembly 1 and numbering at least two, include:

[0060] Linkage assembly 31 is rotatably connected to limit arm 2, and both ends of linkage assembly 31 are movably connected to the top of center rod assembly 1 and gripper unit 32, respectively.

[0061] The gripper unit 32 is movably connected to the limiting arm 2 along the radial direction;

[0062] When the center rod assembly 1 is extended, the connecting rod assembly 31 pushes the gripper unit 32 to move in the radial direction away from the radial center of the limit frame;

[0063] When the center rod assembly 1 is shortened, the connecting rod assembly 31 pulls the gripper unit 32 to move along the radial direction toward the side closer to the radial center of the limit frame.

[0064] The design concept of this application is as follows: By setting up a cooperating limiting frame, a central rod assembly 1, and an inner support unit, the gripper unit 32 of the limiting frame and the inner support unit can drive the central rod assembly 1 to extend under the action of gravity. The extension of the central rod assembly 1 allows the gripper unit 32 to move away from the radial center of the limiting frame under the push of the connecting rod assembly 31, until the gripper unit 32 contacts and clamps the inner wall of the cylinder 5. In particular, after the gripper unit 32 clamps the cylinder 5, when the gripper unit 32 and the inner wall of the cylinder 5 are in a state of static friction, the cylinder... The weight of body 5 is applied to the limiting frame through the gripper unit 32, which increases the gravity of the center rod assembly 1, thereby increasing the pressure of the connecting rod assembly 31 pushing the gripper unit 32, which in turn increases the pressure of the gripper unit 32 on the inner wall of the cylinder 5, and thus increases the static friction force after the gripper unit 32 contacts the inner wall of the cylinder 5. This can form a self-supporting locking state of the cylinder 5 by gravity. Moreover, the greater the weight of the cylinder 5, the greater the static friction force after the gripper unit 32 supports the inner wall of the cylinder 5, which can ensure the clamping stability of the gripper unit 32.

[0065] In a preferred embodiment, a self-unlocking component 4 is also included, which is unlocked via a shortened central rod assembly 1. The self-unlocking component 4 includes a hook seat 42 disposed on the limiting frame and a hook 41 hinged to the connecting rod assembly 31. The self-unlocking component 4 has two states:

[0066] State 1, locked state, at which time the hook 41 is tilted and hooked on the hook seat 42, and the center rod assembly 1 restricts the extension;

[0067] State 2, unlocked state. At this time, hook 41 and hook seat 42 are unhooked, and the center rod assembly 1 can extend and retract freely.

[0068] In this embodiment, as Figure 1 As shown, in the locked state, the gravity of the limiting frame and the gripper unit 32 will drive the central rod assembly 1 to extend. Since the hook seat 42 is set on the limiting frame and the hook 41 is set on the connecting rod assembly 31 hinged to the central rod assembly 1, the hook 41 is tilted and hooked on the hook seat 42, which can limit the extension of the central rod assembly 1. When the central rod assembly 1 shortens, the end of the hook 41 away from the hook seat 42 will swing in the vertical direction under the action of gravity, thereby realizing the self-unlocking of the hook 41 and the hook seat 42 under the action of gravity. At this time, the central rod assembly 1 can extend and retract freely.

[0069] In this embodiment, as Figure 1 As shown, the hook 41 is hinged to the opening and closing rod 311 of the connecting rod assembly 31, and the hook seat 42 is set on the top of the limiting structure 22 of the limiting arm 2.

[0070] In a preferred embodiment, the central rod assembly 1 includes an inner rod 12 vertically fixed to the limiting frame, and an outer rod 11 sleeved on and slidably connected to the inner rod 12. The inner rod 12 is located at the center of the limiting frame, and the end of the outer rod 11 away from the limiting frame is hinged to the end of the connecting rod assembly 31. In this embodiment, both the outer rod 11 and the inner rod 12 of the central rod assembly 1 are square tubes. In some embodiments, they can be round tubes. The inner support units are uniformly arranged along the circumference of the central rod assembly 1.

[0071] In a preferred embodiment, the linkage assembly 31 includes an opening / closing rod 311 and a bent rod 312 with its angle facing away from the central rod assembly 1. One end of the opening / closing rod 311 is hinged to the end of the central rod assembly 1 away from the limiting frame, and the other end of the opening / closing rod 311 is rotatably connected to the bent rod 312. The angle of the bent rod 312 is rotatably connected to the limiting arm 2, and the end of the bent rod 312 away from the opening / closing rod 311 is slidably connected to the gripper unit 32. In this embodiment, the bent rod 312 is L-shaped, and each linkage assembly 31 has two L-shaped bent rods 312. The angles of both bent rods 312 are rotatably connected to the limiting structure 22 of the limiting arm 2, and the two bent rods 312 are respectively located on both sides of the limiting structure 22.

[0072] In a preferred embodiment, the limiting arm 2 includes a limiting rod 21 and a limiting structure 22 disposed on the limiting rod 21, the limiting structure 22 being located on the side of the limiting rod 21 away from the central rod assembly 1;

[0073] The limiting rod 21 and the limiting structure 22 are respectively provided with a first transverse limiting hole 211 and a second transverse limiting hole 221 parallel to the radial direction of the limiting arm 2. The gripper unit 32 is slidably connected to the first transverse limiting hole 211 and the second transverse limiting hole 221 along the radial direction of the limiting arm 2. In this embodiment, as shown... Figure 1 and Figure 2 As shown, the limiting structure 22 is door-shaped, the second lateral limiting hole 221 is located at the top of the door-shaped limiting structure 22, and the first lateral limiting hole 211 is located directly below the door-shaped limiting structure 22.

[0074] In a preferred embodiment, the gripper unit 32 includes a gripper support rod 321 arranged perpendicular to the limiting frame, and a vertical limiting hole 320 provided on the gripper support rod 321. The gripper support rod 321 is slidably connected to the limiting arm 2 along its radial direction, and one end of the connecting rod assembly 31 away from the top of the central rod assembly 1 is slidably connected to the vertical limiting hole 320 of the gripper support rod 321.

[0075] The gripper unit 32 also includes a movable gripper 324 movably connected to the gripper support rod 321. The movable gripper 324 is located at the bottom of the limiting frame away from the center rod assembly 1, and the side of the movable gripper 324 away from the center of the limiting frame is a rough surface. In this embodiment, the rough surface of the side of the movable gripper 324 away from the center of the limiting frame can increase the friction between the movable gripper 324 and the inner wall of the cylinder 5, ensuring the clamping stability after internal support. In this embodiment, as shown... Figure 1 and Figure 2 As shown, the bent rod 312 of the connecting rod assembly 31 is slidably connected to the vertical limiting hole 320 of the gripper support rod 321. When the connecting rod assembly 31 pushes the gripper support rod 321 to move away from the center of the limiting frame, the end of the bent rod 312 that is slidably connected to the vertical limiting hole 320 of the gripper support rod 321 will slide upward.

[0076] In a preferred embodiment, the gripper unit 32 further includes two gripper mounting plates 323 arranged parallel to the limiting frame. The top and bottom of the movable gripper 324 are rotatably connected to the two gripper mounting plates 323, respectively. The movable gripper 324 is provided with an anti-slip structure to increase roughness, and the side of the anti-slip structure away from the center of the limiting frame is a rough surface. In this embodiment, the anti-slip structure is hemp rope evenly wound around the movable gripper 324 circumferentially. In some embodiments, the anti-slip structure may also be an anti-slip silicone sleeve.

[0077] In a preferred embodiment, the gripper unit 32 has at least two movable grippers 324, and both or more movable grippers 324 are movably connected to the gripper support rod 321 along the circumferential direction of the limiting frame. In this embodiment, the number of movable grippers 324 is two, and the two movable grippers 324 have the same structure. In some embodiments, the gripper unit 32 may also have three or four movable grippers 324.

[0078] In a preferred embodiment, the gripper unit 32 has two gripper support rods 321, which are arranged in parallel and located on both sides of the limiting arm 2. The two gripper support rods 321 are slidably connected to the limiting arm 2 along the radial direction of the limiting arm 2. Each of the two gripper support rods 321 is provided with a vertical limiting hole 320. The end of the connecting rod assembly 31 away from the top of the central rod assembly 1 is slidably connected between the two gripper support rods 321.

[0079] In a preferred embodiment, the included angles between the limiting arms 2 of the limiting frame are equal, and the shape of the limiting frame includes any one of a three-pronged, cross-shaped, or star-shaped design. In this embodiment, as shown... Figures 1 to 3 As shown, the limiting frame is cross-shaped. In some embodiments, the limiting frame can also be trident-shaped or star-shaped. In some embodiments, the limiting arms 2 of the limiting frame can also be 5, 6, or 7, etc., which are not detailed here.

[0080] In this embodiment, the usage process is as follows: Figures 4 to 13 As shown, the specific usage process is as follows:

[0081] like Figure 4 and Figure 5 As shown, the inner support clamp of this embodiment is moved above the cylinder 5 that needs to be lifted. At this time, the self-unlocking component 4 is in a locked state. Then, the inner support clamp is moved downward until the limiting rod 21 of the limiting frame contacts the upper end face of the cylinder 5. At this time, the cylinder 5 and the inner support clamp are as shown. Figure 6 and Figure 7 As shown, the gripper unit 32 of the inner support unit is located inside the cylinder 5. At this time, the self-unlocking assembly 4 is still in the locked state. The central rod assembly 1 continues to move downwards. Because the limiting rod 21 on the limiting frame is restricted to the upper end face of the cylinder 5, and the inner rod 12 of the central rod assembly 1 is fixed on the limiting frame, the outer rod 11 of the central rod assembly 1 will continue to move downwards. The length of the central rod assembly 1 shortens, and the hook 41 of the self-unlocking assembly 4 is in a vertical state under the action of gravity. The hook 41 is released from the hook seat 42. At this time, the cylinder 5 and the inner support clamp... Figure 8 and Figure 9As shown, the entire inner support clamp is then driven to move upward. Under the action of gravity, the limiting frame and gripper unit 32 of the inner support clamp will cause the inner rod 12 of the central rod assembly 1 to fall downward. At this time, the central rod assembly 1 gradually extends, and the opening and closing rod 311 of the connecting rod assembly 31 will move closer to the central rod assembly 1, thereby causing the end of the bent rod 312 away from the gripper unit 32 to move closer to the central rod assembly 1. This causes the end of the bent rod 312 that is movably connected to the gripper unit 32 to move away from the central rod assembly 1, thereby causing the gripper unit 32 to contact and tighten the inner wall of the cylinder 5. At this time, the cylinder 5 and the inner support clamp are as follows: Figure 10 and Figure 11 As shown, the inner support clamp then continues to rise, driving the cylinder 5 to rise and detach from the hot zone, completing the disassembly. At this point, the cylinder 5 and the inner support clamp are as follows: Figure 12 and Figure 13 As shown.

[0082] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. An inner support clamp for disassembling the heat insulation cylinder of a single crystal furnace, characterized in that, include: The limiting frame includes at least two limiting arms arranged radially (2). The center rod assembly (1) is set perpendicular to the limit frame and its length is telescopic; Internal support units, distributed circumferentially along the central rod assembly (1) and numbering at least two, include: The connecting rod assembly (31) is rotatably connected to the limiting arm (2), and the two ends of the connecting rod assembly (31) are movably connected to the top of the center rod assembly (1) and the gripper unit (32), respectively. The gripper unit (32) is movably connected to the limiting arm (2) along the radial direction; When the central rod assembly (1) is extended, the connecting rod assembly (31) pushes the gripper unit (32) to move in the radial direction away from the radial center of the limit frame; When the center rod assembly (1) is shortened, the connecting rod assembly (31) pulls the gripper unit (32) to move along the radial direction toward the side closer to the radial center of the limit frame; It also includes a self-unlocking assembly (4) that is unlocked by a shortened center rod assembly (1). The self-unlocking assembly (4) includes a hook seat (42) disposed on the limit frame and a hook (41) hinged to the link assembly (31). The self-unlocking assembly (4) has two states: State 1, locked state, at which time the hook (41) is tilted and hooked on the hook seat (42), and the center rod assembly (1) restricts the extension; State 2, unlocked state. At this time, the hook (41) and the hook seat (42) are unhooked, and the center rod assembly (1) can extend and retract freely. The central rod assembly (1) includes an inner rod (12) vertically fixed on the limiting frame, and an outer rod (11) sleeved on the inner rod (12) and slidably connected to the inner rod (12). The inner rod (12) is located at the center of the limiting frame, and the end of the outer rod (11) away from the limiting frame is hinged to the end of the connecting rod assembly (31). The linkage assembly (31) includes an opening and closing rod (311) and a bent rod (312) with its angle facing away from the center rod assembly (1); one end of the opening and closing rod (311) is hinged to the end of the center rod assembly (1) away from the limiting frame, and the other end of the opening and closing rod (311) is rotatably connected to the bent rod (312); the angle of the bent rod (312) is rotatably connected to the limiting arm (2), and the end of the bent rod (312) away from the opening and closing rod (311) is slidably connected to the gripper unit (32); The limiting arm (2) includes a limiting rod (21) and a limiting structure (22) disposed on the limiting rod (21). The limiting structure (22) is located on the side of the limiting rod (21) away from the central rod assembly (1). The limiting rod (21) and the limiting structure (22) are respectively provided with a first transverse limiting hole (211) and a second transverse limiting hole (221) parallel to the radial direction of the limiting arm (2). The gripper unit (32) is slidably connected to the first transverse limiting hole (211) and the second transverse limiting hole (221) along the radial direction of the limiting arm (2). The limiting structure (22) is door-shaped, with the second lateral limiting hole (221) located at the top of the door-shaped limiting structure (22) and the first lateral limiting hole (211) located directly below the door-shaped limiting structure (22). The gripper unit (32) includes a gripper support rod (321) perpendicular to the limiting frame and a vertical limiting hole (320) provided on the gripper support rod (321). The gripper support rod (321) and the limiting arm (2) are slidably connected along their radial direction. One end of the connecting rod assembly (31) away from the top of the central rod assembly (1) is slidably connected to the vertical limiting hole (320) of the gripper support rod (321). The gripper unit (32) also includes a movable gripper (324) movably connected to the gripper support rod (321). The movable gripper (324) is located at the bottom of the limit frame away from the center rod assembly (1), and the side of the movable gripper (324) away from the center of the limit frame is a rough surface. The included angles between the limiting arms (2) of the limiting frame are equal, and the shape of the limiting frame includes any one of the following: trident type, cross type, and star type.

2. The inner support clamp for disassembling the heat insulation cylinder of a single crystal furnace according to claim 1, characterized in that, The gripper unit (32) also includes two gripper mounting plates (323) arranged parallel to the limit frame. The top and bottom of the movable gripper (324) are rotatably connected to the two gripper mounting plates (323). The movable gripper (324) is provided with an anti-slip structure to increase roughness. The side of the anti-slip structure away from the center of the limit frame is a rough surface.

3. The inner support clamp for disassembling the heat insulation cylinder of a single crystal furnace according to claim 1, characterized in that, The gripper unit (32) has at least two movable grippers (324), and the two or more movable grippers (324) are movably connected to the gripper support rod (321) along the circumferential direction of the limiting frame.

4. The inner support clamp for disassembling the heat insulation cylinder of a single crystal furnace according to claim 1, characterized in that, The gripper unit (32) has two gripper support rods (321). The two gripper support rods (321) are arranged in parallel and located on both sides of the limiting arm (2). The two gripper support rods (321) are slidably connected to the limiting arm (2) along the radial direction of the limiting arm (2). Each of the two gripper support rods (321) is provided with a vertical limiting hole (320). The end of the connecting rod assembly (31) away from the top of the central rod assembly (1) is slidably connected between the two gripper support rods (321).

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