Pulse generating assembly and power supply device

Abstract

A pulse generating assembly (3) and method for delivering power to a plasma reactor (2), the plasma reactor (2) having a first load (8) located between a first plasma reactor input port (20) and a plasma reactor common port (10) and a second load (9) located between a second plasma reactor input port (19) and a plasma reactor common port (10), the pulse generating assembly (3) including 1.1 a first pulse generating unit (17), 1.2 a second pulse generating unit (18), and 1.3 an energy storage component (C11) connected between the first pulse generating unit (17) and the second pulse generating unit (18), the first pulse generating unit (17) including: 1.1.1 a first input port (13) connectable to a power source (4, 5); 1.1.2 connectable to ground and / or connectable to plasma The pulse generation component common port (11) of the plasma reactor common port (10); 1.1.3 a first output port (15) connectable to the first load (8) of the plasma reactor (2) for supplying voltage pulses that can be delivered to the first load (8) of the plasma reactor (2) between the first output port (15) and the pulse generation component common port (11); the second pulse generation unit (18) includes: 1.2.1 a second input port (12) connectable to the power source (4, 5); 1.2.2 a second output port (16) connectable to the second load (9) of the plasma reactor (2) for supplying voltage pulses that can be delivered to the second load (9) of the plasma reactor (2) between the second output port (16) and the pulse generation component common port (11), wherein the energy storage component (C11) is preferably a capacitor.

Description

Background Technology

[0001] This invention relates to a pulse generating assembly for delivering power to a plasma reactor, the pulse generating assembly comprising: The first pulse generating unit includes: It can be connected to the first input port of a power source. It can be connected to a first output port of a first load of the plasma reactor for supplying voltage pulses to the first load of the plasma reactor.

[0002] Another aspect of the present invention relates to a power supply device having a pulse generating component.

[0003] Another aspect of the invention relates to a method for supplying power to a plasma reactor using a pulse generation assembly.

[0004] For example, see WO 2019 212592 A1, where it is known to power different parts of a plasma reactor via a dedicated power supply. This is the most intuitive solution, but also the most expensive. The different parts of the plasma reactor are the loads of the plasma reactor.

[0005] If high voltages in the range of 1kV or higher, especially in the range of 3kV or higher, are required, the power supplies capable of delivering such voltages and the electrical components that must be used become increasingly expensive. The same applies to the power transmission cables between the power source and the plasma reactor. Summary of the Invention

[0006] The object of the present invention is to provide an inexpensive component capable of delivering high voltage, particularly high voltage pulses, to different parts of a plasma reactor.

[0007] This invention relates to a pulse generating assembly for delivering power to a plasma reactor, the plasma reactor having a first load located between a first plasma reactor input port and a common plasma reactor port and a second load located between a second plasma reactor input port and the common plasma reactor port, the pulse generating assembly comprising: - The first pulse generating unit includes: -- It can be connected to, and in particular configured to be connected to, a first input port of a power source. -- A pulse generation component common port that can be connected to ground and / or connected to the common port of the plasma reactor. -- A first output port that can be connected, and in particular configured to be connected to, a first load of the plasma reactor, for supplying pulses, particularly voltage pulses, that can be delivered to the first load of the plasma reactor between the first output port and the common port of the pulse generating assembly. - The second pulse generating unit includes: -- A second input port that can be connected to, and in particular configured to be connected to, a power source. -- A second output port, which can be connected to, and in particular configured to be connected to, a second load of the plasma reactor, for supplying pulses, particularly voltage pulses, that can be delivered to the second load of the plasma reactor between the second output port and the common port of the pulse generating assembly. - An energy storage component connected between the first pulse generating unit and the second pulse generating unit, wherein the energy storage component is preferably a capacitor.

[0008] In the sense of this disclosure, a pulse generating unit can be any type of unit capable of, and particularly configured to, deliver electrical energy in the form of pulses such as voltage pulses, current pulses, or power pulses. This can be accomplished by an electrical switch, such as a transistor, connected to a controller configured to turn the switch on and off, or by other circuitry.

[0009] The configuration allows the use of both a high-voltage and a low-voltage power supply as power sources. It also allows for high-voltage pulses at both outputs when using both power sources. The voltage of the low-voltage power supply can be shifted using energy storage components. Specifically, a bootstrap topology can be used to shift the voltage of the low-voltage power supply. The first pulse generation unit can be used to generate a high-voltage pulse for a first load in the plasma reactor. The second pulse generation unit can be used to supply a high-voltage pulse to a second load in the plasma reactor using the low-voltage components.

[0010] High voltage (HV) in the sense of this disclosure can be in the range of 1kV or higher, particularly in the range of 3kV or higher.

[0011] In the sense of this disclosure, low voltage can be below 1kV, particularly in the range of 500V or lower.

[0012] In the sense of this disclosure, a port can be any type of electrical connection component, such as a plug, connector, terminal, pin, branch, connection device, etc.

[0013] The first load can be a working area, while the second load can be an additional part of the plasma reactor. The working area can be the region where the target or substrate for the plasma process is placed. The additional part can be a component that helps to ignite or form plasma or provides direction for the plasma process, such as an additional anode or cathode, a shielding structure, a biasing device, etc.

[0014] The impedance of the first load may have a capacitive component.

[0015] The impedance of the second load may have a capacitive component.

[0016] The impedance of the first load may have a resistive component.

[0017] The impedance of the second load may have a resistive component.

[0018] The energy storage component can be connected between the output terminal of the first pulse generating unit and the second pulse generating unit. Therefore, the potential of the second pulse generating unit can be effectively shifted.

[0019] The second pulse generating unit may have a common port. This common port can be connected to the first output port of the first pulse generating unit. In this way, the second pulse generating unit can generate a pulse on top of the pulse generated by the first pulse generating unit.

[0020] The second pulse generating unit can be connected to one end of the energy storage component through its second pulse generating unit common port.

[0021] The second pulse generating unit can be connected to the energy storage component at both ends.

[0022] The pulse generating component can be configured to deliver energy from the first input port to the first output port, particularly pulse energy, during the first pulse generation time period. During the first pulse generation time period, a high-voltage pulse can be supplied to the first load.

[0023] The pulse generating component can be configured to charge the energy storage component with energy, preferably from a power source connected to the second input port, during the second pulse generating time period. The second pulse generating time period may be a period during which pulse energy is not supplied to the first load. The first pulse generating time period and the second pulse generating time period may alternate.

[0024] The pulse generating component can be configured to deliver energy from the energy storage component to the second output port during the third pulse generation time period. Therefore, a voltage pulse higher than the input voltage can be provided at the second output port. The energy storage component can be charged to the voltage of the second power source, and the potential of the energy storage component can be shifted to the voltage of the first voltage source. Therefore, a high voltage can be supplied to the second load. Specifically, a voltage with an absolute value higher than the absolute value of the voltage of each power source can be supplied to the second load.

[0025] Specifically, the pulse generating component can be configured to provide a voltage pulse at at least one of the output ports relative to the common port of the pulse generating component and / or the voltage pulse measured thereon, the voltage pulse being higher than the output voltage of each of the pulse generating units.

[0026] The third pulse occurrence period can be synchronized with the first pulse occurrence period, and preferably begins at or after the start of the first pulse occurrence period, and preferably ends at or before the end of the first pulse occurrence period. The third pulse occurrence period can be a period for supplying pulse energy to the first load. During the second pulse occurrence period, the energy storage component can be charged. During the first pulse occurrence period, the voltage at the first output terminal is boosted, then the third pulse occurrence period can begin, and energy from the energy storage component can be transferred to the second load. The third pulse occurrence period should occur during the first pulse occurrence period. However, the third pulse occurrence period can also be completely independent of the first and second pulse occurrence periods. Therefore, the first and third pulse occurrence periods can be synchronous or asynchronous.

[0027] A charging circuit can be provided to charge the energy storage components. Therefore, charging becomes more efficient.

[0028] The first pulse generating unit may include a high-side switch connected to the first input port and the first output port, preferably connected between the first input port and the first output port. Furthermore, the second pulse generating unit may include a high-side switch connected to the energy storage component and / or the second input port and the second output port, preferably connected between the energy storage component and / or the second input port and the second output port.

[0029] The first pulse generating unit may further include a low-side switch connected to the first output port and a common port of the first pulse generating unit, wherein the common port is preferably connected to ground. Ground may be connected to a protective grounding device and / or a shielding structure.

[0030] The second pulse generating unit may include a low-side switch connected to the second output port and the first output port.

[0031] A rectifier, preferably a diode, can be disposed between the energy storage component and the second input port. Therefore, the second power source can be disconnected from the energy storage component during pulse generation.

[0032] The rectifier can be positioned between the second input port and the high-side switch of the second pulse generator. Therefore, the second power source can be disconnected from the second pulse generator during pulse generation.

[0033] The switches and rectifiers in the first pulse generating unit may be the only high-voltage components of the pulse generating assembly. All other components may be low-voltage components.

[0034] Both pulse generating units can include a high-side switch and a low-side switch connected in series. The low-side switch of the second pulse generating unit can be connected between the second output port and the first output port of the first pulse generating unit. This configuration allows both pulse generating units to provide voltage pulses at their output ports.

[0035] The high-side switches of the first pulse generating unit and the second pulse generating unit are configured to be turned on and / or off synchronously, in particular simultaneously. Synchronous switching allows for high efficiency and low power loss.

[0036] A controller can be provided for the switch to control the switching, thereby also controlling the charging and discharging of the energy storage components.

[0037] The pulse generating component can be configured to provide a voltage pulse at a second output port relative to the common port and / or ground of the pulse generating component, the voltage pulse having an amplitude higher than the voltage of each pulse generating unit.

[0038] The present invention also relates to a power supply device for supplying power to a plasma reactor, the power supply device comprising: - One of the following: i. First power source ii. First power source and second power source, - A creative pulse generation component.

[0039] The power sources can be coupled, i.e., not independent. The output power of the power sources can be combined. The power sources can be different, specifically high-voltage power sources and low-voltage power sources. This arrangement requires fewer high-voltage (HV) components. The plasma reactor can be configured for etching or deposition.

[0040] In the context of this invention, an HV component can be a component configured to be used in the range of 1kV or higher, particularly in the range of 3kV or higher.

[0041] The first power source and / or the second power source can be DC power sources. The voltage of the second power source can be lower than the voltage of the first power source.

[0042] The present invention also relates to a method for supplying power to a plasma reactor using a pulse generating assembly, particularly a pulse generating assembly according to the present invention, the plasma reactor having a first load located between a first plasma reactor input port and a common plasma reactor port, and having a second load located between a second plasma reactor input port and the common plasma reactor port, the method comprising the following steps: During the first pulse generation time period, energy is delivered from the first input port to the first load via the first output port of the first pulse generation unit of the pulse generation component. - During the second pulse generation period, energy from a power source preferably connected to the second input port of the second pulse generation unit is used to charge the energy storage component connected between the first pulse generation unit and the second pulse generation unit in the pulse generation assembly. During the third pulse generation period, energy is delivered from the energy storage component to the second load via the second output port of the second pulse generation unit.

[0043] During the third pulse occurrence period, the absolute value of the voltage to ground at the second output port can be higher than the voltage at each of the input ports. The voltages at the input ports can be equal or different. If the voltages are equal, there may be only one voltage source. The voltage at the first input port can be higher than the voltage at the second input port. Furthermore, the voltage at the second output port can be higher than the voltage at the first output port due to the voltage of the energy storage component.

[0044] The first pulse generating unit connected to the first power source can be used to shift the potential of the energy storage component.

[0045] The second pulse generating unit and the energy storage component can be used to provide voltage to the second plasma reactor load.

[0046] The absolute value of the pulse at the first output port relative to the voltage of the common port of the first pulse generating unit and / or the common port of the pulse generating component may be higher than the absolute value of the pulse at the second output port relative to the voltage of the first output port.

[0047] The third pulse occurrence period can correspond to the first pulse occurrence period or can be a part of the first pulse occurrence period. In other words, the third pulse occurrence period can be synchronized with the first pulse occurrence period, preferably starting at or after the beginning of the first pulse occurrence period, and preferably ending at or before the end of the first pulse occurrence period.

[0048] During the fourth pulse generation period, the same voltage can be delivered to the first output port and the second output port. In particular, energy can be delivered from the first input port to the first output port and the second output port.

[0049] During the fifth pulse generation period, no energy may be supplied to the first output port, and energy may be supplied from the second input port to the second output port.

[0050] During the period when the sixth pulse occurs, no energy can be delivered to any output port.

[0051] During the second, fifth, or sixth pulse occurrence period, energy from the second input port can be delivered to the energy storage component. Attached Figure Description

[0052] Figure 1 A schematic diagram of a power supply device that supplies power to the plasma reactor is shown. Figure 2 A first embodiment of the pulse generation component is shown; Figure 3 A second embodiment of the pulse generation component is shown; Figure 4 A circuit diagram is shown for charging the energy storage component when no energy is being supplied to any output port; Figure 5 A circuit diagram is shown that generates high-voltage pulses at two output ports; Figure 6 It is a pulse generating component with a charging circuit. Detailed Implementation

[0053] Figure 1 A power supply unit 1 connected to a plasma reactor 2 is shown. The plasma reactor 2 can be a plasma chamber. A substrate can be processed inside the plasma reactor 2. Alternatively, layers of the substrate can be etched, or layers can be deposited on the substrate.

[0054] The power supply unit 1 includes a pulse generating assembly 3 connected to two power sources 4 and 5, and has two power output terminals 6 and 7 connected to a first load 8 and a second load 9 of the plasma reactor 2. The first load 8 is connected between the first plasma reactor input port 20 and the plasma reactor common port 10. The second load 9 is connected between the second plasma reactor input port 19 and the plasma reactor common port 10. The plasma reactor 2 is connected to ground via the plasma reactor common port 10. The impedance of the first load 8 and the second load 9 may have a capacitive portion. Therefore, they are drawn in the form of capacitors. The impedance may also have a resistive portion because they are consuming energy.

[0055] Figure 2 A first embodiment of the pulse generating assembly 3 is shown. The pulse generating assembly 3 has a first pulse generating unit 17 including a high-side switch S11 and a low-side switch S12. Switches S11 and S12 are connected in series. The first pulse generating unit 17 is connected to a common port 11 and a first input port 13 of the pulse generating assembly. The first input port 13 and the common port 11 of the pulse generating assembly are configured to be connected to a first power source 4. The common port 11 of the pulse generating assembly is connected to ground.

[0056] Furthermore, the pulse generating assembly 3 also includes a second pulse generating unit 18 comprising a high-side switch S13 and a low-side switch S14. Switches S13 and S14 are connected in series. The second pulse generating unit 18 is connected to the output port 15 of the first pulse generating unit 17 and is connected to a second input port 12 via a rectifier component D11 implemented as a diode. The second input port 12 is configured to be connected to a second power source 5. The pulse generating assembly common port 11 is also configured to be connected to the second power source 5.

[0057] The second pulse generating unit 18 has a second pulse generating unit common port 21. This second pulse generating unit common port 21 is connected to the first output port 15 of the first pulse generating unit 17. In this way, the second pulse generating unit 18 can generate a pulse on top of the pulse of the first pulse generating unit 17.

[0058] The output port 15 of the first pulse generating unit 17 is connected to the connection point of switches S11 and S12. The output port 15 is configured to be connected to the first load 8 of the plasma reactor 2, in particular via the output port 7 of the power supply unit 1 (the output port 15 of the first pulse generating unit 17 is connected to the output port 7 of the power supply unit 1).

[0059] The second pulse generating unit 18 also includes an output port 16, which is connected to the connection point of switches S13 and S14. The output port 16 is configured to be connected to the second load 9 of the plasma reactor 2, in particular via the output port 6 of the power supply unit 1 (the output port 16 of the second pulse generating unit 18 is connected to the output port 6 of the power supply unit 1).

[0060] In this case, the energy storage component C11, which is implemented as a capacitor, has one end connected to the common port 21 and the output port 15 of the second pulse generating unit, and the other end connected to the high-side switch S13 of the second pulse generating unit 18 and / or connected to the input port 12 through the rectifier component D11, in particular the cathode of the diode.

[0061] When switch S12 is turned on, the capacitive load 8 discharges. Simultaneously, the energy storage component C11 is charged to the voltage between ports 12 and 11 via rectifier D11 and switch S12. This corresponds to the second pulse generation period. Generally, the voltage at output port 16 should change in the same way as the voltage on the capacitive load 9, therefore switch S14 in the second pulse generation unit 18 can operate together with switch S12. The capacitive load 9 discharges through switches S14 and S12. To supply the voltage of the first input port 13 to the load 8, switch S11 is turned on (and switch S12 is turned off). Then, the load 8 is charged to the voltage at input port 13 via switch S11. Simultaneously, the lower potential of the energy storage component C11 is shifted upwards to the same voltage as the voltage at output port 15, and thus the same voltage as the load 8. The sum of the voltage at C11 (which is equal to the voltage at port 12) and the voltage at port 15 (which is equal to the voltage at port 13) charged by the load 9 via switch S13 is the sum of these voltages. Therefore, load 9 is charged to a voltage higher than the output voltage of power source 4.

[0062] Figure 3 It shows the corresponding Figure 2 The second embodiment of the pulse generating component 3 is shown. Therefore, the same reference numerals are used. The only difference is that the polarities of the power sources 4 and 5 are reversed. Therefore, here, in this case, the energy storage component C11, which is also implemented as a capacitor, is connected to the rectifier component D11, specifically the anode of the diode.

[0063] Figure 4 The current path that discharges the capacitive loads 8 and 9 of plasma reactor 2 is shown in bold. For this purpose, switches S12 and S14 are closed, and switches S11 and S13 are open. Simultaneously, the energy storage component C11 is charged to the voltage at input port 12 via rectifier D11 and switch S12. This state corresponds to the second pulse occurrence period.

[0064] Figure 5 The current path for the pulse generation state is shown in bold. Capacitive load 8 is charged to the voltage at input port 13 via switch S11. Load 9 is charged to the voltage at output port 16 via switch S13. The energy used for this charging comes from power source 4 and energy storage component C11, the higher electrode of which is connected to output port 15. Rectifier component D11 is in a blocking state, therefore voltage source 5 is disconnected from the circuit through this rectifier component. Figure 5 The situation shown corresponds to the time periods when the first and third pulses occur.

[0065] Figure 6 An embodiment of a pulse generating assembly is shown, having a charging circuit 50 connected between the second input port 12 and the second pulse generating unit 18. When switches S12 and S55 are closed and switch S11 is open, the energy storage component C11 is charged to the voltage of C54, while the charging current is limited by L51, and there is no voltage at the output port 15.

[0066] When C11 is charged to the voltage of C54, it will not be overcharged by L51 due to D52 and D53. At the first moment, D52 will short-circuit L51, closing the current loop of L51. Then, if S55 (with or without S12) is opened, the current loop of L51 becomes closed by D53, C54, and D52, causing the energy stored in L51 to transfer back to C54 via diodes D52 and D53.

[0067] Switches S13 and S14 can be operated independently, and the voltage at output terminal 16 does not have to be 0V.

[0068] The main advantage of this invention is that it eliminates the need for a high-voltage source and a high-voltage pulse generator to power the output port 16. The only ultra-high-voltage component is the rectifier D11, which charges the energy storage component C11. All other components supplying power to the load 9 are low-voltage components: the power source 5, the pulse generator 18, and the energy storage component C11.

Claims

1. A pulse generating assembly (3) for delivering power to a plasma reactor (2), the plasma reactor (2) having a first load (8) located between a first plasma reactor input port (20) and a plasma reactor common port (10) and a second load (9) located between a second plasma reactor input port (19) and the plasma reactor common port (10), the pulse generating assembly (3) comprising: 1.1 First pulse generating unit (17), which includes: 1.1.1 It can be connected to the first input port (13) of the power source (4). 1.1.2 A pulse generation component common port (11) that can be connected to ground and / or connected to the common port (10) of the plasma reactor. 1.1.3 A first output port (15) capable of being connected to the first load (8) of the plasma reactor (2) for supplying pulses capable of being delivered to the first load (8) of the plasma reactor (2) between the first output port (15) and the common port (11) of the pulse generating assembly. 1.2 The second pulse generating unit (18) includes: 1.2.1 It can be connected to the second input port (12) of the power source (4, 5). 1.2.2 A second output port (16) capable of being connected to the second load (9) of the plasma reactor (2) for supplying pulses capable of being delivered to the second load (9) of the plasma reactor (2) between the second output port (16) and the common port (11) of the pulse generating assembly. 1.3 An energy storage component (C11) connected between the first pulse generating unit (17) and the second pulse generating unit (18). in, The energy storage component (C11) is connected between the first output port (15) of the first pulse generating unit (17) and the second output port (16) of the second pulse generating unit (18).

2. The pulse generating component according to claim 1, wherein, The pulse is a voltage pulse; and / or The energy storage component (C11) is a capacitor.

3. The pulse generating component according to claim 1, wherein, The pulse generating component is configured to deliver energy from the first input port (13) to the first output port (15) during the first pulse generation time period.

4. The pulse generating component according to claim 1, wherein, The pulse generating component is configured to deliver pulse energy from the first input port (13) to the first output port (15) during the first pulse generation time period.

5. The pulse generating component according to any one of claims 1 to 4, wherein, The pulse generating component (3) is configured to charge the energy storage component (C11) with energy during the second pulse generation time period.

6. The pulse generating component according to claim 5, wherein, The energy comes from a power source (4, 5) connected to the second input port (12).

7. The pulse generating component according to any one of claims 1 to 4 and 6, wherein, The pulse generating component (3) is configured to deliver energy from the energy storage component (C11) to the second output port (16) during the third pulse generation time period.

8. The pulse generating component according to any one of claims 1 to 4 and 6, wherein, The first pulse generating unit (17) includes a high-side switch (S11) connected to the first input port (13) and the first output port (15).

9. The pulse generating component according to claim 8, wherein, The high-side switch (S11) of the first pulse generating unit (17) is connected between the first input port (13) and the first output port (15).

10. The pulse generating component according to any one of claims 1 to 4, 6, and 9, wherein, The second pulse generating unit (18) includes a high-side switch (S13) connected to the energy storage component (C11) and the second output port (16).

11. The pulse generating assembly according to claim 10, wherein, The high-side switch (S13) of the second pulse generating unit (18) is connected between the energy storage component (C11) and the second output port (16).

12. The pulse generating component according to any one of claims 1 to 4, 6, 9, and 11, wherein, The first pulse generating unit (17) includes a low-side switch (S12) connected to the first output port (15) and the common port (11) of the pulse generating component.

13. The pulse generating assembly according to claim 12, wherein, The common port (11) of the pulse generating component can be connected to ground.

14. The pulse generating component according to any one of claims 1 to 4, 6, 9, 11, and 13, wherein, The second pulse generating unit (18) includes a low-side switch (S14) connected to the second output port (16) and the first output port (15).

15. The pulse generating component according to any one of claims 1 to 4, 6, 9, 11, and 13, wherein, The high-side switch (S11) of the first pulse generating unit (17) and the high-side switch (S13) of the second pulse generating unit (18) are configured to be able to be turned on and / or off synchronously.

16. The pulse generating component according to any one of claims 1 to 4, 6, 9, 11, and 13, wherein, The high-side switch (S11) of the first pulse generating unit (17) and the high-side switch (S13) of the second pulse generating unit (18) are configured to be simultaneously turned on and / or off.

17. The pulse generating component according to any one of claims 1 to 4, 6, 9, 11, and 13, wherein, A rectifier is provided between the energy storage component (C11) and the second input port (12).

18. The pulse generating assembly according to claim 17, wherein, The rectifier component is a diode (D11).

19. The pulse generating component according to any one of claims 1 to 4, 6, 9, 11, 13, and 18, wherein, The pulse generating component (3) is configured to provide a voltage pulse at at least one of the output ports (15, 16) that is higher than the output voltage of each of the pulse generating units (17, 18) relative to the common port of the pulse generating component.

20. The pulse generating component according to any one of claims 1 to 4, 6, 9, 11, 13, and 18, wherein, The second pulse generating unit (18) has a second pulse generating unit common port (21), and the second pulse generating unit common port (21) is connected to the first output port of the first pulse generating unit (17).

21. The pulse generating assembly according to claim 20, wherein, The common port (21) of the second pulse generating unit is connected to one end of the energy storage component (C11).

22. A power supply device for supplying power to a plasma reactor, comprising: One of the following: i. First power source (4). ii. First power source and second power source (5), The pulse generating component according to any one of claims 1 to 21.

23. The power supply device according to claim 22, wherein, The first power source (4) and / or the second power source (5) are DC power sources.

24. A method for supplying power to a plasma reactor (2) using a pulse generating assembly (3) according to any one of claims 1 to 21, the plasma reactor (2) having a first load (8) located between a first plasma reactor input port (20) and a plasma reactor common port (10) and a second load (9) located between a second plasma reactor input port (19) and the plasma reactor common port (10), the method comprising the following steps: During the first pulse generation time period, energy is delivered from the first input port (13) to the first load (8) via the first output port (15) of the first pulse generation unit (17) of the pulse generation component (3). During the second pulse generation period, energy is used to charge the energy storage component (C11) connected between the first pulse generation unit (17) and the second pulse generation unit (18) of the pulse generation assembly (3). During the third pulse generation period, energy is delivered from the energy storage component (C11) to the second load (9) via the second output port (16) of the second pulse generation unit (18).

25. The method according to claim 24, wherein, The energy that charges the energy storage component (C11) comes from the power source (4, 5) connected to the second input port (12) of the second pulse generating unit (18).

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