Piezoelectric drive device and piezoelectric drive system having the same
Patent Information
- Application Number
- CN202180003161.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-09-16
- Publication Date
- 2026-10-23
- Estimated Expiration
- 2041-09-16
AI Technical Summary
USM型压电驱动系统复杂且昂贵,产生的行程很小
[0020]在根据本公开实施例的压电驱动装置和压电驱动系统中,当第一压电元件或第二压电元件通电时,第一压电元件或第二压电元件膨胀,并且可变形部相应地变形,以驱动致动部沿对应的方向移动,从而致动部可以与可移动件配合以驱动可移动件沿预期的方向移动。进一步地,当第一压电元件或第二压电元件断电时,第一压电元件或第二压电元件收缩,可变形部恢复至其初始形状,因此致动部也恢复至其初始位置,而不会对可移动件产生影响。以这种方式重复,可移动件可以在预期的方向上连续移动。
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Figure CN116569470B_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of piezoelectric drive technology, and more particularly to piezoelectric drive devices and piezoelectric drive systems having the same. Background Technology
[0002] In related technologies, piezoelectric drive systems are generally of two types: USM type and SIDM type. USM type piezoelectric drive systems are complex and expensive, producing very small strokes. On the other hand, SIDM type piezoelectric drive systems require counterweights and shafts, thus having a complex structure. Furthermore, the control method for SIDM type piezoelectric drive systems is very difficult because it requires precise control of the deformation rate of the piezoelectric element. Summary of the Invention
[0003] Therefore, it is necessary to propose a piezoelectric drive device and a piezoelectric drive system to solve at least one of the aforementioned technical problems in the related art.
[0004] Therefore, a first aspect of this disclosure provides a piezoelectric drive device, comprising: a frame including a deformable portion, the deformable portion including a first side arm, a second side arm opposite to the first side arm, and a bottom arm connecting the first side arm and the second side arm, the first side arm and the second side arm being inclined relative to the bottom arm; a first piezoelectric element and a second piezoelectric element, the first piezoelectric element being disposed between the frame and the first side arm of the deformable portion, the second piezoelectric element being disposed between the frame and the second side arm of the deformable portion, the first piezoelectric element and the second piezoelectric element being configured to deform the deformable portion; and an actuation portion disposed on the bottom arm of the deformable portion and configured to move under the drive of the deformation of the deformable portion.
[0005] In some embodiments, the first piezoelectric element has a first end connected to the frame and a second end connected to the first side arm of the deformable portion, and the first piezoelectric element is configured to expand or contract to deform the deformable portion; the second piezoelectric element has a first end connected to the frame and a second end connected to the second side arm of the deformable portion, and the second piezoelectric element is configured to expand or contract to deform the deformable portion.
[0006] In some embodiments, the second end of the first piezoelectric element matches the first side arm of the deformable portion in shape and orientation, and the second end of the second piezoelectric element matches the second side arm of the deformable portion in shape and orientation; the direction perpendicular to the first side arm of the deformable portion intersects the extension direction of the bottom arm of the deformable portion at a first angle, and the direction perpendicular to the second side arm of the deformable portion intersects the extension direction of the bottom arm of the deformable portion at a second angle.
[0007] In some embodiments, the frame further includes: a body; and a first side and a second side extending from opposite ends of the body, wherein the deformable portion extends from the middle of the body and is located between the first side and the second side, the deformable portion forming a first gap and a second gap with the first side and the second side, respectively, a first piezoelectric element disposed in the first gap, a second piezoelectric element disposed in the second gap, a first end of the first piezoelectric element being connected to the first side, and a first end of the second piezoelectric element being connected to the second side.
[0008] In some embodiments, a first end of the first side arm and a first end of the second side arm are connected to the body, and a bottom arm is connected between a second end of the first side arm and a second end of the second side arm. The first end of the first side arm and the first end of the second side arm are spaced apart by a first distance in the extending direction of the bottom arm, and the second end of the first side arm and the second end of the second side arm are spaced apart by a second distance in the extending direction of the bottom arm. The first distance is shorter than the second distance to allow the deformable portion to have a generally triangular shape or a generally "A" shape.
[0009] In some embodiments, a first groove is formed at the connection between the first side arm and the body, a second groove is formed at the connection between the second side arm and the body, a third groove is formed at the connection between the first side arm and the bottom arm, and a fourth groove is formed at the connection between the second side arm and the bottom arm.
[0010] In some embodiments, two actuating parts are provided and are respectively disposed at the second end of the first side arm and the second end of the second side arm; or two actuating parts are provided and are disposed on the bottom arm and are respectively adjacent to the second end of the first side arm and the second end of the second side arm.
[0011] In some embodiments, the two actuating portions are symmetrical about the centerline of the bottom arm, which is perpendicular to the extension direction of the bottom arm.
[0012] In some embodiments, an actuating part is provided and disposed on the bottom arm, preferably disposed at the center of the surface of the bottom wall.
[0013] In some embodiments, the actuating portion protrudes from the bottom arm of the deformable portion and has a spherical cap shape.
[0014] In some embodiments, the first piezoelectric element and the second piezoelectric element are configured to operate in d33 mode.
[0015] In some embodiments, the first angle between the direction of the first side arm perpendicular to the deformable portion and the extension direction of the bottom arm of the deformable portion ranges from 24 degrees to 26 degrees, and the second angle between the direction of the second side arm perpendicular to the deformable portion and the extension direction of the bottom arm of the deformable portion ranges from 24 degrees to 26 degrees.
[0016] In some embodiments, the deformable portion is disposed in the middle of the frame and has a symmetrical structure, wherein the first side arm and the second side arm are symmetrical to each other, the first piezoelectric element is symmetrical with respect to the axis of symmetry of the deformable portion and the second piezoelectric element, and the first included angle and the second included angle are equal.
[0017] In some embodiments, the frame is made of ceramic material, the actuating part is made of ceramic material, and the deformable part of the frame is integrally formed with the actuating part.
[0018] In some embodiments, the first piezoelectric element is bonded to the frame and the deformable portion, and the second piezoelectric element is bonded to the frame and the deformable portion.
[0019] A second aspect of this disclosure provides a piezoelectric drive system, including a piezoelectric drive device according to any of the above embodiments; a movable member configured to cooperate with and move under the drive of the actuation portion of the piezoelectric drive device; and a retaining spring disposed on the piezoelectric drive device and configured to retain the piezoelectric drive device to press the actuation portion against the movable member.
[0020] In the piezoelectric drive device and piezoelectric drive system according to embodiments of the present disclosure, when the first piezoelectric element or the second piezoelectric element is energized, the first piezoelectric element or the second piezoelectric element expands, and the deformable portion deforms accordingly to drive the actuating portion to move in a corresponding direction. Thus, the actuating portion can cooperate with the movable member to drive the movable member to move in a desired direction. Further, when the first piezoelectric element or the second piezoelectric element is de-energized, the first piezoelectric element or the second piezoelectric element contracts, and the deformable portion returns to its initial shape. Therefore, the actuating portion also returns to its initial position without affecting the movable member. Repeating this process, the movable member can move continuously in the desired direction.
[0021] Therefore, the piezoelectric drive device and piezoelectric drive system according to the embodiments of this disclosure have the advantages of simple structure, convenient control, and high drive efficiency.
[0022] Other advantages, purposes, and features of the rotating blade structure of the cylindrical cabinet indoor unit described in this disclosure will be set forth in part in the description which follows, and will also be understood in part by those skilled in the art based on their study and practice of this disclosure. Attached Figure Description
[0023] The above and / or additional aspects and advantages of this disclosure will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings.
[0024] Figure 1 This is a schematic diagram of a piezoelectric drive device according to an embodiment of the present disclosure.
[0025] Figure 2 yes Figure 1 Enlarged view of part A in the middle.
[0026] Figure 3 This is a schematic diagram of a piezoelectric drive system according to an embodiment of the present disclosure. Detailed Implementation
[0027] The embodiments of this disclosure are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.
[0028] In the description of this disclosure, it should be understood that the terms “center,” “upper,” “lower,” “front,” “rear,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “axial,” “radial,” and “circumferential,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this disclosure and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.
[0029] A piezoelectric drive device 100 according to an embodiment of the present disclosure will be described with reference to the accompanying drawings.
[0030] like Figure 1 and Figure 2As shown, the piezoelectric drive device 100 includes a frame 1, a first piezoelectric element 21, a second piezoelectric element 22, and an actuating part 31. The frame 1 includes a deformable part 13. The deformable part 13 includes a first side arm 131, a second side arm 132 opposite to the first side arm 131, and a bottom arm 133 connecting the first side arm 131 and the second side arm 132. The first side arm 131 and the second side arm 132 are inclined relative to each other with respect to the bottom arm 133. The first piezoelectric element 21 is disposed between the frame 1 and the first side arm 131 of the deformable part 13, and the second piezoelectric element 22 is disposed between the frame 1 and the second side arm 132 of the deformable part 13. Both the first piezoelectric element 21 and the second piezoelectric element 22 are configured to deform the deformable part 13. The actuating part 31 is disposed on the bottom arm 133 of the deformable part 13 and is configured to move by the deformation of the deformable part 13.
[0031] In some embodiments of this disclosure, such as Figure 1 As shown, frame 1 extends horizontally. A first piezoelectric element 21 and a second piezoelectric element 22 are connected to frame 1 and spaced apart from each other. The first piezoelectric element 21 is located at the left end of frame 1, and the second piezoelectric element 22 is located at the right end of frame 1. A deformable portion 13 is located between the first piezoelectric element 21 and the second piezoelectric element 22. Both the first piezoelectric element 21 and the second piezoelectric element 22 are connected to the deformable portion 13. An actuating part 31 is provided on the bottom arm of the deformable portion 13.
[0032] It should be noted that the terms "left" and "right" used here refer to the orientation in the accompanying drawings for the purpose of understanding this disclosure, but should not be construed as limiting this disclosure.
[0033] In the piezoelectric drive device according to an embodiment of the present disclosure, when the first piezoelectric element 21 or the second piezoelectric element 22 is energized, the first piezoelectric element 21 or the second piezoelectric element 22 expands, and the deformable portion 13 deforms accordingly to drive the actuating portion 31 to move in the corresponding direction. Thus, the actuating portion 31 can cooperate with the movable member 5 of the piezoelectric drive system 1000 to drive the movable member 5 to move in the desired direction. Further, when the first piezoelectric element 21 or the second piezoelectric element 22 is de-energized, the first piezoelectric element 21 or the second piezoelectric element 22 contracts, and the deformable portion 13 returns to its initial shape. Thus, the actuating portion 31 also returns to its initial position without affecting the movable member 5. Repeating this process, the movable member 5 can move continuously in the desired direction.
[0034] Therefore, the piezoelectric drive device 100 according to the embodiments of this disclosure has the advantages of simple structure, convenient control and high drive efficiency.
[0035] In some embodiments of this disclosure, the first piezoelectric element 21 has a first end connected to the frame 1 and a second end connected to a first side arm 131 of the deformable portion 13, and is configured to expand or contract to deform the deformable portion 13. The second piezoelectric element 22 has a first end connected to the frame 1 and a second end connected to a second side arm 132 of the deformable portion 13, and is configured to expand or contract to deform the deformable portion 13.
[0036] Furthermore, the second end of the first piezoelectric element 21 matches the first side arm 131 of the deformable portion 13 in shape and orientation, and the second end of the second piezoelectric element 22 matches the second side arm 132 of the deformable portion 13 in shape and orientation. For example, the second end of the first piezoelectric element 21 has a flat end face parallel to the flat outer surface of the first side arm 131 of the deformable portion 13, and the second end of the second piezoelectric element 22 has a flat end face parallel to the flat outer surface of the second side arm 132 of the deformable portion 13.
[0037] It should be noted that the first side arm 131, the second side arm 132 and the bottom arm 133 of the deformable part 13 form a closed cavity. Therefore, "inside" for the deformable part 13 here refers to the part facing the cavity, while "outside" for the deformable part 13 here refers to the part away from the cavity.
[0038] Furthermore, the direction of the first side arm 131 perpendicular to the deformable portion 13 intersects the extending direction of the bottom arm 133 of the deformable portion 13 at a first angle θ1, and the direction of the second side arm 132 perpendicular to the deformable portion 13 intersects the extending direction of the bottom arm 133 of the deformable portion 13 at a second angle θ2. Figure 1 As shown, the extension direction of the bottom arm 133 is horizontal.
[0039] In some embodiments of this disclosure, the first included angle θ1 between the direction of the first side arm 131 perpendicular to the deformable portion 13 and the extension direction of the bottom arm 133 of the deformable portion 13 ranges from 24 degrees to 26 degrees, and the second included angle θ2 between the direction of the second side arm 132 perpendicular to the deformable portion 13 and the extension direction of the bottom arm 133 of the deformable portion 13 ranges from 24 degrees to 26 degrees.
[0040] For example, the first included angle θ1 can be 24 degrees, 24.5 degrees, 25 degrees, 25.5 degrees or 26 degrees, and the second included angle θ2 can be 24 degrees, 24.5 degrees, 25 degrees, 25.5 degrees or 26 degrees.
[0041] Preferably, the first included angle θ1 is 25 degrees and the second included angle θ2 is 25 degrees.
[0042] Since the range of the first included angle θ1 and the second included angle θ2 is 24 to 26 degrees, the movable part 5 of the piezoelectric drive system 1000 can move stably and smoothly, and the piezoelectric drive device 100 can achieve high drive efficiency.
[0043] In some embodiments of this disclosure, such as Figure 1 As shown, the deformable part 13 is disposed in the middle of the frame 1 and has a symmetrical structure, that is, the first side arm 131 and the second side arm 132 are symmetrical. Thus, the first piezoelectric element 21 is symmetrical about the axis of symmetry of the deformable part 13 with the second piezoelectric element 22, and the first included angle θ1 and the second included angle θ2 are equal.
[0044] Therefore, the piezoelectric drive device 100 has a stable and strong overall structure, which enables the movable part 5 of the piezoelectric drive system 1000 to move smoothly and stably.
[0045] In some embodiments of this disclosure, the first piezoelectric element 21 and the second piezoelectric element 22 are configured to operate in a d33 mode. Here, d33 mode means that the piezoelectric materials have the same polarization direction and deformation direction. In other words, the polarization direction of the first piezoelectric element 21 is consistent with the deformation direction of the first piezoelectric element 21, and both directions are perpendicular to the first side arm 131 of the deformable portion 13. Similarly, the polarization direction of the second piezoelectric element 22 is consistent with the deformation direction of the second piezoelectric element 22, and both directions are perpendicular to the second side arm 132 of the deformable portion 13.
[0046] In some embodiments of this disclosure, the frame 1 further includes a body 15, a first side portion 11, and a second side portion 12. The first side portion 11 and the second side portion 12 extend from opposite ends of the body 15, respectively. A deformable portion 13 extends from the middle of the body 15 and is located between the first side portion 11 and the second side portion 12. The deformable portion 13 forms a first gap and a second gap with the first side portion 11 and the second side portion 12, respectively. A first piezoelectric element 21 is disposed in the first gap, and a second piezoelectric element 22 is disposed in the second gap. A first end of the first piezoelectric element 21 is connected to the first side portion 11, and a first end of the second piezoelectric element 22 is connected to the second side portion 12.
[0047] In some preferred embodiments of this disclosure, the body 15, the deformable portion 13, the first side portion 11, and the second side portion 12 are integral. Therefore, they are easy to manufacture and their structural strength can be improved.
[0048] like Figure 1 As shown, the frame 1 includes a horizontally extending body 15, a first side portion 11 disposed at the left end of the body 15, a second side portion 12 disposed at the right end of the body 15, and a deformable portion 13 located between the first side portion 11 and the second side portion 12.
[0049] The first piezoelectric element 21 is located between the first side portion 12 and the deformable portion 13. The first end of the first piezoelectric element 21 is the left end of the first piezoelectric element 21, and the second end of the first piezoelectric element 21 is the right end of the first piezoelectric element 21. The left end of the first piezoelectric element 21 is connected to the first side portion 11, and the right end of the first piezoelectric element 21 is connected to the first side arm 131 of the deformable portion 13.
[0050] The second piezoelectric element 22 is located between the second side portion 12 and the deformable portion 13. The first end of the second piezoelectric element 22 is the right end of the second piezoelectric element 22, and the second end of the second piezoelectric element 22 is the left end of the second piezoelectric element 22. The left end of the second piezoelectric element 22 is connected to the second side arm 132 of the deformable portion 13, and the right end of the second piezoelectric element 22 is connected to the second side portion 12.
[0051] In this manner, when the first piezoelectric element 21 is energized to expand along the direction perpendicular to the first side arm 131 of the deformable portion 13, the first side portion 11 restricts the movement of the left end of the first piezoelectric element 21, causing the right end of the first piezoelectric element 21 to press against the deformable portion 13 along the direction perpendicular to the first side arm 131 of the deformable portion 13, thereby deforming the deformable portion 13 accordingly. Similarly, when the second piezoelectric element 22 is energized to expand along the direction perpendicular to the second side arm 132 of the deformable portion 13, the second side portion 12 restricts the movement of the right end of the second piezoelectric element 22, causing the left end of the second piezoelectric element 22 to press against the deformable portion 13 along the direction perpendicular to the second side arm 132 of the deformable portion 13, thereby deforming the deformable portion 13 accordingly.
[0052] In some embodiments, such as Figure 1 As shown, the left side surface of the first side portion 11 can be vertical, and the right side surface of the first side portion 11 can be parallel to the outer surface of the first sidewall 131 of the deformable portion 13, so that the first piezoelectric element 21 can apply a stable and uniform force to the deformable portion 13. However, this disclosure is not limited to this. For example, the right side surface of the first side portion 11 can also be vertical, as long as the left end of the first piezoelectric element 21 has a flat end face parallel to the right side surface of the first side portion 11.
[0053] Similarly, such as Figure 1 As shown, the right side surface of the second side portion 12 can be vertical, and the left side surface of the second side portion 12 can be parallel to the outer surface of the second side arm 132 of the deformable portion 13, so that the second piezoelectric element 22 can apply a stable and uniform force to the deformable portion 13. However, this disclosure is not limited thereto. For example, the left side surface of the second side portion 12 can also be vertical, as long as the right end of the second piezoelectric element 22 has a flat end face parallel to the left side surface of the second side portion 12.
[0054] Furthermore, the first piezoelectric element 21 is bonded to the frame 1 and the deformable portion 13, and the second piezoelectric element 22 is bonded to the frame 1 and the deformable portion 13. For example, the left end of the first piezoelectric element 21 is bonded to the first side portion 11 with hard adhesive, the right end of the first piezoelectric element 21 is bonded to the deformable portion 13 with hard adhesive, the right end of the second piezoelectric element 22 is bonded to the second side portion 12 with hard adhesive, and the left end of the second piezoelectric element 22 is bonded to the deformable portion 13 with hard adhesive.
[0055] As a result, the connections between the first piezoelectric element 21 and the frame 1, between the first piezoelectric element 21 and the deformable part 13, between the second piezoelectric element 22 and the frame 1, and between the second piezoelectric element 22 and the deformable part 13 are firm and stable. Furthermore, the hard plastic does not easily absorb the expansion of the first piezoelectric element 21 and the second piezoelectric element 22, allowing the first piezoelectric element 21 and the second piezoelectric element 22 to press against the deformable part 13, thereby enabling the deformable part 13 to deform reliably and effectively.
[0056] Optionally, in the perpendicular to Figure 1 In the direction of the paper, the first piezoelectric element 21 includes multiple layers, and the second piezoelectric element 22 includes multiple layers. The number of layers in the first piezoelectric element 21 is equal to the number of layers in the second piezoelectric element 22. Each layer of the first piezoelectric element 21 is bonded to the frame 1 and the deformable portion 13, and each layer of the second piezoelectric element 22 is bonded to the frame 1 and the deformable portion 13. For example, the number of layers in the first piezoelectric element 21 and the number of layers in the second piezoelectric element 22 is 15. However, this disclosure is not limited thereto.
[0057] In some embodiments of this disclosure, the first end of the first side arm 131 and the first end of the second side arm 132 are connected to the body 15, and the bottom arm 133 is connected between the second end of the first side arm 131 and the second end of the second side arm 132.
[0058] like Figure 1 and 2 As shown, the first side arm 131 and the second side arm 132 extend downwards at an angle from the body 15, and the bottom arm 133 is horizontally arranged. The first end of the first side arm 131 is the upper end of the first side arm 131, and the second end of the first side arm 131 is the lower end of the first side arm 131. The first end of the second side arm 132 is the upper end of the second side arm 132, and the second end of the second side arm 132 is the lower end of the second side arm 132. The upper ends of the first side arm 131 and the upper ends of the second side arm 132 are both connected to the body 15. The lower end of the first side arm 131 is connected to the left end of the bottom arm 133, and the lower end of the second side arm 132 is connected to the right end of the bottom arm 133.
[0059] It should be noted that the terms "upper" and "lower" are used here to indicate the orientation in the accompanying drawings for ease of understanding of this disclosure, but should not be construed as a limitation of this disclosure.
[0060] Furthermore, the upper ends of the first side arm 131 and the second side arm 132 are spaced apart by a first distance in the extending direction of the bottom arm 133, and the lower ends of the first side arm 131 and the second side arm 132 are spaced apart by a second distance in the extending direction of the bottom arm 133. The first distance is shorter than the second distance to allow the deformable portion 13 to have a generally triangular shape or a generally "A" shape.
[0061] Therefore, the first side arm 131 and the second side arm 132 can deform almost independently, that is, they do not affect each other, so that the corresponding part of the bottom arm 133 can be driven to deform and move, thereby driving the corresponding actuator 31 to move accordingly.
[0062] Optionally, the upper end of the first side arm 131 is connected to the upper end of the second side arm 132. Therefore, the first side arm 131, the second side arm 132, and the bottom arm 133 are more like a triangle.
[0063] Therefore, due to the approximately triangular or approximately "A" shaped deformable portion 13, the right end of the first piezoelectric element 21 is lower than the left end of the first piezoelectric element 21, and the left end of the second piezoelectric element 22 is lower than the right end of the second piezoelectric element 22, thereby facilitating the action of the first piezoelectric element 21 and the second piezoelectric element 22 on the deformable portion 13.
[0064] In some embodiments of this disclosure, such as Figure 1 and 2 As shown, a first groove 141 is formed at the connection between the first side arm 131 and the body 15, a second groove 142 is formed at the connection between the second side arm 132 and the body 15, a third groove 143 is formed at the connection between the first side arm 131 and the bottom arm 133, and a fourth groove 144 is formed at the connection between the second side arm 132 and the bottom arm 133.
[0065] Furthermore, the first groove 141, the second groove 142, the third groove 143, and the fourth groove 144 all have arc-shaped cross-sections, which facilitates elastic deformation and reduces stiffness, thereby avoiding localized stress concentration. It should be noted that these grooves are perpendicular to... Figure 1 and 2 It extends in the direction of the paper surface.
[0066] This method makes it easier for the first side arm 131, the second side arm 132, and the bottom arm 133 to deform without failure.
[0067] In addition, a fifth groove 145 with the same arc-shaped cross-section can be formed in the middle of the bottom arm 133 to facilitate the independent movement of the left and right ends of the bottom arm 133, thereby allowing the actuators 31 provided at the left and right ends of the bottom arm 133 to move separately without affecting each other.
[0068] In some embodiments of this disclosure, two actuators 31 may be provided, and the two actuators 31 are respectively disposed at the second end (lower end) of the first side arm 131 and the second end (lower end) of the second side arm 132.
[0069] In some other embodiments of this disclosure, such as Figure 1 and 2 As shown, two actuating parts 31 are provided, and the two actuating parts 31 are disposed on the bottom arm 133 and are respectively adjacent to the second end (lower end) of the first side arm 131 and the second end (lower end) of the second side arm 132. In other words, the two actuating parts 31 are respectively disposed at the left end and the right end of the bottom arm 133.
[0070] In either of the above cases, the two actuators 31 are symmetrical about the centerline of the base arm 133, which is perpendicular to the extending direction of the base arm 133. In other words, the centerline of the base arm 133 is vertical. Furthermore, the first piezoelectric element 21 can drive the movable member 5 of the piezoelectric drive system 1000 to move via the actuator 31 on the left, and the second piezoelectric element 22 can drive the movable member 5 of the piezoelectric drive system 1000 to move via the actuator 31 on the right.
[0071] Therefore, a large movement of the movable member 5 of the piezoelectric drive system 1000 can be achieved through a small deformation of the deformable portion 13. In other words, a small expansion of the first piezoelectric element 21 or the second piezoelectric element 22 can generate a large movement of the movable member 5 of the piezoelectric drive system 1000. Therefore, high drive efficiency can be achieved.
[0072] In some embodiments of this disclosure, an actuation part 31 may be provided, and an actuation part 31 is disposed on the base arm 133. Preferably, an actuation part 31 is disposed at the center of the surface of the base arm 133. Therefore, an actuation part 31 can be shared by the first piezoelectric element 21 and the second piezoelectric element 22 to realize the movement of the movable part 5 of the piezoelectric drive system 1000 in opposite directions, saving materials and thereby reducing costs.
[0073] Furthermore, the above-described embodiments of the actuation part 31 can be combined arbitrarily without conflict. For example, three actuation parts 31 can be provided, with one actuation part 31 provided on the bottom arm 133, and the other two actuation parts 31 provided at the lower end of the first side arm 131 and the lower end of the second side arm 132, respectively, or provided on the bottom arm 133 and respectively adjacent to the lower end of the first side arm 131 and the lower end of the second side arm 133.
[0074] In some embodiments of this disclosure, the actuating part 31 protrudes from the bottom arm 133 of the deformable part 13 and has a spherical cap shape.
[0075] Therefore, the surface of the actuator 31 is spherical to ensure stable contact with the movable part 5 of the piezoelectric drive system 1000, thereby ensuring the stable movement of the movable part 5 of the piezoelectric drive system 1000.
[0076] Furthermore, the frame 1 is made of ceramic material, and the actuating part 31 is also made of ceramic material. The deformable part 13 of the frame 1 is integrally formed with the actuating part 31. Ceramic material has excellent wear resistance, which gives the frame 1 and the actuating part 31 a long service life. Since the frame 1 and the actuating part 31 are integrally formed, they are easy to process and the connection strength between them can be guaranteed.
[0077] This disclosure also provides a piezoelectric drive system 1000, such as... Figure 3 As shown. The piezoelectric drive system 1000 includes a piezoelectric drive device 100 according to any of the above embodiments, a retaining spring 4, and a movable member 5. The movable member 5 is configured to cooperate with the actuation part 31 of the piezoelectric drive device 100 and move under the drive of the actuation part 31. The retaining spring 4 is disposed on the piezoelectric drive device 100 and configured to retain the piezoelectric drive device 100 to press the actuation part 31 against the movable member 5.
[0078] In some embodiments of this disclosure, the retaining spring 4 has an open rectangular shape to enclose the piezoelectric drive device 100 therein, and includes a flange 41 surrounding its opening, and the flange 41 of the retaining spring 4 is fixed. The retaining spring 4 also has a bottom 42 facing its opening. The bottom 42 of the retaining spring 4 deforms toward the frame 1 of the piezoelectric drive device 100 and is connected to the frame 1 of the piezoelectric drive device 100 by adhesive or riveting. Therefore, the retaining spring 4 can apply pressure to the piezoelectric drive device 100 to press the actuating part 31 against the movable member 5. For example, the pressure applied by the retaining spring 4 is approximately 200 mN.
[0079] like Figure 3 As shown, although the movable member 5 is also enclosed within the retaining spring 4, this disclosure is not limited thereto. For example, at least a portion of the movable member 5 may also be disposed outside the retaining spring 4.
[0080] In some embodiments of this disclosure, when the outer peripheral surface of the movable member 5 is flat, the actuator 31 will drive the movable member 5 to translate; when the outer peripheral surface of the movable member 5 is bent, the actuator 31 will drive the movable member 5 to rotate.
[0081] The working process of the piezoelectric drive system 1000 is briefly described below using the first piezoelectric element 21 as an example. Two actuators 31 are disposed on the bottom arm 133 and are respectively adjacent to the lower ends of the first side arm 13 and the second side arm 132. Figure 1 and Figure 2 As shown.
[0082] When energized, the first piezoelectric element 21 expands along a direction perpendicular to the first side arm 131 of the deformable portion 13. During expansion, the first piezoelectric element 21 presses against the deformable portion 13 along a direction perpendicular to the first side wall 131, forcing the first side arm 131 of the deformable portion 13 to deform to the right and downward. Then, the first side arm 131 drives the bottom arm 133 to deform and move to the right and downward. The bottom arm 133 further drives the actuator 31 adjacent to the lower end of the first side arm 131 to move to the right and downward. The actuator 31 abuts against the movable member 5 and applies a driving force to the movable member 5. The driving force applied by the actuator 31 has a rightward component and a downward component. Therefore, the movable member 5 is driven to move to the right. However, during the above-described expansion process of the first piezoelectric element 21, since the second piezoelectric element 22 is not energized, the second side arm 132 of the deformable portion 13 does not deform, and therefore the other actuator 31 adjacent to the lower end of the second side arm 132 does not move.
[0083] When power is off, the first piezoelectric element 21 contracts, thereby driving the actuator 31 to move to the left and upward. Since the direction perpendicular to the first side arm 131 of the deformable portion 13 intersects the extension direction of the bottom arm 133 of the deformable portion 13 at a first angle θ1, and the first angle θ1 ranges from 24 to 26 degrees, the actuator 31, moving to the left and upward, cannot apply a driving force to the movable member 5. Microscopically, the actuator 31, moving to the left and upward, is even separated from the movable member 5. Therefore, the movable member 5 does not move with the actuator 31 but remains in its position. In this way, the piezoelectric drive system 1000 completes one motion cycle. Periodic pulse signals can be applied to the first piezoelectric element 21, so that the first piezoelectric element 21 can alternately perform the movements of expanding when energized and contracting when de-energized. As the motion cycle repeats, the movable member 5 will continuously move to the right under the drive of the actuator 31.
[0084] The operation of the second piezoelectric element 22 is basically the same as that of the first piezoelectric element 21, except that the direction of movement of the movable member 5 when the first piezoelectric element 21 is working is opposite to that when the second piezoelectric element 22 is working. For example, the first piezoelectric element 21 drives the movable member 5 to move to the right, and the second piezoelectric element 22 drives the movable member 5 to move to the left. In some other embodiments of this disclosure, the first piezoelectric element 21 can drive the movable member 5 to move clockwise, and the second piezoelectric element 22 can drive the movable member 5 to move counterclockwise. Furthermore, only one of the first piezoelectric element 21 and the second piezoelectric element 22 operates at any given time. In other words, the first piezoelectric element 21 and the second piezoelectric element 22 operate in a mutually exclusive manner.
[0085] According to the above embodiments of this disclosure, the piezoelectric drive system 1000 has the advantages of simple structure, convenient control, and high drive efficiency.
[0086] In the description of this disclosure, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.
[0087] In this specification, the use of terms such as "embodiment," "specific embodiment," and "example" refers to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of this disclosure. The illustrative expressions of the above terms in this specification do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.
[0088] Although embodiments of the present disclosure have been shown and described above, those skilled in the art will understand that variations, modifications, substitutions, and alterations may be made to the embodiments without departing from the principles and purposes of the present disclosure. The scope of the present disclosure is defined by the claims and their equivalents.
Claims
1. A piezoelectric drive device, comprising: A frame, the frame including a deformable portion, the deformable portion including a first side arm, a second side arm opposite to the first side arm, and a bottom arm connecting the first side arm and the second side arm, the first side arm and the second side arm being inclined toward each other relative to the bottom arm; A first piezoelectric element and a second piezoelectric element, the first piezoelectric element being disposed between the frame and the first side arm of the deformable portion, and the second piezoelectric element being disposed between the frame and the second side arm of the deformable portion, the first piezoelectric element and the second piezoelectric element being configured to deform the deformable portion; and An actuating part is disposed on the bottom arm of the deformable part and configured to move under the drive of the deformation of the deformable part; The framework also includes: an ontology; The first end of the first side arm and the first end of the second side arm are connected to the body, and the bottom arm is connected between the second end of the first side arm and the second end of the second side arm. The first end of the first side arm and the first end of the second side arm are spaced apart by a first distance in the extending direction of the bottom arm, and the second end of the first side arm and the second end of the second side arm are spaced apart by a second distance in the extending direction of the bottom arm. The first distance is shorter than the second distance to allow the deformable portion to have a generally triangular shape or a generally "A" shape; The first side arm, the second side arm, and the bottom arm of the deformable part form a closed cavity.
2. The piezoelectric drive device according to claim 1, wherein, The first piezoelectric element has a first end connected to the frame and a second end connected to the first side arm of the deformable portion, and the first piezoelectric element is configured to expand or contract to deform the deformable portion. The second piezoelectric element has a first end connected to the frame and a second end connected to the second side arm of the deformable portion, and the second piezoelectric element is configured to expand or contract to deform the deformable portion.
3. The piezoelectric drive device according to claim 2, wherein, The second end of the first piezoelectric element matches the first side arm of the deformable portion in shape and orientation, and the second end of the second piezoelectric element matches the second side arm of the deformable portion in shape and orientation. The direction of the first side arm perpendicular to the deformable part intersects the extension direction of the bottom arm of the deformable part at a first angle, and the direction of the second side arm perpendicular to the deformable part intersects the extension direction of the bottom arm of the deformable part at a second angle.
4. The piezoelectric drive device according to claim 2 or 3, wherein, The framework also includes: The first side portion and the second side portion extend from opposite ends of the body, respectively. The deformable portion extends from the middle of the body and is located between the first side and the second side. The deformable portion forms a first gap and a second gap with the first side and the second side, respectively. The first piezoelectric element is disposed in the first gap, and the second piezoelectric element is disposed in the second gap. The first end of the first piezoelectric element is connected to the first side, and the first end of the second piezoelectric element is connected to the second side.
5. The piezoelectric drive device according to claim 1, wherein, A first groove is formed at the connection between the first side arm and the body, a second groove is formed at the connection between the second side arm and the body, a third groove is formed at the connection between the first side arm and the bottom arm, and a fourth groove is formed at the connection between the second side arm and the bottom arm.
6. The piezoelectric drive device according to claim 1 or 5, wherein, It is provided with two actuating parts, which are respectively disposed at the second end of the first side arm and the second end of the second side arm; or Two actuating parts are provided and are disposed on the bottom arm and are respectively adjacent to the second end of the first side arm and the second end of the second side arm.
7. The piezoelectric drive device according to claim 6, wherein, The two actuators are symmetrical about the centerline of the bottom arm, which is perpendicular to the extension direction of the bottom arm.
8. The piezoelectric drive device according to any one of claims 1-3, wherein, An actuating part is provided and is disposed on the bottom arm.
9. The piezoelectric drive device according to any one of claims 1-3, wherein, The actuating part protrudes from the bottom arm of the deformable part and has a spherical cap shape.
10. The piezoelectric drive device according to any one of claims 1-3, wherein, The first piezoelectric element and the second piezoelectric element are configured to operate in d33 mode.
11. The piezoelectric drive device according to any one of claims 3, wherein, The first angle between the direction of the first side arm perpendicular to the deformable part and the extension direction of the bottom arm of the deformable part ranges from 24 degrees to 26 degrees, and the second angle between the direction of the second side arm perpendicular to the deformable part and the extension direction of the bottom arm of the deformable part ranges from 24 degrees to 26 degrees.
12. The piezoelectric drive device according to any one of claims 3, wherein, The deformable portion is located in the middle of the frame and has a symmetrical structure, wherein the first side arm and the second side arm are symmetrical to each other. The first piezoelectric element is symmetrical with respect to the axis of symmetry of the deformable part and the second piezoelectric element, and the first included angle and the second included angle are equal.
13. The piezoelectric drive device according to any one of claims 1-3, wherein, The frame is made of ceramic material, the actuating part is made of ceramic material, and the deformable part of the frame is integrally formed with the actuating part.
14. The piezoelectric drive device according to any one of claims 1-3, wherein, The first piezoelectric element is bonded to the frame and the deformable portion, and the second piezoelectric element is bonded to the frame and the deformable portion.
15. A piezoelectric drive system, comprising: The piezoelectric drive device according to any one of claims 1-14; A movable member configured to cooperate with the actuation part of the piezoelectric drive device and move under the drive of the actuation part; and A retaining spring is disposed on the piezoelectric drive device and configured to retain the piezoelectric drive device to press the actuating part against the movable member.
Citation Information
Patent Citations
Compact Piezoelectric Inertial Drive Stage
US20190229647A1